US20180112666A1 - Vacuum pump system - Google Patents

Vacuum pump system Download PDF

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Publication number
US20180112666A1
US20180112666A1 US15/568,846 US201615568846A US2018112666A1 US 20180112666 A1 US20180112666 A1 US 20180112666A1 US 201615568846 A US201615568846 A US 201615568846A US 2018112666 A1 US2018112666 A1 US 2018112666A1
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US
United States
Prior art keywords
pumps
vacuum
vacuum pumps
pump
during
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US15/568,846
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English (en)
Inventor
Thomas Dreifert
Roland Müller
Max Pelikan
Dirk Schiller
Daniel Schneidenbach
Dirk Stratmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Assigned to LEYBOLD GMBH reassignment LEYBOLD GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SCHILLER, DIRK, SCHNEIDENBACH, Daniel, STRATMANN, Dirk, Müller, Roland , PELIKAN, Max, DREIFERT, THOMAS
Publication of US20180112666A1 publication Critical patent/US20180112666A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F04C28/065—Capacity control using a multiplicity of units or pumping capacities, e.g. multiple chambers, individually switchable or controllable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/70—Use of multiplicity of similar components; Modular construction

Definitions

  • the present disclosure relates to a vacuum pump system for evacuating a chamber, in particular a process or lock chamber.
  • Vacuum pump systems for regularly evacuating large chambers are known from prior art, FIG. 1 .
  • vacuum pumps operating in a dryly compressing manner are used for this purpose.
  • backing pumps such as screw pumps, claw pumps or multi-stage Roots pumps, and parallel-connected Roots pumps.
  • a plurality of pumps and a plurality of Roots pumps are connected in parallel.
  • Typical such pump systems are used in lock chambers, for example loadlock or unloadlock, e. g. in coating plants.
  • a chamber In these plants a chamber must be pumped down from atmospheric pressure to a transfer pressure of typically approximately 0.1 mbar to 10 mbar within a short period of time, e. g. a pumping-down period of 20 seconds to 120 seconds.
  • a vacuum pump is separated from the chamber to be evacuated by a valve on the inlet side and operates for a certain period of time, typically one to ten times the pumping-out time, in discharge pressure operation.
  • the vacuum pump system must be very largely dimensioned for realizing the short pumping-out period.
  • large suction capacities of the pump systems are however not necessary. Consequently, during an idle and/or during a hold period an unnecessarily high energy expenditure of the pump is required.
  • Some pump systems having backing and/or Roots pumps are temporarily shut down. In this case it is disadvantageous that the pumps become cold which has a negative effect on the service life of the components. Further, linings may stick together and block the rotors. During short idle and/or hold periods the pumps must frequently be accelerated again which requires more power and very largely dimensioned motors. It is therefore not common practice to shut down pumps.
  • each backing pump an additional small auxiliary pump is connected in series, FIG. 3 .
  • This may e. g. be an ejector pump or another smaller backing pump.
  • Parallel to the auxiliary pump a switch valve or a check valve having an adequate cross section must normally be arranged in order to avoid too high pressures between the backing and auxiliary pumps during the pumping-out period.
  • auxiliary pumps such as ejector pumps, for example, cannot reduce the outlet pressure of the backing pump rapidly enough for attaining adequate power savings during short idle and/or hold periods. Further, the auxiliary pumps require energy for operation.
  • auxiliary pumps On the outlet side of the backing pump a small number of further large backing pumps may be arranged as large auxiliary pumps, FIG. 2 . They are connected in series with the backing pumps via a pipeline system. In this case, too, at least one valve having an adequate cross section must normally be arranged parallel to the auxiliary pump for avoiding high pressures between the backing and auxiliary pumps during the pumping-out period.
  • This solution is disadvantageous due to the additional purchase and operating costs as well as the space required for the auxiliary pumps.
  • a pump system having a plurality of vacuum pumps which are connected in parallel with each other and are each connected to a chamber at their inlet side, FIG. 4 .
  • the pump system further comprises an outlet line which is connected to the outlet side of the vacuum pumps.
  • the pump system comprises an intermediate line which connects the inlet side of at least one of the vacuum pumps with the outlet side. During a pumping-out period all vacuum pumps are connected in parallel and during an idle and/or hold period at least one of the vacuum pumps is connected in series with the other vacuum pumps as a backing pump.
  • the vacuum pump system further comprises switchover means both in connections of the inlet sides to the chambers and in an intermediate line. These switchover means may comprise valves, for example.
  • switchover means may comprise valves, for example.
  • the pumps Due to the reduced energy expenditure of the pump system the pumps are operated in a relatively cold state such that the service life of normal wear parts is significantly increased, for example oil, bearings, seals, power electronics in the drive unit. Further, due to this reduced energy expenditure attributable to reduced waste heat the costs for air-conditioning of the installation site and cooling of the pumps are reduced. Due to the reduced pressure in the outlet during operation condensation of vapors in the pumps is also avoided, whereby damage caused by corrosion can be reduced.
  • At least one vacuum pump can be connected in series as a backing pump a very low discharge and/or operating pressure can be attained.
  • the pump system according to the disclosure allows for a high redundancy since even if individual pumps in such a group fail the process is allowed to be continued. Thus all pumps can fulfill their tasks even without any auxiliary pumps.
  • a plurality of pumps may be incorporated in such a way that they can be used as an auxiliary pump. Besides a reduction of the power consumption and thus reduced operating costs, the CO 2 footprint for such an application according to the disclosure is improved.
  • the vacuum pumps which are to be connected in series as backing pumps meet certain technical requirements. It is particularly preferred that these vacuum pumps are sealed such that they can reliably operate at strongly reduced outlet pressures without any gas or oil leakage. Particularly preferred are outlet pressures of the backing pumps during idle and/or hold operation in a range of 10 mbar to 500 mbar. Further, it is particularly preferred that the thermal behavior of the pumps reliably allows for operation at a strongly reduced outlet pressure. This aspect relates in particular to the gap heights, the oil viscosity and the lubrication of bearings.
  • oil-lubricated spaces are sealed towards a working space such that even at very rapid cycles no strong oil spreading takes place.
  • shaft seals are preferably to be configured such that they do not prematurely suffer from wear caused by rapidly changing pressure differences.
  • compensation lines between oil-lubricated spaces and the working space which comprise an oil separator.
  • FIGS. 1 to 3 show embodiments according to examples of prior art
  • FIGS. 4 to 6 show exemplary embodiments according to the disclosure.
  • FIG. 1 shows a vacuum pump system 1 having a lock chamber 10 and parallel-connected pumps P 1 -P 5 each of which is connected on its inlet side with the lock chamber.
  • the vacuum pump system 1 comprises valves V 1 -V 5 , by means of which the connection from the pump inlets of the pumps P 1 -P 5 to the lock chamber 10 can be disconnected.
  • the illustrated vacuum pump system is known from prior art. During a pumping-out period the valves V 1 -V 5 are open. The pumps P 1 -P 5 consume a lot of power during the pumping-out period and operate at full speed. The pressure in the lock chamber decreases continuously.
  • valves V 1 -V 5 are dosed and the pumps P 1 -P 5 operate at full speed, wherein the power consumption essentially corresponds to that of the operation at a discharge pressure and continues to be relatively high.
  • the pressure in the lock chamber is equal to a transfer pressure.
  • valves V 1 -V 5 are open and the pumps P 1 -P 5 operate at a low operating pressure.
  • the vacuum pump system illustrated in FIG. 2 is known from prior art.
  • the pump system is extended by a relatively largely dimensioned auxiliary pump P 26 as well as by the check valves CV 1 -CV 5 .
  • the parallel-connected pumps P 21 -P 25 are connected with a chamber 20 . During a pumping-out period both the valves V 21 -V 25 and the check valves CV 21 -CV 25 are open. The inlet pressure of the additional auxiliary pump P 26 is approximately equal to the outlet pressure of the auxiliary pump.
  • valves V 21 -V 25 are closed. Subsequently, the check valves CV 21 -CV 25 are also closed. During this operation the inlet pressure of the auxiliary pump P 26 is considerably lower than the outlet pressure of the auxiliary pump P 26 .
  • FIG. 3 shows a prior art configuration of a vacuum pump system for a lock chamber 30 having small auxiliary pumps P 33 and P 34 .
  • An ejector pump may be selected as the auxiliary pump, for example.
  • valves V 31 and V 32 as well as the check valves CV 31 and CV 32 are open.
  • the inlet pressures of the auxiliary pumps P 33 and P 34 are approximately equal to the outlet pressures of the auxiliary pumps P 33 and P 34 .
  • valves V 31 and V 32 are closed.
  • the check valves CV 31 and CV 32 are also closed during an idle period.
  • the outlet pressures of the auxiliary pumps P 33 and P 34 are substantially larger than the inlet pressures of these auxiliary pumps P 33 and P 34 during the idle period.
  • FIGS. 4 to 6 show configurations of the vacuum pump system according to the disclosure.
  • the vacuum pump system shown in FIG. 4 comprises five parallel-connected vacuum pumps P 41 , P 42 , P 43 , P 44 , P 45 .
  • the inlets of the vacuum pumps P 41 , P 42 , P 43 , P 44 , P 45 are connected with a vacuum chamber 40 .
  • a valve V 41 , V 42 , V 43 , V 44 , V 45 is provided between the respective vacuum pumps P 41 , P 42 , P 43 , P 44 , P 45 .
  • the outlet sides of the pumps P 41 , P 42 , P 43 , P 44 , P 45 are connected with a common outlet 41 via check valves CV 41 CV 42 , CV 43 CV 44 , CV 45 .
  • the pump P 41 can be connected in series with the pumps P 42 , P 43 , P 44 , P 45 in the exemplary embodiment of the vacuum pump system of FIG. 4 .
  • the vacuum pump P 41 which is to be used as a backing or as an auxiliary pump can generally be smaller designed than the other vacuum pumps. Thus the power consumption during the idle and/or hold operation is further reduced.
  • FIG. 4 shows a vacuum pump system where the valves V 41 -V 45 are open and the valve V 46 is closed during a pumping-out period. In addition, the check valves CV 41 -CV 45 are open during the pumping-out period.
  • V 41 -V 45 are closed, V 46 is open.
  • the check valve CV 41 is also open during this operation as long as the pump system is evacuated by the pump P 41 . Thereafter it is closed.
  • the check valves CV 42 -CV 45 are closed during the idle operation.
  • the reduction of the power consumption in the idle state amounts to up to 40% in some exemplary embodiments.
  • the described series connection of the vacuum pump as a backing pump can also be used for improving the feed of light gases.
  • this pump connection can also be used for regulating the chamber pressure or the process flow.
  • the auxiliary pump ensures that the operating pressure range is reliably reached.
  • the backing pumps can then be reliably regulated in a very large speed range.
  • FIG. 5 illustrates a minimal configuration for lock chambers in the exemplary embodiment of FIG. 5 a pump system merely having two vacuum pumps P 51 , P 52 is selected as an example. They comprise a common inlet line which is connected with a vacuum chamber 50 via a valve V 52 . Merely the outlet of the vacuum pump P 52 is connected with the common outlet 51 via a check valve CV 51 . The outlet of the pump P 51 is directly connected with the common outlet 51 . Via an additional line 52 in which a valve V 51 is arranged and which extends from the outlet of the pump P 52 to the inlet of the pump P 51 the pump P 51 can evacuate the other pump P 52 from both sides during the idle period. In the example of FIG. 5 the pumps P 51 and P 52 can however not be connected in series.
  • FIG. 6 shows a minimal configuration for process chambers.
  • V 61 is open such that P 62 and P 61 are evacuated from both sides.
  • V 6 is closed such that the process chamber can be evacuated within a short period of time.
  • further pumps can be connected in parallel with the pumps P 52 and P 62 and operated accordingly.
  • the solutions described here can be realized for combinations with two or more backing pumps.
  • the respective number and size of the pumps can be freely adapted to the application.
  • the Roots pumps connected in series with the backing pumps have generally no influence on the solutions. Therefore they have net been illustrated in the examples.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US15/568,846 2015-06-26 2016-06-20 Vacuum pump system Abandoned US20180112666A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE202015004596.0U DE202015004596U1 (de) 2015-06-26 2015-06-26 Vakuumpumpensystem
DE202015004596.0 2015-06-26
PCT/EP2016/064163 WO2016207106A1 (fr) 2015-06-26 2016-06-20 Système de pompes à vide

Publications (1)

Publication Number Publication Date
US20180112666A1 true US20180112666A1 (en) 2018-04-26

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ID=54262130

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Application Number Title Priority Date Filing Date
US15/568,846 Abandoned US20180112666A1 (en) 2015-06-26 2016-06-20 Vacuum pump system

Country Status (7)

Country Link
US (1) US20180112666A1 (fr)
EP (1) EP3280915A1 (fr)
JP (1) JP6775527B2 (fr)
KR (1) KR20180026369A (fr)
CN (1) CN107850062A (fr)
DE (1) DE202015004596U1 (fr)
WO (1) WO2016207106A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11111922B2 (en) 2016-02-23 2021-09-07 Atlas Copco Airpower, Naamloze Vennootschap Method for operating a vacuum pump system and vacuum pump system applying such method
US11187222B2 (en) 2016-11-29 2021-11-30 Edwards Limited Vacuum pumping arrangement
WO2022142603A1 (fr) * 2020-12-30 2022-07-07 广州亚俊氏真空科技股份有限公司 Système de pompage à vide et machine d'emballage sous vide le comprenant
US11400237B2 (en) * 2019-07-02 2022-08-02 Impact Korea Co., Ltd. Medicine infusion apparatus including thermoelectric module
US11407541B2 (en) * 2019-09-15 2022-08-09 Wuhu Innovation New Materials Co., Ltd. Large industrial vacuum sealer system
CN115210468A (zh) * 2019-12-04 2022-10-18 阿特利耶博世股份有限公司 冗余泵送系统和利用此泵送系统的泵送方法

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Publication number Priority date Publication date Assignee Title
WO2017143410A1 (fr) * 2016-02-23 2017-08-31 Atlas Copco Airpower, Naamloze Vennootschap Procédé de fonctionnement d'un système de pompe à vide et système de pompe à vide appliquant un tel procédé
EP3489516B1 (fr) * 2017-11-24 2021-09-01 Pfeiffer Vacuum Gmbh Pompe à vide
TWI684707B (zh) * 2019-02-27 2020-02-11 亞台富士精機股份有限公司 尾氣真空節能幫浦系統
CN115263719A (zh) * 2022-07-29 2022-11-01 西安奕斯伟材料科技有限公司 一种用于调节拉晶炉内真空状态的系统和方法
KR102497090B1 (ko) 2022-08-18 2023-02-07 주식회사 세미안 오스뮴 유해가스 노출방지 기능을 갖는 오스뮴 코팅 장치

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US20130028757A1 (en) * 2010-03-31 2013-01-31 Edwards Limited Vacuum pumping system
US20130071274A1 (en) * 2010-05-11 2013-03-21 Edwards Limited Vacuum pumping system
US20130259711A1 (en) * 2012-03-30 2013-10-03 Pfeiffer Vaccum Gmbh Pumping system for evacuating gas from a plurality of chambers and method for controlling the pumping system
US20150044071A1 (en) * 2013-07-29 2015-02-12 Hella Kgaa Hueck & Co. Pump Arrangement

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CN201763565U (zh) * 2010-04-06 2011-03-16 汉钟精机股份有限公司 真空泵系统
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Publication number Priority date Publication date Assignee Title
US20060222506A1 (en) * 2005-04-05 2006-10-05 Alcatel Rapidly pumping out an enclosure while limiting energy consumption
US20130028757A1 (en) * 2010-03-31 2013-01-31 Edwards Limited Vacuum pumping system
US20130071274A1 (en) * 2010-05-11 2013-03-21 Edwards Limited Vacuum pumping system
US20130259711A1 (en) * 2012-03-30 2013-10-03 Pfeiffer Vaccum Gmbh Pumping system for evacuating gas from a plurality of chambers and method for controlling the pumping system
US20150044071A1 (en) * 2013-07-29 2015-02-12 Hella Kgaa Hueck & Co. Pump Arrangement

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11111922B2 (en) 2016-02-23 2021-09-07 Atlas Copco Airpower, Naamloze Vennootschap Method for operating a vacuum pump system and vacuum pump system applying such method
US11187222B2 (en) 2016-11-29 2021-11-30 Edwards Limited Vacuum pumping arrangement
US11400237B2 (en) * 2019-07-02 2022-08-02 Impact Korea Co., Ltd. Medicine infusion apparatus including thermoelectric module
US11407541B2 (en) * 2019-09-15 2022-08-09 Wuhu Innovation New Materials Co., Ltd. Large industrial vacuum sealer system
CN115210468A (zh) * 2019-12-04 2022-10-18 阿特利耶博世股份有限公司 冗余泵送系统和利用此泵送系统的泵送方法
WO2022142603A1 (fr) * 2020-12-30 2022-07-07 广州亚俊氏真空科技股份有限公司 Système de pompage à vide et machine d'emballage sous vide le comprenant

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Publication number Publication date
WO2016207106A1 (fr) 2016-12-29
JP2018518623A (ja) 2018-07-12
CN107850062A (zh) 2018-03-27
KR20180026369A (ko) 2018-03-12
EP3280915A1 (fr) 2018-02-14
DE202015004596U1 (de) 2015-09-21
JP6775527B2 (ja) 2020-10-28

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