US2219613A - Cathode disintegration apparatus - Google Patents

Cathode disintegration apparatus Download PDF

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US2219613A
US2219613A US263074A US26307439A US2219613A US 2219613 A US2219613 A US 2219613A US 263074 A US263074 A US 263074A US 26307439 A US26307439 A US 26307439A US 2219613 A US2219613 A US 2219613A
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conductor
insulator
insulating member
cathode
wall
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US263074A
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Berghaus Bernhard
Burkhardt Wilhelm
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60K—ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES; ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GAS EXHAUST OR FUEL SUPPLY OF PROPULSION UNITS IN VEHICLES
    • B60K11/00—Arrangement in connection with cooling of propulsion units
    • B60K11/06—Arrangement in connection with cooling of propulsion units with air cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/18—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H01J17/186—Seals between leading-in conductors and vessel

Definitions

  • the invention relates to a lead-in conductor for cathode disintegration, the characteristic for cathode disintegration apparatus, the charfeature of which is, that the metallic cooled wall acteristic feature of which is that the insulating of the vessel constitutes the cathode and surmaterial is protected by a gap against any atrounds the insulated conductor of the anode, on 5 tack by the gas discharge.
  • the invention also all sides, at such a short distance that no glow l relates to an insulated lead-in conductor for discharge can take place in the free gap between metal vacuum vessels of cathode disintegration the two.
  • the extension of the gap may be apparatus, the characteristic feature of which is formed by an' insulator provided with a correthat, between the conductor and the insulator spending recess.
  • the anode conductor may also there is provided all around such a narrow gap be provided with a metal cap which forms a nar- 10 that no glow discharge can take place therein row gap with the cooled metal wall of the vessel with the existing vacuum and the voltage which acting as a cathode. Between the cooled anode is applied.
  • the distance of the insulator from the lead-in conductor and the cathode metal wall conductor is less than ten and preferably between of the vessel there may be providedran insulated,
  • the gap is prefmetal, neutral or anode screening through the 15 erably made of labyrinth shape, in order to make interposition of a protective gap.
  • the length of the middle cooled lead-in may also be neutral.
  • Furprotective gap being a multiple of its width. ther, the insulator may surround the conductor The insulator preferably consists of a material so as to abut against it. In this way it is at- 20 having a high fusing point, preferably over 1200?
  • the insulator is cooled at the same C., such as quartz, porcelain, sintered bodies of time as the conductor is cooled.
  • the insulator alumina, zirconium oxide, thorium oxide, magmay abut against the cooled wall of the vessel nesium oxide, beryllium oxide or the like.
  • the fOrmlng the CalShOde lll Sllh a manner that, be-
  • the insulator may, for instance, consist of a quartz tween the insulator and the lead-in conductor, 25 tube. there remains a narrow gap.
  • the 'I'he insulator preferably surrounds the concooling of the insulator is effected by the cathode ductor.
  • the conductor may partly surwall of the vessel.
  • the lllSlllBtOr may round the insulator.
  • the conductor is preferably be S0 arranged between the cooled wall of the 3l) made capable of being cooled.
  • the invessel which forms the cathode and the anode 30 sulator may be provided with cooling means.
  • the Present invention avoids the diillculties of heat,
  • the insulator may advantageously be hitherto encountered with such anode lead-in surrounded by a metal covering wholly or partly. Conductors Owing t0 the undesirable 810W and It is also advisable to provide between the insual'C discharges all the points Where the lead-in lator and its metallic covering such a narrow gap conductors enter into the vessel, which would that no gio'w discharge can take place therein. otherwise leed tc the destruction of the sealing 40
  • the invention also relates to an insulated leadand insulating materiel.
  • the lead-in conductor 4o in conductor preferably for a cathode, the char- SHOWS POWSIS 0f (Wer 100 kW fOr Voltages Of a few acteristic feature of which is that, between the thousand volts to be reliably supplied to vacuum insulator surrounding the conductor and the conapparatus of any desired construction in which duotor which abuts against it, there 1s provided the Well cf the vessel forms permanently 0r tema protective gap which opens into the vacuum pOIarlly the cathode.
  • a direct or alternating 45 space and is narrower than the width of the current voltage may be applied to the lead-in glow fringe formed in the vacuum space around COndllCtOlthe cathode.
  • the invention also relates to a lead-in con-
  • the conductor 4 is inductor for the anode o1' a metal vacuum vessel troduced into the vacuum space through the wall 55 i oi -the vacuum vessel, which is provided with cooling channels and 3.
  • the insulated metal leadin conductor is, for instance, made hollow, so as to be capable of being cooled, a. cooling medium being introduced through the pipe S and discharged through the pipe l.
  • the conductor is surrounded on all sides by an insulator i9, which may, for instance, be a quartz tube, in such a manner that, between the conductor and the insulator, there remains such a narrow gap 2l that no glow discharge can take place therein.
  • I are packing rings for rendering the insulator I2 airtight.
  • I3 is an insulating and clamping ring which is clamped on by insulated screws ld surrounded by an insulation I5.
  • the quartz tube is surrounded at its lower end by the cooled metal Wall I5 of the vacuum vessel.
  • the conductor is provided with a screwed-in metal cap I'l, which partly surrounds with its part i8 the insulator I9 at a short distance so that a gap 2U is left in between, which, together with the gap 2l, forms a labyrinth gap.
  • the conductor da. is introduced into the vacuum space through the wall i, which is provided with cooling channels 2 and 3.
  • the insulated metal lead-in is, for instance; made hollow and capable of being cooled; the cooling medium may be supplied through the pipe 6 and be discharged through the pipe l.
  • 'I'he conductor 4a is surrounded by an insulator 8, for instance, a porcelain insulator abutting against it, and between the insulator and the conductor there is provided a gap 9 which is, for instance, curved.
  • the insulator- 8 may be cemented on the conductor, for instance, by an elastic cement.
  • i I are lead or copper parts which are provided in order to obtain a uniform pressure stress on the insulator.
  • a second protective gap l2a is an insulating member, Ia a sealing member, for instance of rubber, I5a an insulating ring and Ita a metal screw nut.
  • the characteristic feature oi the anode lead-in conductor according to Figure 3 is that the insulator @il abuts in such a manner against the cooled wall il of the vessel which forms the cathode in such a manner that, between the insulator and the lead-in conductor there remains a narrow gap 62. In this case the insulator is cooled by the wall of the vessel.
  • a metal housing wall having an opening therein, a hollow insulating member having a tubular portion with the periphery thereof engaging the housing within said opening, a hollow coolable metal conductor extending into the housing through said insulating member, means carried by the inner end of said conductor having an annular skirt covering the inner end of the insulating member and spaced garanzie therefrom at such a small distance as to prevent a glow dischargewithin the housing from taking place in said space, means arranged outside said housing for insulating and sealing said conductor with respect to said housing wall, and said housing wall having channels therein adjacent said opening for receiving a cooling medium.
  • a metal housing wall having an opening -therein and an arcuated shaped recess in the inner face thereof adjacent said opening, an insulating member having an axial passage nextending therethrough, said insulating member having a tubular end portion with the periphery thereof engaging said housing wall Within said opening, an end portion of said insulating member adjacent said tubular portion being arcuated shaped and extending into said recess and spaced from the housing Wall providing the recess, a hollow conductor extending into the housing through said passage and engaging said insulating member, means carried by the conductorcovering the inner end of the insulating member, and means for cooling said hollow conductor so as .to carry heat away from the insulating member and the conductor.
  • a metal housing wall having an opening therein and an arcuated shaped recess in the inner face thereof adjacent said opening, an insulating member having an axial passage extending therethrough, said insulating member having a tubular end portion with the periphery thereof engaging said housing wall within said opening, an end portion of said insulating member adjacent said tubular portion being arcuated shaped and extending into said recess and spaced from the housing wall providing the recess.
  • a hollow conductor extending into the housing through said passage and engaging said insulating member, means for cooling said hollow conductor so as 'to carry heat away from the insulating member and the conductor, and said housing wall adjacent said opening having channels therein for receiving a cooling medium.
  • a metal housing Wall having an opening therein, a tubular insulating member extending through said opening with the periphery engaging said housing within the opening, a metal conductor extending into the housing through said insulating member, means arranged outside said housing for sealing said insulating member and said conductor with respect to said housing wall, a cap member carried by said conductor covering the inner end of the insulating member, and said housing wall having channels therein adjacent said opening for receiving a cooling medium Ito carry heat away from said insulating member.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Furnace Details (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Plasma Technology (AREA)
  • Microwave Tubes (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Description

Oct. 29, 1940.- B, BERGHAUS E1'. AL 2,219,613
cA'rHoDE nIsI-NTEGRATION APPARATUS Filed latch. 20, 1939 vPatented Oct. 29, 1940 CATHODE DISINTEGRATION APPARATUS Bernhard Berghaus, Berlin-Lankwitz, and `Wil helm Burkhardt, Berlin-Grunewald, Germany; said Burkhardt assignor to said Berghaus Application March 20, 1939, Serial No. 263,074 In Germany March 24, 1938 4 Claims. (Cl. Z50-27.5)
The invention relates to a lead-in conductor for cathode disintegration, the characteristic for cathode disintegration apparatus, the charfeature of which is, that the metallic cooled wall acteristic feature of which is that the insulating of the vessel constitutes the cathode and surmaterial is protected by a gap against any atrounds the insulated conductor of the anode, on 5 tack by the gas discharge. The invention also all sides, at such a short distance that no glow l relates to an insulated lead-in conductor for discharge can take place in the free gap between metal vacuum vessels of cathode disintegration the two. The extension of the gap may be apparatus, the characteristic feature of which is formed by an' insulator provided with a correthat, between the conductor and the insulator spending recess. The anode conductor may also there is provided all around such a narrow gap be provided with a metal cap which forms a nar- 10 that no glow discharge can take place therein row gap with the cooled metal wall of the vessel with the existing vacuum and the voltage which acting as a cathode. Between the cooled anode is applied. The distance of the insulator from the lead-in conductor and the cathode metal wall conductor is less than ten and preferably between of the vessel there may be providedran insulated,
3 and 0.1 millimeters. Moreover the gap is prefmetal, neutral or anode screening through the 15 erably made of labyrinth shape, in order to make interposition of a protective gap. In the case of it difficult for the charge carriers to penetrate an anode metallic intermediate screening the therein from the vacuum space, the length of the middle cooled lead-in may also be neutral. Furprotective gap being a multiple of its width. ther, the insulator may surround the conductor The insulator preferably consists of a material so as to abut against it. In this way it is at- 20 having a high fusing point, preferably over 1200? tained that the insulator is cooled at the same C., such as quartz, porcelain, sintered bodies of time as the conductor is cooled. The insulator alumina, zirconium oxide, thorium oxide, magmay abut against the cooled wall of the vessel nesium oxide, beryllium oxide or the like. The fOrmlng the CalShOde lll Sllh a manner that, be-
insulator may, for instance, consist of a quartz tween the insulator and the lead-in conductor, 25 tube. there remains a narrow gap. In this case the 'I'he insulator preferably surrounds the concooling of the insulator is effected by the cathode ductor. However, the conductor may partly surwall of the vessel. Moreover, the lllSlllBtOr may round the insulator. The conductor is preferably be S0 arranged between the cooled wall of the 3l) made capable of being cooled. Similarly the invessel which forms the cathode and the anode 30 sulator may be provided with cooling means. conductor that there remains a narrow Sap be- These measures are essentlal when large elect'een it and the OliduCtOr, as Well as between it trical energies are to be supplied to the vacuum and the COOlcd Wall 0f the Vessel.
3 vessel which entail a corresponding development The Present invention avoids the diillculties of heat, The insulator may advantageously be hitherto encountered with such anode lead-in surrounded by a metal covering wholly or partly. Conductors Owing t0 the undesirable 810W and It is also advisable to provide between the insual'C discharges all the points Where the lead-in lator and its metallic covering such a narrow gap conductors enter into the vessel, which would that no gio'w discharge can take place therein. otherwise leed tc the destruction of the sealing 40 The invention also relates to an insulated leadand insulating materiel. The lead-in conductor 4o in conductor, preferably for a cathode, the char- SHOWS POWSIS 0f (Wer 100 kW fOr Voltages Of a few acteristic feature of which is that, between the thousand volts to be reliably supplied to vacuum insulator surrounding the conductor and the conapparatus of any desired construction in which duotor which abuts against it, there 1s provided the Well cf the vessel forms permanently 0r tema protective gap which opens into the vacuum pOIarlly the cathode. A direct or alternating 45 space and is narrower than the width of the current voltage may be applied to the lead-in glow fringe formed in the vacuum space around COndllCtOlthe cathode. Between the insulator and the met- The accompanying drawing illustrates by way al wall of the vessel which is preferably cooled OfXemDle three different forms of construction there may also be provided a narrow protective according t0 the invention, FiguresI 1, 2 and 3 50 gap. In this way the starting of a detrimental being Sectional elevations of different construcglow or arc discharge at the point where the tions of lead-in conductor of acathode disintegrainsulator abuts against the metal is avoided. tion apparatus.
The invention also relates to a lead-in con- Referring to Figure 1, the conductor 4 is inductor for the anode o1' a metal vacuum vessel troduced into the vacuum space through the wall 55 i oi -the vacuum vessel, which is provided with cooling channels and 3. The insulated metal leadin conductor is, for instance, made hollow, so as to be capable of being cooled, a. cooling medium being introduced through the pipe S and discharged through the pipe l. The conductor is surrounded on all sides by an insulator i9, which may, for instance, be a quartz tube, in such a manner that, between the conductor and the insulator, there remains such a narrow gap 2l that no glow discharge can take place therein. I are packing rings for rendering the insulator I2 airtight. I3 is an insulating and clamping ring which is clamped on by insulated screws ld surrounded by an insulation I5. The quartz tube is surrounded at its lower end by the cooled metal Wall I5 of the vacuum vessel. The conductor is provided with a screwed-in metal cap I'l, which partly surrounds with its part i8 the insulator I9 at a short distance so that a gap 2U is left in between, which, together with the gap 2l, forms a labyrinth gap.
Referring to Figure 2, the conductor da. is introduced into the vacuum space through the wall i, which is provided with cooling channels 2 and 3. The insulated metal lead-in is, for instance; made hollow and capable of being cooled; the cooling medium may be supplied through the pipe 6 and be discharged through the pipe l. 'I'he conductor 4a is surrounded by an insulator 8, for instance, a porcelain insulator abutting against it, and between the insulator and the conductor there is provided a gap 9 which is, for instance, curved. The insulator- 8 may be cemented on the conductor, for instance, by an elastic cement. i I are lead or copper parts which are provided in order to obtain a uniform pressure stress on the insulator. Between the insulator t and the cooled metal wall of the vessel there is further provided a second protective gap l2a; i3a is an insulating member, Ia a sealing member, for instance of rubber, I5a an insulating ring and Ita a metal screw nut.
The characteristic feature oi the anode lead-in conductor according to Figure 3 is that the insulator @il abuts in such a manner against the cooled wall il of the vessel which forms the cathode in such a manner that, between the insulator and the lead-in conductor there remains a narrow gap 62. In this case the insulator is cooled by the wall of the vessel.
What we claim is:
1. In apparatus for coating articles by cathode disintegration, a metal housing wall having an opening therein, a hollow insulating member having a tubular portion with the periphery thereof engaging the housing within said opening, a hollow coolable metal conductor extending into the housing through said insulating member, means carried by the inner end of said conductor having an annular skirt covering the inner end of the insulating member and spaced garanzie therefrom at such a small distance as to prevent a glow dischargewithin the housing from taking place in said space, means arranged outside said housing for insulating and sealing said conductor with respect to said housing wall, and said housing wall having channels therein adjacent said opening for receiving a cooling medium.
2. In apparatus for coating articles by cathode disintegration, a metal housing wall having an opening -therein and an arcuated shaped recess in the inner face thereof adjacent said opening, an insulating member having an axial passage nextending therethrough, said insulating member having a tubular end portion with the periphery thereof engaging said housing wall Within said opening, an end portion of said insulating member adjacent said tubular portion being arcuated shaped and extending into said recess and spaced from the housing Wall providing the recess, a hollow conductor extending into the housing through said passage and engaging said insulating member, means carried by the conductorcovering the inner end of the insulating member, and means for cooling said hollow conductor so as .to carry heat away from the insulating member and the conductor.
3. In apparatus for coating articles by cathode disintegration, a metal housing wall having an opening therein and an arcuated shaped recess in the inner face thereof adjacent said opening, an insulating member having an axial passage extending therethrough, said insulating member having a tubular end portion with the periphery thereof engaging said housing wall within said opening, an end portion of said insulating member adjacent said tubular portion being arcuated shaped and extending into said recess and spaced from the housing wall providing the recess. a hollow conductor extending into the housing through said passage and engaging said insulating member, means for cooling said hollow conductor so as 'to carry heat away from the insulating member and the conductor, and said housing wall adjacent said opening having channels therein for receiving a cooling medium.
a. In apparatus for coating articles by cathode disintegration, a metal housing Wall having an opening therein, a tubular insulating member extending through said opening with the periphery engaging said housing within the opening, a metal conductor extending into the housing through said insulating member, means arranged outside said housing for sealing said insulating member and said conductor with respect to said housing wall, a cap member carried by said conductor covering the inner end of the insulating member, and said housing wall having channels therein adjacent said opening for receiving a cooling medium Ito carry heat away from said insulating member.
BERNHARD BERGHAUS.
BURKHARDT.
US263074A 1938-03-25 1939-03-20 Cathode disintegration apparatus Expired - Lifetime US2219613A (en)

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DEB17612D DE967138C (en) 1938-03-25 1938-03-25 Current feedthrough for vacuum annealing and melting furnaces

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US263075A Expired - Lifetime US2219614A (en) 1938-03-25 1939-03-20 Electrical discharge apparatus
US263074A Expired - Lifetime US2219613A (en) 1938-03-25 1939-03-20 Cathode disintegration apparatus

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US263075A Expired - Lifetime US2219614A (en) 1938-03-25 1939-03-20 Electrical discharge apparatus

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US (3) US2219615A (en)
CH (2) CH227449A (en)
DE (1) DE967138C (en)
FR (1) FR852025A (en)
GB (3) GB526528A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2701846A (en) * 1951-01-18 1955-02-08 Berghaus Lead-in device for high-power currents
US2762945A (en) * 1951-01-18 1956-09-11 Berghaus Passing an electric conductor through the bounding walls of discharge vessels
US2906911A (en) * 1953-05-28 1959-09-29 Berghaus Elektrophysik Anst Leading-in insulators for electric glow discharge receptacles
US3018409A (en) * 1953-12-09 1962-01-23 Berghaus Elektrophysik Anst Control of glow discharge processes
US3626079A (en) * 1970-08-10 1971-12-07 Gen Electric Electrical bushing with cooling means
US4078150A (en) * 1976-08-04 1978-03-07 Westinghouse Electric Corporation Liquid-cooled stud for terminal bushings of a generator
US4117254A (en) * 1975-12-16 1978-09-26 Artur Richter Device for passing electric current through a wall subjected to excess pressure on its inner side
EP3664121A1 (en) * 2018-12-05 2020-06-10 ASML Netherlands B.V. High voltage vacuum feedthrough
CN116119900A (en) * 2023-01-10 2023-05-16 齐鲁工业大学(山东省科学院) Glass material preparation device and application method thereof

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2778866A (en) * 1957-01-22 Electric furnace
US3126439A (en) * 1964-03-24 High-voltage electrical insulating bushing
US2535622A (en) * 1941-07-12 1950-12-26 Pour L Ind Du Magnesium Soc Et Production of metal from its ore
CH291362A (en) * 1950-08-03 1953-06-15 Berghaus Elektrophysik Anst Method and device for carrying out technical processes by means of gas discharges, which are connected with a cathodeic material atomization.
NL130736C (en) * 1959-05-08
CH404010A (en) * 1961-03-30 1965-12-15 Berghaus Elektrophysik Anst Method and device for carrying out technical processes under the influence of an electric glow discharge
US3141989A (en) * 1962-11-26 1964-07-21 Gen Electric Workpiece support for glow discharge apparatus
CH658539A5 (en) * 1982-03-24 1986-11-14 Balzers Hochvakuum DEVICE FOR PUTTING AN ELECTRIC CURRENT THROUGH THE WALL OF A VACUUM CHAMBER.

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE354797C (en) * 1922-06-15 Bbc Brown Boveri & Cie Anode lead-in for metal vapor rectifiers
DE209192C (en) *
DE487192C (en) * 1929-12-05 Siemens Schuckertwerke Akt Ges Large rectifier
DE404490C (en) * 1922-07-02 1924-10-21 Siemens Schuckertwerke G M B H Metal steam rectifier with double-walled cylindrical cooling vessels protruding into the interior
DE433210C (en) * 1922-10-03 1926-08-27 Bbc Brown Boveri & Cie Large rectifier with anodes arranged side by side in a common space
GB365479A (en) * 1930-06-27 1932-01-21 Oerlikon Maschf Anode for large mercury-vapour rectifiers
DE577795C (en) * 1930-11-13 1934-06-01 Bbc Brown Boveri & Cie Electrode lead-in for mercury vapor rectifier using a lead-through insulator enclosing the shaft of the electrode through the rectifier housing
DE626427C (en) * 1931-04-10 1936-02-26 Siemens Schuckertwerke Akt Ges Capacitor bushing for introducing conductors into high-voltage power converters, in particular large-scale mercury vapor rectifiers, with conductive and insulating layers alternately arranged between the conductor and the metallic vacuum vessel

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2701846A (en) * 1951-01-18 1955-02-08 Berghaus Lead-in device for high-power currents
US2762945A (en) * 1951-01-18 1956-09-11 Berghaus Passing an electric conductor through the bounding walls of discharge vessels
US2906911A (en) * 1953-05-28 1959-09-29 Berghaus Elektrophysik Anst Leading-in insulators for electric glow discharge receptacles
US3018409A (en) * 1953-12-09 1962-01-23 Berghaus Elektrophysik Anst Control of glow discharge processes
US3626079A (en) * 1970-08-10 1971-12-07 Gen Electric Electrical bushing with cooling means
US4117254A (en) * 1975-12-16 1978-09-26 Artur Richter Device for passing electric current through a wall subjected to excess pressure on its inner side
US4078150A (en) * 1976-08-04 1978-03-07 Westinghouse Electric Corporation Liquid-cooled stud for terminal bushings of a generator
WO2020114761A1 (en) * 2018-12-05 2020-06-11 Asml Netherlands B.V. High voltage vacuum feedthrough
EP3664121A1 (en) * 2018-12-05 2020-06-10 ASML Netherlands B.V. High voltage vacuum feedthrough
US10886093B2 (en) 2018-12-05 2021-01-05 Asml Netherlands B.V. High voltage vacuum feedthrough
TWI733264B (en) * 2018-12-05 2021-07-11 荷蘭商Ａｓｍｌ荷蘭公司 High voltage vacuum feedthrough
KR20210087525A (en) * 2018-12-05 2021-07-12 에이에스엠엘 네델란즈 비.브이. High voltage vacuum feedthrough
CN113169015A (en) * 2018-12-05 2021-07-23 Asml荷兰有限公司 High voltage vacuum feedthrough
JP2022510122A (en) * 2018-12-05 2022-01-26 エーエスエムエル ネザーランズ ビー．ブイ． High voltage vacuum feedthrough
US11443912B2 (en) 2018-12-05 2022-09-13 Asml Netherlands B.V. High voltage vacuum feedthrough
CN116119900A (en) * 2023-01-10 2023-05-16 齐鲁工业大学(山东省科学院) Glass material preparation device and application method thereof

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Publication number Publication date
US2219614A (en) 1940-10-29
DE967138C (en) 1957-10-10
US2219615A (en) 1940-10-29
GB526528A (en) 1940-09-19
GB526526A (en) 1940-09-19
FR852025A (en) 1940-01-22
CH227449A (en) 1943-06-15
CH240338A (en) 1945-12-15
GB526527A (en) 1940-09-19

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