US20160243669A1 - Clamp jig and method of polishing workpiece - Google Patents
Clamp jig and method of polishing workpiece Download PDFInfo
- Publication number
- US20160243669A1 US20160243669A1 US15/045,647 US201615045647A US2016243669A1 US 20160243669 A1 US20160243669 A1 US 20160243669A1 US 201615045647 A US201615045647 A US 201615045647A US 2016243669 A1 US2016243669 A1 US 2016243669A1
- Authority
- US
- United States
- Prior art keywords
- workpiece
- clamp jig
- clamping member
- elastic member
- held
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/048—Lapping machines or devices; Accessories designed for working plane surfaces of sliders and magnetic heads of hard disc drives or the like
Definitions
- the present invention relates to a clamp jig and a method of polishing a workpiece that can prevent the decrease in torsion accuracy caused by residual stress generated during polishing of a magnetic head element.
- a magnetic head element used in a magnetic disk device is manufactured as follows: a number of workpieces (also referred to as a low bar) 3 are-disposed on a disk-like wafer substrate 2 by a semiconductor manufacturing technique as illustrated in FIG. 5A ; the workpiece 3 cut from the wafer substrate 2 is firmly fixed to a workpiece bonding member 4 as illustrated in FIG. 5B ; and a clamp jig 5 grasping the workpiece 3 attached to the workpiece bonding member 4 is pressed against a surface plate 6 rotating in a direction indicated by an arrow D and also moves reciprocally in a direction indicated by an arrow E as illustrated in FIG. 5C , whereby a magnetic head floating surface is polished.
- JP 5-20643 A A technique associated with a magnetic head machining apparatus according to the related art is disclosed in JP 5-20643 A.
- JP 5-20643 A a plurality of cuts are formed on a floating surface of a workpiece at regular intervals to alleviate internal stress during polishing.
- the internal stress can be alleviated by the plurality of cuts formed on the floating surface of the workpiece during the polishing, but there have been problems that multiple times of cutting are difficult with high accuracy and internal stress may remain in the workpiece during the cutting.
- An object of the invention is to solve the above problems according to the related art and is to provide a clamp jig and a method of polishing a workpiece that can prevent the decrease in torsion accuracy caused by residual stress.
- an aspect of the invention is to provide a clamp jig grasping a curved workpiece, the clamp jig including: a workpiece bonding member in which the workpiece is bonded to one end side thereof to be held; one clamping member and the other clamping member between which an end of the workpiece bonded to the workpiece bonding member to be held is sandwiched from both sides thereof; an elastic member made of an elastic material that comes in contact with an end of the one clamping member; and a plurality of holding members that push the workpiece by supporting the end of the workpiece at multiple points of the elastic member, in which the end of the workpiece is supported at multi-contacts in a state where curvature of the workpiece is maintained.
- Another aspect of the invention is to provide a method of polishing a workpiece in which a clamp jig is used and a lower end of the clamp jig is polished by a rotary surface plate
- the clamp jig including: a workpiece bonding member in which a curved workpiece is bonded to one end side thereof to be held; one clamping member and the other clamping member between which an end of the workpiece bonded to the workpiece bonding member to be held is sandwiched from both sides thereof; an elastic member made of an elastic material that comes in contact with an end of the one clamping member; and a plurality of holding members that push the workpiece by supporting the end of the workpiece at multiple points of the elastic member, in which, when the surface plate rotates, the clamp jig reciprocally moves in a radial direction of the surface plate in a state where the end of the workpiece is maintained between the one and the other clamping members while being curved by the elastic member and the plurality of holding members.
- the clamp jig and the method of polishing the workpiece of the invention since one and the other clamping members hold the end of the workpiece to maintain the curvature of the workpiece by the elastic member and the plurality of holding members and the polishing is performed without correction of the curvature of the workpiece in this state, residual stress is not generated by the correction, and torsion accuracy can be prevented from deteriorating.
- FIG. 1 is a diagram illustrating an exploded state of a clamp jig according to an embodiment of the invention
- FIG. 2 is a diagram illustrating an assembled state of the clam jig according to the embodiment
- FIG. 3 is an enlarged view illustrating a state of holding a tip portion of a workpiece according to the embodiment
- FIG. 4 is a diagram illustrating a principle of the clamp jig according to the embodiment.
- FIGS. 5A to 5C are diagrams illustrating a method of polishing a workpiece for a magnetic head element.
- FIG. 6 is a diagram illustrating a cross section of the workpiece.
- a clamp jig 5 includes: a workpiece bonding member 4 in which a workpiece 3 formed with a circuit element (circuit layer) is bonded to a lower surface thereof to be held; a clamping member 5 A and a jig base 5 C between which the workpiece bonding member 4 is sandwiched and fixed in a vertical direction; an elastic member 21 that is provided at an end of the clamping member 5 A; 19 holding members 8 that have tips formed into a rounded shape by rounding (R-working) so as to push the circuit element portion of the workpiece 3 against the end of the clamping member 5 A through the elastic member 21 ; and a clamping member 5 B that is configured such that the holding member 8 is fixed to be pressed against a side end of the clamping member 5 A, and can be assembled as illustrated in FIG. 2 .
- the holding members 8 are constituted of a substantially U-shaped ceramic material made of, for example, zirconia, and are arranged in a row to press the workpiece 3 against the elastic member 21 using the elastic repulsive force of the ceramic material. Each of the holding members 8 individually pushes the workpiece 3 .
- the elastic member 21 is in a flat shape in a state of not coming in contact with the workpiece 3 , but is elastically deformed along the shape of the workpiece 3 when being pressed against the workpiece 3 .
- the assembled clamp jig 5 can be assembled such that the end of the workpiece 3 is sandwiched from both sides by the clamping member 5 A and the clamping member 5 B when a state of holding the tip portion of the workpiece is viewed from a lateral direction as illustrated in FIG. 3 and that the plurality of holding members 8 pressed against the clamping member 5 A by the clamping member 5 B individually press the workpiece 3 against the elastic member 21 as illustrated in FIG. 4 that is an enlarged front view of a state where the holding members 8 push the end of the workpiece 3 against the elastic member 21 and the tip portion of the workpiece is held.
- the clamp jig 5 is configured such that when the workpiece 3 is curved, the elastic member 21 is elastically compressed and deformed along curvature of the workpiece 3 and each of the holding members 8 pushes the curved workpiece 3 along the curved surface, whereby the workpiece 3 can be held in the state where the curvature of the workpiece 3 is maintained, and that the workpiece 3 is supported at multiple points with respect to the elastic member 21 in the state where the curvature of the workpiece 3 is maintained.
- the understanding of the invention is to hold the workpiece 3 without deformation.
- the workpiece 3 is supported at multiple points by 19 holding members 8 .
- the number of the holding members 8 is set depending on rigidity of the ceramic material, and is not limited to the above number.
- the holding members 8 are constituted by infinite pushing points.
- the configuration of the infinite pushing points is considered that a portion coming in contact with the workpiece 3 is a flexible bag-shaped member filled with liquid or gas and the bag-shaped member is pressed against the workpiece 3 , whereby a uniform pressure is applied to a free curved surface.
- a circuit layer including a magnetic head element is grown in a thin film form on a ceramic layer by a semiconductor forming technique, whereby the above-described wafer substrate 2 is manufactured.
- the curvature of the workpiece 3 obtained by cutting of the wafer substrate 2 is caused by difference in coefficient of thermal expansion between a ceramic layer 3 B and a circuit layer 3 A during the growth of the thin film, as in a cross section illustrated in FIG. 6 .
- the fact is known that the circuit layer extends and the ceramic layer shrinks.
- the clamp jig 5 uses the plurality of holding members 8 and the elastic member 21 by which the workpiece can be supported at a plurality of multi-contacts, whereby the workpiece 3 can be clamped while being maintained in the curved state.
- the clamp jig 5 reciprocally moves in a radial direction of the surface plate in a state where the workpiece 3 is clamped between the clamping member 5 A and the clamping member 5 B while being maintained in a the curved state by the holding member 8 and the elastic member 21 by which the workpiece can be brought into contact with a plurality of points.
- the clamping members 5 A and 5 B holds the end of the workpiece 3 to maintain the curvature of the workpiece by the elastic member 21 and the plurality of holding members 8 , and the polishing is performed without correction of the curvature of the workpiece in this state, whereby residual stress is not generated by the correction, and the decrease in torsion accuracy can be prevented.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Magnetic Heads (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Provided is a clamp jig which includes: a workpiece bonding member in which a curved workpiece is bonded to one end side thereof to be held; one clamping member and the other clamping member between which an end of the workpiece bonded to the workpiece bonding member to be held is sandwiched from both sides thereof; an elastic member made of an elastic material that comes in contact with an end of the one clamping member; and a plurality of holding members that push the workpiece by supporting the end of the workpiece at multiple points of the elastic member. In the clamp jig, the end of the workpiece is supported at multi-contacts in a state where curvature of the workpiece is maintained.
Description
- 1. Field of the Invention
- The present invention relates to a clamp jig and a method of polishing a workpiece that can prevent the decrease in torsion accuracy caused by residual stress generated during polishing of a magnetic head element.
- 2. Description of the Related Art
- In recent years, a magnetic head element used in a magnetic disk device is manufactured as follows: a number of workpieces (also referred to as a low bar) 3 are-disposed on a disk-
like wafer substrate 2 by a semiconductor manufacturing technique as illustrated inFIG. 5A ; theworkpiece 3 cut from thewafer substrate 2 is firmly fixed to aworkpiece bonding member 4 as illustrated inFIG. 5B ; and a clamp jig 5 grasping theworkpiece 3 attached to theworkpiece bonding member 4 is pressed against asurface plate 6 rotating in a direction indicated by an arrow D and also moves reciprocally in a direction indicated by an arrow E as illustrated inFIG. 5C , whereby a magnetic head floating surface is polished. - A technique associated with a magnetic head machining apparatus according to the related art is disclosed in JP 5-20643 A. In JP 5-20643 A, a plurality of cuts are formed on a floating surface of a workpiece at regular intervals to alleviate internal stress during polishing.
- In a method of polishing the workpiece for magnetic head element according to the related art described above, since the
workpiece 3 is slightly curved before polishing and theworkpiece 3 is polished in a state where the workpiece bondingmember 4 corrects the curvature, there have been problems that residual stress remains in theworkpiece 3 after the polishing and torsion accuracy decreases to the extent of several nanometers. - In the technique disclosed in JP 5-20643 A, the internal stress can be alleviated by the plurality of cuts formed on the floating surface of the workpiece during the polishing, but there have been problems that multiple times of cutting are difficult with high accuracy and internal stress may remain in the workpiece during the cutting.
- An object of the invention is to solve the above problems according to the related art and is to provide a clamp jig and a method of polishing a workpiece that can prevent the decrease in torsion accuracy caused by residual stress.
- In order to achieve the above object, an aspect of the invention is to provide a clamp jig grasping a curved workpiece, the clamp jig including: a workpiece bonding member in which the workpiece is bonded to one end side thereof to be held; one clamping member and the other clamping member between which an end of the workpiece bonded to the workpiece bonding member to be held is sandwiched from both sides thereof; an elastic member made of an elastic material that comes in contact with an end of the one clamping member; and a plurality of holding members that push the workpiece by supporting the end of the workpiece at multiple points of the elastic member, in which the end of the workpiece is supported at multi-contacts in a state where curvature of the workpiece is maintained.
- Another aspect of the invention is to provide a method of polishing a workpiece in which a clamp jig is used and a lower end of the clamp jig is polished by a rotary surface plate, the clamp jig including: a workpiece bonding member in which a curved workpiece is bonded to one end side thereof to be held; one clamping member and the other clamping member between which an end of the workpiece bonded to the workpiece bonding member to be held is sandwiched from both sides thereof; an elastic member made of an elastic material that comes in contact with an end of the one clamping member; and a plurality of holding members that push the workpiece by supporting the end of the workpiece at multiple points of the elastic member, in which, when the surface plate rotates, the clamp jig reciprocally moves in a radial direction of the surface plate in a state where the end of the workpiece is maintained between the one and the other clamping members while being curved by the elastic member and the plurality of holding members.
- According to the clamp jig and the method of polishing the workpiece of the invention, since one and the other clamping members hold the end of the workpiece to maintain the curvature of the workpiece by the elastic member and the plurality of holding members and the polishing is performed without correction of the curvature of the workpiece in this state, residual stress is not generated by the correction, and torsion accuracy can be prevented from deteriorating.
-
FIG. 1 is a diagram illustrating an exploded state of a clamp jig according to an embodiment of the invention; -
FIG. 2 is a diagram illustrating an assembled state of the clam jig according to the embodiment; -
FIG. 3 is an enlarged view illustrating a state of holding a tip portion of a workpiece according to the embodiment; -
FIG. 4 is a diagram illustrating a principle of the clamp jig according to the embodiment; -
FIGS. 5A to 5C are diagrams illustrating a method of polishing a workpiece for a magnetic head element; and -
FIG. 6 is a diagram illustrating a cross section of the workpiece. - A clamp jig and a method of polishing a workpiece according to an embodiment of the invention will be described below in detail with reference to drawings.
- As illustrated in
FIG. 1 , a clamp jig 5 according to this embodiment includes: aworkpiece bonding member 4 in which aworkpiece 3 formed with a circuit element (circuit layer) is bonded to a lower surface thereof to be held; aclamping member 5A and ajig base 5C between which theworkpiece bonding member 4 is sandwiched and fixed in a vertical direction; anelastic member 21 that is provided at an end of theclamping member 5A; 19 holdingmembers 8 that have tips formed into a rounded shape by rounding (R-working) so as to push the circuit element portion of theworkpiece 3 against the end of theclamping member 5A through theelastic member 21; and aclamping member 5B that is configured such that theholding member 8 is fixed to be pressed against a side end of theclamping member 5A, and can be assembled as illustrated inFIG. 2 . - The
holding members 8 are constituted of a substantially U-shaped ceramic material made of, for example, zirconia, and are arranged in a row to press theworkpiece 3 against theelastic member 21 using the elastic repulsive force of the ceramic material. Each of theholding members 8 individually pushes theworkpiece 3. - The
elastic member 21 is in a flat shape in a state of not coming in contact with theworkpiece 3, but is elastically deformed along the shape of theworkpiece 3 when being pressed against theworkpiece 3. - The assembled clamp jig 5 can be assembled such that the end of the
workpiece 3 is sandwiched from both sides by theclamping member 5A and theclamping member 5B when a state of holding the tip portion of the workpiece is viewed from a lateral direction as illustrated inFIG. 3 and that the plurality of holdingmembers 8 pressed against theclamping member 5A by theclamping member 5B individually press theworkpiece 3 against theelastic member 21 as illustrated inFIG. 4 that is an enlarged front view of a state where theholding members 8 push the end of theworkpiece 3 against theelastic member 21 and the tip portion of the workpiece is held. - In this state, the clamp jig 5 is configured such that when the
workpiece 3 is curved, theelastic member 21 is elastically compressed and deformed along curvature of theworkpiece 3 and each of theholding members 8 pushes thecurved workpiece 3 along the curved surface, whereby theworkpiece 3 can be held in the state where the curvature of theworkpiece 3 is maintained, and that theworkpiece 3 is supported at multiple points with respect to theelastic member 21 in the state where the curvature of theworkpiece 3 is maintained. The understanding of the invention is to hold theworkpiece 3 without deformation. - In an example of the embodiment as illustrated in
FIG. 4 , theworkpiece 3 is supported at multiple points by 19holding members 8. However, the number of theholding members 8 is set depending on rigidity of the ceramic material, and is not limited to the above number. Preferably, theholding members 8 are constituted by infinite pushing points. For example, the configuration of the infinite pushing points is considered that a portion coming in contact with theworkpiece 3 is a flexible bag-shaped member filled with liquid or gas and the bag-shaped member is pressed against theworkpiece 3, whereby a uniform pressure is applied to a free curved surface. - A circuit layer including a magnetic head element is grown in a thin film form on a ceramic layer by a semiconductor forming technique, whereby the above-described
wafer substrate 2 is manufactured. Thus, the curvature of theworkpiece 3 obtained by cutting of thewafer substrate 2 is caused by difference in coefficient of thermal expansion between aceramic layer 3B and acircuit layer 3A during the growth of the thin film, as in a cross section illustrated inFIG. 6 . In a direction of the curvature, the fact is known that the circuit layer extends and the ceramic layer shrinks. - For this reason, the clamp jig 5 according to this embodiment uses the plurality of holding
members 8 and theelastic member 21 by which the workpiece can be supported at a plurality of multi-contacts, whereby theworkpiece 3 can be clamped while being maintained in the curved state. - In a method of polishing the workpiece according to this embodiment, when a surface plate rotates, the clamp jig 5 reciprocally moves in a radial direction of the surface plate in a state where the
workpiece 3 is clamped between theclamping member 5A and theclamping member 5B while being maintained in a the curved state by theholding member 8 and theelastic member 21 by which the workpiece can be brought into contact with a plurality of points. - Therefore, according to the method of this embodiment, since the
workpiece 3 is polished in the state of being curved state without correction of the curvature of theworkpiece 3, residual stress is not generated by the correction of the curvature, and the decrease in torsion accuracy can be prevented. - According to the clamp jig and the method of polishing the workpiece of this embodiment, the clamping
members workpiece 3 to maintain the curvature of the workpiece by theelastic member 21 and the plurality of holdingmembers 8, and the polishing is performed without correction of the curvature of the workpiece in this state, whereby residual stress is not generated by the correction, and the decrease in torsion accuracy can be prevented.
Claims (2)
1. A clamp jig grasping a curved workpiece, comprising:
a workpiece bonding member in which the workpiece is bonded to one end side thereof to be held;
one clamping member and the other clamping member between which an end of the workpiece bonded to the workpiece bonding member to be held is sandwiched from both sides thereof;
an elastic member made of an elastic material that comes in contact with an end of the one clamping member; and
a plurality of holding members that push the workpiece by supporting the end of the workpiece at multiple points of the elastic member, wherein
the end of the workpiece is supported at multi-contacts in a state where curvature of the workpiece is maintained.
2. A method of polishing a workpiece in which a clamp jig is used and a lower end of the clamp jig is polished by a rotary surface plate, the clamp jig including: a workpiece bonding member in which a curved workpiece is bonded to one end side thereof to be held; one clamping member and the other clamping member between which an end of the workpiece bonded to the workpiece bonding member to be held is sandwiched from both sides thereof; an elastic member made of an elastic material that comes in contact with an end of the one clamping member; and a plurality of holding members that push the workpiece by supporting the end of the workpiece at multiple points of the elastic member, wherein
when the surface plate rotates, the clamp jig reciprocally moves in a radial direction of the surface plate in a state where the end of the workpiece is maintained between the one and the other clamping members while being curved by the elastic member and the plurality of holding members.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015033881A JP6454454B2 (en) | 2015-02-24 | 2015-02-24 | Clamp jig and workpiece polishing method |
JP2015-033881 | 2015-02-24 |
Publications (1)
Publication Number | Publication Date |
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US20160243669A1 true US20160243669A1 (en) | 2016-08-25 |
Family
ID=56693530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US15/045,647 Abandoned US20160243669A1 (en) | 2015-02-24 | 2016-02-17 | Clamp jig and method of polishing workpiece |
Country Status (2)
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US (1) | US20160243669A1 (en) |
JP (1) | JP6454454B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114850987A (en) * | 2022-07-05 | 2022-08-05 | 江苏泽恩机械科技有限公司 | Automatic feeding device for machining of bearing inner ring |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5607340A (en) * | 1995-06-06 | 1997-03-04 | Lackey; Stanley A. | Row tool |
US5749769A (en) * | 1994-12-16 | 1998-05-12 | International Business Machines Corporation | Lapping process using micro-advancement for optimizing flatness of a magnetic head air bearing surface |
US6174218B1 (en) * | 1999-04-21 | 2001-01-16 | International Business Machines Corporation | Bow compensated lapping |
US20050064793A1 (en) * | 2003-09-18 | 2005-03-24 | Fujitsu Limited | Apparatus and method for polishing row bars |
US9421665B2 (en) * | 2014-02-05 | 2016-08-23 | Veeco Instruments, Inc. | Pressure-adjusting lapping element |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5150499U (en) * | 1974-10-16 | 1976-04-16 | ||
JP2001030157A (en) * | 1999-07-21 | 2001-02-06 | Hitachi Metals Ltd | Machining method and machining device for magnetic head, and machining jig |
JP2008290210A (en) * | 2007-05-25 | 2008-12-04 | Fujitsu Ltd | Polishing tool |
-
2015
- 2015-02-24 JP JP2015033881A patent/JP6454454B2/en active Active
-
2016
- 2016-02-17 US US15/045,647 patent/US20160243669A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5749769A (en) * | 1994-12-16 | 1998-05-12 | International Business Machines Corporation | Lapping process using micro-advancement for optimizing flatness of a magnetic head air bearing surface |
US5607340A (en) * | 1995-06-06 | 1997-03-04 | Lackey; Stanley A. | Row tool |
US6174218B1 (en) * | 1999-04-21 | 2001-01-16 | International Business Machines Corporation | Bow compensated lapping |
US20050064793A1 (en) * | 2003-09-18 | 2005-03-24 | Fujitsu Limited | Apparatus and method for polishing row bars |
US9421665B2 (en) * | 2014-02-05 | 2016-08-23 | Veeco Instruments, Inc. | Pressure-adjusting lapping element |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114850987A (en) * | 2022-07-05 | 2022-08-05 | 江苏泽恩机械科技有限公司 | Automatic feeding device for machining of bearing inner ring |
Also Published As
Publication number | Publication date |
---|---|
JP6454454B2 (en) | 2019-01-16 |
JP2016155190A (en) | 2016-09-01 |
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