US2837654A - Process and apparatus for carrying out reactions by the action of electrical glow discharges - Google Patents

Process and apparatus for carrying out reactions by the action of electrical glow discharges Download PDF

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US2837654A
US2837654A US506752A US50675255A US2837654A US 2837654 A US2837654 A US 2837654A US 506752 A US506752 A US 506752A US 50675255 A US50675255 A US 50675255A US 2837654 A US2837654 A US 2837654A
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gas
chamber
zone
pressure
nozzle
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Berghaus Bernhard
Bucek Hans
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Elektrophysikalische Anstalt Bernhard Berghaus
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Elektrophysikalische Anstalt Bernhard Berghaus
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S422/00—Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
    • Y10S422/907—Corona or glow discharge means

Definitions

  • This invention relates to a process and apparatus for carrying out reactions on gaseous, vapourous, or finely dispersed substances, under the action of electrical glow discharges in a reaction receptacle provided with electrodes, at least one supply device for the starting substances, and at least one gas suction device.
  • the glow discharge whichis produced follows the known laws, according to which an increase in the energy of the glow discharge necessarily produces a pressure increase in the discharge receptacle, which, in its turn, results in a gradual concentration of the energetic discharge upon the glow covering the parts to which a voltage is applied.
  • the energy transformation can thus be greatly increased with increase in pressure if the glow discharge is prevented from passing into an arc dischargethe energy is freed only in the immediate surrounding of material surfaces.
  • the object of the present invention is to produce such a glow discharge and it relates to a process for carrying out reactions on gaseous, vapourous or finely dispersed substances by the action of electrical glow discharges in a reaction receptacle with electrodes, at least one gas suction connection and at least a device for the supply of material to be treated.
  • the characteristic feature thereof is that a non-homogeneous distribution of pressure is produced inside the receptacle, whereby a predetermined zone of high pressure is produced, within which up to 90% of the pressure drop is localised.
  • the energy of the electrical gas discharge is largely concentrated in this zone.
  • the starting substances flow through this zone and can reach into the zone of lower pressure only along this path, whereby the supplied substances remain in the said zone for a predetermined time.
  • the invention also relates to an apparatus for carrying out this process consisting of a reaction receptacle with at least one insulated electrode introduced therein, at least one connection for the supply of gas into the receptacle and at least one gas outlet connection.
  • the characteristic feature thereof is that it comprises at least which'opens into the interior of the receptacle in such 2 r i one supply member with at least one nozzle-like opening,
  • a further characteristic consists in at least. one outlet member connected with a pump and providing a predetermined reduced pressure at least in the region of the inner space of thereaction receptacle which is adjacent thereto.
  • Figure l is a diagrammatic representation of the principle of a discharge receptacle for carrying out the process
  • Figures 2 and 3 show partly in longitudinal section a supply member to the reaction receptacle
  • Figures 4 to 8 show respectively a further embodiment of a reaction receptacle suitable for carrying out the presout process; and a Figure 9 is a diagram of the progress of the pressure and a general diagram of one example of construction of the apparatus for carrying out the process.
  • Figure 1 shows one example of construction of a re- Patented June 3, 1958 action vessel 1 made of insulating material or of metal for producing a discharge according to the present process.
  • a supply member 2 madefor instance of metal and provided with an elongated nozzle-like opening 3 is introduced in an insulated manner into the vessel 1.
  • a gas suction member 4, indicated simply as a small connecting pipe, is connected to a suitable'pumping device (not shown) so that .a desired reduced, pressure can be produced in the interior of the receptacle.
  • a counter-electrode 6 is mounted in the receptacle 1, the same being introduced in an insulated manner through the wall of the receptacle and connected throughfthe connector 7 to the other pole of the said source of voltage.
  • An essential feature according to the present process is that within the discharge receptacle 1 there is produce a non-homogeneous pressure distribution, and there- 'by a zone of increased pressure.
  • a predetermined reduced pressure P (Fig. 9) is maintained in the reaction receptacle 1 by the suction member 4-, whilst providing for an adequate pump power by the pumping device that is connected up, at least in the immediate surrounding of the openingof the suction member, and at the same time a current of gas is introduced through the nozzle-like opening 3 of the supply member.
  • Such isobars 8a, 8b, 8c are illustrated diagrammatically in Figure l for a zone of increased pressure rotationally symmetrical with respect to the axis of the nozzle, whereby however, the radial extension of the spindle-like shaped surfaces of equal pressure are shown, for the sake of clearness, on a larger scale compared with the actual shape. Moreover, for the same reason, the deformations of increased pressure occuring mostly directly next to the mouth are not shown.
  • the supply of energy for the discharge over the electrodes 2 and 6 can be increased to a value which causes, at least in the parts of the zone of increased pressure a light emitting discharge phenomenon.
  • This luminous phenomenon within the zone of increased pressure is developed from the usual glow discharge at the cathode but, as a luminous zone free in the gas space, it is structurally diflferent from all the glow discharge phenomena hitherto known in the gas space.
  • the appearance and the shapeof the luminous zone is approximately determined by the surfaces 8a to 8c of the zone of increased pressure, but it is only occassionally seen as a layer within the luminous appearance.
  • the spectrum scale of the emission of light is mainly determined by the reactions Which take place in the zone of increased pressure.
  • the light emitting areas within the zone of increased pressure are not the only ones that come into question for the present purpose, namely, for carrying out reactions; the actual reaction zone rather extends over the whole zone of increased pressure and its direct surrounding.
  • the zone which is in the neighbourhood of the nozzle wherein up to about of the whole pressure drop is localised is, as already mentioned, the zone of increased pressure.
  • the shape of the reaction zone depends to a large extent on the spacial shape of the surfaces 8 which areof equal pressure, although the reaction zone need not be identical therewith.
  • An essential feature of this form of the discharge consists, however, in the sharp delineation of the zone of high energy transformation with respect to its surrounding with low energy transformation.
  • This property of the reaction zone produced by the process according to the invention which zone is very advantageous when carrying out reacti0nsas will hereinafter be describeddepends, on the one hand, on the exponential curve of the pressure drop from the interior to the edge of the zone of increased pressure and, on the other hand, on the known law concerning the dependence of the energy of gas discharges upon pressure, according to which, the energy transformation increases with approximately the third power as a function of the gas pressure.
  • the spacial shape of the surfaces 8 of equal pressure depends to a large extent upon the shape of the nozzle 3 and its mouth, as well as upon the speed of the outflow of the gas current from the opening of the nozzle, viz., from the total pressure difference (P -P Within the reaction receptacle. If a high concentration of energy is desired, and therefore a small Volume of the reaction zone, it is advisable to introduce a thread-like gas jet into the reaction receptacle. If, on the other hand, a reaction zone of larger dimensions is wanted, the same may be produced by means of a comically shaped gas jet.
  • the nozzle 3 is constructed as a cylindrical elongated bore in the supply member 2, and in the other case the supply men. er 2 is provided, either with a rose-like head with a plurality of individual bores having different spacial directions, or with only one nozzle with conical formation of the jet outlet.
  • the gas current entering the reaction receptacle forms freely and unobstructed a generally elongated zone of increased pressure next to the mouth of the nozzle 3, which abuts all round against the surroundings of reduced pressure.
  • a zone of increased pressure for instance as shown in Figure 1 by the isobars 8a, 8b, 8c, a particle moving along the axis of the jet stays naturally a longer period of time within the zone of increased pressure than a particle following a curved path, and leaves the zone of increased pressure already in the proximity of the mouth. If this is not desired, it is possible to influence the shape of the zone of increased pressure as well as the period of staying in the gas current and its parts by means of adjacent solid walls. For instance, by using such walls an elongated channel may be formed through which the gas flows.
  • the channel may be of any desired section.
  • FIG. 2 One example of construction of a supply member 2 with a cylindrical bore serving as a nozzle 3, and a cylindrical continuation 10 for producing the zone of increased pressure, is diagrammatically illustrated in Figure 2.
  • walls in the shape of baffle plates may also be provided, by means of which the gas current is deflected, as is shown in Figure 3, in which a baffle member 12 is arranged opposite the head 11 of the supply member 2 in the form of a rose.
  • a reduced pressure P mm. Hg was, for instance, maintained with a suction output of about 400 litres per minute and a gas current was led through a cylindrical nozzle of about 1 mm. diameter into the reaction receptacle.
  • a pressure of about P 0.5 kg./cm. and an inlet speed of the current of the order of 500 m./sec.
  • a luminous region within the zone of increased pressure about 80 mm. long with a diameter of 2 mm.
  • Hg and a correspondingly greater increased pressure P of the incoming gas current which, it is true, is of substantially smaller spacial dimensions, but likewise shows a concentration of energy of the discharge in this zone, producing a luminous appearance, which cearly diifers from the very thin layer of glow, present under such pressure conditions in the supply member serving as cathode.
  • the speed of the gas current at the outlet of the mouth of the nozzle is dependent upon the pressure drop P :P
  • This current speed ought to be at least one-tenth of the speed of sound but, with a sufficiently reduced pressure P and great pressure drop P :P it may increase up to a multiple of the speed of sound.
  • the choice of the speed of the current depends upon the time desired for the current to remain within the reaction zone.
  • this zone In order to obtain the desired electric discharge and concentration of the transformation of energy thereof in the zone of increased pressure, this zone must be produced in a region of the" reaction vessel which is at least partly under the action of an electric field.
  • This field is preferably obtained by means of a direct current voltage between suitable electrodes, whereby an action of the reaction zone is obtained which is temporarily constant.
  • the process is not limited thereto, but may be carried out by using a voltage of constant polarity which is not temporarily constant or by using an alternating current voltage.
  • the current of gas may flow from the nozzle 3 of the supply member 2 into the receptacle at right angles to the direction of the field, which, in this case, is produced between the electrodes 13 and 14.
  • the two electrodes are connected througn the terminal 15 and 16 with the poles of a direct or alternating source of voltage, whilst the supply member 2 has no electrical connection with the supply circuits.
  • the supply member 2 may, in this case, consist wholly or partly of electrically insulating material or of a metal member connected with the reaction receptacle 1.
  • the supply member 2 is of metal and mounted in an insulated manner in the reaction receptacle 1, the same may be connected through a terminal 5 with the middle conductor of a two-phase alternating current supply, the two phases of which feed the electrodes 13 and 14 by their respective connections to the terminals 15 and 16.
  • the distance between the electrodes, viz. 6 in Figure l, and 13 and 14 in Figure 2, in the zone of increased pressure formed next to the nozzle openings, is not of much importance as regards the energy concentration within this zone.
  • the distance can be reduced to such an extent that the electrodes abut directly against the discharge zone of high concentration of energy.
  • the reaction receptacle consists, for example, of a container 17 of insulating 1 material and a metal cover 18, which forms an electrode and is connected with the terminal 19 to the one pole of a source of current.
  • a second electrode 20 which, in this case, is constructed, for instance, as acoaxial metal ring which is connected through the terminal 21 to the other pole of the source of voltage.
  • member 2 may be of insulating material and requires The supply no conducting connection with the source of voltage. If desired, also the supply member 2 may be made of metal and be connected through its terminal with the terminal 19 in parallel.
  • the solid walls serving to produce the shape of the zone of increased pressure may also be made wholly or partly of metal and be used as electrodes.
  • a baffie plate for instance 12 as shown in Figure 3
  • the electrodes in so far as they are not used at the same time as supply members, may be constructed to serve as suction members, for instance as is indicated in section in connection with the electrode 14 in Figure 4. Bafi'les and other walls may also be so arranged that they can be used for suction.
  • Figures 1, 4 and 5 show only one supply member 2.
  • Figure 6 shows a reaction receptacle 1 with two supply members 2a and 2b, which are introduced in an insulated manner into the metal reaction receptacle 1 and are connected through the connections 5a and 5b respectively with the two poles of a source of voltage.
  • two zones of increased pressure are produced within the reaction receptacle 1 whereby a current of gas enters it through the nozzles of the two supply members 2a and 2b, within which receptacle a predetermined reduced pressure is maintained by means of a suction member 4.
  • reaction receptacle 1 It is also possible to produce more zones of increased pressure in the reaction receptacle 1, for instance 3 as shown in Figure 7.
