US20220020610A1 - Substrate cleaning device and substrate cleaning method - Google Patents
Substrate cleaning device and substrate cleaning method Download PDFInfo
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- US20220020610A1 US20220020610A1 US17/489,277 US202117489277A US2022020610A1 US 20220020610 A1 US20220020610 A1 US 20220020610A1 US 202117489277 A US202117489277 A US 202117489277A US 2022020610 A1 US2022020610 A1 US 2022020610A1
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- substrate
- cleaning member
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- 239000000758 substrate Substances 0.000 title claims abstract description 305
- 238000000034 method Methods 0.000 title description 24
- 238000003825 pressing Methods 0.000 claims abstract description 275
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Images
Classifications
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
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- H01L21/67011—Apparatus for manufacture or treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0217—Use of a detergent in high pressure cleaners; arrangements for supplying the same
Definitions
- the present technology relates to a substrate cleaning device and a substrate cleaning method.
- processing of a substrate having a fine structure is performed.
- a substrate polishing device CMP device
- the various material films a metal film, a barrier film, an insulating film, and the like
- there are slurry residue and metal polishing waste Cu polishing waste and the like used in CMP polishing.
- a substrate cleaning device includes: a cleaning member that cleans a substrate by contacting the substrate; a member rotation unit that rotates the cleaning member; a member drive unit that presses the cleaning member against the substrate; a load measurement unit that measures a pressing load of the cleaning member; and a control unit that controls a pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes a setting load, wherein the control unit repeats an operation of comparing the measurement value of the load measurement unit with the setting load, changing the pressing amount of the cleaning member by a first movement amount so that a difference value decreases, when the difference value is larger than a first threshold value and equal to or smaller than a second threshold value, and changing the pressing amount of the cleaning member by a second movement amount larger than the first movement amount so that the difference value decreases, when the difference value is larger than the second threshold value, until the difference value becomes equal to or smaller than the first threshold value.
- FIG. 1 is a plan view showing an example of an entire configuration of a substrate processing apparatus according to an embodiment
- FIG. 2 is a perspective view showing a substrate cleaning device according to a first embodiment
- FIG. 3 is a diagram showing a schematic configuration of the substrate cleaning device according to the first embodiment
- FIG. 4 is a flowchart illustrating an example of a substrate cleaning method by the substrate cleaning device according to the first embodiment
- FIG. 5 is a flowchart illustrating a step of controlling a pressing amount of a cleaning member on the basis of a measurement value of a pressing load
- FIG. 6 is a flowchart illustrating a step of calculating a pressing amount of the cleaning member corresponding to a setting load
- FIG. 7A is a diagram showing an example of master data
- FIG. 7B is a diagram showing an example of measurement data
- FIG. 7C is a diagram showing an example of data for movement amount calculation
- FIG. 8 is a perspective view showing a substrate cleaning device according to a second embodiment
- FIG. 9 is a diagram showing a schematic configuration of the substrate cleaning device according to the second embodiment.
- FIG. 10 is a flowchart illustrating an example of a substrate cleaning method by the substrate cleaning device according to the second embodiment
- FIG. 11 is a flowchart illustrating a step of contacting a first cleaning member and a second cleaning member with a substrate
- FIGS. 12A to 12C are diagrams illustrating a step of contacting the first cleaning member and the second cleaning member with the substrate
- FIG. 13 is a perspective view showing a substrate cleaning device according to a first modification of the first embodiment.
- FIG. 14 is a perspective view showing a substrate cleaning device according to a second modification of the first embodiment.
- a substrate cleaning device includes: a cleaning member that cleans a substrate by contacting the substrate; a member rotation unit that rotates the cleaning member; a member drive unit that presses the cleaning member against the substrate; a load measurement unit that measures a pressing load of the cleaning member; and a control unit that controls a pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes a setting load, wherein the control unit repeats an operation of comparing the measurement value of the load measurement unit with the setting load, changing the pressing amount of the cleaning member by a first movement amount so that a difference value decreases, when the difference value is larger than a first threshold value and equal to or smaller than a second threshold value, and changing the pressing amount of the cleaning member by a second movement amount larger than the first movement amount so that the difference value decreases, when the difference value is larger than the second threshold value, until the difference value becomes equal to or smaller than the first threshold value.
- the control unit when the difference value between the measurement value of the load measurement unit and the setting load is larger than the first threshold value and equal to or smaller than the second threshold value, the control unit changes the pressing amount of the cleaning member by the first movement amount. However, when the difference value is larger than the second threshold value, the control unit changes the pressing amount of the cleaning member by the second movement amount larger than the first movement amount (that is, closed loop control of two steps).
- a substrate cleaning device includes: a cleaning member that cleans a substrate by contacting the substrate; a member rotation unit that rotates the cleaning member; a member drive unit that presses the cleaning member against the substrate; a load measurement unit that measures a pressing load of the cleaning member; and a control unit that controls a pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes a setting load, wherein the control unit previously stores a correspondence relation between the pressing load and the pressing amount of the cleaning member for M (M is a natural number of 2 or more) pressing loads as master data, the control unit acquires the correspondence relation between the pressing load and the pressing amount of the cleaning member for N (N is a natural number smaller than M) pressing loads among the M pressing loads as measurement data, on the basis of the measurement value of the load measurement unit, the control unit corrects each of pressing amounts corresponding to the M pressing loads in the master data, on the basis of the measurement data, so that
- the cleaning member is any one member of the group consisting of a roll cleaning member, a pencil cleaning member, and a buff cleaning/polishing member.
- the member drive unit is an electric actuator.
- the pressing amount of the cleaning member can be controlled with high accuracy as compared with the case where an air cylinder is adopted as the member drive unit. As a result, accuracy of the pressing load can be further improved.
- a substrate cleaning device includes: a first cleaning member that cleans a first surface of a substrate by contacting the first surface of the substrate; a first member rotation unit that rotates the first cleaning member; a first member drive unit that presses the first cleaning member against the first surface of the substrate; a first load measurement unit that measures a pressing load of the first cleaning member; a second cleaning member that cleans a second surface of the substrate by contacting the second surface of the substrate; a second member rotation unit that rotates the second cleaning member; a second member drive unit that presses the second cleaning member against the second surface of the substrate; a second load measurement unit that measures a pressing load of the second cleaning member; and a control unit that controls a pressing amount of the first cleaning member by the first member drive unit and a pressing amount of the second cleaning member by the second member drive unit, on the basis of a measurement value of the first load measurement unit and a measurement value of the second load measurement unit, so that the pressing load of the first cleaning member becomes a first setting load and the
- the second movement speed of the second cleaning member disposed at the second initial position relatively close to the substrate is determined on the basis of the first movement speed of the first cleaning member disposed at the first initial position relatively far from the substrate. Therefore, it is possible to shorten a time required for causing the first cleaning member and the second cleaning member to reach the first proximity position and the second proximity position, respectively. As a result, it is possible to increase the number of substrates processed per unit time (wph; wafer per hour). Further, the first cleaning member and the second cleaning member respectively disposed at the first proximity position and the second proximity position having the same distances from the substrate are moved symmetrically with respect to the substrate and the first cleaning member and the second cleaning member are simultaneously contacted with the substrate. Therefore, it is possible to simultaneously and accurately position the first cleaning member and the second cleaning member on the surfaces of the substrate. As a result, subsequent pressing amount control can be performed with high accuracy, and accuracy of the pressing load can be improved.
- each of the first cleaning member and the second cleaning member is a roll cleaning member.
- each of the first member drive unit and the second member drive unit is an electric actuator.
- the pressing amounts of the first cleaning member and the second cleaning member can be controlled with high accuracy, as compared with the case where air cylinders are adopted as the first member drive unit and the second member drive unit. As a result, accuracy of the pressing load can be further improved.
- a substrate processing apparatus includes the substrate cleaning device according to any one of the first to seventh aspects.
- a substrate cleaning method includes: a step of causing a member drive unit to press a cleaning member against a substrate; a step of causing a load measurement unit to measure a pressing load of the cleaning member; and a step of causing a control unit to control a pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes a setting load, wherein, in the step of controlling the pressing amount, the control unit repeats an operation of comparing the measurement value of the load measurement unit with the setting load, changing the pressing amount of the cleaning member by a first movement amount so that a difference value decreases, when the difference value is larger than a first threshold value and equal to or smaller than a second threshold value, and changing the pressing amount of the cleaning member by a second movement amount larger than the first movement amount so that the difference value decreases, when the difference value is larger than the second threshold value, until the difference value becomes equal to or smaller than the first threshold value.
- a substrate cleaning method includes: a step of causing a control unit to calculate a pressing amount of a cleaning member corresponding to a setting load; a step of causing a member drive unit to press the cleaning member against a substrate by the calculated pressing amount; a step of causing a load measurement unit to measure a pressing load of the cleaning member; and a step of causing a control unit to control the pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes the setting load, wherein the control unit previously stores a correspondence relation between the pressing load and the pressing amount of the cleaning member for M (M is a natural number of 2 or more) pressing loads as master data, and in the step of calculating the pressing amount, the control unit acquires the correspondence relation between the pressing load and the pressing amount of the cleaning member for N (N is a natural number smaller than M) pressing loads among the M pressing loads as measurement data, on the basis of the measurement value of the
- the cleaning member is any one member of the group consisting of a roll cleaning member, a pencil cleaning member, and a buff cleaning/polishing member.
- the member drive unit is an electric actuator.
- a substrate cleaning method includes: a step of causing a first member drive unit to contact a first cleaning member with a first surface of a substrate and causing a second member drive unit to contact a second cleaning member with a second surface of the substrate; a step of causing the first member drive unit to press the first cleaning member against the first surface of the substrate and causing the second member drive unit to press the second cleaning member against the second surface of the substrate; a step of causing a first load measurement unit to measure a pressing load of the first cleaning member and causing a second load measurement unit to measure a pressing load of the second cleaning member; and a step of causing a control unit to control each of a pressing amount of the first cleaning member by the first member drive unit and a pressing amount of the second cleaning member by the second member drive unit, on the basis of a measurement value of the first load measurement unit and a measurement value of the second load measurement unit, so that the pressing load of the first cleaning member becomes a first setting load and the pressing load of the second
- each of the first cleaning member and the second cleaning member is a roll cleaning member.
- each of the first member drive unit and the second member drive unit is an electric actuator.
- FIG. 1 is a plan view showing an entire configuration of a substrate processing apparatus 1 according to an embodiment.
- the substrate processing apparatus 1 has a substantially rectangular housing 10 and a load port 12 on which a substrate cassette (not shown in the drawings) for stocking a plurality of substrates W (refer to FIG. 2 or the like) is placed.
- the load port 12 is disposed to be adjacent to the housing 10 .
- the load port 12 can be equipped with an open cassette, a standard manufacturing interface (SMIF) pod, or a front opening unified pod (FOUP).
- SMIF pod and the FOUP are closed containers that can maintain the environment independent of an external space by accommodating the substrate cassette inside and covering the substrate cassette with a partition wall.
- the substrate W for example, a semiconductor wafer or the like can be mentioned.
- a plurality of (four in an aspect shown in FIG. 1 ) substrate polishing devices 14 a to 14 d , a first substrate cleaning device 16 a and a second substrate cleaning device 16 b for cleaning the substrate W after polishing, and a substrate drying device 20 for drying the substrate W after cleaning are accommodated.
- the substrate polishing devices 14 a to 14 d are arranged along a longitudinal direction of the housing 10
- the substrate cleaning devices 16 a and 16 b and the substrate drying device 20 are also arranged along the longitudinal direction of the housing 10 .
- a first transfer robot 22 is disposed in a region surrounded by the load port 12 , the substrate polishing device 14 a located at the side of the load port 12 , and the substrate drying device 20 . Further, a transfer unit 24 is disposed in parallel with the longitudinal direction of the housing 10 , between a region where the substrate polishing devices 14 a to 14 d are arranged and a region where the substrate cleaning devices 16 a and 16 b and the substrate drying device 20 are arranged. The first transfer robot 22 receives the substrate W before polishing from the load port 12 and transfers the substrate W to the transfer unit 24 or receives the dried substrate W extracted from the substrate drying device 20 from the transfer unit 24 .
- a second transfer robot 26 for transferring the substrate W between the first substrate cleaning device 16 a and the second substrate cleaning device 16 b is disposed between the first substrate cleaning device 16 a and the second substrate cleaning device 16 b .
- a third transfer robot 28 for transferring the substrate W between the second substrate cleaning device 16 b and the substrate drying device 20 is disposed between the second substrate cleaning device 16 b and the substrate drying device 20 .
- the substrate processing apparatus 1 is provided with a control panel 30 for controlling the movement of each of the devices 14 a to 14 d , 16 a , 16 b , 22 , 24 , 26 , and 28 .
- the control panel 30 is disposed inside the housing 10
- the control panel 30 is not limited thereto and may be disposed outside the housing 10 .
- a roll cleaning device (a substrate cleaning device 16 according to a first embodiment or a substrate cleaning device 16 ′ according to a second embodiment to be described later) that contacts a roll cleaning member extending linearly over substantially an entire length of a diameter of the substrate W with a surface of the substrate W in the presence of a cleaning liquid and scrub-cleans the surface of the substrate W while rotating the roll cleaning member
- a pencil cleaning device (substrate cleaning device 16 according to a first modification of the first embodiment to be described later) that contacts a columnar pencil cleaning member extending in a vertical direction with the surface of the substrate W in the presence of the cleaning liquid, moves the pencil cleaning member in one direction parallel to the surface of the substrate W while rotating the pencil cleaning member, and scrub-cleans the surface of the substrate W
- a buff cleaning/polishing device (substrate cleaning device 16 according to a second modification of the first embodiment to be described later) that contacts a buff cleaning/
- any combination of two or more devices of the roll cleaning device, the pencil cleaning device, the buff cleaning/polishing device, and the two-fluid jet cleaning device may be used.
