US20230407464A1 - Multilayer system, component, and method for producing such a multilayer system or component - Google Patents

Multilayer system, component, and method for producing such a multilayer system or component Download PDF

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US20230407464A1
US20230407464A1 US18/030,526 US202118030526A US2023407464A1 US 20230407464 A1 US20230407464 A1 US 20230407464A1 US 202118030526 A US202118030526 A US 202118030526A US 2023407464 A1 US2023407464 A1 US 2023407464A1
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Prior art keywords
layer
metal
multilayer system
wear protection
anticorrosion
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US18/030,526
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Ricardo Henrique Brugnara
Nazlim Bagcivan
Edgar Schulz
Markus Schmalwasser
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Schaeffler Technologies AG and Co KG
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Schaeffler Technologies AG and Co KG
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Assigned to Schaeffler Technologies AG & Co. KG reassignment Schaeffler Technologies AG & Co. KG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: Brugnara, Ricardo Henrique, SCHULZ, EDGAR, Schmalwasser, Markus, BAGCIVAN, NAZLIM
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
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    • C23C14/0605—Carbon
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    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
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    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Definitions

  • the disclosure relates to a multilayer system comprising at least one anticorrosion layer and one wear protection layer.
  • the disclosure also relates to a component comprising a metallic substrate having a surface and a multilayer system. Furthermore, the disclosure relates to a method for producing such a multilayer system or component.
  • Hard chrome layers are currently used in the automotive industry as anticorrosion and wear protection layers to protect the steels used from corrosion and mechanical wear. Such hard chrome layers are usually produced using electrolyte baths containing chromium(VI), which are now classified as questionable from an environmental point of view and their use is increasingly subject to legislative restrictions. Accordingly, there is a need to replace the hard chrome layer with a coating that can be produced in a more environmentally friendly manner.
  • VI chromium
  • Multilayer systems comprising at least one anticorrosion layer and one wear protection layer are already known from DE 10 2013 209 030 A1.
  • a corrosion protection for a metallic component is described therein, which comprises at least one wear protection layer in the form of a layer formed chemically, galvanically or by means of PVD/PACVD processes, which is formed on the metallic component.
  • ALD atomic layer deposition
  • DE 10 2004 044 919 A describes a decorative coating for protecting substrates against corrosion, wear and oxidation based on refractory metal magnesium nitrides and methods for producing it.
  • the object is achieved for a multilayer system, comprising at least one anticorrosion layer and a wear protection layer, in that the anticorrosion layer is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal, and the wear protection layer is formed by at least one diamond-like metal-free carbon layer.
  • the multilayer system ensures effective corrosion and wear protection for metallic substrates. It can withstand both mechanical and corrosive attack due to the wear protection layer directly or indirectly protecting the anticorrosion layer and bearing the mechanical load.
  • the wear protection layer preferably has friction-reducing properties with respect to a contact partner in frictional contact therewith in a tribological system.
  • the multilayer system can also be produced in high quantities at low production costs, making it suitable for use in the automotive industry.
  • the anticorrosion layer in particular has 10 to 40 at % titanium and/or 15 to 50 at % magnesium.
  • concentration of the at least one rare earth metal in the anticorrosion layer is preferably in the range from 0.1 to 15 at %.
  • the metal nitride or the metal carbonitride for forming the anticorrosion layer is further formed comprising at least one metal selected from the group consisting of aluminum, chromium, zirconium, hafnium.
  • Their concentration in the anticorrosion layer is preferably in the range from 10 to 40 at %.
  • the metal nitride or metal carbonitride comprises gadolinium or cerium or lanthanum as the rare earth metal, or a mixture of two or three of said elements.
  • the anticorrosion layer is formed comprising TiMgGdN or TiMgGdCN or TiMgCeN or TiMgCeCN or TiMgLaN or TiMgLaCN.
  • the anticorrosion layer is adjacent to a metallic adhesion-promoting layer on its side facing away from the wear protection layer.
  • the metallic adhesion-promoting layer is formed of chromium or titanium or zirconium or magnesium or gadolinium or a mixture of two or three of said metals.
  • the adhesion-promoting layer serves to improve the mechanical bonding of the multilayer system to a metallic substrate.
  • the anticorrosion layer is preferably adjacent to an intermediate layer on its side facing the wear protection layer, which intermediate layer is formed from a silicon-doped metal nitride or a metal carbonitride, in particular a silicon-doped metal carbonitride.
  • the intermediate layer serves to improve the mechanical bonding of the anticorrosion layer to the wear protection layer.
  • the wear protection layer in the form of at least one diamond-like metal-free carbon layer preferably comprises at least one layer of the type a-C or a-C:H or ta-C or ta-C:Si or ta-C:H:O:Si or a-C:H:Si or a-C:H:O:Si or a-C:H:N or a combination of at least two such carbon layers.
  • Several carbon layers of the same composition can be formed on top of one another, or carbon layers of different compositions can alternate or follow one another to form a wear protection layer.
  • the anticorrosion layer preferably has a thickness in the range from 0.5 to 10 ⁇ m, in particular in the range from 0.5 to 5 ⁇ m.
  • the wear protection layer preferably has a thickness in the range from 0.1 to 10 ⁇ m, in particular in the range from 0.1 to 5 ⁇ m.
  • the object is further achieved by a component comprising a metallic substrate with a surface and a multilayer system, wherein the multilayer system is formed at least partially on the surface of the substrate in such a manner that the wear protection layer forms a cover layer facing away from the substrate.
  • the order would thus be:
  • the metallic substrate is formed of steel.
  • the steel grades 100Cr6, 42CrMo4 or 16MnCr5 are particularly preferred in this regard.
  • the wear protection layer preferably has friction-reducing properties with respect to a contact partner in frictional contact therewith.
  • Adhesion-promoting layer none
  • Adhesion-promoting layer TiMgGd
  • the component according to the disclosure is in particular a rolling bearing component or a sliding bearing component or components used in tribological contact in connection with corrosive media.
  • corrosive media water-based lubricants, aqueous media and hydrocarbon-based lubricants aged in operation are considered corrosive media here.
  • the object is further achieved by a method for producing a multilayer system according to the disclosure or a component according to the disclosure, wherein the multilayer system is formed by means of a PVD process and/or a PACVD process.
  • FIGS. 1 to 6 are intended to explain the disclosure by way of example. In the figures:
  • FIG. 1 shows a first multilayer system comprising an anticorrosion layer and a wear protection layer
  • FIG. 2 shows a second multilayer system comprising an anti-corrosion layer, an intermediate layer and a wear protection layer
  • FIG. 3 shows a third multilayer system comprising an adhesion-promoting layer, an anticorrosion layer, an intermediate layer, and a wear protection layer
  • FIG. 4 shows a fourth multilayer system comprising an adhesion-promoting layer, an anticorrosion layer and a wear protection layer;
  • FIG. 5 shows a component with a multilayer system according to FIG. 3 ;
  • FIG. 6 shows a component in the form of a rolling bearing ring.
  • FIG. 1 shows a first multilayer system 1 in a sectional view perpendicular to the layer plane comprising an anticorrosion layer 2 and a wear protection layer 3 .
  • the anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal.
  • the wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC).
  • DLC diamond-like metal-free carbon layer
  • FIG. 2 shows a second multilayer system 1 ′ in a sectional view perpendicular to the layer plane comprising an anticorrosion layer 2 , an intermediate layer 4 and a wear protection layer 3 .
  • the anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal.
  • the wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC).
  • the intermediate layer 4 is formed of a silicon-doped metal nitride or a metal carbonitride, in particular a silicon-doped metal carbonitride.
