US20150023819A1 - Piezoelectric fan - Google Patents

Piezoelectric fan Download PDF

Info

Publication number
US20150023819A1
US20150023819A1 US14/506,721 US201414506721A US2015023819A1 US 20150023819 A1 US20150023819 A1 US 20150023819A1 US 201414506721 A US201414506721 A US 201414506721A US 2015023819 A1 US2015023819 A1 US 2015023819A1
Authority
US
United States
Prior art keywords
blades
base
piezoelectric
piezoelectric fan
fan according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/506,721
Other languages
English (en)
Inventor
Nobuhira TANAKA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Assigned to MURATA MANUFACTURING CO., LTD. reassignment MURATA MANUFACTURING CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TANAKA, NOBUHIRA
Publication of US20150023819A1 publication Critical patent/US20150023819A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00Pumping installations or systems
    • F04D25/02Units comprising pumps and their driving means
    • F04D25/06Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00Other rotary non-positive-displacement pumps
    • F04D23/006Creating a pulsating flow
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041Beam type
    • H10N30/2042Cantilevers, i.e. having one fixed end
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/467Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing gases, e.g. air
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to a piezoelectric fan that blows air by using a piezoelectric element as a drive source to a vibrate blade.
  • the piezoelectric fan described in Japanese Unexamined Patent Application Publication No. 2-33500 includes a vibrating plate and piezoelectric elements. One end of the vibrating plate is divided into three blades, whereas the other end of the vibrating plate is provided with main-body fixing holes. The piezoelectric elements are attached to the respective blades. The piezoelectric element on the central blade and the piezoelectric elements on the right and left blades are polarized in opposite directions. When an alternating voltage of the same phase is applied to each of the piezoelectric elements, the central blade and the right and left blades vibrate in opposite phases. Vibration is suppressed at the fixed end of the vibrating plate, because vibration of the central blade and vibration of the right and left blades cancel each other out. The piezoelectric fan blows air by performing this operation.
  • the piezoelectric fan described in International Publication No. 2009/119431 includes a vibrating plate, piezoelectric elements, and a supporting body.
  • the vibrating plate is composed of two separate blades.
  • the piezoelectric elements are attached to the two blades in the same manner.
  • the two blades are supported and coupled to each other in parallel by the supporting body.
  • the piezoelectric fan operates in the same manner as that described above.
  • FIG. 6A is an external perspective view of a piezoelectric fan 10 P
  • FIG. 6B is a plan view of the piezoelectric fan 10 P
  • FIG. 6C is a lateral view of the piezoelectric fan 10 P.
  • the piezoelectric fan 10 P includes a vibrating plate 11 , piezoelectric elements 121 , 122 , 123 , 131 , 132 , and 133 and supporting bodies 141 P and 142 P.
  • Main-body fixing holes 151 and 152 are provided to secure the main body of the piezoelectric fan 10 P, for example, to a destination housing to which air is supplied. Note that the piezoelectric elements 131 and 132 are not shown in FIGS. 6A-6C .
  • the vibrating plate 11 is integrally formed by three blades 111 , 112 , and 113 and a base 110 P.
  • the blades 111 , 112 , and 113 are arranged in the longitudinal direction of the base 110 P in the following order: the blade 112 , the blade 111 , and the blade 113 .
  • the piezoelectric element 121 is attached to one flat surface of the blade 111
  • the piezoelectric element 131 is attached to the other flat surface of the blade 111
  • the piezoelectric element 122 is attached to one flat surface of the blade 112
  • the piezoelectric element 132 is attached to the other flat surface of the blade 112
  • the piezoelectric element 123 is attached to one flat surface of the blade 113
  • the piezoelectric element 133 is attached to the other flat surface of the blade 113 .
  • the polarization direction of each piezoelectric element and the direction of voltage applied to the piezoelectric element are set such that the central blade 111 and the left and right blades 112 and 113 vibrate in opposite phases.
  • the piezoelectric fan 10 P operates in the manner described above.
  • the supporting bodies 141 P and 142 P support the vibrating plate 11 by sandwiching the vibrating plate 11 from both flat sides of the base 110 P.
  • the main-body fixing holes 151 and 152 pass through the base 110 P and the supporting bodies 141 P and 142 P. For example, with screws inserted in the main-body fixing holes 151 and 152 , the piezoelectric fan 10 P is attached to a destination housing to which air is supplied.
  • the base 110 P and the supporting bodies 141 P and 142 P are often bonded together by an adhesive.
  • the conventional piezoelectric fan illustrated in FIGS. 6A-6C is secured to an external housing (i.e., a housing to which the piezoelectric fan is to be attached) by inserting screws into the main-body fixing holes 151 and 152 as described above.
  • This causes electrical conduction between the vibrating plate 11 and the external housing.
  • noise may propagate through the external housing to the vibrating plate 11 . If noise propagates to the vibrating plate 11 , drive signals for driving the piezoelectric elements are disturbed by the noise and desired vibration cannot be obtained.
  • Preferred embodiments of the present invention provide a piezoelectric fan that prevents electrical conduction between a vibrating plate and an external housing, and reliably obtains desired vibration.
  • a piezoelectric fan includes a vibrating plate including a base and a blade; a piezoelectric element attached to the blade; and a holding member including a supporting portion and a main-body fixing portion, the supporting portion being configured to support the base.
  • the main-body fixing portion of the holding member extends from the supporting portion.
  • a main-body fixing hole of the main-body fixing portion is located in an area where the vibrating plate is not in contact with a supporting body. Therefore, even when the piezoelectric fan is secured to an external housing with conductive screws, the vibrating plate and the external housing are not electrically conducted to each other. It is thus possible to prevent external noise from propagating to the vibrating plate.
  • the blade be provided in a plurality, and that the main-body fixing portion be positioned between the plurality of blades.
  • the main-body fixing portion is preferably positioned to a blade side compared with the base in a plan view of the vibrating plate.
  • a piezoelectric fan preferably has the following configuration. That is, the number of the plurality of blades is preferably three, for example, and the blades are arranged in a longitudinal direction of the supporting portion; and the blades at both ends in the direction of arrangement and the blade at the center in the direction of arrangement are driven to vibrate in opposite phases.
  • the holding member is preferably made of an insulating material.
  • Various preferred embodiments of the present invention ensure insulation between the vibrating plate and the external housing, and to stably obtain desired vibration.
  • FIGS. 1A-1D provide an external perspective view, a plan view, a lateral view, and a cross-sectional view of a piezoelectric fan 10 according to a first preferred embodiment of the present invention.
  • FIG. 2 illustrates a driving concept of the piezoelectric fan 10 according to the first preferred embodiment of the present invention.
  • FIG. 3 is a plan view of a holding member 142 according to the first preferred embodiment of the present invention.
  • FIGS. 4A-4C provide an external perspective view, a plan view, and a lateral view of a piezoelectric fan 10 A according to a second preferred embodiment of the present invention.
  • FIGS. 5A-5C provide an external perspective view, a plan view, and a lateral view of a piezoelectric fan 10 B according to a third preferred embodiment of the present invention.
  • FIGS. 6A-6C provide an external perspective view, a plan view, and a lateral view of a piezoelectric fan 10 P according to a comparative example of the present invention.
  • FIG. 1A is an external perspective view of a piezoelectric fan 10 according to the first preferred embodiment of the present invention.
  • FIG. 1B is a plan view of the piezoelectric fan 10 according to the first preferred embodiment of the present invention.
  • FIG. 1C is a lateral view of the piezoelectric fan 10 according to the first preferred embodiment of the present invention.
  • FIG. 1D is a cross-sectional view taken along line A-A′ of the piezoelectric fan 10 according to the first preferred embodiment of the present invention.
  • FIG. 2 illustrates a driving concept of the piezoelectric fan 10 according to the first preferred embodiment of the present invention.
  • FIG. 3 is a plan view of a holding member 142 according to the first preferred embodiment of the present invention.
  • the piezoelectric fan 10 includes a vibrating plate 11 , piezoelectric elements 121 , 122 , 123 , 131 , 132 , and 133 , and a holder 14 .
  • the vibrating plate 11 is a flat plate including a first flat surface and a second flat surface opposite each other, and having a predetermined degree of stiffness.
  • the vibrating plate 11 preferably is, for example, a 0.1-mm-thick stainless steel (SUS) plate, for example.
  • the vibrating plate 11 is integrally configured and defined by three blades 111 , 112 , and 113 and a base 110 that are preferably defined by a single unitary member, for example.
  • the blades 111 , 112 , and 113 and the base 110 are long flat plates.
  • the blades 111 , 112 , and 113 are arranged along the base 110 at predetermined intervals in the longitudinal direction of the base 110 .
  • the blades 111 , 112 , and 113 are arranged and connected in the longitudinal direction of the base 110 in the following order: the blade 112 , the blade 111 , and the blade 113 .
  • the longitudinal direction of the blades 111 , 112 , and 113 is perpendicular or substantially perpendicular to the longitudinal direction of the base 110 , that is, perpendicular or substantially perpendicular to the direction of arrangement of the blades 111 , 112 , and 113 .
  • End portions of the blades 111 , 112 , and 113 are fixed ends of the blades 111 , 112 , and 113 .
  • the other end portions of the blades 111 , 112 , and 113 , the other end portions being opposite the fixed ends, are free ends.
  • Widths (i.e., lengths in the short side direction) of the blades 111 , 112 , and 113 vary along their longitudinal direction. Specifically, the widths of the blades 111 , 112 , and 113 are shorter at the fixed ends than at the free ends.
  • a gap having a predetermined length is provided between the blade 111 and the blade 112
  • a gap having a predetermined length is provided between the blade 111 and the blade 113 .
  • the blades 112 and 113 at both ends are identical in shape.
  • the width of the blade 111 at the center in the direction of arrangement preferably is about twice the width of the blades 112 and 113 at both ends in the direction of arrangement, for example.
  • the piezoelectric element 121 is attached to the first flat surface of the blade 111 .
  • the piezoelectric element 131 is attached to the second flat surface (i.e., a surface on the opposite side of the first flat surface) of the blade 111 .
  • the piezoelectric element 122 is attached to the first flat surface of the blade 112 .
  • the piezoelectric element 132 is attached to the second flat surface of the blade 112 .
  • the piezoelectric element 123 is attached to the first flat surface of the blade 113 .
  • the piezoelectric element 133 is attached to the second flat surface of the blade 113 .
  • the piezoelectric elements 121 , 122 , 123 , 131 , 132 , and 133 are long flat plates. Each piezoelectric element is polarized in the direction perpendicular or substantially perpendicular to its flat surfaces. The flat surfaces of each piezoelectric element are provided with electrodes configured to apply drive signals (not shown).
  • Each piezoelectric element is preferably defined by, for example, by a piezoelectric body made of PZT ceramics and electrodes on both principal surfaces of the piezoelectric body.
  • the electrode on the side of the vibrating plate 11 can be omitted.
  • the polarization direction of the piezoelectric element 121 is opposite that of the piezoelectric elements 122 and 123 .
  • the polarization direction of the piezoelectric element 131 is opposite that of the piezoelectric elements 132 and 133 .
  • the polarization direction of the piezoelectric element 121 is the same as that of the piezoelectric element 131 .
  • the holder 14 includes a supporting body 141 and a holding member 142 .
  • the supporting body 141 is preferably defined by a long flat plate substantially identical to the base 110 .
  • the supporting body 141 is preferably made of, for example, an insulating material such as glass epoxy resin.
  • the supporting body 141 is attached to the first flat surface of the base 110 such that the longitudinal direction thereof coincides with that of the base 110 .
  • the holding member 142 is preferably integrally defined by a supporting portion 160 and main-body fixing portions 161 and 162 .
  • the holding member 142 preferably is made of, for example, an insulating material such as glass epoxy resin.
  • an insulating material such as glass epoxy resin.
  • the supporting portion 160 is preferably defined by a long flat plate substantially identical to the base 110 .
  • the main-body fixing portions 161 and 162 protrude from an end surface of the supporting portion 160 , the end surface being parallel or substantially parallel to the longitudinal direction in the flat surface of the supporting portion 160 .
  • the main-body fixing portions 161 and 162 are spaced apart by substantially the width of the blade 111 .
  • the main-body fixing portions 161 and 162 are provided with main-body fixing holes 151 and 152 , respectively. For example, with metal screws inserted in the main-body fixing holes 151 and 152 , the piezoelectric fan 10 is attached to an external housing, such as a destination housing to which air is supplied.
  • the holding member 142 is attached to the second flat surface of the base 110 such that the longitudinal direction of the supporting portion 160 coincides with that of the base 110 .
  • the main-body fixing portion 161 is positioned in the gap between the blade 111 and the blade 112
  • the main-body fixing portion 162 is positioned in the gap between the blade 111 and the blade 113 .
  • the holding member 142 is attached to the vibrating plate 11 by bonding the supporting portion 160 and the base 110 together with an adhesive. Since the main-body fixing holes 151 and 152 are not provided in the supporting portion 160 , there is no possibility that the main-body fixing holes 151 and 152 will be blocked by the adhesive. It is thus possible to improve the adhesion between the supporting portion and the vibrating plate without affecting the main-body fixing holes.
  • the main-body fixing portions 161 and 162 are each positioned in the gap between adjacent blades. This configuration is preferable because the outer shape of the piezoelectric fan 10 is kept compact.
  • the main-body fixing portions 161 and 162 are preferably made of, for example, an insulating material such as glass epoxy resin. Thus, even when the piezoelectric fan 10 is secured with electrical conductors, such as metal screws, the electrical conductors and the vibrating plate 11 are electrically insulated by the main-body fixing portions 161 and 162 . This makes it possible to easily realize a structure in which a desired voltage is externally applied to the vibrating plate.
  • FIG. 4A is an external perspective view of a piezoelectric fan 10 A according to the second preferred embodiment of the present invention.
  • FIG. 4B is a plan view of the piezoelectric fan 10 A according to the second preferred embodiment of the present invention.
  • FIG. 4C is a lateral view of the piezoelectric fan 10 A according to the second preferred embodiment of the present invention.
  • the piezoelectric fan 10 A of the second preferred embodiment preferably has the same configuration as that of the piezoelectric fan 10 of the first preferred embodiment, except that the piezoelectric fan 10 A does not have the supporting body 141 .
  • the same effects as those in the first preferred embodiment are achieved in the second preferred embodiment.
  • FIG. 5A is an external perspective view of a piezoelectric fan 10 B according to the third preferred embodiment of the present invention.
  • FIG. 5B is a plan view of the piezoelectric fan 10 B according to the third preferred embodiment of the present invention.
  • FIG. 5C is a lateral view of the piezoelectric fan 10 B according to the third preferred embodiment of the present invention.
  • the piezoelectric fan 10 B of the third preferred embodiment includes a holder 14 B, instead of the holder 14 of the first preferred embodiment.
  • the other configuration is preferably the same as that of the first preferred embodiment.
  • the holder 14 B includes a holding member 142 B including main-body fixing portions 161 B and 162 B.
  • the main-body fixing portions 161 B and 162 B are positioned on the side where the blades 111 , 112 , and 113 do not protrude from the base 110 .
  • the shape and the arrangement of the main-body fixing portions are not limited to those in the preferred embodiments described above.
  • the number of blades included in the vibrating plate is not limited to that in the preferred embodiments described above.
  • the piezoelectric elements are preferably made of PZT ceramics in the preferred embodiments described above, the material of the piezoelectric elements is not limited to this.
  • the piezoelectric elements may be made of a piezoelectric material of lead-free piezoelectric ceramics, such as potassium-sodium niobate ceramics or alkali niobate ceramics.
  • the piezoelectric elements are preferably attached to both flat surfaces of the vibrating plate (bimorph type) in the preferred embodiments described above, the piezoelectric elements may be attached to one flat surface of the vibrating plate (unimorph type).

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
US14/506,721 2012-04-17 2014-10-06 Piezoelectric fan Abandoned US20150023819A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012093524 2012-04-17
JP2012-093524 2012-04-17
PCT/JP2013/057998 WO2013157346A1 (ja) 2012-04-17 2013-03-21 圧電ファン

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2013/057998 Continuation WO2013157346A1 (ja) 2012-04-17 2013-03-21 圧電ファン

Publications (1)

Publication Number Publication Date
US20150023819A1 true US20150023819A1 (en) 2015-01-22

Family

ID=49383313

Family Applications (1)

Application Number Title Priority Date Filing Date
US14/506,721 Abandoned US20150023819A1 (en) 2012-04-17 2014-10-06 Piezoelectric fan

Country Status (3)

Country Link
US (1) US20150023819A1 (ja)
JP (1) JP5892240B2 (ja)
WO (1) WO2013157346A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150285270A1 (en) * 2012-11-14 2015-10-08 The Technology Partnership Plc Pump
DE102017211103A1 (de) * 2017-06-29 2019-01-03 E.G.O. Elektro-Gerätebau GmbH Lüftungsvorrichtung für ein Elektrogerät und Elektrogerät mit einer solchen Lüftungsvorrichtung
EP4206475A1 (en) * 2021-12-28 2023-07-05 LG Display Co., Ltd. Blowing apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103557188A (zh) * 2013-10-28 2014-02-05 广州市番禺奥迪威电子有限公司 一种直流压电式风扇
CN103747656B (zh) * 2013-12-26 2017-01-18 华为技术有限公司 一种散热模块和系统、控制方法及相关设备
CN105101736B (zh) * 2014-05-12 2019-07-26 联想(北京)有限公司 一种气流加速装置和电子设备

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4595338A (en) * 1983-11-17 1986-06-17 Piezo Electric Products, Inc. Non-vibrational oscillating blade piezoelectric blower
US4780062A (en) * 1985-10-09 1988-10-25 Murata Manufacturing Co., Ltd. Piezoelectric fan
US5861703A (en) * 1997-05-30 1999-01-19 Motorola Inc. Low-profile axial-flow single-blade piezoelectric fan
US7321184B2 (en) * 2005-08-09 2008-01-22 Intel Corporation Rake shaped fan
US20110014069A1 (en) * 2008-03-25 2011-01-20 Murata Manufacturing Co., Ltd. Piezoelectric fan device and air-cooling apparatus using the piezoelectric fan device
US20130258589A1 (en) * 2012-03-30 2013-10-03 Delta Electronics, Inc. Heat-dissipating module