- the cleaning liquid includes a rinse liquid such as pure water (DIW) and a chemical liquid such as ammonia hydrogen peroxide (SC1), hydrochloric acid hydrogen peroxide (SC2), sulfuric acid hydrogen peroxide (SPM), sulfuric acid hydration, or hydrofluoric acid.
- a rinse liquid such as pure water (DIW)
- a chemical liquid such as ammonia hydrogen peroxide (SC1), hydrochloric acid hydrogen peroxide (SC2), sulfuric acid hydrogen peroxide (SPM), sulfuric acid hydration, or hydrofluoric acid.
- SC1 ammonia hydrogen peroxide
- SC2 hydrochloric acid hydrogen peroxide
- SPM sulfuric acid hydrogen peroxide
- sulfuric acid hydration sulfuric acid hydration
- hydrofluoric acid hydrofluoric acid
- a spin drying device that jets IPA vapor from an injection nozzle moving in one direction parallel to the surface of the substrate W toward the rotating substrate W to dry the substrate W and rotates the substrate W at high speed to dry the substrate W by a centrifugal force may be used.
- FIG. 2 is a perspective view showing the substrate cleaning device 16 according to the first embodiment
- FIG. 3 is a diagram showing a schematic configuration of the substrate cleaning device 16 according to the first embodiment.
- the substrate cleaning device 16 according to the first embodiment may be used as the first substrate cleaning device 16 a and/or the second substrate cleaning device 16 b in the substrate processing apparatus 1 described above.
- the substrate cleaning device 16 has a cleaning member 46 that cleans a substrate W by contacting the substrate W, a member rotation unit 96 that rotates the cleaning member 46 , a member drive unit 56 that presses the cleaning member 46 against the substrate W, a load measurement unit 54 that measures a pressing load of the cleaning member 46 , and a control unit 90 that controls a pressing amount of the cleaning member 46 by the member drive unit 56 , on the basis of a measurement value of load measurement unit 54 , so that the pressing load of the cleaning member 46 becomes a setting load.
- the cleaning member 46 is a roll cleaning member (roll sponge) extending in a columnar shape and a long shape and made of PVA, for example, the cleaning member 46 is not limited thereto and may be a pencil cleaning member (refer to FIG. 13 ) with a columnar shape extending in a vertical direction or a buff cleaning/polishing member (refer to FIG. 14 ) with a rotation axis extending in the vertical direction.
- the substrate cleaning device 16 is provided with a substrate rotation mechanism 40 for jsupporting and rotating the substrate W, a member holder 42 disposed liftably above the substrate W supported and rotated by the substrate rotation mechanism 40 , and a cleaning liquid supply unit 50 for supplying a cleaning liquid to a surface of the substrate W, and the cleaning member 46 is supported rotatably by the member holder 42 .
- the substrate rotation mechanism 40 is a plurality of horizontally movable (four in the example shown in the drawings) spindles that support a circumferential part of the substrate W and horizontally rotate the substrate W.
- the substrate rotation mechanism 40 is not limited thereto and may be rotatable chucks.
- An arrow E of FIG. 2 indicates a rotation direction of the substrate W by the substrate rotation mechanism 40 .
- the member rotation unit 96 is fixed to one end side of the member holder 42 in the longitudinal direction.
- a motor is used as the member rotation unit 96 .
- the member rotation unit 96 is driven, so that the cleaning member 46 is rotated about a center axis parallel to the surface of the substrate W.
- An arrow F 1 of FIG. 2 indicates a rotation direction of the cleaning member 46 by the member rotation unit 96 .
- a recess 42 a is formed substantially at the center of the member holder 42 along the longitudinal direction, and the load measurement unit 54 is disposed in the recess 42 a and is fixed to the member holder 42 .
- the load measurement unit 54 for example, a load cell is used.
- an electric actuator is used as the member drive unit 56 .
- the electric actuator may be a ball screw type electric actuator, may be a rack pinion type electric actuator, or may be a direct driven type electric actuator (linear motor).
- the substrate cleaning device 16 is provided with a lift shaft 57 lifted by driving of the member drive unit 56 and extending in a vertical direction and a lift arm 58 having a base end connected to an upper end of the lift shaft 57 and extending in a horizontal direction, and the member holder 42 is connected to a tip of the lift arm 58 via the load measurement unit 54 . Further, a tilt mechanism 70 for tilting the member holder 42 is provided between the load measurement unit 54 and the tip of the lift arm 58 . The member drive unit 56 is driven, so that the member holder 42 is lifted integrally with the lift shaft 57 and the lift arm 58 above the substrate W supported and rotated by the substrate rotation mechanism 40 .
- the control unit 90 has a programmable logic controller (PLC) that receives an output signal of the load measurement unit 54 and a motor controller that supplies electric pulses of a predetermined number of pulses to the member drive unit 56 , according to an instruction from the PLC. At least a part of the control unit 90 may be provided in the control panel 30 described above. Further, in the control unit 90 , a target value of the pressing load of the cleaning member 46 is stored in advance as a “setting load”, on the basis of an input from a user to the control panel 30 .
- PLC programmable logic controller
- a movement amount (a pressing amount when the cleaning member 46 contacts the surface of the substrate W) of the member holder 42 in the vertical direction can be adjusted with high accuracy.
- the member holder 42 is connected to the tip of the lift arm 58 via the load measurement unit 54 .
- a weight of the member holder 42 is measured as a tensile load by the load measurement unit 54 .
- the tensile load applied to the load measurement unit 54 decreases according to a deformation amount of the cleaning member 46 and a decreased amount of the tensile load is matched with the pressing load applied to the substrate W by the cleaning member 46 .
- the control unit 90 calculates a necessary movement amount of the cleaning member 46 , on the basis of a measurement value of the load measurement unit 54 , so that the pressing load of the cleaning member 46 becomes the setting load, and supplies the electric pulses of the number of pulses corresponding to the calculated movement amount to the member drive unit 56 .
- the pressing amount of the cleaning member 46 by the member drive unit 56 is adjusted, and the pressing load for the substrate W is adjusted according to the deformation amount of the cleaning member 46 .
- the control unit 90 adjusts the pressing load of the cleaning member 46 by closed loop control of a plurality of steps (for example, two steps). That is, at the time of cleaning the substrate, the control unit 90 compares the measurement value of the load measurement unit 54 with the setting load.
- the control unit 90 changes (adjusts) the pressing amount of the cleaning member 46 by a first movement amount (for example, 0.01 mm) so that the difference value decreases, and when the difference value is larger than the second threshold value (for example, 1.5 N), the control unit 90 changes (adjusts) the pressing amount of the cleaning member 46 by a second movement amount (for example, 0.05 mm) larger than the first movement amount (for example, 0.01 mm) so that the difference value decreases.
- the control unit 90 repeats the above operation until the difference value becomes equal to or smaller than the first threshold value (0.1 N).
- the control unit 90 performs the closed loop control of the plurality of steps (for example, the two steps). As a result, it is possible to shorten a time required for adjusting the pressing load, as compared with the case of performing the closed loop control of one step.
- the master data may be values obtained by previously measuring the correspondence relation between the pressing load and the pressing amount of the cleaning member 46 as a guide using a dummy substrate in a substrate cleaning device maker or the like, for example.
- the control unit 90 stores the acquired measurement data in the storage medium (memory).
- the pressing amount in the measurement data is 50 ⁇ m larger than the pressing amount in the master data. Therefore, the control unit 90 generates a numerical value obtained by adding 50 ⁇ m to the pressing amount in the master data for each of the pressing loads of 2, 4, 6, 8, 10, and 12 N as data for movement amount calculation.
- the control unit 90 stores the generated data for movement amount calculation in the storage medium (memory).
- the control unit 90 calculates the pressing amount of the cleaning member 46 corresponding to the setting load, on the basis of the correspondence relation between the pressing load and the pressing amount in the generated data for movement amount calculation (refer to FIG. 7C ).
- the control unit 90 calculates the pressing amount as 850 ⁇ m by referring to the data for movement amount calculation ( FIG. 7C ).
- the control unit 90 can calculate the pressing amount of the cleaning member 46 with high accuracy, as compared with the case where the pressing amount is calculated on the basis of the master data before correction.
- FIG. 4 is a flowchart illustrating an example of the substrate cleaning method.
- FIG. 5 is a flowchart illustrating a step of controlling the pressing amount of the cleaning member 46 on the basis of the measurement value of the pressing load.
- FIG. 6 is a flowchart illustrating a step of calculating the pressing amount of the cleaning member 46 corresponding to the setting load.
- the control unit 90 calculates the pressing amount of the cleaning member 46 corresponding to the input setting load (step S 10 ).
- the control unit 90 stores the generated data for movement amount calculation in the storage medium (memory).
- control unit 90 calculates the pressing amount of the cleaning member 46 corresponding to the setting load input by the user, on the basis of the correspondence relation between the pressing load and the pressing amount in the generated data for movement amount calculation (refer to FIG. 7C ) (step S 13 ).
- the control unit 90 calculates the pressing amount of the cleaning member 46 with high accuracy in accordance with the actual substrate W, as compared with the case where the pressing amount is calculated on the basis of the master data before correction.
- the control unit 90 supplies electric pulses of a predetermined number of pulses to the member drive unit 56 , moves downward the cleaning member 46 by driving of the member drive unit 56 , and contacts the cleaning member 46 with the surface of the substrate W (step S 20 ). At this time, the cleaning member 46 only contacts the surface of the substrate W, the deformation amount of the cleaning member 46 is zero, and the pressing load of the cleaning member 46 for the substrate W is also zero.
- control unit 90 supplies the electric pulses of the number of pulses according to the pressing amount calculated in step S 10 to the member drive unit 56 and presses the cleaning member 46 against the surface of the substrate W by the calculated pressing amount by driving of the member drive unit 56 (step S 30 ).
- the load measurement unit 54 measures the pressing load of the cleaning member 46 for the substrate W (step S 40 ).
- control unit 90 controls the pressing amount of the cleaning member 46 by the member drive unit 56 by the closed loop control, on the basis of the measurement value of the load measurement unit 54 , so that the pressing load of the cleaning member 46 becomes the setting load input by the user (step S 50 ).
- control unit 90 acquires the measurement value of the pressing load from the load measurement unit 54 (step S 51 ) and compares the acquired measurement value of the pressing load with the setting load (step S 52 ).
- control unit 90 determines whether or not a difference value ⁇ F between the measurement value of the pressing load and the setting load is equal to or smaller than the second threshold value (for example, 1.5 N) previously stored in the control unit 90 (step S 53 ).
- control unit 90 supplies the electric pulses of the number of pulses corresponding to the predetermined second movement amount (for example, 0.05 mm) to the member drive unit 56 and changes (adjusts) the pressing amount of the cleaning member 46 by the second movement amount (0.05 mm) by driving of the member drive unit 56 (step S 55 ). Then, the processing is repeated from step S 51 (closed loop control of the first step).
- the predetermined second movement amount for example, 0.05 mm
- step S 53 when the difference value is equal to or smaller than the second threshold value ( ⁇ F ⁇ 1.5 N) (step S 53 : YES), the control unit 90 determines whether the difference value ⁇ F between the measurement value of the pressing load and the setting load is equal to or smaller than the first threshold value (for example, 0.1 N) smaller than the second threshold value previously stored in the control unit 90 (step S 54 ).
- the first threshold value for example, 0.1 N
- control unit 90 supplies the electric pulses of the number of pulses corresponding to the first movement amount (for example, 0.01 mm) smaller than the predetermined second movement amount to the member drive unit 56 and changes (adjusts) the pressing amount of the cleaning member 46 by the first movement amount (0.01 mm) by driving of the member drive unit 56 (step S 56 ). Then, the processing is repeated from step S 51 (closed loop control of the second step).
- step S 54 when the difference value is equal to or smaller than the first threshold value ( ⁇ F ⁇ 0.1 N) (step S 54 : YES), the processing of step S 50 ends.
- the pressing load of the cleaning member 46 is adjusted with high accuracy so as to have substantially the same value as the setting load input by the user.
- the control unit 90 when the difference value between the measurement value of the load measurement unit 54 and the setting load is larger than the first threshold value and equal to or smaller than the second threshold value, the control unit 90 changes the pressing amount of the cleaning member 46 by the first movement amount (that is, finely adjusts the pressing amount when the difference value is small). However, when the difference value is larger than the second threshold value, the control unit 90 changes the pressing amount of the cleaning member 46 by the second movement amount larger than the first movement amount (that is, roughly adjusts the pressing amount when the difference value is large).
- the pressing amount of the cleaning member 46 by the first movement amount even when the difference value is larger than the second threshold value that is, finely adjusting the pressing amount even when the difference value is large
- the pressing amount can be controlled with high accuracy. As a result, accuracy of the pressing load can be improved.
- the member drive unit 56 is the electric actuator, the pressing amount of the cleaning member 46 can be controlled with high accuracy as compared with the case where an air cylinder is adopted as the member drive unit 56 . As a result, accuracy of the pressing load can be further improved.
- FIG. 8 is a perspective view showing the substrate cleaning device 16 ′ according to the second embodiment
- FIG. 9 is a diagram showing a schematic configuration of the substrate cleaning device 16 ′ according to the second embodiment.
- the substrate cleaning device 16 ′ according to the second embodiment may be used as a first substrate cleaning device 16 a and/or a second substrate cleaning device 16 b in the substrate processing apparatus 1 described above.
- the substrate cleaning device 16 ′ according to the second embodiment further has a second cleaning member 48 that cleans a second surface of a substrate W by contacting the second surface of the substrate W, a second member rotation unit 98 that rotates the second cleaning member 48 , a second member drive unit 56 a that presses the second cleaning member 48 against the second surface of the substrate W, and a second load measurement unit 54 a that measures a pressing load of the second cleaning member 48 .
- a control unit 90 controls each of a pressing amount of a first cleaning member 46 by a first member drive unit 56 and a pressing amount of the second cleaning member 48 by the second member drive unit 56 a , on the basis of a measurement value of a first load measurement unit 54 and a measurement value of the second load measurement unit 54 a , so that a pressing load of the first cleaning member 46 becomes a first setting load and a pressing load of the second cleaning member 48 becomes a second setting load.
- each of the first cleaning member 46 and the second cleaning member 48 is a roll cleaning member (roll sponge) extending in a columnar shape and a long shape and made of PVA, for example.
- the substrate cleaning device 16 ′ is further provided with a second member holder 44 disposed liftably under the substrate W supported and rotated by a substrate rotation mechanism 40 and a second cleaning liquid supply unit 52 for supplying a cleaning liquid to the second surface of the substrate W, and the second cleaning member 48 is supported rotatably by the second member holder 44 .
- the second member rotation unit 98 is fixed to one end side of the second member holder 44 in a longitudinal direction.
- a motor is used as the second member rotation unit 98 .
- the second member rotation unit 98 is driven, so that the second cleaning member 48 is rotated about a center axis parallel to the surface of the substrate W.
- An arrow F 2 of FIG. 8 indicates a rotation direction of the second cleaning member 48 by the second member rotation unit 98 .
- a recess 44 a is formed substantially at the center of the second member holder 44 along the longitudinal direction, and the second load measurement unit 54 a is disposed in the recess 44 a and is fixed to the second member holder 44 .
- the second load measurement unit 54 a for example, a load cell is used.
- the electric actuator may be a ball screw type electric actuator, may be a rack pinion type electric actuator, or may be a direct driven type electric actuator (linear motor).
- the substrate cleaning device 16 ′ is provided with a second lift shaft 59 lifted by driving of the second member drive unit 56 a and extending in a vertical direction, and the second member holder 44 is connected to an upper end of the second lift shaft 59 via the second load measurement unit 54 a .
- a second tilt mechanism for tilting the second member holder 44 is provided between the second load measurement unit 54 a and the second member holder 44 .
- the second member drive unit 56 a is driven, so that the second member holder 44 is lifted integrally with the second lift shaft 59 under the substrate W supported and rotated by the substrate rotation mechanism 40 .
- the control unit 90 has a second programmable logic controller (PLC) that receives an output signal of the second load measurement unit 54 a and a second motor controller that supplies electric pulses of a predetermined number of pulses to the second member drive unit 56 a , according to an instruction from the second PLC. Further, in the control unit 90 , a target value of the pressing load of the second cleaning member 48 is stored in advance as a “second setting load”, on the basis of an input from a user to a control panel 30 .
- PLC programmable logic controller
- a movement amount (a pressing amount when the second cleaning member 48 contacts the second surface of the substrate W) of the second member holder 44 in the vertical direction can be adjusted with high accuracy.
- the second member holder 44 is connected to the upper end of the second lift shaft 59 via the second load measurement unit 54 a .
- a weight of the second member holder 44 is measured as a compressive load by the second load measurement unit 54 a .
- the compressive load applied to the second load measurement unit 54 a increases according to a deformation amount of the second cleaning member 48 and an increased amount of the compressive load is matched with the pressing load applied to the substrate W by the second cleaning member 48 .
- the pressing load applied to the substrate W by the second cleaning member 48 at the time of cleaning the substrate W is measured by the second load measurement unit 54 a by the increased compressive load.
- the control unit 90 calculates a necessary movement amount of the second cleaning member 48 , on the basis of a measurement value of the second load measurement unit 54 a , so that the pressing load of the second cleaning member 48 becomes the second setting load, and supplies the electric pulses of the number of pulses corresponding to the calculated movement amount to the second member drive unit 56 a .
- the pressing amount of the second cleaning member 48 by the second member drive unit 56 a is adjusted, and the pressing load for the substrate W is adjusted according to the deformation amount of the second cleaning member 48 .
- control unit 90 is configured to execute a first step of controlling the first member drive unit 56 and the second member drive unit 56 a so that the first cleaning member 46 moves at a first movement speed V 1 from a first initial position separated from the first surface of the substrate W by a first distance D 1 to a first proximity position separated from the first surface by a third distance D 3 and the second cleaning member 48 moves at a second movement speed V 2 from a second initial position separated from the second surface of the substrate W by a second distance D 2 shorter than the first distance D 1 to a second proximity position separated from the second surface by the third distance D 3 , by referring to FIGS. 12A and 12B , before cleaning the substrate W.
- control unit 90 is configured to execute a second step of controlling the first member drive unit 56 and the second member drive unit 56 a so that the first cleaning member 46 and the second cleaning member 48 simultaneously start moving at a third movement speed V 3 lower than the first movement speed V 1 and simultaneously contact the first surface and the second surface of the substrate W, respectively, by referring to FIGS. 12B and 12C , after the first step.
- control unit 90 is configured to determine the second movement speed V 2 of the second cleaning member 48 by the second member drive unit 56 a , on the basis of the first movement speed V 1 of the first cleaning member 46 by the first member drive unit 56 , so that the first cleaning member 46 disposed at the first initial position and the second cleaning member 48 disposed at the second initial position simultaneously start the moving and the second cleaning member 48 reaches the second proximity position at timing identical to timing when the first cleaning member 46 reaches the first proximity position, before the first step.
- FIG. 10 is a flowchart illustrating an example of the substrate cleaning method.
- FIG. 11 is a flowchart illustrating a step of contacting the first cleaning member 46 and the second cleaning member 48 with the substrate W.
- the control unit 90 calculates each of the pressing amounts of the first cleaning member 46 and the second cleaning member 48 corresponding to the input setting loads (step S 110 ).
- control unit 90 supplies electric pulses of a predetermined number of pulses to the first member drive unit 56 , moves downward the first cleaning member 46 by driving of the first member drive unit 56 , and contacts the first cleaning member 46 with the first surface of the substrate W, and the control unit 90 supplies electric pulses of a predetermined number of pulses to the second member drive unit 56 a , moves upward the second cleaning member 48 by driving of the second member drive unit 56 a , and contacts the second cleaning member 48 with the second surface of the substrate W (step S 120 ).
- the control unit 90 determines the second movement speed V 2 of the second cleaning member 48 by the second member drive unit 56 a , on the basis of the first movement speed V 1 of the first cleaning member 46 by the first member drive unit 56 (step S 121 ), so that the first cleaning member 46 disposed at the first initial position and the second cleaning member 48 disposed at the second initial position simultaneously start the moving (refer to FIG. 12A ) and the second cleaning member 48 reaches the second proximity position at timing identical to timing when the first cleaning member 46 reaches the first proximity position (refer to FIG. 12B ).
- the control unit 90 controls each of the first member drive unit 56 and the second member drive unit 56 a , moves the first cleaning member 46 at the first movement speed V 1 (for example, a maximum speed by the first member drive unit 56 ) from the first initial position to the first proximity position, and moves the second cleaning member 48 at the second movement speed V 2 determined in step S 121 from the second initial position to the second proximity position (step S 122 ).
- V 1 for example, a maximum speed by the first member drive unit 56
- V 2 determined in step S 121 from the second initial position to the second proximity position
- the control unit 90 controls each of the first member drive unit 56 and the second member drive unit 56 a , simultaneously starts moving the first cleaning member 46 and the second cleaning member 48 at the third movement speed V 3 lower than the first movement speed V 1 , and simultaneously contacts the first cleaning member 46 and the second cleaning member 48 with the first surface and the second surface of the substrate W, respectively (step S 123 ).
- the control unit 90 controls each of the first member drive unit 56 and the second member drive unit 56 a , simultaneously starts moving the first cleaning member 46 and the second cleaning member 48 at the third movement speed V 3 lower than the first movement speed V 1 , and simultaneously contacts the first cleaning member 46 and the second cleaning member 48 with the first surface and the second surface of the substrate W, respectively (step S 123 ).
- the first cleaning member 46 only contacts the first surface of the substrate W, the deformation amount of the first cleaning member 46 is zero, and the pressing load of the first cleaning member 46 for the substrate W is also zero.
- the second cleaning member 48 only contacts the second surface of the substrate W, the deformation amount of the second cleaning member 48 is zero, and the pressing load of the second cleaning member 48 for the substrate W is also zero.
- control unit 90 supplies the electric pulses of the number of pulses according to the pressing amounts calculated in step S 110 to the first member drive unit 56 and the second member drive unit 56 a and presses the first cleaning member 46 and the second cleaning member 48 against the first surface and the second surface of the substrate W by the calculated pressing amounts by the first member drive unit 56 and the second member drive unit 56 a (step S 130 ).
- the first load measurement unit 54 and the second load measurement unit 54 a respectively measure the pressing loads of the first cleaning member 46 and the second cleaning member 48 for the substrate W (step S 140 ).
- the control unit 90 controls the pressing amounts of the first cleaning member 46 and the second cleaning member 48 by the first member drive unit 56 and the second member drive unit 56 a by closed loop control, on the basis of the measurement values of the first load measurement unit 54 and the second load measurement unit 54 a , so that the pressing load of the first cleaning member 46 becomes the first setting load input by the user and the pressing load of the second cleaning member 48 becomes the second setting load input by the user (step S 150 ).
- the pressing loads of the first cleaning member 46 and the second cleaning member 48 are adjusted with high accuracy so as to have substantially the same values as the first and second setting loads input by the user.
- the second movement speed of the second cleaning member 48 disposed at the second initial position relatively close to the substrate W is determined on the basis of the first movement speed of the first cleaning member 46 disposed at the first initial position relatively far from the substrate W. Therefore, it is possible to shorten a time required for causing the first cleaning member 46 and the second cleaning member 48 to reach the first proximity position and the second proximity position, respectively. As a result, it is possible to increase the number of substrates processed per unit time (wph; wafer per hour).
- the first cleaning member 46 and the second cleaning member 48 respectively disposed at the first proximity position and the second proximity position having the same distances from the substrate W are moved symmetrically with respect to the substrate W and the first cleaning member 46 and the second cleaning member 48 are simultaneously contacted with the substrate W. Therefore, it is possible to simultaneously and accurately position the first cleaning member 46 and the second cleaning member 48 on the surfaces of the substrate W. As a result, subsequent pressing amount control can be performed with high accuracy, and accuracy of the pressing load can be improved.
- each of the first member drive unit 56 and the second member drive unit 56 a is the electric actuator, the pressing amounts of the first cleaning member 46 and the second cleaning member 48 can be controlled with high accuracy, as compared with the case where air cylinders are adopted as the first member drive unit 56 and the second member drive unit 56 a . As a result, accuracy of the pressing load can be further improved.
Abstract
A substrate cleaning device includes: a pressing member that cleans a substrate by contacting the substrate; a load measurement unit that measures a pressing load of the cleaning member; and a control unit that repeats an operation of comparing the measurement value of the load measurement unit with the setting load, changing the pressing amount of the cleaning member by a first movement amount so that a difference value decreases, when the difference value is larger than a first threshold value and equal to or smaller than a second threshold value, and changing the pressing amount of the cleaning member by a second movement amount larger than the first movement amount so that the difference value decreases, when the difference value is larger than the second threshold value, until the difference value becomes equal to or smaller than the first threshold value.
Description
- This application is a Continuation of U.S. patent application Ser. No. 16/503,868, filed on Jul. 5, 2019 which claims the benefit of Japanese Priority Patent Application JP 2018-129086 filed on Jul. 6, 2018, the entire contents of which are incorporated herein by reference.
- The present technology relates to a substrate cleaning device and a substrate cleaning method.
- At the present time, with the miniaturization of a semiconductor device, processing of a substrate having a fine structure (a substrate on which various material films having different physical properties are formed) is performed. For example, in a damascene wiring formation step of filling a wiring groove formed in the substrate with a metal, the excess metal is polished and removed by a substrate polishing device (CMP device) after damascene wiring formation, and the various material films (a metal film, a barrier film, an insulating film, and the like) having the different physical properties are formed on a surface of the substrate. On the surface of the substrate, there are slurry residue and metal polishing waste (Cu polishing waste and the like) used in CMP polishing. For this reason, when the surface of substrate is not sufficiently cleaned, such as when the surface of the substrate is complicated and cleaning is difficult, leaks and adhesion defects occur due to an influence of the residue and the like, which may result in a decrease in reliability. Therefore, in the CMP device for polishing the semiconductor substrate, roll member scrub cleaning and pen member scrub cleaning are performed in a cleaning step after polishing.
- For the roll member scrub cleaning, technology for installing a load cell measuring a pressing load of a roll member between a lift arm moving upward and downward according to driving of an air cylinder and a roll member holder and performing feedback control on the pressing load of the roll member via a control device of the air cylinder on the basis of a measurement value of the load cell is known (refer to JP 2014-38983 A).
- Incidentally, in recent years, since a substrate thickness decreases or a substrate material changes, further improvement in the accuracy of the pressing load for the substrate is required.
- Accordingly, it is desirable to provide a substrate cleaning device and a substrate cleaning method capable of improving accuracy of a pressing load.
- A substrate cleaning device according to an embodiment includes: a cleaning member that cleans a substrate by contacting the substrate; a member rotation unit that rotates the cleaning member; a member drive unit that presses the cleaning member against the substrate; a load measurement unit that measures a pressing load of the cleaning member; and a control unit that controls a pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes a setting load, wherein the control unit repeats an operation of comparing the measurement value of the load measurement unit with the setting load, changing the pressing amount of the cleaning member by a first movement amount so that a difference value decreases, when the difference value is larger than a first threshold value and equal to or smaller than a second threshold value, and changing the pressing amount of the cleaning member by a second movement amount larger than the first movement amount so that the difference value decreases, when the difference value is larger than the second threshold value, until the difference value becomes equal to or smaller than the first threshold value.
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FIG. 1 is a plan view showing an example of an entire configuration of a substrate processing apparatus according to an embodiment; -
FIG. 2 is a perspective view showing a substrate cleaning device according to a first embodiment; -
FIG. 3 is a diagram showing a schematic configuration of the substrate cleaning device according to the first embodiment; -
FIG. 4 is a flowchart illustrating an example of a substrate cleaning method by the substrate cleaning device according to the first embodiment; -
FIG. 5 is a flowchart illustrating a step of controlling a pressing amount of a cleaning member on the basis of a measurement value of a pressing load; -
FIG. 6 is a flowchart illustrating a step of calculating a pressing amount of the cleaning member corresponding to a setting load; -
FIG. 7A is a diagram showing an example of master data; -
FIG. 7B is a diagram showing an example of measurement data; -
FIG. 7C is a diagram showing an example of data for movement amount calculation; -
FIG. 8 is a perspective view showing a substrate cleaning device according to a second embodiment; -
FIG. 9 is a diagram showing a schematic configuration of the substrate cleaning device according to the second embodiment; -
FIG. 10 is a flowchart illustrating an example of a substrate cleaning method by the substrate cleaning device according to the second embodiment; -
FIG. 11 is a flowchart illustrating a step of contacting a first cleaning member and a second cleaning member with a substrate; -
FIGS. 12A to 12C are diagrams illustrating a step of contacting the first cleaning member and the second cleaning member with the substrate; -
FIG. 13 is a perspective view showing a substrate cleaning device according to a first modification of the first embodiment; and -
FIG. 14 is a perspective view showing a substrate cleaning device according to a second modification of the first embodiment. - A substrate cleaning device according to a first aspect of an embodiment includes: a cleaning member that cleans a substrate by contacting the substrate; a member rotation unit that rotates the cleaning member; a member drive unit that presses the cleaning member against the substrate; a load measurement unit that measures a pressing load of the cleaning member; and a control unit that controls a pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes a setting load, wherein the control unit repeats an operation of comparing the measurement value of the load measurement unit with the setting load, changing the pressing amount of the cleaning member by a first movement amount so that a difference value decreases, when the difference value is larger than a first threshold value and equal to or smaller than a second threshold value, and changing the pressing amount of the cleaning member by a second movement amount larger than the first movement amount so that the difference value decreases, when the difference value is larger than the second threshold value, until the difference value becomes equal to or smaller than the first threshold value.
- According to the first aspect, when the difference value between the measurement value of the load measurement unit and the setting load is larger than the first threshold value and equal to or smaller than the second threshold value, the control unit changes the pressing amount of the cleaning member by the first movement amount. However, when the difference value is larger than the second threshold value, the control unit changes the pressing amount of the cleaning member by the second movement amount larger than the first movement amount (that is, closed loop control of two steps). As a result, as compared with a method (that is, closed loop control of one step) of changing the pressing amount of the cleaning member by the first movement amount even when the difference value is larger than the second threshold value, it is possible to shorten a time until the difference value converges to the first threshold value or less, which can lead to an increase in the number of substrates processed per unit time (wph; wafer per hour). Further, as compared with a method (that is, closed loop control of one step) of changing the pressing amount of the cleaning member by the second movement amount even when the difference value is equal to or smaller than the second threshold value, the pressing amount can be controlled with high accuracy. As a result, accuracy of the pressing load can be improved.
- A substrate cleaning device according to a second aspect of the embodiment includes: a cleaning member that cleans a substrate by contacting the substrate; a member rotation unit that rotates the cleaning member; a member drive unit that presses the cleaning member against the substrate; a load measurement unit that measures a pressing load of the cleaning member; and a control unit that controls a pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes a setting load, wherein the control unit previously stores a correspondence relation between the pressing load and the pressing amount of the cleaning member for M (M is a natural number of 2 or more) pressing loads as master data, the control unit acquires the correspondence relation between the pressing load and the pressing amount of the cleaning member for N (N is a natural number smaller than M) pressing loads among the M pressing loads as measurement data, on the basis of the measurement value of the load measurement unit, the control unit corrects each of pressing amounts corresponding to the M pressing loads in the master data, on the basis of the measurement data, so that the correspondence relation between the pressing load and the pressing amount for the N pressing loads in the master data approaches the correspondence relation between the pressing load and the pressing amount for the N pressing loads in the measurement data, and generates data for movement amount calculation showing the correspondence relation between the pressing load and the pressing amount for the M pressing loads, and the control unit calculates the pressing amount of the cleaning member corresponding to the setting load, on the basis of the correspondence relation between the pressing load and the pressing amount in the data for movement amount calculation.
- According to the second aspect, the control unit corrects the correspondence relation between the pressing load and the pressing amount in the master data, on the basis of the measurement data, and calculates the pressing amount of the cleaning member, on the basis of the correspondence relation (=data for movement amount calculation) after correction. Therefore, the control unit can determine the pressing amount with high accuracy as compared with the case where the pressing amount of the cleaning member is calculated on the basis of the correspondence relation (=master data) before correction. As a result, accuracy of the pressing load can be improved.
- According to a substrate cleaning device according to a third aspect of the embodiment, in the substrate cleaning device according to the first or second aspect, the cleaning member is any one member of the group consisting of a roll cleaning member, a pencil cleaning member, and a buff cleaning/polishing member.
- According to a substrate cleaning device according to a fourth aspect of the embodiment, in the substrate cleaning device according to any one of the first to third aspects, the member drive unit is an electric actuator.
- According to the fourth aspect, the pressing amount of the cleaning member can be controlled with high accuracy as compared with the case where an air cylinder is adopted as the member drive unit. As a result, accuracy of the pressing load can be further improved.
- A substrate cleaning device according to a fifth aspect of the embodiment includes: a first cleaning member that cleans a first surface of a substrate by contacting the first surface of the substrate; a first member rotation unit that rotates the first cleaning member; a first member drive unit that presses the first cleaning member against the first surface of the substrate; a first load measurement unit that measures a pressing load of the first cleaning member; a second cleaning member that cleans a second surface of the substrate by contacting the second surface of the substrate; a second member rotation unit that rotates the second cleaning member; a second member drive unit that presses the second cleaning member against the second surface of the substrate; a second load measurement unit that measures a pressing load of the second cleaning member; and a control unit that controls a pressing amount of the first cleaning member by the first member drive unit and a pressing amount of the second cleaning member by the second member drive unit, on the basis of a measurement value of the first load measurement unit and a measurement value of the second load measurement unit, so that the pressing load of the first cleaning member becomes a first setting load and the pressing load of the second cleaning member becomes a second setting load, wherein the control unit is configured to execute a first step of controlling the first member drive unit and the second member drive unit so that the first cleaning member moves at a first movement speed from a first initial position separated from the first surface of the substrate by a first distance to a first proximity position separated from the first surface by a third distance and the second cleaning member moves at a second movement speed from a second initial position separated from the second surface of the substrate by a second distance shorter than the first distance to a second proximity position separated from the second surface by the third distance and a second step of controlling the first member drive unit and the second member drive unit so that the first cleaning member and the second cleaning member simultaneously start moving at a third movement speed lower than the first movement speed and simultaneously contact the first surface and the second surface of the substrate, respectively, and the control unit is configured to determine the second movement speed of the second cleaning member by the second member drive unit, on the basis of the first movement speed of the first cleaning member by the first member drive unit, so that the first cleaning member disposed at the first initial position and the second cleaning member disposed at the second initial position simultaneously start the moving and the second cleaning member reaches the second proximity position at timing identical to timing when the first cleaning member reaches the first proximity position, before the first step.
- According to the fifth aspect, the second movement speed of the second cleaning member disposed at the second initial position relatively close to the substrate is determined on the basis of the first movement speed of the first cleaning member disposed at the first initial position relatively far from the substrate. Therefore, it is possible to shorten a time required for causing the first cleaning member and the second cleaning member to reach the first proximity position and the second proximity position, respectively. As a result, it is possible to increase the number of substrates processed per unit time (wph; wafer per hour). Further, the first cleaning member and the second cleaning member respectively disposed at the first proximity position and the second proximity position having the same distances from the substrate are moved symmetrically with respect to the substrate and the first cleaning member and the second cleaning member are simultaneously contacted with the substrate. Therefore, it is possible to simultaneously and accurately position the first cleaning member and the second cleaning member on the surfaces of the substrate. As a result, subsequent pressing amount control can be performed with high accuracy, and accuracy of the pressing load can be improved.
- According to a substrate cleaning device according to a sixth aspect of the embodiment, in the substrate cleaning device according to the fifth aspect, each of the first cleaning member and the second cleaning member is a roll cleaning member.
- According to a substrate cleaning device according to a seventh aspect of the embodiment, in the substrate cleaning device according to the fifth or sixth aspect, each of the first member drive unit and the second member drive unit is an electric actuator.
- According to the seventh aspect, the pressing amounts of the first cleaning member and the second cleaning member can be controlled with high accuracy, as compared with the case where air cylinders are adopted as the first member drive unit and the second member drive unit. As a result, accuracy of the pressing load can be further improved.
- A substrate processing apparatus according to an eighth aspect of the embodiment includes the substrate cleaning device according to any one of the first to seventh aspects.
- A substrate cleaning method according to a ninth aspect of the embodiment includes: a step of causing a member drive unit to press a cleaning member against a substrate; a step of causing a load measurement unit to measure a pressing load of the cleaning member; and a step of causing a control unit to control a pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes a setting load, wherein, in the step of controlling the pressing amount, the control unit repeats an operation of comparing the measurement value of the load measurement unit with the setting load, changing the pressing amount of the cleaning member by a first movement amount so that a difference value decreases, when the difference value is larger than a first threshold value and equal to or smaller than a second threshold value, and changing the pressing amount of the cleaning member by a second movement amount larger than the first movement amount so that the difference value decreases, when the difference value is larger than the second threshold value, until the difference value becomes equal to or smaller than the first threshold value.
- A substrate cleaning method according to a tenth aspect of the embodiment includes: a step of causing a control unit to calculate a pressing amount of a cleaning member corresponding to a setting load; a step of causing a member drive unit to press the cleaning member against a substrate by the calculated pressing amount; a step of causing a load measurement unit to measure a pressing load of the cleaning member; and a step of causing a control unit to control the pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes the setting load, wherein the control unit previously stores a correspondence relation between the pressing load and the pressing amount of the cleaning member for M (M is a natural number of 2 or more) pressing loads as master data, and in the step of calculating the pressing amount, the control unit acquires the correspondence relation between the pressing load and the pressing amount of the cleaning member for N (N is a natural number smaller than M) pressing loads among the M pressing loads as measurement data, on the basis of the measurement value of the load measurement unit, the control unit corrects each of pressing amounts corresponding to the M pressing loads in the master data, on the basis of the measurement data, so that the correspondence relation between the pressing load and the pressing amount for the N pressing loads in the master data approaches the correspondence relation between the pressing load and the pressing amount for the N pressing loads in the measurement data, and generates data for movement amount calculation showing the correspondence relation between the pressing load and the pressing amount for the M pressing loads, and the control unit calculates the pressing amount of the cleaning member corresponding to the setting load, on the basis of the correspondence relation between the pressing load and the pressing amount in the data for movement amount calculation.
- According to a substrate cleaning method according to an eleventh aspect of the embodiment, in the substrate cleaning method according to the ninth or tenth aspect, the cleaning member is any one member of the group consisting of a roll cleaning member, a pencil cleaning member, and a buff cleaning/polishing member.
- According to a substrate cleaning method according to a twelfth aspect of the embodiment, in the substrate cleaning method according to any one of the ninth to eleventh aspects, the member drive unit is an electric actuator.