  • FIG. 3 shows a third multilayer system 1 ′′ in a sectional view perpendicular to the layer plane comprising an adhesion-promoting layer 5 , an anticorrosion layer 2 , an intermediate layer 4 and a wear protection layer 3 .
  • the anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal.
  • the wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC).
  • the intermediate layer 4 is formed of a silicon-doped metal nitride or a metal carbonitride, in particular a silicon-doped metal carbonitride.
  • the metallic adhesion-promoting layer 5 is preferably formed of chromium or titanium or zirconium or magnesium or gadolinium or a mixture of two or three of said metals.
  • the adhesion-promoting layer 5 is formed of TiMg here.
  • FIG. 4 shows a fourth multilayer system 1 ′′′ in a sectional view perpendicular to the layer plane comprising an adhesion-promoting layer 5 , an anticorrosion layer 2 and a wear protection layer 3 .
  • the anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal.
  • the wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC).
  • the metallic adhesion-promoting layer 5 is preferably formed of chromium or titanium or zirconium or magnesium or gadolinium or a mixture of two or three of said metals.
  • FIG. 5 shows a component 8 in a sectional view perpendicular to the layer plane of the multilayer system comprising a metallic substrate 6 with a surface 6 a and the third multilayer system 1 ′′ according to FIG. 3 , wherein the third multilayer system 1 ′′ is formed partially on the surface 6 a of the substrate 6 in such a manner that the wear protection layer 3 forms a cover layer 7 facing away from the substrate 6 .
  • FIG. 6 shows a component 8 in the form of a rolling bearing ring in a three-dimensional view.
  • the component 8 comprises an annular metallic substrate 6 , which is covered on its cylindrical lateral surface and its end faces with a multilayer system 1 according to FIG. 1 .
  • a multilayer system 1 according to FIG. 1 .
  • other multilayer systems according to the disclosure can also be used in this regard.
  • the multilayer system can cover a substrate completely or only superficially in certain regions, depending on the corrosive attack present and the specific wear conditions.

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Abstract

A multilayer system having at least one anticorrosion layer and a wear protection layer, wherein the anticorrosion layer is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further includes at least one rare earth metal, and the wear protection layer is formed by at least one diamond-like metal-free carbon layer. A component having such a multilayer system and a method for producing the multilayer system or the component are also provided.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This application is the U.S. National Phase of PCT Appln. No. PCT/DE2021/100764, filed Sep. 20, 2021, which claims the benefit of German Patent Appln. No. 102020126195.0, filed Oct. 7, 2020, and German Patent Appln. No. 102021123832.3, filed Sep. 15 2021, the entire disclosures of which are incorporated by reference herein.
    • TECHNICAL FIELD
  • The disclosure relates to a multilayer system comprising at least one anticorrosion layer and one wear protection layer. The disclosure also relates to a component comprising a metallic substrate having a surface and a multilayer system. Furthermore, the disclosure relates to a method for producing such a multilayer system or component.
    • BACKGROUND
  • Hard chrome layers are currently used in the automotive industry as anticorrosion and wear protection layers to protect the steels used from corrosion and mechanical wear. Such hard chrome layers are usually produced using electrolyte baths containing chromium(VI), which are now classified as questionable from an environmental point of view and their use is increasingly subject to legislative restrictions. Accordingly, there is a need to replace the hard chrome layer with a coating that can be produced in a more environmentally friendly manner.
  • Multilayer systems comprising at least one anticorrosion layer and one wear protection layer are already known from DE 10 2013 209 030 A1. A corrosion protection for a metallic component is described therein, which comprises at least one wear protection layer in the form of a layer formed chemically, galvanically or by means of PVD/PACVD processes, which is formed on the metallic component. At least one anticorrosion layer, which is formed by means of an ALD (=atomic layer deposition) process, is arranged on the wear protection layer. However, the ALD process is not very suitable for mass use in the automotive industry.
  • DE 10 2004 044 919 A describes a decorative coating for protecting substrates against corrosion, wear and oxidation based on refractory metal magnesium nitrides and methods for producing it.
    • SUMMARY
  • It is the object of the disclosure to provide an alternative multilayer system that offers even more reliable corrosion and wear protection and can be manufactured in large quantities. Furthermore, it is the object of the disclosure to provide a component with such a multilayer system and to disclose a method for producing such a multilayer system or component.
  • The object is achieved for a multilayer system, comprising at least one anticorrosion layer and a wear protection layer, in that the anticorrosion layer is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal, and the wear protection layer is formed by at least one diamond-like metal-free carbon layer.
  • The multilayer system ensures effective corrosion and wear protection for metallic substrates. It can withstand both mechanical and corrosive attack due to the wear protection layer directly or indirectly protecting the anticorrosion layer and bearing the mechanical load. The wear protection layer preferably has friction-reducing properties with respect to a contact partner in frictional contact therewith in a tribological system.
  • The multilayer system can also be produced in high quantities at low production costs, making it suitable for use in the automotive industry.
  • The anticorrosion layer in particular has 10 to 40 at % titanium and/or 15 to 50 at % magnesium. The concentration of the at least one rare earth metal in the anticorrosion layer is preferably in the range from 0.1 to 15 at %.
  • Preferably, the metal nitride or the metal carbonitride for forming the anticorrosion layer is further formed comprising at least one metal selected from the group consisting of aluminum, chromium, zirconium, hafnium. Their concentration in the anticorrosion layer is preferably in the range from 10 to 40 at %.
  • Particularly preferably, the metal nitride or metal carbonitride comprises gadolinium or cerium or lanthanum as the rare earth metal, or a mixture of two or three of said elements.
  • In particular, the anticorrosion layer is formed comprising TiMgGdN or TiMgGdCN or TiMgCeN or TiMgCeCN or TiMgLaN or TiMgLaCN.
  • Anticorrosion layers and their corrosion behavior based on metal nitrides such as TiMgREN (RE=rare earth) have been described in the publication “Corrosion and wear protection of mild steel substrates by innovative PVD coatings”, Holger Hoche, Casper Pusch, Matthias Oechsner, Surface & Coatings Technology 391 (2020), see: https://doi.org/10.1016/j.surfcoat.2020 125659
  • It has proved advantageous if the anticorrosion layer is adjacent to a metallic adhesion-promoting layer on its side facing away from the wear protection layer. In particular, the metallic adhesion-promoting layer is formed of chromium or titanium or zirconium or magnesium or gadolinium or a mixture of two or three of said metals. The adhesion-promoting layer serves to improve the mechanical bonding of the multilayer system to a metallic substrate.
  • The anticorrosion layer is preferably adjacent to an intermediate layer on its side facing the wear protection layer, which intermediate layer is formed from a silicon-doped metal nitride or a metal carbonitride, in particular a silicon-doped metal carbonitride. The intermediate layer serves to improve the mechanical bonding of the anticorrosion layer to the wear protection layer.
  • The wear protection layer in the form of at least one diamond-like metal-free carbon layer (=DLC—diamond-like coating) preferably comprises at least one layer of the type a-C or a-C:H or ta-C or ta-C:Si or ta-C:H:O:Si or a-C:H:Si or a-C:H:O:Si or a-C:H:N or a combination of at least two such carbon layers. Several carbon layers of the same composition can be formed on top of one another, or carbon layers of different compositions can alternate or follow one another to form a wear protection layer.
  • The anticorrosion layer preferably has a thickness in the range from 0.5 to 10 μm, in particular in the range from 0.5 to 5 μm. The wear protection layer preferably has a thickness in the range from 0.1 to 10 μm, in particular in the range from 0.1 to 5 μm.