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63162999U (ja) * 1987-04-13 1988-10-25
JPH0335298U (ja) * 1989-08-10 1991-04-05
WO1996018823A1 (en) * 1994-12-15 1996-06-20 The Whitaker Corporation Metal enforced pvdf vibrational fan
JP2002364599A (ja) * 2001-06-08 2002-12-18 Nippon Keiki Works Ltd 薄型冷却ファン
US20080218972A1 (en) * 2007-03-06 2008-09-11 Ioan Sauciuc Cooling device, system containing same, and cooling method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4595338A (en) * 1983-11-17 1986-06-17 Piezo Electric Products, Inc. Non-vibrational oscillating blade piezoelectric blower
US4780062A (en) * 1985-10-09 1988-10-25 Murata Manufacturing Co., Ltd. Piezoelectric fan
US5861703A (en) * 1997-05-30 1999-01-19 Motorola Inc. Low-profile axial-flow single-blade piezoelectric fan
US7321184B2 (en) * 2005-08-09 2008-01-22 Intel Corporation Rake shaped fan
US20110014069A1 (en) * 2008-03-25 2011-01-20 Murata Manufacturing Co., Ltd. Piezoelectric fan device and air-cooling apparatus using the piezoelectric fan device
US20130258589A1 (en) * 2012-03-30 2013-10-03 Delta Electronics, Inc. Heat-dissipating module

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150285270A1 (en) * 2012-11-14 2015-10-08 The Technology Partnership Plc Pump
DE102017211103A1 (de) * 2017-06-29 2019-01-03 E.G.O. Elektro-Gerätebau GmbH Lüftungsvorrichtung für ein Elektrogerät und Elektrogerät mit einer solchen Lüftungsvorrichtung
EP3421892A3 (de) * 2017-06-29 2019-04-10 E.G.O. ELEKTRO-GERÄTEBAU GmbH Lüftungsvorrichtung für ein elektrogerät und elektrogerät mit einer solchen lüftungsvorrichtung
EP3812658A1 (de) 2017-06-29 2021-04-28 E.G.O. Elektro-Gerätebau GmbH Lüftungsvorrichtung für ein elektrogerät und elektrogerät mit einer solchen lüftungsvorrichtung
EP4206475A1 (en) * 2021-12-28 2023-07-05 LG Display Co., Ltd. Blowing apparatus
US11988202B2 (en) * 2021-12-28 2024-05-21 Lg Display Co., Ltd. Blowing apparatus

Also Published As

Publication number Publication date
JP5892240B2 (ja) 2016-03-23
JPWO2013157346A1 (ja) 2015-12-21
WO2013157346A1 (ja) 2013-10-24

Similar Documents

Publication Publication Date Title
US20150023819A1 (en) Piezoelectric fan
US8421308B2 (en) Vibratory actuator
US10276775B2 (en) Vibration device
WO2010023801A1 (ja) 振動装置
WO2014007088A1 (ja) 圧電ファン
US9856868B2 (en) Piezoelectric fan
JPH1012939A (ja) 圧電トランスおよび圧電トランス電源
CN110052389B (zh) 振动元件
JP6717222B2 (ja) 振動デバイス
EP1030381A1 (en) Mounting structure of piezoelectric transformer and method of mounting piezoelectric transformer
US20140036431A1 (en) Piezoelectric actuator and electronic device having piezoelectric actuator mounted thereon
US9853578B2 (en) Ultrasonic generator
US10938375B2 (en) Resonator
JP2013164036A (ja) 圧電ファン
CN110098316B (zh) 层叠压电陶瓷部件和压电器件
JP6776928B2 (ja) 振動デバイス
JP2014013000A (ja) 圧電ファン
US20160380613A1 (en) Elastic wave device
JP2018126701A (ja) 振動デバイス
JP7003415B2 (ja) 振動デバイス
JP2014013001A (ja) 圧電ファン
JP2018027006A5 (ja)
US8829768B2 (en) Haptic feedback device
CN115708365A (zh) 面板扬声器
JPH0732972U (ja) 電源装置

Legal Events

Date Code Title Description
AS Assignment

Owner name: MURATA MANUFACTURING CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:TANAKA, NOBUHIRA;REEL/FRAME:033898/0778

Effective date: 20140924

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION