US20210270872A1 - Readout Circuit for Resistive and Capacitive Sensors - Google Patents
Readout Circuit for Resistive and Capacitive Sensors Download PDFInfo
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- US20210270872A1 US20210270872A1 US17/325,742 US202117325742A US2021270872A1 US 20210270872 A1 US20210270872 A1 US 20210270872A1 US 202117325742 A US202117325742 A US 202117325742A US 2021270872 A1 US2021270872 A1 US 2021270872A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/25—Arrangements for measuring currents or voltages or for indicating presence or sign thereof using digital measurement techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/005—Circuits for altering the indicating characteristic, e.g. making it non-linear
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/30—Structural combination of electric measuring instruments with basic electronic circuits, e.g. with amplifier
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
- G05F1/56—Regulating voltage or current wherein the variable actually regulated by the final control device is dc using semiconductor devices in series with the load as final control devices
- G05F1/561—Voltage to current converters
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/30—Modifications of amplifiers to reduce influence of variations of temperature or supply voltage or other physical parameters
Definitions
- the present invention relates generally to a readout circuit for resistive and capacitive sensors.
- a trend in modern consumer electronics is to integrate numerous different sensors (pressure, temperature, gas, humidity, and microphones, for example) in a single device.
- Each sensor is based on different physical principles that translate different electrical quantities to be detected (mainly resistance and capacitance).
- the corresponding readout electronics must be adapted to each sensor, which means that different analog readout systems must be designed and implemented, increasing production costs, and device power consumptions.
- Capacitive sensors are typically coupled to high-ohmic readout interfaces, switched-capacitors amplifiers or charge sensing amplifiers.
- Resistive sensors are typically coupled to readout circuitry based on simple voltage dividers and Wheatstone bridge structures when the sensing resistance has a small variation. Resistive sensors are typically coupled to readout circuitry based on a multi-scale approach and resistance-to-frequency conversion systems when the resistance has a larger variation.
- embodiments allow the readout of both resistive and capacitive sensors using the same readout channel and circuit. This makes the interface very versatile and particularly suitable for a portable device where multiple different sensors have to coexist (for example, modern smartphones).
- the interface is able to convert the sensing element value in a digital output by performing resistance-to-time and/or capacitance-to-time conversions.
- the interface according to embodiments also exploits a multiplexed architecture to connect different resistive sensing elements while avoiding the typical drawbacks introduced by multiplexers (Ron and Roff of the multiplexer switches), and in combination with the very wide range of resistors that can be converted, makes the interface very versatile and compatible with many different sensors.
- the readout circuitry benefits from scaled technology, with a consequent reduction of the Application Specific Integrated Circuit (ASIC) size and therefore fitting smaller packages (even on the same size of the Micro-Electro-Mechanical Systems (MEMS) or sensors used).
- ASIC Application Specific Integrated Circuit
- MEMS Micro-Electro-Mechanical Systems
- the readout circuit can be used with multiple integrated sensors on the same die and the readout circuit architecture is compatible with several types of sensing elements (both capacitive and resistive). Examples include microphone, pressure, gas, humidity, as well as other such sensors.
- the high flexibility of the readout circuit according to embodiments allows the readout of both resistive and capacitive sensors using the same readout channel and circuit. Different sensors with different electrical variations can be converted in the digital domain because of the wide dynamic range supported by the time conversion.
- a readout circuit in a first embodiment, includes a first input coupled to a reference resistor in a first mode of operation and coupled to a resistive sensor in a second mode of operation; a second input coupled to a capacitive sensor in the first mode of operation and coupled to a reference capacitor in the second mode of operation; and an output for providing a capacitive sensor data stream in the first mode of operation and for providing a resistive sensor data stream in the second mode of operation.
- the readout circuit includes a voltage-to-current converter coupled to the first input, wherein the voltage-to-current converter comprises an amplifier coupled to a first current mirror portion in the first mode of operation and coupled to a second current mirror portion in the second mode of operation.
- the readout circuit includes an integrator coupled to the voltage-to-current converter and the second input, wherein the integrator comprises an amplifier coupled to first and second switches configured in a first position in the first mode of operation and configured in a second position in the second mode of operation.
- the readout circuit includes a logic circuit coupled to the integrator and to the output, wherein the logic circuit comprises a first comparator having a first threshold voltage coupled to a second comparator having a second threshold voltage.
- an integrated circuit in a second embodiment, includes a first input pin for coupling to a resistor; a second input pin for coupling to a capacitor; and an output pin configured to provide a data stream corresponding to a value of the capacitor in a first mode of operation and for providing a data stream corresponding to a value of the resistor in a second mode of operation.
- the integrated circuit includes a voltage-to-current converter coupled to the first input, wherein the voltage-to-current converter comprises an amplifier coupled to a first current mirror portion in the first mode of operation and coupled to a second current mirror portion in the second mode of operation.
- the integrated circuit includes an integrator coupled to the voltage-to-current converter and the second input, wherein the integrator comprises an amplifier coupled to first and second switches configured in a first position in the first mode of operation and configured in a second position in the second mode of operation.
- the integrated circuit includes a logic circuit coupled to the integrator and to the output, wherein the logic circuit comprises a first comparator having a first threshold voltage coupled to a second comparator having a second threshold voltage.
- a method of operating a readout circuit includes coupling a resistor and a capacitive sensor to first and second inputs of the circuit in a first mode of operation; coupling a capacitor and a resistive sensor to first and second inputs of the circuit in a second mode of operation; providing a capacitive sensor data stream at an output in the first mode of operation; and providing a resistive sensor data stream at the output in a the second mode of operation.