  • The object is further achieved by a component comprising a metallic substrate with a surface and a multilayer system, wherein the multilayer system is formed at least partially on the surface of the substrate in such a manner that the wear protection layer forms a cover layer facing away from the substrate. Starting from the metallic substrate, the order would thus be:
      • optional metallic adhesion-promoting layer
      • anticorrosion layer
      • optional intermediate layer
      • wear protection layer (=cover layer)
  • In particular, the metallic substrate is formed of steel. The steel grades 100Cr6, 42CrMo4 or 16MnCr5 are particularly preferred in this regard.
  • The wear protection layer preferably has friction-reducing properties with respect to a contact partner in frictional contact therewith.
  • The following multilayer systems on metallic substrates, in particular steel, are particularly preferred and are mentioned here only by way of example:
  • Multilayer System 1:
  • Adhesion-promoting layer: none
      • Anticorrosion layer: TiMgGdN
      • Intermediate layer: none
      • Wear protection layer: a-C:H
  • Multilayer System 2:
      • Adhesion-promoting layer: none
      • Anticorrosion layer: TiMgGdN
      • Intermediate layer: none
      • Wear protection layer: a-C:H:Si
  • Multilayer System 3:
      • Adhesion-promoting layer: TiMg
      • Anticorrosion layer: TiMgGdN
      • Intermediate layer: none
      • Wear protection layer: a-C:H
  • Multilayer System 4:
      • Adhesion-promoting layer: titanium
      • Anticorrosion layer: TiMgGdN
      • Intermediate layer: TiSiN
      • Wear protection layer: a-C:H:Si
  • Multilayer System 5:
      • Adhesion-promoting layer: titanium
      • Anticorrosion layer: TiMgCrGdN
      • Intermediate layer: CrSiN
      • Wear protection layer: a-C:H:Si
  • Multilayer System 6:
      • Adhesion-promoting layer: none
      • Anticorrosion layer: TiMgGdCN
      • Intermediate layer: none
      • Wear protection layer: a-C:H:Si
  • Multilayer System 7:
      • Adhesion-promoting layer: TiMg
      • Anticorrosion layer: TiMgGdCN
      • Intermediate layer: none
      • Wear protection layer: a-C:H:Si
  • Multilayer System 8:
      • Adhesion-promoting layer: TiMg
      • Anticorrosion layer: TiMgLaCN or TiMgCeCN or
        • TiMgLaN or TiMgCeN
      • Intermediate layer: none
      • Wear protection layer: a-C:H:Si
  • Multilayer System 9:
      • Adhesion-promoting layer: TiMgGd
      • Anticorrosion layer: TiMgGdN
      • Intermediate layer: none
      • Wear protection layer: at least one layer of the type
        • a-C:H and/or a-C:H:Si
  • Multilayer System 10:
      • Adhesion-promoting layer: TiMgGd
      • Anticorrosion layer 1: TiMgGdN
      • Anticorrosion layer 2: TiMgGdCN
      • Intermediate layer: none
      • Wear protection layer: at least one layer of the type
        • a-C:H and/or a-C:H:Si
  • Multilayer System 11:
      • Adhesion-promoting layer: TiMgGd
      • Anticorrosion layer: TiMgGdCN
      • Intermediate layer: none
      • Wear protection layer: at least one layer of the type
        • a-C:H and/or a-C:H:Si
  • Multilayer System 12:
  • Adhesion-promoting layer: TiMgGd
      • Anticorrosion layer: TiMgGdCN
      • Intermediate layer: none
      • Wear protection layer: at least one layer of the type
        • ta-C:Si and/or ta-C:H:O:Si
  • Multilayer System 13:
      • Adhesion-promoting layer: TiMgGd
      • Anticorrosion layer 1: TiMgGdN
      • Anticorrosion layer 2: TiMgGdCN
      • Intermediate layer: TiCN or TiSiCN
      • Wear protection layer: at least one layer of the type
        • ta-C:Si and/or ta-C:H:O:Si
  • The component according to the disclosure is in particular a rolling bearing component or a sliding bearing component or components used in tribological contact in connection with corrosive media. In particular, water-based lubricants, aqueous media and hydrocarbon-based lubricants aged in operation are considered corrosive media here.
  • The object is further achieved by a method for producing a multilayer system according to the disclosure or a component according to the disclosure, wherein the multilayer system is formed by means of a PVD process and/or a PACVD process. These methods are cost-effective for use in mass production, also in the automotive environment.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIGS. 1 to 6 are intended to explain the disclosure by way of example. In the figures:
  • FIG. 1 shows a first multilayer system comprising an anticorrosion layer and a wear protection layer;
  • FIG. 2 shows a second multilayer system comprising an anti-corrosion layer, an intermediate layer and a wear protection layer;
  • FIG. 3 shows a third multilayer system comprising an adhesion-promoting layer, an anticorrosion layer, an intermediate layer, and a wear protection layer
  • FIG. 4 shows a fourth multilayer system comprising an adhesion-promoting layer, an anticorrosion layer and a wear protection layer;
  • FIG. 5 shows a component with a multilayer system according to FIG. 3 ; and
  • FIG. 6 shows a component in the form of a rolling bearing ring.
    •  DETAILED DESCRIPTION
  • FIG. 1 shows a first multilayer system 1 in a sectional view perpendicular to the layer plane comprising an anticorrosion layer 2 and a wear protection layer 3. The anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal. The wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC).
  • FIG. 2 shows a second multilayer system 1′ in a sectional view perpendicular to the layer plane comprising an anticorrosion layer 2, an intermediate layer 4 and a wear protection layer 3. The anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal. The wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC). The intermediate layer 4 is formed of a silicon-doped metal nitride or a metal carbonitride, in particular a silicon-doped metal carbonitride.
  • FIG. 3 shows a third multilayer system 1″ in a sectional view perpendicular to the layer plane comprising an adhesion-promoting layer 5, an anticorrosion layer 2, an intermediate layer 4 and a wear protection layer 3. The anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal. The wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC). The intermediate layer 4 is formed of a silicon-doped metal nitride or a metal carbonitride, in particular a silicon-doped metal carbonitride. The metallic adhesion-promoting layer 5 is preferably formed of chromium or titanium or zirconium or magnesium or gadolinium or a mixture of two or three of said metals. In particular, the adhesion-promoting layer 5 is formed of TiMg here.
  • FIG. 4 shows a fourth multilayer system 1′″ in a sectional view perpendicular to the layer plane comprising an adhesion-promoting layer 5, an anticorrosion layer 2 and a wear protection layer 3. The anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal. The wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC). The metallic adhesion-promoting layer 5 is preferably formed of chromium or titanium or zirconium or magnesium or gadolinium or a mixture of two or three of said metals.
  • FIG. 5 shows a component 8 in a sectional view perpendicular to the layer plane of the multilayer system comprising a metallic substrate 6 with a surface 6 a and the third multilayer system 1″ according to FIG. 3 , wherein the third multilayer system 1″ is formed partially on the surface 6 a of the substrate 6 in such a manner that the wear protection layer 3 forms a cover layer 7 facing away from the substrate 6.
  • FIG. 6 shows a component 8 in the form of a rolling bearing ring in a three-dimensional view. The component 8 comprises an annular metallic substrate 6, which is covered on its cylindrical lateral surface and its end faces with a multilayer system 1 according to FIG. 1 . Alternatively, of course, other multilayer systems according to the disclosure can also be used in this regard.
  • Furthermore, the multilayer system can cover a substrate completely or only superficially in certain regions, depending on the corrosive attack present and the specific wear conditions.
