US20190198486A1 - Fan-out semiconductor package - Google Patents
Fan-out semiconductor package Download PDFInfo
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- US20190198486A1 US20190198486A1 US15/969,359 US201815969359A US2019198486A1 US 20190198486 A1 US20190198486 A1 US 20190198486A1 US 201815969359 A US201815969359 A US 201815969359A US 2019198486 A1 US2019198486 A1 US 2019198486A1
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- fan
- disposed
- layer
- semiconductor package
- semiconductor chip
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- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
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Definitions
- the present disclosure relates to a fan-out semiconductor package having a package-on-package (POP) form or a package-on-chip (POC) form.
- POP package-on-package
- POC package-on-chip
- die stack technology for increasing capacity, has been continuously developed, and a speed of a device has also continuously increased in order to improve performance of a set.
- dies are stacked on a substrate to be offset from each other, and the respective dies are electrically connected to the substrate using wire bonding.
- wire lengths of the dies stacked in a vertical direction are different from each other, and a time delay problem may occur in transmitting signals.
- An aspect of the present disclosure may provide a fan-out semiconductor package capable of solving a time delay problem while including a plurality of semiconductor chips, maintaining a thin profile, and providing improved performance.
- a fan-out semiconductor package may be provided in which a plurality of semiconductor chips are disposed in a package-on-package form or a package-on-chip form.
- the respective semiconductor chips are disposed so that active surfaces thereof face each other, and signal transmission times from the respective semiconductor chips to a redistribution layer redistributing the respective semiconductor chips are implemented to be substantially the same as each other.
- a fan-out semiconductor package may include first and second structures.
- the first structure includes a first semiconductor chip having a first active surface having first connection pads disposed thereon and a first inactive surface opposing the first active surface, a first encapsulant encapsulating at least portions of the first semiconductor chip, and a connection member disposed on the first encapsulant and the first active surface and including a redistribution layer electrically connected to the first connection pads.
- the second structure includes a second semiconductor chip having a second active surface having second connection pads disposed thereon and a second inactive surface opposing the second active surface, a second encapsulant encapsulating at least portions of the second semiconductor chip, and conductive bumps disposed on the second active surface and electrically connected to the second connection pads.
- the first and second structures are disposed so that the first and second active surfaces face each other, the conductive bumps are electrically connected to the redistribution layer, and the first and second connection pads are electrically connected to each other through the redistribution layer in a signal manner.
- a signal transmission time from the first connection pad to one point of the redistribution layer and a signal transmission time from the second connection pad to the one point are substantially the same as each other.
- a fan-out semiconductor package may include first and second structures.
- the first structure includes a first semiconductor chip having a first active surface having first and second signal pads disposed thereon and a first inactive surface opposing the first active surface, a first wiring member disposed on the first active surface of the first semiconductor chip and including a first wiring layer redistributing the first and second signal pads, a first encapsulant encapsulating at least portions of the first semiconductor chip and the first wiring member, and a connection member disposed on the first encapsulant and the first wiring member and including a redistribution layer electrically connected to the first and second signal pads through the first wiring layer, the first and second signal pads being spaced apart from each other.
- the second structure includes a second semiconductor chip having a second active surface having third and fourth signal pads disposed thereon and a second inactive surface opposing the second active surface, a second wiring member disposed on the second active surface of the second semiconductor chip and including a second wiring layer redistributing the third and fourth signal pads, a second encapsulant encapsulating at least portions of the second semiconductor chip and the second wiring member, and conductive bumps disposed on the second active surface and electrically connected to the third and fourth signal pads through the second wiring layer, the third and fourth signal pads being spaced apart from each other.
- the first and second structures are disposed so that the first and second active surfaces face each other, the conductive bumps are electrically connected to the redistribution layer, the first and fourth signal pads face each other in a cross section, the second and third signal pads face each other in the cross section, the first and third signal pads are redistributed to be connected to each other in a signal manner, and the second and fourth signal pads are redistributed to be connected to each other in a signal manner.
- a fan-out semiconductor package includes first and second semiconductor chips, a redistribution layer, and conductive bumps.
- the first semiconductor chip has a first active surface having first connection pads disposed thereon.
- the redistribution layer is disposed on the first active surface of the first semiconductor chip and is electrically connected to the first connection pads.
- the second semiconductor chip has a second active surface having second connection pads disposed thereon, and the second semiconductor chip is disposed to have the second active surface facing and overlapping with the first active surface of the first semiconductor chip.
- the conductive bumps are disposed on the second active surface and electrically connect second connection pads to the redistribution layer.
- the redistribution layer includes a resistance pattern in a conductive line electrically connected to at least one of the first and second connection pads.
- FIG. 1 is a schematic block diagram illustrating an example of an electronic device system
- FIG. 2 is a schematic perspective view illustrating an example of an electronic device
- FIGS. 3A and 3B are schematic cross-sectional views illustrating a fan-in semiconductor package before and after being packaged
- FIG. 4 is schematic cross-sectional views illustrating a packaging process of a fan-in semiconductor package
- FIG. 5 is a schematic cross-sectional view illustrating a fan-in semiconductor package mounted on a ball grid array (BGA) substrate and ultimately mounted on a mainboard of an electronic device;
- BGA ball grid array
- FIG. 6 is a schematic cross-sectional view illustrating a fan-in semiconductor package embedded in a BGA substrate and ultimately mounted on a mainboard of an electronic device;
- FIG. 7 is a schematic cross-sectional view illustrating a fan-out semiconductor package
- FIG. 8 is a schematic cross-sectional view illustrating a fan-out semiconductor package mounted on a mainboard of an electronic device
- FIG. 9 is a schematic cross-sectional view illustrating an example of a fan-out semiconductor package
- FIGS. 10A and 10B are schematic enlarged cross-sectional views illustrating region Q of the fan-out semiconductor package of FIG. 9 ;
- FIG. 11 is a schematic view illustrating signal transmission paths of each of first and second semiconductor chips of the fan-out semiconductor package of FIG. 9 ;
- FIG. 12 is a schematic view illustrating signal transmission times of the first and second semiconductor chips having the signal transmission paths of FIG. 11 ;
- FIGS. 13A through 13C are schematic views illustrating various examples of a resistance pattern included in a redistribution layer of a connection member of the fan-out semiconductor package of FIG. 9 ;
- FIG. 14 is a schematic view illustrating signal transmission paths of each of first and second semiconductor chips of the fan-out semiconductor package to which the resistance patterns of FIGS. 13A through 13C are applied;
- FIG. 15 is a schematic view illustrating signal transmission times of the first and second semiconductor chips having the signal transmission paths of FIG. 14 ;
- FIG. 16A is schematic views illustrating process steps of a method of manufacturing a first structure of the fan-out semiconductor package of FIG. 9 ;
- FIG. 16B is schematic views illustrating process steps of a method of manufacturing a second structure of the fan-out semiconductor package of FIG. 9 ;
- FIG. 17 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package
- FIG. 18 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package
- FIG. 19 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package
- FIG. 20 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package
- FIG. 21 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package
- FIG. 22 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package
- FIG. 23 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- FIG. 24 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- a lower side, a lower portion, a lower surface, and the like are used to refer to a direction toward a mounting surface of the fan-out semiconductor package in relation to cross sections of the drawings, while an upper side, an upper portion, an upper surface, and the like, are used to refer to an opposite direction to the lower direction.
- these directions are defined for convenience of explanation, and the claims are not particularly limited by the directions defined as described above.
- connection of a component to another component in the description includes an indirect connection through an adhesive layer as well as a direct connection between two components.
- electrically connected conceptually includes a physical connection and a physical disconnection that nonetheless provides electrical connectivity. It can be understood that when an element is referred to with terms such as “first” and “second”, the element is not limited thereby. The terms first and second may be used for a purpose of distinguishing one element from other elements, and may not limit the sequence or importance of the elements. In some cases, a first element may be referred to as a second element without departing from the scope of the description or claims set forth herein. Similarly, a second element may also be referred to as a first element.
- an exemplary embodiment does not refer to the same exemplary embodiment, and is provided to emphasize a particular feature or characteristic different from that of another exemplary embodiment.
- exemplary embodiments provided herein are considered to be able to be implemented by being combined in whole or in part one with one another.
- one element described in a particular exemplary embodiment, even if it is not described in another exemplary embodiment may be understood as a description related to another exemplary embodiment, unless an opposite or contradictory description is provided therein.
- FIG. 1 is a schematic block diagram illustrating an example of an electronic device system.
- an electronic device 1000 may accommodate a mainboard 1010 therein.
- the mainboard 1010 or motherboard may include chip related components 1020 , network related components 1030 , other components 1040 , and the like, physically or electrically connected thereto. These components may be connected to others to be described below across various signal lines 1090 .
- the chip related components 1020 or chipset may include a memory chip such as a volatile memory (for example, a dynamic random access memory (DRAM)), a non-volatile memory (for example, a read only memory (ROM)), a flash memory, or the like; an application processor chip such as a central processor (for example, a central processing unit (CPU)), a graphics processor (for example, a graphics processing unit (GPU)), a digital signal processor, a cryptographic processor, a microprocessor, a microcontroller, or the like; and a logic chip such as an analog-to-digital (ADC) converter, an application-specific integrated circuit (ASIC), or the like.
- the chip related components 1020 are not limited thereto, but may also include other types of chip related components.
- the chip related components 1020 may be combined with each other.
- the network related components 1030 may include components for supporting communications using various protocols such as wireless fidelity (Wi-Fi) (Institute of Electrical And Electronics Engineers (IEEE) 802.11 family, or the like), worldwide interoperability for microwave access (WiMAX) (IEEE 802.16 family, or the like), IEEE 802.20, long term evolution (LTE), evolution data only (Ev-DO), high speed packet access+(HSPA+), high speed downlink packet access+(HSDPA+), high speed uplink packet access+(HSUPA+), enhanced data GSM environment (EDGE), global system for mobile communications (GSM), global positioning system (GPS), general packet radio service (GPRS), code division multiple access (CDMA), time division multiple access (TDMA), digital enhanced cordless telecommunications (DECT), Bluetooth, 3G, 4G, and 5G protocols, and any other wireless and wired protocols, designated after the abovementioned protocols.
- Wi-Fi Institute of Electrical And Electronics Engineers (IEEE) 802.11 family, or the like
- Other components 1040 may include a high frequency inductor, a ferrite inductor, a power inductor, ferrite beads, a low temperature co-fired ceramic (LTCC), an electromagnetic interference (EMI) filter, a multilayer ceramic capacitor (MLCC), or the like.
- LTCC low temperature co-fired ceramic
- EMI electromagnetic interference
- MLCC multilayer ceramic capacitor
- other components 1040 are not limited thereto, but may also include passive components used for various other purposes, or the like.
- other components 1040 may be combined with each other, together with the chip related components 1020 or the network related components 1030 described above.
- the electronic device 1000 may include other components that may or may not be physically or electrically connected to the mainboard 1010 .
- these other components may include, for example, a camera module 1050 , an antenna 1060 , a display device 1070 , a battery 1080 , an audio codec (not illustrated), a video codec (not illustrated), a power amplifier (not illustrated), a compass (not illustrated), an accelerometer (not illustrated), a gyroscope (not illustrated), a speaker (not illustrated), a mass storage unit (for example, a hard disk drive) (not illustrated), a compact disk (CD) drive (not illustrated), a digital versatile disk (DVD) drive (not illustrated), or the like.
- these other components are not limited thereto, but may also include other components used for various purposes depending on a type of electronic device 1000 , or the like.
- the electronic device 1000 may be a smartphone, a personal digital assistant (PDA), a digital video camera, a digital still camera, a network system, a computer, a monitor, a tablet PC, a laptop PC, a netbook PC, a television, a video game machine, a smartwatch, an automotive component, or the like.
- PDA personal digital assistant
- the electronic device 1000 is not limited thereto, but may be any other electronic device processing data.
- FIG. 2 is a schematic perspective view illustrating an example of an electronic device.
- a semiconductor package may be used for various purposes in the various electronic devices 1000 as described above.
- a motherboard 1110 may be accommodated in a body 1101 of a smartphone 1100 , and various electronic components 1120 may be physically or electrically connected to the motherboard 1110 .
- other components that may or may not be physically or electrically connected to the mainboard 1010 , such as a camera module 1130 , may be accommodated in the body 1101 .
- Some of the electronic components 1120 may be the chip related components, for example, a semiconductor package 1121 , but are not limited thereto.
- the electronic device is not necessarily limited to the smartphone 1100 , but may be other electronic devices as described above.
- the semiconductor chip may not serve as a finished semiconductor product in itself, and may be damaged due to external physical or chemical impacts. Therefore, the semiconductor chip itself may not be used by itself, but may be packaged and used in an electronic device, or the like, in a packaged state.
- semiconductor packaging can be used to compensate for the existence of a difference in a circuit width between the semiconductor chip and a mainboard of the electronic device in terms of electrical connections.
- a size of connection pads of the semiconductor chip and an interval between the connection pads of the semiconductor chip are very fine, but a size of component mounting pads of the mainboard used in the electronic device and an interval between the component mounting pads of the mainboard are commonly significantly larger than those of the semiconductor chip. Therefore, it may be difficult to directly mount the semiconductor chip on the mainboard, and packaging technology for buffering a difference in a circuit width between the semiconductor chip and the mainboard is advantageously used.
- a semiconductor package manufactured by the packaging technology may be classified as a fan-in semiconductor package or a fan-out semiconductor package depending on a structure and a purpose thereof.
- FIGS. 3A and 3B are schematic cross-sectional views illustrating a fan-in semiconductor package before and after being packaged.
- FIG. 4 is schematic cross-sectional views illustrating a packaging process of a fan-in semiconductor package.
- a semiconductor chip 2220 may be, for example, an integrated circuit (IC) in a bare state, including a body 2221 including silicon (Si), germanium (Ge), gallium arsenide (GaAs), or the like, connection pads 2222 formed on one surface of the body 2221 and including a conductive material such as aluminum (Al), or the like, and a passivation layer 2223 such as an oxide film, a nitride film, or the like, formed on one surface of the body 2221 and covering at least portions of the connection pads 2222 .
- the connection pads 2222 may be significantly small, it may be difficult to mount the integrated circuit (IC) on an intermediate level printed circuit board (PCB) as well as on the mainboard of the electronic device, or the like.
- a connection member 2240 may be formed depending on a size of the semiconductor chip 2220 on the semiconductor chip 2220 in order to redistribute the connection pads 2222 .