- A substrate cleaning method according to a thirteenth aspect of the embodiment includes: a step of causing a first member drive unit to contact a first cleaning member with a first surface of a substrate and causing a second member drive unit to contact a second cleaning member with a second surface of the substrate; a step of causing the first member drive unit to press the first cleaning member against the first surface of the substrate and causing the second member drive unit to press the second cleaning member against the second surface of the substrate; a step of causing a first load measurement unit to measure a pressing load of the first cleaning member and causing a second load measurement unit to measure a pressing load of the second cleaning member; and a step of causing a control unit to control each of a pressing amount of the first cleaning member by the first member drive unit and a pressing amount of the second cleaning member by the second member drive unit, on the basis of a measurement value of the first load measurement unit and a measurement value of the second load measurement unit, so that the pressing load of the first cleaning member becomes a first setting load and the pressing load of the second cleaning member becomes a second setting load, wherein the step of contacting the first cleaning member and the second cleaning member with the substrate includes a first step of causing the control unit to control the first member drive unit and the second member drive unit so that the first cleaning member moves at a first movement speed from a first initial position separated from the first surface of the substrate by a first distance to a first proximity position separated from the first surface by a third distance and the second cleaning member moves at a second movement speed from a second initial position separated from the second surface of the substrate by a second distance shorter than the first distance to a second proximity position separated from the second surface by the third distance and a second step of causing the control unit to control the first member drive unit and the second member drive unit so that the first cleaning member and the second cleaning member simultaneously start moving at a third movement speed lower than the first movement speed and simultaneously contact the first surface and the second surface of the substrate, respectively, and the control unit determines the second movement speed of the second cleaning member, on the basis of the first movement speed of the first cleaning member, so that the first cleaning member disposed at the first initial position and the second cleaning member disposed at the second initial position simultaneously start the moving and the second cleaning member reaches the second proximity position at timing identical to timing when the first cleaning member reaches the first proximity position, before the first step.
- According to a substrate cleaning method according to a fourteenth aspect of the embodiment, in the substrate cleaning method according to the thirteenth aspect, each of the first cleaning member and the second cleaning member is a roll cleaning member.
- According to a substrate cleaning method according to a fifteenth aspect of the embodiment, in the substrate cleaning method according to the thirteenth or fourteenth aspect, each of the first member drive unit and the second member drive unit is an electric actuator.
- Hereinafter, specific examples of an embodiment will be described in detail with reference to the accompanying drawings. In the following description and the drawings used in the following description, the same reference numerals will be used for parts that can be configured in the same way, and redundant descriptions will be omitted.
- <Substrate Processing Apparatus>
-
FIG. 1 is a plan view showing an entire configuration of asubstrate processing apparatus 1 according to an embodiment. - As shown in
FIG. 1 , thesubstrate processing apparatus 1 has a substantiallyrectangular housing 10 and aload port 12 on which a substrate cassette (not shown in the drawings) for stocking a plurality of substrates W (refer toFIG. 2 or the like) is placed. Theload port 12 is disposed to be adjacent to thehousing 10. Theload port 12 can be equipped with an open cassette, a standard manufacturing interface (SMIF) pod, or a front opening unified pod (FOUP). The SMIF pod and the FOUP are closed containers that can maintain the environment independent of an external space by accommodating the substrate cassette inside and covering the substrate cassette with a partition wall. As the substrate W, for example, a semiconductor wafer or the like can be mentioned. - In the
housing 10, a plurality of (four in an aspect shown inFIG. 1 )substrate polishing devices 14 a to 14 d, a firstsubstrate cleaning device 16 a and a secondsubstrate cleaning device 16 b for cleaning the substrate W after polishing, and asubstrate drying device 20 for drying the substrate W after cleaning are accommodated. Thesubstrate polishing devices 14 a to 14 d are arranged along a longitudinal direction of thehousing 10, and thesubstrate cleaning devices substrate drying device 20 are also arranged along the longitudinal direction of thehousing 10. - A
first transfer robot 22 is disposed in a region surrounded by theload port 12, thesubstrate polishing device 14 a located at the side of theload port 12, and thesubstrate drying device 20. Further, atransfer unit 24 is disposed in parallel with the longitudinal direction of thehousing 10, between a region where thesubstrate polishing devices 14 a to 14 d are arranged and a region where thesubstrate cleaning devices substrate drying device 20 are arranged. Thefirst transfer robot 22 receives the substrate W before polishing from theload port 12 and transfers the substrate W to thetransfer unit 24 or receives the dried substrate W extracted from thesubstrate drying device 20 from thetransfer unit 24. - A
second transfer robot 26 for transferring the substrate W between the firstsubstrate cleaning device 16 a and the secondsubstrate cleaning device 16 b is disposed between the firstsubstrate cleaning device 16 a and the secondsubstrate cleaning device 16 b. Further, athird transfer robot 28 for transferring the substrate W between the secondsubstrate cleaning device 16 b and thesubstrate drying device 20 is disposed between the secondsubstrate cleaning device 16 b and thesubstrate drying device 20. - Further, the
substrate processing apparatus 1 is provided with acontrol panel 30 for controlling the movement of each of thedevices 14 a to 14 d, 16 a, 16 b, 22, 24, 26, and 28. In the aspect shown inFIG. 1 , although thecontrol panel 30 is disposed inside thehousing 10, thecontrol panel 30 is not limited thereto and may be disposed outside thehousing 10. - As the first substrate cleaning device 16 a and/or the second substrate cleaning device 16 b, a roll cleaning device (a substrate cleaning device 16 according to a first embodiment or a substrate cleaning device 16′ according to a second embodiment to be described later) that contacts a roll cleaning member extending linearly over substantially an entire length of a diameter of the substrate W with a surface of the substrate W in the presence of a cleaning liquid and scrub-cleans the surface of the substrate W while rotating the roll cleaning member may be used, a pencil cleaning device (substrate cleaning device 16 according to a first modification of the first embodiment to be described later) that contacts a columnar pencil cleaning member extending in a vertical direction with the surface of the substrate W in the presence of the cleaning liquid, moves the pencil cleaning member in one direction parallel to the surface of the substrate W while rotating the pencil cleaning member, and scrub-cleans the surface of the substrate W may be used, a buff cleaning/polishing device (substrate cleaning device 16 according to a second modification of the first embodiment to be described later) that contacts a buff cleaning/polishing member with a rotation axis extending in a vertical direction with the surface of the substrate W in the presence of the cleaning liquid, moves the buff cleaning/polishing member in one direction parallel to the surface of the substrate W while rotating the buff cleaning/polishing member, and scrub-cleans and polishes the surface of the substrate W may be used, and a two-fluid jet cleaning device that cleans the surface of the substrate W by a two-fluid jet may be used. Further, as the first
substrate cleaning device 16 a and/or the secondsubstrate cleaning device 16 b, any combination of two or more devices of the roll cleaning device, the pencil cleaning device, the buff cleaning/polishing device, and the two-fluid jet cleaning device may be used. - The cleaning liquid includes a rinse liquid such as pure water (DIW) and a chemical liquid such as ammonia hydrogen peroxide (SC1), hydrochloric acid hydrogen peroxide (SC2), sulfuric acid hydrogen peroxide (SPM), sulfuric acid hydration, or hydrofluoric acid. Unless otherwise noted in the present embodiment, the cleaning liquid means either the rinse liquid or the chemical liquid.
- As the
substrate drying device 20, a spin drying device that jets IPA vapor from an injection nozzle moving in one direction parallel to the surface of the substrate W toward the rotating substrate W to dry the substrate W and rotates the substrate W at high speed to dry the substrate W by a centrifugal force may be used. - <Substrate Cleaning Device According to First Embodiment>
- Next, a
substrate cleaning device 16 according to the first embodiment will be described.FIG. 2 is a perspective view showing thesubstrate cleaning device 16 according to the first embodiment andFIG. 3 is a diagram showing a schematic configuration of thesubstrate cleaning device 16 according to the first embodiment. Thesubstrate cleaning device 16 according to the first embodiment may be used as the firstsubstrate cleaning device 16 a and/or the secondsubstrate cleaning device 16 b in thesubstrate processing apparatus 1 described above. - As shown in
FIGS. 2 and 3 , thesubstrate cleaning device 16 has a cleaningmember 46 that cleans a substrate W by contacting the substrate W, amember rotation unit 96 that rotates the cleaningmember 46, amember drive unit 56 that presses the cleaningmember 46 against the substrate W, aload measurement unit 54 that measures a pressing load of the cleaningmember 46, and acontrol unit 90 that controls a pressing amount of the cleaningmember 46 by themember drive unit 56, on the basis of a measurement value ofload measurement unit 54, so that the pressing load of the cleaningmember 46 becomes a setting load. - In the examples shown in
FIGS. 2 and 3 , although the cleaningmember 46 is a roll cleaning member (roll sponge) extending in a columnar shape and a long shape and made of PVA, for example, the cleaningmember 46 is not limited thereto and may be a pencil cleaning member (refer toFIG. 13 ) with a columnar shape extending in a vertical direction or a buff cleaning/polishing member (refer toFIG. 14 ) with a rotation axis extending in the vertical direction. - As shown in
FIG. 2 , thesubstrate cleaning device 16 is provided with asubstrate rotation mechanism 40 for jsupporting and rotating the substrate W, amember holder 42 disposed liftably above the substrate W supported and rotated by thesubstrate rotation mechanism 40, and a cleaningliquid supply unit 50 for supplying a cleaning liquid to a surface of the substrate W, and the cleaningmember 46 is supported rotatably by themember holder 42. - In the example shown in the drawings, the
substrate rotation mechanism 40 is a plurality of horizontally movable (four in the example shown in the drawings) spindles that support a circumferential part of the substrate W and horizontally rotate the substrate W. However, thesubstrate rotation mechanism 40 is not limited thereto and may be rotatable chucks. An arrow E ofFIG. 2 indicates a rotation direction of the substrate W by thesubstrate rotation mechanism 40. - As shown in
FIG. 3 , themember rotation unit 96 is fixed to one end side of themember holder 42 in the longitudinal direction. As themember rotation unit 96, for example, a motor is used. Themember rotation unit 96 is driven, so that the cleaningmember 46 is rotated about a center axis parallel to the surface of the substrate W. An arrow F1 ofFIG. 2 indicates a rotation direction of the cleaningmember 46 by themember rotation unit 96. - In the examples shown in
FIGS. 2 and 3 , arecess 42 a is formed substantially at the center of themember holder 42 along the longitudinal direction, and theload measurement unit 54 is disposed in therecess 42 a and is fixed to themember holder 42. As theload measurement unit 54, for example, a load cell is used. - As the
member drive unit 56, for example, an electric actuator is used. The electric actuator may be a ball screw type electric actuator, may be a rack pinion type electric actuator, or may be a direct driven type electric actuator (linear motor). - In the example shown in the drawings, the
substrate cleaning device 16 is provided with alift shaft 57 lifted by driving of themember drive unit 56 and extending in a vertical direction and alift arm 58 having a base end connected to an upper end of thelift shaft 57 and extending in a horizontal direction, and themember holder 42 is connected to a tip of thelift arm 58 via theload measurement unit 54. Further, atilt mechanism 70 for tilting themember holder 42 is provided between theload measurement unit 54 and the tip of thelift arm 58. Themember drive unit 56 is driven, so that themember holder 42 is lifted integrally with thelift shaft 57 and thelift arm 58 above the substrate W supported and rotated by thesubstrate rotation mechanism 40. - The
control unit 90 has a programmable logic controller (PLC) that receives an output signal of theload measurement unit 54 and a motor controller that supplies electric pulses of a predetermined number of pulses to themember drive unit 56, according to an instruction from the PLC. At least a part of thecontrol unit 90 may be provided in thecontrol panel 30 described above. Further, in thecontrol unit 90, a target value of the pressing load of the cleaningmember 46 is stored in advance as a “setting load”, on the basis of an input from a user to thecontrol panel 30. - By adjusting the number of pulses of the electric pulses supplied from the
control unit 90 to themember drive unit 56, a movement amount (a pressing amount when the cleaningmember 46 contacts the surface of the substrate W) of themember holder 42 in the vertical direction can be adjusted with high accuracy. - The
member holder 42 is connected to the tip of thelift arm 58 via theload measurement unit 54. In a state where the cleaningmember 46 does not contact the substrate W, a weight of themember holder 42 is measured as a tensile load by theload measurement unit 54. At the time of cleaning the substrate W, if themember holder 42 is moved downward by themember drive unit 56 and the cleaningmember 46 contacts the substrate W, the tensile load applied to theload measurement unit 54 decreases according to a deformation amount of the cleaningmember 46 and a decreased amount of the tensile load is matched with the pressing load applied to the substrate W by the cleaningmember 46. - Thereby, the pressing load applied to the substrate W by the cleaning
member 46 at the time of cleaning the substrate W is measured by theload measurement unit 54 by the decreased tensile load. Thecontrol unit 90 calculates a necessary movement amount of the cleaningmember 46, on the basis of a measurement value of theload measurement unit 54, so that the pressing load of the cleaningmember 46 becomes the setting load, and supplies the electric pulses of the number of pulses corresponding to the calculated movement amount to themember drive unit 56. As a result, the pressing amount of the cleaningmember 46 by themember drive unit 56 is adjusted, and the pressing load for the substrate W is adjusted according to the deformation amount of the cleaningmember 46. - In the present embodiment, at the time of cleaning the substrate W, the
control unit 90 adjusts the pressing load of the cleaningmember 46 by closed loop control of a plurality of steps (for example, two steps). That is, at the time of cleaning the substrate, thecontrol unit 90 compares the measurement value of theload measurement unit 54 with the setting load. When a difference value is larger than a first threshold value (for example, 0.1 N) and equal to or smaller than a second threshold value (for example, 1.5 N), thecontrol unit 90 changes (adjusts) the pressing amount of the cleaningmember 46 by a first movement amount (for example, 0.01 mm) so that the difference value decreases, and when the difference value is larger than the second threshold value (for example, 1.5 N), thecontrol unit 90 changes (adjusts) the pressing amount of the cleaningmember 46 by a second movement amount (for example, 0.05 mm) larger than the first movement amount (for example, 0.01 mm) so that the difference value decreases. Thecontrol unit 90 repeats the above operation until the difference value becomes equal to or smaller than the first threshold value (0.1 N). As described above, when the pressing load of the cleaningmember 46 is adjusted, thecontrol unit 90 performs the closed loop control of the plurality of steps (for example, the two steps). As a result, it is possible to shorten a time required for adjusting the pressing load, as compared with the case of performing the closed loop control of one step. - Further, in the present embodiment, referring to
FIG. 7A , thecontrol unit 90 previously stores a correspondence relation between the pressing load and the pressing amount of the cleaningmember 46 for M (6 in the example shown in the drawing) pressing loads (=2, 4, 6, 8, 10, and 12 N) as master data in a storage medium (memory). The master data may be values obtained by previously measuring the correspondence relation between the pressing load and the pressing amount of the cleaningmember 46 as a guide using a dummy substrate in a substrate cleaning device maker or the like, for example. - Furthermore, referring to
FIG. 7B , thecontrol unit 90 acquires the correspondence relation between the pressing load and the pressing amount of the cleaningmember 46 for N (three in the example shown in the drawing) pressing loads (=2, 6, and 10 N) among the M pressing loads as measurement data, on the basis of the measurement value of theload measurement unit 54, before cleaning the substrate W. Thecontrol unit 90 stores the acquired measurement data in the storage medium (memory). - In addition, the
control unit 90 corrects each of the pressing amounts corresponding to the M pressing loads (=2, 4, 6, 8, 10, and 12 N) in the master data, on the basis of the measurement data, so that the correspondence relation between the pressing load and the pressing amount for the N pressing loads (=2, 6, and 10 N) in the master data (refer toFIG. 7A ) approaches the correspondence relation between the pressing load and the pressing amount for the N pressing loads (=2, 6, and 10 N) in the measurement data (refer toFIG. 7B ), and generates data for movement amount calculation (refer toFIG. 7C ) showing the correspondence relation between the pressing load and the pressing amount for the M pressing loads (=2, 4, 6, 8, 10, and 12 N). Specifically, in the examples shown inFIGS. 7A to 7C , for each of the pressing loads of 2, 6, and 10 N, the pressing amount in the measurement data is 50 μm larger than the pressing amount in the master data. Therefore, thecontrol unit 90 generates a numerical value obtained by adding 50 μm to the pressing amount in the master data for each of the pressing loads of 2, 4, 6, 8, 10, and 12 N as data for movement amount calculation. Thecontrol unit 90 stores the generated data for movement amount calculation in the storage medium (memory). - In addition, at the time of cleaning the substrate W, the
control unit 90 calculates the pressing amount of the cleaningmember 46 corresponding to the setting load, on the basis of the correspondence relation between the pressing load and the pressing amount in the generated data for movement amount calculation (refer toFIG. 7C ). Specifically, for example, when the setting load is 8 N, instead of calculating the pressing amount necessary for realizing the setting load as 800 μm by referring to the master data (FIG. 7A ), thecontrol unit 90 calculates the pressing amount as 850 μm by referring to the data for movement amount calculation (FIG. 7C ). As a result, thecontrol unit 90 can calculate the pressing amount of the cleaningmember 46 with high accuracy, as compared with the case where the pressing amount is calculated on the basis of the master data before correction. - Next, an example of a substrate cleaning method by the
substrate cleaning device 16 having the above configuration will be described.FIG. 4 is a flowchart illustrating an example of the substrate cleaning method.FIG. 5 is a flowchart illustrating a step of controlling the pressing amount of the cleaningmember 46 on the basis of the measurement value of the pressing load.FIG. 6 is a flowchart illustrating a step of calculating the pressing amount of the cleaningmember 46 corresponding to the setting load. - As shown in
FIG. 4 , first, if the user inputs the setting load via thecontrol panel 30, thecontrol unit 90 calculates the pressing amount of the cleaningmember 46 corresponding to the input setting load (step S10). - Specifically, for example, as shown in
FIG. 6 , when thecontrol unit 90 previously stores a correspondence relation between the pressing load and the pressing amount of the cleaningmember 46 for the M (6 in the example shown in the drawing) pressing loads (=2, 4, 6, 8, 10, and 12 N) as the master data in the storage medium (memory) by referring toFIG. 7A , thecontrol unit 90 acquires the correspondence relation between the pressing load and the pressing amount of the cleaningmember 46 with respect to the actual substrate W for N (3 in the example shown in the drawing) pressing loads (=2, 6, and 10 N) among the M pressing loads as measurement data, on the basis of the measurement value of theload measurement unit 54, by referring toFIG. 7B (step S11). In addition, thecontrol unit 90 stores the acquired measurement data in the storage medium (memory). - Next, the
control unit 90 corrects each of the pressing amounts corresponding to the M pressing loads (=2, 4, 6, 8, 10, and 12 N) in the master data, on the basis of the measurement data, so that the correspondence relation between the pressing load and the pressing amount for the N pressing loads (=2, 6, and 10 N) in the master data (refer toFIG. 7A ) approaches the correspondence relation between the pressing load and the pressing amount for the N pressing loads (=2, 6, and 10 N) in the measurement data (refer toFIG. 7B ), and generates data for movement amount calculation (refer toFIG. 7C ) showing the correspondence relation between the pressing load and the pressing amount for the M pressing loads (=2, 4, 6, 8, 10, and 12 N) (step S12). Thecontrol unit 90 stores the generated data for movement amount calculation in the storage medium (memory). - In addition, the
control unit 90 calculates the pressing amount of the cleaningmember 46 corresponding to the setting load input by the user, on the basis of the correspondence relation between the pressing load and the pressing amount in the generated data for movement amount calculation (refer toFIG. 7C ) (step S13). As a result, it is possible to calculate the pressing amount of the cleaningmember 46 with high accuracy in accordance with the actual substrate W, as compared with the case where the pressing amount is calculated on the basis of the master data before correction. - As shown in
FIG. 2 , after calculating the pressing amount of the cleaningmember 46 corresponding to the setting load, thecontrol unit 90 supplies electric pulses of a predetermined number of pulses to themember drive unit 56, moves downward the cleaningmember 46 by driving of themember drive unit 56, and contacts the cleaningmember 46 with the surface of the substrate W (step S20). At this time, the cleaningmember 46 only contacts the surface of the substrate W, the deformation amount of the cleaningmember 46 is zero, and the pressing load of the cleaningmember 46 for the substrate W is also zero. - Next, the
control unit 90 supplies the electric pulses of the number of pulses according to the pressing amount calculated in step S10 to themember drive unit 56 and presses the cleaningmember 46 against the surface of the substrate W by the calculated pressing amount by driving of the member drive unit 56 (step S30). - The
load measurement unit 54 measures the pressing load of the cleaningmember 46 for the substrate W (step S40). - In addition, the
control unit 90 controls the pressing amount of the cleaningmember 46 by themember drive unit 56 by the closed loop control, on the basis of the measurement value of theload measurement unit 54, so that the pressing load of the cleaningmember 46 becomes the setting load input by the user (step S50). - Specifically, for example, as shown in
FIG. 5 , thecontrol unit 90 acquires the measurement value of the pressing load from the load measurement unit 54 (step S51) and compares the acquired measurement value of the pressing load with the setting load (step S52). - Then, the
control unit 90 determines whether or not a difference value ΔF between the measurement value of the pressing load and the setting load is equal to or smaller than the second threshold value (for example, 1.5 N) previously stored in the control unit 90 (step S53). - Then, when the difference value is larger than the second threshold value (ΔF>1.5 N), the
control unit 90 supplies the electric pulses of the number of pulses corresponding to the predetermined second movement amount (for example, 0.05 mm) to themember drive unit 56 and changes (adjusts) the pressing amount of the cleaningmember 46 by the second movement amount (0.05 mm) by driving of the member drive unit 56 (step S55). Then, the processing is repeated from step S51 (closed loop control of the first step). - On the other hand, when the difference value is equal to or smaller than the second threshold value (ΔF≤1.5 N) (step S53: YES), the
control unit 90 determines whether the difference value ΔF between the measurement value of the pressing load and the setting load is equal to or smaller than the first threshold value (for example, 0.1 N) smaller than the second threshold value previously stored in the control unit 90 (step S54). - Then, when the difference value is larger than the first threshold value (ΔF>0.1 N), the
control unit 90 supplies the electric pulses of the number of pulses corresponding to the first movement amount (for example, 0.01 mm) smaller than the predetermined second movement amount to themember drive unit 56 and changes (adjusts) the pressing amount of the cleaningmember 46 by the first movement amount (0.01 mm) by driving of the member drive unit 56 (step S56). Then, the processing is repeated from step S51 (closed loop control of the second step). - On the other hand, when the difference value is equal to or smaller than the first threshold value (ΔF≤0.1 N) (step S54: YES), the processing of step S50 ends. As a result, the pressing load of the cleaning
member 46 is adjusted with high accuracy so as to have substantially the same value as the setting load input by the user. - According to the present embodiment described above, when the difference value between the measurement value of the
load measurement unit 54 and the setting load is larger than the first threshold value and equal to or smaller than the second threshold value, thecontrol unit 90 changes the pressing amount of the cleaningmember 46 by the first movement amount (that is, finely adjusts the pressing amount when the difference value is small). However, when the difference value is larger than the second threshold value, thecontrol unit 90 changes the pressing amount of the cleaningmember 46 by the second movement amount larger than the first movement amount (that is, roughly adjusts the pressing amount when the difference value is large). As a result, as compared with the method of changing the pressing amount of the cleaningmember 46 by the first movement amount even when the difference value is larger than the second threshold value (that is, finely adjusting the pressing amount even when the difference value is large), it is possible to shorten a time until the difference value converges to the first threshold value or less, which can lead to an increase in the number of substrates processed per unit time (wph; wafer per hour). Further, as compared with the method of changing the pressing amount of the cleaning member by the second movement amount even when the difference value is equal to or smaller than the second threshold value (that is, roughly adjusting the pressing amount even when the difference value is small), the pressing amount can be controlled with high accuracy. As a result, accuracy of the pressing load can be improved. - Further, according to the present embodiment, the
control unit 90 corrects the correspondence relation between the pressing load and the pressing amount in the master data (refer toFIG. 7A ), on the basis of the measurement data (refer toFIG. 7B ), and calculates the pressing amount of the cleaningmember 46, on the basis of the data for movement amount calculation (refer toFIG. 7C ) to be the correspondence relation after correction. Therefore, thecontrol unit 90 can determine the pressing amount with high accuracy as compared with the case where the pressing amount of the cleaningmember 46 is calculated on the basis of the correspondence relation (=master data) before correction. As a result, accuracy of the pressing load can be improved. - Further, according to the present embodiment, since the
member drive unit 56 is the electric actuator, the pressing amount of the cleaningmember 46 can be controlled with high accuracy as compared with the case where an air cylinder is adopted as themember drive unit 56. As a result, accuracy of the pressing load can be further improved. <Substrate Cleaning Device According to Second Embodiment> - Next, a
substrate cleaning device 16′ according to a second embodiment will be described.FIG. 8 is a perspective view showing thesubstrate cleaning device 16′ according to the second embodiment andFIG. 9 is a diagram showing a schematic configuration of thesubstrate cleaning device 16′ according to the second embodiment. Thesubstrate cleaning device 16′ according to the second embodiment may be used as a firstsubstrate cleaning device 16 a and/or a secondsubstrate cleaning device 16 b in thesubstrate processing apparatus 1 described above. - As shown in
FIGS. 8 and 9 , in addition to a configuration of asubstrate cleaning device 16 according to the first embodiment described above, thesubstrate cleaning device 16′ according to the second embodiment further has asecond cleaning member 48 that cleans a second surface of a substrate W by contacting the second surface of the substrate W, a secondmember rotation unit 98 that rotates thesecond cleaning member 48, a secondmember drive unit 56 a that presses thesecond cleaning member 48 against the second surface of the substrate W, and a second load measurement unit 54 a that measures a pressing load of thesecond cleaning member 48. Acontrol unit 90 controls each of a pressing amount of afirst cleaning member 46 by a firstmember drive unit 56 and a pressing amount of thesecond cleaning member 48 by the secondmember drive unit 56 a, on the basis of a measurement value of a firstload measurement unit 54 and a measurement value of the second load measurement unit 54 a, so that a pressing load of thefirst cleaning member 46 becomes a first setting load and a pressing load of thesecond cleaning member 48 becomes a second setting load. - In the present embodiment, each of the
first cleaning member 46 and thesecond cleaning member 48 is a roll cleaning member (roll sponge) extending in a columnar shape and a long shape and made of PVA, for example. As shown inFIG. 8 , thesubstrate cleaning device 16′ is further provided with asecond member holder 44 disposed liftably under the substrate W supported and rotated by asubstrate rotation mechanism 40 and a second cleaningliquid supply unit 52 for supplying a cleaning liquid to the second surface of the substrate W, and thesecond cleaning member 48 is supported rotatably by thesecond member holder 44. - As shown in
FIG. 9 , the secondmember rotation unit 98 is fixed to one end side of thesecond member holder 44 in a longitudinal direction. As the secondmember rotation unit 98, for example, a motor is used. The secondmember rotation unit 98 is driven, so that thesecond cleaning member 48 is rotated about a center axis parallel to the surface of the substrate W. An arrow F2 ofFIG. 8 indicates a rotation direction of thesecond cleaning member 48 by the secondmember rotation unit 98. - In the examples shown in
FIGS. 8 and 9 , arecess 44 a is formed substantially at the center of thesecond member holder 44 along the longitudinal direction, and the second load measurement unit 54 a is disposed in therecess 44 a and is fixed to thesecond member holder 44. As the second load measurement unit 54 a, for example, a load cell is used. - As the second
member drive unit 56 a, for example, an electric actuator is used. The electric actuator may be a ball screw type electric actuator, may be a rack pinion type electric actuator, or may be a direct driven type electric actuator (linear motor). - In the example shown in the drawings, the
substrate cleaning device 16′ is provided with asecond lift shaft 59 lifted by driving of the secondmember drive unit 56 a and extending in a vertical direction, and thesecond member holder 44 is connected to an upper end of thesecond lift shaft 59 via the second load measurement unit 54 a. Further, a second tilt mechanism for tilting thesecond member holder 44 is provided between the second load measurement unit 54 a and thesecond member holder 44. The secondmember drive unit 56 a is driven, so that thesecond member holder 44 is lifted integrally with thesecond lift shaft 59 under the substrate W supported and rotated by thesubstrate rotation mechanism 40. - The
control unit 90 has a second programmable logic controller (PLC) that receives an output signal of the second load measurement unit 54 a and a second motor controller that supplies electric pulses of a predetermined number of pulses to the secondmember drive unit 56 a, according to an instruction from the second PLC. Further, in thecontrol unit 90, a target value of the pressing load of thesecond cleaning member 48 is stored in advance as a “second setting load”, on the basis of an input from a user to acontrol panel 30. - By adjusting the number of pulses of the electric pulses supplied from the
control unit 90 to the secondmember drive unit 56 a, a movement amount (a pressing amount when thesecond cleaning member 48 contacts the second surface of the substrate W) of thesecond member holder 44 in the vertical direction can be adjusted with high accuracy. - The
second member holder 44 is connected to the upper end of thesecond lift shaft 59 via the second load measurement unit 54 a. In a state where thesecond cleaning member 48 does not contact the substrate W, a weight of thesecond member holder 44 is measured as a compressive load by the second load measurement unit 54 a. At the time of cleaning the substrate W, if thesecond member holder 44 is moved upward by the secondmember drive unit 56 a and thesecond cleaning member 48 contacts the substrate W, the compressive load applied to the second load measurement unit 54 a increases according to a deformation amount of thesecond cleaning member 48 and an increased amount of the compressive load is matched with the pressing load applied to the substrate W by thesecond cleaning member 48. - Thereby, the pressing load applied to the substrate W by the
second cleaning member 48 at the time of cleaning the substrate W is measured by the second load measurement unit 54 a by the increased compressive load. Thecontrol unit 90 calculates a necessary movement amount of thesecond cleaning member 48, on the basis of a measurement value of the second load measurement unit 54 a, so that the pressing load of thesecond cleaning member 48 becomes the second setting load, and supplies the electric pulses of the number of pulses corresponding to the calculated movement amount to the secondmember drive unit 56 a. As a result, the pressing amount of thesecond cleaning member 48 by the secondmember drive unit 56 a is adjusted, and the pressing load for the substrate W is adjusted according to the deformation amount of thesecond cleaning member 48. - In the present embodiment, the
control unit 90 is configured to execute a first step of controlling the firstmember drive unit 56 and the secondmember drive unit 56 a so that thefirst cleaning member 46 moves at a first movement speed V1 from a first initial position separated from the first surface of the substrate W by a first distance D1 to a first proximity position separated from the first surface by a third distance D3 and thesecond cleaning member 48 moves at a second movement speed V2 from a second initial position separated from the second surface of the substrate W by a second distance D2 shorter than the first distance D1 to a second proximity position separated from the second surface by the third distance D3, by referring toFIGS. 12A and 12B , before cleaning the substrate W. - Further, the
control unit 90 is configured to execute a second step of controlling the firstmember drive unit 56 and the secondmember drive unit 56 a so that thefirst cleaning member 46 and thesecond cleaning member 48 simultaneously start moving at a third movement speed V3 lower than the first movement speed V1 and simultaneously contact the first surface and the second surface of the substrate W, respectively, by referring toFIGS. 12B and 12C , after the first step. By moving thefirst cleaning member 46 and thesecond cleaning member 48 respectively disposed at the first proximity position and the second proximity position having the same distances from the substrate W, symmetrically with respect to the substrate W, and simultaneously contacting thefirst cleaning member 46 and thesecond cleaning member 48 with the substrate W, it is possible to simultaneously and accurately position thefirst cleaning member 46 and thesecond cleaning member 48 on the surfaces of the substrate W. - Further, the
control unit 90 is configured to determine the second movement speed V2 of thesecond cleaning member 48 by the secondmember drive unit 56 a, on the basis of the first movement speed V1 of thefirst cleaning member 46 by the firstmember drive unit 56, so that thefirst cleaning member 46 disposed at the first initial position and thesecond cleaning member 48 disposed at the second initial position simultaneously start the moving and thesecond cleaning member 48 reaches the second proximity position at timing identical to timing when thefirst cleaning member 46 reaches the first proximity position, before the first step. Specifically, for example, thecontrol unit 90 determines the second movement speed V2 of thesecond cleaning member 48 by the secondmember drive unit 56 a by a calculation formula of V2=V1×(D2-D3)/(D1-D3). By determining the second movement speed V2 of thesecond cleaning member 48 disposed at the second initial position relatively close to the substrate W, on the basis of the first movement speed V1 of thefirst cleaning member 46 disposed at the first initial position relatively far from the substrate W, it is possible to shorten a time required for causing thefirst cleaning member 46 and thesecond cleaning member 48 to reach the first proximity position and the second proximity position, respectively. - Next, an example of a substrate cleaning method by the
substrate cleaning device 16′ having the above configuration will be described.FIG. 10 is a flowchart illustrating an example of the substrate cleaning method.FIG. 11 is a flowchart illustrating a step of contacting thefirst cleaning member 46 and thesecond cleaning member 48 with the substrate W. - As shown in
FIG. 10 , first, if the user inputs the first setting load and the second setting load via thecontrol panel 30, thecontrol unit 90 calculates each of the pressing amounts of thefirst cleaning member 46 and thesecond cleaning member 48 corresponding to the input setting loads (step S110). - Next, the
control unit 90 supplies electric pulses of a predetermined number of pulses to the firstmember drive unit 56, moves downward thefirst cleaning member 46 by driving of the firstmember drive unit 56, and contacts thefirst cleaning member 46 with the first surface of the substrate W, and thecontrol unit 90 supplies electric pulses of a predetermined number of pulses to the secondmember drive unit 56 a, moves upward thesecond cleaning member 48 by driving of the secondmember drive unit 56 a, and contacts thesecond cleaning member 48 with the second surface of the substrate W (step S120). - Specifically, for example, as shown in
FIG. 11 , thecontrol unit 90 determines the second movement speed V2 of thesecond cleaning member 48 by the secondmember drive unit 56 a, on the basis of the first movement speed V1 of thefirst cleaning member 46 by the first member drive unit 56 (step S121), so that thefirst cleaning member 46 disposed at the first initial position and thesecond cleaning member 48 disposed at the second initial position simultaneously start the moving (refer toFIG. 12A ) and thesecond cleaning member 48 reaches the second proximity position at timing identical to timing when thefirst cleaning member 46 reaches the first proximity position (refer toFIG. 12B ). - Next, referring to
FIGS. 12A and 12B , thecontrol unit 90 controls each of the firstmember drive unit 56 and the secondmember drive unit 56 a, moves thefirst cleaning member 46 at the first movement speed V1 (for example, a maximum speed by the first member drive unit 56) from the first initial position to the first proximity position, and moves thesecond cleaning member 48 at the second movement speed V2 determined in step S121 from the second initial position to the second proximity position (step S122). As a result, it is possible to shorten a time required for causing thefirst cleaning member 46 and thesecond cleaning member 48 to reach the first proximity position and the second proximity position, respectively. - Next, referring to
FIGS. 12B and 12C , thecontrol unit 90 controls each of the firstmember drive unit 56 and the secondmember drive unit 56 a, simultaneously starts moving thefirst cleaning member 46 and thesecond cleaning member 48 at the third movement speed V3 lower than the first movement speed V1, and simultaneously contacts thefirst cleaning member 46 and thesecond cleaning member 48 with the first surface and the second surface of the substrate W, respectively (step S123). As a result, it is possible to simultaneously and accurately position thefirst cleaning member 46 and thesecond cleaning member 48 on the surfaces of the substrate W. - At this time, the
first cleaning member 46 only contacts the first surface of the substrate W, the deformation amount of thefirst cleaning member 46 is zero, and the pressing load of thefirst cleaning member 46 for the substrate W is also zero. Similarly, thesecond cleaning member 48 only contacts the second surface of the substrate W, the deformation amount of thesecond cleaning member 48 is zero, and the pressing load of thesecond cleaning member 48 for the substrate W is also zero. - Next, the
control unit 90 supplies the electric pulses of the number of pulses according to the pressing amounts calculated in step S110 to the firstmember drive unit 56 and the secondmember drive unit 56 a and presses thefirst cleaning member 46 and thesecond cleaning member 48 against the first surface and the second surface of the substrate W by the calculated pressing amounts by the firstmember drive unit 56 and the secondmember drive unit 56 a (step S130). - The first
load measurement unit 54 and the second load measurement unit 54 a respectively measure the pressing loads of thefirst cleaning member 46 and thesecond cleaning member 48 for the substrate W (step S140). - Then, the
control unit 90 controls the pressing amounts of thefirst cleaning member 46 and thesecond cleaning member 48 by the firstmember drive unit 56 and the secondmember drive unit 56 a by closed loop control, on the basis of the measurement values of the firstload measurement unit 54 and the second load measurement unit 54 a, so that the pressing load of thefirst cleaning member 46 becomes the first setting load input by the user and the pressing load of thesecond cleaning member 48 becomes the second setting load input by the user (step S150). As a result, the pressing loads of thefirst cleaning member 46 and thesecond cleaning member 48 are adjusted with high accuracy so as to have substantially the same values as the first and second setting loads input by the user. - According to the present embodiment described above, referring to
FIGS. 12A and 12B , the second movement speed of thesecond cleaning member 48 disposed at the second initial position relatively close to the substrate W is determined on the basis of the first movement speed of thefirst cleaning member 46 disposed at the first initial position relatively far from the substrate W. Therefore, it is possible to shorten a time required for causing thefirst cleaning member 46 and thesecond cleaning member 48 to reach the first proximity position and the second proximity position, respectively. As a result, it is possible to increase the number of substrates processed per unit time (wph; wafer per hour). - Further, according to the present embodiment, referring to
FIGS. 12B and 12C , thefirst cleaning member 46 and thesecond cleaning member 48 respectively disposed at the first proximity position and the second proximity position having the same distances from the substrate W are moved symmetrically with respect to the substrate W and thefirst cleaning member 46 and thesecond cleaning member 48 are simultaneously contacted with the substrate W. Therefore, it is possible to simultaneously and accurately position thefirst cleaning member 46 and thesecond cleaning member 48 on the surfaces of the substrate W. As a result, subsequent pressing amount control can be performed with high accuracy, and accuracy of the pressing load can be improved. - Further, according to the present embodiment, since each of the first
member drive unit 56 and the secondmember drive unit 56 a is the electric actuator, the pressing amounts of thefirst cleaning member 46 and thesecond cleaning member 48 can be controlled with high accuracy, as compared with the case where air cylinders are adopted as the firstmember drive unit 56 and the secondmember drive unit 56 a. As a result, accuracy of the pressing load can be further improved. - Although the embodiments and the modifications of the present technology are described by the examples, a range of the present technology is not limited thereto, and changes and modifications according to objects can be made within a range described in claims. Further, the embodiments and the modifications can be appropriately combined within a range in which processing contents are not contradicted.
Claims (14)
1. A substrate cleaning device comprising:
a cleaning member configured to clean a substrate by contacting the substrate;
a member rotation unit configured to rotate the cleaning member;
a member drive unit configured to press the cleaning member against the substrate;
a load measurement unit configured to measure a pressing load of the cleaning member; and
a control unit configured to control a pressing amount of the cleaning member by the member drive unit, on the basis of a measurement value of the load measurement unit, so that the pressing load of the cleaning member becomes a setting load, wherein
the control unit repeats an operation of comparing the measurement value of the load measurement unit with the setting load, changing the pressing amount of the cleaning member by a first movement amount so that a difference value decreases, when the difference value is larger than a first threshold value and equal to or smaller than a second threshold value, and changing the pressing amount of the cleaning member by a second movement amount larger than the first movement amount so that the difference value decreases, when the difference value is larger than the second threshold value, until the difference value becomes equal to or smaller than the first threshold value.
2. The substrate cleaning device according to claim 1 , wherein
the cleaning member is any one member of the group consisting of a roll cleaning member, a pencil cleaning member, and a buff cleaning/polishing member.
3. The substrate cleaning device according to claim 1 , wherein
the member drive unit is an electric actuator.
4. A substrate cleaning device comprising:
a cleaning member configured to clean a substrate by contacting the substrate;
a member rotation unit configured to rotate the cleaning member;
a member drive unit configured to press the cleaning member against the substrate;
a load measurement unit configured to measure a measurement value of an applied pressing load of the cleaning member; and
a control unit configured to control an applied pressing amount of the cleaning member by the member drive unit, on the basis of the measurement value of the load measurement unit, so that the applied pressing load of the cleaning member becomes a setting load, wherein
the control unit stores a correspondence relation between pressing loads and pressing amounts of the cleaning member for M different stored pressing loads as master data,
the control unit acquires the correspondence relation between the pressing loads and the pressing amounts of the cleaning member for N different pressing loads among the M different stored pressing loads as measurement data, on the basis of the measurement value of the load measurement unit,
the control unit corrects each of the pressing amounts corresponding to the M different stored pressing loads in the master data, on the basis of the measurement data, so that the correspondence relation between the pressing loads and the pressing amounts for the N different pressing loads in the master data approaches the correspondence relation between the pressing loads and the pressing amounts for the N different pressing loads in the measurement data, and generates data for a movement amount calculation showing the correspondence relation between the pressing loads and the pressing amounts for the M different stored pressing loads, and
the control unit calculates the calculated pressing amount of the cleaning member corresponding to the setting load, on the basis of the correspondence relation between the pressing loads and the pressing amounts in the data for movement amount calculation.
5. The substrate cleaning device according to claim 4 , wherein
N is smaller than M.
6. The substrate cleaning device according to claim 4 , wherein
the cleaning member is any one member of the group consisting of a roll cleaning member, a pencil cleaning member, and a buff cleaning/polishing member.
7. The substrate cleaning device according to claim 4 , wherein
the member drive unit is an electric actuator.
8. A substrate cleaning device comprising:
a first cleaning member configured to clean a first surface of a substrate by contacting the first surface of the substrate;
a first member rotation unit configured to rotate the first cleaning member;
a first member drive unit configured to press the first cleaning member against the first surface of the substrate;
a first load measurement unit configured to measure a pressing load of the first cleaning member;
a second cleaning member configured to clean a second surface of the substrate by contacting the second surface of the substrate;
a second member rotation unit configured to rotate the second cleaning member;
a second member drive unit configured to press the second cleaning member against the second surface of the substrate;
a second load measurement unit configured to measure a pressing load of the second cleaning member; and
a control unit configured to control a pressing amount of the first cleaning member by the first member drive unit and a pressing amount of the second cleaning member by the second member drive unit, on the basis of a measurement value of the first load measurement unit and a measurement value of the second load measurement unit, so that the pressing load of the first cleaning member becomes a first setting load and the pressing load of the second cleaning member becomes a second setting load, wherein
the control unit is configured to execute
a first step of controlling the first member drive unit and the second member drive unit so that the first cleaning member moves at a first movement speed from a first initial position separated from the first surface of the substrate by a first distance to a first proximity position separated from the first surface of the substrate by a third distance and the second cleaning member moves at a second movement speed from a second initial position separated from the second surface of the substrate by a second distance shorter than the first distance to a second proximity position separated from the second surface of the substrate by the third distance and
a second step of controlling the first member drive unit and the second member drive unit so that the first cleaning member and the second cleaning member simultaneously start moving at a third movement speed lower than the first movement speed and simultaneously contact the first surface of the substrate and the second surface of the substrate, respectively, and
the control unit is configured to determine, before the first step, the second movement speed of the second cleaning member by the second member drive unit, on the basis of the first movement speed of the first cleaning member by the first member drive unit, so that the first cleaning member disposed at the first initial position and the second cleaning member disposed at the second initial position simultaneously start the moving and the second cleaning member reaches the second proximity position at timing identical to timing when the first cleaning member reaches the first proximity position.
9. The substrate cleaning device according to claim 8 , wherein
each of the first cleaning member and the second cleaning member is a roll cleaning member.
10. The substrate cleaning device according to claim 8 , wherein
each of the first member drive unit and the second member drive unit is an electric actuator.
11. A substrate processing apparatus comprising the substrate cleaning device according to claim 1 .
12. A substrate processing apparatus comprising the substrate cleaning device according to claim 4 .
13. A substrate processing apparatus comprising the substrate cleaning device according to claim 5 .
14. A substrate processing apparatus comprising the substrate cleaning device according to claim 8 .
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US18/328,645 US20230326770A1 (en) | 2018-07-06 | 2023-06-02 | Substrate cleaning device and substrate cleaning method |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11380561B2 (en) * | 2017-05-10 | 2022-07-05 | Ebara Corporation | Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4662185A (en) * | 1985-03-04 | 1987-05-05 | Hitachi, Ltd. | System of controlling refrigerator temperature |
US4698574A (en) * | 1984-03-14 | 1987-10-06 | Yoshiki Industrial Co., Ltd. | Process control apparatus |
DE3621083A1 (en) * | 1986-06-24 | 1988-01-07 | Philips Patentverwaltung | Control method for generating a manipulated variable and circuit arrangement for carrying out this control method |
JPH11260782A (en) * | 1998-03-09 | 1999-09-24 | Oki Electric Ind Co Ltd | Substrate cleaning equipment |
US6086460A (en) * | 1998-11-09 | 2000-07-11 | Lam Research Corporation | Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization |
US20060011167A1 (en) * | 2002-11-19 | 2006-01-19 | Armin Dolker | Method for regulating the speed of an internal combustion engine |
US20120078420A1 (en) * | 2010-09-28 | 2012-03-29 | Cisco Technology, Inc. | Fan speed control |
US20140205340A1 (en) * | 2013-01-21 | 2014-07-24 | Konica Minolta, Inc. | Image processing apparatus, rotation control method for motor, and computer-readable recording medium |
US20150224620A1 (en) * | 2014-01-09 | 2015-08-13 | Ebara Corporation | Pressure regulator and polishing apparatus having the pressure regulator |
WO2015132872A1 (en) * | 2014-03-04 | 2015-09-11 | 株式会社ニレコ | Feedback control method, feedback control device, and program |
US20160243593A1 (en) * | 2015-02-18 | 2016-08-25 | Ebara Corporation | Substrate cleaning apparatus,substrate cleaning method, and substrate processing apparatus |
US20170047237A1 (en) * | 2014-04-18 | 2017-02-16 | Ebara Corporation | Substrate processing apparatus, substrate processing system. and substrate processing method |
CN108227477A (en) * | 2017-12-06 | 2018-06-29 | 中国飞机强度研究所 | A kind of adaptive PID control method |
US20190051610A1 (en) * | 2017-03-08 | 2019-02-14 | Yangtze Memory Technologies Co., Ltd. | Staircase etch control in forming three-dimensional memory device |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3764228B2 (en) | 1996-12-17 | 2006-04-05 | 芝浦メカトロニクス株式会社 | Brush cleaning device |
JP3463908B2 (en) * | 1997-02-17 | 2003-11-05 | 大日本スクリーン製造株式会社 | Substrate cleaning method and substrate cleaning apparatus |
JP3953716B2 (en) * | 2000-08-01 | 2007-08-08 | 株式会社荏原製作所 | Substrate cleaning device |
JP2006261393A (en) * | 2005-03-17 | 2006-09-28 | Seiko Epson Corp | Device and method for washing substrate |
JP2006324429A (en) | 2005-05-18 | 2006-11-30 | Nec Electronics Corp | Method for cleaning after mechanical chemical polishing |
JP2008300608A (en) * | 2007-05-31 | 2008-12-11 | Yaskawa Electric Corp | Substrate carrier provided with elevating/lowering position confirmation means and semiconductor manufacturing device provided with the same |
JP2013089797A (en) * | 2011-10-19 | 2013-05-13 | Ebara Corp | Substrate cleaning method and substrate cleaning device |
JP5328876B2 (en) * | 2011-12-01 | 2013-10-30 | 株式会社日立パワーソリューションズ | Roll press equipment |
JP5878441B2 (en) * | 2012-08-20 | 2016-03-08 | 株式会社荏原製作所 | Substrate cleaning apparatus and substrate processing apparatus |
JP6262983B2 (en) * | 2012-10-25 | 2018-01-17 | 株式会社荏原製作所 | Substrate cleaning apparatus and substrate cleaning method |
JP6279276B2 (en) * | 2013-10-03 | 2018-02-14 | 株式会社荏原製作所 | Substrate cleaning apparatus and substrate processing apparatus |
JP2015220402A (en) * | 2014-05-20 | 2015-12-07 | 株式会社荏原製作所 | Substrate cleaning device and method performed by substrate cleaning device |
JP6454245B2 (en) * | 2014-10-21 | 2019-01-16 | 東京エレクトロン株式会社 | Substrate liquid processing method, substrate liquid processing apparatus, and computer readable storage medium storing substrate liquid processing program |
JP6328577B2 (en) | 2015-02-24 | 2018-05-23 | 株式会社荏原製作所 | Load measuring device and load measuring method |
JP6646460B2 (en) * | 2016-02-15 | 2020-02-14 | 株式会社荏原製作所 | Substrate cleaning device and substrate processing device |
JP6767834B2 (en) * | 2016-09-29 | 2020-10-14 | 株式会社荏原製作所 | Substrate cleaning equipment and substrate processing equipment |
-
2018
- 2018-07-06 JP JP2018129086A patent/JP7079164B2/en active Active
-
2019
- 2019-07-03 SG SG10201906216RA patent/SG10201906216RA/en unknown
- 2019-07-03 TW TW108123348A patent/TWI786309B/en active
- 2019-07-05 KR KR1020190081111A patent/KR102454619B1/en active IP Right Grant
- 2019-07-05 US US16/503,868 patent/US11164757B2/en active Active
- 2019-07-05 CN CN201910603136.4A patent/CN110690141A/en active Pending
-
2021
- 2021-09-29 US US17/489,277 patent/US20220020610A1/en not_active Abandoned
-
2023
- 2023-06-02 US US18/328,645 patent/US20230326770A1/en active Pending
- 2023-06-02 US US18/328,626 patent/US20230307259A1/en active Pending
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4698574A (en) * | 1984-03-14 | 1987-10-06 | Yoshiki Industrial Co., Ltd. | Process control apparatus |
US4662185A (en) * | 1985-03-04 | 1987-05-05 | Hitachi, Ltd. | System of controlling refrigerator temperature |
DE3621083A1 (en) * | 1986-06-24 | 1988-01-07 | Philips Patentverwaltung | Control method for generating a manipulated variable and circuit arrangement for carrying out this control method |
JPH11260782A (en) * | 1998-03-09 | 1999-09-24 | Oki Electric Ind Co Ltd | Substrate cleaning equipment |
US6086460A (en) * | 1998-11-09 | 2000-07-11 | Lam Research Corporation | Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization |
US20060011167A1 (en) * | 2002-11-19 | 2006-01-19 | Armin Dolker | Method for regulating the speed of an internal combustion engine |
US20120078420A1 (en) * | 2010-09-28 | 2012-03-29 | Cisco Technology, Inc. | Fan speed control |
US20140205340A1 (en) * | 2013-01-21 | 2014-07-24 | Konica Minolta, Inc. | Image processing apparatus, rotation control method for motor, and computer-readable recording medium |
US20150224620A1 (en) * | 2014-01-09 | 2015-08-13 | Ebara Corporation | Pressure regulator and polishing apparatus having the pressure regulator |
WO2015132872A1 (en) * | 2014-03-04 | 2015-09-11 | 株式会社ニレコ | Feedback control method, feedback control device, and program |
US20170047237A1 (en) * | 2014-04-18 | 2017-02-16 | Ebara Corporation | Substrate processing apparatus, substrate processing system. and substrate processing method |
US20160243593A1 (en) * | 2015-02-18 | 2016-08-25 | Ebara Corporation | Substrate cleaning apparatus,substrate cleaning method, and substrate processing apparatus |
US20190051610A1 (en) * | 2017-03-08 | 2019-02-14 | Yangtze Memory Technologies Co., Ltd. | Staircase etch control in forming three-dimensional memory device |
CN108227477A (en) * | 2017-12-06 | 2018-06-29 | 中国飞机强度研究所 | A kind of adaptive PID control method |
Non-Patent Citations (2)
Title |
---|
Dale Patrick, "2.3.2 Closed-Loop Control," Industrial Process Control Systems (2d ed. River Publishers 2009), available at https://app.knovel.com/ hotlink/pdf/ id:kt00BYURL1/industrial-process-control/closed-loop-control (Year: 2009) * |
KLS Sharma, "Automation Strategies," Overview of Industrial Process Automation (2d ed. Elsevier 2017), available at https://app.knovel.com/hotlink/pdf/id:kt0119FT91/ overview-industrial-process/automation-strategies (Year: 2017) * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11380561B2 (en) * | 2017-05-10 | 2022-07-05 | Ebara Corporation | Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device |
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KR20200005481A (en) | 2020-01-15 |
CN110690141A (en) | 2020-01-14 |
US11164757B2 (en) | 2021-11-02 |
US20200013640A1 (en) | 2020-01-09 |
US20230307259A1 (en) | 2023-09-28 |
SG10201906216RA (en) | 2020-02-27 |
JP2020009882A (en) | 2020-01-16 |
KR102454619B1 (en) | 2022-10-17 |
US20230326770A1 (en) | 2023-10-12 |
JP7079164B2 (en) | 2022-06-01 |
TW202006815A (en) | 2020-02-01 |
TWI786309B (en) | 2022-12-11 |
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