US20100303640A1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
US20100303640A1
US20100303640A1 US11/991,222 US99122206A US2010303640A1 US 20100303640 A1 US20100303640 A1 US 20100303640A1 US 99122206 A US99122206 A US 99122206A US 2010303640 A1 US2010303640 A1 US 2010303640A1
Authority
US
United States
Prior art keywords
rotor
pump
stator
vacuum pump
measuring transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/991,222
Other languages
English (en)
Inventor
Alois Greven
Thomas Longerich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GREVEN, ALOIS, LONGERICH, THOMAS
Publication of US20100303640A1 publication Critical patent/US20100303640A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

  • the invention refers to a vacuum pump comprising a pump rotor and a pump stator.
  • the pump rotor may be heated up a lot by compression heat, friction heat and possibly other influences. Excessive rotor temperatures increase the risk of crashes, foster material fatigue and change other characteristics of the pump rotor. For this reason it is necessary to monitor the rotor temperature and to record it, if so desired.
  • the rotor temperature may be measured either by a comparatively costly pyrometric measurement.
  • the rotor temperature can be determined indirectly, by measuring the stator temperature and by drawing conclusions therefrom as to the rotor temperature.
  • the indirect measurement is not very precise and is not suitable for monitoring fast temperature changes of the pump rotor.
  • the pump rotor comprises an electric measuring transducer and a transmitting antenna connected to the measuring transducer.
  • a receiving antenna is provided at the pump stator, which receives measured values of the measuring transducer from the measuring antenna that transmits measured values measured by the measuring transducer.
  • a wireless radio connection for transmitting measured values between the pump rotor and the pump stator is established.
  • an expensive pyrometric measurement or inaccurate indirect measurements of variable physical parameters of the pump rotor can be dispensed with. Since the measuring transducer is located immediately at the pump rotor, the respective parameter can be detected very precisely.
  • the measured value is transmitted from the transmitting antenna to the receiving antenna either analogously or digitally, whereby a safe, fast, exact and error-free transmission can be guaranteed.
  • the measuring transducer is a temperature sensor, but it may also be an acceleration or a vibration sensor or a strain sensor or a combination of a plurality of the sensors mentioned.
  • both the pump stator and the pump rotor are provided with a respective energy transmission coil, the coil on the side of the pump rotor being connected with the measuring transducer through a voltage transformer, so that electric energy can be transmitted wirelessly from the pump stator to the pump rotor for the supply of electric energy to the measuring transducer.
  • Both energy transmission coils form the primary circuit and the secondary circuit of a transformer.
  • the two energy transmission coils may also be part of the drive motor, i.e. they may be formed by a portion of a stator coil on the side of an engine stator and a rotor coil on the side of an engine rotor.
  • the transmitting antenna and the receiving antenna may also serve as energy transmission coils.
  • the transmitting antenna and the receiving antenna may be arranged axially or radially with respect to each other.
  • the transmission antenna and the receiving antenna may be arranged in the vicinity of the axial plane of the pump rotor.
  • the transmission antenna and the receiving antenna may also be arranged outside and remote from the axial plane of the pump rotor.
  • one of the antennas is annular in shape. This is necessary, if both antennas are situated around a rotor shaft. In order to guarantee sufficiently long transmission times, especially at high speeds of rotation of more than 10000 rotations per minute, both antennas overlap for the major part or the entire circumference. This allows for a relatively long or possibly a continuous transmission of measured values between the transmitting antenna and the receiving antenna. If both antennas are annular in shape, but discontinuous, they may each at the same time be used as a primary and a secondary coil for energy transmission.
  • a transponder is arranged at the pump rotor, which sends a measured value from the measuring transducer via the trans-mission antenna to the receiving antenna only upon request.
  • a corresponding stator-side control can adjust the measuring value transmission interval to the respective situation.
  • the number of transmissions of measured values is kept as low as possible, whereby the electric energy requirement of the rotor is kept as low as possible.
  • the aggregates concerned with the energy supply to the rotor can be designed as small as possible.
  • the FIGURE is a schematic illustration of a vacuum pump.
  • the FIGURE represents a vacuum pump 10 designed as a turbomolecular pump.
  • the vacuum pump 10 has a pump part substantially formed by a pump stator 12 and a pump rotor 14 . Further, the vacuum pump has a drive and bearing part, wherein two shaft bearings 16 , 18 and a drive motor 20 are arranged.
  • a receiving antenna 30 is provided that is configured open and is arranged annularly about the rotor shaft 22 .
  • the stator-side receiver antenna 30 is electrically connected to a control module 32 that serves to control the transmission and receiving operation and the evaluation of the signals received by the receiver antenna 30 .
  • the pump rotor 14 comprises a temperature sensor connected to a transponder 42 which in turn is connected to the transmitting antenna 40 .
  • the measuring transducer 44 is a temperature sensor measuring the rotor temperature and transmitting this value to the transponder 42 either continuously or on demand.
  • the measuring transducers used could also be strain sensors, acceleration sensors or vibration sensors or other sensors.
  • the receiving antenna 30 is also configured as an open annulus and also serves, besides its function as an antenna, as a secondary coil of a transformer, for which the receiving antenna 30 forms the primary coil.
  • the control device 32 feeds a corresponding alternating voltage into the receiving antenna 30 that is induced into the transmitting antenna 40 .
  • the axial distance between the receiving antenna 30 and the transmitting antenna 40 is a few millimetres and possibly even less than 1 mm.
  • the transponder 42 in the pump rotor 14 has a transceiver unit receiving request signals from the control module 32 , amplifies and interprets these, and, upon a request, passes appropriately amplified measured values from the measuring transducer 44 to the transmission antenna 40 .
  • a voltage transformer 46 is provided that rectifies the alternating voltage received, controls the same to a constant supply voltage and feeds electric energy to the measuring transducer 44 and the transponder 42 via supply lines.
  • the wireless radio transmission of measured values provided by measuring transducers on the side of the pump rotor allows for a comprehensive, exact and real-time monitoring of the pump rotor.
  • quick action can be taken by a motor control and a damage to or destruction of the vacuum pump can be avoided.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
US11/991,222 2005-09-01 2006-08-15 Vacuum pump Abandoned US20100303640A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005041500.8 2005-09-01
DE102005041500A DE102005041500A1 (de) 2005-09-01 2005-09-01 Vakuumpumpe
PCT/EP2006/065315 WO2007025854A1 (de) 2005-09-01 2006-08-15 Vakuumpumpe

Publications (1)

Publication Number Publication Date
US20100303640A1 true US20100303640A1 (en) 2010-12-02

Family

ID=37115720

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/991,222 Abandoned US20100303640A1 (en) 2005-09-01 2006-08-15 Vacuum pump

Country Status (6)

Country Link
US (1) US20100303640A1 (ja)
EP (1) EP1920160B1 (ja)
JP (1) JP2009507166A (ja)
CN (1) CN100585188C (ja)
DE (2) DE102005041500A1 (ja)
WO (1) WO2007025854A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110273121A1 (en) * 2010-05-04 2011-11-10 Remy Technologies, Llc Electric Machine Component Temperature Monitoring
US20120075070A1 (en) * 2010-09-27 2012-03-29 General Electric Company Real time measurement of rotor surface
US20140000386A1 (en) * 2012-06-28 2014-01-02 Honeywell International Inc. Single ear stator antenna for wireless torque measurement system
US20140167573A1 (en) * 2011-09-07 2014-06-19 Alfred Bieringer Motor drive for actuating a step switch

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007053980A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008019451A1 (de) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102008019472A1 (de) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
FR2964164B1 (fr) * 2010-09-01 2014-05-09 Snecma Turbomachine comprenant un element tournant soumis a des conditions extremes
DE102010049138A1 (de) * 2010-10-22 2012-04-26 Ksb Aktiengesellschaft Vorrichtung zur Pumpenüberwachung
CN104005968B (zh) * 2014-06-05 2016-01-20 核工业理化工程研究院 可测转子表面温度的牵引式分子泵
CN104612984B (zh) * 2015-01-26 2017-02-22 核工业理化工程研究院 牵引式分子泵的转子端面测温装置
JP2018035684A (ja) * 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
EP3443993A1 (de) * 2017-08-17 2019-02-20 Berlin Heart GmbH Pumpe mit einem rotorsensor zur erfassung von physiologischen parametern, strömungs- und bewegungsparametern

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3824857A (en) * 1972-08-07 1974-07-23 Electric Machinery Mfg Co Temperature measuring system for rotating machines
US4723445A (en) * 1986-05-19 1988-02-09 Neotech Industries, Inc. Vehicle wheel and tire pressure monitor
US5160925A (en) * 1991-04-17 1992-11-03 Smith International, Inc. Short hop communication link for downhole mwd system
US5252962A (en) * 1990-08-03 1993-10-12 Bio Medic Data Systems System monitoring programmable implantable transponder
US5844130A (en) * 1996-04-03 1998-12-01 Ssi Technologies Apparatus for maintaining a constant radial distance between a transmitting circuit and an antenna coil
US20010004236A1 (en) * 1999-05-17 2001-06-21 Letkomiller Joseph Michael Response adjustable temperature sensor for transponder
US6615954B2 (en) * 2000-04-14 2003-09-09 Knorr-Bremse Systeme Fur Schienenfahrzeuge Gmbh Monitoring system and method for brake disks
US20030175132A1 (en) * 2002-03-13 2003-09-18 Takaharu Ishikawa Vacuum pump
US20030219342A1 (en) * 2002-05-22 2003-11-27 Applied Materials, Inc. Speed control of variable speed control pump
US20040081560A1 (en) * 2001-03-27 2004-04-29 Roland Blumenthal Turbomolecular pump
US20060078435A1 (en) * 2004-08-19 2006-04-13 Metropolitan Industries Pump monitoring system
US20070081156A1 (en) * 2005-10-07 2007-04-12 Chemimage Corporation System and method for a chemical imaging threat assessor with a probe
US7336153B2 (en) * 2005-06-30 2008-02-26 Hewlett-Packard Development Company, L.P. Wireless temperature monitoring for an electronics system
US7544046B2 (en) * 2002-04-20 2009-06-09 Oerlikon Leybold Vacuum Gmbh Vacuum pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4309018A1 (de) * 1993-03-20 1994-09-22 Balzers Pfeiffer Gmbh Temperatur-Meßanordnung
JP2000064986A (ja) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd ターボ分子ポンプ
ES2203218T3 (es) * 1998-12-03 2004-04-01 Psi Global Ltd Compresor o bomba de vacio que utiliza filtros de fluido que tienen una indentificacion legible por maquina oculta.
DE19857453B4 (de) * 1998-12-12 2008-03-20 Pfeiffer Vacuum Gmbh Temperaturüberwachung an Rotoren von Vakuumpumpen
JP3632561B2 (ja) * 2000-05-12 2005-03-23 株式会社デンソー 空気圧検出装置及びタイヤ状態監視システム
JP2002039088A (ja) * 2000-07-26 2002-02-06 Seiko Instruments Inc 回転体装置
JP4082345B2 (ja) * 2003-12-12 2008-04-30 トヨタ自動車株式会社 車輪状態検出装置、車輪及び車体

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3824857A (en) * 1972-08-07 1974-07-23 Electric Machinery Mfg Co Temperature measuring system for rotating machines
US4723445A (en) * 1986-05-19 1988-02-09 Neotech Industries, Inc. Vehicle wheel and tire pressure monitor
US5252962A (en) * 1990-08-03 1993-10-12 Bio Medic Data Systems System monitoring programmable implantable transponder
US5160925A (en) * 1991-04-17 1992-11-03 Smith International, Inc. Short hop communication link for downhole mwd system
US5160925C1 (en) * 1991-04-17 2001-03-06 Halliburton Co Short hop communication link for downhole mwd system
US5844130A (en) * 1996-04-03 1998-12-01 Ssi Technologies Apparatus for maintaining a constant radial distance between a transmitting circuit and an antenna coil
US20010004236A1 (en) * 1999-05-17 2001-06-21 Letkomiller Joseph Michael Response adjustable temperature sensor for transponder
US6615954B2 (en) * 2000-04-14 2003-09-09 Knorr-Bremse Systeme Fur Schienenfahrzeuge Gmbh Monitoring system and method for brake disks
US7090469B2 (en) * 2001-03-27 2006-08-15 Leybold Vakuum Gmbh Turbomolecular pump
US20040081560A1 (en) * 2001-03-27 2004-04-29 Roland Blumenthal Turbomolecular pump
US20030175132A1 (en) * 2002-03-13 2003-09-18 Takaharu Ishikawa Vacuum pump
US7544046B2 (en) * 2002-04-20 2009-06-09 Oerlikon Leybold Vacuum Gmbh Vacuum pump
US20030219342A1 (en) * 2002-05-22 2003-11-27 Applied Materials, Inc. Speed control of variable speed control pump
US20060078435A1 (en) * 2004-08-19 2006-04-13 Metropolitan Industries Pump monitoring system
US7336153B2 (en) * 2005-06-30 2008-02-26 Hewlett-Packard Development Company, L.P. Wireless temperature monitoring for an electronics system
US20070081156A1 (en) * 2005-10-07 2007-04-12 Chemimage Corporation System and method for a chemical imaging threat assessor with a probe

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110273121A1 (en) * 2010-05-04 2011-11-10 Remy Technologies, Llc Electric Machine Component Temperature Monitoring
US20120075070A1 (en) * 2010-09-27 2012-03-29 General Electric Company Real time measurement of rotor surface
US20140167573A1 (en) * 2011-09-07 2014-06-19 Alfred Bieringer Motor drive for actuating a step switch
US20140000386A1 (en) * 2012-06-28 2014-01-02 Honeywell International Inc. Single ear stator antenna for wireless torque measurement system
US9046431B2 (en) * 2012-06-28 2015-06-02 Honeywell International Inc. Single ear stator antenna for wireless torque measurement system

Also Published As

Publication number Publication date
CN100585188C (zh) 2010-01-27
CN101253332A (zh) 2008-08-27
EP1920160B1 (de) 2009-01-07
DE502006002609D1 (de) 2009-02-26
EP1920160A1 (de) 2008-05-14
DE102005041500A1 (de) 2007-03-08
WO2007025854A1 (de) 2007-03-08
JP2009507166A (ja) 2009-02-19

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Legal Events

Date Code Title Description
AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GREVEN, ALOIS;LONGERICH, THOMAS;REEL/FRAME:020629/0892

Effective date: 20080225

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION