US20110120682A1 - Method and device for the absorption of heat in a vacuum coating apparatus - Google Patents

Method and device for the absorption of heat in a vacuum coating apparatus Download PDF

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Publication number
US20110120682A1
US20110120682A1 US12/954,053 US95405310A US2011120682A1 US 20110120682 A1 US20110120682 A1 US 20110120682A1 US 95405310 A US95405310 A US 95405310A US 2011120682 A1 US2011120682 A1 US 2011120682A1
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US
United States
Prior art keywords
heat exchanger
exchanger medium
line system
outer tube
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/954,053
Other languages
English (en)
Inventor
Hubertus VON DER WAYDBRINK
Knut Barthel
Michael Hentschel
Steffen LESSMAN
Marco Kenne
Damir MUCHAMEDJAROW
Reinhard Jaeger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Von Ardenne Anlagentechnik GmbH
Original Assignee
Von Ardenne Anlagentechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Von Ardenne Anlagentechnik GmbH filed Critical Von Ardenne Anlagentechnik GmbH
Assigned to VON ARDENNE ANLAGENTECHNIK GMBH reassignment VON ARDENNE ANLAGENTECHNIK GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MUCHAMEDJAROW, DAMIR, BARTHEL, KNUT, HENTSCHEL, MICHAEL, JAEGER, REINHARD, KENNE, MARCO, LESSMAN, STEFFEN, VON DER WAYDBRINK, HUBERTUS
Publication of US20110120682A1 publication Critical patent/US20110120682A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/10—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
    • F28D7/12—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically the surrounding tube being closed at one end, e.g. return type
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies

Definitions

  • the invention concerns a device for heat absorption in vacuum coating installations with an absorber, which has a line system to supply a coolant, as well as a method for heat absorption in vacuum coating installations in which a coolant is guided through a line system and takes off absorbed heat.
  • the evaporator source is heated to the evaporation temperature of the evaporation material.
  • the evaporator source then represents a significant heat source.
  • a semiconducting absorber layer is deposited by passing a precoated glass in a transport direction through a metal evaporator source or past it, which is thermally exposed to a temperature of more than 1200° C. It is then the hazard that the substrate will be overheated or will experience unduly high thermal gradients during passage by the evaporator source in the transport direction.
  • condensation leads to undesired contaminants on these condensation surfaces, which is also connected with bursting, which leads to contamination of the layers.
  • the task of the invention is therefore to provide a radiation cooling system and method for radiation cooling of vacuum coating processes with which effective cooling is achieved and condensation is avoided.
  • Claims 8 to 16 provide a special embodiment of the method according to the invention.
  • FIG. 1 shows a schematic cross section through an absorber according to the invention
  • FIG. 2 shows a schematic depiction of the use of an absorber according to the invention in a vacuum chamber
  • FIG. 3 shows a schematic view of the use of an absorber according to the invention on the evaporator side.
  • the absorber 1 has an outer tube 2 , which is introduced to a vacuum chamber 4 vacuum-tight through a chamber wall 3 .
  • the outer tube 2 is sealed relative to the vacuum chamber.
  • An inner tube ( 6 ) is arranged in the internal space 5 of the outer tube 2 .
  • the inner tube ( 6 ) is opened on one side to the internal space 5 .
  • the inner tube ( 6 ) is connected to a coolant source (not further shown), like the pressure side of a pump.
  • the internal space 5 is connected to a coolant sink (also not further shown), for example, the suction side of a pump so that the coolant flow shown with the arrows occurs. Water is used as coolant so that a temperature lying significantly below the minimal temperature which is 300° C. in this example is set on the outside of the outer tube 2 .
  • the outside of the outer tube 2 is provided with a jacket tube 8 by means of a spacer 7 .
  • the jacket tube 8 is also closed vacuum-tight relative to the vacuum chamber 4 .
  • a flow space namely a narrow gap 9 between the outside of outer tube 2 and jacket tube 8 is created by the spacer 7 .
  • This gap 9 is connected to a source for a heat exchange medium, in this case helium, and to a sink so that flow of heat exchanger medium occurs in gap 9 .
  • a heat exchange medium in this case helium
  • Helium can be used because of its very high heat conductivity. Water is also possible as a good heat conductor. In principle, however, other gases can be used, if their heat conduction for the specific task is sufficient with expert knowledge.
  • the heat transfer resistance and therefore the temperature on the outside of the jacket tube 8 can be adjusted by the pressure and/or flow rate and/or gas composition of the heat exchanger medium so that it does not surpass a minimum temperature.
  • the absorber tube 8 can also be cooled by pumping helium or another gas in circulation and passing it either outside of the exchanger or using the inner water-traversed tube as a heat exchanger surface.
  • the absorbers 1 are arranged across the transport direction 10 of the substrates 11 , in which the substrates 11 are passed by an evaporator source 14 . Since the evaporator source 12 has a very high temperature, the substrates 11 would experience a significant thermal load. The absorbers 1 prevent this.
  • the chamber wall 3 is protected from the hot processes by heat insulation 14 .
  • the outside temperature of the jacket tube can also be measured via a temperature sensor 15 so that it is guaranteed that the minimum temperature is not fallen short of.
  • the jacket tube 8 is provided with surface-enlarging elements 16 .
  • additional absorbers 17 are arranged across the transport direction 10 on the side of the substrates 11 on which the evaporator source 14 is situated. These additional absorbers 17 serve to trap the heat radiation that is reflected on the coating side of the substrates 11 .

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
US12/954,053 2009-11-25 2010-11-24 Method and device for the absorption of heat in a vacuum coating apparatus Abandoned US20110120682A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102009055619.2 2009-11-25
DE102009055619 2009-11-25
DE102010003215A DE102010003215B4 (de) 2009-11-25 2010-03-24 Verfahren und Vorrichtung zur Wärmeabsorption in Vakuumbeschichtungsanlagen
DE102010003215.8 2010-03-24

Publications (1)

Publication Number Publication Date
US20110120682A1 true US20110120682A1 (en) 2011-05-26

Family

ID=44061236

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/954,053 Abandoned US20110120682A1 (en) 2009-11-25 2010-11-24 Method and device for the absorption of heat in a vacuum coating apparatus

Country Status (2)

Country Link
US (1) US20110120682A1 (de)
DE (1) DE102010003215B4 (de)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19934554A1 (de) * 1999-07-22 2001-01-25 Michael Stollenwerk Wärmetauscher
WO2005088207A1 (de) * 2004-03-15 2005-09-22 Uestuen Orhan Wärmetauscher mit vakuumröhre

Also Published As

Publication number Publication date
DE102010003215B4 (de) 2011-09-01
DE102010003215A1 (de) 2011-08-04

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Legal Events

Date Code Title Description
AS Assignment

Owner name: VON ARDENNE ANLAGENTECHNIK GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:VON DER WAYDBRINK, HUBERTUS;BARTHEL, KNUT;HENTSCHEL, MICHAEL;AND OTHERS;SIGNING DATES FROM 20101221 TO 20101223;REEL/FRAME:025648/0298

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION