US2219614A - Electrical discharge apparatus - Google Patents
Electrical discharge apparatus Download PDFInfo
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- US2219614A US2219614A US263075A US26307539A US2219614A US 2219614 A US2219614 A US 2219614A US 263075 A US263075 A US 263075A US 26307539 A US26307539 A US 26307539A US 2219614 A US2219614 A US 2219614A
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- conductor
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- furnace
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- 239000004020 conductor Substances 0.000 description 59
- 239000002184 metal Substances 0.000 description 26
- 229910052751 metal Inorganic materials 0.000 description 26
- 239000007789 gas Substances 0.000 description 16
- 238000000137 annealing Methods 0.000 description 14
- 238000002844 melting Methods 0.000 description 13
- 230000008018 melting Effects 0.000 description 13
- 238000012216 screening Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000002826 coolant Substances 0.000 description 5
- 239000012212 insulator Substances 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 239000002800 charge carrier Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60K—ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES; ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GAS EXHAUST OR FUEL SUPPLY OF PROPULSION UNITS IN VEHICLES
- B60K11/00—Arrangement in connection with cooling of propulsion units
- B60K11/06—Arrangement in connection with cooling of propulsion units with air cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/18—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J17/186—Seals between leading-in conductors and vessel
Definitions
- the invention relates to a lead-in conductor for vacuum, annealing and melting furnaces, the characteristic feature of which is that the insulating material is protected by a gap against 5 any attack by the gas discharge.
- the length of the protective gap is preferably a multiple of its width.
- the invention relates to a lead-in conductor for electric vacuum, annealing and melting furnaces, the characteristic feature of which is that the insulated cathode or anode conductor, to which the required voltage is applied for the heating up of the material to be annealed or melted by means of an electric discharge at reduced pressure, is provided with a metal covering at a short distance, preferably projecting into the vacuum chamber of the furnace.
- the insulating and sealing material of the conductor is so arranged that it is not reached by the charge carriers and metal vapour present in the vacuum chamber.
- the distance between the conductor and the metal covering is made smaller than the width of the glow fringe which is formed around the conductor and the electrodes, more particularly, the cathode.
- the distance of the metal covering from the conductor depends upon the nature of the gas, the pressure and temperature of the gas, being about 0.1 to 20 and preferably 0.5 to 5 millimeters, and the metal covering has such a length that the glow and the charge carriers from the ionised atmosphere of the furnace, as well as the metal vapour, do not reach the insulating and the sealing material.
- the insulated metal covering may lie in the ionised gas space without any direct electric connection and carry a positive potential. Further, it may I be in electric contact with the casing of the vacuum, annealing and melting furnace and be even earthed.
- the metal covering of the lead-in conductor may also be insulated with respect to the casing, in addition to being insulated from the conductor and carry a different voltage than the casing or the conductor.
- the screen of the conductor is preferably so shaped as to avoid as 5 much as possible the presence of edges and points.
- the insulation and sealing of the conductor is preferably provided outside the vacu annealing and melting furnace, so that they are easily accessible.
- the conductor may preferably be constructed as a round hollow member, the inner wall of which is capable of being cooled by a cooling means, such as air, oil or water.
- The.wall of the furnace may be provided with a cooling device at the point of contact with the packings and insulation. Also the metal cover-,
- ing of the conductor may be made hollow and capable of being cooled.
- the cooling has the advantage that any metal vapor formed during the annealing condenses on the cooled screen or lead-in conductor before the insulator is reached thus protecting the insulator against heat.
- the lead-in conductor according to the invention it is possible reliably to introduce into the vacuum chamber of the furnace large outputs at high voltage, even in the case of great development of heat on the electrodes.
- the lead-in conductor for vacuum, annealing and melting furnaces hereinbefore described can be advantageously employed for all voltages to be u introduced into the chamber of a vacuum furnace, irrespective of the fact whether the leadin conductor is required for a cathode, anode or auxiliary electrodes. Also, in the case of auxiliary circuits, for instance, for electrical devices,
- such as driving means it enables the supply of electrical energy tobe reliably effected with any desired current intensity and any desired voltage. It retains its advantages when use is made of direct current or alternating current voltages and rectified alternating current voltages. It has been found suitable even when use is made of a high frequency voltage of any desired frequency.
- a further characteristic of the invention is that the insulator covers the flange of the conductor completely with respect to the vacuum chamber of the furnace.
- the insulator is in that case preferably provided with a groove in which the metal screening sleeve is fitted at a short distance from the conductor.
- a further feature of the invention resides in the fact that the conductor is surrounded by a plurality of concentric metal coverings, which are arranged in an insulated manner and at a short distance with respect to one another and to the conductor.
- the metal coverings may carry diiferent voltages with respect to one another and the conductor.
- use is preferably made of condensers or resistances.
- the invention has the advantage that, owing to the gradation of the voltage between the individual metal coverings, high voltages can be u reliably introduced in the vacuum furnace in the case of large powers.
- the device offers a special advantage when the lead-in conductor is used in metallic furnaces wherein the high voltage is applied between the wall of the furnace A vacuum pump,
- Both the conductor and the wall of the furnace may carry the negative voltage.
- the same advantages are obtained with the lead-inconductor when the direction of the current is continuously varied, as is, for instance, the case when an alternating current voltage is applied.
- a lead-in conductor such as described it was possible to apply voltages up to 10,000 volts and more, and powers of 100 kilowatt and more, without in any way damaging or destroying the insulating part, even with a long period of operation.
- the invention further relates to a lead-in conductor for electric vacuum, heating and melting furnaces, the characteristic feature of which is, that a gap is provided all around between the conductor so narrow that no glow discharge can take place therein with the existing vacuum and the voltage which is applied.
- the distance of the insulator from the conductor is less than 10, preferably 3 to 0.1 millimeter.
- the gap is preferably made of labyrinth shape, in order to hinder the penetration of charge carriers out of the vacuum space.
- the present invention avoids the difiiculties hitherto encountered with lead-in conductors owing to the undesirable glow and arc discharges at the point where the lead-in conductors enter into the vessel, which would otherwise lead to the destruction of the sealing and insulating material.
- the lead-in conductor allows powers of 100 kw. for voltages of a few thousand volts to be reliably supplied to vacuum apparatus of any desired construction in which the wall of the vessel forms permanently or temporarily the cathode.
- vA direct or alternating current voltage may be applied to the lead-in conductor.
- Fig. l is a sectional elevation of electrical heated vacuum annealing and melting furnace.
- Fig. 2 is a sectional view of another form of the lead-in assembly.
- Fig. 3 is a sectional view of another type of screening sleeve.
- Fig. 4 is a. sectional view of a lead-in conductor similar to Fig. 2 showing a modified screen assembly including the electrical connections thereof.
- Fig. 1 there is shown an electrically heated annealing or melting furnace for metallic or non-metallic material, in which the wall of the furnace is neutral or is connected as an anode with respect to a cathode introduced therein in an insulated manner, and in which the material to be annealed in the furnace constitutes the cathode and the electrically heated gas between the cathode glow fringe and the anode constitutes the heating element for the material to be heated.
- the vacuum annealing and melting furnace consists of a lower part 94 and a removable upper part 95, which are connected together in an airtight manner by means of packings 96 and 91 and which form the anode individually or together or are neutral.
- the upper part 95 which is for instance made in the form of a hood is provided with a jacket 98 to which the cooling medium is supplied through the pipe 99 being discharged through the pipe I00. Further, an opening is provided in the upper part, which opening is closed by an inspection window ml.
- a pipe connection I02 which is not shown, is connected to a pipe connection I02 arranged in an insulated manner in the lower part 94, by means aaraera of which pump a pressure of preferably 10.0 to 0.05 millimeter of mercury is maintained within the housing.
- the lower part 94 is also provided with a pipe connection E03 which is also insulated with respect to the anode.
- i0 3 and E05 are insulating rings, whilst E06 and I0? are insulating and clamping rings.
- a regulated amount of filling gas may be introduced through the pipe I02 by means of a regulating valve which is not shown.
- the filling gas may be an inert gas, such as argon, krypton, xenon, helium, or a reducing gas such as hydrogen, hydrocarbons or the like. Nitrogen, may also be used when it is intended to produce an effect for instance on the metal to be annealed. Gases or vapours may be supplied which produce a chemical action on the material to be annealed.
- the anode I08 which is screened by the metal bottom plate is arranged in an insulated and screened manner in the lower part 94.
- the lead-in conductor I09 is made hollow and to which a cooling medium H0 which cooling medium the pipe III.
- the lead-in conductor I09 carries by means of an electrically conducting screening pin IIZ, for instance a conducting plate I I3, on which the direct current.
- IIZ electrically conducting screening pin
- H9 use may be made of a. source of alternating current.
- a crucible may be used which may for instance be of carbon or of ceramic material, such as beryllium-oxide, or of for instance three phase currents.
- the form of construction illustrated in Fig. 2 includes the characteristic that the metallic ing a supply pipe 38 and a discharge pipe 39, which are introduced in an airtight manner through the bottom 2 of the vessel into the vacuum furnace.
- the metallic wall of the vacuum chamber is shown at 2 into which the conductor 3 is introduced through a hole in the wall.
- the conductor is hollow and cooled by a cooling medium, such as water, oil or air.
- the cooling medium is introduced through the pipe 4 and is discharged through the pipe 5.
- the conductor 3 is surrounded by a plurality, for instance four,
- Resistors 59, 60, BI and 62 and condensers are provided for regulating the voltage on the screening sleeves.
- a sealed separable metal casing adapted to support a gas discharge therein, said casing having an opening in the wall thereof, a hollow coolable conductor extending into the casing through said opening, a flange carried by the outer end of said conductor, metal screening means surrounding the conductor and spaced therefrom at such a small distance as to prevent the gas discharge from extending outside said casing through said space, an insulating member arranged between said flange and the outer surface of the casing, said insulating member having a groove therein forming a continuation of the space between the conductor and the screening means.
- a sealed separable metal casing adapted to support a. gas discharge therein, said casing having an opening in the wall thereof, a hollow coolable conductor extending into the casing through said opening, a flange carried by the outer end of said conductor, a metal screening sleeve extending into the casing through said opening and surrounding the conductor and spaced therefrom and spaced from the casing within the opening at such small distances as to prevent the gas discharge from extending outside said casing through said spaces, a flange carried by the outer end of said sleeve, an insulating member arranged between said flanges, and an insulating member arranged between said casing and the flange carried by the sleeve.
- a sealed separable metal casing adapted to support a gas discharge therein, said casing having an opening in the wall thereof, a hollow coolable conductor extending into the casing through said opening and spaced from the casing within the opening, a hollow metal coil with the convolutions thereof engaging adjacent turns of the coil surrounding the conductor and spaced therefrom to provide a continuation of the space between the conductor and the space within the opening, the ends of said coil extending outside said casingforpermitting acooling medium to be moved through the coil, and means arranged outside the casing for insulating and sealing the conductor with respect to the casing.
- a sealed separable metal casing adapted to support a gas discharge therein, said casing having an opening in the wall thereof, a hollow coolable conductor extending into the casing through said opening, a flange carried by the outer end of said conductor, metal screening means surrounding the conductor and spaced therefrom at such a small distance as to prevent the gas discharge from extending outside said casing through said space, and an insulating member arranged between said flange and the outer surface of the casing.
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Description
Oct. 29, \940. B. BERGHAUS ET AL 2,219,614
ELECTRICAL DISCHARGE APPARATUS Filed March 20, 1939 2 Sheets-Sheet 1 Ewe/225 5 56' $67! MZu imfg Patented Oct. 29, 1940 UNITED STATES ELECTRICAL DISCHARGE APPARATUS Bernhard Berghaus, Berlin-Lankwita and Wilhelm Burkhardt, Berlin-Grnnewald, Germany; said Burkhardt assigncr to said Berghaus Application March 20, 1939, Serial No. 263,075
In Germany is 2 Marc 4 Claim (CL 250-275) The invention relates to a lead-in conductor for vacuum, annealing and melting furnaces, the characteristic feature of which is that the insulating material is protected by a gap against 5 any attack by the gas discharge. The length of the protective gap is preferably a multiple of its width.
The invention relates to a lead-in conductor for electric vacuum, annealing and melting furnaces, the characteristic feature of which is that the insulated cathode or anode conductor, to which the required voltage is applied for the heating up of the material to be annealed or melted by means of an electric discharge at reduced pressure, is provided with a metal covering at a short distance, preferably projecting into the vacuum chamber of the furnace. The insulating and sealing material of the conductor is so arranged that it is not reached by the charge carriers and metal vapour present in the vacuum chamber. The distance between the conductor and the metal covering is made smaller than the width of the glow fringe which is formed around the conductor and the electrodes, more particularly, the cathode. The distance of the metal covering from the conductor depends upon the nature of the gas, the pressure and temperature of the gas, being about 0.1 to 20 and preferably 0.5 to 5 millimeters, and the metal covering has such a length that the glow and the charge carriers from the ionised atmosphere of the furnace, as well as the metal vapour, do not reach the insulating and the sealing material. The insulated metal covering may lie in the ionised gas space without any direct electric connection and carry a positive potential. Further, it may I be in electric contact with the casing of the vacuum, annealing and melting furnace and be even earthed. The metal covering of the lead-in conductor may also be insulated with respect to the casing, in addition to being insulated from the conductor and carry a different voltage than the casing or the conductor. The screen of the conductor is preferably so shaped as to avoid as 5 much as possible the presence of edges and points. The insulation and sealing of the conductor is preferably provided outside the vacu annealing and melting furnace, so that they are easily accessible. The conductor may preferably be constructed as a round hollow member, the inner wall of which is capable of being cooled by a cooling means, such as air, oil or water.
The.wall of the furnace may be provided with a cooling device at the point of contact with the packings and insulation. Also the metal cover-,
ing of the conductor may be made hollow and capable of being cooled. The cooling has the advantage that any metal vapor formed during the annealing condenses on the cooled screen or lead-in conductor before the insulator is reached thus protecting the insulator against heat.
By thus constructing the lead-in conductor according to the invention it is possible reliably to introduce into the vacuum chamber of the furnace large outputs at high voltage, even in the case of great development of heat on the electrodes.
The lead-in conductor for vacuum, annealing and melting furnaces hereinbefore described can be advantageously employed for all voltages to be u introduced into the chamber of a vacuum furnace, irrespective of the fact whether the leadin conductor is required for a cathode, anode or auxiliary electrodes. Also, in the case of auxiliary circuits, for instance, for electrical devices,
such as driving means, it enables the supply of electrical energy tobe reliably effected with any desired current intensity and any desired voltage. It retains its advantages when use is made of direct current or alternating current voltages and rectified alternating current voltages. It has been found suitable even when use is made of a high frequency voltage of any desired frequency. a
A further characteristic of the invention is that the insulator covers the flange of the conductor completely with respect to the vacuum chamber of the furnace. The insulator is in that case preferably provided with a groove in which the metal screening sleeve is fitted at a short distance from the conductor.
A further feature of the invention resides in the fact that the conductor is surrounded by a plurality of concentric metal coverings, which are arranged in an insulated manner and at a short distance with respect to one another and to the conductor. The metal coverings may carry diiferent voltages with respect to one another and the conductor. In order to regulate the distribution of the voltage on the metal coverings use is preferably made of condensers or resistances.
The invention has the advantage that, owing to the gradation of the voltage between the individual metal coverings, high voltages can be u reliably introduced in the vacuum furnace in the case of large powers. The device offers a special advantage when the lead-in conductor is used in metallic furnaces wherein the high voltage is applied between the wall of the furnace A vacuum pump,
and the conductor. Both the conductor and the wall of the furnace may carry the negative voltage. The same advantages are obtained with the lead-inconductor when the direction of the current is continuously varied, as is, for instance, the case when an alternating current voltage is applied. By using a lead-in conductor such as described it was possible to apply voltages up to 10,000 volts and more, and powers of 100 kilowatt and more, without in any way damaging or destroying the insulating part, even with a long period of operation.
The invention further relates to a lead-in conductor for electric vacuum, heating and melting furnaces, the characteristic feature of which is, that a gap is provided all around between the conductor so narrow that no glow discharge can take place therein with the existing vacuum and the voltage which is applied. The distance of the insulator from the conductor is less than 10, preferably 3 to 0.1 millimeter. Moreover, the gap is preferably made of labyrinth shape, in order to hinder the penetration of charge carriers out of the vacuum space.
The present invention avoids the difiiculties hitherto encountered with lead-in conductors owing to the undesirable glow and arc discharges at the point where the lead-in conductors enter into the vessel, which would otherwise lead to the destruction of the sealing and insulating material. The lead-in conductor allows powers of 100 kw. for voltages of a few thousand volts to be reliably supplied to vacuum apparatus of any desired construction in which the wall of the vessel forms permanently or temporarily the cathode.
vA direct or alternating current voltage may be applied to the lead-in conductor.
The invention is illustrated by way of example and diagrammatically in the accompanying drawings, in which Fig. l is a sectional elevation of electrical heated vacuum annealing and melting furnace.
Fig. 2 is a sectional view of another form of the lead-in assembly.
Fig. 3 is a sectional view of another type of screening sleeve.
Fig. 4 is a. sectional view of a lead-in conductor similar to Fig. 2 showing a modified screen assembly including the electrical connections thereof.
In Fig. 1 there is shown an electrically heated annealing or melting furnace for metallic or non-metallic material, in which the wall of the furnace is neutral or is connected as an anode with respect to a cathode introduced therein in an insulated manner, and in which the material to be annealed in the furnace constitutes the cathode and the electrically heated gas between the cathode glow fringe and the anode constitutes the heating element for the material to be heated. The vacuum annealing and melting furnace consists of a lower part 94 and a removable upper part 95, which are connected together in an airtight manner by means of packings 96 and 91 and which form the anode individually or together or are neutral. The upper part 95 which is for instance made in the form of a hood is provided with a jacket 98 to which the cooling medium is supplied through the pipe 99 being discharged through the pipe I00. Further, an opening is provided in the upper part, which opening is closed by an inspection window ml.
which is not shown, is connected to a pipe connection I02 arranged in an insulated manner in the lower part 94, by means aaraera of which pump a pressure of preferably 10.0 to 0.05 millimeter of mercury is maintained within the housing. The lower part 94 is also provided with a pipe connection E03 which is also insulated with respect to the anode. i0 3 and E05 are insulating rings, whilst E06 and I0? are insulating and clamping rings. A regulated amount of filling gas may be introduced through the pipe I02 by means of a regulating valve which is not shown. According to the material which is to be annealed the filling gas may be an inert gas, such as argon, krypton, xenon, helium, or a reducing gas such as hydrogen, hydrocarbons or the like. Nitrogen, may also be used when it is intended to produce an effect for instance on the metal to be annealed. Gases or vapours may be supplied which produce a chemical action on the material to be annealed. The anode I08 which is screened by the metal bottom plate is arranged in an insulated and screened manner in the lower part 94. The lead-in conductor I09 is made hollow and to which a cooling medium H0 which cooling medium the pipe III. Between the anode I08 and the lower part 94 of the vessel there is a narrow larinth-like gap which is so narrow that no load discharge can take place therein. A similar narrow labyrinth-like gap is the anode I08 and the cathode lead-in conductor I09. The lead-in conductor I09 carries by means of an electrically conducting screening pin IIZ, for instance a conducting plate I I3, on which the direct current. Instead of a source of direct current H9 use may be made of a. source of alternating current. Instead of the annealing material II4 a crucible may be used which may for instance be of carbon or of ceramic material, such as beryllium-oxide, or of for instance three phase currents.
The form of construction illustrated in Fig. 2 includes the characteristic that the metallic ing a supply pipe 38 and a discharge pipe 39, which are introduced in an airtight manner through the bottom 2 of the vessel into the vacuum furnace.
Referring to the form of construction illustrated in Fig. 4, the metallic wall of the vacuum chamber is shown at 2 into which the conductor 3 is introduced through a hole in the wall. The conductor is hollow and cooled by a cooling medium, such as water, oil or air. The cooling medium is introduced through the pipe 4 and is discharged through the pipe 5. The conductor 3 is surrounded by a plurality, for instance four,
provided also betweencylindrical metal sleeves 6a, 6b, 6c and 6d which are provided at one end with a flange, while at the other end they project into the chamber of the furnace to such an extent that no discharges or metal particles can extend from the space with the furnace through the narrow annular spaces between the conductor 3 and the sleeve Be, as well as between the other sleeves to the insulation and packings which are arranged outside the vacuum chamber. The insulating rings for the sleeves are shown at la, 1b, 1c and 1d. The flange In of the conductor 3 is firmly clamped by means of a ring ll of insulating material and screws l2. Current is supplied to the conductor 3 by the lead I4. Resistors 59, 60, BI and 62 and condensers are provided for regulating the voltage on the screening sleeves. By means of the lead-in conductor hereinbefore described voltages up to 10,000 volts can be applied without destroying the insulation, even in the case of high temperatures in the vacuum furnace.
What we claim is:
1. In an electric vacuum annealing and melting furnace, a sealed separable metal casing adapted to support a gas discharge therein, said casing having an opening in the wall thereof, a hollow coolable conductor extending into the casing through said opening, a flange carried by the outer end of said conductor, metal screening means surrounding the conductor and spaced therefrom at such a small distance as to prevent the gas discharge from extending outside said casing through said space, an insulating member arranged between said flange and the outer surface of the casing, said insulating member having a groove therein forming a continuation of the space between the conductor and the screening means.
2. In an electric vacuum annealing and melting furnace, a sealed separable metal casing adapted to support a. gas discharge therein, said casing having an opening in the wall thereof, a hollow coolable conductor extending into the casing through said opening, a flange carried by the outer end of said conductor, a metal screening sleeve extending into the casing through said opening and surrounding the conductor and spaced therefrom and spaced from the casing within the opening at such small distances as to prevent the gas discharge from extending outside said casing through said spaces, a flange carried by the outer end of said sleeve, an insulating member arranged between said flanges, and an insulating member arranged between said casing and the flange carried by the sleeve.
3. In an electric vacuum annealing and melting furnace, a sealed separable metal casing adapted to support a gas discharge therein, said casing having an opening in the wall thereof, a hollow coolable conductor extending into the casing through said opening and spaced from the casing within the opening, a hollow metal coil with the convolutions thereof engaging adjacent turns of the coil surrounding the conductor and spaced therefrom to provide a continuation of the space between the conductor and the space within the opening, the ends of said coil extending outside said casingforpermitting acooling medium to be moved through the coil, and means arranged outside the casing for insulating and sealing the conductor with respect to the casing.
4. In an electric vacuum annealing and melting furnace, a. sealed separable metal casing adapted to support a gas discharge therein, said casing having an opening in the wall thereof, a hollow coolable conductor extending into the casing through said opening, a flange carried by the outer end of said conductor, metal screening means surrounding the conductor and spaced therefrom at such a small distance as to prevent the gas discharge from extending outside said casing through said space, and an insulating member arranged between said flange and the outer surface of the casing.
BERNHARD BERGHAUS.
WILHELM BURKHARDT.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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DEB17612D DE967138C (en) | 1938-03-25 | 1938-03-25 | Current feedthrough for vacuum annealing and melting furnaces |
Publications (1)
Publication Number | Publication Date |
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US2219614A true US2219614A (en) | 1940-10-29 |
Family
ID=25945152
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US263075A Expired - Lifetime US2219614A (en) | 1938-03-25 | 1939-03-20 | Electrical discharge apparatus |
US263074A Expired - Lifetime US2219613A (en) | 1938-03-25 | 1939-03-20 | Cathode disintegration apparatus |
US263076A Expired - Lifetime US2219615A (en) | 1938-03-25 | 1939-03-20 | Electrical discharge apparatus |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US263074A Expired - Lifetime US2219613A (en) | 1938-03-25 | 1939-03-20 | Cathode disintegration apparatus |
US263076A Expired - Lifetime US2219615A (en) | 1938-03-25 | 1939-03-20 | Electrical discharge apparatus |
Country Status (5)
Country | Link |
---|---|
US (3) | US2219614A (en) |
CH (2) | CH227449A (en) |
DE (1) | DE967138C (en) |
FR (1) | FR852025A (en) |
GB (3) | GB526528A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2535622A (en) * | 1941-07-12 | 1950-12-26 | Pour L Ind Du Magnesium Soc Et | Production of metal from its ore |
US2701846A (en) * | 1951-01-18 | 1955-02-08 | Berghaus | Lead-in device for high-power currents |
US2762945A (en) * | 1951-01-18 | 1956-09-11 | Berghaus | Passing an electric conductor through the bounding walls of discharge vessels |
US3018409A (en) * | 1953-12-09 | 1962-01-23 | Berghaus Elektrophysik Anst | Control of glow discharge processes |
US3035205A (en) * | 1950-08-03 | 1962-05-15 | Berghaus Elektrophysik Anst | Method and apparatus for controlling gas discharges |
US3141989A (en) * | 1962-11-26 | 1964-07-21 | Gen Electric | Workpiece support for glow discharge apparatus |
US3207941A (en) * | 1959-05-08 | 1965-09-21 | Flachowsky Kurt | Insulating supporting member for electrodes in gaseous processing device |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3126439A (en) * | 1964-03-24 | High-voltage electrical insulating bushing | ||
US2778866A (en) * | 1957-01-22 | Electric furnace | ||
US2906911A (en) * | 1953-05-28 | 1959-09-29 | Berghaus Elektrophysik Anst | Leading-in insulators for electric glow discharge receptacles |
CH404010A (en) * | 1961-03-30 | 1965-12-15 | Berghaus Elektrophysik Anst | Method and device for carrying out technical processes under the influence of an electric glow discharge |
US3626079A (en) * | 1970-08-10 | 1971-12-07 | Gen Electric | Electrical bushing with cooling means |
DE2556546C2 (en) * | 1975-12-16 | 1987-08-20 | Steag Ag, 4300 Essen | Device for conducting electrical current through a wall of an electrostatic precipitator which is under excess pressure on its inside |
US4078150A (en) * | 1976-08-04 | 1978-03-07 | Westinghouse Electric Corporation | Liquid-cooled stud for terminal bushings of a generator |
CH658539A5 (en) * | 1982-03-24 | 1986-11-14 | Balzers Hochvakuum | DEVICE FOR PUTTING AN ELECTRIC CURRENT THROUGH THE WALL OF A VACUUM CHAMBER. |
EP3664121A1 (en) * | 2018-12-05 | 2020-06-10 | ASML Netherlands B.V. | High voltage vacuum feedthrough |
CN116119900B (en) * | 2023-01-10 | 2024-08-27 | 齐鲁工业大学(山东省科学院) | Glass material preparation device and application method thereof |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE487192C (en) * | 1929-12-05 | Siemens Schuckertwerke Akt Ges | Large rectifier | |
DE209192C (en) * | ||||
DE354797C (en) * | 1922-06-15 | Bbc Brown Boveri & Cie | Anode lead-in for metal vapor rectifiers | |
DE404490C (en) * | 1922-07-02 | 1924-10-21 | Siemens Schuckertwerke G M B H | Metal steam rectifier with double-walled cylindrical cooling vessels protruding into the interior |
DE433210C (en) * | 1922-10-03 | 1926-08-27 | Bbc Brown Boveri & Cie | Large rectifier with anodes arranged side by side in a common space |
GB365479A (en) * | 1930-06-27 | 1932-01-21 | Oerlikon Maschf | Anode for large mercury-vapour rectifiers |
DE577795C (en) * | 1930-11-13 | 1934-06-01 | Bbc Brown Boveri & Cie | Electrode lead-in for mercury vapor rectifier using a lead-through insulator enclosing the shaft of the electrode through the rectifier housing |
DE626427C (en) * | 1931-04-10 | 1936-02-26 | Siemens Schuckertwerke Akt Ges | Capacitor bushing for introducing conductors into high-voltage power converters, in particular large-scale mercury vapor rectifiers, with conductive and insulating layers alternately arranged between the conductor and the metallic vacuum vessel |
-
1938
- 1938-03-25 DE DEB17612D patent/DE967138C/en not_active Expired
-
1939
- 1939-03-18 GB GB8740/39A patent/GB526528A/en not_active Expired
- 1939-03-18 GB GB8739/39A patent/GB526527A/en not_active Expired
- 1939-03-18 GB GB8738/39A patent/GB526526A/en not_active Expired
- 1939-03-20 US US263075A patent/US2219614A/en not_active Expired - Lifetime
- 1939-03-20 US US263074A patent/US2219613A/en not_active Expired - Lifetime
- 1939-03-20 US US263076A patent/US2219615A/en not_active Expired - Lifetime
- 1939-03-23 FR FR852025D patent/FR852025A/en not_active Expired
- 1939-03-23 CH CH227449D patent/CH227449A/en unknown
-
1944
- 1944-04-04 CH CH240338D patent/CH240338A/en unknown
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2535622A (en) * | 1941-07-12 | 1950-12-26 | Pour L Ind Du Magnesium Soc Et | Production of metal from its ore |
US3035205A (en) * | 1950-08-03 | 1962-05-15 | Berghaus Elektrophysik Anst | Method and apparatus for controlling gas discharges |
US2701846A (en) * | 1951-01-18 | 1955-02-08 | Berghaus | Lead-in device for high-power currents |
US2762945A (en) * | 1951-01-18 | 1956-09-11 | Berghaus | Passing an electric conductor through the bounding walls of discharge vessels |
US3018409A (en) * | 1953-12-09 | 1962-01-23 | Berghaus Elektrophysik Anst | Control of glow discharge processes |
US3207941A (en) * | 1959-05-08 | 1965-09-21 | Flachowsky Kurt | Insulating supporting member for electrodes in gaseous processing device |
US3141989A (en) * | 1962-11-26 | 1964-07-21 | Gen Electric | Workpiece support for glow discharge apparatus |
Also Published As
Publication number | Publication date |
---|---|
CH227449A (en) | 1943-06-15 |
CH240338A (en) | 1945-12-15 |
DE967138C (en) | 1957-10-10 |
GB526527A (en) | 1940-09-19 |
FR852025A (en) | 1940-01-22 |
US2219615A (en) | 1940-10-29 |
GB526526A (en) | 1940-09-19 |
US2219613A (en) | 1940-10-29 |
GB526528A (en) | 1940-09-19 |
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