    • LIST OF REFERENCE SYMBOLS
      • 1, 1″, 1″, 1′″ Multilayer system
      • 2 Anticorrosion layer
      • 3 Wear protection layer
      • 4 Intermediate layer
      • 5 Adhesion-promoting layer
      • 6 Substrate
      • 6 a Surface
      • 7 Cover layer
      • 8 Component

Claims (19)

1. A multilayer system comprising,
at least one anticorrosion layer and a wear protection layer;
the anticorrosion layer is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as a metal;
the metal nitride or the metal carbonitride further comprises at least one rare earth metal; and
the wear protection layer is formed by at least one diamond-like metal-free carbon layer.
2. The multilayer system according to claim 1, wherein the metal nitride or the metal carbonitride is further formed comprising at least one metal selected from the group consisting of aluminum, chromium, zirconium, or hafnium.
3. The multilayer system according to claim 1, wherein the at least one rare earth metal comprises at least one of gadolinium, cerium, or lanthanum.
4. The multilayer system according to claim 1, wherein the anticorrosion layer is formed comprising TiMgGdN or TiMgGdCN or TiMgCeN or TiMgCeCN or TiMgLaN or TiMgLaCN.
5. The multilayer system according to claim 1, wherein the anticorrosion layer is adjacent to a metallic adhesion-promoting layer on a side thereof facing away from the wear protection layer.
6. The multilayer system according to claim 5, wherein the metallic adhesion-promoting layer is formed of at least one of chromium, titanium, zirconium, magnesium, or gadolinium.
7. The multilayer system according to claim 1, wherein the anticorrosion layer is adjacent to an intermediate layer on a side thereof facing the wear protection layer, the intermediate layer is formed of a silicon-doped metal nitride or a silicon-doped metal carbonitride.
8. The multilayer system according to claim 1, wherein the wear protection layer comprises at least one diamond-like metal-free carbon layer of a type a-C or a-C:H or ta-C or ta-C:Si or ta-C:H:O:Si or a-C:H:Si or a-C:H:O:Si or a-C:H:N or a combination of at least two of these types.
9. The multilayer system according to claim 1, wherein the anticorrosion layer has a thickness in a range from 0.5 to 10 μm.
10. A component comprising a metallic substrate with a surface the multilayer system is according to claim 1 formed at least partially on the surface such that the wear protection layer forms a cover layer facing away from the metallic substrate.
11. The component according to claim 10, wherein the component comprises a rolling bearing component or a sliding bearing component or a component used in a tribological contact and further in contact with a corrosive medium.
12. A method for producing a multilayer system, the method comprising:
depositing at least one anticorrosion layer formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as a metal using at least one of a PVD or a PACVD process, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal; and
depositing a wear protection layer formed by at least one diamond-like metal-free carbon layer by at least one of a PVD process or a PACVD process.
13. The method of claim 12, wherein the metal nitride or the metal carbonitride is further formed comprising at least one metal selected from the group consisting of aluminum, chromium, zirconium, or hafnium.
14. The method of claim 12, wherein the at least one rare earth metal comprises at least one of gadolinium, cerium, or lanthanum.
15. The method of claim 12, wherein the anticorrosion layer is formed comprising TiMgGdN or TiMgGdCN or TiMgCeN or TiMgCeCN or TiMgLaN or TiMgLaCN.
16. The method of claim 12, further comprising depositing to a metallic adhesion-promoting layer on a side of the anticorrosion layer facing away from the wear protection layer.
17. The method of claim 12, further comprising depositing an intermediate layer between the anticorrosion layer and the wear protection layer, the intermediate layer comprising a silicon-doped metal nitride or a silicon-doped metal carbonitride.
18. The method of claim 12, wherein the anticorrosion layer is deposited on a surface of a metallic substrate.
19. The multilayer system of claim 1, wherein the wear protection layer has a thickness in the range from 0.1 to 10 μm.
US18/030,526 2020-10-07 2021-09-20 Multilayer system, component, and method for producing such a multilayer system or component Pending US20230407464A1 (en)

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