- the method includes selecting the capacitive sensor from a plurality of capacitive sensors resident in the device and/or selecting the resistive sensor from a plurality of resistive sensors resident in the device.
- the method can also include integrating the resistive sensor and the circuit together in an integrated circuit and/or integrating the capacitive sensor and the circuit together in an integrated circuit.
- the method includes providing at least one of the capacitive sensor data stream and the resistive data stream as a serial data stream.
- FIGS. 1-3 are block diagram of ASIC integrated circuits according to embodiments
- FIG. 4 is a schematic diagram of a substantially analog portion of a readout circuit according to an embodiment
- FIG. 5 is a schematic diagram of a substantially analog portion of a readout circuit according to another embodiment
- FIG. 6 is a block diagram of an ASIC integrated circuit according to another embodiment illustrating analog and digital portions, according to an embodiment
- FIG. 7 is a timing diagram associated with the ASIC integrated circuit of FIG. 6 ;
- FIG. 8 shows an integrated readout circuit embodiment resident in a device.
- FIG. 1 shows an ASIC 100 A including in pertinent part a voltage-to-current converter 102 coupled to an integrator 104 , which is in turn coupled to a logic circuit 106 as will be described in further detail below.
- a two node input 108 is coupled to a variable resistor R SENS , which represents a resistive sensor, and a two node input no is coupled to a fixed capacitor C REF , which represents a capacitive reference.
- ASIC 100 A is thus configured for reading out the data based on the resistive variations of the resistive sensor.
- FIG. 2 shows an ASIC 100 B including in pertinent part a voltage-to-current converter 102 coupled to an integrator 104 , which is in turn coupled to a logic circuit 106 as will be described in further detail below.
- a two node input 108 is coupled to a fixed resistor R REF , which represents a resistive reference, and a two node input 110 is coupled to a variable capacitor C SENS , which represents a capacitive sensor.
- ASIC 100 B is thus configured for reading out data based on the capacitive variations of the capacitive sensor.
- FIG. 3 shows an ASIC 100 C including in pertinent part a voltage-to-current converter 102 coupled to an integrator 104 , which is in turn coupled to a logic circuit 106 as will be described in further detail below.
- a two node input 108 is coupled to a variable resistor R SENS , which represents a resistive sensor
- a two node input 110 is coupled to a variable capacitor C SENS , which represents a capacitive sensor. Both sensors are coupled to ASIC readout circuit at the same time in an embodiment.
- ASIC 100 C is thus configured for reading out composite serial data based on the resistive variations of the resistive sensor and on the capacitive variations of the capacitive sensor.
- the third mode of operation may be used for example, in capacitive and resistive sensors that have non-overlapping response characteristics.
- the non-overlapping response characteristic can be viewed as the first sensor acting as a reference for the second sensor in, for example, a first frequency range, and the second sensor acting as a reference for the first sensor in, for example, a second non-overlapping frequency range.
- Other examples where both sensors can be coupled to the readout circuit at the same time can include differential sensors, including a first capacitive sensor and a second resistive sensor.
- Still further examples where both sensors can be coupled to the readout circuit at the same time can include triggered sensors, whose function is to change state in response to an input. Linear sensors can be used as well, but the output of the readout circuit will be a product of the two sensors outputs that may have use in a particular implementation.
- FIG. 4 shows a schematic of a possible implementation of the architecture of a readout circuit, according to an embodiment.
- Circuit 400 includes a voltage-to-current (V2I) converter, where two OPAMPs A 1 and A 2 and transistors M 1A /M 2A provide a biasing voltage across sensing resistance, R SENS , using two stable reference and bias voltages V REF_P and V REF_N .
- the two OPAMPs A 1 and A 2 and transistors M 1B /M 2B provide a biasing voltage across reference resistance, R REF , using the two stable reference and bias voltages V REF_P and V REF_N .
- Switches S 1 , S 2 , S 3 , and S 4 couple the sensor resistor R SENS to the sources of transistors M 1A and M 2A in a first position, and couple the reference resistor R REF to the sources of transistors M 1B and M 2B in a second position.
- the feedback and source follower structure shown in FIG. 4 guarantees low output resistance at all buffered nodes (source of transistor M 1A , source of transistor M 2A , source of transistor M 1B , and source of transistor M 2B ).
- the stable biasing at both sensing resistor R SENS terminals ensures a better stability of the sensor and isolates it from ground and supply voltages.
- a signal current I SENS (V REF_P ⁇ V REP_N )/R SENS is then mirrored and alternatively sunk from or sourced in a virtual ground of an integrator including OPAMP A 5 , according to control signals CTRL_H and CTRL_L. These control signals direct switches S 5 and S 6 . In a first position the drain of transistor M 3 is coupled to the input of OPAMP A 5 , and the drain of transistor M 4 is coupled to V DD . In a second position the drain of transistor M 4 is coupled to the input of OPAMP A 5 , and the drain of transistor M 3 is coupled to ground.
- Switches S 9 and S 10 are used to couple either the capacitive sensor C SENSE of the capacitive reference to OPAMP A 5 .
- a reset transistor M 9 receives a Reset control signal and the source and drain nodes of transistor M 9 are coupled between the negative input and output V O of OPAMP A 5 .
- the positive input of OPAMP A 5 is coupled to a common mode voltage V CM .
- Switch S 7 is used to form a first current mirror with transistors M 5A and M 7 in a first position, and is used to form a second current mirror with transistors M 5B and M 7 in a second position. Both current mirrors have a ratio of ⁇ as shown.
- switch S 8 is used to form a first current with transistors M 6A and M 8 in a first position, and is used to form a second current with transistors M 6B and M 8 in a second position. Both current mirrors have a ratio of ⁇ as shown.
