US20120148390A1 - Turbo Molecular Pump with Improved Blade Structures - Google Patents

Turbo Molecular Pump with Improved Blade Structures Download PDF

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Publication number
US20120148390A1
US20120148390A1 US13/073,008 US201113073008A US2012148390A1 US 20120148390 A1 US20120148390 A1 US 20120148390A1 US 201113073008 A US201113073008 A US 201113073008A US 2012148390 A1 US2012148390 A1 US 2012148390A1
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US
United States
Prior art keywords
layered
blade assembly
stator
rotor blade
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/073,008
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English (en)
Inventor
Kuo-Hsun Hsu
Chao-Huan Li
Wei-Cheng Tai
Chih-Neng Hsu
Hsiao-Wei D. Chiang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PROSOL CORP
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PROSOL CORP
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Publication date
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Assigned to PROSOL CORPORATION reassignment PROSOL CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHIANG, HSIAO-WEI D., HSU, CHIH-NENG, HSU, KUO-HSUN, LI, CHAO-HUAN, TAI, WEI-CHENG
Publication of US20120148390A1 publication Critical patent/US20120148390A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/38—Blades
    • F04D29/384—Blades characterised by form

Definitions

  • the present invention relates to a turbo molecular pump with improved blade structures, and more particularly to a turbo molecular pump having rotor blades and stator blades which are optimally adjusted for several parameters.
  • the turbo molecular pump is originated in 1912 and improved from a molecular drag pump invented by a German, Gaede.
  • FIG. 1 which is a cross-sectional view of a conventional turbo molecular pump.
  • the conventional turbo molecular pump A includes a rotor A 1 and a stator A 2 , wherein the rotor A 1 includes a rotor shaft A 10 and a plurality of rotor blades A 11 , and the stator A 2 includes a plurality of stator blades A 21 .
  • the rotor blades A 11 and the stator blades A 21 are disposed in a staggered manner layer by layer.
  • FIG. 2 is a schematic diagram of an action principle of a turbo molecular pump.
  • the gas molecule B 5 After a gas molecule B 5 entering the turbo molecular pump B 1 , the gas molecule B 5 get into next level of stator blade B 3 driven by a rotor blade B 2 , as indicated by the dotted line. Following, the gas molecule B 5 rams the stator blade B 3 and turns its forward direction, and then gets into the next level of rotor blade B 4 . Therefore, the action principle of the turbo molecular pump B 1 is to make the gas molecules originally having chaotic movement in the system move forward an exit by inclined blades with high-speed rotation, and to elevate a compression ratio by the staggered arrangement of multi-level rotor blades and stator blades. Owing to the turbo molecular pump has the property of high vacuum, high exhaust efficiency and no oil pollution, the turbo molecular pump is widely used on various researches and applications.
  • turbo molecular pump which can increase the pumping speed and stability by the optimized design of the structure.
  • the major objective of the present invention is to provide the turbo molecular pump with improved blade structures, wherein several parameters of rotor blades and stator blades of the turbo molecular pump are adjusted to optimal conditions, so as to significantly elevate the pumping speed and stability of the turbo molecular pump.
  • the present invention provides the turbo molecular pump with improved blade structures comprising: a rotor comprising: a center shaft; a first layered rotor blade assembly being disposed on the center shaft, wherein the blade number of the first layered rotor blade assembly is 16 ⁇ 17 pieces, and the blade angle of the first layered rotor blade assembly being 37 ⁇ 45 degree; a second layered rotor blade assembly being disposed on the center shaft and contiguous to the first layered rotor blade assembly, wherein the blade number of the second layered rotor blade assembly is 32 ⁇ 33 pieces, and the blade angle of the second layered rotor blade assembly being 45 ⁇ 50 degree; a third layered rotor blade assembly being disposed on the center shaft, and the third layered rotor blade assembly and the first layered rotor blade assembly being disposed on opposite side of the second layered rotor blade assembly, wherein the blade number of the third layered rotor blade assembly is 30 ⁇ 31 pieces, and the blade angle of the
  • FIG. 1 is a cross-sectional view of a conventional turbo molecular pump
  • FIG. 2 is a schematic diagram of an action principle of a turbo molecular pump
  • FIG. 3 is a perspective view of a rotor of a turbo molecular pump of the present invention.
  • FIG. 4 is a perspective view of a stator of the turbo molecular pump of the present invention.
  • the inventors adjust several parameters of rotor blades and stator blades of a turbo molecular pump to optimal conditions, thus achieving a turbo molecular pump with improved blade structures.
  • the turbo molecular pump of the present invention is composed of a rotor and a stator, wherein the rotor and the stator are primarily made of pure aluminum or aluminum alloy, which has advantages of lightweight, corrosion prevention, manufacturing easily, and moderate strength and toughness.
  • the rotor and the stator also can be made of copper or gold, however, the copper and the gold have higher cost, softer texture, higher weight, and lower strength and toughness than aluminum.
  • steel, iron, cast metal, and stainless steel also can be the material of the rotor and the stator, but these materials have disadvantages of rigid texture, heavy weight, susceptible to corrosion, and difficult to be manufactured.
  • FIG. 3 is a perspective view of the rotor of the turbo molecular pump of the present invention.
  • the rotor 100 of the present invention includes a center shaft 101 , a first layered rotor blade assembly 110 , a second layered rotor blade assembly 120 , a third layered rotor blade assembly 130 , a fourth layered rotor blade assembly 140 , and a fifth layered rotor blade assembly 150 .
  • the first layered rotor blade assembly 110 is disposed on the center shaft 101 .
  • the blade number of the first layered rotor blade assembly 110 is 16 ⁇ 17 pieces, and the blade angle of the first layered rotor blade assembly 110 is 37 ⁇ 45 degree.
  • the second layered rotor blade assembly 120 is disposed on the center shaft 101 and contiguous to the first layered rotor blade assembly 110 .
  • the blade number of the second layered rotor blade assembly 120 is 32 ⁇ 33 pieces, and the blade angle of the second layered rotor blade assembly 120 is 45 ⁇ 50 degree.
  • the third layered rotor blade assembly 130 is disposed on the center shaft 101 , and the third layered rotor blade assembly 130 and the first layered rotor blade assembly 110 are disposed on opposite side of the second layered rotor blade assembly 120 .
  • the blade number of the third layered rotor blade assembly 130 is 30 ⁇ 31 pieces, and the blade angle of the third layered rotor blade assembly 130 is 30 ⁇ 40 degree.
  • the fourth layered rotor blade assembly 140 is disposed on the center shaft 101 , and the fourth layered rotor blade assembly 140 and the second layered rotor blade assembly 120 are disposed on opposite side of the third layered rotor blade assembly 130 .
  • the blade number of the fourth layered rotor blade assembly 140 is 28 ⁇ 29 pieces, and the blade angle of the fourth layered rotor blade assembly 140 is 25 ⁇ 30 degree.
  • the fifth layered rotor blade assembly 150 is disposed on the center shaft 101 , and the fifth layered rotor blade assembly 150 and the third layered rotor blade assembly 130 are disposed on opposite side of the fourth layered rotor blade assembly 140 .
  • the blade number of the fifth layered rotor blade assembly 150 is 26 ⁇ 27 pieces, and the blade angle of the fifth layered rotor blade assembly 150 is 15 ⁇ 22 degree.
  • the stator 200 of the present invention includes a first layered stator blade assembly 210 , a second layered stator blade assembly 220 , a third layered stator blade assembly 230 , a fourth layered stator blade assembly 240 , and a fifth layered stator blade assembly 250 .
  • the first layered stator blade assembly 210 is disposed between the first layered rotor blade assembly 110 and the second layered rotor blade assembly 120 .
  • the blade number of the first layered stator blade assembly 210 is 50 ⁇ 52 pieces, and the blade angle of the first layered stator blade assembly 210 is 45 ⁇ 70 degree.
  • the second layered stator blade assembly 220 is disposed between the second layered rotor blade assembly 120 and the third layered rotor blade assembly 130 .
  • the blade number of the second layered stator blade assembly 220 is 50 ⁇ 52 pieces, and the blade angle of the second layered stator blade assembly 220 is 48 ⁇ 70 degree.
  • the third layered stator blade assembly 230 is disposed between the third layered rotor blade assembly 130 and the fourth layered rotor blade assembly 140 .
  • the blade number of the third layered stator blade assembly 230 is 50 ⁇ 52 pieces, and the blade angle of the third layered stator blade assembly 230 is 40 ⁇ 70 degree.
  • the fourth layered stator blade assembly 240 is disposed between the fourth layered rotor blade assembly 140 and the fifth layered rotor blade assembly 150 .
  • the blade number of the fourth layered stator blade assembly 240 is 34 ⁇ 36 pieces, and the blade angle of the fourth layered stator blade assembly 240 is 28 ⁇ 40 degree.
  • the fifth layered stator blade assembly 250 is disposed on opposite side of the fifth layered rotor blade assembly 150 relative to the fourth layered stator blade assembly 240 .
  • the blade number of the fifth layered stator blade assembly 250 is 34 ⁇ 36 pieces, and the blade angle of the fifth layered stator blade assembly 250 is 22 ⁇ 40 degree.
  • first layered stator blade assembly 210 , the second layered stator blade assembly 220 , the third layered stator blade assembly 230 , the fourth layered stator blade assembly 240 , and the fifth layered stator blade assembly 250 further include a stator shroud 211 , 221 , 231 , 241 , and 251 respectively, each stator shroud 211 , 221 , 231 , 241 , and 251 can fasten the blades of each layered stator blade assembly 210 , 220 , 230 , 240 , and 250 , and also can used for combining the stator blade assemblies 210 , 220 , 230 , 240 , and 250 to each other.
  • the rotor blades and the stator blades of the turbo molecular pump are divided into five layers, which have functions of increasing the compression ratio and the compression efficiency, so as to achieve the effect of ultrahigh vacuum, and then enhance the accuracy and the cleanliness of a vacuum coating equipment for a semiconductor process.
  • the present invention adjusts several parameters of the rotor blades and the stator blades to optimal condition, so as to significantly enhance the pumping speed and the stability of the turbo molecular pump.
  • the blade number of each layered rotor blade assembly of the present invention is less than the blade number of the conventional turbo molecular pump, so that the manufacture and the fabrication of the turbo molecular pump are much easier, and the manufacturing cost can be reduced.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US13/073,008 2010-12-10 2011-03-28 Turbo Molecular Pump with Improved Blade Structures Abandoned US20120148390A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW099143187 2010-12-10
TW099143187A TWI424121B (zh) 2010-12-10 2010-12-10 渦輪分子泵浦之葉片結構改良

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US13/073,008 Abandoned US20120148390A1 (en) 2010-12-10 2011-03-28 Turbo Molecular Pump with Improved Blade Structures

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US (1) US20120148390A1 (zh)
TW (1) TWI424121B (zh)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3093496A1 (de) * 2015-05-15 2016-11-16 Pfeiffer Vacuum Gmbh Rotor einer vakuumpumpe
WO2018109480A1 (en) * 2016-12-15 2018-06-21 Edwards Limited Stator blade unit for a turbomolecular pump
US20210332824A1 (en) * 2020-04-28 2021-10-28 Shimadzu Corporation Turbo-molecular pump and stator
CN113757139A (zh) * 2020-06-03 2021-12-07 株式会社岛津制作所 涡轮分子泵、涡轮分子泵的转子及定子
US11623941B2 (en) 2016-09-30 2023-04-11 Cytiva Bioprocess R&D Ab Separation method
US11685764B2 (en) 2016-05-11 2023-06-27 Cytiva Bioprocess R&D Ab Separation matrix
US11708390B2 (en) 2016-05-11 2023-07-25 Cytiva Bioprocess R&D Ab Method of storing a separation matrix
US11753438B2 (en) 2016-05-11 2023-09-12 Cytiva Bioprocess R&D Ab Method of cleaning and/or sanitizing a separation matrix
US12037359B2 (en) 2016-05-11 2024-07-16 Cytiva Bioprocess R&D Ab Mutated immunoglobulin-binding polypeptides

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114973902B (zh) * 2022-04-14 2023-06-23 西北工业大学 一种教学用航空发动机低压涡轮模型及装配方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
US5033936A (en) * 1988-08-24 1991-07-23 Seiko Seiki Kabushiki Kaisha Rotor blades of turbomolecular pump
US5577881A (en) * 1992-04-29 1996-11-26 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US20010022941A1 (en) * 1997-10-03 2001-09-20 Yasushi Maejima Turbo molecular pump
US20020127094A1 (en) * 2001-03-10 2002-09-12 Armin Conrad Gas friction pump
US20030223859A1 (en) * 2001-03-15 2003-12-04 Roberto Carboneri Turbine pump with a stator stage integrated with a spacer ring
US20040091351A1 (en) * 2000-09-20 2004-05-13 Ralf Adamietz Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades
US20050042118A1 (en) * 2003-08-21 2005-02-24 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
US7445422B2 (en) * 2005-05-12 2008-11-04 Varian, Inc. Hybrid turbomolecular vacuum pumps

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
JP3961273B2 (ja) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP2003172291A (ja) * 2001-12-04 2003-06-20 Boc Edwards Technologies Ltd 真空ポンプ

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
US5033936A (en) * 1988-08-24 1991-07-23 Seiko Seiki Kabushiki Kaisha Rotor blades of turbomolecular pump
US5577881A (en) * 1992-04-29 1996-11-26 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US20010022941A1 (en) * 1997-10-03 2001-09-20 Yasushi Maejima Turbo molecular pump
US20040091351A1 (en) * 2000-09-20 2004-05-13 Ralf Adamietz Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades
US20020127094A1 (en) * 2001-03-10 2002-09-12 Armin Conrad Gas friction pump
US20030223859A1 (en) * 2001-03-15 2003-12-04 Roberto Carboneri Turbine pump with a stator stage integrated with a spacer ring
US20050042118A1 (en) * 2003-08-21 2005-02-24 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
US20100047096A1 (en) * 2003-08-21 2010-02-25 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
US7445422B2 (en) * 2005-05-12 2008-11-04 Varian, Inc. Hybrid turbomolecular vacuum pumps

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106151067A (zh) * 2015-05-15 2016-11-23 普发真空有限公司 真空泵的转子
JP2016217347A (ja) * 2015-05-15 2016-12-22 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプのローター
EP3093496A1 (de) * 2015-05-15 2016-11-16 Pfeiffer Vacuum Gmbh Rotor einer vakuumpumpe
US12037359B2 (en) 2016-05-11 2024-07-16 Cytiva Bioprocess R&D Ab Mutated immunoglobulin-binding polypeptides
US11753438B2 (en) 2016-05-11 2023-09-12 Cytiva Bioprocess R&D Ab Method of cleaning and/or sanitizing a separation matrix
US11708390B2 (en) 2016-05-11 2023-07-25 Cytiva Bioprocess R&D Ab Method of storing a separation matrix
US11685764B2 (en) 2016-05-11 2023-06-27 Cytiva Bioprocess R&D Ab Separation matrix
US11623941B2 (en) 2016-09-30 2023-04-11 Cytiva Bioprocess R&D Ab Separation method
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
CN110268167A (zh) * 2016-12-15 2019-09-20 爱德华兹有限公司 用于涡轮分子泵的定子叶片单元
WO2018109480A1 (en) * 2016-12-15 2018-06-21 Edwards Limited Stator blade unit for a turbomolecular pump
CN113565776A (zh) * 2020-04-28 2021-10-29 株式会社岛津制作所 涡轮分子泵及涡轮分子泵的定子
US20210332824A1 (en) * 2020-04-28 2021-10-28 Shimadzu Corporation Turbo-molecular pump and stator
US20210381516A1 (en) * 2020-06-03 2021-12-09 Shimadzu Corporation Turbo-molecular pump, rotor and stator
JP2021188595A (ja) * 2020-06-03 2021-12-13 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ
US11603849B2 (en) * 2020-06-03 2023-03-14 Shimadzu Corporation Turbo-molecular pump, rotor and stator
CN113757139A (zh) * 2020-06-03 2021-12-07 株式会社岛津制作所 涡轮分子泵、涡轮分子泵的转子及定子
CN113757139B (zh) * 2020-06-03 2023-11-17 株式会社岛津制作所 涡轮分子泵、涡轮分子泵的转子及定子
JP7396209B2 (ja) 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

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Publication number Publication date
TW201224282A (en) 2012-06-16
TWI424121B (zh) 2014-01-21

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AS Assignment

Owner name: PROSOL CORPORATION, TAIWAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HSU, KUO-HSUN;LI, CHAO-HUAN;TAI, WEI-CHENG;AND OTHERS;REEL/FRAME:026031/0369

Effective date: 20110314

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO PAY ISSUE FEE