  • the three supply members 2a, 2b and 2c are connected either all in parallel to the same pole of a source of voltage, the other pole of which is connected to the counterelectrode 23, or the three nozzles are fed from the three phases of a three-phase supply, the star point of which is connected to the counterelectrode 23.
  • the arrangement shown in Figure 8 is especially advantageous, wherein only one supply member 2, shown'in this case with the axis of the nozzle at right angles to the plane of the drawing, is provided but used in conjunction with three counterelectrodes 24a, 24b and 24c.
  • the three electrodes 24a, 24b and 24c are connected through the terminals 25a, 25b, 25c to the three three-phases of the three-phase current and the supply member 2 is connected to the star point.
  • the increased pressure for carrying out reactions within the zone, and the associated reaction components provided in their immediate surroundings, are preferably combined with the gas current which enters into the reaction receptacle through the supply members and their nozzle-like openings, forming therein the zone of increased pressure.
  • the current of gas itself may be a carrier gas which does not participate in the reaction, for instance a rare gas, which is added to the vapourous or finely dispersed solid and liquid substances to be treated.
  • a supply member as shown, for instance, in Figure 2 is suitable for this purpose, to which the carrier gas is supplied through the backward terminal, and the' substances to be treated through the pipe connection 25.
  • more than one associated reaction component may be taken along by the carrier gas, for instance, a gas to be treated, and at the same time a finely dispersed substance, for instance, a metal powder which acts catalytically in the reaction.
  • the carrier gas which does not participate in the reaction may be entirely dispensed with.
  • the current of gas is a unitary gas and the only associated reaction component.
  • the speed of the current of gas flowing out of the nozzle opening is of the order of the speed of sound or higher.
  • This causes, on the one hand, the stay of the gas within the reaction zone to be of very short durationwhich is desirable for many reactionsand, on the other hand, the reaction products to flow very rapidly out of the reaction zone.
  • This results in a very rapid lowering of the temperature and of the volume concentration, that is to say a correspondingly reduced reaction ability of these products.
  • the reaction products are prevented from reverting into their starting substances, as well as from possibly further disintegrating.
  • Gaseous reaction products which flow out of the zone of increased pressure into the surroundings, are removed from the receptacle through the suction members which are provided in order to maintain the desired reduced pressure in the reaction receptacle.
  • a suitable separator for the reaction products may be provided in the suction pipe.
  • reaction products are produced within the reaction zone, more particularly at a definite pressure and energy level, the same may be removed therefrom directly through separate suction members, for instance by a vertical pipe 9 with a perforated annular tube acting as a suction nozzle as indicated in Figure 1.
  • such gaseous products may be supplied again to the same reaction receptacle, in order to be subjected to the same process more than once.
  • the separation of certain reaction products may be etfected on walls arranged in the immediate surroundings of the reaction zone, or even project'therein. If, for instance, condensation is intended to take place on these walls, the same may be provided with hollow spaces 27 for the passage of a current of cooling means, for instance the batlle 12 shown in Figure 3. In addition to producing condensation, chemical reactions may be caused to take place on such walls, for which purpose, if desired, layers of catalyst may be provided thereon.
  • such walls may be constituted by rotary members and be provided with a drive, so that the walls pass along stationary scraping devices;
  • the pressure diagram of Figure 9 shows the important differences of the above described operation of a reaction receptacle for the carrying out of reactions under the action of an electric discharge as compared with the processes hitherto known.
  • the characteristic of the pressure indi cated in dotted lines in the pressure diagram, shows a practically homogeneous pressure distribution within the reaction receptacle. Consequently, in the case of such an operation, no zone of marked increased pressure can be produced within which the pressure drop P :P is mostly localised. This however makes it impossible for the energy concentration of the discharge to be effected in a predetermined part of the installation.
  • Process for producing an electric glow discharge within a reaction chamber provided with a gas suction connection and with a nozzle-like gas supply conduit comprising introducing a gas stream into the reaction chamber by way of the gas supply conduit and subjecting the gas stream to an electric field at least at portions thereof, the supplied and withdrawn quantities ofgas being so related that a pressure drop occurs in the gas stream, at least at the electrically influenced regions, sufficient for maintaining a glow discharge.
  • Process for producing an electric glow discharge within a reaction chamber provided with a gas suction connection and with a nozzle-like gas supply conduit comprising introducing a gas stream into the reaction chamber by way of the gas supply conduit and subjecting the gas streamto an electric field at leastat portions thereof, the supplied and withdrawn quantities of gas being so related that in the gas stream,v at leastin" the electrically influenced regions, between the core of the gas stream and the gas in the remainder of the reaction chamber a pressure drop of more than 2:1 iscreated and producing a glow discharge and maintaining the same in such reduced pressure zone by regulating the electric field strength.
  • Apparatus for producing an electric glow discharge comprising a metallic chamber, a gas suction conduit connected with the chamber, a gas supply conduit connected to the chamber, said gas supply conduit terminating in a nozzle-like opening within the interior of the chamher, said opening being so shaped that a current of gas is injected into the interior 'of the chamber, in the form of a thread-like gas stream, the gas supply conduit being composed of metal and insulated with respect to the metallic wall of the chamber, said conduit being connected externally of the chamber to one pole of a source of current Whose other pole is connected with the chamber wall.
  • Apparatus for producing an electric glow discharge comprising a metallic chamber, a gas suction conduit connected with the chamber, a gas supply conduit connected to the chamber, said gas supply conduit opening with a round nozzle-like bore in a coaxial tube whose inner diameter is greater than the diameter of the bore and debouches at its free end into the interior of the chamber, said tube being made of metal and being insulated from the metallic wall of the chamber, and being connected externallyof the chamber to one pole of a current source whose other pole is connected with the chamber wall.
  • Apparatus for producing an electric glow discharge comprising a chamber composed at least in part of metal, a gas suction device connected to the chamber, a gas supply conduit passing through the wall of the chamber,
  • said gas conduit being provided with a nozzle-like open ing dobouching into the interior of the chamber and so constructed that the gas is injected by the gas conduit into the chamber inthe form of a gas stream, and a metallic part disposed downstream with reference to the gas conduit, said gas conduit being composed of metal and being insulated from said metallic part, said metallic part being connected outside of thechamber with a pole of a source of current Whose other pole is connected to the metallic gas conduit.
  • Apparatus for producing an electric glow discharge comprising a chamber composed at least in part of metal, a gas suction device connected to the chamber, a gas supply conduit passing through the, wall of the chamber, said gas conduit being provided with a nozzle-like opening debouching into the interior of the chamber and so constructed that the gas is injected by the gas conduit into the chamber in the form-of a gas stream, and a.
  • said gas conduit being composed of metal and being insulated from said metallic part, said metallic part being connected outside of the chamber with a pole of a sourceof current whose other pole is connected to the metallic gas conduit, said metallic part being provided with an opening arranged coaxially with the gas stream, said gas suction device communicating with the interior of the chamber through said last-mentioned opening.
  • a tubular metallic chamber comprising a tubular metallic chamber, an insulated current connection passing through the wall of the chamber, a gas supply conduit and a gas discharge device communicating with the interior of the chamber at opposite ends thereof, the gas supply conduit debouching into the chamber through an opening which is so constructed that the gas is discharged into the chamber in the form of a gas stream which leaves the chamber at the other end thereof, the tubular chamber together with the gas supply conduit being connected with one pole of a source of current, and a counterelectrode disposed within the chamber and connected with the other pole of said source of current through said insulated current connection.
  • Process for the treatment of gaseous, vaporous and finely dispersed substances in an electrical glow discharge in a reaction chamber provided with a gas suction device and with a nozzle-like gas supply conduit comprising injecting the substance to be treated into the chamber through the nozzle in the form of a gas stream, subjecting the gas stream within the chamber to an electric field, simultaneously withdrawing gaseous material from the chamber, so regulating the quantities of gaseous substance conducted to and withdrawn from the chamber that within at least the electrically influenced part of the gas stream there is provided a pressure drop capable of maintaining an electric glow discharge, the substance carried along in the gas stream flowing through the glow discharge zone and being capable of leaving the gas stream only along this path and regulating the speed of the gas stream to provide a predetermined time of passage of the carried-along substance in the discharge zone.
  • Process for the treatment of gaseous, vaporous and finely dispersed substances in an electrical glow discharge in a reaction chamber provided with a gas suction device and with a nozzle-like gas supply conduit comprising injecting the substance to be treated together with a carrier gas into the chamber through the nozzle in the form of a gas stream, subjecting the gas stream within the chamber to an electric field, simultaneously withdrawing gaseous material from the chamber, so regulating the quantities of gaseous substances conducted to and withdrawn from the chamber that within at least the electrically influenced part of the gas stream there is provided a pressure drop capable of maintaining an electric glow discharge, the substance carried along by the carrier gas flowing through such discharge zone and being acted on by the discharge, and thereafter leaving the gas stream together with the chemically unchanged carrier gas, and regulating the speed of the gas stream to provide a predetermined time of passage of the carried-along substance in the discharge zone.
  • Process for the treatment of gaseous, vaporous and finely dispersed substances in an electrical glow discharge in a reaction chamber provided with a gas suction device and with a nozzle-like gas supply conduit comprising injecting the substance to be treated into the chamber through the nozzle in the form of a gas stream, subjecting the gas stream within the chamber to an electric field, so regulating the quantities of gaseous substance conducted to and withdrawn from the chamber that within at least the electrically influenced part of the gas stream there is provided a pressure drop capable of maintaining an electric glow discharge, the substance carried along in the gas stream flowing through such discharge zone and being chemically altered by the discharge, removing such chemically altered substance from Within the gas stream, and regulating the speed of the gas stream in relation to the point of removal of the chemically altered substance along the axis of the gas stream to provide a predetermined time of passage of the carried-along substance in the discharge zone.
  • irocess for the treatment of gaseous, vaporous and finely dispersed substances in an electrical glow discharge in a reaction chamber provided witha gas suction device and with a nozzle-like gas supply conduit comprising injecting a gas stream into the chamber through the nozzle, subjecting the gas stream within the chamber to an electrical field, simultaneously withdrawing gaseous material from the chamber, so regulating the quantities of gaseous substances conducted to and withdrawn from the chamber that within at least the electrically influenced part of the gas stream there is provided a pressure drop capable of maintaining an electric glow discharge, charging a substance to be treated into the gas stream, so that it is carried along by the latter through the discharge zone and can leave the gas stream only in this way, and regulating the speed of the gas stream to provide a predetermined time of passage of the carried-along substance in the discharge zone.
  • Apparatus for producing an electric glow discharge comprising a metallic chamber, an insulated current connection passing through the wall of the chamber, a gas suction conduit connected with the chamber, a gas supply conduit connected to the chamber, said gas supply conduit terminating in a nozzle-like opening within the interior of the chamber, said opening being so shaped that a current of gas is injected into the interior of the chamber in the form of a thread-like gas stream, and an electrode positioned transversely to the axis of the nozzle and spaced apart from the mouth of the nozzle, said electrode being insulated from the chamber and being connected with an outside source of current through the said insulated current connection passing through the wall of the chamber.
  • Apparatus for producing an electric glow discharge comprising a metallic chamber, a gas suction conduit connected With the chamber, and a plurality of gas supply conduits passing through the chamber wall, said gas supply conduits terminating in nozzle-like openings within the interior of the chamber, said openings being so shaped that currents of gas are injected into the interior of the chamber in the form of thread-like streams, the gas supply conduits being so disposed in the chamber Walls that the axes of the nozzles approximately intersect inside the chamber, said gas supply conduits being made of metal, being insulated from the chamber wall and having a connection for a source of current outside the chamber.
  • Apparatus for producing an electric glow discharge comprising a metallic chamber, a gas suction conduit connected with the chamber, a gas supply conduit passing through the wallof the chamber, said gas suppiy conduit terminating in a nozzle-like opening within the interior of the chamber, said opening being so shaped that a current of gas is injected into the chamber in the form of a thread-like stream, and at least two electrodes arranged laterally of the axis of the nozzle and insulated from the wall of the chamber, said electrodes having terminals for connection with an outside source of current.
  • Apparatus for producing an electric glow discharge comprising a metallic chamber, a gas suction conduit connected with the chamber, a gas supply conduit passing through the chamber wall, said gas supply conduit terminating in a nozzle-like opening within the interior of the chamber, said opening being so shaped that a current of gas is injected into the interior of the chamber in the form of a thread-like stream, said gas supply conduit being made of metal, being insulated from the wall of the chamber, and being connected outside the chamber to one pole of a source of current of which the other pole is connected to the Wall of the chamber, and an impact body spaced from the nozzle-like opening and extending transversely to the axis of said opening.
  • Apparatus for producing an electric glow discharge comprising a metallic chamber, a gas supply conduit, said gas supply conduit terminating in a nozzlelike opening within the interior of the chamber, said opening being so shaped that a current of gas is injected into the interior of the chamber in theform of a threadlike stream, said gas supply conduit being made of metal, being insulated from the wall of the chamber and being connected outside the chamber to one pole of a source of current of which the other pole is connected to the wall of the chamber, and an impact body disposed in the chamber spaced from the nozzle-like opening and extending transversely to the axis of said opening, said impact body being provided with a suction opening and adapted to be connected with a suction pump, said impact body being connected to a gas suction conduit to withdraw gas from said chamber.
  • Apparatus for producing an electric glow discharge comprising a metallic chamber, a gas suction conduit connected with the chamber, three gas supply conduits passing through the chamber wall and termimating in nozzle-like openings within the interior of the chamber, said openings being so shaped that currents of gas are injected into the interior of the chamber in the form of thread-like streams, the supply conduits being so disposed in the chamber wall that the axes of the nozzles approximately intersecttin the interior of the chamber, said supply conduits being made of metal, being insulated from the Wall of the chamber and having terminals outside the chamber for connection with a source 10 of three-phase current.

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US506752A 1954-05-11 1955-05-09 Process and apparatus for carrying out reactions by the action of electrical glow discharges Expired - Lifetime US2837654A (en)

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BE (1) BE538618A (enrdf_load_stackoverflow)
CH (1) CH357377A (enrdf_load_stackoverflow)
DE (1) DE1052959B (enrdf_load_stackoverflow)
FR (1) FR1131167A (enrdf_load_stackoverflow)
GB (1) GB804916A (enrdf_load_stackoverflow)
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Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2969475A (en) * 1956-07-14 1961-01-24 Berghaus Elektrophysik Anst Method and installation for carrying out glow discharge processes
US3003061A (en) * 1956-04-02 1961-10-03 Berghaus Elektrophysik Anst Electric discharges in gases
US3005762A (en) * 1958-01-20 1961-10-24 Aero Chem Res Lab Inc Electric discharge jet stream
US3057792A (en) * 1957-12-21 1962-10-09 Siemens Ag Method for improving the imprintability of synthetic material
US3090745A (en) * 1958-05-16 1963-05-21 Berghaus Bernhard Method of and apparatus for producing reactions under electrical action
US3094474A (en) * 1960-11-22 1963-06-18 High Voltage Engineering Corp Apparatus for carrying on nuclear reactions
US3119758A (en) * 1962-01-30 1964-01-28 Mhd Res Inc Method and apparatus for producing acetylene
US3129157A (en) * 1960-06-15 1964-04-14 Litton Systems Inc Space-charge field precipitation method
US3159874A (en) * 1962-08-02 1964-12-08 Iit Res Inst Apparatus for electrostatic encapsulation
US3180816A (en) * 1961-03-30 1965-04-27 Rordorf Horst Discharge chamber with current lead-in
US3213182A (en) * 1961-03-30 1965-10-19 Rordorf Horst Current lead-in for discharge chambers
US3625846A (en) * 1967-07-03 1971-12-07 United States Borax Chem Chemical process and apparatus utilizing a plasma
US4225744A (en) * 1979-01-15 1980-09-30 Abar Corporation Fixed thermocouple for vacuum electric furnaces
US4227032A (en) * 1979-01-15 1980-10-07 Abar Corporation Power feed through for vacuum electric furnaces
US4246434A (en) * 1978-12-20 1981-01-20 Abar Corporation Work support for vacuum electric furnaces
US4247734A (en) * 1979-03-05 1981-01-27 Abar Corporation Flexible thermocouple for vacuum electric furnaces
US5137701A (en) * 1984-09-17 1992-08-11 Mundt Randall S Apparatus and method for eliminating unwanted materials from a gas flow line
US5578280A (en) * 1995-04-28 1996-11-26 Americal Environmental Technologies, Inc. Ozone generator with a generally spherical corona chamber
US5723027A (en) * 1994-09-07 1998-03-03 W.C. Heraeus Gmbh Method for preparing a powder in a plasma arc and device for carrying out said method
US5948379A (en) * 1993-02-06 1999-09-07 Koenig; Udo Plasma-chemical deposition of very fine particles

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1421049B1 (de) * 1958-05-16 1970-01-29 Berghaus Elektrophysik Anst Vorrichtung zur Durchfuehrung von Reaktionen unter elektrischer Beeinflussung
WO1987006776A1 (en) * 1986-04-29 1987-11-05 Loughborough Consultants Limited Electric discharge apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2165820A (en) * 1934-12-29 1939-07-11 Standard Oil Dev Co Manufacture of acetylene
US2582903A (en) * 1952-01-15 Device for producing chemical reac

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE736568C (de) * 1939-02-07 1943-06-22 Bernhard Berghaus Verfahren zur Durchfuehrung chemischer Reaktionen mit Hilfe elektrischer Glimmentladung bei Unterdruck, insbesondere zur NH-Synthese

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2582903A (en) * 1952-01-15 Device for producing chemical reac
US2165820A (en) * 1934-12-29 1939-07-11 Standard Oil Dev Co Manufacture of acetylene

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3003061A (en) * 1956-04-02 1961-10-03 Berghaus Elektrophysik Anst Electric discharges in gases
US2969475A (en) * 1956-07-14 1961-01-24 Berghaus Elektrophysik Anst Method and installation for carrying out glow discharge processes
US3057792A (en) * 1957-12-21 1962-10-09 Siemens Ag Method for improving the imprintability of synthetic material
US3005762A (en) * 1958-01-20 1961-10-24 Aero Chem Res Lab Inc Electric discharge jet stream
US3090745A (en) * 1958-05-16 1963-05-21 Berghaus Bernhard Method of and apparatus for producing reactions under electrical action
US3129157A (en) * 1960-06-15 1964-04-14 Litton Systems Inc Space-charge field precipitation method
US3094474A (en) * 1960-11-22 1963-06-18 High Voltage Engineering Corp Apparatus for carrying on nuclear reactions
US3213182A (en) * 1961-03-30 1965-10-19 Rordorf Horst Current lead-in for discharge chambers
US3180816A (en) * 1961-03-30 1965-04-27 Rordorf Horst Discharge chamber with current lead-in
US3119758A (en) * 1962-01-30 1964-01-28 Mhd Res Inc Method and apparatus for producing acetylene
US3159874A (en) * 1962-08-02 1964-12-08 Iit Res Inst Apparatus for electrostatic encapsulation
US3625846A (en) * 1967-07-03 1971-12-07 United States Borax Chem Chemical process and apparatus utilizing a plasma
US4246434A (en) * 1978-12-20 1981-01-20 Abar Corporation Work support for vacuum electric furnaces
US4225744A (en) * 1979-01-15 1980-09-30 Abar Corporation Fixed thermocouple for vacuum electric furnaces
US4227032A (en) * 1979-01-15 1980-10-07 Abar Corporation Power feed through for vacuum electric furnaces
US4247734A (en) * 1979-03-05 1981-01-27 Abar Corporation Flexible thermocouple for vacuum electric furnaces
US5137701A (en) * 1984-09-17 1992-08-11 Mundt Randall S Apparatus and method for eliminating unwanted materials from a gas flow line
US5948379A (en) * 1993-02-06 1999-09-07 Koenig; Udo Plasma-chemical deposition of very fine particles
US5723027A (en) * 1994-09-07 1998-03-03 W.C. Heraeus Gmbh Method for preparing a powder in a plasma arc and device for carrying out said method
US5578280A (en) * 1995-04-28 1996-11-26 Americal Environmental Technologies, Inc. Ozone generator with a generally spherical corona chamber

Also Published As

Publication number Publication date
BE538618A (enrdf_load_stackoverflow)
CH357377A (de) 1961-10-15
NL197081A (enrdf_load_stackoverflow)
FR1131167A (fr) 1957-02-18
GB804916A (en) 1958-11-26
DE1052959B (de) 1959-03-19

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