- the connection member 2240 may be formed by forming an insulating layer 2241 on the semiconductor chip 2220 using an insulating material such as a photoimageable dielectric (PID) resin, forming via holes 2243 h opening the connection pads 2222 , and then forming wiring patterns 2242 and vias 2243 . Then, a passivation layer 2250 protecting the connection member 2240 may be formed, an opening 2251 may be formed, and an underbump metal layer 2260 , or the like, may be formed. That is, a fan-in semiconductor package 2200 including, for example, the semiconductor chip 2220 , the connection member 2240 , the passivation layer 2250 , and the underbump metal layer 2260 may be manufactured through a series of processes.
- PID photoimageable dielectric
- the fan-in semiconductor package may have a package form in which all of the connection pads, for example, input/output (I/O) terminals, of the semiconductor chip are disposed inside a footprint or area of overlap with the semiconductor chip, and may have excellent electrical characteristics and be produced at a low cost. Therefore, many elements mounted in smartphones have been manufactured in a fan-in semiconductor package form. In detail, many elements mounted in smartphones have been developed to implement a rapid signal transfer while having a compact size.
- I/O input/output
- the fan-in semiconductor package since all I/O terminals are disposed inside the footprint or area of overlap with the semiconductor chip in the fan-in semiconductor package, the fan-in semiconductor package has significant spatial limitations. Therefore, it is difficult to apply this structure to a semiconductor chip having a large number of I/O terminals or a semiconductor chip having a compact size. In addition, due to the disadvantage described above, the fan-in semiconductor package may not be directly mounted and used on the mainboard of the electronic device.
- the size of the I/O terminals of the semiconductor chip and the interval between the I/O terminals of the semiconductor chip may not be sufficient to directly mount the fan-in semiconductor package on the mainboard of the electronic device.
- FIG. 5 is a schematic cross-sectional view illustrating a fan-in semiconductor package mounted on a ball grid array (BGA) substrate and ultimately mounted on a mainboard of an electronic device.
- BGA ball grid array
- FIG. 6 is a schematic cross-sectional view illustrating a fan-in semiconductor package embedded in a BGA substrate and ultimately mounted on a mainboard of an electronic device.
- connection pads 2222 that is, I/O terminals, of a semiconductor chip 2220 may be redistributed through a BGA substrate 2301 , and the fan-in semiconductor package 2200 may be ultimately mounted on a mainboard 2500 of an electronic device in a state in which it is mounted on the BGA substrate 2301 .
- solder balls 2270 and the like, may be fixed by an underfill resin 2280 , or the like, and an outer side of the semiconductor chip 2220 may be covered with a molding material 2290 , or the like.
- a fan-in semiconductor package 2200 may be embedded in a separate BGA substrate 2302 , connection pads 2222 , that is, I/O terminals, of the semiconductor chip 2220 may be redistributed by the BGA substrate 2302 in a state in which the fan-in semiconductor package 2200 is embedded in the BGA substrate 2302 , and the fan-in semiconductor package 2200 may be ultimately mounted on a mainboard 2500 of an electronic device.
- the fan-in semiconductor package may be mounted on the separate BGA substrate and be then mounted on the mainboard of the electronic device through a packaging process or may be mounted and used on the mainboard of the electronic device in a state in which it is embedded in the BGA substrate.
- FIG. 7 is a schematic cross-sectional view illustrating a fan-out semiconductor package.
- connection pads 2122 of the semiconductor chip 2120 may be redistributed outwardly of the footprint or area of overlap with the semiconductor chip 2120 by a connection member 2140 .
- a passivation layer 2150 may further be formed on the connection member 2140
- an underbump metal layer 2160 may further be formed in openings of the passivation layer 2150 .
- Solder balls 2170 may further be formed on the underbump metal layer 2160 .
- the semiconductor chip 2120 may be an integrated circuit (IC) including a body 2121 , the connection pads 2122 , a passivation layer (not illustrated), and the like.
- the connection member 2140 may include an insulating layer 2141 , redistribution layers 2142 formed on the insulating layer 2141 , and vias 2143 electrically connecting the connection pads 2122 and the redistribution layers 2142 to each other.
- the fan-out semiconductor package may have a form in which I/O terminals of the semiconductor chip are redistributed and disposed outwardly of the footprint or area of overlap with the semiconductor chip through the connection member formed on the semiconductor chip.
- all I/O terminals of the semiconductor chip need to be disposed inside the footprint of the semiconductor chip. Therefore, when a size of the semiconductor chip is decreased, a size and a pitch of balls need to be decreased, such that a standardized ball layout may not readily be used in the fan-in semiconductor package.
- the fan-out semiconductor package has the form in which the I/O terminals of the semiconductor chip are redistributed and disposed outwardly from the footprint of the semiconductor chip through the connection member formed on the semiconductor chip as described above. Therefore, even in a case in which a size of the semiconductor chip is decreased, a standardized ball layout may be used in the fan-out semiconductor package as it is, such that the fan-out semiconductor package may be mounted on the mainboard of the electronic device without using a separate BGA substrate, as described below.
- FIG. 8 is a schematic cross-sectional view illustrating a fan-out semiconductor package mounted on a mainboard of an electronic device.
- a fan-out semiconductor package 2100 may be mounted on a mainboard 2500 of an electronic device through solder balls 2170 , or the like. That is, as described above, the fan-out semiconductor package 2100 includes the connection member 2140 formed on the semiconductor chip 2120 and capable of redistributing the connection pads 2122 to a fan-out region that is outside of a size of the semiconductor chip 2120 , such that the standardized ball layout may be used in the fan-out semiconductor package 2100 as it is. As a result, the fan-out semiconductor package 2100 may be mounted on the mainboard 2500 of the electronic device without using a separate BGA substrate, or the like.
- the fan-out semiconductor package may be mounted on the mainboard of the electronic device without using the separate BGA substrate, the fan-out semiconductor package may be implemented at a thickness lower than that of the fan-in semiconductor package using the BGA substrate. Therefore, the fan-out semiconductor package may be miniaturized and thinned. In addition, the fan-out semiconductor package has excellent thermal characteristics and electrical characteristics, such that it is particularly appropriate for a mobile product. Therefore, the fan-out semiconductor package may be implemented in a form more compact than that of a general package-on-package (POP) type using a printed circuit board (PCB), and may solve a problem due to the occurrence of a warpage phenomenon.
- POP general package-on-package
- the fan-out semiconductor package refers to package technology for mounting the semiconductor chip on the mainboard of the electronic device, or the like, as described above, and protecting the semiconductor chip from external impacts, and is a concept different from that of a printed circuit board (PCB) such as a BGA substrate, or the like, having a scale, a purpose, and the like, different from those of the fan-out semiconductor package, and having the fan-in semiconductor package embedded therein.
- PCB printed circuit board
- a fan-out semiconductor package capable of solving a time delay problem in spite of including a plurality of semiconductor chips and being thinned in spite of having improved performance will hereinafter be described with reference to the drawings.
- FIG. 9 is a schematic cross-sectional view illustrating an example of a fan-out semiconductor package.
- FIGS. 10A and 10B are schematic enlarged cross-sectional views illustrating region Q of the fan-out semiconductor package of FIG. 9 .
- a fan-out semiconductor package 300 A may include a first structure 100 A including a first semiconductor chip 120 having a first active surface including first connection pads 120 P disposed thereon and a first inactive surface opposing the first active surface, a first encapsulant 130 encapsulating at least portions of the first semiconductor chip 120 , and a connection member 140 disposed on the first encapsulant 130 and the first active surface and including a redistribution layer 142 electrically connected to the first connection pads 120 P; and a second structure 200 A including a second semiconductor chip 220 having a second active surface having second connection pads 220 P disposed thereon and a second inactive surface opposing the second active surface, a second encapsulant 230 encapsulating at least portions of the second semiconductor chip 220 , and conductive bumps 228 disposed on the second encapsulant 230 and the second active surface and electrically connected to the second connection pads 220 P.
- the first structure 100 A and the second structure 200 A including a first semiconductor chip 120 having a first active surface including
- die stack technology for increasing a capacity has been continuously developed, and a speed of a device has also continuously increased in order to improve performance of a set.
- dies are stacked on a substrate to be offset from each other, and the respective dies are electrically connected to the substrate using wire bonding.
- wire lengths of the dies stacked at different positions in a vertical direction e.g., a direction orthogonal to a surface of the substrate on which the dies are mounted
- pads of the respective memories are implemented by center pads in order to increase a net die, and are then redistributed to edge pads by an aluminum (Al) redistribution layer (RDL).
- Al aluminum
- the aluminum redistribution layer has electrical conductivity relatively lower than that of a copper redistribution layer (Cu RDL), and a larger time delay in transmitting signals thus occurs. Therefore, there is a limitation in applying the aluminum redistribution layer to the DRAM, or the like, requiring a high speed.
- the first and second semiconductor chips 120 and 220 may be disposed in a package-on-package form, and the first semiconductor chip 120 and the second semiconductor chip 220 may be disposed so that the first and second active surfaces face each other.
- the first and second semiconductors 120 and 220 may be connected through the redistribution layer 142 and the conductive bumps 228 rather than wiring bonding, in a signal manner.
- the first and second connection pads 120 P and 220 P may share the redistribution layer 142 with each other to be connected to each other at any one point of the redistribution layer 142 in a signal manner.
- the first and second connection pads 120 P and 220 P may be redistributed so that a signal transmission time from the first connection pad 120 P to one point of the redistribution layer 142 and a signal transmission time from the second connection pad 220 P to one point of the redistribution layer 142 are substantially the same as each other, as illustratively shown in FIGS. 11 and 12 .
- a signal transmission distance P 1 from the first connection pad 120 P to one point of the redistribution layer 142 and a signal transmission distance P 2 from the second connection pad 220 P to one point of the redistribution layer 142 may be implemented to be substantially the same as each other to solve a time delay problem, as illustratively shown in FIGS.
- the fan-out semiconductor package 300 A may be thinned as much as possible, and a signal path between the first and second semiconductor chips 120 and 220 may be significantly reduced.
- the first structure 100 A may further include a first wiring member 125 disposed between the first active surface and the connection member 140 and including a first wiring layer 122 redistributing the first connection pads 120 P to electrically connect the first connection pads 120 P to the redistribution layer 142 .
- the second structure 200 A may further include a second wiring member 225 disposed between the second active surface and the conductive bumps 228 and including a second wiring layer 222 redistributing the second connection pads 220 P to electrically connect the second connection pads 220 P to the conductive bumps 228 .
- the first and second connection pads 120 P and 220 P formed in a center pad form may be primarily redistributed.
- the first and second connection pads 120 P and 220 P are substantially redistributed through the connection member 140 of the first structure 100 A and the conductive bumps 228 of the second structure 200 A rather than wire bonding, a path of redistribution through the first and second wiring members 125 and 225 may thus be significantly reduced or be omitted, if necessary, to improve signal transmission characteristics.
- first and second semiconductor chips 120 and 220 may be the same type of memories, for example, DRAMs.
- the first connection pads 120 P may include first and second signal pads 120 P 1 and 120 P 2 spaced apart from each other, and the second connection pads 220 P may include third and fourth signal pads 220 P 1 and 220 P 2 spaced apart from each other.
- first and fourth signal pads 120 P 1 and 220 P 2 may face each other, and the second and third signal pads 120 P 2 and 220 P 1 may face each other, in a cross section, but the first and third signal pads 120 P 1 and 220 P 1 may be redistributed by a redistribution process to be connected to each other in a signal manner, and the second and fourth signal pads 120 P 2 and 220 P 2 may be redistributed by the redistribution process to be connected to each other in a signal manner.
- the first and fourth signals pads 120 P 1 and 220 P 2 performing different functions may face each other ( ⁇ and ⁇ ) and the second and third signal pads 120 P 2 and 220 P 1 performing different functions may face each other ( ⁇ and ⁇ ), in a cross section.
- the first to fourth signal pads are primarily redistributed through signal patterns 122 S 1 , 122 S 2 , 22251 , and 222 S 2 of the first and second wiring layers 122 and 222 to allow first and third pads 122 P 1 and the 222 P 1 to face each other ( ⁇ ′ and ⁇ ′) and allow second and fourth pads 122 P 2 and 222 P 2 to face each other ( ⁇ ′ and ⁇ ′) and the first and third pads 122 P 1 and the 222 P 1 and the second and fourth pads 122 P 2 and 222 P 2 are connected to each other, respectively, through the conductive bumps 228 and the redistribution layer 142 in a signal manner
- the first and third signal pads 120 P 1 and 220 P 1 and the second and fourth signal pads 120 P 2 and 220 P 2 may be connected to each other, respectively, in a signal manner in a cross form. In this way, the redistribution layer may be easily applied to the memory such as the DRAM requiring a high speed.
- the first structure 100 A may further include a first core member 110 having a first through-hole 110 H in which the first semiconductor chip 120 is accommodated.
- the first encapsulant 130 may cover at least portions of the first core member 110 and the first inactive surface of the first semiconductor chip 120 , and fill at least portions of the first through-hole 110 H.
- the first core member 110 may include a plurality of wiring layers 112 a and 112 b electrically connected to the first and second connection pads 120 P and 220 P through the redistribution layer 142 and one layer or more vias 113 electrically connecting the plurality of wiring layers 112 a and 112 b to each other.
- the first core member 110 may include an insulating layer 111 , a first wiring layer 112 a disposed on a first surface of the insulating layer 111 , a second wiring layer 112 b disposed on a second surface of the insulating layer 111 , and vias 113 penetrating through the insulating layer 111 and electrically connecting the first and second wiring layers 112 a and 112 b to each other.
- the first and second wiring layers 112 a and 112 b may be electrically connected to the first and second connection pads 120 and 220 P.
- the first core member 110 may solve a warpage problem of the first structure 100 A, reduce non-uniformity of an encapsulation thickness of the first encapsulant 130 , and particularly, allow an electrical path for a connection between upper and lower portions to be easily introduced.
- the first and second connection pads 120 P and 220 P may be additionally redistributed by the first and second wiring layers 112 a and 112 b , and a degree of freedom in a wiring design may thus be improved.
- the second structure 200 A may further include a second core member 210 having a second through-hole 210 H in which the second semiconductor chip 220 is accommodated.
- the second encapsulant 230 may cover at least portions of the second core member 210 and the second inactive surface of the second semiconductor chip 220 , and fill at least portions of the second through-hole 210 H.
- the first encapsulant 130 may be formed on the other surface of the first core member 110 opposing one surface of the first core member 110 on which the connection member 140 is disposed, and may have openings 130 h exposing at least portions of the second wiring layer 112 b .
- electrical connection structures 150 electrically connected to the second wiring layer 112 b exposed by the openings 130 h may be disposed in the openings 130 h .
- the fan-out semiconductor package 300 A may be mounted on an external component such as the mainboard of the electronic device, or the like, and the first and second connection pads 120 P and 220 P may be electrically connected to the mainboard.
- the first core member 110 which is an additional component, may improve rigidity of the first structure 100 A depending on the materials used, and serve to secure uniformity of a thickness of the first encapsulant 130 .
- an electrical connection path between upper and lower portions of the first structure 100 A may be provided.
- the first core member 110 may have the first through-hole 110 H.
- the first semiconductor chip 120 may be disposed in the first through-hole 110 H to be spaced apart from the first core member 110 by a predetermined distance. Side surfaces of the first semiconductor chip 120 may be surrounded by the first core member 110 .
- the first core member 110 may include the insulating layer 111 , the first wiring layer 112 a disposed on an upper surface of the insulating layer 111 , the second wiring layer 112 b disposed on a lower surface of the insulating layer 111 , and the vias 113 penetrating through the insulating layer 111 and electrically connecting the first and second wiring layers 112 a and 112 b to each other.
- a material including an inorganic filler and an insulating resin may be used as a material of the insulating layer 111 .
- a thermosetting resin such as an epoxy resin, a thermoplastic resin such as a polyimide resin, or a resin including a reinforcing material such as an inorganic filler, for example, silica, alumina, or the like, more specifically, Ajinomoto Build up Film (ABF), FR-4, Bismaleimide Triazine (BT), a photoimageable dielectric (PID) resin, or the like, may be used.
- thermosetting resin or a thermoplastic resin is impregnated together with an inorganic filler in a core material such as a glass fiber (or a glass cloth or a glass fabric), for example, prepreg, or the like, may also be used.
- a core material such as a glass fiber (or a glass cloth or a glass fabric), for example, prepreg, or the like.
- excellent rigidity of the first structure 100 A may be maintained, such that the first core member 110 may be used as a kind of support member.
- the wiring layers 112 a and 112 b may include a conductive material such as copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), titanium (Ti), or alloys thereof.
- the wiring layers 112 a and 112 b may perform various functions depending on designs of corresponding layers.
- the wiring layers 112 a and 112 b may include ground (GND) patterns, power (PWR) patterns, signal (S) patterns, and the like.
- the signal (S) patterns may include various signals except for the ground (GND) patterns, the power (PWR) patterns, and the like, such as data signals, and the like.
- the wiring layers 112 a and 112 b may include pad patterns for vias, pad patterns for electrical connection structures, and the like. Thicknesses of the wiring layers 112 a and 112 b of the first core member 110 may be greater than that of the redistribution layer 142 of the connection member 140 . The reason is that the first core member 110 may have a thickness similar to that of the first semiconductor chip 120 , while the connection member 140 is commonly designed to remain thin.
- the vias 113 may penetrate through the insulating layer 111 and electrically connect the first wiring layer 112 a and the second wiring layer 112 b to each other.
- a material of each of the vias 113 may be a conductive material.
- Each of the vias 113 may be completely filled with the conductive material, or the conductive material may be formed along a wall of each of via holes.
- Each of the vias 113 may be a through-via completely penetrating through the insulating layer 111 , and may have a cylindrical shape or an hourglass shape, but is not limited thereto.
- the first semiconductor chip 120 may be an integrated circuit (IC) that includes several hundred to several million or more elements integrated in a single chip.
- the first semiconductor chip 120 may be formed on the basis of an active wafer.
- a base material of a body may be silicon (Si), germanium (Ge), gallium arsenide (GaAs), or the like.
- Various circuits may be formed in the body.
- the first connection pads 120 P may electrically connect the first semiconductor chip 120 to other components, and a conductive material such as aluminum (Al), or the like, may be used as a material of each of the first connection pads 120 P.
- An active surface of the first semiconductor chip 120 refers to a surface of the first semiconductor chip 120 on which the first connection pads 120 P are disposed, and an inactive surface of the first semiconductor chip 120 refers to a surface of the first semiconductor chip 120 opposing the active surface.
- a passivation layer (not illustrated) covering at least portions of the first connection pads 120 P may be formed on the body of the first semiconductor chip 120 , if necessary.
- the passivation layer (not illustrated) may be an oxide film, a nitride film, or the like, or be a double layer of an oxide layer and a nitride layer.
- An insulating layer (not illustrated), and the like, may also be further disposed in other required positions.
- the first semiconductor chip 120 may be a memory chip such as a volatile memory (such as a DRAM), a non-volatile memory (such as a ROM), a flash memory, or the like.
- a volatile memory such as a DRAM
- a non-volatile memory such as a ROM
- flash memory or the like.
- the first semiconductor chip 120 is not limited thereto, but may also be another kind of chip.
- the first wiring member 125 may primarily redistribute the first connection pads 120 P of the first semiconductor chip 120 .
- the first wiring member 125 may include first insulating layers 121 including photosensitive polyimide (PSPI), or the like, the first wiring layers 122 formed on the first insulating layers 121 and including aluminum (Al), copper (Cu), or the like, and first vias 123 formed in the first insulating layers 121 , electrically connecting the first connection pads 120 P and the first wiring layers 122 to each other, and including aluminum (Al), copper (Cu), or the like.
- the exposed first wiring layer 122 may be connected to vias 143 of the connection member 140 , and may be electrically connected to the redistribution layer 142 of the connection member 140 through the vias 143 .
- the first encapsulant 130 may protect the first semiconductor chip 120 .
- An encapsulation form of the first encapsulant 130 is not particularly limited, but may be a form in which the first encapsulant 130 surrounds at least portions of the first semiconductor chip 120 .
- the first encapsulant 130 may cover the first core member 110 and the inactive surface of the first semiconductor chip 120 , and fill at least portions of the first through-hole 110 H.
- a certain material of the first encapsulant 130 is not particularly limited, but may be, for example, an insulating material.
- the first encapsulant 130 may include ABF including an insulating resin and an inorganic filler.
- the material of the first encapsulant 130 is not limited thereto, but may also be a photoimageable encapsulant (PIE).
- the connection member 140 may substantially redistribute the first and second connection pads 120 P and 220 P. Several tens to several millions of first and second connection pads 120 P and 220 P having various functions may be redistributed by the connection member 140 , and may be physically or electrically externally connected through the electrical connection structures 150 depending on the functions.
- the connection member 140 may include insulating layers 141 , the redistribution layers 142 formed on the insulating layers 141 , and the vias 143 formed in the insulating layers 141 and electrically connecting the redistribution layers 142 to the first wiring layer 112 a and the first connection pads 120 P.
- the connection member 140 may include a larger number of insulating layers, redistribution layers, and vias, if necessary.
- a material of each of the insulating layers 141 may be an insulating material.
- a photosensitive insulating material such as a PID resin may also be used as the insulating material. This case may be advantageous in forming fine patterns.
- the redistribution layers 142 may include a conductive material such as copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), titanium (Ti), or alloys thereof.
- the redistribution layers 142 may perform various functions depending on designs of corresponding layers.
- the redistribution layers 142 may include ground (GND) patterns, power (PWR) patterns, signal (S) patterns, and the like.
- the signal (S) patterns may include various signals except for the ground (GND) patterns, the power (PWR) patterns, and the like, such as data signals, and the like.
- the redistribution layers 142 may include pad patterns for vias, pad patterns for electrical connection structures, and the like.
- the vias 143 may electrically connect the first connection pads 120 P, the redistribution layers 142 , the first wiring layer 112 a , and the like, formed on different layers to each other, resulting in an electrical path in the first structure 100 A.
- a material of each of the vias 143 may be a conductive material such as copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), titanium (Ti), or alloys thereof.
- Each of the vias 143 may be completely filled with the conductive material, or the conductive material may also be formed along a wall of each of the vias.
- each of the vias 143 may have any shape known in the related art such as a tapered shape.
- the electrical connection structures 150 may be additionally configured to physically or electrically externally connect the fan-out semiconductor package 300 A.
- the fan-out semiconductor package 300 A may be mounted on the mainboard of the electronic device, or the like, through the electrical connection structures 150 .
- Each of the electrical connection structures 150 may be formed of a low melting point metal, for example, a solder such as an alloy including tin (Sn), more specifically, a tin (Sn)-aluminum (Al)-copper (Cu) alloy, or the like.
- a material of each of the electrical connection structures 150 is not particularly limited thereto.
- Each of the electrical connection structures 150 may be a land, a ball, a pin, or the like.
- the electrical connection structures 150 may be formed as a multilayer or single layer structure.
- the electrical connection structures 150 may include a copper (Cu) pillar and a solder.
- the electrical connection structures 150 may include a tin-silver solder or copper (Cu).
- Cu copper
- the number, an interval, a disposition form, and the like, of electrical connection structures 150 are not particularly limited, but may be sufficiently modified depending on design particulars.
- the electrical connection structures 150 may be provided in an amount of several tens to several millions according to the numbers of first and second connection pads 120 P and 220 P, or may be provided in an amount of several tens to several millions or more or several tens to several millions or less.
- At least one of the electrical connection structures 150 may be disposed in a fan-out region.
- the fan-out region refers to a region except for a region in which the first semiconductor chip 120 is disposed in, for example, the first structure 100 A. That is, the fan-out semiconductor package 300 A according to the exemplary embodiment may be a fan-out package.
- the fan-out package may have excellent reliability as compared to a fan-in package, may implement a plurality of input/output (I/O) terminals, and may facilitate a 3 D interconnection.
- I/O input/output
- the fan-out package may be mounted on an electronic device without a separate board.
- the fan-out package may be manufactured to have a small thickness, and may have price competitiveness.
- the second core member 210 may maintain rigidity of the second structure 200 A depending on the materials used, and serve to secure uniformity of a thickness of the second encapsulant 230 .
- the second semiconductor chip 220 may be disposed in the second through-hole 210 H to be spaced apart from the second core member 210 by a predetermined distance. Side surfaces of the second semiconductor chip 220 may be surrounded by the second core member 210 .
- the second core member 210 may include an insulating layer 211 .
- a material including an inorganic filler and an insulating resin may be used as a material of the insulating layer 211 .
- a thermosetting resin such as an epoxy resin, a thermoplastic resin such as a polyimide resin, or a resin including a reinforcing material such as an inorganic filler, for example, silica, alumina, or the like, more specifically, ABF, FR-4, BT, a PID resin, or the like, may be used.
- thermosetting resin or a thermoplastic resin is impregnated together with an inorganic filler in a core material such as a glass fiber (or a glass cloth or a glass fabric), for example, prepreg, or the like, may also be used.
- a core material such as a glass fiber (or a glass cloth or a glass fabric), for example, prepreg, or the like.
- first and second wiring layers 212 a and 212 b may be disposed on upper and lower surfaces of the insulating layer 211 , respectively, and may be utilized as mark patterns.
- the second semiconductor chip 220 may be an integrated circuit (IC) that includes several hundred to several million or more elements integrated in a single chip.
- the second semiconductor chip 220 may be formed on the basis of an active wafer.
- a base material of a body may be silicon (Si), germanium (Ge), gallium arsenide (GaAs), or the like.
- Various circuits may be formed in the body.
- the second connection pads 220 P may electrically connect the second semiconductor chip 220 to other components, and a conductive material such as aluminum (Al), or the like, may be used as a material of each of the second connection pads 220 P.
- An active surface of the second semiconductor chip 220 refers to a surface of the second semiconductor chip 220 on which the second connection pads 220 P are disposed, and an inactive surface of the second semiconductor chip 220 refers to a surface of the second semiconductor chip 220 opposing the active surface.
- a passivation layer (not illustrated) covering at least portions of the second connection pads 220 P may be formed on the body, if necessary.
- the passivation layer (not illustrated) may be an oxide film, a nitride film, or the like, or be a double layer of an oxide layer and a nitride layer.
- An insulating layer (not illustrated), and the like, may also be further disposed in other required positions.
- the second semiconductor chip 220 may be a memory chip such as a volatile memory (such as a DRAM), a non-volatile memory (such as a ROM), a flash memory, or the like.
- a volatile memory such as a DRAM
- a non-volatile memory such as a ROM
- flash memory or the like.
- the second semiconductor chip 220 is not limited thereto, but may also be another kind of chip.
- the second wiring member 225 may primarily redistribute the second connection pads 220 P of the second semiconductor chip 220 .
- the second wiring member 225 may include second insulating layers 221 including photosensitive polyimide (PSPI), or the like, the second wiring layers 222 formed on the first insulating layers 221 and including aluminum (Al), copper (Cu), or the like, and second vias 223 formed in the second insulating layers 221 , electrically connecting the second connection pads 220 P and the second wiring layers 222 to each other, and including aluminum (Al), copper (Cu), or the like.
- the exposed second wiring layer 222 may be connected to the conductive bumps 228 .
- the conductive bump 228 may include a copper layer 226 and a solder layer 227 .
- the copper layer 226 may be a copper (Cu) bump, a copper (Cu) pillar, or the like
- the solder layer 227 may be a solder ball including a low melting point metal such as tin (Sn).
- the low melting point metal refers to a metal of which a base material is not melted and only a filler metal is melted and which is used for bonding, such as a solder, and may be, for example, tin (Sn) or an alloy including tin (Sn) such as a tin (Sn)-aluminum (Al) alloy or a tin (Sn)-aluminum (Al)-copper (Cu) alloy, but is not limited thereto.
- the second encapsulant 230 may protect the second semiconductor chip 220 .
- An encapsulation form of the second encapsulant 230 is not particularly limited, but may be a form in which the second encapsulant 230 surrounds at least portions of the second semiconductor chip 220 .
- the second encapsulant 230 may cover the second core member 210 and the inactive surface of the second semiconductor chip 220 , and fill at least portions of the second through-hole 210 H.
- a certain material of the second encapsulant 230 is not particularly limited, but may be, for example, an insulating material.
- the second encapsulant 230 may include ABF including an insulating resin and an inorganic filler.
- the material of the second encapsulant 230 is not limited thereto, but may also be a PIE.
- FIGS. 13A through 13C are schematic views illustrating various examples of a resistance pattern included in a redistribution layer of a connection member of the fan-out semiconductor package of FIG. 9 .
- FIG. 14 is a schematic view illustrating signal transmission paths of each of first and second semiconductor chips of the fan-out semiconductor package to which the resistance patterns of FIGS. 13A through 13C are applied.
- FIG. 15 is a schematic view illustrating signal transmission times of the first and second semiconductor chips having the signal transmission paths of FIG. 14 .
- various kinds of resistance patterns 142 R 1 , 142 R 2 , and 142 R 3 may be formed on or in the redistribution layer 142 of the connection member 140 .
- the resistance patterns 142 R 1 , 142 R 2 , and 142 R 3 may be, for example, a pattern inductance, a capacitance, a resistance, and the like, such as a spiral inductor 142 R 1 , a meander line 142 R 2 , or a single loop 142 R 3 .
- a signal transmission distance P 1 from the first connection pad 120 P to one point of the redistribution layer 142 and a signal transmission distance P 2 from the second connection pad 220 P to one point of the redistribution layer 142 may be different from each other.
- a line delay problem may occur.
- different signal transmission distances P 1 and P 2 may be compensated for (e.g., by delaying a signal from chip 120 , as illustrative shown in FIG. 15 ), such that signal transmission times may become substantially the same as each other. That is, even when the signal transmission distances P 1 and P 2 are different from each other, a time delay problem may be solved.
- FIG. 16A is schematic diagram illustrating process steps of a method of manufacturing a first structure of the fan-out semiconductor package of FIG. 9 .
- FIG. 16B is schematic diagram illustrating process steps of a method of manufacturing a second structure of the fan-out semiconductor package of FIG. 9 .
- the first core member 110 may be first prepared.
- the first core member 110 may be prepared by preparing a copper clad laminate (CCL) and then forming the first and second wiring layers 112 a and 112 b and the vias 113 by a plating process.
- the first through-hole 110 H may be formed in the first core member 110 .
- the first through-hole 110 H may be formed using a laser drill and/or a mechanical drill or be formed by a sandblast, or the like.
- a first adhesive film 191 such as an epoxy tape may be attached to one side of the first core member 110 .
- the first semiconductor chip 120 having the first wiring member 125 formed on the first active surface thereof in advance may be attached to the first adhesive film 191 exposed through the first through-hole 110 H. Then, the first semiconductor chip 120 may be encapsulated with the first encapsulant 130 . Then, the first adhesive film 191 may be removed, and the connection member 140 and the electrical connection structures 150 may be formed.
- the connection member 140 may be formed by forming the insulating layers 141 using the PID, or the like, forming via holes in the insulating layers by a photolithography method, and then forming the redistribution layers 142 and the vias 143 by a plating process.
- the electrical connection structures 150 may be formed by attaching solder balls and performing a reflow process.
- a series of processes may be performed on a panel level having a large area.
- a plurality of first structures 100 A connected to each other may be manufactured.
- a singulation process such as a dicing process is performed on the plurality of first structures 100 A connected to each other, the respective first structures 100 A may be obtained.
- the second core member 210 may be first prepared.
- the second core member 210 may also be formed by preparing a CCL and then forming the first and second wiring layers 212 a and 212 b by a plating process.
- the second through-hole 210 H may be formed in the second core member 210 .
- the second through-hole 210 H may be formed using a laser drill and/or a mechanical drill or be formed by a sandblast, or the like.
- a second adhesive film 192 such as an epoxy tape may be attached to one side of the second core member 210 .
- the second semiconductor chip 220 having the second wiring member 225 formed on the second active surface thereof in advance may be attached to the second adhesive film 192 exposed through the second through-hole 210 H. Then, the second semiconductor chip 220 may be encapsulated with the second encapsulant 230 . Then, the second adhesive film 192 may be removed, and the conductive bumps 228 may be formed.
- the conductive bump 228 may be formed by forming a copper bump or a copper pillar on the exposed second wiring layer 222 and forming a solder ball on the other surface of the copper bump or the copper pillar opposing one surface of the copper bump or the copper pillar connected to the second wiring layer 222 .
- a series of processes may also be performed on a panel level having a large area. In this case, a plurality of second structures 200 A connected to each other may be manufactured. When a singulation process such as a dicing process is performed on the plurality of second structures 200 A connected to each other, the respective second structures 200 A may be obtained.
- the fan-out semiconductor package 300 A may be manufactured.
- FIG. 17 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- a first structure 100 B may have a plurality of first through-hole 110 H, and first semiconductor chips 120 may be disposed in the first through-holes 110 H, respectively.
- a second structures 200 B may have a plurality of second through-holes 210 H, and second semiconductor chips 220 may be disposed in the second through-holes 210 H, respectively.
- the first structure 100 B may include a plurality of first semiconductor chips 120 disposed side-by-side with each other and connected to each other through a redistribution layer 142 in a signal manner
- the second structure 200 B may include a plurality of second semiconductor chips 220 disposed side-by-side with each other and connected to each other through the redistribution layer 142 in a signal manner, and performance of the fan-out semiconductor package 300 B may thus be further improved.
- Other contents overlap those described above, and a detailed description thereof is thus omitted.
- FIG. 18 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- a third structure 400 C and a fourth structure 500 C as well as a first structure 100 C and a second structure 200 C may be stacked.
- Electrical connection structures 450 of the third structure 400 C may be electrically connected to an exposed second wiring layer 212 b of a second core member 210 of the second structure 200 C.
- the second core member 210 of the second structure 200 C may further include vias 213 electrically connecting first and second wiring layers 212 a and 212 b to each other for providing an electrical connection between upper and lower portions.
- the third structure 400 C and the fourth structure 500 C may have structures that are substantially the same as those of the first structure 100 C and the second structure 200 C, respectively.
- the fan-out semiconductor package 300 C according to another exemplary embodiment, a larger number of structures 100 C, 200 C, 400 C, and 500 C are stacked in a vertical direction, and performance of the fan-out semiconductor package 300 C may thus be further improved.
- Other contents overlap those described above, and a detailed description thereof is thus omitted.
- FIG. 19 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- a first core member 110 of a first structure 100 D may include a larger number of wiring layers 112 a , 112 b , 112 c , and 112 d .
- the first core member 110 may include a first insulating layer 111 a , a first wiring layer 112 a and a second wiring layer 112 b disposed on first and second surfaces of the first insulating layer 111 a , respectively, a second insulating layer 111 b disposed on the first surface of the first insulating layer 111 a and covering the first wiring layer 112 a , a third wiring layer 112 c disposed on the second insulating layer 111 b , a third insulating layer 111 c disposed on the second surface of the first insulating layer 111 a and covering the second wiring layer 112 b , and a fourth wiring layer 112 d disposed on the third insulating layer 111 c .
- the first to fourth wiring layers 112 a , 112 b , 112 c , and 112 d may be electrically connected to first and second connection pads 120 P and 220 P. Since the first core member 110 may include a larger number of wiring layers 112 a , 112 b , 112 c , and 112 d , a connection member 140 may further be simplified. Therefore, a decrease in a yield depending on a defect occurring in a process of forming the connection member 140 may be suppressed.
- first to fourth wiring layers 112 a , 112 b , 112 c , and 112 d may be electrically connected to each other through first to third vias 113 a , 113 b , and 113 c each penetrating through a respective one of the first to third insulating layers 111 a , 111 b , and 111 c.
- the first insulating layer 111 a may have a thickness greater than those of the second insulating layer 111 b and the third insulating layer 111 c .
- the first insulating layer 111 a may be basically relatively thick in order to maintain rigidity, and the second insulating layer 111 b and the third insulating layer 111 c may be introduced in order to form a larger number of wiring layers 112 c and 112 d .
- the first insulating layer 111 a may include an insulating material different from those of the second insulating layer 111 b and the third insulating layer 111 c .
- the first insulating layer 111 a may be, for example, prepreg including a core material, a filler, and an insulating resin
- the second insulating layer 111 b and the third insulating layer 111 c may be an ABF or a PID film including a filler and an insulating resin.
- the materials of the first insulating layer 111 a and the second and third insulating layers 111 b and 111 c are not limited thereto.
- first vias 113 a penetrating through the first insulating layer 111 a may have a diameter greater than those of second vias 113 b and third vias 113 c each penetrating through the second insulating layer 111 b and the third insulating layer 111 c.
- the first wiring layer 112 a and the second wiring layer 112 b of the first core member 110 may be disposed on a level between an active surface and an inactive surface of a first semiconductor chip 120 .
- the first core member 110 may be formed at a thickness corresponding to that of the first semiconductor chip 120 , and the first wiring layer 112 a and the second wiring layer 112 b formed in the first core member 110 may thus be disposed on a level between the active surface and the inactive surface of the first semiconductor chip 120 .
- a thickness of each of the wiring layers 112 a , 112 b , 112 c , and 112 d may be greater than that of the redistribution layer 142 .
- a description of other configurations, for example, a second structure 200 D overlaps the description provided above and is thus omitted.
- FIG. 20 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- a first core member 110 of a first structure 100 E may include a first insulating layer 111 a in contact with a connection member 140 , a first wiring layer 112 a in contact with the connection member 140 and embedded in the first insulating layer 111 a , a second wiring layer 112 b disposed on the other surface of the first insulating layer 111 a opposing one surface of the first insulating layer 111 a in which the first wiring layer 112 a is embedded, a second insulating layer 111 b disposed on the first insulating layer 111 a and covering the second wiring layer 112 b , and a third wiring layer 112 c disposed on the second insulating layer 111 b .
- the first to third wiring layers 112 a , 112 b , and 112 c may be electrically connected to first and second connection pads 120 P and 220 P.
- the first and second wiring layers 112 a and 112 b and the second and third wiring layers 112 b and 112 c may be electrically connected to each other through first and second vias 113 a and 113 b penetrating through the first and second insulating layers 111 a and 111 b , respectively.
- An upper surface of the first wiring layer 112 a of the first core member 110 may be disposed on a level below an upper surface of the first connection pad 120 P of a first semiconductor chip 120 .
- a distance between a redistribution layer 142 of the connection member 140 and the first wiring layer 112 a of the first core member 110 may be greater than that between the redistribution layer 142 of the connection member 140 and the first connection pad 120 P of the first semiconductor chip 120 .
- the reason is that the first wiring layer 112 a may be recessed into the first insulating layer 111 a .
- the second wiring layer 112 b of the first core member 110 may be disposed on a level between an active surface and an inactive surface of the first semiconductor chip 120 .
- a thickness of each of the wiring layers 112 a , 112 b , and 112 c may be greater than that of the redistribution layer 142 .
- FIG. 21 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- an insulating member 160 may be disposed between a first structure 100 F and a second structure 200 F.
- the insulating member 160 may be a non-conductive paste, a non-conductive film, or the like, including an insulating material.
- the insulating member 160 may cover at least portions of conductive bumps 228 . In this way, joint reliability between the first structure 100 F and the second structure 200 F may be improved. A description of other configurations overlaps that described above and is thus omitted.
- FIG. 22 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- a fan-out semiconductor package 300 G may be substantially the same as the fan-out semiconductor package 300 D according to another exemplary embodiment described above except that it further includes a plurality of passive components 181 and 182 .
- a first passive component 181 may be embedded in a first core member 110 of a first structure 100 G
- a second passive component 182 may be disposed in a first through-hole 110 H of the first core member 110 .
- the first and second passive components 181 and 182 may be any known passive components such as capacitors, inductors, beads, or the like, respectively, and may be the same as or different from each other.
- the first and second passive components 181 and 182 may be electrically connected to power pads, ground pads, or the like, of first and second connection pads 120 P and 220 P through a redistribution layer 142 .
- a passive component (not illustrated) may also be disposed in a second core member 210 of a second structure 200 G, if necessary. A description of other configurations overlaps that described above and is thus omitted.
- FIG. 23 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- a first structure 100 H and a second structure 200 H may be stacked in a package-on-chip form.
- a second semiconductor chip 220 may be mounted on a first structure 100 H through conductive bumps 228 , and a second encapsulant 230 may be formed in an underfill resin form on the first structure 100 H to fix the second semiconductor chip.
- a description of other configurations overlaps that described above and is thus omitted.
- FIG. 24 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package.
- a first structure 100 I and a second structure 200 I may be stacked in a package-on-package form, and a plurality of surface mounting components 295 may be mounted on the second structure 200 I.
- the surface mounting components 295 may be any known passive components such as capacitors, inductors, beads, or the like, or be various kinds of integrated circuits.
- the surface mounting components 295 may be the same as or different from each other.
- the surface mounting components 295 may be molded by a molding material 280 formed on the second structure 200 I.
- a second core member 210 of the second structure 200 I may further include vias 213 electrically connecting first and second wiring layers 212 a and 212 b in order to provide an electrical connection path between upper and lower portions, a backside wiring layer 232 may be formed on a second encapsulant 230 , and the backside wiring layer 232 may be electrically connected to the second wiring layer 212 b of the second core member 210 through backside vias 233 penetrating through at least portions of the second encapsulant 230 .
- the surface mounting components 295 may be mounted on the backside wiring layer 232 to be electrically connected to components of the first and second structures 1001 and 2001 . A description of other configurations overlaps that described above and is thus omitted.
- a fan-out semiconductor package capable of solving a time delay problem in spite of including a plurality of semiconductor chips and being thinned in spite of having improved performance may be provided.
Abstract
Description
- This application claims benefit of priority to Korean Patent Application No. 10-2017-0177955 filed on Dec. 22, 2017 in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety.
- The present disclosure relates to a fan-out semiconductor package having a package-on-package (POP) form or a package-on-chip (POC) form.
- Recently, in the semiconductor package field, die stack technology, for increasing capacity, has been continuously developed, and a speed of a device has also continuously increased in order to improve performance of a set. In a die stack package structure that is currently commonly used in products on the market, dies are stacked on a substrate to be offset from each other, and the respective dies are electrically connected to the substrate using wire bonding. In this case, wire lengths of the dies stacked in a vertical direction are different from each other, and a time delay problem may occur in transmitting signals.
- An aspect of the present disclosure may provide a fan-out semiconductor package capable of solving a time delay problem while including a plurality of semiconductor chips, maintaining a thin profile, and providing improved performance.
- According to an aspect of the present disclosure, a fan-out semiconductor package may be provided in which a plurality of semiconductor chips are disposed in a package-on-package form or a package-on-chip form. The respective semiconductor chips are disposed so that active surfaces thereof face each other, and signal transmission times from the respective semiconductor chips to a redistribution layer redistributing the respective semiconductor chips are implemented to be substantially the same as each other.
- According to an aspect of the present disclosure, a fan-out semiconductor package may include first and second structures. The first structure includes a first semiconductor chip having a first active surface having first connection pads disposed thereon and a first inactive surface opposing the first active surface, a first encapsulant encapsulating at least portions of the first semiconductor chip, and a connection member disposed on the first encapsulant and the first active surface and including a redistribution layer electrically connected to the first connection pads. The second structure includes a second semiconductor chip having a second active surface having second connection pads disposed thereon and a second inactive surface opposing the second active surface, a second encapsulant encapsulating at least portions of the second semiconductor chip, and conductive bumps disposed on the second active surface and electrically connected to the second connection pads. The first and second structures are disposed so that the first and second active surfaces face each other, the conductive bumps are electrically connected to the redistribution layer, and the first and second connection pads are electrically connected to each other through the redistribution layer in a signal manner. In one example, a signal transmission time from the first connection pad to one point of the redistribution layer and a signal transmission time from the second connection pad to the one point are substantially the same as each other.
- According to another aspect of the present disclosure, a fan-out semiconductor package may include first and second structures. The first structure includes a first semiconductor chip having a first active surface having first and second signal pads disposed thereon and a first inactive surface opposing the first active surface, a first wiring member disposed on the first active surface of the first semiconductor chip and including a first wiring layer redistributing the first and second signal pads, a first encapsulant encapsulating at least portions of the first semiconductor chip and the first wiring member, and a connection member disposed on the first encapsulant and the first wiring member and including a redistribution layer electrically connected to the first and second signal pads through the first wiring layer, the first and second signal pads being spaced apart from each other. The second structure includes a second semiconductor chip having a second active surface having third and fourth signal pads disposed thereon and a second inactive surface opposing the second active surface, a second wiring member disposed on the second active surface of the second semiconductor chip and including a second wiring layer redistributing the third and fourth signal pads, a second encapsulant encapsulating at least portions of the second semiconductor chip and the second wiring member, and conductive bumps disposed on the second active surface and electrically connected to the third and fourth signal pads through the second wiring layer, the third and fourth signal pads being spaced apart from each other. The first and second structures are disposed so that the first and second active surfaces face each other, the conductive bumps are electrically connected to the redistribution layer, the first and fourth signal pads face each other in a cross section, the second and third signal pads face each other in the cross section, the first and third signal pads are redistributed to be connected to each other in a signal manner, and the second and fourth signal pads are redistributed to be connected to each other in a signal manner.
- According to a further aspect of the present disclosure, a fan-out semiconductor package includes first and second semiconductor chips, a redistribution layer, and conductive bumps. The first semiconductor chip has a first active surface having first connection pads disposed thereon. The redistribution layer is disposed on the first active surface of the first semiconductor chip and is electrically connected to the first connection pads. The second semiconductor chip has a second active surface having second connection pads disposed thereon, and the second semiconductor chip is disposed to have the second active surface facing and overlapping with the first active surface of the first semiconductor chip. The conductive bumps are disposed on the second active surface and electrically connect second connection pads to the redistribution layer. The redistribution layer includes a resistance pattern in a conductive line electrically connected to at least one of the first and second connection pads.
- The above and other aspects, features, and advantages of the present disclosure will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
-
FIG. 1 is a schematic block diagram illustrating an example of an electronic device system; -
FIG. 2 is a schematic perspective view illustrating an example of an electronic device; -
FIGS. 3A and 3B are schematic cross-sectional views illustrating a fan-in semiconductor package before and after being packaged; -
FIG. 4 is schematic cross-sectional views illustrating a packaging process of a fan-in semiconductor package; -
FIG. 5 is a schematic cross-sectional view illustrating a fan-in semiconductor package mounted on a ball grid array (BGA) substrate and ultimately mounted on a mainboard of an electronic device; -
FIG. 6 is a schematic cross-sectional view illustrating a fan-in semiconductor package embedded in a BGA substrate and ultimately mounted on a mainboard of an electronic device; -
FIG. 7 is a schematic cross-sectional view illustrating a fan-out semiconductor package; -
FIG. 8 is a schematic cross-sectional view illustrating a fan-out semiconductor package mounted on a mainboard of an electronic device; -
FIG. 9 is a schematic cross-sectional view illustrating an example of a fan-out semiconductor package; -
FIGS. 10A and 10B are schematic enlarged cross-sectional views illustrating region Q of the fan-out semiconductor package ofFIG. 9 ; -
FIG. 11 is a schematic view illustrating signal transmission paths of each of first and second semiconductor chips of the fan-out semiconductor package ofFIG. 9 ; -
FIG. 12 is a schematic view illustrating signal transmission times of the first and second semiconductor chips having the signal transmission paths ofFIG. 11 ; -
FIGS. 13A through 13C are schematic views illustrating various examples of a resistance pattern included in a redistribution layer of a connection member of the fan-out semiconductor package ofFIG. 9 ; -
FIG. 14 is a schematic view illustrating signal transmission paths of each of first and second semiconductor chips of the fan-out semiconductor package to which the resistance patterns ofFIGS. 13A through 13C are applied; -
FIG. 15 is a schematic view illustrating signal transmission times of the first and second semiconductor chips having the signal transmission paths ofFIG. 14 ; -
FIG. 16A is schematic views illustrating process steps of a method of manufacturing a first structure of the fan-out semiconductor package ofFIG. 9 ; -
FIG. 16B is schematic views illustrating process steps of a method of manufacturing a second structure of the fan-out semiconductor package ofFIG. 9 ; -
FIG. 17 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package; -
FIG. 18 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package; -
FIG. 19 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package; -
FIG. 20 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package; -
FIG. 21 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package; -
FIG. 22 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package; -
FIG. 23 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package; and -
FIG. 24 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package. - Hereinafter, exemplary embodiments will be described with reference to the accompanying drawings. In the accompanying drawings, shapes, sizes, and the like, of components may be exaggerated or shortened for clarity.
- Herein, a lower side, a lower portion, a lower surface, and the like, are used to refer to a direction toward a mounting surface of the fan-out semiconductor package in relation to cross sections of the drawings, while an upper side, an upper portion, an upper surface, and the like, are used to refer to an opposite direction to the lower direction. However, these directions are defined for convenience of explanation, and the claims are not particularly limited by the directions defined as described above.
- The meaning of a “connection” of a component to another component in the description includes an indirect connection through an adhesive layer as well as a direct connection between two components. In addition, “electrically connected” conceptually includes a physical connection and a physical disconnection that nonetheless provides electrical connectivity. It can be understood that when an element is referred to with terms such as “first” and “second”, the element is not limited thereby. The terms first and second may be used for a purpose of distinguishing one element from other elements, and may not limit the sequence or importance of the elements. In some cases, a first element may be referred to as a second element without departing from the scope of the description or claims set forth herein. Similarly, a second element may also be referred to as a first element.
- The term “an exemplary embodiment” used herein does not refer to the same exemplary embodiment, and is provided to emphasize a particular feature or characteristic different from that of another exemplary embodiment. However, exemplary embodiments provided herein are considered to be able to be implemented by being combined in whole or in part one with one another. For example, one element described in a particular exemplary embodiment, even if it is not described in another exemplary embodiment, may be understood as a description related to another exemplary embodiment, unless an opposite or contradictory description is provided therein.
- Terms used herein are used only in order to describe an exemplary embodiment rather than limit the disclosure. In this case, singular forms include plural forms unless interpreted otherwise in context.
- Electronic Device
-
FIG. 1 is a schematic block diagram illustrating an example of an electronic device system. - Referring to
FIG. 1 , anelectronic device 1000 may accommodate amainboard 1010 therein. Themainboard 1010 or motherboard may include chip relatedcomponents 1020, network relatedcomponents 1030,other components 1040, and the like, physically or electrically connected thereto. These components may be connected to others to be described below acrossvarious signal lines 1090. - The chip related
components 1020 or chipset may include a memory chip such as a volatile memory (for example, a dynamic random access memory (DRAM)), a non-volatile memory (for example, a read only memory (ROM)), a flash memory, or the like; an application processor chip such as a central processor (for example, a central processing unit (CPU)), a graphics processor (for example, a graphics processing unit (GPU)), a digital signal processor, a cryptographic processor, a microprocessor, a microcontroller, or the like; and a logic chip such as an analog-to-digital (ADC) converter, an application-specific integrated circuit (ASIC), or the like. However, the chip relatedcomponents 1020 are not limited thereto, but may also include other types of chip related components. In addition, the chip relatedcomponents 1020 may be combined with each other. - The network related
components 1030 may include components for supporting communications using various protocols such as wireless fidelity (Wi-Fi) (Institute of Electrical And Electronics Engineers (IEEE) 802.11 family, or the like), worldwide interoperability for microwave access (WiMAX) (IEEE 802.16 family, or the like), IEEE 802.20, long term evolution (LTE), evolution data only (Ev-DO), high speed packet access+(HSPA+), high speed downlink packet access+(HSDPA+), high speed uplink packet access+(HSUPA+), enhanced data GSM environment (EDGE), global system for mobile communications (GSM), global positioning system (GPS), general packet radio service (GPRS), code division multiple access (CDMA), time division multiple access (TDMA), digital enhanced cordless telecommunications (DECT), Bluetooth, 3G, 4G, and 5G protocols, and any other wireless and wired protocols, designated after the abovementioned protocols. However, the network relatedcomponents 1030 are not limited thereto, but may also include components supporting a variety of other wireless or wired standards or protocols. In addition, the network relatedcomponents 1030 may be combined with each other, together with the chip relatedcomponents 1020 described above. -
Other components 1040 may include a high frequency inductor, a ferrite inductor, a power inductor, ferrite beads, a low temperature co-fired ceramic (LTCC), an electromagnetic interference (EMI) filter, a multilayer ceramic capacitor (MLCC), or the like. However,other components 1040 are not limited thereto, but may also include passive components used for various other purposes, or the like. In addition,other components 1040 may be combined with each other, together with the chip relatedcomponents 1020 or the network relatedcomponents 1030 described above. - Depending on a type of the
electronic device 1000, theelectronic device 1000 may include other components that may or may not be physically or electrically connected to themainboard 1010. These other components may include, for example, acamera module 1050, anantenna 1060, adisplay device 1070, abattery 1080, an audio codec (not illustrated), a video codec (not illustrated), a power amplifier (not illustrated), a compass (not illustrated), an accelerometer (not illustrated), a gyroscope (not illustrated), a speaker (not illustrated), a mass storage unit (for example, a hard disk drive) (not illustrated), a compact disk (CD) drive (not illustrated), a digital versatile disk (DVD) drive (not illustrated), or the like. However, these other components are not limited thereto, but may also include other components used for various purposes depending on a type ofelectronic device 1000, or the like. - The
electronic device 1000 may be a smartphone, a personal digital assistant (PDA), a digital video camera, a digital still camera, a network system, a computer, a monitor, a tablet PC, a laptop PC, a netbook PC, a television, a video game machine, a smartwatch, an automotive component, or the like. However, theelectronic device 1000 is not limited thereto, but may be any other electronic device processing data. -
FIG. 2 is a schematic perspective view illustrating an example of an electronic device. - Referring to
FIG. 2 , a semiconductor package may be used for various purposes in the variouselectronic devices 1000 as described above. For example, amotherboard 1110 may be accommodated in abody 1101 of asmartphone 1100, and variouselectronic components 1120 may be physically or electrically connected to themotherboard 1110. In addition, other components that may or may not be physically or electrically connected to themainboard 1010, such as acamera module 1130, may be accommodated in thebody 1101. Some of theelectronic components 1120 may be the chip related components, for example, asemiconductor package 1121, but are not limited thereto. The electronic device is not necessarily limited to thesmartphone 1100, but may be other electronic devices as described above. - Semiconductor Package
- Generally, numerous fine electrical circuits are integrated in a semiconductor chip. However, the semiconductor chip may not serve as a finished semiconductor product in itself, and may be damaged due to external physical or chemical impacts. Therefore, the semiconductor chip itself may not be used by itself, but may be packaged and used in an electronic device, or the like, in a packaged state.
- Additionally, semiconductor packaging can be used to compensate for the existence of a difference in a circuit width between the semiconductor chip and a mainboard of the electronic device in terms of electrical connections. In detail, a size of connection pads of the semiconductor chip and an interval between the connection pads of the semiconductor chip are very fine, but a size of component mounting pads of the mainboard used in the electronic device and an interval between the component mounting pads of the mainboard are commonly significantly larger than those of the semiconductor chip. Therefore, it may be difficult to directly mount the semiconductor chip on the mainboard, and packaging technology for buffering a difference in a circuit width between the semiconductor chip and the mainboard is advantageously used.
- A semiconductor package manufactured by the packaging technology may be classified as a fan-in semiconductor package or a fan-out semiconductor package depending on a structure and a purpose thereof.
- The fan-in semiconductor package and the fan-out semiconductor package will hereinafter be described in detail with reference to the drawings.
- Fan-in Semiconductor Package
-
FIGS. 3A and 3B are schematic cross-sectional views illustrating a fan-in semiconductor package before and after being packaged. -
FIG. 4 is schematic cross-sectional views illustrating a packaging process of a fan-in semiconductor package. - Referring to
FIGS. 3A, 3B, and 4 , asemiconductor chip 2220 may be, for example, an integrated circuit (IC) in a bare state, including abody 2221 including silicon (Si), germanium (Ge), gallium arsenide (GaAs), or the like,connection pads 2222 formed on one surface of thebody 2221 and including a conductive material such as aluminum (Al), or the like, and apassivation layer 2223 such as an oxide film, a nitride film, or the like, formed on one surface of thebody 2221 and covering at least portions of theconnection pads 2222. In this case, since theconnection pads 2222 may be significantly small, it may be difficult to mount the integrated circuit (IC) on an intermediate level printed circuit board (PCB) as well as on the mainboard of the electronic device, or the like. - Therefore, a
connection member 2240 may be formed depending on a size of thesemiconductor chip 2220 on thesemiconductor chip 2220 in order to redistribute theconnection pads 2222. Theconnection member 2240 may be formed by forming an insulatinglayer 2241 on thesemiconductor chip 2220 using an insulating material such as a photoimageable dielectric (PID) resin, forming viaholes 2243 h opening theconnection pads 2222, and then formingwiring patterns 2242 andvias 2243. Then, apassivation layer 2250 protecting theconnection member 2240 may be formed, anopening 2251 may be formed, and anunderbump metal layer 2260, or the like, may be formed. That is, a fan-insemiconductor package 2200 including, for example, thesemiconductor chip 2220, theconnection member 2240, thepassivation layer 2250, and theunderbump metal layer 2260 may be manufactured through a series of processes. - As described above, the fan-in semiconductor package may have a package form in which all of the connection pads, for example, input/output (I/O) terminals, of the semiconductor chip are disposed inside a footprint or area of overlap with the semiconductor chip, and may have excellent electrical characteristics and be produced at a low cost. Therefore, many elements mounted in smartphones have been manufactured in a fan-in semiconductor package form. In detail, many elements mounted in smartphones have been developed to implement a rapid signal transfer while having a compact size.
- However, since all I/O terminals are disposed inside the footprint or area of overlap with the semiconductor chip in the fan-in semiconductor package, the fan-in semiconductor package has significant spatial limitations. Therefore, it is difficult to apply this structure to a semiconductor chip having a large number of I/O terminals or a semiconductor chip having a compact size. In addition, due to the disadvantage described above, the fan-in semiconductor package may not be directly mounted and used on the mainboard of the electronic device. The reason is that even in a case in which a size of the I/O terminals of the semiconductor chip and an interval between the I/O terminals of the semiconductor chip are increased by a redistribution process, the size of the I/O terminals of the semiconductor chip and the interval between the I/O terminals of the semiconductor chip may not be sufficient to directly mount the fan-in semiconductor package on the mainboard of the electronic device.
-
FIG. 5 is a schematic cross-sectional view illustrating a fan-in semiconductor package mounted on a ball grid array (BGA) substrate and ultimately mounted on a mainboard of an electronic device. -
FIG. 6 is a schematic cross-sectional view illustrating a fan-in semiconductor package embedded in a BGA substrate and ultimately mounted on a mainboard of an electronic device. - Referring to
FIGS. 5 and 6 , in a fan-insemiconductor package 2200,connection pads 2222, that is, I/O terminals, of asemiconductor chip 2220 may be redistributed through aBGA substrate 2301, and the fan-insemiconductor package 2200 may be ultimately mounted on amainboard 2500 of an electronic device in a state in which it is mounted on theBGA substrate 2301. In this case,solder balls 2270, and the like, may be fixed by anunderfill resin 2280, or the like, and an outer side of thesemiconductor chip 2220 may be covered with amolding material 2290, or the like. Alternatively, a fan-insemiconductor package 2200 may be embedded in aseparate BGA substrate 2302,connection pads 2222, that is, I/O terminals, of thesemiconductor chip 2220 may be redistributed by theBGA substrate 2302 in a state in which the fan-insemiconductor package 2200 is embedded in theBGA substrate 2302, and the fan-insemiconductor package 2200 may be ultimately mounted on amainboard 2500 of an electronic device. - As described above, it may be difficult to directly mount and use the fan-in semiconductor package on the mainboard of the electronic device. Therefore, the fan-in semiconductor package may be mounted on the separate BGA substrate and be then mounted on the mainboard of the electronic device through a packaging process or may be mounted and used on the mainboard of the electronic device in a state in which it is embedded in the BGA substrate.
- Fan-Out Semiconductor Package
-
FIG. 7 is a schematic cross-sectional view illustrating a fan-out semiconductor package. - Referring to
FIG. 7 , in a fan-outsemiconductor package 2100, for example, an outer side of asemiconductor chip 2120 may be protected by anencapsulant 2130, andconnection pads 2122 of thesemiconductor chip 2120 may be redistributed outwardly of the footprint or area of overlap with thesemiconductor chip 2120 by aconnection member 2140. In this case, apassivation layer 2150 may further be formed on theconnection member 2140, and anunderbump metal layer 2160 may further be formed in openings of thepassivation layer 2150.Solder balls 2170 may further be formed on theunderbump metal layer 2160. Thesemiconductor chip 2120 may be an integrated circuit (IC) including abody 2121, theconnection pads 2122, a passivation layer (not illustrated), and the like. Theconnection member 2140 may include an insulatinglayer 2141,redistribution layers 2142 formed on the insulatinglayer 2141, and vias 2143 electrically connecting theconnection pads 2122 and theredistribution layers 2142 to each other. - As described above, the fan-out semiconductor package may have a form in which I/O terminals of the semiconductor chip are redistributed and disposed outwardly of the footprint or area of overlap with the semiconductor chip through the connection member formed on the semiconductor chip. As described above, in the fan-in semiconductor package, all I/O terminals of the semiconductor chip need to be disposed inside the footprint of the semiconductor chip. Therefore, when a size of the semiconductor chip is decreased, a size and a pitch of balls need to be decreased, such that a standardized ball layout may not readily be used in the fan-in semiconductor package. On the other hand, the fan-out semiconductor package has the form in which the I/O terminals of the semiconductor chip are redistributed and disposed outwardly from the footprint of the semiconductor chip through the connection member formed on the semiconductor chip as described above. Therefore, even in a case in which a size of the semiconductor chip is decreased, a standardized ball layout may be used in the fan-out semiconductor package as it is, such that the fan-out semiconductor package may be mounted on the mainboard of the electronic device without using a separate BGA substrate, as described below.
-
FIG. 8 is a schematic cross-sectional view illustrating a fan-out semiconductor package mounted on a mainboard of an electronic device. - Referring to
FIG. 8 , a fan-outsemiconductor package 2100 may be mounted on amainboard 2500 of an electronic device throughsolder balls 2170, or the like. That is, as described above, the fan-outsemiconductor package 2100 includes theconnection member 2140 formed on thesemiconductor chip 2120 and capable of redistributing theconnection pads 2122 to a fan-out region that is outside of a size of thesemiconductor chip 2120, such that the standardized ball layout may be used in the fan-outsemiconductor package 2100 as it is. As a result, the fan-outsemiconductor package 2100 may be mounted on themainboard 2500 of the electronic device without using a separate BGA substrate, or the like. - As described above, since the fan-out semiconductor package may be mounted on the mainboard of the electronic device without using the separate BGA substrate, the fan-out semiconductor package may be implemented at a thickness lower than that of the fan-in semiconductor package using the BGA substrate. Therefore, the fan-out semiconductor package may be miniaturized and thinned. In addition, the fan-out semiconductor package has excellent thermal characteristics and electrical characteristics, such that it is particularly appropriate for a mobile product. Therefore, the fan-out semiconductor package may be implemented in a form more compact than that of a general package-on-package (POP) type using a printed circuit board (PCB), and may solve a problem due to the occurrence of a warpage phenomenon.
- Meanwhile, the fan-out semiconductor package refers to package technology for mounting the semiconductor chip on the mainboard of the electronic device, or the like, as described above, and protecting the semiconductor chip from external impacts, and is a concept different from that of a printed circuit board (PCB) such as a BGA substrate, or the like, having a scale, a purpose, and the like, different from those of the fan-out semiconductor package, and having the fan-in semiconductor package embedded therein.
- A fan-out semiconductor package capable of solving a time delay problem in spite of including a plurality of semiconductor chips and being thinned in spite of having improved performance will hereinafter be described with reference to the drawings.
-
FIG. 9 is a schematic cross-sectional view illustrating an example of a fan-out semiconductor package. -
FIGS. 10A and 10B are schematic enlarged cross-sectional views illustrating region Q of the fan-out semiconductor package ofFIG. 9 . - Referring to
FIGS. 9 and 10 , a fan-outsemiconductor package 300A according to an exemplary embodiment may include afirst structure 100A including afirst semiconductor chip 120 having a first active surface includingfirst connection pads 120P disposed thereon and a first inactive surface opposing the first active surface, afirst encapsulant 130 encapsulating at least portions of thefirst semiconductor chip 120, and aconnection member 140 disposed on thefirst encapsulant 130 and the first active surface and including aredistribution layer 142 electrically connected to thefirst connection pads 120P; and asecond structure 200A including asecond semiconductor chip 220 having a second active surface havingsecond connection pads 220P disposed thereon and a second inactive surface opposing the second active surface, asecond encapsulant 230 encapsulating at least portions of thesecond semiconductor chip 220, andconductive bumps 228 disposed on thesecond encapsulant 230 and the second active surface and electrically connected to thesecond connection pads 220P. Thefirst structure 100A and thesecond structure 200A may be disposed so that the first and second active surfaces face each other, and theconductive bumps 228 may be electrically connected to theredistribution layer 142. - Recently, in a semiconductor package field, die stack technology for increasing a capacity has been continuously developed, and a speed of a device has also continuously increased in order to improve performance of a set. In a die stack package structure that is currently used commonly in the market, dies are stacked on a substrate to be offset from each other, and the respective dies are electrically connected to the substrate using wire bonding. In this case, wire lengths of the dies stacked at different positions in a vertical direction (e.g., a direction orthogonal to a surface of the substrate on which the dies are mounted) are different from each other, and a time delay problem thus occurs in transmitting signals. Particularly, when memories such as DRAMs are stacked, pads of the respective memories are implemented by center pads in order to increase a net die, and are then redistributed to edge pads by an aluminum (Al) redistribution layer (RDL). However, the aluminum redistribution layer has electrical conductivity relatively lower than that of a copper redistribution layer (Cu RDL), and a larger time delay in transmitting signals thus occurs. Therefore, there is a limitation in applying the aluminum redistribution layer to the DRAM, or the like, requiring a high speed.
- On the other hand, in the fan-out
semiconductor package 300A according to the exemplary embodiment, the first andsecond semiconductor chips first semiconductor chip 120 and thesecond semiconductor chip 220 may be disposed so that the first and second active surfaces face each other. In addition, the first andsecond semiconductors redistribution layer 142 and theconductive bumps 228 rather than wiring bonding, in a signal manner. Particularly, the first andsecond connection pads redistribution layer 142 with each other to be connected to each other at any one point of theredistribution layer 142 in a signal manner. In this case, the first andsecond connection pads first connection pad 120P to one point of theredistribution layer 142 and a signal transmission time from thesecond connection pad 220P to one point of theredistribution layer 142 are substantially the same as each other, as illustratively shown inFIGS. 11 and 12 . For example, a signal transmission distance P1 from thefirst connection pad 120P to one point of theredistribution layer 142 and a signal transmission distance P2 from thesecond connection pad 220P to one point of theredistribution layer 142 may be implemented to be substantially the same as each other to solve a time delay problem, as illustratively shown inFIGS. 10A, 11, and 12 . In addition, even though the fan-outsemiconductor package 300A has a package-on-package form, the fan-outsemiconductor package 300A may be thinned as much as possible, and a signal path between the first andsecond semiconductor chips - Meanwhile, the
first structure 100A may further include afirst wiring member 125 disposed between the first active surface and theconnection member 140 and including afirst wiring layer 122 redistributing thefirst connection pads 120P to electrically connect thefirst connection pads 120P to theredistribution layer 142. Similarly, thesecond structure 200A may further include asecond wiring member 225 disposed between the second active surface and theconductive bumps 228 and including asecond wiring layer 222 redistributing thesecond connection pads 220P to electrically connect thesecond connection pads 220P to theconductive bumps 228. In this way, the first andsecond connection pads semiconductor package 300A according to the exemplary embodiment, the first andsecond connection pads connection member 140 of thefirst structure 100A and theconductive bumps 228 of thesecond structure 200A rather than wire bonding, a path of redistribution through the first andsecond wiring members - Meanwhile, the first and
second semiconductor chips first connection pads 120P may include first and second signal pads 120P1 and 120P2 spaced apart from each other, and thesecond connection pads 220P may include third and fourth signal pads 220P1 and 220P2 spaced apart from each other. In addition, the first and fourth signal pads 120P1 and 220P2 may face each other, and the second and third signal pads 120P2 and 220P1 may face each other, in a cross section, but the first and third signal pads 120P1 and 220P1 may be redistributed by a redistribution process to be connected to each other in a signal manner, and the second and fourth signal pads 120P2 and 220P2 may be redistributed by the redistribution process to be connected to each other in a signal manner. For example, when the first andsecond semiconductor chips conductive bumps 228 and theredistribution layer 142 in a signal manner, the first and third signal pads 120P1 and 220P1 and the second and fourth signal pads 120P2 and 220P2 may be connected to each other, respectively, in a signal manner in a cross form. In this way, the redistribution layer may be easily applied to the memory such as the DRAM requiring a high speed. - Meanwhile, the
first structure 100A may further include afirst core member 110 having a first through-hole 110H in which thefirst semiconductor chip 120 is accommodated. In this case, thefirst encapsulant 130 may cover at least portions of thefirst core member 110 and the first inactive surface of thefirst semiconductor chip 120, and fill at least portions of the first through-hole 110H. Thefirst core member 110 may include a plurality ofwiring layers second connection pads redistribution layer 142 and one layer ormore vias 113 electrically connecting the plurality ofwiring layers first core member 110 may include an insulatinglayer 111, afirst wiring layer 112 a disposed on a first surface of the insulatinglayer 111, asecond wiring layer 112 b disposed on a second surface of the insulatinglayer 111, and vias 113 penetrating through the insulatinglayer 111 and electrically connecting the first and second wiring layers 112 a and 112 b to each other. The first and second wiring layers 112 a and 112 b may be electrically connected to the first andsecond connection pads first core member 110 may solve a warpage problem of thefirst structure 100A, reduce non-uniformity of an encapsulation thickness of thefirst encapsulant 130, and particularly, allow an electrical path for a connection between upper and lower portions to be easily introduced. In addition, the first andsecond connection pads second structure 200A may further include asecond core member 210 having a second through-hole 210H in which thesecond semiconductor chip 220 is accommodated. In this case, thesecond encapsulant 230 may cover at least portions of thesecond core member 210 and the second inactive surface of thesecond semiconductor chip 220, and fill at least portions of the second through-hole 210H. - The
first encapsulant 130 may be formed on the other surface of thefirst core member 110 opposing one surface of thefirst core member 110 on which theconnection member 140 is disposed, and may haveopenings 130 h exposing at least portions of thesecond wiring layer 112 b. In this case,electrical connection structures 150 electrically connected to thesecond wiring layer 112 b exposed by theopenings 130 h may be disposed in theopenings 130 h. In this way, the fan-outsemiconductor package 300A may be mounted on an external component such as the mainboard of the electronic device, or the like, and the first andsecond connection pads - The respective components included in the fan-out
semiconductor package 300A according to the exemplary embodiment will hereinafter be described in more detail. - The
first core member 110, which is an additional component, may improve rigidity of thefirst structure 100A depending on the materials used, and serve to secure uniformity of a thickness of thefirst encapsulant 130. When the wiring layers 112 a and 112 b, thevias 113, and the like, are formed in thefirst core member 110, an electrical connection path between upper and lower portions of thefirst structure 100A may be provided. Thefirst core member 110 may have the first through-hole 110H. Thefirst semiconductor chip 120 may be disposed in the first through-hole 110H to be spaced apart from thefirst core member 110 by a predetermined distance. Side surfaces of thefirst semiconductor chip 120 may be surrounded by thefirst core member 110. Thefirst core member 110 may include the insulatinglayer 111, thefirst wiring layer 112 a disposed on an upper surface of the insulatinglayer 111, thesecond wiring layer 112 b disposed on a lower surface of the insulatinglayer 111, and thevias 113 penetrating through the insulatinglayer 111 and electrically connecting the first and second wiring layers 112 a and 112 b to each other. - For example, a material including an inorganic filler and an insulating resin may be used as a material of the insulating
layer 111. For example, a thermosetting resin such as an epoxy resin, a thermoplastic resin such as a polyimide resin, or a resin including a reinforcing material such as an inorganic filler, for example, silica, alumina, or the like, more specifically, Ajinomoto Build up Film (ABF), FR-4, Bismaleimide Triazine (BT), a photoimageable dielectric (PID) resin, or the like, may be used. Alternatively, a material in which a thermosetting resin or a thermoplastic resin is impregnated together with an inorganic filler in a core material such as a glass fiber (or a glass cloth or a glass fabric), for example, prepreg, or the like, may also be used. In this case, excellent rigidity of thefirst structure 100A may be maintained, such that thefirst core member 110 may be used as a kind of support member. - The wiring layers 112 a and 112 b may include a conductive material such as copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), titanium (Ti), or alloys thereof. The wiring layers 112 a and 112 b may perform various functions depending on designs of corresponding layers. For example, the wiring layers 112 a and 112 b may include ground (GND) patterns, power (PWR) patterns, signal (S) patterns, and the like. Here, the signal (S) patterns may include various signals except for the ground (GND) patterns, the power (PWR) patterns, and the like, such as data signals, and the like. In addition, the wiring layers 112 a and 112 b may include pad patterns for vias, pad patterns for electrical connection structures, and the like. Thicknesses of the wiring layers 112 a and 112 b of the
first core member 110 may be greater than that of theredistribution layer 142 of theconnection member 140. The reason is that thefirst core member 110 may have a thickness similar to that of thefirst semiconductor chip 120, while theconnection member 140 is commonly designed to remain thin. - The
vias 113 may penetrate through the insulatinglayer 111 and electrically connect thefirst wiring layer 112 a and thesecond wiring layer 112 b to each other. A material of each of thevias 113 may be a conductive material. Each of thevias 113 may be completely filled with the conductive material, or the conductive material may be formed along a wall of each of via holes. Each of thevias 113 may be a through-via completely penetrating through the insulatinglayer 111, and may have a cylindrical shape or an hourglass shape, but is not limited thereto. - The
first semiconductor chip 120 may be an integrated circuit (IC) that includes several hundred to several million or more elements integrated in a single chip. Thefirst semiconductor chip 120 may be formed on the basis of an active wafer. In this case, a base material of a body may be silicon (Si), germanium (Ge), gallium arsenide (GaAs), or the like. Various circuits may be formed in the body. Thefirst connection pads 120P may electrically connect thefirst semiconductor chip 120 to other components, and a conductive material such as aluminum (Al), or the like, may be used as a material of each of thefirst connection pads 120P. An active surface of thefirst semiconductor chip 120 refers to a surface of thefirst semiconductor chip 120 on which thefirst connection pads 120P are disposed, and an inactive surface of thefirst semiconductor chip 120 refers to a surface of thefirst semiconductor chip 120 opposing the active surface. A passivation layer (not illustrated) covering at least portions of thefirst connection pads 120P may be formed on the body of thefirst semiconductor chip 120, if necessary. The passivation layer (not illustrated) may be an oxide film, a nitride film, or the like, or be a double layer of an oxide layer and a nitride layer. An insulating layer (not illustrated), and the like, may also be further disposed in other required positions. Thefirst semiconductor chip 120 may be a memory chip such as a volatile memory (such as a DRAM), a non-volatile memory (such as a ROM), a flash memory, or the like. However, thefirst semiconductor chip 120 is not limited thereto, but may also be another kind of chip. - The
first wiring member 125 may primarily redistribute thefirst connection pads 120P of thefirst semiconductor chip 120. Thefirst wiring member 125 may include first insulatinglayers 121 including photosensitive polyimide (PSPI), or the like, the first wiring layers 122 formed on the first insulatinglayers 121 and including aluminum (Al), copper (Cu), or the like, andfirst vias 123 formed in the first insulatinglayers 121, electrically connecting thefirst connection pads 120P and the first wiring layers 122 to each other, and including aluminum (Al), copper (Cu), or the like. The exposedfirst wiring layer 122 may be connected tovias 143 of theconnection member 140, and may be electrically connected to theredistribution layer 142 of theconnection member 140 through thevias 143. - The
first encapsulant 130 may protect thefirst semiconductor chip 120. An encapsulation form of thefirst encapsulant 130 is not particularly limited, but may be a form in which thefirst encapsulant 130 surrounds at least portions of thefirst semiconductor chip 120. In this case, thefirst encapsulant 130 may cover thefirst core member 110 and the inactive surface of thefirst semiconductor chip 120, and fill at least portions of the first through-hole 110H. A certain material of thefirst encapsulant 130 is not particularly limited, but may be, for example, an insulating material. For example, thefirst encapsulant 130 may include ABF including an insulating resin and an inorganic filler. However, the material of thefirst encapsulant 130 is not limited thereto, but may also be a photoimageable encapsulant (PIE). - The
connection member 140 may substantially redistribute the first andsecond connection pads second connection pads connection member 140, and may be physically or electrically externally connected through theelectrical connection structures 150 depending on the functions. Theconnection member 140 may include insulatinglayers 141, the redistribution layers 142 formed on the insulatinglayers 141, and thevias 143 formed in the insulatinglayers 141 and electrically connecting the redistribution layers 142 to thefirst wiring layer 112 a and thefirst connection pads 120P. Theconnection member 140 may include a larger number of insulating layers, redistribution layers, and vias, if necessary. - A material of each of the insulating
layers 141 may be an insulating material. In this case, a photosensitive insulating material such as a PID resin may also be used as the insulating material. This case may be advantageous in forming fine patterns. - The redistribution layers 142 may include a conductive material such as copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), titanium (Ti), or alloys thereof. The redistribution layers 142 may perform various functions depending on designs of corresponding layers. For example, the redistribution layers 142 may include ground (GND) patterns, power (PWR) patterns, signal (S) patterns, and the like. Here, the signal (S) patterns may include various signals except for the ground (GND) patterns, the power (PWR) patterns, and the like, such as data signals, and the like. In addition, the redistribution layers 142 may include pad patterns for vias, pad patterns for electrical connection structures, and the like.
- The
vias 143 may electrically connect thefirst connection pads 120P, the redistribution layers 142, thefirst wiring layer 112 a, and the like, formed on different layers to each other, resulting in an electrical path in thefirst structure 100A. A material of each of thevias 143 may be a conductive material such as copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), titanium (Ti), or alloys thereof. Each of thevias 143 may be completely filled with the conductive material, or the conductive material may also be formed along a wall of each of the vias. In addition, each of thevias 143 may have any shape known in the related art such as a tapered shape. - The
electrical connection structures 150 may be additionally configured to physically or electrically externally connect the fan-outsemiconductor package 300A. For example, the fan-outsemiconductor package 300A may be mounted on the mainboard of the electronic device, or the like, through theelectrical connection structures 150. Each of theelectrical connection structures 150 may be formed of a low melting point metal, for example, a solder such as an alloy including tin (Sn), more specifically, a tin (Sn)-aluminum (Al)-copper (Cu) alloy, or the like. However, this is only an example, and a material of each of theelectrical connection structures 150 is not particularly limited thereto. Each of theelectrical connection structures 150 may be a land, a ball, a pin, or the like. Theelectrical connection structures 150 may be formed as a multilayer or single layer structure. When theelectrical connection structures 150 are formed as a multilayer structure, theelectrical connection structures 150 may include a copper (Cu) pillar and a solder. When theelectrical connection structures 150 are formed as a single layer structure, theelectrical connection structures 150 may include a tin-silver solder or copper (Cu). However, this is only an example, and theelectrical connection structures 150 are not limited thereto. - The number, an interval, a disposition form, and the like, of
electrical connection structures 150 are not particularly limited, but may be sufficiently modified depending on design particulars. For example, theelectrical connection structures 150 may be provided in an amount of several tens to several millions according to the numbers of first andsecond connection pads - At least one of the
electrical connection structures 150 may be disposed in a fan-out region. The fan-out region refers to a region except for a region in which thefirst semiconductor chip 120 is disposed in, for example, thefirst structure 100A. That is, the fan-outsemiconductor package 300A according to the exemplary embodiment may be a fan-out package. The fan-out package may have excellent reliability as compared to a fan-in package, may implement a plurality of input/output (I/O) terminals, and may facilitate a 3D interconnection. In addition, as compared to a ball grid array (BGA) package, a land grid array (LGA) package, or the like, the fan-out package may be mounted on an electronic device without a separate board. Thus, the fan-out package may be manufactured to have a small thickness, and may have price competitiveness. - The
second core member 210 may maintain rigidity of thesecond structure 200A depending on the materials used, and serve to secure uniformity of a thickness of thesecond encapsulant 230. Thesecond semiconductor chip 220 may be disposed in the second through-hole 210H to be spaced apart from thesecond core member 210 by a predetermined distance. Side surfaces of thesecond semiconductor chip 220 may be surrounded by thesecond core member 210. Thesecond core member 210 may include an insulatinglayer 211. - For example, a material including an inorganic filler and an insulating resin may be used as a material of the insulating
layer 211. For example, a thermosetting resin such as an epoxy resin, a thermoplastic resin such as a polyimide resin, or a resin including a reinforcing material such as an inorganic filler, for example, silica, alumina, or the like, more specifically, ABF, FR-4, BT, a PID resin, or the like, may be used. Alternatively, a material in which a thermosetting resin or a thermoplastic resin is impregnated together with an inorganic filler in a core material such as a glass fiber (or a glass cloth or a glass fabric), for example, prepreg, or the like, may also be used. In this case, excellent rigidity of thesecond structure 200A may be maintained, such that thesecond core member 210 may be used as a kind of support member. First and second wiring layers 212 a and 212 b may be disposed on upper and lower surfaces of the insulatinglayer 211, respectively, and may be utilized as mark patterns. - The
second semiconductor chip 220 may be an integrated circuit (IC) that includes several hundred to several million or more elements integrated in a single chip. Thesecond semiconductor chip 220 may be formed on the basis of an active wafer. In this case, a base material of a body may be silicon (Si), germanium (Ge), gallium arsenide (GaAs), or the like. Various circuits may be formed in the body. Thesecond connection pads 220P may electrically connect thesecond semiconductor chip 220 to other components, and a conductive material such as aluminum (Al), or the like, may be used as a material of each of thesecond connection pads 220P. An active surface of thesecond semiconductor chip 220 refers to a surface of thesecond semiconductor chip 220 on which thesecond connection pads 220P are disposed, and an inactive surface of thesecond semiconductor chip 220 refers to a surface of thesecond semiconductor chip 220 opposing the active surface. A passivation layer (not illustrated) covering at least portions of thesecond connection pads 220P may be formed on the body, if necessary. The passivation layer (not illustrated) may be an oxide film, a nitride film, or the like, or be a double layer of an oxide layer and a nitride layer. An insulating layer (not illustrated), and the like, may also be further disposed in other required positions. Thesecond semiconductor chip 220 may be a memory chip such as a volatile memory (such as a DRAM), a non-volatile memory (such as a ROM), a flash memory, or the like. However, thesecond semiconductor chip 220 is not limited thereto, but may also be another kind of chip. - The
second wiring member 225 may primarily redistribute thesecond connection pads 220P of thesecond semiconductor chip 220. Thesecond wiring member 225 may include second insulatinglayers 221 including photosensitive polyimide (PSPI), or the like, the second wiring layers 222 formed on the first insulatinglayers 221 and including aluminum (Al), copper (Cu), or the like, andsecond vias 223 formed in the second insulatinglayers 221, electrically connecting thesecond connection pads 220P and the second wiring layers 222 to each other, and including aluminum (Al), copper (Cu), or the like. The exposedsecond wiring layer 222 may be connected to theconductive bumps 228. Theconductive bump 228 may include acopper layer 226 and asolder layer 227. Thecopper layer 226 may be a copper (Cu) bump, a copper (Cu) pillar, or the like, and thesolder layer 227 may be a solder ball including a low melting point metal such as tin (Sn). The low melting point metal refers to a metal of which a base material is not melted and only a filler metal is melted and which is used for bonding, such as a solder, and may be, for example, tin (Sn) or an alloy including tin (Sn) such as a tin (Sn)-aluminum (Al) alloy or a tin (Sn)-aluminum (Al)-copper (Cu) alloy, but is not limited thereto. - The
second encapsulant 230 may protect thesecond semiconductor chip 220. An encapsulation form of thesecond encapsulant 230 is not particularly limited, but may be a form in which thesecond encapsulant 230 surrounds at least portions of thesecond semiconductor chip 220. In this case, thesecond encapsulant 230 may cover thesecond core member 210 and the inactive surface of thesecond semiconductor chip 220, and fill at least portions of the second through-hole 210H. A certain material of thesecond encapsulant 230 is not particularly limited, but may be, for example, an insulating material. For example, thesecond encapsulant 230 may include ABF including an insulating resin and an inorganic filler. However, the material of thesecond encapsulant 230 is not limited thereto, but may also be a PIE. -
FIGS. 13A through 13C are schematic views illustrating various examples of a resistance pattern included in a redistribution layer of a connection member of the fan-out semiconductor package ofFIG. 9 . -
FIG. 14 is a schematic view illustrating signal transmission paths of each of first and second semiconductor chips of the fan-out semiconductor package to which the resistance patterns ofFIGS. 13A through 13C are applied. -
FIG. 15 is a schematic view illustrating signal transmission times of the first and second semiconductor chips having the signal transmission paths ofFIG. 14 . - Referring to
FIGS. 13A-13C, 14, and 15 , various kinds of resistance patterns 142R1, 142R2, and 142R3 may be formed on or in theredistribution layer 142 of theconnection member 140. The resistance patterns 142R1, 142R2, and 142R3 may be, for example, a pattern inductance, a capacitance, a resistance, and the like, such as a spiral inductor 142R1, a meander line 142R2, or a single loop 142R3. In some case, a signal transmission distance P1 from thefirst connection pad 120P to one point of theredistribution layer 142 and a signal transmission distance P2 from thesecond connection pad 220P to one point of theredistribution layer 142 may be different from each other. In this case, a line delay problem may occur. In this case, when the resistance patterns 142R1, 142R2, and 142R3 are formed on theredistribution layer 142, different signal transmission distances P1 and P2 may be compensated for (e.g., by delaying a signal fromchip 120, as illustrative shown inFIG. 15 ), such that signal transmission times may become substantially the same as each other. That is, even when the signal transmission distances P1 and P2 are different from each other, a time delay problem may be solved. -
FIG. 16A is schematic diagram illustrating process steps of a method of manufacturing a first structure of the fan-out semiconductor package ofFIG. 9 . -
FIG. 16B is schematic diagram illustrating process steps of a method of manufacturing a second structure of the fan-out semiconductor package ofFIG. 9 . - Referring to
FIG. 16A , thefirst core member 110 may be first prepared. Thefirst core member 110 may be prepared by preparing a copper clad laminate (CCL) and then forming the first and second wiring layers 112 a and 112 b and thevias 113 by a plating process. Then, the first through-hole 110H may be formed in thefirst core member 110. The first through-hole 110H may be formed using a laser drill and/or a mechanical drill or be formed by a sandblast, or the like. Then, a firstadhesive film 191 such as an epoxy tape may be attached to one side of thefirst core member 110. Then, thefirst semiconductor chip 120 having thefirst wiring member 125 formed on the first active surface thereof in advance may be attached to the firstadhesive film 191 exposed through the first through-hole 110H. Then, thefirst semiconductor chip 120 may be encapsulated with thefirst encapsulant 130. Then, the firstadhesive film 191 may be removed, and theconnection member 140 and theelectrical connection structures 150 may be formed. Theconnection member 140 may be formed by forming the insulatinglayers 141 using the PID, or the like, forming via holes in the insulating layers by a photolithography method, and then forming the redistribution layers 142 and thevias 143 by a plating process. Theelectrical connection structures 150 may be formed by attaching solder balls and performing a reflow process. A series of processes may be performed on a panel level having a large area. In this case, a plurality offirst structures 100A connected to each other may be manufactured. When a singulation process such as a dicing process is performed on the plurality offirst structures 100A connected to each other, the respectivefirst structures 100A may be obtained. - Referring to
FIG. 16B , thesecond core member 210 may be first prepared. Thesecond core member 210 may also be formed by preparing a CCL and then forming the first and second wiring layers 212 a and 212 b by a plating process. Then, the second through-hole 210H may be formed in thesecond core member 210. The second through-hole 210H may be formed using a laser drill and/or a mechanical drill or be formed by a sandblast, or the like. Then, a secondadhesive film 192 such as an epoxy tape may be attached to one side of thesecond core member 210. Then, thesecond semiconductor chip 220 having thesecond wiring member 225 formed on the second active surface thereof in advance may be attached to the secondadhesive film 192 exposed through the second through-hole 210H. Then, thesecond semiconductor chip 220 may be encapsulated with thesecond encapsulant 230. Then, the secondadhesive film 192 may be removed, and theconductive bumps 228 may be formed. Theconductive bump 228 may be formed by forming a copper bump or a copper pillar on the exposedsecond wiring layer 222 and forming a solder ball on the other surface of the copper bump or the copper pillar opposing one surface of the copper bump or the copper pillar connected to thesecond wiring layer 222. A series of processes may also be performed on a panel level having a large area. In this case, a plurality ofsecond structures 200A connected to each other may be manufactured. When a singulation process such as a dicing process is performed on the plurality ofsecond structures 200A connected to each other, the respectivesecond structures 200A may be obtained. - Meanwhile, when the first and
second structures conductive bumps 228 of the second structure 200 that is manufactured are connected to theredistribution layer 142 of theconnection member 140 of thefirst structure 100A that is manufactured, the fan-outsemiconductor package 300A according to the exemplary embodiment may be manufactured. -
FIG. 17 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package. - Referring to
FIG. 17 , in a fan-outsemiconductor package 300B according to another exemplary embodiment, afirst structure 100B may have a plurality of first through-hole 110H, andfirst semiconductor chips 120 may be disposed in the first through-holes 110H, respectively. Similarly, asecond structures 200B may have a plurality of second through-holes 210H, andsecond semiconductor chips 220 may be disposed in the second through-holes 210H, respectively. As described above, in the fan-outsemiconductor package 300B according to another exemplary embodiment, thefirst structure 100B may include a plurality offirst semiconductor chips 120 disposed side-by-side with each other and connected to each other through aredistribution layer 142 in a signal manner, and thesecond structure 200B may include a plurality ofsecond semiconductor chips 220 disposed side-by-side with each other and connected to each other through theredistribution layer 142 in a signal manner, and performance of the fan-outsemiconductor package 300B may thus be further improved. Other contents overlap those described above, and a detailed description thereof is thus omitted. -
FIG. 18 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package. - Referring to
FIG. 18 , in a fan-outsemiconductor package 300C according to another exemplary embodiment, athird structure 400C and afourth structure 500C as well as afirst structure 100C and asecond structure 200C may be stacked.Electrical connection structures 450 of thethird structure 400C may be electrically connected to an exposedsecond wiring layer 212 b of asecond core member 210 of thesecond structure 200C. Thesecond core member 210 of thesecond structure 200C may further includevias 213 electrically connecting first and second wiring layers 212 a and 212 b to each other for providing an electrical connection between upper and lower portions. Except for those described above, thethird structure 400C and thefourth structure 500C may have structures that are substantially the same as those of thefirst structure 100C and thesecond structure 200C, respectively. That is, in the fan-outsemiconductor package 300C according to another exemplary embodiment, a larger number ofstructures semiconductor package 300C may thus be further improved. Other contents overlap those described above, and a detailed description thereof is thus omitted. -
FIG. 19 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package. - Referring to
FIG. 19 , in a fan-outsemiconductor package 300D according to another exemplary embodiment, afirst core member 110 of afirst structure 100D may include a larger number ofwiring layers first core member 110 may include a first insulatinglayer 111 a, afirst wiring layer 112 a and asecond wiring layer 112 b disposed on first and second surfaces of the first insulatinglayer 111 a, respectively, a second insulatinglayer 111 b disposed on the first surface of the first insulatinglayer 111 a and covering thefirst wiring layer 112 a, athird wiring layer 112 c disposed on the second insulatinglayer 111 b, a thirdinsulating layer 111 c disposed on the second surface of the first insulatinglayer 111 a and covering thesecond wiring layer 112 b, and afourth wiring layer 112 d disposed on the third insulatinglayer 111 c. The first to fourth wiring layers 112 a, 112 b, 112 c, and 112 d may be electrically connected to first andsecond connection pads first core member 110 may include a larger number ofwiring layers connection member 140 may further be simplified. Therefore, a decrease in a yield depending on a defect occurring in a process of forming theconnection member 140 may be suppressed. Meanwhile, the first to fourth wiring layers 112 a, 112 b, 112 c, and 112 d may be electrically connected to each other through first tothird vias layers - The first insulating
layer 111 a may have a thickness greater than those of the second insulatinglayer 111 b and the third insulatinglayer 111 c. The first insulatinglayer 111 a may be basically relatively thick in order to maintain rigidity, and the second insulatinglayer 111 b and the third insulatinglayer 111 c may be introduced in order to form a larger number ofwiring layers layer 111 a may include an insulating material different from those of the second insulatinglayer 111 b and the third insulatinglayer 111 c. For example, the first insulatinglayer 111 a may be, for example, prepreg including a core material, a filler, and an insulating resin, and the second insulatinglayer 111 b and the third insulatinglayer 111 c may be an ABF or a PID film including a filler and an insulating resin. However, the materials of the first insulatinglayer 111 a and the second and third insulatinglayers first vias 113 a penetrating through the first insulatinglayer 111 a may have a diameter greater than those ofsecond vias 113 b andthird vias 113 c each penetrating through the second insulatinglayer 111 b and the third insulatinglayer 111 c. - The
first wiring layer 112 a and thesecond wiring layer 112 b of thefirst core member 110 may be disposed on a level between an active surface and an inactive surface of afirst semiconductor chip 120. Thefirst core member 110 may be formed at a thickness corresponding to that of thefirst semiconductor chip 120, and thefirst wiring layer 112 a and thesecond wiring layer 112 b formed in thefirst core member 110 may thus be disposed on a level between the active surface and the inactive surface of thefirst semiconductor chip 120. A thickness of each of the wiring layers 112 a, 112 b, 112 c, and 112 d may be greater than that of theredistribution layer 142. A description of other configurations, for example, a second structure 200D, overlaps the description provided above and is thus omitted. -
FIG. 20 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package. - Referring to
FIG. 20 , in a fan-outsemiconductor package 300E according to another exemplary embodiment, afirst core member 110 of afirst structure 100E may include a first insulatinglayer 111 a in contact with aconnection member 140, afirst wiring layer 112 a in contact with theconnection member 140 and embedded in the first insulatinglayer 111 a, asecond wiring layer 112 b disposed on the other surface of the first insulatinglayer 111 a opposing one surface of the first insulatinglayer 111 a in which thefirst wiring layer 112 a is embedded, a second insulatinglayer 111 b disposed on the first insulatinglayer 111 a and covering thesecond wiring layer 112 b, and athird wiring layer 112 c disposed on the second insulatinglayer 111 b. The first to third wiring layers 112 a, 112 b, and 112 c may be electrically connected to first andsecond connection pads second vias layers - An upper surface of the
first wiring layer 112 a of thefirst core member 110 may be disposed on a level below an upper surface of thefirst connection pad 120P of afirst semiconductor chip 120. In addition, a distance between aredistribution layer 142 of theconnection member 140 and thefirst wiring layer 112 a of thefirst core member 110 may be greater than that between theredistribution layer 142 of theconnection member 140 and thefirst connection pad 120P of thefirst semiconductor chip 120. The reason is that thefirst wiring layer 112 a may be recessed into the first insulatinglayer 111 a. As described above, when thefirst wiring layer 112 a is recessed in the first insulatinglayer 111 a, such that an upper surface of the first insulatinglayer 111 a and the upper surface of thefirst wiring layer 112 a have a step therebetween, a phenomenon in which a material of thefirst encapsulant 130 bleeds to pollute thefirst wiring layer 112 a may be prevented. Thesecond wiring layer 112 b of thefirst core member 110 may be disposed on a level between an active surface and an inactive surface of thefirst semiconductor chip 120. A thickness of each of the wiring layers 112 a, 112 b, and 112 c may be greater than that of theredistribution layer 142. A description of other configurations, for example, asecond structure 200E, overlaps with the description provided above and is thus omitted. -
FIG. 21 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package. - Referring to
FIG. 21 , in a fan-outsemiconductor package 300F according to another exemplary embodiment, an insulatingmember 160 may be disposed between afirst structure 100F and asecond structure 200F. The insulatingmember 160 may be a non-conductive paste, a non-conductive film, or the like, including an insulating material. The insulatingmember 160 may cover at least portions ofconductive bumps 228. In this way, joint reliability between thefirst structure 100F and thesecond structure 200F may be improved. A description of other configurations overlaps that described above and is thus omitted. -
FIG. 22 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package. - Referring to
FIG. 22 , a fan-outsemiconductor package 300G according to another exemplary embodiment may be substantially the same as the fan-outsemiconductor package 300D according to another exemplary embodiment described above except that it further includes a plurality ofpassive components passive component 181 may be embedded in afirst core member 110 of afirst structure 100G, and a secondpassive component 182 may be disposed in a first through-hole 110H of thefirst core member 110. The first and secondpassive components passive components second connection pads redistribution layer 142. A passive component (not illustrated) may also be disposed in asecond core member 210 of asecond structure 200G, if necessary. A description of other configurations overlaps that described above and is thus omitted. -
FIG. 23 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package. - Referring to
FIG. 23 , in a fan-outsemiconductor package 300H according to another exemplary embodiment, afirst structure 100H and asecond structure 200H may be stacked in a package-on-chip form. In detail, asecond semiconductor chip 220 may be mounted on afirst structure 100H throughconductive bumps 228, and asecond encapsulant 230 may be formed in an underfill resin form on thefirst structure 100H to fix the second semiconductor chip. A description of other configurations overlaps that described above and is thus omitted. -
FIG. 24 is a schematic cross-sectional view illustrating another example of a fan-out semiconductor package. - Referring to
FIG. 24 , in a fan-out semiconductor package 300I according to another exemplary embodiment, a first structure 100I and a second structure 200I may be stacked in a package-on-package form, and a plurality ofsurface mounting components 295 may be mounted on the second structure 200I. Thesurface mounting components 295 may be any known passive components such as capacitors, inductors, beads, or the like, or be various kinds of integrated circuits. Thesurface mounting components 295 may be the same as or different from each other. Thesurface mounting components 295 may be molded by amolding material 280 formed on the second structure 200I. Asecond core member 210 of the second structure 200I may further includevias 213 electrically connecting first and second wiring layers 212 a and 212 b in order to provide an electrical connection path between upper and lower portions, abackside wiring layer 232 may be formed on asecond encapsulant 230, and thebackside wiring layer 232 may be electrically connected to thesecond wiring layer 212 b of thesecond core member 210 through backside vias 233 penetrating through at least portions of thesecond encapsulant 230. Thesurface mounting components 295 may be mounted on thebackside wiring layer 232 to be electrically connected to components of the first andsecond structures - As set forth above, according to the exemplary embodiments, a fan-out semiconductor package capable of solving a time delay problem in spite of including a plurality of semiconductor chips and being thinned in spite of having improved performance may be provided.
- While exemplary embodiments have been shown and described above, it will be apparent to those skilled in the art that modifications and variations could be made without departing from the scope of the present invention as defined by the appended claims.
Claims (20)
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KR1020170177955A KR101922885B1 (en) | 2017-12-22 | 2017-12-22 | Fan-out semiconductor package |
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US20200211980A1 (en) * | 2018-12-27 | 2020-07-02 | Powertech Technology Inc. | Fan-out package with warpage reduction and manufacturing method thereof |
US10741483B1 (en) * | 2020-01-28 | 2020-08-11 | Advanced Semiconductor Engineering, Inc. | Substrate structure and method for manufacturing the same |
CN112397475A (en) * | 2019-08-15 | 2021-02-23 | 力成科技股份有限公司 | Fan-out type packaging chip structure and unit with fine-pitch through-silicon-via packaging |
US20210202392A1 (en) * | 2019-12-31 | 2021-07-01 | Advanced Semiconductor Engineering, Inc. | Assembly structure and package structure |
US11205631B2 (en) * | 2019-04-18 | 2021-12-21 | Samsung Electronics Co., Ltd. | Semiconductor package including multiple semiconductor chips |
US20220115350A1 (en) * | 2020-10-08 | 2022-04-14 | Samsung Electronics Co., Ltd. | Semiconductor package device |
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KR20200114313A (en) | 2019-03-28 | 2020-10-07 | 삼성전자주식회사 | Semiconductor package |
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CN112216615B (en) * | 2019-07-09 | 2023-09-22 | 澜起科技股份有限公司 | Substrate packaging method capable of adjusting signal transmission time and structure thereof |
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US20200211980A1 (en) * | 2018-12-27 | 2020-07-02 | Powertech Technology Inc. | Fan-out package with warpage reduction and manufacturing method thereof |
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US20210202392A1 (en) * | 2019-12-31 | 2021-07-01 | Advanced Semiconductor Engineering, Inc. | Assembly structure and package structure |
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US10741483B1 (en) * | 2020-01-28 | 2020-08-11 | Advanced Semiconductor Engineering, Inc. | Substrate structure and method for manufacturing the same |
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US20220115350A1 (en) * | 2020-10-08 | 2022-04-14 | Samsung Electronics Co., Ltd. | Semiconductor package device |
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Also Published As
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CN109979923B (en) | 2023-10-31 |
US10347613B1 (en) | 2019-07-09 |
KR101922885B1 (en) | 2018-11-28 |
TW201929177A (en) | 2019-07-16 |
TWI731239B (en) | 2021-06-21 |
CN109979923A (en) | 2019-07-05 |
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