US20180309441A1 - Semiconductor device - Google Patents

Semiconductor device Download PDF

Info

Publication number
US20180309441A1
US20180309441A1 US15/796,878 US201715796878A US2018309441A1 US 20180309441 A1 US20180309441 A1 US 20180309441A1 US 201715796878 A US201715796878 A US 201715796878A US 2018309441 A1 US2018309441 A1 US 2018309441A1
Authority
US
United States
Prior art keywords
sense
output electrode
wire
semiconductor device
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US15/796,878
Other versions
US10122358B1 (en
Inventor
Takuya Shiraishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Assigned to MITSUBISHI ELECTRIC CORPORATION reassignment MITSUBISHI ELECTRIC CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIRAISHI, TAKUYA
Publication of US20180309441A1 publication Critical patent/US20180309441A1/en
Application granted granted Critical
Publication of US10122358B1 publication Critical patent/US10122358B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/56Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices
    • H03K17/567Circuits characterised by the use of more than one type of semiconductor device, e.g. BIMOS, composite devices such as IGBT
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/003Constructional details, e.g. physical layout, assembly, wiring or busbar connections
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3114Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49517Additional leads
    • H01L23/4952Additional leads the additional leads being a bump or a wire
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49541Geometry of the lead-frame
    • H01L23/49562Geometry of the lead-frame for devices being provided for in H01L29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49575Assemblies of semiconductor devices on lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02HEMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H7/00Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
    • H02H7/20Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electronic equipment
    • H02H7/205Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electronic equipment for controlled semi-conductors which are not included in a specific circuit arrangement
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H01L2224/0601Structure
    • H01L2224/0603Bonding areas having different sizes, e.g. different heights or widths
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124Aluminium (Al) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/485Material
    • H01L2224/48505Material at the bonding interface
    • H01L2224/48699Principal constituent of the connecting portion of the wire connector being Aluminium (Al)
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4911Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4911Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
    • H01L2224/49111Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/1026Compound semiconductors
    • H01L2924/1027IV
    • H01L2924/10272Silicon Carbide [SiC]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
    • H01L2924/13055Insulated gate bipolar transistor [IGBT]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13091Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • H01L2924/141Analog devices
    • H01L2924/1425Converter
    • H01L2924/14252Voltage converter
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19107Disposition of discrete passive components off-chip wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00Details of apparatus for conversion
    • H02M1/0003Details of control, feedback or regulation circuits
    • H02M1/0009Devices or circuits for detecting current in a converter

Definitions

  • the present invention relates to a semiconductor device including a transistor having a main terminal and a sense terminal.
  • An emitter current detection scheme is used to protect an IPM of a transfer mold type inverter module or the like against short circuits.
  • an external shunt resistor is connected to an emitter section of an N-side IGBT, and when a short circuit current is generated, a voltage between shunt resistors is detected and fed back to a control IC to shut off the circuit.
  • a current sense current detection scheme which detects a micro current branched from a main current using an IGBT with a built-in on-chip current sense and detects a short circuit current.
  • a resistor for short circuit current detection is connected to a sense terminal. For this reason, an inductance of an emitter of a main section is smaller than that of a sense section. Therefore, an IGBT gate voltage difference is produced between the main section and the sense section of the IGBT, and the ratio between respective currents flowing through the IGBT varies. For this reason, there is a problem that the accuracy of short circuit current detection deteriorates.
  • the present invention has been implemented to solve the above-described problem, and it is an object of the present invention to provide a semiconductor device capable of improving accuracy of short circuit current detection.
  • a semiconductor device includes: a transistor including a main terminal and a sense terminal; a main output electrode connected to the main terminal via a first wire; a sense output electrode connected to the sense terminal via a second wire; and a package sealing the transistor, the first and second wires, part of the main output electrode and part of the sense output electrode, wherein a wiring inductance from the main terminal to the main output electrode is larger than a wiring inductance from the sense terminal to the sense output electrode.
  • a wiring inductance from the main terminal of the transistor to the main output electrode is larger than a wiring inductance from the sense terminal to the sense output electrode.
  • FIG. 1 is a diagram illustrating a semiconductor device according to a first embodiment of the present invention.
  • FIG. 2 is a diagram illustrating an interior of the package of the semiconductor device according to the first embodiment of the present invention.
  • FIG. 3 is a diagram illustrating an interior of a package of a semiconductor device according to a second embodiment of the present invention.
  • FIG. 4 is a diagram illustrating an interior of a package of a semiconductor device according to a third embodiment of the present invention.
  • FIG. 5 is a diagram illustrating an interior of a package of a semiconductor device according to a fourth embodiment of the present invention.
  • FIG. 6 is a diagram illustrating a semiconductor device according to a fifth embodiment of the present invention.
  • FIG. 1 is a diagram illustrating a semiconductor device according to a first embodiment of the present invention.
  • An IGBT 2 , a control IC 3 that controls the IGBT 2 and an inductor L connected to an emitter terminal of the IGBT 2 are provided in a package 1 .
  • This semiconductor package is an intelligent power module (IPM).
  • the inductor L is connected to an outside of the package 1 via an N-phase output electrode 4 .
  • a resistor R provided outside the package 1 is connected to a sense terminal of the IGBT 2 .
  • a short circuit current is detected from a voltage applied to the resistor R and fed back to the control IC 3 .
  • the control IC 3 shuts off the circuit of the IGBT 2 .
  • FIG. 2 is a diagram illustrating an interior of the package of the semiconductor device according to the first embodiment of the present invention.
  • a lead frame includes an N-phase output electrode 4 , a pad 5 , a sense output electrode 6 and a relay electrode 7 .
  • the IGBT 2 is provided on the pad 5 .
  • the IGBT 2 includes an emitter terminal 8 and a sense terminal 9 .
  • the emitter terminal 8 is connected to the relay electrode 7 via an Al wire 10 and the relay terminal 7 is connected to a sense output electrode 6 via an Al wire 11 .
  • the sense terminal 9 is connected to the relay electrode 7 via an Al wire 12 . Note that according to the prior art, the sense terminal 9 is connected to the sense output electrode 6 via only the Al wire 10 without going through the relay electrode 7 or the wire 11 .
  • the Al wire 11 added in the present embodiment corresponds to the inductor L in FIG. 1 .
  • the package 1 seals the IGBT 2 , the Al wires 10 , 11 and 12 , the pad 5 and the relay electrode 7 , part of the N-phase output electrode 4 and part of the sense output electrode 6 . Note that the control IC 3 is not shown in FIG. 2 .
  • a total length of the Al wires 10 and 11 is larger than the length of the Al wire 12 . Therefore, a wiring inductance from the emitter terminal 8 of the IGBT 2 to the N-phase output electrode 4 is larger than a wiring inductance from the sense terminal 9 to the sense output electrode 6 .
  • the IGBT gate voltage difference between the main section and the sense section of the IGBT 2 becomes smaller, and so the ratio between their currents becomes smaller. As a result, it is possible to improve the accuracy of short circuit current detection.
  • FIG. 3 is a diagram illustrating an interior of a package of a semiconductor device according to a second embodiment of the present invention.
  • the present embodiment does not include the relay terminal 7 nor the Al wire 11 .
  • the number of Al wires 12 connecting the sense terminal 9 and the sense output electrode 6 is greater than the number of Al wires 10 connecting the emitter terminal 8 and the N-phase output electrode 4 .
  • a wiring inductance from the emitter terminal 8 to the N-phase output electrode 4 is larger than a wiring inductance from the sense terminal 9 to the sense output electrode 6 . Therefore, it is possible to obtain effects similar to those of the first embodiment.
  • FIG. 4 is a diagram illustrating an interior of a package of a semiconductor device according to a third embodiment of the present invention.
  • the IGBT 2 , the N-phase output electrode 4 , the relay electrode 7 , and the Al wires 10 , 11 and 12 are respectively divided into a plurality of phases. Here, they are divided into three phases of UN-phase, VN-phase and WN-phase.
  • the lengths of the Al wires 10 vary among the respective phases according to a positional relationship between the IGBT 2 and the relay electrode 7 . Thus, in each phase, if the Al wire 10 becomes longer, the number of Al wires 11 is increased and the length of the Al wire 12 of the sense section is shortened.
  • a wiring inductance from the emitter terminal 8 of the IGBT 2 to the N-phase output electrode 4 is made greater than a wiring inductance from the sense terminal 9 to the sense output electrode 6 . This makes it possible to obtain effects similar to those of the first embodiment.
  • FIG. 5 is a diagram illustrating an interior of a package of a semiconductor device according to a fourth embodiment of the present invention.
  • the sense output electrode 6 is divided into a plurality of frames, which are mutually connected via wires 13 .
  • the sense terminals 9 of the IGBTs 2 of the respective phases are connected to the divided frames respectively.
  • the length of the Al wire 12 of each sense section is adjusted for each phase, whereas according to the present embodiment, the length of the Al wire 13 connecting the frames of the divided sense output electrodes 6 is adjusted for each phase. This makes it possible to obtain effects similar to those in the third embodiment.
  • FIG. 6 is a diagram illustrating a semiconductor device according to a fifth embodiment of the present invention.
  • a SiCMOS transistor 14 is used instead of the IGBT 2 of the first embodiment. Compared to the IGBT 2 , the SiCMOS transistor 14 has a wider operating temperature range and has a greater branching ratio variation due to temperature characteristics. Therefore, it is possible to obtain more remarkable effects by applying the present invention to a SiC mounting module.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Inverter Devices (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

A semiconductor device includes: a transistor including a main terminal and a sense terminal; a main output electrode connected to the main terminal via a first wire; a sense output electrode connected to the sense terminal via a second wire; and a package sealing the transistor, the first and second wires, part of the main output electrode and part of the sense output electrode, wherein a wiring inductance from the main terminal to the main output electrode is larger than a wiring inductance from the sense terminal to the sense output electrode.

Description

    BACKGROUND OF THE INVENTION Field
  • The present invention relates to a semiconductor device including a transistor having a main terminal and a sense terminal.
  • Background
  • An emitter current detection scheme is used to protect an IPM of a transfer mold type inverter module or the like against short circuits. Under this scheme, an external shunt resistor is connected to an emitter section of an N-side IGBT, and when a short circuit current is generated, a voltage between shunt resistors is detected and fed back to a control IC to shut off the circuit.
  • When the emitter current detection scheme is used for a large-capacity type IPM, allowable power of the external shunt resistor needs to be increased. For this reason, a current sense current detection scheme is used which detects a micro current branched from a main current using an IGBT with a built-in on-chip current sense and detects a short circuit current.
  • Note that it is proposed that in order to reduce current unbalance among a plurality of switching elements connected in parallel to each other, the number of Al wires is adjusted so as to equalize inductances of the respective elements (e.g., see JP 2013-106384 A).
  • SUMMARY
  • According to the current sense current detection scheme, a resistor for short circuit current detection is connected to a sense terminal. For this reason, an inductance of an emitter of a main section is smaller than that of a sense section. Therefore, an IGBT gate voltage difference is produced between the main section and the sense section of the IGBT, and the ratio between respective currents flowing through the IGBT varies. For this reason, there is a problem that the accuracy of short circuit current detection deteriorates.
  • The present invention has been implemented to solve the above-described problem, and it is an object of the present invention to provide a semiconductor device capable of improving accuracy of short circuit current detection.
  • According to the present invention, a semiconductor device includes: a transistor including a main terminal and a sense terminal; a main output electrode connected to the main terminal via a first wire; a sense output electrode connected to the sense terminal via a second wire; and a package sealing the transistor, the first and second wires, part of the main output electrode and part of the sense output electrode, wherein a wiring inductance from the main terminal to the main output electrode is larger than a wiring inductance from the sense terminal to the sense output electrode.
  • In the present invention, a wiring inductance from the main terminal of the transistor to the main output electrode is larger than a wiring inductance from the sense terminal to the sense output electrode. Thus, in the current sense current detection scheme in which the resistor for short circuit current detection is connected to the sense terminal, the gate voltage difference between the main section and the sense section of the transistor becomes smaller, and so the ratio between their currents becomes smaller. As a result, it is possible to improve the accuracy of short circuit current detection.
  • Other and further objects, features and advantages of the invention will appear more fully from the following description.
  • BRIEF DESCRIPTION OF DRAWINGS
  • FIG. 1 is a diagram illustrating a semiconductor device according to a first embodiment of the present invention.
  • FIG. 2 is a diagram illustrating an interior of the package of the semiconductor device according to the first embodiment of the present invention.
  • FIG. 3 is a diagram illustrating an interior of a package of a semiconductor device according to a second embodiment of the present invention.
  • FIG. 4 is a diagram illustrating an interior of a package of a semiconductor device according to a third embodiment of the present invention.
  • FIG. 5 is a diagram illustrating an interior of a package of a semiconductor device according to a fourth embodiment of the present invention.
  • FIG. 6 is a diagram illustrating a semiconductor device according to a fifth embodiment of the present invention.
  • DESCRIPTION OF EMBODIMENTS
  • A semiconductor device according to the embodiments of the present invention will be described with reference to the drawings. The same components will be denoted by the same symbols, and the repeated description thereof may be omitted.
  • First Embodiment
  • FIG. 1 is a diagram illustrating a semiconductor device according to a first embodiment of the present invention. An IGBT 2, a control IC 3 that controls the IGBT 2 and an inductor L connected to an emitter terminal of the IGBT 2 are provided in a package 1. This semiconductor package is an intelligent power module (IPM). The inductor L is connected to an outside of the package 1 via an N-phase output electrode 4.
  • A resistor R provided outside the package 1 is connected to a sense terminal of the IGBT 2. A short circuit current is detected from a voltage applied to the resistor R and fed back to the control IC 3. Upon detecting a short circuit current, the control IC 3 shuts off the circuit of the IGBT 2.
  • FIG. 2 is a diagram illustrating an interior of the package of the semiconductor device according to the first embodiment of the present invention. A lead frame includes an N-phase output electrode 4, a pad 5, a sense output electrode 6 and a relay electrode 7. The IGBT 2 is provided on the pad 5. The IGBT 2 includes an emitter terminal 8 and a sense terminal 9.
  • The emitter terminal 8 is connected to the relay electrode 7 via an Al wire 10 and the relay terminal 7 is connected to a sense output electrode 6 via an Al wire 11. The sense terminal 9 is connected to the relay electrode 7 via an Al wire 12. Note that according to the prior art, the sense terminal 9 is connected to the sense output electrode 6 via only the Al wire 10 without going through the relay electrode 7 or the wire 11. The Al wire 11 added in the present embodiment corresponds to the inductor L in FIG. 1. The package 1 seals the IGBT 2, the Al wires 10, 11 and 12, the pad 5 and the relay electrode 7, part of the N-phase output electrode 4 and part of the sense output electrode 6. Note that the control IC 3 is not shown in FIG. 2.
  • A total length of the Al wires 10 and 11 is larger than the length of the Al wire 12. Therefore, a wiring inductance from the emitter terminal 8 of the IGBT 2 to the N-phase output electrode 4 is larger than a wiring inductance from the sense terminal 9 to the sense output electrode 6. Thus, in the current sense current detection scheme in which the resistor R for short circuit current detection is connected to the sense terminal 9, the IGBT gate voltage difference between the main section and the sense section of the IGBT 2 becomes smaller, and so the ratio between their currents becomes smaller. As a result, it is possible to improve the accuracy of short circuit current detection.
  • Second Embodiment
  • FIG. 3 is a diagram illustrating an interior of a package of a semiconductor device according to a second embodiment of the present invention. Compared to the first embodiment, the present embodiment does not include the relay terminal 7 nor the Al wire 11. Instead, the number of Al wires 12 connecting the sense terminal 9 and the sense output electrode 6 is greater than the number of Al wires 10 connecting the emitter terminal 8 and the N-phase output electrode 4. For this reason, a wiring inductance from the emitter terminal 8 to the N-phase output electrode 4 is larger than a wiring inductance from the sense terminal 9 to the sense output electrode 6. Therefore, it is possible to obtain effects similar to those of the first embodiment.
  • Third Embodiment
  • FIG. 4 is a diagram illustrating an interior of a package of a semiconductor device according to a third embodiment of the present invention. The IGBT 2, the N-phase output electrode 4, the relay electrode 7, and the Al wires 10, 11 and 12 are respectively divided into a plurality of phases. Here, they are divided into three phases of UN-phase, VN-phase and WN-phase. The lengths of the Al wires 10 vary among the respective phases according to a positional relationship between the IGBT 2 and the relay electrode 7. Thus, in each phase, if the Al wire 10 becomes longer, the number of Al wires 11 is increased and the length of the Al wire 12 of the sense section is shortened. This makes it possible to reduce the difference in a wiring inductance between the phases and reduce inter-phase variations. However, among the respective phases, a wiring inductance from the emitter terminal 8 of the IGBT 2 to the N-phase output electrode 4 is made greater than a wiring inductance from the sense terminal 9 to the sense output electrode 6. This makes it possible to obtain effects similar to those of the first embodiment.
  • Fourth Embodiment
  • FIG. 5 is a diagram illustrating an interior of a package of a semiconductor device according to a fourth embodiment of the present invention. The sense output electrode 6 is divided into a plurality of frames, which are mutually connected via wires 13. The sense terminals 9 of the IGBTs 2 of the respective phases are connected to the divided frames respectively.
  • According to the third embodiment, the length of the Al wire 12 of each sense section is adjusted for each phase, whereas according to the present embodiment, the length of the Al wire 13 connecting the frames of the divided sense output electrodes 6 is adjusted for each phase. This makes it possible to obtain effects similar to those in the third embodiment.
  • Fifth Embodiment
  • FIG. 6 is a diagram illustrating a semiconductor device according to a fifth embodiment of the present invention. A SiCMOS transistor 14 is used instead of the IGBT 2 of the first embodiment. Compared to the IGBT 2, the SiCMOS transistor 14 has a wider operating temperature range and has a greater branching ratio variation due to temperature characteristics. Therefore, it is possible to obtain more remarkable effects by applying the present invention to a SiC mounting module.
  • Obviously many modifications and variations of the present invention are possible in the light of the above teachings. It is therefore to be understood that within the scope of the appended claims the invention may be practiced otherwise than as specifically described.
  • The entire disclosure of Japanese Patent Application No. 2017-085648, filed on Apr. 24, 2017 including specification, claims, drawings and summary, on which the Convention priority of the present application is based, is incorporated herein by reference in its entirety.

Claims (8)

1. A semiconductor device comprising:
a transistor including a main terminal and a sense terminal;
a main output electrode connected to the main terminal via a first wire;
a sense output electrode connected to the sense terminal via a second wire; and
a package sealing the transistor, the first and second wires, part of the main output electrode and part of the sense output electrode,
wherein a wiring inductance from the main terminal to the main output electrode is larger than a wiring inductance from the sense terminal to the sense output electrode.
2. The semiconductor device according to claim 1, further comprising:
a control IC controlling the transistor and provided in the package; and
a resistor provided outside the package and connected to the sense output electrode,
wherein the control IC shuts off the transistor upon detecting a short circuit current from a voltage applied to the resistor.
3. The semiconductor device according to claim 1, wherein a length of the first wire is larger than a length of the second wire.
4. The semiconductor device according to claim 1, wherein the number of wires of the second wire is greater than the number of wires of the first wire.
5. The semiconductor device according to claim 3, further comprising a relay electrode provided in the package,
wherein the first wire includes a third wire connecting the main terminal to the relay electrode, and a fourth wire connecting the relay electrode to the main output electrode.
6. The semiconductor device according to claim 5, wherein the transistor, the main output electrode, the relay electrode, and the second, third and fourth wires are respectively divided into a plurality of phases, and
in each phase, if the third wire becomes longer, the number of wires of the fourth wire is increased.
7. The semiconductor device according to claim 6, wherein the sense output electrode is divided into a plurality of frames, which are mutually connected via fifth wires, and
the sense terminals of the transistor of the respective phases are connected to the divided frames respectively.
8. The semiconductor device according to claim 1, wherein the transistor is a SiCMOS transistor.
US15/796,878 2017-04-24 2017-10-30 Packaged semiconductor device Active US10122358B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-085648 2017-04-24
JP2017085648A JP6729474B2 (en) 2017-04-24 2017-04-24 Semiconductor device

Publications (2)

Publication Number Publication Date
US20180309441A1 true US20180309441A1 (en) 2018-10-25
US10122358B1 US10122358B1 (en) 2018-11-06

Family

ID=63714657

Family Applications (1)

Application Number Title Priority Date Filing Date
US15/796,878 Active US10122358B1 (en) 2017-04-24 2017-10-30 Packaged semiconductor device

Country Status (4)

Country Link
US (1) US10122358B1 (en)
JP (1) JP6729474B2 (en)
CN (1) CN108736740B (en)
DE (1) DE102017223060B4 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4156252A4 (en) * 2020-05-19 2023-08-09 Mitsubishi Electric Corporation Semiconductor module

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04186645A (en) * 1990-11-16 1992-07-03 Sanyo Electric Co Ltd Manufacture of microwave integrated circuit
JPH106384A (en) 1996-06-18 1998-01-13 Nippon Ester Co Ltd Polymer sheet molding apparatus
JP4708951B2 (en) * 2005-10-21 2011-06-22 ニチコン株式会社 Inverter module and inverter-integrated AC motor using the same
JP5444619B2 (en) * 2008-02-07 2014-03-19 株式会社ジェイテクト Multi-layer circuit board and motor drive circuit board
JP2011182591A (en) * 2010-03-02 2011-09-15 Panasonic Corp Semiconductor device
JP5280410B2 (en) * 2010-06-21 2013-09-04 三菱電機株式会社 Semiconductor devices and snubber devices
JP5706251B2 (en) * 2011-06-30 2015-04-22 ルネサスエレクトロニクス株式会社 Semiconductor device
JP2013106384A (en) 2011-11-10 2013-05-30 Toyota Motor Corp Power conversion apparatus and current adjustment method for the same
US9781556B2 (en) 2013-04-05 2017-10-03 Intel Corporation Network-assisted to direct device discovery switch
JP6094420B2 (en) * 2013-08-09 2017-03-15 三菱電機株式会社 Semiconductor device
JP2015228447A (en) * 2014-06-02 2015-12-17 株式会社デンソー Semiconductor device manufacturing method
US9831159B2 (en) * 2015-06-09 2017-11-28 Infineon Technologies Americas Corp. Semiconductor package with embedded output inductor
JP6520437B2 (en) * 2015-06-12 2019-05-29 富士電機株式会社 Semiconductor device
JP2017069412A (en) * 2015-09-30 2017-04-06 ルネサスエレクトロニクス株式会社 Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4156252A4 (en) * 2020-05-19 2023-08-09 Mitsubishi Electric Corporation Semiconductor module

Also Published As

Publication number Publication date
JP6729474B2 (en) 2020-07-22
DE102017223060B4 (en) 2021-05-12
JP2018186600A (en) 2018-11-22
DE102017223060A1 (en) 2018-10-25
US10122358B1 (en) 2018-11-06
CN108736740A (en) 2018-11-02
CN108736740B (en) 2020-06-30

Similar Documents

Publication Publication Date Title
JP5783997B2 (en) Power semiconductor device
US7414867B2 (en) Power conversion device
US8027183B2 (en) 3-phase inverter module, motor driving apparatus using the same, and inverter integrated circuit package
US10134718B2 (en) Power semiconductor module
US9941255B2 (en) Power semiconductor module
US9496800B2 (en) Method for activating a rectifier, which has active switching elements
US20170110395A1 (en) Semiconductor device
CN106208634B (en) Method and apparatus for current/power balancing
CA2986883C (en) Power conversion device
WO2014136252A1 (en) Semiconductor device
CN106487264B (en) Semiconductor integrated circuit device for driving power semiconductor device and electronic device
US11309887B2 (en) Conversion circuit
KR102117719B1 (en) Power semiconductor circuit
US10574223B1 (en) Paralleled power semiconductors with chokes in gate path
US10122358B1 (en) Packaged semiconductor device
KR102055461B1 (en) Power semiconductor circuit
US20210366813A1 (en) Power semiconductor module
CN101946412B (en) Method for limiting an un-mirrored current and circuit therefor
US10700681B1 (en) Paralleled power module with additional emitter/source path
US10629587B2 (en) Protection circuit and protection circuit system
US10396774B2 (en) Intelligent power module operable to be driven by negative gate voltage
KR20200123385A (en) Power module with integrated surge voltage limiting element
JP2019161495A (en) Semiconductor device and apparatus
US20220321022A1 (en) Semiconductor module
US20110249478A1 (en) Power output stage for a pulse-controlled inverter

Legal Events

Date Code Title Description
AS Assignment

Owner name: MITSUBISHI ELECTRIC CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SHIRAISHI, TAKUYA;REEL/FRAME:043977/0390

Effective date: 20171002

FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

STCF Information on status: patent grant

Free format text: PATENTED CASE

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 4