US20150076029A1 - Package assembly for thin wafer shipping - Google Patents
Package assembly for thin wafer shipping Download PDFInfo
- Publication number
- US20150076029A1 US20150076029A1 US14/031,208 US201314031208A US2015076029A1 US 20150076029 A1 US20150076029 A1 US 20150076029A1 US 201314031208 A US201314031208 A US 201314031208A US 2015076029 A1 US2015076029 A1 US 2015076029A1
- Authority
- US
- United States
- Prior art keywords
- wafers
- package assembly
- stack
- distribution plates
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
- B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B23/00—Packaging fragile or shock-sensitive articles other than bottles; Unpacking eggs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B55/00—Preserving, protecting or purifying packages or package contents in association with packaging
- B65B55/20—Embedding contents in shock-absorbing media, e.g. plastic foam, granular material
Definitions
- the invention relates to packaging assemblies and, more particularly, to a package assembly for thin wafer shipping using force distribution plates and a method of use.
- TSV through silicon vias
- the wafers are placed into plastic containers for shipping.
- the wafers are manually placed into the containers with foam cushions on the bottom and on top and thin cleanroom paper dispersed between each wafer. Once placed into the containers, a top is placed onto the container.
- the thinned wafers are subjected to an unacceptably high risk of damage. For example, when the thin wafers are flexed, whether during the packaging or shipping process, they become susceptible to micro-crack generation, which ultimately leads to wafer breakage.
- a package assembly comprises a container and upper and lower force distribution plates provided within the container.
- the upper and lower force distribution plates are positioned respectively on a top side and bottom side of the container.
- a package assembly comprises: a container; a stack of wafers interposed with ESD compliant material sheets positioned within the container; and a distribution plate positioned on a top side and bottom side of the stack of wafers within the container.
- the distribution plates are structured to: contain the stack of wafers as a unit, allowing them to move only as a unit; and distribute forces across a surface of the stack of wafers.
- a method comprises: placing a lower foam cushion or sheet in a bottom of a container; placing a lower distribution plate in the container, above the lower foam cushion or sheet; stacking a plurality of wafers and sheets interposed therebetween on the lower distribution plate; placing an upper distribution plate in the container, on top of the stack of wafers; placing an upper foam cushion or sheet on the upper distribution plate; and sealing the container.
- FIG. 1 shows a force distribution plate in accordance with aspects of the present invention
- FIG. 2 shows a shipping container using the force distribution plate of FIG. 1 , in accordance with aspects of the present invention
- FIG. 3 shows another variation of the shipping container using the force distribution plate of FIG. 1 , in accordance with aspects of the present invention.
- FIG. 4 shows a mechanical equivalent shipping container of either FIG. 2 or FIG. 3 , in accordance with aspects of the present invention.
- the invention relates to packaging assemblies and, more particularly, to a package assembly for thin wafer shipping using force distribution plates and a method of use. More specifically, the present invention incorporates force distribution plates within the package assembly to reduce flexing of the thin wafers while in transit.
- the force distribution plates are rigid plates placed below and above a stack of thin wafers in a container, thereby restricting flexure of the wafer and reducing wafer breakage.
- FIG. 1 shows a force distribution plate in accordance with aspects of the present invention.
- the force distribution plate 10 is a reasonably flat and rigid plate sized and shaped to approximately the size (e.g., diameter) of the wafer. Accordingly, the force distribution plate 10 is sized and shaped to fit within a shipping container.
- the force distribution plate 10 can be standard thickness silicon wafers or some other suitable material fabricated into force distribution plates.
- the force distribution plate 10 can be any ESD (electro-static discharge) compliant material such as metal discs, plastic discs with conductive coatings or other materials.
- the force distribution plate 10 can have a thickness of about 1 mm to about 2 mm; although other dimensions are contemplated by the present invention, depending on the material used to fabricate the force distribution plate 10 .
- the force distribution plate 10 is flat and rigid enough to prevent flexure of the wafers, during shipping.
- the force distribution plate 10 is rigid enough to withstand at least 1N or more of force, to prevent flexure of the thinned wafers. It is also advantageous to minimize the weight of the force distribution plate 10 .
- FIG. 2 shows a shipping container using the force distribution plate of FIG. 1 , in accordance with aspects of the present invention. More specifically as shown in FIG. 2 , two force distribution plates 10 are provided within a container 5 , on a top side and bottom side of a stack of wafers 15 .
- two force distribution plates 10 are provided within a container 5 , on a top side and bottom side of a stack of wafers 15 .
- the two force distribution plates 10 it is now possible to ship upwards of 13 or more 75 micron thin wafers 15 , without damage; compared to conventional systems which were able to stack only six wafers, with the possibility of damage occurring to some of those wafers.
- the two force distribution plates 10 advantageously distribute forces applied on the wafers over the entire surface of the wafers, thus reducing the overall force applied to any single point on the wafer. For example, vibration forces occurring during shipping as well as vertical forces applied onto the wafers during packaging and unpackaging can be distributed over the entire surface of the wafers, thereby reducing or eliminating a larger force being applied to any single point or small area on the wafer.
- the two force distribution plates 10 act to contain the thin wafers 15 as a unit, allowing them to move only as a unit and distributing all forces across the wafer surface thereby reducing and eliminating any damage to the wafers.
- the container 5 can be any known container currently used to ship wafers, e.g., plastic containers with a diameter of about the size of the wafers, themselves.
- the wafers 15 are placed in the container 5 and are separated and protected by sheets of cleanroom paper, TYVEK® (TYVEK is a trademark of DuPont Company) or other clean and ESD compliant material sheets, all of which are designated as reference numeral 20 .
- the ESD compliant material sheets 20 prevent rubbing and scratching of the wafers 15 .
- foam cushions or sheets 25 can be provided on the force distribution plates 10 , on opposing sides of the stack of wafers 15 .
- FIG. 3 shows another variation of the shipping container using the force distribution plate of FIG. 1 , in accordance with aspects of the present invention. More specifically, two force distribution plates 10 are provided within a container 5 , on a top side and bottom side of a stack of wafers 15 , providing the advantages as described herein.
- the wafers 15 are placed in the container 5 and are separated and protected by sheets of cleanroom paper, TYVEK® (TYVEK is a trademark of DuPont Company) or other clean and ESD compliant material sheets 20 .
- foam cushions or sheets 25 can be provided on the force distribution plates 10 , on opposing sides of the stack of wafers 15 .
- one or more perimeter cushions or sheets 25 ′ are provided about the edges or perimeter of the stack of wafers 15 to provide added protection.
- the one or more perimeter cushions or sheets 25 ′ prevent lateral movement of the thin wafers during shipping.
- a reinforced cover 30 is provided on the upper foam cushion 20 to provide added protection during shipping.
- the foam cushions or sheets 25 ′ and reinforced cover 30 can also be implemented in the embodiment of FIG. 2 .
- the force distribution plates 10 can be provided between stacks of wafers 15 .
- the container 5 is assembled as follows:
- side foam can provided about the perimeter of the container
- an upper force distribution plate is provided in the container, on top of the stack of wafers
- a top cover can be placed on the upper foam
- the wafer shipping container may then be disassembled by simply reversing the assembly process.
- FIG. 4 shows a mechanical equivalent shipping container of either FIG. 2 or FIG. 3 , in accordance with aspects of the present invention.
- the foam sheets are represented as springs 25 ′′, allowing the stack of wafers 15 bracketed by the force distribution plates 10 to move (slightly) as a unit, up and down.
- the force distribution plates 10 prevent the thin wafers from flexing while in the package, thus preventing damage.
- Table 1 shows testing performed on 100 micron, 85 micron, 75 micron and 65 micron wafers. As shown in this table, each of the wafers passed all testing: downward pressure test, vibration test and drop test.
- the method(s) as described above is used in the fabrication of integrated circuit chips.
- the resulting integrated circuit chips can be distributed by the fabricator in raw wafer form (that is, as a single wafer that has multiple unpackaged chips), as a bare die, or in a packaged form.
- the chip is mounted in a single chip package (such as a plastic carrier, with leads that are affixed to a motherboard or other higher level carrier) or in a multichip package (such as a ceramic carrier that has either or both surface interconnections or buried interconnections).
- the chip is then integrated with other chips, discrete circuit elements, and/or other signal processing devices as part of either (a) an intermediate product, such as a motherboard, or (b) an end product.
- the end product can be any product that includes integrated circuit chips, ranging from toys and other low-end applications to advanced computer products having a display, a keyboard or other input device, and a central processor.
Abstract
Description
- The invention relates to packaging assemblies and, more particularly, to a package assembly for thin wafer shipping using force distribution plates and a method of use.
- Semiconductor wafer manufacturing utilizes very sophisticated wafer processing procedures and complicated manufacturing systems. In efforts to reduce the size of the semiconductor package, manufacturers have reduced component sizes including the thickness of the wafer, itself. For example, wafer thinning can be performed by a grinding method to achieve a wafer thickness on the order of 100 microns and less. These thin wafers, though, are very fragile and brittle. Of particular concern are thinned wafers with through silicon vias (TSV), which can be about 25% as strong as non TSV wafers. For example, as the fracture strength varies with the square of wafer thickness, a force to break the thin wafers can be around 1N or less.
- Shipping of thin wafers is thus a difficult challenge. Currently, for example, the wafers are placed into plastic containers for shipping. In known implementations, the wafers are manually placed into the containers with foam cushions on the bottom and on top and thin cleanroom paper dispersed between each wafer. Once placed into the containers, a top is placed onto the container. However using these containers and methods of insertion, the thinned wafers are subjected to an unacceptably high risk of damage. For example, when the thin wafers are flexed, whether during the packaging or shipping process, they become susceptible to micro-crack generation, which ultimately leads to wafer breakage.
- Accordingly, there exists a need in the art to overcome the deficiencies and limitations described hereinabove.
- In an aspect of the invention, a package assembly comprises a container and upper and lower force distribution plates provided within the container. The upper and lower force distribution plates are positioned respectively on a top side and bottom side of the container.
- In an aspect of the invention, a package assembly comprises: a container; a stack of wafers interposed with ESD compliant material sheets positioned within the container; and a distribution plate positioned on a top side and bottom side of the stack of wafers within the container. The distribution plates are structured to: contain the stack of wafers as a unit, allowing them to move only as a unit; and distribute forces across a surface of the stack of wafers.
- In an aspect of the invention, a method comprises: placing a lower foam cushion or sheet in a bottom of a container; placing a lower distribution plate in the container, above the lower foam cushion or sheet; stacking a plurality of wafers and sheets interposed therebetween on the lower distribution plate; placing an upper distribution plate in the container, on top of the stack of wafers; placing an upper foam cushion or sheet on the upper distribution plate; and sealing the container.
- The present invention is described in the detailed description which follows, in reference to the noted plurality of drawings by way of non-limiting examples of exemplary embodiments of the present invention.
-
FIG. 1 shows a force distribution plate in accordance with aspects of the present invention; -
FIG. 2 shows a shipping container using the force distribution plate ofFIG. 1 , in accordance with aspects of the present invention; -
FIG. 3 shows another variation of the shipping container using the force distribution plate ofFIG. 1 , in accordance with aspects of the present invention; and -
FIG. 4 shows a mechanical equivalent shipping container of eitherFIG. 2 orFIG. 3 , in accordance with aspects of the present invention. - The invention relates to packaging assemblies and, more particularly, to a package assembly for thin wafer shipping using force distribution plates and a method of use. More specifically, the present invention incorporates force distribution plates within the package assembly to reduce flexing of the thin wafers while in transit. The force distribution plates are rigid plates placed below and above a stack of thin wafers in a container, thereby restricting flexure of the wafer and reducing wafer breakage.
-
FIG. 1 shows a force distribution plate in accordance with aspects of the present invention. In embodiments, theforce distribution plate 10 is a reasonably flat and rigid plate sized and shaped to approximately the size (e.g., diameter) of the wafer. Accordingly, theforce distribution plate 10 is sized and shaped to fit within a shipping container. Theforce distribution plate 10, for example, can be standard thickness silicon wafers or some other suitable material fabricated into force distribution plates. For example, theforce distribution plate 10 can be any ESD (electro-static discharge) compliant material such as metal discs, plastic discs with conductive coatings or other materials. - In embodiments, the
force distribution plate 10 can have a thickness of about 1 mm to about 2 mm; although other dimensions are contemplated by the present invention, depending on the material used to fabricate theforce distribution plate 10. Also, theforce distribution plate 10 is flat and rigid enough to prevent flexure of the wafers, during shipping. By way of example, theforce distribution plate 10 is rigid enough to withstand at least 1N or more of force, to prevent flexure of the thinned wafers. It is also advantageous to minimize the weight of theforce distribution plate 10. -
FIG. 2 shows a shipping container using the force distribution plate ofFIG. 1 , in accordance with aspects of the present invention. More specifically as shown inFIG. 2 , twoforce distribution plates 10 are provided within acontainer 5, on a top side and bottom side of a stack ofwafers 15. Advantageously, by using the twoforce distribution plates 10 it is now possible to ship upwards of 13 or more 75 micronthin wafers 15, without damage; compared to conventional systems which were able to stack only six wafers, with the possibility of damage occurring to some of those wafers. - The two
force distribution plates 10 advantageously distribute forces applied on the wafers over the entire surface of the wafers, thus reducing the overall force applied to any single point on the wafer. For example, vibration forces occurring during shipping as well as vertical forces applied onto the wafers during packaging and unpackaging can be distributed over the entire surface of the wafers, thereby reducing or eliminating a larger force being applied to any single point or small area on the wafer. Essentially, the twoforce distribution plates 10 act to contain thethin wafers 15 as a unit, allowing them to move only as a unit and distributing all forces across the wafer surface thereby reducing and eliminating any damage to the wafers. - Still referring to
FIG. 2 , thecontainer 5 can be any known container currently used to ship wafers, e.g., plastic containers with a diameter of about the size of the wafers, themselves. Thewafers 15 are placed in thecontainer 5 and are separated and protected by sheets of cleanroom paper, TYVEK® (TYVEK is a trademark of DuPont Company) or other clean and ESD compliant material sheets, all of which are designated asreference numeral 20. The ESDcompliant material sheets 20 prevent rubbing and scratching of thewafers 15. Also, foam cushions orsheets 25 can be provided on theforce distribution plates 10, on opposing sides of the stack ofwafers 15. -
FIG. 3 shows another variation of the shipping container using the force distribution plate ofFIG. 1 , in accordance with aspects of the present invention. More specifically, twoforce distribution plates 10 are provided within acontainer 5, on a top side and bottom side of a stack ofwafers 15, providing the advantages as described herein. Thewafers 15 are placed in thecontainer 5 and are separated and protected by sheets of cleanroom paper, TYVEK® (TYVEK is a trademark of DuPont Company) or other clean and ESDcompliant material sheets 20. Also, foam cushions orsheets 25 can be provided on theforce distribution plates 10, on opposing sides of the stack ofwafers 15. In addition, one or more perimeter cushions orsheets 25′ are provided about the edges or perimeter of the stack ofwafers 15 to provide added protection. The one or more perimeter cushions orsheets 25′ prevent lateral movement of the thin wafers during shipping. Also, in this aspect of the invention, a reinforcedcover 30 is provided on theupper foam cushion 20 to provide added protection during shipping. - As should be understood by those of skill in the art, the foam cushions or
sheets 25′ and reinforcedcover 30 can also be implemented in the embodiment ofFIG. 2 . Moreover, in any of the embodiments, it is also contemplated that theforce distribution plates 10 can be provided between stacks ofwafers 15. Also, in each of the embodiments, thecontainer 5 is assembled as follows: - (i) foam is placed in a bottom of the container;
- (ii) a lower force distribution plate is provided in the container, above the foam;
- (iii) in embodiments, side foam can provided about the perimeter of the container;
- (iv) a plurality of wafers and sheets therebetween are stacked on the lower distribution plate (within the side foam);
- (v) an upper force distribution plate is provided in the container, on top of the stack of wafers;
- (vi) upper foam is placed on the upper force distribution plate;
- (vii) in embodiments, a top cover can be placed on the upper foam; and
- (viii) the container is sealed.
- The wafer shipping container may then be disassembled by simply reversing the assembly process.
-
FIG. 4 shows a mechanical equivalent shipping container of eitherFIG. 2 orFIG. 3 , in accordance with aspects of the present invention. As shown in this figure, the foam sheets are represented assprings 25″, allowing the stack ofwafers 15 bracketed by theforce distribution plates 10 to move (slightly) as a unit, up and down. Theforce distribution plates 10 prevent the thin wafers from flexing while in the package, thus preventing damage. - Table 1 shows testing performed on 100 micron, 85 micron, 75 micron and 65 micron wafers. As shown in this table, each of the wafers passed all testing: downward pressure test, vibration test and drop test.
-
TABLE 1 Wafer Downward Thickness pressure Vibration (microns) Test Test Drop Test 100 microns Passed Passed Passed 85 microns Passed Passed Passed 75 microns Passed Passed Passed 65 microns Passed Passed Passed - The method(s) as described above is used in the fabrication of integrated circuit chips. The resulting integrated circuit chips can be distributed by the fabricator in raw wafer form (that is, as a single wafer that has multiple unpackaged chips), as a bare die, or in a packaged form. In the latter case the chip is mounted in a single chip package (such as a plastic carrier, with leads that are affixed to a motherboard or other higher level carrier) or in a multichip package (such as a ceramic carrier that has either or both surface interconnections or buried interconnections). In any case the chip is then integrated with other chips, discrete circuit elements, and/or other signal processing devices as part of either (a) an intermediate product, such as a motherboard, or (b) an end product. The end product can be any product that includes integrated circuit chips, ranging from toys and other low-end applications to advanced computer products having a display, a keyboard or other input device, and a central processor.
- The descriptions of the various embodiments of the present invention have been presented for purposes of illustration, but are not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein was chosen to best explain the principles of the embodiments, the practical application or technical improvement over technologies found in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US14/031,208 US20150076029A1 (en) | 2013-09-19 | 2013-09-19 | Package assembly for thin wafer shipping |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/031,208 US20150076029A1 (en) | 2013-09-19 | 2013-09-19 | Package assembly for thin wafer shipping |
Publications (1)
Publication Number | Publication Date |
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US20150076029A1 true US20150076029A1 (en) | 2015-03-19 |
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US14/031,208 Abandoned US20150076029A1 (en) | 2013-09-19 | 2013-09-19 | Package assembly for thin wafer shipping |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10532874B1 (en) * | 2018-11-19 | 2020-01-14 | Christian Segura | Comic book organizer |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020144927A1 (en) * | 2001-04-10 | 2002-10-10 | Brooks Ray G. | IC wafer cushioned separators |
US20050098473A1 (en) * | 2003-11-10 | 2005-05-12 | 3M Innovative Properties Company | Container for containing semiconductor wafers |
US20100101635A1 (en) * | 2008-10-14 | 2010-04-29 | Christian Senning Verpackungsmaschinen Gmbh & Co. | Packagings for thin-layer slice-form products |
-
2013
- 2013-09-19 US US14/031,208 patent/US20150076029A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020144927A1 (en) * | 2001-04-10 | 2002-10-10 | Brooks Ray G. | IC wafer cushioned separators |
US20050098473A1 (en) * | 2003-11-10 | 2005-05-12 | 3M Innovative Properties Company | Container for containing semiconductor wafers |
US20100101635A1 (en) * | 2008-10-14 | 2010-04-29 | Christian Senning Verpackungsmaschinen Gmbh & Co. | Packagings for thin-layer slice-form products |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10532874B1 (en) * | 2018-11-19 | 2020-01-14 | Christian Segura | Comic book organizer |
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Owner name: INTERNATIONAL BUSINESS MACHINES CORPORATION, NEW Y Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:CORBIN, DAMYON L.;MUSANTE, CHARLES F.;REEL/FRAME:031240/0905 Effective date: 20130916 |
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Owner name: GLOBALFOUNDRIES U.S. 2 LLC, NEW YORK Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:INTERNATIONAL BUSINESS MACHINES CORPORATION;REEL/FRAME:036550/0001 Effective date: 20150629 |
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STCB | Information on status: application discontinuation |
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Owner name: GLOBALFOUNDRIES U.S. INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:WILMINGTON TRUST, NATIONAL ASSOCIATION;REEL/FRAME:056987/0001 Effective date: 20201117 |