US20110176910A1 - Turbomolecular Pump with a Flexible Mount - Google Patents

Turbomolecular Pump with a Flexible Mount Download PDF

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Publication number
US20110176910A1
US20110176910A1 US13/119,831 US200913119831A US2011176910A1 US 20110176910 A1 US20110176910 A1 US 20110176910A1 US 200913119831 A US200913119831 A US 200913119831A US 2011176910 A1 US2011176910 A1 US 2011176910A1
Authority
US
United States
Prior art keywords
rotor
servo
axial
network
restabilization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/119,831
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English (en)
Inventor
Ulrich Schroeder
Maurice Brunet
Olivier Lemarchand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SKF Magnetic Mechatronics SAS
Original Assignee
Societe de Mecanique Magnetique SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe de Mecanique Magnetique SA filed Critical Societe de Mecanique Magnetique SA
Assigned to SOCIETE DE MECANIQUE MAGNETIQUE reassignment SOCIETE DE MECANIQUE MAGNETIQUE ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BRUNET, MAURICE, LEMARCHAND, OLIVIER, SCHROEDER, ULRICH
Publication of US20110176910A1 publication Critical patent/US20110176910A1/en
Assigned to SKF MAGNETIC MECHATRONICS reassignment SKF MAGNETIC MECHATRONICS CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: SOCIETE DE MECANIQUE MAGNETIQUE
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0451—Details of controllers, i.e. the units determining the power to be supplied, e.g. comparing elements, feedback arrangements with P.I.D. control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Definitions

  • the present invention relates to a turbomolecular pump with a flexible mount comprising a leaktight casing designed in such a manner as to be capable of being mounted on a structure via a mechanical damper, a vertical support secured to the casing and located therein for supporting a hollow rotor fitted with fins and driven in rotation by an electric motor, at least first and second radial magnetic bearings mounted on the support, at least one axial magnetic bearing mounted on the support, radial detectors for detecting the radial position of the rotor, at least one axial detector for detecting the axial position of the rotor, at least one emergency mechanical bearing, and a control module including at least circuits for powering the electric motor and the axial and radial magnetic bearings, and servo-control circuits for servo-controlling the axial and radial magnetic bearings suitable for correcting any movement of the rotor in translation along three axes xyz in an orthonormal frame of reference and any tilting relative to two tilt axes.
  • pumps are generally fastened rigidly on a support and they do not move.
  • Position servo-control is then optimized to ensure that the pump can be mounted in any position and to ensure that the pump generates a minimum amount of noise and vibration.
  • an application with a low level of vibration requires servo-control to present low stiffness and a limited passband.
  • any movement of the casing of the pump can cause the rotating shaft to come into contact with the emergency bearings, thereby generating noise, wear, and vibration.
  • FIG. 3 shows the behavior that follows the application of such an impact, with permanent oscillations 200 due to instability in the servo-control.
  • Patent document EP 1 045 821 A2 discloses a turbomolecular pump having a rotor mounted on magnetic bearings and a system for monitoring the currents flowing in the electromagnets of the magnetic bearings in order to switch off the power supply to the magnetic bearings permanently if the currents exceed a predetermined threshold during a predetermined length of time.
  • the system serves to avoid non-reversible destabilization of a position servo-control loop as a result of making contact with the emergency bearings, however it does not enable wear of the parts to be reduced by acting in preventive manner, since that system is designed solely to switch off the electrical power supply, thereby necessarily leading to contact between the rotor and the emergency bearings.
  • the present invention seeks to remedy the above-mentioned drawbacks and, for a turbomolecular pump with a flexible mount, it serves to avoid problems of a rotor coming into contact with emergency bearings other than in the event of the magnetic bearings failing or when starting and stopping the pump, and at least to reduce the consequences of any such contact and in particular permanent oscillations, but without that affecting the pumping qualities of the pump having a low level of vibration.
  • a turbomolecular pump with a flexible mount comprising a leaktight casing designed in such a manner as to be capable of being mounted on a structure via a mechanical damper, a vertical support secured to the casing and located therein for supporting a hollow rotor fitted with fins and driven in rotation by an electric motor, at least first and second radial magnetic bearings mounted on the support, at least one axial magnetic bearing mounted on the support, radial detectors for detecting the radial position of the rotor, at least one axial detector for detecting the axial position of the rotor, at least one emergency mechanical bearing, and a control module including at least circuits for powering the electric motor and the axial and radial magnetic bearings, and servo-control circuits for servo-controlling the axial and radial magnetic bearings suitable for correcting any movement of the rotor in translation along three axes xyz in an orthonormal frame of reference and any tilting relative to two tilt
  • Said predetermined duration ⁇ t for selective activation of the restabilization network is settable.
  • said predetermined duration ⁇ t of selective activation of the restabilization network lies in the range 0.5 seconds (s) to 5 s.
  • said predetermined duration ⁇ t for selective activation of the restabilization network is fixed.
  • the predetermined thresholds Sxd, Syd, Szd, Sxb, Syb relative to said three axes xyz of an orthonormal frame of reference and relative to said two tilt axes are settable.
  • the predetermined thresholds Sxd, Syd, Szd, Sxb, Syb relative to said three axes xyz of an orthonormal frame of reference and relative to said two tilt axes lie in the range 25% to 40% of the maximum possible movement of the rotor in the emergency mechanical bearing and, preferably, are of the order of one-third of said maximum movement.
  • said comparator unit and said means for selectively activating the restabilization network are included in a digital signal processor DSP of the pump including said servo-control circuits.
  • FIG. 1 is a longitudinal section view of an example of a turbomolecular pump to which the invention is applicable and having active magnetic bearings and a flexible mount;
  • FIG. 2 is a block diagram showing the main elements of a control module for a turbomolecular pump to which the invention is applicable;
  • FIG. 3 is a plot showing the position of the rotor relative to a predetermined axis for a traditional turbomolecular pump with a flexible mount, where the initiation of a movement gives rise to a contact with the emergency bearing and permanent oscillations;
  • FIG. 4 provides plots showing the position of the rotor relative to a predetermined axis in a turbomolecular pump of the invention with a flexible mount, where initiation of a movement is quickly damped;
  • FIG. 5 is a flow chart showing certain steps implemented in the servo-control circuits of the control module of a turbomolecular pump of the invention.
  • FIG. 1 shows an example of a turbomolecular pump having active magnetic bearings to which the invention may be applied.
  • the turbomolecular pump comprises a leaktight outer casing 100 mounted on a base 101 supporting a vertical support 102 having the windings of an electric motor 140 mounted thereon together with radial magnetic bearings 111 and 112 located on either side of the motor 140 .
  • the bearings 111 , 112 serve to support a central shaft 105 without contact, the top portion of the shaft having a hollow rotor 103 fastened thereto and arranged as a cap relative to the support 102 and carrying fins 104 on its outer face, the motor 140 serving to drive the shaft 105 in rotation.
  • An axial magnetic bearing 115 serves to hold the shaft 105 vertically relative to the support 102 .
  • Detectors 113 and 114 for detecting the radial position of the shaft 105 relative to the support 102 are associated with the radial magnetic bearings 111 , 112 .
  • a detector 116 for detecting the axial position of the shaft 105 relative to the support 102 is associated with the axial magnetic bearing 115 .
  • An emergency top bearing 109 e.g. a roller bearing, and an emergency bottom bearing 110 are associated with the magnetic suspension of the shaft 105 in order to support it in the event of the active magnetic suspension failing.
  • the casing 100 is fastened at its top end to a structure 160 via a mechanical decoupling element 150 that acts as a damper, thereby constituting a flexibly-mounted turbomolecular pump capable of damping vibration, e.g. in the event of the structure 160 moving.
  • the pump could be fastened to a structure not via its top, but via its bottom, with its base 101 being fastened via a mechanical decoupling element analogous to the element 150 .
  • a flexible mount is provided, and the pump is not rigidly mounted on the structure 160 , such that if a user needs to move the structure 160 while the pump is in operation, for example, then as little vibration as possible is transmitted to the pump.
  • FIG. 2 shows the main components of a control module for a turbomolecular pump such as that of the present invention.
  • the turbomolecular pump 1 is represented by the rotor 103 , the movement detectors 113 , 114 , and 116 , the magnetic bearings 111 , 112 , and 115 , the electric motor 140 , and a sensor 170 for sensing the speed of rotation of the rotor 103 .
  • control unit 2 that mainly comprises an electrical power supply 12 taking power from an electrical network 16 , together with electronic control circuits.
  • the electronic control circuit may comprise a signal processor card 11 including a digital signal processor (DSP) 13 , an analog-to-digital converter 14 , and a digital-to-analog converter 15 .
  • DSP digital signal processor
  • the radial and axial movement detectors 113 & 114 and 116 are connected to a movement calculation circuit 8 that is itself connected to the analog-to-digital converter 14 in order to provide the main digital signal processor 13 with digital signals representative of the movements of the rotor 103 relative to the casing of the pump.
  • the digital-to-analog converter 15 receives control signals from the main digital signal processor 13 and delivers analog signals to the driver circuit 9 powering the windings of the radial and axial magnetic bearings 111 & 112 and 115 .
  • the electric motor 140 is itself controlled by the main digital signal processor 13 via a variable-speed drive control circuit 10 , the speed of rotation sensor 170 itself being connected to the main digital signal processor 13 .
  • the main digital signal processor 13 is a microprocessor optimized for calculations that serve to perform digital signal processing and in particular to perform control functions and signal extraction functions.
  • the architecture of the microprocessor is optimized to enable it to perform complex calculations quickly, while having easy access to a large number of inputs/outputs.
  • the microprocessor may naturally also be used in combination with other microprocessors that are conventional.
  • the main digital signal processor 13 defines servo-control of low stiffness and of limited passband (obtained by filtering) so as to obtain a specified low level of vibration.
  • an abnormally large movement is detected, e.g. due to an external impact on the structure 160 or the pump casing 100 , or indeed due to the structure 160 and the pump being moved, and then, for a predetermined duration ⁇ t, the servo-control circuits 13 are switched to a different corrector network in order, where possible, to avoid making contact with an emergency bearing (curve 201 in FIG. 4 ), or if such contact cannot be avoided (curve 202 in FIG. 4 ), in order to restabilize servo-control under the best conditions.
  • FIG. 4 shows the correction process for the example of the rotor moving along a radial axis X as a result of an impact initiated at an instant t 0 on the pump or on its structure 160 .
  • a restabilization corrector network is activated for a duration ⁇ t until a time t 2 .
  • the servo-control conserves characteristics of low stiffness, but in the event of crossings a threshold (here X a along a radial axis X) during movements of the rotor, a stabilization network is activated by the main digital signal processor 13 in order to damp the movements of the rotor 103 .
  • the time ⁇ t for which the destabilization network is activated can be determined as a function of the application, and it may be set in advance in predetermined manner. Nevertheless, it is also possible for the activation time ⁇ t to be adapted to the state of restabilization.
  • Movement is continuously monitored along five axes, and if a threshold is exceeded on one or more axes, then a switchover is made to the restabilization network.
  • the activation threshold is settable. It is typically one-third of the maximum movement in the emergency bearings, and it may lie in the range 25% to 40% of this maximum movement.
  • the activation time is also settable. It lies typically in the range 0.5 s to 5 s.
  • the servo-control and the settings are adjusted using the signal processor (DSP) 13 of the pump.
  • DSP signal processor
  • FIG. 5 shows an example of a flow chart showing the main steps implemented in the invention in the servo-control circuits of the control module of a turbomolecular pump in order to avoid the damaging consequences due to sudden movements or impacts of the pump or of its structure 160 in the context of a flexibly-mounted turbomolecular pump, where the default adjustment of the servo-control parameters corresponds to low stiffness and a limited passband.
  • a step 301 consists initially in defining thresholds Sxd, Syd, Szd in the three radial and axial directions of an orthonormal frame of reference xyz associated with the nominal axis of the rotor 103 , and thresholds Sxb and Syb corresponding to tilt axes of the rotor 103 .
  • These thresholds Sxd, Syd, Szd, Sxb, Syb preferably lie in the range 25% to 40% of the maximum possible movement of the rotor 103 in the emergency mechanical bearings 109 , 110 .
  • step 302 the position sensors 113 , 114 , and 116 , and the circuits 8 , 14 , and 13 are used to measure the movements of the rotor 103 , either in translation (movements dx, dy, dz) or in tilting (movements bx, by) relative to the five monitored axes.
  • step 303 the measured values of the movements dx, dy, dz, bx, by are compared with the respective thresholds Sxd, Syd, Szd, Sxb, Syb predefined in step 301 .
  • step 304 a test is performed to determine whether at least one of the measured values of the movements dx, dy, dz, bx, or by exceeds the corresponding thresholds Sxd, Syd, Szd, Sxb, or Syb.
  • the method returns to the measuring and monitoring step 302 , and the basic characteristics of the servo-control are not modified.
  • a starting time t 1 is defined in a step 305 together with a correction activation duration ⁇ t.
  • a step 306 constitutes a step of activating the restabilization network, which network is initiated at time t 1 .
  • a test 307 is performed to determine whether a time t 2 has been reached that corresponds to the time t 1 plus the duration ⁇ t defined for activating the restabilization network.
  • step 306 the method remains in step 306 of activating the restabilization network.
  • the method moves onto a step 308 of deactivating the restabilization network, and it then returns to the step 302 of measuring and monitoring the movements of the rotor 103 .
  • control circuits need not include a DSP type digital signal processor, but rather a set of servo-control processors or circuits of other types.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US13/119,831 2008-09-22 2009-09-21 Turbomolecular Pump with a Flexible Mount Abandoned US20110176910A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0856348A FR2936287B1 (fr) 2008-09-22 2008-09-22 Pompe turbomoleculaire a montage souple
FR0856348 2008-09-22
PCT/FR2009/051768 WO2010031977A1 (fr) 2008-09-22 2009-09-21 Pompe turbomoleculaire a montage souple

Publications (1)

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US20110176910A1 true US20110176910A1 (en) 2011-07-21

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ID=40538867

Family Applications (1)

Application Number Title Priority Date Filing Date
US13/119,831 Abandoned US20110176910A1 (en) 2008-09-22 2009-09-21 Turbomolecular Pump with a Flexible Mount

Country Status (5)

Country Link
US (1) US20110176910A1 (fr)
EP (1) EP2342463B1 (fr)
JP (1) JP5639061B2 (fr)
FR (1) FR2936287B1 (fr)
WO (1) WO2010031977A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2507500A (en) * 2012-10-30 2014-05-07 Edwards Ltd Vacuum pump with contact detection for back-up bearing
WO2014085839A1 (fr) * 2012-12-04 2014-06-12 Technische Universität Wien Système de support et d'entraînement
US8821109B2 (en) 2011-04-14 2014-09-02 Skf Magnetic Mechatronics Device for detecting the axial position of a rotary shaft and its application to a turbo-molecular pump
US20150275902A1 (en) * 2012-10-30 2015-10-01 Edwards Limited Vacuum pump
CN105257698A (zh) * 2014-07-14 2016-01-20 张玉宝 一种单自由度磁悬浮转子支撑系统与磁力定心轴承
EP3128653A1 (fr) * 2015-08-03 2017-02-08 Siemens Aktiengesellschaft Machine verticale electrique et systeme moteur-pompes
TWI639771B (zh) * 2016-08-29 2018-11-01 島津製作所股份有限公司 Vacuum pump

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US3787100A (en) * 1972-12-11 1974-01-22 Armement Direction Tech Engins Devices including rotating members supported by magnetic bearings
US4609332A (en) * 1982-11-19 1986-09-02 Seiko Seiki Kabushiki Kaisha Turbo-molecular pump
US6422837B1 (en) * 1999-03-29 2002-07-23 Seiko Instruments Inc. Magnetic bearing protection device
US20070069598A1 (en) * 2004-06-04 2007-03-29 Shimadzu Corporation Magnetic bearing device
US20070132327A1 (en) * 2003-10-16 2007-06-14 Maurice Brunet Turbomolecular vacuum pump
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
US7993113B2 (en) * 2004-10-15 2011-08-09 Boc Edwards Japan Limited Damper and vacuum pump

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FR2659395B1 (fr) * 1990-03-07 1992-05-15 Cit Alcatel Pompe a vide a suspension magnetique.
JP3651703B2 (ja) * 1995-07-24 2005-05-25 株式会社島津製作所 磁気軸受装置
JP3698773B2 (ja) * 1995-10-20 2005-09-21 光洋精工株式会社 ターボ分子ポンプ
JPH1037957A (ja) * 1996-07-19 1998-02-13 Daikin Ind Ltd 磁気軸受装置
JP2002295396A (ja) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd 真空ポンプ、及びダンパ
JP2004286045A (ja) * 2003-03-19 2004-10-14 Boc Edwards Kk 磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置
JP2008106909A (ja) * 2006-10-27 2008-05-08 Jtekt Corp 磁気軸受の制御装置およびターボ分子ポンプ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3787100A (en) * 1972-12-11 1974-01-22 Armement Direction Tech Engins Devices including rotating members supported by magnetic bearings
US4609332A (en) * 1982-11-19 1986-09-02 Seiko Seiki Kabushiki Kaisha Turbo-molecular pump
US6422837B1 (en) * 1999-03-29 2002-07-23 Seiko Instruments Inc. Magnetic bearing protection device
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
US20070132327A1 (en) * 2003-10-16 2007-06-14 Maurice Brunet Turbomolecular vacuum pump
US20070069598A1 (en) * 2004-06-04 2007-03-29 Shimadzu Corporation Magnetic bearing device
US7993113B2 (en) * 2004-10-15 2011-08-09 Boc Edwards Japan Limited Damper and vacuum pump

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8821109B2 (en) 2011-04-14 2014-09-02 Skf Magnetic Mechatronics Device for detecting the axial position of a rotary shaft and its application to a turbo-molecular pump
GB2507500A (en) * 2012-10-30 2014-05-07 Edwards Ltd Vacuum pump with contact detection for back-up bearing
GB2507500B (en) * 2012-10-30 2015-06-17 Edwards Ltd Vacuum pump
US20150275902A1 (en) * 2012-10-30 2015-10-01 Edwards Limited Vacuum pump
US9822788B2 (en) 2012-10-30 2017-11-21 Edwards Limited Vacuum pump with back-up bearing contact sensor
US10024328B2 (en) * 2012-10-30 2018-07-17 Edwards Limited Vacuum pump
EP2914856B1 (fr) * 2012-10-30 2019-09-18 Edwards Limited Pompe à vide avec capteur de contact de palier de secours
WO2014085839A1 (fr) * 2012-12-04 2014-06-12 Technische Universität Wien Système de support et d'entraînement
CN105257698A (zh) * 2014-07-14 2016-01-20 张玉宝 一种单自由度磁悬浮转子支撑系统与磁力定心轴承
EP3128653A1 (fr) * 2015-08-03 2017-02-08 Siemens Aktiengesellschaft Machine verticale electrique et systeme moteur-pompes
TWI639771B (zh) * 2016-08-29 2018-11-01 島津製作所股份有限公司 Vacuum pump

Also Published As

Publication number Publication date
FR2936287B1 (fr) 2018-06-22
WO2010031977A1 (fr) 2010-03-25
EP2342463B1 (fr) 2016-11-16
FR2936287A1 (fr) 2010-03-26
EP2342463A1 (fr) 2011-07-13
JP2012503134A (ja) 2012-02-02
JP5639061B2 (ja) 2014-12-10

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