- the current mirrors formed with transistor M 7 include an output resistance boosting circuit using OPAMP A 3 and transistor M 3 , as will be explained in further detail below.
- the current mirrors formed with transistor M 8 include an output resistance boosting circuit using OPAMP A 4 and transistor M 4 , as will be explained in further detail below.
- the voltage V O is a triangular waveform that is compared to two reference voltages (V TH and V TL ) to generate switch control signals and to steer current.
- a first comparator 402 receives the V O triangular output voltage and the V TH reference voltage to generate a first variable frequency output voltage that is coupled to the SN input of latch 406 .
- a second comparator 404 receives the V O triangular output voltage and the V TL reference voltage to generate a second variable frequency output voltage that is coupled to the RN input of latch 406 .
- Latch 406 generates the CTRL_H control signal at the Q output and the CTRL_L control signal at the QN output as shown.
- a variable frequency output signal having a period T OSC in a particular time period is shown in FIG. 4 .
- the variable frequency output of the circuit 400 shown in FIG. 4 is at the Q or QN output of latch 406 .
- the output period waveform is proportional to the sensor resistance value according to the following expression:
- T OSC 2 ⁇ C R ⁇ E ⁇ F ⁇ ⁇ ⁇ ⁇ V ⁇ R S ⁇ E ⁇ N ⁇ S ⁇ ⁇ V R ⁇ E ⁇ F [ 1 ]
- the digital conversion of the variable frequency output signal to a serial data bit stream is performed by counting how many oscillations occur in a precisely defined time window, as will be discussed in further detail below with respect in particular to the description of FIG. 6 .
- Equation [1] was used to measure the resistance value of a resistive sensor. By inverting the roles of R and C in the above equation it is possible to use the same architecture to measure an unknown capacitor value in a capacitive sensor.
- the unknown parameter is R SENS
- the capacitance value is fixed.
- a reference resistor R REF is used to generate a constant current I SENS to be integrated in the sensor capacitance C SENS leading to an oscillation frequency proportional to C SENS itself:
- T OSC 2 ⁇ C S ⁇ E ⁇ N ⁇ S ⁇ ⁇ ⁇ ⁇ V ⁇ R R ⁇ E ⁇ F ⁇ ⁇ V R ⁇ E ⁇ F [ 2 ]
- the interface can be adapted to convert a matrix of resistive sensors by having the multiplexing switches working on high impedance nodes as shown in FIG. 4 , avoiding the introduction of parasitic resistances that can cause additional errors in the measurement.
- the interface can be adapted to convert a matrix of capacitive sensors by having the multiplexing switches or a combination of resistive and capacitive sensors.
- Switches S 1 through S 8 can be used to provide a multiplexing function, or can be set in a fixed position that might be required to accommodate a single sensor in an application.
- Transistors M 1A , M 1B , M 2A , and M 2B ideally have a very large W/L ratio to keep their overdrive low and to avoid saturation of the outputs of amplifier A 1 and A 2 in high I SENS conditions.
- Transistors M 3 and M 4 ideally ensure that the outputs of OPAMPs A 3 and A 4 are always sufficiently separated from V DD and GND, and thus they have a much lower W/L ratio.
- R REF used to evaluate C SENS should be chosen to have the current mirrors working with a constant current in their best nominal operative point to ensure the best linearity response in all conditions.
- the comparators input switching window ⁇ V should be as large as possible to lower the comparators' offset impact on output resolution.
- FIG. 5 A similar implementation to that of FIG. 4 is shown in FIG. 5 .
- the circuit 500 shown in FIG. 5 only one terminal of the resistive sensing element is available, and the V2I converter provides biasing between the available terminal and ground.
- FIG. 5 shows a schematic of a possible implementation of the architecture of a readout circuit, according to another embodiment.
- Circuit 500 includes a voltage-to-current (V2I) converter, where a single OPAMP A 1 and transistors M 1A provides a biasing voltage across sensing resistance, R SENS , using a stable reference and bias voltages V REF .
- the single OPAMP A 1 and transistors M 1B provides a biasing voltage across reference resistance, R REF , using a single stable reference and bias voltages V REF .
- Both the resistive sensor R SENS and the resistive reference resistance R REF are coupled to ground.
- Switches S 1 and S 2 couple the sensor resistor R SENS to the source of transistors M 1A in a first position, and couple the reference resistor R REF to the source of transistors M 1B in a second position.
- the feedback and source follower structure shown in FIG. 5 guarantees a low output resistance at the source of transistor M 1A and the source of transistor M 2A .
- a signal current I SENS V REF /R SENS is then mirrored and alternatively sunk from or sourced in a virtual ground of an integrator including OPAMP A 5 , according to control signals CTRL_H and CTRL_L. These control signals direct switches S 5 and S 6 .
- the drain of transistor M 7B is coupled to the input of OPAMP A 5 , and the drain of transistor M 8B is coupled to V DD .
- the drain of transistor M 8B is coupled to the input of OPAMP A 5 , and the drain of transistor M 7B is coupled to ground.
- Switch S 7 is used to form a first dual output current mirror with transistors M 5A and M 7A and M 7B in a first position, and is used to form a second dual output current mirror with transistors M 5B and M 7A and M 7B in a second position. Both current mirrors have a ratio of ⁇ as shown.
- the remaining circuitry in FIG. 5 relates to the integration circuit and the triangle wave to variable frequency output signal conversion previously described.
- An ASIC 100 D is shown in FIG. 6 in greater detail than previously described, showing a substantially analog section 116 and a digital section 118 that includes, in part, a frequency-to-serial-data converter.
- the analog section 116 is substantially as previously described including the V2I converter 102 , the integrator 104 , and the comparator section 106 .
- Also shown in the analog section 116 is a two node input 108 for receiving input from a resistive sensor, and a two node input 110 for receiving input from a reference capacitor in an embodiment.
- a reference internal clock 114 is used to generate a time window (used as a base for the sensor measurements.)
- a bandgap circuit 112 for generating the voltage and current references used.
- the digital section 118 converts the frequency of the triangular wave signal at the output of the integrator into a digit which can be communicated at the ASIC output, with a single bit interface. In pertinent part, the number of rising/falling edges of the wave at the output of the integrator in a reference stable time window are counted.
- the digital section 118 includes a register 120 , a comparator 122 , a reference counter 124 , and a GAS counter 126 having an output bus 128 . Also shown in digital section 118 are a multiplexer 130 , a state machine 132 , and a parallel-to-serial converter 134 .
- a reset and enable bus is coupled to the integrator 104 , GAS counter 126 , reference counter 124 , state machine 132 , and parallel-to-serial converter 134 , and brought out to a strobe pin as shown.
- Pins on the ASIC 100 D include, but are not limited to, an analog supply voltage VDDANA, a digital supply voltage VDDDIG, a two-bit time window select, a start measurement, and end measurement strobe, a data output, and two node inputs 108 and 110 .
- a waveform diagram shows the following signals: clk, sensor_signal, start_meas, count_en, elk_count, signal_count, serial_data, and data_flag.
- the “elk” signal is the internal 500 KHz clock signal previously described.
- the “sensor_signal” is the output of a capacitive or resistive signal.
- the “start_meas” signal is a pulse that begins a measurement cycle.
- the “count_en” is a signal that goes high when the clock cycles and sensor_signal cycles are being counted.
- the “elk_count” signal shows the count progression of the number of clock signals being counted.
- the “signal_count” signal counts the rising/falling (depending on the implementation but this is not relevant) edges of the voltage signal generated at the output of the integrator and squared with a comparator.
- serial_data is sell explanatory and refers to the serial data provided at an output pin to the user, multiplexing one or more resistive and/or capacitive sensors.
- the resolution of the serial data provided by ASIC 100 D depends on time window duration and clock frequency. The resolution will be improved, generally speaking, with a longer window duration and a higher clock frequency.
- FIG. 8 shows in block diagram form, a device 800 , such as a cell phone, wherein an integrated readout circuit 802 interacts with a plurality of external resistive references 806 , resistive sensors 808 , capacitive references 810 , and capacitive sensors 812 .
- a device processor 804 is also shown for interacting with readout circuit 802 and for controlling the availability of the references and sensors.
- the sensors and references would be integrated together on the same integrated circuit 802 , or external to the integrated circuit 802 but resident on the device 800 , or a combination of the two.
- the six inputs shown in readout circuit 802 could correspond to the circuit 400 of FIG.
- one of the reference resistors 806 and one of the capacitive sensors 812 could be selected and coupled to the appropriate inputs of circuit 400 .
- one of the reference capacitors 810 and one of the resistive sensors 808 could be selected and coupled to the appropriate inputs of circuit 400 .
- one of the resistive sensors 808 and one of the capacitive sensors 812 could be selected and coupled to the appropriate inputs of circuit 400 .
- Circuit 400 can be configured in an embodiment to multiplex between two or all three modes of operation. Different sensors and references can also be selected from a plurality of sensors and references and multiplexed as desired. Other embodiments can be hardwired to fix operation in the first, second, or third mode operation if desired.
Abstract
A readout circuit for resistive and capacitive sensors includes a first input coupled to a reference resistor in a first mode of operation and coupled to a resistive sensor in a second mode of operation; a second input coupled to a capacitive sensor in the first mode of operation and coupled to a reference capacitor in the second mode of operation; and an output for providing a capacitive sensor data stream in the first mode of operation and for providing a resistive sensor data stream in the second mode of operation.
Description
- This application is a divisional of U.S. patent application Ser. No. 15/789,199, filed on Oct. 20, 2017, which application is hereby incorporated herein by reference.
- The present invention relates generally to a readout circuit for resistive and capacitive sensors.
- A trend in modern consumer electronics is to integrate numerous different sensors (pressure, temperature, gas, humidity, and microphones, for example) in a single device. Each sensor is based on different physical principles that translate different electrical quantities to be detected (mainly resistance and capacitance). The corresponding readout electronics must be adapted to each sensor, which means that different analog readout systems must be designed and implemented, increasing production costs, and device power consumptions.
- Capacitive sensors are typically coupled to high-ohmic readout interfaces, switched-capacitors amplifiers or charge sensing amplifiers.
- Resistive sensors are typically coupled to readout circuitry based on simple voltage dividers and Wheatstone bridge structures when the sensing resistance has a small variation. Resistive sensors are typically coupled to readout circuitry based on a multi-scale approach and resistance-to-frequency conversion systems when the resistance has a larger variation.
- According to the present invention, embodiments allow the readout of both resistive and capacitive sensors using the same readout channel and circuit. This makes the interface very versatile and particularly suitable for a portable device where multiple different sensors have to coexist (for example, modern smartphones).
- For both the readout of resistive and capacitive sensors, the interface is able to convert the sensing element value in a digital output by performing resistance-to-time and/or capacitance-to-time conversions.
- Working in the time domain allows to trade-off conversion time with dynamic range and resolution, which are far more important in the measurement of physical sensors, since environmental phenomena to be detected (gas concentration, pressure, temperature) have slow time variations.
- The interface according to embodiments also exploits a multiplexed architecture to connect different resistive sensing elements while avoiding the typical drawbacks introduced by multiplexers (Ron and Roff of the multiplexer switches), and in combination with the very wide range of resistors that can be converted, makes the interface very versatile and compatible with many different sensors.
- The readout circuitry according to embodiments benefits from scaled technology, with a consequent reduction of the Application Specific Integrated Circuit (ASIC) size and therefore fitting smaller packages (even on the same size of the Micro-Electro-Mechanical Systems (MEMS) or sensors used).
- According to embodiments, the readout circuit can be used with multiple integrated sensors on the same die and the readout circuit architecture is compatible with several types of sensing elements (both capacitive and resistive). Examples include microphone, pressure, gas, humidity, as well as other such sensors.
- The high flexibility of the readout circuit according to embodiments allows the readout of both resistive and capacitive sensors using the same readout channel and circuit. Different sensors with different electrical variations can be converted in the digital domain because of the wide dynamic range supported by the time conversion.
- In a first embodiment, a readout circuit includes a first input coupled to a reference resistor in a first mode of operation and coupled to a resistive sensor in a second mode of operation; a second input coupled to a capacitive sensor in the first mode of operation and coupled to a reference capacitor in the second mode of operation; and an output for providing a capacitive sensor data stream in the first mode of operation and for providing a resistive sensor data stream in the second mode of operation. The readout circuit includes a voltage-to-current converter coupled to the first input, wherein the voltage-to-current converter comprises an amplifier coupled to a first current mirror portion in the first mode of operation and coupled to a second current mirror portion in the second mode of operation. The readout circuit includes an integrator coupled to the voltage-to-current converter and the second input, wherein the integrator comprises an amplifier coupled to first and second switches configured in a first position in the first mode of operation and configured in a second position in the second mode of operation. The readout circuit includes a logic circuit coupled to the integrator and to the output, wherein the logic circuit comprises a first comparator having a first threshold voltage coupled to a second comparator having a second threshold voltage.
- In a second embodiment, an integrated circuit includes a first input pin for coupling to a resistor; a second input pin for coupling to a capacitor; and an output pin configured to provide a data stream corresponding to a value of the capacitor in a first mode of operation and for providing a data stream corresponding to a value of the resistor in a second mode of operation. The integrated circuit includes a voltage-to-current converter coupled to the first input, wherein the voltage-to-current converter comprises an amplifier coupled to a first current mirror portion in the first mode of operation and coupled to a second current mirror portion in the second mode of operation. The integrated circuit includes an integrator coupled to the voltage-to-current converter and the second input, wherein the integrator comprises an amplifier coupled to first and second switches configured in a first position in the first mode of operation and configured in a second position in the second mode of operation. The integrated circuit includes a logic circuit coupled to the integrator and to the output, wherein the logic circuit comprises a first comparator having a first threshold voltage coupled to a second comparator having a second threshold voltage.
- In a third embodiment, a method of operating a readout circuit includes coupling a resistor and a capacitive sensor to first and second inputs of the circuit in a first mode of operation; coupling a capacitor and a resistive sensor to first and second inputs of the circuit in a second mode of operation; providing a capacitive sensor data stream at an output in the first mode of operation; and providing a resistive sensor data stream at the output in a the second mode of operation. The method includes selecting the capacitive sensor from a plurality of capacitive sensors resident in the device and/or selecting the resistive sensor from a plurality of resistive sensors resident in the device. The method can also include integrating the resistive sensor and the circuit together in an integrated circuit and/or integrating the capacitive sensor and the circuit together in an integrated circuit. The method includes providing at least one of the capacitive sensor data stream and the resistive data stream as a serial data stream.
- For a more complete understanding of the invention, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:
-
FIGS. 1-3 are block diagram of ASIC integrated circuits according to embodiments; -
FIG. 4 is a schematic diagram of a substantially analog portion of a readout circuit according to an embodiment; -
FIG. 5 is a schematic diagram of a substantially analog portion of a readout circuit according to another embodiment; -
FIG. 6 is a block diagram of an ASIC integrated circuit according to another embodiment illustrating analog and digital portions, according to an embodiment; -
FIG. 7 is a timing diagram associated with the ASIC integrated circuit ofFIG. 6 ; and -
FIG. 8 shows an integrated readout circuit embodiment resident in a device. -
FIG. 1 shows anASIC 100A including in pertinent part a voltage-to-current converter 102 coupled to anintegrator 104, which is in turn coupled to alogic circuit 106 as will be described in further detail below. In a first mode of operation a twonode input 108 is coupled to a variable resistor RSENS, which represents a resistive sensor, and a two node input no is coupled to a fixed capacitor CREF, which represents a capacitive reference. ASIC 100A is thus configured for reading out the data based on the resistive variations of the resistive sensor. -
FIG. 2 shows anASIC 100B including in pertinent part a voltage-to-current converter 102 coupled to anintegrator 104, which is in turn coupled to alogic circuit 106 as will be described in further detail below. In a second mode of operation a twonode input 108 is coupled to a fixed resistor RREF, which represents a resistive reference, and a twonode input 110 is coupled to a variable capacitor CSENS, which represents a capacitive sensor. ASIC 100B is thus configured for reading out data based on the capacitive variations of the capacitive sensor. -
FIG. 3 shows anASIC 100C including in pertinent part a voltage-to-current converter 102 coupled to anintegrator 104, which is in turn coupled to alogic circuit 106 as will be described in further detail below. In a third mode of operation a twonode input 108 is coupled to a variable resistor RSENS, which represents a resistive sensor, and a twonode input 110 is coupled to a variable capacitor CSENS, which represents a capacitive sensor. Both sensors are coupled to ASIC readout circuit at the same time in an embodiment. ASIC 100C is thus configured for reading out composite serial data based on the resistive variations of the resistive sensor and on the capacitive variations of the capacitive sensor. The third mode of operation may be used for example, in capacitive and resistive sensors that have non-overlapping response characteristics. The non-overlapping response characteristic can be viewed as the first sensor acting as a reference for the second sensor in, for example, a first frequency range, and the second sensor acting as a reference for the first sensor in, for example, a second non-overlapping frequency range. Other examples where both sensors can be coupled to the readout circuit at the same time can include differential sensors, including a first capacitive sensor and a second resistive sensor. Still further examples where both sensors can be coupled to the readout circuit at the same time can include triggered sensors, whose function is to change state in response to an input. Linear sensors can be used as well, but the output of the readout circuit will be a product of the two sensors outputs that may have use in a particular implementation. -
FIG. 4 shows a schematic of a possible implementation of the architecture of a readout circuit, according to an embodiment.Circuit 400 includes a voltage-to-current (V2I) converter, where two OPAMPs A1 and A2 and transistors M1A/M2A provide a biasing voltage across sensing resistance, RSENS, using two stable reference and bias voltages VREF_P and VREF_N. The two OPAMPs A1 and A2 and transistors M1B/M2B provide a biasing voltage across reference resistance, RREF, using the two stable reference and bias voltages VREF_P and VREF_N. Switches S1, S2, S3, and S4 couple the sensor resistor RSENS to the sources of transistors M1A and M2A in a first position, and couple the reference resistor RREF to the sources of transistors M1B and M2B in a second position. The feedback and source follower structure shown inFIG. 4 guarantees low output resistance at all buffered nodes (source of transistor M1A, source of transistor M2A, source of transistor M1B, and source of transistor M2B). The stable biasing at both sensing resistor RSENS terminals ensures a better stability of the sensor and isolates it from ground and supply voltages. A signal current ISENS=(VREF_P−VREP_N)/RSENS is then mirrored and alternatively sunk from or sourced in a virtual ground of an integrator including OPAMP A5, according to control signals CTRL_H and CTRL_L. These control signals direct switches S5 and S6. In a first position the drain of transistor M3 is coupled to the input of OPAMP A5, and the drain of transistor M4 is coupled to VDD. In a second position the drain of transistor M4 is coupled to the input of OPAMP A5, and the drain of transistor M3 is coupled to ground. - Switches S9 and S10 are used to couple either the capacitive sensor CSENSE of the capacitive reference to OPAMP A5. A reset transistor M9 receives a Reset control signal and the source and drain nodes of transistor M9 are coupled between the negative input and output VO of OPAMP A5. The positive input of OPAMP A5 is coupled to a common mode voltage VCM.
- Switch S7 is used to form a first current mirror with transistors M5A and M7 in a first position, and is used to form a second current mirror with transistors M5B and M7 in a second position. Both current mirrors have a ratio of δ as shown. Similarly, switch S8 is used to form a first current with transistors M6A and M8 in a first position, and is used to form a second current with transistors M6B and M8 in a second position. Both current mirrors have a ratio of δ as shown. The current mirrors formed with transistor M7 include an output resistance boosting circuit using OPAMP A3 and transistor M3, as will be explained in further detail below. The current mirrors formed with transistor M8 include an output resistance boosting circuit using OPAMP A4 and transistor M4, as will be explained in further detail below.
- At the output of the integrator including OPAMP A5, the voltage VO is a triangular waveform that is compared to two reference voltages (VTH and VTL) to generate switch control signals and to steer current. A
first comparator 402 receives the VO triangular output voltage and the VTH reference voltage to generate a first variable frequency output voltage that is coupled to the SN input of latch 406. Asecond comparator 404 receives the VO triangular output voltage and the VTL reference voltage to generate a second variable frequency output voltage that is coupled to the RN input of latch 406. Latch 406 generates the CTRL_H control signal at the Q output and the CTRL_L control signal at the QN output as shown. The presence of an additional latch 406 always guarantees the synchronized switching of comparators. A variable frequency output signal having a period TOSC in a particular time period is shown inFIG. 4 . The variable frequency output of thecircuit 400 shown inFIG. 4 is at the Q or QN output of latch 406. - The output period waveform is proportional to the sensor resistance value according to the following expression:
-
- Where ΔV=VTH−VTL is the input switching window of
comparators FIG. 6 . - Equation [1] was used to measure the resistance value of a resistive sensor. By inverting the roles of R and C in the above equation it is possible to use the same architecture to measure an unknown capacitor value in a capacitive sensor. In the resistance-to-frequency conversion of equation [1] the unknown parameter is RSENS, and the capacitance value is fixed. In the capacitance-to-frequency conversion of equation [2] a reference resistor RREF is used to generate a constant current ISENS to be integrated in the sensor capacitance CSENS leading to an oscillation frequency proportional to CSENS itself:
-
- The interface can be adapted to convert a matrix of resistive sensors by having the multiplexing switches working on high impedance nodes as shown in
FIG. 4 , avoiding the introduction of parasitic resistances that can cause additional errors in the measurement. Alternatively, the interface can be adapted to convert a matrix of capacitive sensors by having the multiplexing switches or a combination of resistive and capacitive sensors. Switches S1 through S8 can be used to provide a multiplexing function, or can be set in a fixed position that might be required to accommodate a single sensor in an application. It will be apparent to those skilled in the art that a multiplicity of sensors can be used in a multiplexing mode of operation, but will result in a multiplexed data output stream, wherein only a periodic portion of the data output stream will be associated with an individual capacitive or resistive sensor. - Current mirrors have to maintain a very high linearity for a very wide range of currents due to the large variations in the resistance value of RSENS. Choosing regulated cascoded topologies for the mirrors is then strongly advised and OPAMPs A3 and A4 should have sufficiently high gain to boost each current mirror's output impedance. To better fit operative point constraints OPAMP A3 uses a p-input topology while OPAMP A4 uses a complementary n-input topology.
- Transistors M1A, M1B, M2A, and M2B ideally have a very large W/L ratio to keep their overdrive low and to avoid saturation of the outputs of amplifier A1 and A2 in high ISENS conditions. Transistors M3 and M4 ideally ensure that the outputs of OPAMPs A3 and A4 are always sufficiently separated from VDD and GND, and thus they have a much lower W/L ratio.
- The value of RREF used to evaluate CSENS should be chosen to have the current mirrors working with a constant current in their best nominal operative point to ensure the best linearity response in all conditions.
- Integrator OPAMP (A5) and
comparators - A similar implementation to that of
FIG. 4 is shown inFIG. 5 . In thecircuit 500 shown inFIG. 5 only one terminal of the resistive sensing element is available, and the V2I converter provides biasing between the available terminal and ground. - Thus,
FIG. 5 shows a schematic of a possible implementation of the architecture of a readout circuit, according to another embodiment.Circuit 500 includes a voltage-to-current (V2I) converter, where a single OPAMP A1 and transistors M1A provides a biasing voltage across sensing resistance, RSENS, using a stable reference and bias voltages VREF. The single OPAMP A1 and transistors M1B provides a biasing voltage across reference resistance, RREF, using a single stable reference and bias voltages VREF. Both the resistive sensor RSENS and the resistive reference resistance RREF are coupled to ground. Switches S1 and S2 couple the sensor resistor RSENS to the source of transistors M1A in a first position, and couple the reference resistor RREF to the source of transistors M1B in a second position. The feedback and source follower structure shown inFIG. 5 guarantees a low output resistance at the source of transistor M1A and the source of transistor M2A. A signal current ISENS=VREF/RSENS is then mirrored and alternatively sunk from or sourced in a virtual ground of an integrator including OPAMP A5, according to control signals CTRL_H and CTRL_L. These control signals direct switches S5 and S6. In a first position the drain of transistor M7B is coupled to the input of OPAMP A5, and the drain of transistor M8B is coupled to VDD. In a second position the drain of transistor M8B is coupled to the input of OPAMP A5, and the drain of transistor M7B is coupled to ground. - Switch S7 is used to form a first dual output current mirror with transistors M5A and M7A and M7B in a first position, and is used to form a second dual output current mirror with transistors M5B and M7A and M7B in a second position. Both current mirrors have a ratio of δ as shown.
- The remaining circuitry in
FIG. 5 relates to the integration circuit and the triangle wave to variable frequency output signal conversion previously described. - An ASIC 100D is shown in
FIG. 6 in greater detail than previously described, showing a substantiallyanalog section 116 and adigital section 118 that includes, in part, a frequency-to-serial-data converter. Theanalog section 116 is substantially as previously described including theV2I converter 102, theintegrator 104, and thecomparator section 106. Also shown in theanalog section 116 is a twonode input 108 for receiving input from a resistive sensor, and a twonode input 110 for receiving input from a reference capacitor in an embodiment. A referenceinternal clock 114 is used to generate a time window (used as a base for the sensor measurements.) Also shown is abandgap circuit 112 for generating the voltage and current references used. - The
digital section 118 converts the frequency of the triangular wave signal at the output of the integrator into a digit which can be communicated at the ASIC output, with a single bit interface. In pertinent part, the number of rising/falling edges of the wave at the output of the integrator in a reference stable time window are counted. Thedigital section 118 includes aregister 120, acomparator 122, areference counter 124, and aGAS counter 126 having anoutput bus 128. Also shown indigital section 118 are amultiplexer 130, astate machine 132, and a parallel-to-serial converter 134. A reset and enable bus is coupled to theintegrator 104,GAS counter 126,reference counter 124,state machine 132, and parallel-to-serial converter 134, and brought out to a strobe pin as shown. - Pins on the ASIC 100D include, but are not limited to, an analog supply voltage VDDANA, a digital supply voltage VDDDIG, a two-bit time window select, a start measurement, and end measurement strobe, a data output, and two
node inputs - Referring to the timing diagram of
FIG. 6 , a waveform diagram shows the following signals: clk, sensor_signal, start_meas, count_en, elk_count, signal_count, serial_data, and data_flag. - The “elk” signal is the internal 500 KHz clock signal previously described.
- The “sensor_signal” is the output of a capacitive or resistive signal.
- The “start_meas” signal is a pulse that begins a measurement cycle.
- The “count_en” is a signal that goes high when the clock cycles and sensor_signal cycles are being counted.
- The “elk_count” signal shows the count progression of the number of clock signals being counted.
- The “signal_count” signal counts the rising/falling (depending on the implementation but this is not relevant) edges of the voltage signal generated at the output of the integrator and squared with a comparator.
- The “serial_data” signal is sell explanatory and refers to the serial data provided at an output pin to the user, multiplexing one or more resistive and/or capacitive sensors.
- The resolution of the serial data provided by ASIC 100D depends on time window duration and clock frequency. The resolution will be improved, generally speaking, with a longer window duration and a higher clock frequency.
-
FIG. 8 shows in block diagram form, adevice 800, such as a cell phone, wherein anintegrated readout circuit 802 interacts with a plurality of externalresistive references 806,resistive sensors 808,capacitive references 810, andcapacitive sensors 812. Adevice processor 804 is also shown for interacting withreadout circuit 802 and for controlling the availability of the references and sensors. InFIG. 8 , the sensors and references would be integrated together on the sameintegrated circuit 802, or external to theintegrated circuit 802 but resident on thedevice 800, or a combination of the two. The six inputs shown inreadout circuit 802 could correspond to thecircuit 400 ofFIG. 4 in an embodiment as follows: IN1 source of transistor M1A, IN2 source of transistor M2A, IN3 source of transistor M1B, IN4 source of transistor M2B, IN5 negative input of OPAMP A5, and IN6 output of OPAMP A6. - In a first mode of operation, one of the
reference resistors 806 and one of thecapacitive sensors 812 could be selected and coupled to the appropriate inputs ofcircuit 400. In a second mode of operation, one of thereference capacitors 810 and one of theresistive sensors 808 could be selected and coupled to the appropriate inputs ofcircuit 400. In a third mode of operation, one of theresistive sensors 808 and one of thecapacitive sensors 812 could be selected and coupled to the appropriate inputs ofcircuit 400. -
Circuit 400 can be configured in an embodiment to multiplex between two or all three modes of operation. Different sensors and references can also be selected from a plurality of sensors and references and multiplexed as desired. Other embodiments can be hardwired to fix operation in the first, second, or third mode operation if desired. - While this invention has been described with reference to illustrative embodiments, this description is not intended to be construed in a limiting sense. Various modifications and combinations of the illustrative embodiments, as well as other embodiments of the invention, will be apparent to persons skilled in the art upon reference to the description. It is therefore intended that the appended claims encompass any such modifications or embodiments.
Claims (20)
1. A method of operating a circuit in a device, the method comprising:
coupling a resistor and a capacitive sensor to first and second inputs of the circuit in a first mode of operation;
coupling a capacitor and a resistive sensor to first and second inputs of the circuit in a second mode of operation;
providing a capacitive sensor data stream at an output in the first mode of operation; and
providing a resistive sensor data stream at the output in a the second mode of operation.
2. The method of claim 1 , further comprising:
selecting the capacitive sensor from a plurality of capacitive sensors resident in the device.
3. The method of claim 1 , further comprising:
selecting the resistive sensor from a plurality of resistive sensors resident in the device.
4. The method of claim 1 , further comprising:
integrating the resistive sensor and the circuit together in an integrated circuit.
5. The method of claim 1 , further comprising:
integrating the capacitive sensor and the circuit together in an integrated circuit.
6. The method of claim 1 , further comprising:
coupling a resistive sensor and a capacitive sensor to the first and second inputs of the circuit in a third mode of operation; and
providing a composite sensor data stream at the output in the third mode of operation.
7. A method of operating a circuit, the method comprising:
coupling a resistor to a first two node input of the circuit;
coupling a capacitor to a second two node input of the circuit;
converting a voltage at the first two node input into a switched current output;
using the capacitor, integrating the switched current output to generate an integrated voltage;
comparing the integrated voltage to first and second threshold voltages to generate first and second logic signals; and
combining the first and second logic signals to generate first and second variable frequency output signals.
8. The method of claim 7 , further comprising controlling the switched current output with the first and second variable frequency output signals.
9. The method of claim 7 , wherein the integrated voltage comprises a triangular voltage waveform.
10. The method of claim 7 , wherein combining the first and second logic signals comprises latching the first and second logic signals.
11. The method of claim 7 , wherein the resistor comprises a resistive sensor, the capacitor comprises a fixed capacitor reference, and at least one of the first and second logic signals comprises data based on resistive variations of the resistive sensor.
12. The method of claim 7 , wherein the resistor comprises a fixed resistor reference, the capacitor comprises a capacitive sensor, and at least one of the first and second logic signals comprises data based on capacitive variations of the capacitive sensor.
13. The method of claim 7 , wherein the resistor comprises a resistive sensor, the capacitor comprises a capacitive sensor, and at least one of the first and second logic signals comprises composite serial data based on resistive variations of the resistive sensor and on capacitive variations of the capacitive sensor.
14. A method of operating a circuit in a device, the method comprising:
coupling a resistor and a capacitive sensor to first and second inputs of the circuit in a first mode of operation;
coupling a capacitor and a resistive sensor to first and second inputs of the circuit in a second mode of operation;
converting a voltage at the first input into a switched current output;
integrating the switched current output to generate an integrated voltage;
comparing the integrated voltage to first and second threshold voltages to generate first and second logic signals; and
combining the first and second logic signals to generate a variable frequency capacitive sensor data stream in the first mode of operation and to generate a variable frequency resistive sensor data stream in the second mode of operation.
15. The method of claim 14 , further comprising:
coupling a resistive sensor and a capacitive sensor to the first and second inputs of the circuit in a third mode of operation; and
providing a composite sensor data stream in the third mode of operation.
16. The method of claim 14 , further comprising:
selecting the capacitive sensor from a plurality of capacitive sensors resident in the device.
17. The method of claim 14 , further comprising:
selecting the resistive sensor from a plurality of resistive sensors resident in the device.
18. The method of claim 14 , further comprising controlling the switched current output with the variable frequency capacitive sensor data stream in the first mode of operation and with the variable frequency resistive sensor data stream in the second mode of operation.
19. The method of claim 14 , wherein the integrated voltage comprises a triangular voltage waveform.
20. The method of claim 14 , wherein combining the first and second logic signals comprises latching the first and second logic signals.
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CN109696186B (en) | 2023-03-10 |
EP3474028A1 (en) | 2019-04-24 |
CN109696186A (en) | 2019-04-30 |
US11099213B2 (en) | 2021-08-24 |
KR20190044520A (en) | 2019-04-30 |
US20190120879A1 (en) | 2019-04-25 |
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KR102630899B1 (en) | 2024-01-30 |
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