US20090184391A1 - Semiconductor devices having fuses and methods of forming the same - Google Patents
Semiconductor devices having fuses and methods of forming the same Download PDFInfo
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- US20090184391A1 US20090184391A1 US12/382,168 US38216809A US2009184391A1 US 20090184391 A1 US20090184391 A1 US 20090184391A1 US 38216809 A US38216809 A US 38216809A US 2009184391 A1 US2009184391 A1 US 2009184391A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 61
- 238000000034 method Methods 0.000 title abstract description 91
- 239000010410 layer Substances 0.000 claims abstract description 328
- 238000009413 insulation Methods 0.000 claims abstract description 185
- 239000011229 interlayer Substances 0.000 claims abstract description 182
- 229910052751 metal Inorganic materials 0.000 claims abstract description 141
- 239000002184 metal Substances 0.000 claims abstract description 141
- 230000004888 barrier function Effects 0.000 claims abstract description 44
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 238000002161 passivation Methods 0.000 claims description 21
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 20
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 20
- 125000006850 spacer group Chemical group 0.000 claims description 14
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 238000009751 slip forming Methods 0.000 claims description 8
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 5
- 230000008569 process Effects 0.000 description 62
- 238000005530 etching Methods 0.000 description 40
- 239000010936 titanium Substances 0.000 description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 27
- 229910052814 silicon oxide Inorganic materials 0.000 description 25
- 238000005229 chemical vapour deposition Methods 0.000 description 19
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 17
- 229920002120 photoresistant polymer Polymers 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 13
- 229910052782 aluminium Inorganic materials 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- 230000002950 deficient Effects 0.000 description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 10
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 10
- 239000011810 insulating material Substances 0.000 description 10
- 229910052719 titanium Inorganic materials 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 8
- 238000000206 photolithography Methods 0.000 description 8
- 238000000231 atomic layer deposition Methods 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- 238000004070 electrodeposition Methods 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 238000001459 lithography Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000004380 ashing Methods 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000013102 re-test Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
- H01L23/5256—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive
- H01L23/5258—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive the change of state resulting from the use of an external beam, e.g. laser beam or ion beam
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B99/00—Subject matter not provided for in other groups of this subclass
- H10B99/14—Subject matter not provided for in other groups of this subclass comprising memory cells that only have passive resistors or passive capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- Example embodiments of the present invention relate to semiconductor devices and methods of manufacturing the same.
- Other example embodiments of the present invention relate to semiconductor devices having more uniformly formed fuses, and methods of manufacturing the same.
- Semiconductor devices may be manufactured through four basic processes: a fabrication (hereinafter referred to as “FAB”) process, an electrical die sorting (hereinafter referred to as “EDS”) process, an assembly process and/or a test process.
- FAB fabrication
- EDS electrical die sorting
- ICs integrated circuits
- wafer processes may include diffusion, lithography, etching and/or deposition.
- FAB process The formation of a wafer layer, which may be capable of electrically operating, as part of a work-in-progress product is called a FAB process.
- the finished integrated circuit is called a chip or a die.
- an EDS process may be carried on a passivation layer.
- the EDS process may be the last step of the FAB process.
- the EDS process may test the electrical properties of each of the chips constituting the wafer and/or sort out defective chips.
- the EDS process may include a pre-laser test, a laser-repair process, a post-laser test and/or a back-grinding process.
- the pre-laser test may identify the defective chips and/or generate the sorting data.
- the laser-repair process may repair the identified defective chips based on the data generated from the pre-laser test.
- the post-laser test may re-test the repaired chips to determine if the repairing process was successful.
- the back-grinding process may grind down the back of the wafer by using a diamond wheel or similar instrument.
- the laser-repair process may include cutting a wiring connected to a defective memory cell by irradiating a laser beam onto the wiring and/or replacing the defective memory cell with a redundancy cell built into the chip.
- the wiring, to be cut by the laser beam is typically called a fuse.
- the fuse may be a means for electrically removing the defective memory cell when a defect is detected in a bit of the memory cell.
- the fuse may drive the redundancy cell that may be formed during manufacturing of the chips.
- a fuse box region of the chip may be used as the fuse.
- a polysilicon layer serving as a word line may be used as the fuse.
- the DRAM device and/or logic device may be on a single wafer to increase circuit speed and/or to reduce manufacturing costs.
- MDL devices a portion of a metal line may be used as the fuse if multilevel interconnect schemes are necessary.
- FIGS. 1A to 1C are cross-sectional views illustrating a method of forming a fuse of a semiconductor device in accordance with a conventional method.
- transistors including gate electrodes, serving as word lines and/or source/drain regions, may be formed on a semiconductor substrate 10 having a memory cell region and/or a fuse box region.
- a bit line 14 may be formed on the insulating layer. The bit line 14 may be electrically connected with the drain region of the transistor.
- Silicon oxide may be deposited on the bit line 14 to form a first insulation interlayer 16 .
- the first insulation interlayer 16 may be etched by a lithography process to form a contact hole 18 that may expose a portion of the bit line 14 .
- a conductive layer may be deposited over the contact hole 18 and/or the first insulation interlayer 16 .
- the conductive layer may be planarized to the upper surface of the first insulation interlayer 16 to form a contact plug 20 filling up the contact hole 18 .
- the contact plug 20 may be formed using a metal such as tungsten (W).
- a first barrier layer 22 , a first metal layer 24 and/or a first capping layer 26 may be deposited on the contact plug 20 and/or the first insulation interlayer 16 .
- the first barrier layer 22 may be formed of titanium/titanium nitride (Ti/TiN).
- the first metal layer 24 may be formed of aluminum (Al).
- the first capping layer 26 may be formed of titanium/titanium nitride (Ti/TiN).
- the first barrier layer 22 , the first metal layer 24 and/or the first capping layer may be patterned by a lithography process to form a first metal wiring 28 a and/or a plurality of fuses 28 b .
- the first metal wiring 28 a may be electrically connected to the underlying bit line 14 through the contact plug 20 .
- Silicon oxide may be deposited on the first metal wirings 28 a and/or the first insulation interlayer 16 with the fuses 28 b to form a second insulation interlayer 30 .
- the second insulation interlayer 30 may be etched by a photolithography process to form a via hole 32 that may expose a portion of the first metal wiring 28 a.
- a second barrier layer 34 , a second metal layer 36 and/or a second capping layer 38 may be deposited on the via hole 32 and/or the second insulation interlayer 30 .
- the second barrier layer 34 may be formed of Ti/TiN.
- the second metal layer 36 may be formed of aluminum (Al).
- the second capping layer 38 may be formed of Ti/TiN.
- the second barrier layer 34 , the second metal layer 36 and/or the second capping layer may be patterned by a lithography process to form a second metal wiring 40 to be electrically connected with the first metal wiring 28 a through the via hole 32 .
- Silicon oxide may be deposited on the second metal wiring 40 and/or the second insulation interlayer 30 to form a third insulation interlayer 42 .
- Silicon nitride may be deposited on the third insulation interlayer 42 to form a fourth insulation interlayer 44 .
- the photoresist After coating a photoresist on the fourth insulation interlayer 44 , the photoresist may be exposed and/or developed to form photoresist patterns 46 for defining the fuse box region.
- the fourth insulation interlayer 44 , the third insulation interlayer 42 and/or the second insulation interlayer 30 may be etched to form an opening 48 that exposes the fuse box region.
- the fuses 28 b may be etched until the first metal layer 24 of the fuse 28 b , which may be exposed by the opening 48 , has a thickness of about 2,000 ⁇ .
- the third insulation interlayer 42 and/or second insulation interlayer 30 which may be formed of silicon oxide, to a depth of about 25,000 ⁇ at the etch rate of about 10,000 ⁇ /min, without using an etch stop layer.
- the fuse 28 b may be under-exposed.
- An adjacent fuse e.g., a fuse connected to a normal memory cell
- the fuse 28 b may break due to the removal of the first metal layer 24 .
- Example embodiments of the present invention provide semiconductor devices and methods of forming the same.
- Example embodiments of the present invention provide semiconductor devices having a plurality of fuses and methods of forming the same.
- Example embodiments of the present invention provide semiconductor devices having more uniformed fuses.
- Example embodiments of the present invention provide a method of manufacturing a semiconductor device that may more uniformly form fuses and reduce the probability of breaking the fuses.
- semiconductor devices which may include a semiconductor substrate having a memory cell region, a fuse box region, a first insulation interlayer formed on the semiconductor substrate and/or a first etch stop layer formed on the first insulation interlayer.
- a metal wiring including a barrier layer, a metal layer and/or a capping layer, which may be successively stacked, may be formed on the first etch stop layer of the memory cell region.
- a plurality of fuses, spaced apart from each other, may be formed on the first etch stop layer of the fuse box region. Each of the fuses may include the barrier layer and/or the metal layer.
- a second insulation interlayer, having an opening that may expose the fuse box region, may be formed on the metal wiring and the first etch stop layer.
- the first etch stop layer may be formed from a material that has an etch selectivity with respect to the second insulation interlayer.
- the semiconductor device may further include a passivation layer that may be continuously formed on the second insulation interlayer, the first etch stop layer and/or the plurality of fuses.
- the passivation layer may be formed to reduce damage to adjacent fuses and/or may be formed of silicon nitride.
- the second insulation interlayer may include yet another insulation interlayer formed on an upper metal wiring to be electrically connected with the metal wiring.
- the metal wiring may further include a second etch stop layer formed on the capping layer.
- the second etch stop layer may be formed of silicon germanium (SiGe).
- a semiconductor device including a semiconductor substrate having a memory cell region and/or a fuse box region.
- a first insulation interlayer may be formed on the semiconductor substrate.
- a metal wiring including a barrier layer, a metal layer and/or a capping layer, which may be successively stacked, may be formed on the first insulation interlayer of the memory cell region.
- a plurality of fuses, spaced apart from each other, may be formed on the first insulation interlayer of the fuse box region.
- Each of the fuses may include the barrier layer and/or the metal layer.
- An etch stop layer may be continuously formed on the metal wiring and/or the first insulation interlayer of the memory cell region. Spacers for etch stopping may be formed on both sidewalls of each of the fuses. The spacers may be formed from the same layer, or material, as the etch stop layer.
- a second insulation interlayer, having an opening that exposes the fuse box region, may be formed on the metal wiring and the first etch stop layer.
- a method of manufacturing a semiconductor device is provided.
- a first insulation interlayer may be formed on a semiconductor substrate having a memory cell region and/or a fuse box region.
- a first etch stop layer may be formed on the first insulation interlayer.
- a barrier layer, a metal layer and/or a capping layer may be successively stacked on the first etch stop layer.
- the stacked layers may be patterned to form a metal wiring on the first etch stop layer of the memory cell region and/or to form a plurality of fuses on the first etch stop layer of the fuse box region.
- the fuses may be spaced apart from each other.
- a second insulation interlayer may be formed on the metal wiring, a plurality of fuses and/or the first etch stop layer.
- the second insulation interlayer may be etched to form an opening exposing the fuse box region.
- a plurality of fuses, exposed by the opening may be etched to a portion of the metal layer.
- the first etch stop layer may be formed of silicon nitride.
- a second etch stop layer may be formed on the capping layer before the stacked layers are patterned.
- the second etch stop layer may be formed of silicon germanium (SiGe).
- a passivation layer may be continuously formed on the second insulation interlayer, the first etch stop layer and/or a plurality of fuses in order to reduce damage to adjacent fuses.
- a method of manufacturing a semiconductor device is provided.
- a first insulation interlayer may be formed on a semiconductor substrate having a memory cell region and/or a fuse box region.
- a barrier layer, a metal layer and/or a capping layer may be successively stacked on the first insulation interlayer.
- the stacked layers may be patterned to form a metal wiring on the first insulation interlayer of the memory cell region and/or to form a plurality of fuses on the first insulation interlayer of the fuse box region.
- the fuses may be spaced apart from each other.
- An etch stop layer may be continuously formed on the first insulation interlayer, the metal wiring and/or a plurality of fuses.
- a second insulation interlayer may be formed on the metal wiring, a plurality of fuses and/or the etch stop layer.
- the second insulation interlayer may be etched to form an opening that exposes the fuse box region.
- a plurality of fuses exposed by the opening may be etched to a portion of the metal layer.
- Spacers may be formed on both sidewalls of each of the fuses. The spacers may be formed of the same layer as the etch stop layer.
- fuses may be simultaneously etched with the formation of the fuses.
- the process of etching the insulation interlayers to open the fuse box region may be performed on a semiconductor device with a fuse, if the fuse has an etch selectivity with respect to the second insulation interlayer.
- the insulation interlayers may be more uniformly etched to the etch stop layer such that the fuses may be formed more uniformly.
- the insulation interlayer may be over-etched to keep the fuses from being under-exposed, the etching process may be stopped on the etch stop layer to reduce the chances of breaking the fuses.
- FIGS. 1-5 represent non-limiting example embodiments of the present invention as described herein.
- FIGS. 1A to 1C are cross-sectional views illustrating a method of forming a fuse of a semiconductor device in accordance with a conventional method
- FIG. 2 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments of the present invention
- FIGS. 3A to 3F are cross-sectional views illustrating a method of forming a fuse of a semiconductor device in accordance with example embodiments of the present invention.
- FIG. 4 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments of the present invention.
- FIGS. 5A to 5D are cross-sectional views illustrating a method of forming a fuse of a semiconductor device in accordance with example embodiments of the present invention.
- first, second, third etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the scope of example embodiments of the present invention.
- spatially relative terms such as “beneath”, “below”, “lower”, “above”, “upper” and the like, may be used herein for ease of description to describe one element or a feature's relationship to another element or feature as illustrated in the Figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the Figures. For example, if the device in the Figures is turned over, elements described as “below” or “beneath” other elements or features would then be oriented “above” the other elements or features. Thus, for example, the term “below” can encompass both an orientation which is above as well as below. The device may be otherwise oriented (rotated 90 degrees or viewed or referenced at other orientations) and the spatially relative descriptors used herein should be interpreted accordingly.
- Example embodiments of the present invention are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments (and intermediate structures). As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, may be expected. Thus, example embodiments of the invention should not be construed as limited to the particular shapes of regions illustrated herein but may include deviations in shapes that result, for example, from manufacturing. For example, an implanted region illustrated as a rectangle may have rounded or curved features and/or a gradient (e.g., of implant concentration) at its edges rather than an abrupt change from an implanted region to a non-implanted region.
- a gradient e.g., of implant concentration
- a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation may take place.
- the regions illustrated in the figures are schematic in nature and their shapes do not necessarily illustrate the actual shape of a region of a device and do not limit the scope of the present invention.
- Example embodiments of the present invention provide semiconductor devices and methods of forming the same.
- Example embodiments of the present invention provide semiconductor devices having a plurality of fuses and methods of forming the same.
- FIG. 2 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments of the present invention.
- transistors including gate electrodes serving as word lines and source/drain regions may be formed on a semiconductor substrate 100 having a memory cell region and/or a fuse box region.
- An insulating layer (not shown) may be formed on the substrate 100 to substantially cover the transistors.
- a bit line 104 may be formed on the insulating layer and electrically connected with the drain region of the transistor.
- a first insulation interlayer 106 may be formed over the bit line 104 .
- the first insulation interlayer 106 may be formed of silicon oxide.
- the first insulation layer 106 may be formed of several layers.
- a first etch stop layer 108 may be formed on the first insulation interlayer 106 .
- the first etch stop layer 108 may be formed of a material having an etch selectivity with respect to silicon oxide.
- the first etch stop layer 108 may be formed of silicon nitride.
- the first etch stop layer 108 may function as an etch stopper to make the etching of the first insulation interlayer 106 uniform.
- the first insulation interlayer 106 and/or first etch stop layer 108 may have a contact hole 110 that exposes a portion of the bit line 104 .
- a contact plug 112 may be formed in the contact hole 110 .
- the contact plug 112 may be formed using a conductive material such as tungsten (W).
- a first metal wiring 122 a may be formed on the first etch stop layer 108 of the memory cell region.
- the first metal wiring 122 a may include a first barrier layer 114 , a first metal layer 116 , a first capping layer 118 and/or a second etch stop layer 120 , which may be successively stacked.
- a plurality of fuses 122 b may be formed on the first etch stop layer 108 of the fuse box region.
- Each of the fuses 122 b may include the first barrier layer 114 and/or the first metal layer 116 .
- the first barrier layer 114 may prevent the first metal layer 116 , which may be formed of aluminum (Al), from reacting with the contact plug 112 , which may be formed of tungsten (W), to form undesirable by-products. Further, the first barrier layer 114 may increase adhesion of the first metal layer 116 to the underlying first insulation interlayer 106 , which may be formed using silicon oxide.
- the first barrier layer 114 may be formed using titanium/titanium nitride (Ti/TiN).
- the first capping layer 118 may retard oxidation of the first metal layer 116 and/or may protect the first metal layer 116 .
- the first capping layer 118 may be formed using titanium/titanium nitride (Ti/TiN).
- the second etch stop layer 120 may be used as an etch stopper during an etching process of opening the fuse box region, decreasing the susceptibility of the first metal layer 116 for the fuses 122 b to attack. When etching the fuses 122 b , the first metal layer 116 may be more uniformly etched by the second etch stop layer 120 .
- the second etch stop layer 120 may be formed of silicon-germanium (SiGe)
- a second insulation interlayer 124 having an opening 142 that exposes the fuse box region, may be formed on the first metal wiring 122 a and/or the first etch stop layer 108 .
- the second insulation interlayer 124 may be formed of silicon oxide.
- a second metal wiring 134 may be formed on the second insulation interlayer 124 , may be formed on the first metal wiring 122 a and/or the first etch stop layer 108 .
- the second metal wiring 134 may be electrically connected with the first metal wiring 122 a through a via hole 126 , which may pass through the second insulation interlayer 124 to expose a portion of the underlying first metal wiring 122 a.
- the second metal wiring 134 may be formed by successively stacking a second barrier layer 128 , a second metal layer 130 and/or a second capping layer 132 .
- the second barrier layer 128 may be formed of Ti/TiN.
- the second metal layer 130 may be formed of aluminum.
- the second capping layer 132 may be formed of Ti/TiN.
- a third insulation interlayer 136 and a fourth insulation layer 138 may be successively formed on the second metal wiring 134 and/or the second insulation interlayer 124 .
- the third insulation interlayer 136 and/or the insulation interlayer 138 may have an opening 142 , which may expose the fuse box region.
- the third insulation interlayer 136 may be formed of silicon oxide.
- the fourth insulation interlayer 138 may be formed of silicon nitride.
- the opening 142 which may expose the fuse box region, may be formed through the fourth insulation interlayer 138 , the third insulation interlayer 136 and/or the second insulation interlayer 124 .
- a passivation layer 144 may be continuously formed on the fourth insulation interlayer 138 , the first etch stop layer 108 and/or a plurality of fuses 122 b .
- the passivation layer 144 may be formed of silicon nitride. When cutting a fuse connected to a defective memory cell by a laser beam in a laser-repair step, the passivation layer 144 may reduce the possibility of damaging the adjacent fuses.
- the first etch stop layer 108 may function as an etch stopper during the etching of the insulation interlayers to open the fuse box region in order that the etching of the insulation interlayers may be performed more uniformly to the first etch stop layer 108 .
- the second etch stop layer 120 may reduce the chances of the first metal layer 116 for the fuses 122 b being attacked during the etching process of opening the fuse box region. Due to the second etch stop layer 120 , the first metal layer 116 for the fuses 122 b may be etched to a more uniform thickness during the etching process of exposing the fuses.
- the fuses 122 b may be formed more uniformly by the first etch stop layer 108 and/or the second etch stop layer 120 .
- the insulation interlayers may be over-etched to ensure that the fuses 122 b open, the etching process may be stopped precisely on the first etch stop layer 108 to reduce the chances of breaking the fuses 122 b.
- FIGS. 3A to 3F are cross-sectional views illustrating a method of manufacturing a semiconductor device shown in FIG. 2 .
- an insulating layer (not shown) may be formed on the substrate 100 to cover the transistors.
- a bit line 104 may be formed on the insulating layer to electrically connect with the drain regions of the transistor.
- the first insulation interlayer 106 may be formed of silicon oxide.
- the first insulation interlayer 106 may be formed by any suitable method known in the art, such as chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD) or high-density plasma chemical vapor deposition (HDP-CVD).
- CVD chemical vapor deposition
- PECVD plasma-enhanced chemical vapor deposition
- HDP-CVD high-density plasma chemical vapor deposition
- a material having an etch selectivity with respect to the first insulation interlayer 106 may be deposited to a thickness of about 1,000 ⁇ to about 4,000 ⁇ on the first insulation interlayer 106 , forming a first etch stop layer 108 .
- the first etch stop layer 108 may be formed of silicon nitride.
- the first etch stop layer 108 may be formed by any suitable method known in the art, such as CVD, PECVD or low-pressure CVD (LPCVD).
- the first etch stop layer 108 may serve as an etch stopper during an etching process of opening the fuse box region.
- the first etch stop layer 108 and/or the first insulation interlayer 106 may be etched by a photolithography process to form a contact hole 110 that exposes a portion of the bit line 104 .
- the first etch stop layer 108 may reduce the possibility of forming a bridge between adjacent contact holes by blocking the contact holes 110 from falling down.
- a conductive material may be deposited on the first etch stop layer 108 so as to fill up the contact hole 110 , forming a conductive layer.
- the conductive layer may be formed of tungsten (W).
- the conductive layer may be deposited by any method known in the art. According to a non-limiting example embodiment, the conductive layer may be deposited by a CVD process, a PECVD process, a physical vapor deposition (PVD) process, an atomic layer deposition (ALD) process, an electrochemical deposition (ECD) process, a metal organic CVD (MOCVD) process or a plasma-enhanced ALD (PEALD) process.
- the conductive layer may be removed from the upper surface of the first etch stop layer 108 to form a contact plug 112 in the contact hole 110 .
- the conductive layer may be removed by an etch-back process or a chemical mechanical polishing (CMP) process.
- a first barrier layer 114 , a first metal layer 116 , a first capping layer 118 and/or a second etch stop layer 120 may be successively stacked on the contact plug 112 and the first etch stop layer 108 .
- the first barrier layer 114 may be formed of titanium/titanium nitride (Ti/TiN).
- the first metal layer 116 may be formed of aluminum (Al).
- the first capping layer 118 may be formed of titanium/titanium nitride (Ti/TiN).
- the second etch stop layer 120 may be formed of silicon germanium (SiGe).
- Each of these stacked layers may be deposited by any method known in the art such as CVD, PVD, ALD, ECD, MOCVD, PECVD or PEALD.
- the second etch stop layer 120 may function as an etch stopper during an etching process of opening the fuse box region, reducing the possibility of over-etching the first metal layer 116 and breaking the fuses 122 b .
- the second etch stop layer 120 may have a thickness of about 1,000 ⁇ to about 3,000 ⁇ .
- the second etch stop layer 120 , the first capping layer 118 , the first metal layer 116 and/or the first barrier layer 114 may be successively patterned to form a first metal wiring 122 a and/or a plurality of fuses 122 b.
- the first metal wiring 122 a may be electrically connected to the underlying bit line 104 through the contact plug 112 .
- an insulating material may be deposited on the first metal wiring 122 a , the fuses 122 b and/or the first etch stop layer 108 to form a second insulation interlayer 124 .
- the second insulation interlayer 124 may be formed of silicon oxide.
- the second insulation interlayer 124 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD.
- the second insulation interlayer 124 may be partially etched by a photolithography process to form a via hole 126 that exposes a portion of the first metal wiring 122 a.
- a second barrier layer 128 , a second metal layer 130 and/or a second capping layer 132 may be successively stacked on the via hole 126 and the second insulation interlayer 124 .
- the second barrier layer 128 may be formed of Ti/TiN.
- the second metal layer 130 may be formed of aluminum.
- the second capping layer 132 may be formed of Ti/TiN.
- Each of these stacked layers may be deposited by any method known in the art, such as CVD, PVD, ALD, ECD, MOCVD, PECVD or PEALD.
- the stacked layers may be patterned by a photolithography process to form a second metal wiring 134 to be electrically connected with the first metal wiring 122 a through the via hole 126 .
- an insulating material may be deposited on the second metal wiring 134 and/or the second insulation interlayer 124 to form a third insulation interlayer 136 .
- the third insulation interlayer 136 may be formed using silicon oxide.
- the third insulation interlayer 136 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD.
- An insulating material may be deposited on the third insulation interlayer 136 to form a fourth insulation interlayer 138 .
- the fourth insulation interlayer 138 may be formed of silicon nitride.
- the fourth insulation interlayer 138 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD.
- the fourth insulation interlayer 138 may function as a hard mask with respect to the second and/or third insulation interlayers 124 and 136 , which may be formed of silicon oxide.
- the photoresist After coating a photoresist on the fourth insulation interlayer 138 , the photoresist may be exposed and/or developed to form photoresist pattern 140 for defining the fuse box region.
- the fourth insulation interlayer 138 , the third insulation interlayer 136 and/or the second insulation interlayer 124 may be successively etched to form an opening 142 that exposes the fuse box region.
- the photoresist pattern 140 may not be a sufficient mask during the etching process for forming the opening 142 . Accordingly, the third insulation interlayer 136 and/or second insulation interlayer 124 may be etched using the fourth insulation interlayer 138 as an etching mask.
- the fourth insulation interlayer 138 may be formed of silicon nitride having an etch selectivity to silicon oxide.
- the insulation interlayers may be more uniformly etched to, or stopped on, the first etch stop layer 108 (e.g., formed of silicon nitride).
- the etching may be more precisely stopped on the first etch stop layer 108 even though the insulation interlayers may be over-etched, decreasing the likelihood of insufficient exposure of the fuses 122 b due to under-etching of the insulation interlayers.
- the second etch stop layer 120 protecting the first metal layer 116 for the fuses 122 b , may retard the etching of the first metal layer 126 .
- the fuses 122 b may be etched until the first metal layer 116 for the fuses 122 b is at a thickness of about 2,000 ⁇ .
- the fuse 122 b may be etched to a predetermined thickness such that a cutting process for laser-repair may be performed more smoothly.
- the fuse 122 b may include the first barrier layer 114 and/or the first metal layer 116 .
- the photoresist patterns 140 may be removed by ashing and/or stripping processes.
- An insulating material may be continuously deposited to a thickness of about 1,000 ⁇ to about 3,000 ⁇ on the entire, or portion, of the resultant structure surface (e.g., on the fourth insulation interlayer 138 , the first etch stop layer 108 and/or the fuses 122 b ) to form a passivation layer 144 for the exposed fuse 122 b .
- the passivation layer 144 may be formed of silicon nitride.
- the passivation layer 144 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD.
- the passivation layer 144 may retard damage to the adjacent fuses during the process of cutting a fuse connected to a defective memory cell by a laser beam.
- FIG. 4 is a cross-sectional view illustrating a semiconductor device in accordance with another example embodiment of the present invention.
- a bit line 204 may be formed on a semiconductor substrate 200 having a memory cell region and/or a fuse box region.
- a first insulation interlayer 206 having a contact hole 210 that exposes a portion of the bit line 204 may be formed on the bit line 204 and/or the substrate 200 .
- the first insulation interlayer 206 may be formed of silicon oxide.
- a contact plug 212 may be formed in the contact hole 210 .
- the contact plug 212 may be formed of a conductive material such as tungsten (W).
- a first metal wiring 220 a may be formed on the first insulation interlayer 206 of the memory cell region.
- the first metal wiring 220 a may include a first barrier layer 214 , a first metal layer 216 and/or a first capping layer 218 , which may be successively stacked.
- a plurality of fuses 220 b may be formed on the first insulation interlayer 206 of the fuse box region.
- Each of the fuses 220 b may include the first barrier layer 214 and/or the first metal layer 216 .
- the first barrier layer 214 may retard a reaction between the first metal layer 216 , which may be formed using aluminum (Al), and the contact plug 212 , which may be formed using tungsten (W). The reaction of aluminum and tungsten may form undesirable by-products.
- the first barrier layer 214 may improve adhesion of the first metal layer 216 to the underlying first insulation interlayer 206 formed of silicon oxide.
- the first barrier layer 214 may be formed of titanium/titanium nitride (Ti/TiN).
- the first capping layer 218 may retard oxidation of the first metal layer 216 and/or may protect the first metal layer 216 .
- the first capping layer 218 may be formed of titanium/titanium nitride (Ti/TiN).
- An etch stop layer 222 may be formed on the first metal wiring 220 a and/or the first insulation interlayer 206 of the memory cell region.
- the etch stop layer 222 may be formed using any material which has an etch selectivity with respect to silicon dioxide (e.g., silicon nitride).
- Spacers 222 a for etch stopping are formed on both sidewalls of each of the fuses 220 b of the fuse box region.
- the spacers 222 a may be formed of the same layer, or material, as the etch stop layer 222 .
- the etch stop layer 222 and/and the spacers 222 a for etch stopping may function as an etch stopper.
- the etching of the insulation interlayers may be more uniform.
- a second insulation interlayer 224 having an opening 242 that exposes the fuse box region, may be formed on the first metal wiring 220 a and/or the etch stop layer 222 .
- the second insulation interlayer 224 may be formed of silicon oxide.
- a second metal wiring 234 may be formed on the second insulation interlayer 224 .
- the second metal wiring 234 may be electrically connected with the first metal wiring 220 a through a via hole 226 .
- the via hole may pass through the second insulation interlayer 224 to expose a portion of the underlying first metal wiring 220 a.
- the second metal wiring 234 may be formed by successively stacking a second barrier layer 228 , a second metal layer 230 and/or a second capping layer 232 .
- the second barrier layer 228 may be formed of Ti/TiN.
- the second metal layer 230 may be formed of aluminum (Al).
- the second capping layer 232 may be formed of Ti/TiN.
- a third insulation interlayer 236 and/or a fourth insulation interlayer 238 may be formed on the second metal wiring 234 and/or the second insulation interlayer 224 .
- the third insulation interlayer 236 may be formed of silicon oxide.
- the fourth insulation interlayer 238 may be formed of silicon nitride.
- the opening 242 which exposes the fuse box region, may be formed through the fourth insulation interlayer 238 , the third insulation interlayer 236 and/or the second insulation interlayer 224 .
- a passivation layer 244 may be continuously formed on the fourth insulation interlayer 238 and/or a plurality of fuses 220 b .
- the passivation layer 244 may be formed of silicon nitride. When cutting a fuse connected to a defective memory cell by a laser beam in a laser-repair step, the passivation layer 244 may decrease the possibility of damaging the adjacent fuses.
- the etch stop layer 222 and/or the spacers 222 a for etch stopping may function as an etch stopper during the etching of the insulation interlayers to open the fuse box region.
- the insulation interlayers may be more uniformly etched to the etch stop layer 222 in order that the fuses 220 b may be more uniformly formed.
- the insulation interlayers may be over-etched to ensure the fuses 220 b open, the etching process may be stopped more precisely on the etch stop layer 108 to reduce the chances of breaking the fuses 220 b.
- FIGS. 5A to 5D are cross-sectional views illustrating a method of manufacturing a semiconductor device shown in FIG. 4 .
- a bit line 204 , a first insulation interlayer 206 , a contact hole 210 and/or a contact plug 212 may be formed on a semiconductor substrate 200 .
- a first barrier layer 214 , a first metal layer 216 and/or a first capping layer 218 may be successively stacked on the contact plug 212 and/or the first insulation interlayer 206 .
- the first barrier layer 214 may be formed of titanium/titanium nitride (Ti/TiN).
- the first metal layer 216 may be formed of aluminum (Al).
- the first capping layer 218 may be formed of titanium/titanium nitride (Ti/TiN).
- Each of these stacked layers may be deposited by any method known in the art, such as CVD, PVD, ALD, ECD, MOCVD, PECVD or PEALD.
- the first capping layer 218 , the first metal layer 216 and/or the first barrier layer 214 may be successively patterned to form a first metal wiring 220 a and/or a plurality of fuses 220 b .
- the first metal wiring 220 a may be electrically connected to the underlying bit line 204 through the contact plug 212 .
- an insulating material may be deposited on the first metal wiring 220 a , the fuses 220 b and/or the first insulation interlayer 206 to form an etch stop layer 222 .
- the etch stop layer 222 may be formed of any material that has an etch selectivity with respect to silicon oxide (e.g., silicon nitride).
- the etch stop layer 222 may have a thickness of about 1,000 ⁇ to about 4,000 ⁇ .
- the etch stop layer 222 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD.
- the etch stop layer 222 may serve as an etch stopper during a etching process of opening the fuse box region.
- An insulating material may be deposited on the etch stop layer 222 to form a second insulation interlayer 224 .
- the second insulation interlayer 224 may be formed of silicon oxide.
- the second insulation interlayer 224 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD.
- the second insulation interlayer 224 may be partially etched by a photolithography process to form a via hole 226 that exposes a portion of the first metal wiring 220 a . Due to the formation of the etch stop layer 222 (e.g., formed of silicon nitride) on the first metal wiring 220 a , the etching process of forming the via hole 226 may be performed up to the etch stop layer 222 .
- the etch stop layer 222 formed on the first metal wiring 220 a , may be substantially removed in order to electrically connect the first metal wiring 220 a with a second metal wiring.
- a second barrier layer 228 , a second metal layer 230 and/or a second capping layer 232 may be successively stacked on the second insulation interlayer 224 to fill up the via hole 226 .
- the second barrier layer 228 may be formed of Ti/TiN.
- the second metal layer 230 may be formed of aluminum (Al).
- the second capping layer 232 may be formed of Ti/TiN.
- Each of these stacked layers may be deposited by any method known in the art, such as CVD, PVD, ALD, ECD, MOCVD, PECVD or PEALD.
- the stacked layers may be patterned by a photolithography process to form a second metal wiring 234 .
- the second metal wiring 234 may be electrically connected with the first metal wiring 220 a through the via hole 226 .
- an insulating material may be deposited on the second metal wiring 234 and/or the second insulation interlayer 224 to form a third insulation interlayer 236 .
- the third insulation interlayer 236 may be formed of silicon oxide.
- the third insulation interlayer 236 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD.
- An insulating material may be deposited on the third insulation interlayer 236 to form a fourth insulation interlayer 238 .
- the fourth insulation interlayer 238 may be formed of silicon nitride.
- the fourth insulation interlayer 238 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. During an etching process of opening the fuse box region, the fourth insulation interlayer 238 may function as a hard mask with respect to the second and/or third insulation interlayers 224 and 236 , which may include silicon oxide.
- the photoresist may be exposed and/or developed to form photoresist patterns 240 for defining the fuse box region.
- the fourth insulation interlayer 238 , the third insulation interlayer 236 and/or the second insulation interlayer 224 may be successively etched to form an opening 242 that may expose the fuse box region.
- the insulation interlayers may be etched to, or stopped more precisely on, the etch stop layer 222 .
- the etching may be stopped on the etch stop layer 222 although the insulation interlayers may be over-etched, decreasing the possibility of under-exposing the fuse 220 b due to the insufficient etching of the insulation interlayers.
- the fuses 220 b may be etched until the first metal layer 216 for the fuse 222 b remains at a thickness of about 2,000 ⁇ .
- the fuse 220 b may be etched to a predetermined thickness in order that a cutting process for laser-repair may be more smoothly performed.
- each of the fuses 220 b may include the first barrier layer 214 and/or the first metal layer 216 .
- the etch stop layer 222 of the fuse box region and the first metal layer 216 may be simultaneously removed during etching of the fuses 220 b .
- spacers 222 a for etch stopping may be formed on sidewalls of each fuse 220 b .
- the spacers 222 a may be formed of the same material, or layer, as the etch stop layer 222 .
- the photoresist patterns 240 may be removed by ashing and/or stripping processes.
- An insulating material may be repeatedly deposited to a thickness of about 1,000 ⁇ to about 3,000 ⁇ on the surface of the resultant structure (e.g., on the fourth insulation interlayer 238 , the first insulation interlayer 206 , the spacers for etch stopping 222 a and/or the fuses 122 b ) to form a passivation layer 244 for the exposed fuse 220 b.
- the passivation layer 244 may be formed of silicon nitride.
- the passivation layer 244 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD.
- the passivation layer 244 may reduce the possibility of damaging the adjacent fises during a laser-repair step of cutting a fuse connected to a defective memory cell by a laser beam.
- the process of etching the insulation interlayers to open the fuse box region may be performed on a semiconductor device with an etch stop layer having an etch selectivity with respect to the insulation interlayers.
- the insulation interlayers may be more uniformly etched to the etch stop layer such that the fuses may be formed more uniformly.
- the insulation interlayers may be over-etched to ensure the fuses open, the etching process may be stopped more precisely on the etch stop layer to reduce the probability of breaking the fuses.
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Abstract
Semiconductor devices having a plurality of fuses and methods of forming the same are provided. The semiconductor device having a fuse including a substrate having a cell region and/or a fuse box region. A first insulation interlayer may be formed on the substrate. A first etch stop layer may be formed on the first insulation interlayer. A metal wiring including a barrier layer, a metal layer and/or a capping layer may be formed on the first etch stop layer of the cell region. Fuses, spaced apart from each other, may be formed on the first etch stop layer of the fuse box region. Each fuse may include the barrier layer and/or the metal layer. A second insulation interlayer having an opening exposing the fuse box region may be formed on the metal wiring and/or the first etch stop layer. The etch stop layer may allow the fuses to be formed more uniformly and decrease the probability of breaking the fuses.
Description
- This application claims priority upon 35 USC § 119 to Korean Patent Application No. 2005-0053768, filed Jun. 22, 2005 in the Korean Intellectual Property Office, the contents of which are herein incorporated by reference in its entirety.
- 1. Field of the Invention
- Example embodiments of the present invention relate to semiconductor devices and methods of manufacturing the same. Other example embodiments of the present invention relate to semiconductor devices having more uniformly formed fuses, and methods of manufacturing the same.
- 2. Description of the Related Art
- Semiconductor devices may be manufactured through four basic processes: a fabrication (hereinafter referred to as “FAB”) process, an electrical die sorting (hereinafter referred to as “EDS”) process, an assembly process and/or a test process.
- During the manufacture of integrated circuits (ICs) on a wafer, it may be necessary to perform several processes, including repetitively performing some of the processes. Examples of wafer processes may include diffusion, lithography, etching and/or deposition. The formation of a wafer layer, which may be capable of electrically operating, as part of a work-in-progress product is called a FAB process. The finished integrated circuit is called a chip or a die.
- After completing a lithography process, an EDS process may be carried on a passivation layer. The EDS process may be the last step of the FAB process. The EDS process may test the electrical properties of each of the chips constituting the wafer and/or sort out defective chips.
- The EDS process may include a pre-laser test, a laser-repair process, a post-laser test and/or a back-grinding process. The pre-laser test may identify the defective chips and/or generate the sorting data. The laser-repair process may repair the identified defective chips based on the data generated from the pre-laser test. The post-laser test may re-test the repaired chips to determine if the repairing process was successful. The back-grinding process may grind down the back of the wafer by using a diamond wheel or similar instrument.
- The laser-repair process may include cutting a wiring connected to a defective memory cell by irradiating a laser beam onto the wiring and/or replacing the defective memory cell with a redundancy cell built into the chip. The wiring, to be cut by the laser beam, is typically called a fuse. The fuse may be a means for electrically removing the defective memory cell when a defect is detected in a bit of the memory cell. The fuse may drive the redundancy cell that may be formed during manufacturing of the chips.
- Repair may be conducted in a fuse box region of the chip. A polysilicon layer serving as a word line may be used as the fuse. In Merged DRAM and Logic (MDL) devices, the DRAM device and/or logic device may be on a single wafer to increase circuit speed and/or to reduce manufacturing costs. In MDL devices, a portion of a metal line may be used as the fuse if multilevel interconnect schemes are necessary.
-
FIGS. 1A to 1C are cross-sectional views illustrating a method of forming a fuse of a semiconductor device in accordance with a conventional method. - Referring to
FIG. 1A , transistors (not shown) including gate electrodes, serving as word lines and/or source/drain regions, may be formed on asemiconductor substrate 10 having a memory cell region and/or a fuse box region. After forming an insulating layer (not shown) over the transistors and/or thesubstrate 10, abit line 14 may be formed on the insulating layer. Thebit line 14 may be electrically connected with the drain region of the transistor. - Silicon oxide may be deposited on the
bit line 14 to form afirst insulation interlayer 16. Thefirst insulation interlayer 16 may be etched by a lithography process to form acontact hole 18 that may expose a portion of thebit line 14. - A conductive layer may be deposited over the
contact hole 18 and/or thefirst insulation interlayer 16. The conductive layer may be planarized to the upper surface of thefirst insulation interlayer 16 to form acontact plug 20 filling up thecontact hole 18. Thecontact plug 20 may be formed using a metal such as tungsten (W). - A
first barrier layer 22, afirst metal layer 24 and/or afirst capping layer 26 may be deposited on thecontact plug 20 and/or thefirst insulation interlayer 16. Thefirst barrier layer 22 may be formed of titanium/titanium nitride (Ti/TiN). Thefirst metal layer 24 may be formed of aluminum (Al). Thefirst capping layer 26 may be formed of titanium/titanium nitride (Ti/TiN). Thefirst barrier layer 22, thefirst metal layer 24 and/or the first capping layer may be patterned by a lithography process to form a first metal wiring 28 a and/or a plurality offuses 28 b. The first metal wiring 28 a may be electrically connected to theunderlying bit line 14 through thecontact plug 20. - Silicon oxide may be deposited on the first metal wirings 28 a and/or the
first insulation interlayer 16 with thefuses 28 b to form asecond insulation interlayer 30. Thesecond insulation interlayer 30 may be etched by a photolithography process to form avia hole 32 that may expose a portion of the first metal wiring 28 a. - A
second barrier layer 34, asecond metal layer 36 and/or asecond capping layer 38 may be deposited on thevia hole 32 and/or thesecond insulation interlayer 30. Thesecond barrier layer 34 may be formed of Ti/TiN. Thesecond metal layer 36 may be formed of aluminum (Al). Thesecond capping layer 38 may be formed of Ti/TiN. Thesecond barrier layer 34, thesecond metal layer 36 and/or the second capping layer may be patterned by a lithography process to form asecond metal wiring 40 to be electrically connected with the first metal wiring 28 a through thevia hole 32. - Silicon oxide may be deposited on the
second metal wiring 40 and/or thesecond insulation interlayer 30 to form athird insulation interlayer 42. Silicon nitride may be deposited on thethird insulation interlayer 42 to form afourth insulation interlayer 44. - After coating a photoresist on the
fourth insulation interlayer 44, the photoresist may be exposed and/or developed to formphotoresist patterns 46 for defining the fuse box region. - Referring to
FIG. 1B andFIG. 1C , using thephotoresist patterns 46 as an etching mask, thefourth insulation interlayer 44, thethird insulation interlayer 42 and/or thesecond insulation interlayer 30 may be etched to form anopening 48 that exposes the fuse box region. - The
fuses 28 b may be etched until thefirst metal layer 24 of thefuse 28 b, which may be exposed by theopening 48, has a thickness of about 2,000 Å. - When performing the etching process of opening the fuse box region, it may be difficult to accurately etch the
third insulation interlayer 42 and/orsecond insulation interlayer 30, which may be formed of silicon oxide, to a depth of about 25,000 Å at the etch rate of about 10,000 Å/min, without using an etch stop layer. - As shown in
FIG. 1B , if theinsulation interlayers fuse 28 b may be under-exposed. As a result, when cutting a fuse connected to a defective memory cell in a laser-repair step, over-cutting using a higher-energy laser beam may be necessary in order to remove the insulating layer on the fuse. An adjacent fuse (e.g., a fuse connected to a normal memory cell) may be damaged. - As shown in
FIG. 1C , if theinsulation interlayers fuse 28 b, thefuse 28 b may break due to the removal of thefirst metal layer 24. - Example embodiments of the present invention provide semiconductor devices and methods of forming the same. Example embodiments of the present invention provide semiconductor devices having a plurality of fuses and methods of forming the same.
- Other example embodiments of the present invention provide semiconductor devices having more uniformed fuses. Example embodiments of the present invention provide a method of manufacturing a semiconductor device that may more uniformly form fuses and reduce the probability of breaking the fuses.
- In example embodiments of the present invention, there are provided semiconductor devices which may include a semiconductor substrate having a memory cell region, a fuse box region, a first insulation interlayer formed on the semiconductor substrate and/or a first etch stop layer formed on the first insulation interlayer. A metal wiring including a barrier layer, a metal layer and/or a capping layer, which may be successively stacked, may be formed on the first etch stop layer of the memory cell region. A plurality of fuses, spaced apart from each other, may be formed on the first etch stop layer of the fuse box region. Each of the fuses may include the barrier layer and/or the metal layer. A second insulation interlayer, having an opening that may expose the fuse box region, may be formed on the metal wiring and the first etch stop layer.
- In other example embodiments of the present invention, the first etch stop layer may be formed from a material that has an etch selectivity with respect to the second insulation interlayer.
- In example embodiments of the present invention, the semiconductor device may further include a passivation layer that may be continuously formed on the second insulation interlayer, the first etch stop layer and/or the plurality of fuses. The passivation layer may be formed to reduce damage to adjacent fuses and/or may be formed of silicon nitride.
- According to example embodiments of the present invention, the second insulation interlayer may include yet another insulation interlayer formed on an upper metal wiring to be electrically connected with the metal wiring.
- In example embodiments of the present invention, the metal wiring may further include a second etch stop layer formed on the capping layer. The second etch stop layer may be formed of silicon germanium (SiGe).
- According to other example embodiments of the present invention, a semiconductor device including a semiconductor substrate having a memory cell region and/or a fuse box region is provided. A first insulation interlayer may be formed on the semiconductor substrate. A metal wiring including a barrier layer, a metal layer and/or a capping layer, which may be successively stacked, may be formed on the first insulation interlayer of the memory cell region. A plurality of fuses, spaced apart from each other, may be formed on the first insulation interlayer of the fuse box region. Each of the fuses may include the barrier layer and/or the metal layer. An etch stop layer may be continuously formed on the metal wiring and/or the first insulation interlayer of the memory cell region. Spacers for etch stopping may be formed on both sidewalls of each of the fuses. The spacers may be formed from the same layer, or material, as the etch stop layer. A second insulation interlayer, having an opening that exposes the fuse box region, may be formed on the metal wiring and the first etch stop layer.
- In example embodiments of the present invention, a method of manufacturing a semiconductor device is provided. A first insulation interlayer may be formed on a semiconductor substrate having a memory cell region and/or a fuse box region. A first etch stop layer may be formed on the first insulation interlayer. A barrier layer, a metal layer and/or a capping layer may be successively stacked on the first etch stop layer. The stacked layers may be patterned to form a metal wiring on the first etch stop layer of the memory cell region and/or to form a plurality of fuses on the first etch stop layer of the fuse box region. The fuses may be spaced apart from each other. A second insulation interlayer may be formed on the metal wiring, a plurality of fuses and/or the first etch stop layer. The second insulation interlayer may be etched to form an opening exposing the fuse box region. A plurality of fuses, exposed by the opening, may be etched to a portion of the metal layer.
- In example embodiments of the present invention, the first etch stop layer may be formed of silicon nitride.
- In other example embodiments of the present invention, a second etch stop layer may be formed on the capping layer before the stacked layers are patterned. The second etch stop layer may be formed of silicon germanium (SiGe).
- After etching the plurality of fuses to expose a portion of the metal layer, a passivation layer may be continuously formed on the second insulation interlayer, the first etch stop layer and/or a plurality of fuses in order to reduce damage to adjacent fuses.
- In other example embodiments of the present invention, a method of manufacturing a semiconductor device is provided. A first insulation interlayer may be formed on a semiconductor substrate having a memory cell region and/or a fuse box region. A barrier layer, a metal layer and/or a capping layer may be successively stacked on the first insulation interlayer. The stacked layers may be patterned to form a metal wiring on the first insulation interlayer of the memory cell region and/or to form a plurality of fuses on the first insulation interlayer of the fuse box region. The fuses may be spaced apart from each other. An etch stop layer may be continuously formed on the first insulation interlayer, the metal wiring and/or a plurality of fuses. A second insulation interlayer may be formed on the metal wiring, a plurality of fuses and/or the etch stop layer. The second insulation interlayer may be etched to form an opening that exposes the fuse box region. A plurality of fuses exposed by the opening may be etched to a portion of the metal layer. Spacers may be formed on both sidewalls of each of the fuses. The spacers may be formed of the same layer as the etch stop layer.
- In example embodiments of the present invention, if the etch rate of the fuses is similar to the etch rate of the etch stop layer, then fuses may be simultaneously etched with the formation of the fuses.
- According to example embodiments of the present invention, the process of etching the insulation interlayers to open the fuse box region may be performed on a semiconductor device with a fuse, if the fuse has an etch selectivity with respect to the second insulation interlayer.
- Accordingly, the insulation interlayers may be more uniformly etched to the etch stop layer such that the fuses may be formed more uniformly. Although the insulation interlayer may be over-etched to keep the fuses from being under-exposed, the etching process may be stopped on the etch stop layer to reduce the chances of breaking the fuses.
- Example embodiments of the present invention will become readily apparent by reference to the following detailed description when considering in conjunction with the accompanying drawings.
FIGS. 1-5 represent non-limiting example embodiments of the present invention as described herein. -
FIGS. 1A to 1C are cross-sectional views illustrating a method of forming a fuse of a semiconductor device in accordance with a conventional method; -
FIG. 2 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments of the present invention; -
FIGS. 3A to 3F are cross-sectional views illustrating a method of forming a fuse of a semiconductor device in accordance with example embodiments of the present invention; -
FIG. 4 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments of the present invention; and -
FIGS. 5A to 5D are cross-sectional views illustrating a method of forming a fuse of a semiconductor device in accordance with example embodiments of the present invention. - Various example embodiments of the present invention will now be described more fully with reference to the accompanying drawings in which some example embodiments of the invention are shown. In the drawings, the thicknesses of layers and regions may be exaggerated for clarity.
- Detailed illustrative embodiments of the present invention are disclosed herein. However, specific structural and functional details disclosed herein are merely representative for purposes of describing example embodiments of the present invention. This invention may, however, may be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.
- Accordingly, while example embodiments of the invention are capable of various modifications and alternative forms, embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It should be understood, however, that there is no intent to limit example embodiments of the invention to the particular forms disclosed, but on the contrary, example embodiments of the invention are to cover all modifications, equivalents, and alternatives falling within the scope of the invention. Like numbers refer to like elements throughout the description of the figures.
- It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of example embodiments of the present invention. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.
- The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments of the invention. As used herein, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises”, “comprising,”, “includes” and/or “including”, when used herein, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
- It will be understood that when an element or layer is referred to as being “on”, “connected to” or “coupled to” another element or layer, it can be directly on, connected or coupled to the other element or layer or intervening elements or layers may be present. In contrast, when an element is referred to as being “directly on,” “directly connected to” or “directly coupled to” another element or layer, there are no intervening elements or layers present. Like numbers refer to like elements throughout. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.
- It will be understood that, although the terms first, second, third etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the scope of example embodiments of the present invention.
- Spatially relative terms, such as “beneath”, “below”, “lower”, “above”, “upper” and the like, may be used herein for ease of description to describe one element or a feature's relationship to another element or feature as illustrated in the Figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the Figures. For example, if the device in the Figures is turned over, elements described as “below” or “beneath” other elements or features would then be oriented “above” the other elements or features. Thus, for example, the term “below” can encompass both an orientation which is above as well as below. The device may be otherwise oriented (rotated 90 degrees or viewed or referenced at other orientations) and the spatially relative descriptors used herein should be interpreted accordingly.
- Also, the use of the words “compound,” “compounds,” or “compound(s),” refer to either a single compound or to a plurality of compounds. These words are used to denote one or more compounds but may also just indicate a single compound.
- Example embodiments of the present invention are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments (and intermediate structures). As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, may be expected. Thus, example embodiments of the invention should not be construed as limited to the particular shapes of regions illustrated herein but may include deviations in shapes that result, for example, from manufacturing. For example, an implanted region illustrated as a rectangle may have rounded or curved features and/or a gradient (e.g., of implant concentration) at its edges rather than an abrupt change from an implanted region to a non-implanted region. Likewise, a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation may take place. Thus, the regions illustrated in the figures are schematic in nature and their shapes do not necessarily illustrate the actual shape of a region of a device and do not limit the scope of the present invention.
- It should also be noted that in some alternative implementations, the functions/acts noted may occur out of the order noted in the FIGS. For example, two FIGS. shown in succession may in fact be executed substantially concurrently or may sometimes be executed in the reverse order, depending upon the functionality/acts involved.
- Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which example embodiments of the present invention belong. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
- In order to more specifically describe example embodiments of the present invention, various aspects of the present invention will be described in detail with reference to the attached drawings. However, the present invention is not limited to the example embodiments described. In the figures, if a layer is formed on another layer or a substrate, it means that the layer is directly formed on another layer or a substrate, or that a third layer is interposed therebetween. In the following description, the same reference numerals denote the same elements.
- In the example embodiments of the present invention, like reference numeral denote like elements.
- Example embodiments of the present invention provide semiconductor devices and methods of forming the same. Example embodiments of the present invention provide semiconductor devices having a plurality of fuses and methods of forming the same.
- Other example embodiments of the present invention provide semiconductor devices, which may be capable of more uniformly forming fuses and reducing the possibility of breaking the fuses.
-
FIG. 2 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments of the present invention. - Referring to
FIG. 2 , transistors (not shown) including gate electrodes serving as word lines and source/drain regions may be formed on asemiconductor substrate 100 having a memory cell region and/or a fuse box region. - An insulating layer (not shown) may be formed on the
substrate 100 to substantially cover the transistors. Abit line 104 may be formed on the insulating layer and electrically connected with the drain region of the transistor. - A
first insulation interlayer 106 may be formed over thebit line 104. According to an example embodiment, thefirst insulation interlayer 106 may be formed of silicon oxide. Thefirst insulation layer 106 may be formed of several layers. A firstetch stop layer 108 may be formed on thefirst insulation interlayer 106. The firstetch stop layer 108 may be formed of a material having an etch selectivity with respect to silicon oxide. According to another example embodiment, the firstetch stop layer 108 may be formed of silicon nitride. - When the
first insulation interlayer 106 may be formed of silicon oxide is etched so as to open the fuse box region, the firstetch stop layer 108 may function as an etch stopper to make the etching of thefirst insulation interlayer 106 uniform. - The
first insulation interlayer 106 and/or firstetch stop layer 108 may have acontact hole 110 that exposes a portion of thebit line 104. Acontact plug 112 may be formed in thecontact hole 110. Thecontact plug 112 may be formed using a conductive material such as tungsten (W). - A
first metal wiring 122 a may be formed on the firstetch stop layer 108 of the memory cell region. Thefirst metal wiring 122 a may include afirst barrier layer 114, afirst metal layer 116, afirst capping layer 118 and/or a secondetch stop layer 120, which may be successively stacked. - Spaced apart from each other, a plurality of
fuses 122 b may be formed on the firstetch stop layer 108 of the fuse box region. Each of thefuses 122 b may include thefirst barrier layer 114 and/or thefirst metal layer 116. - The
first barrier layer 114 may prevent thefirst metal layer 116, which may be formed of aluminum (Al), from reacting with thecontact plug 112, which may be formed of tungsten (W), to form undesirable by-products. Further, thefirst barrier layer 114 may increase adhesion of thefirst metal layer 116 to the underlyingfirst insulation interlayer 106, which may be formed using silicon oxide. Thefirst barrier layer 114 may be formed using titanium/titanium nitride (Ti/TiN). - The
first capping layer 118 may retard oxidation of thefirst metal layer 116 and/or may protect thefirst metal layer 116. Thefirst capping layer 118 may be formed using titanium/titanium nitride (Ti/TiN). - The second
etch stop layer 120 may be used as an etch stopper during an etching process of opening the fuse box region, decreasing the susceptibility of thefirst metal layer 116 for thefuses 122 b to attack. When etching thefuses 122 b, thefirst metal layer 116 may be more uniformly etched by the secondetch stop layer 120. The secondetch stop layer 120 may be formed of silicon-germanium (SiGe) - A
second insulation interlayer 124, having anopening 142 that exposes the fuse box region, may be formed on thefirst metal wiring 122 a and/or the firstetch stop layer 108. Thesecond insulation interlayer 124 may be formed of silicon oxide. - A
second metal wiring 134 may be formed on thesecond insulation interlayer 124, may be formed on thefirst metal wiring 122 a and/or the firstetch stop layer 108. Thesecond metal wiring 134 may be electrically connected with thefirst metal wiring 122 a through a viahole 126, which may pass through thesecond insulation interlayer 124 to expose a portion of the underlyingfirst metal wiring 122 a. - The
second metal wiring 134 may be formed by successively stacking asecond barrier layer 128, asecond metal layer 130 and/or asecond capping layer 132. Thesecond barrier layer 128 may be formed of Ti/TiN. Thesecond metal layer 130 may be formed of aluminum. Thesecond capping layer 132 may be formed of Ti/TiN. - A
third insulation interlayer 136 and afourth insulation layer 138 may be successively formed on thesecond metal wiring 134 and/or thesecond insulation interlayer 124. Thethird insulation interlayer 136 and/or theinsulation interlayer 138 may have anopening 142, which may expose the fuse box region. Thethird insulation interlayer 136 may be formed of silicon oxide. Thefourth insulation interlayer 138 may be formed of silicon nitride. Theopening 142, which may expose the fuse box region, may be formed through thefourth insulation interlayer 138, thethird insulation interlayer 136 and/or thesecond insulation interlayer 124. - A
passivation layer 144 may be continuously formed on thefourth insulation interlayer 138, the firstetch stop layer 108 and/or a plurality offuses 122 b. Thepassivation layer 144 may be formed of silicon nitride. When cutting a fuse connected to a defective memory cell by a laser beam in a laser-repair step, thepassivation layer 144 may reduce the possibility of damaging the adjacent fuses. - According to example embodiments of the present invention, the first
etch stop layer 108 may function as an etch stopper during the etching of the insulation interlayers to open the fuse box region in order that the etching of the insulation interlayers may be performed more uniformly to the firstetch stop layer 108. The secondetch stop layer 120 may reduce the chances of thefirst metal layer 116 for thefuses 122 b being attacked during the etching process of opening the fuse box region. Due to the secondetch stop layer 120, thefirst metal layer 116 for thefuses 122 b may be etched to a more uniform thickness during the etching process of exposing the fuses. - Accordingly, the
fuses 122 b may be formed more uniformly by the firstetch stop layer 108 and/or the secondetch stop layer 120. In addition, even though the insulation interlayers may be over-etched to ensure that thefuses 122 b open, the etching process may be stopped precisely on the firstetch stop layer 108 to reduce the chances of breaking thefuses 122 b. -
FIGS. 3A to 3F are cross-sectional views illustrating a method of manufacturing a semiconductor device shown inFIG. 2 . - Referring to
FIG. 3A , after forming transistors (not shown) including gate electrodes serving as word lines and/or source/drain regions on asemiconductor substrate 100 including silicon, an insulating layer (not shown) may be formed on thesubstrate 100 to cover the transistors. Abit line 104 may be formed on the insulating layer to electrically connect with the drain regions of the transistor. - An insulating material may be deposited on the
bit line 104 to form afirst insulation interlayer 106. Thefirst insulation interlayer 106 may be formed of silicon oxide. Thefirst insulation interlayer 106 may be formed by any suitable method known in the art, such as chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD) or high-density plasma chemical vapor deposition (HDP-CVD). - A material having an etch selectivity with respect to the
first insulation interlayer 106 may be deposited to a thickness of about 1,000 Å to about 4,000 Å on thefirst insulation interlayer 106, forming a firstetch stop layer 108. The firstetch stop layer 108 may be formed of silicon nitride. The firstetch stop layer 108 may be formed by any suitable method known in the art, such as CVD, PECVD or low-pressure CVD (LPCVD). The firstetch stop layer 108 may serve as an etch stopper during an etching process of opening the fuse box region. - The first
etch stop layer 108 and/or thefirst insulation interlayer 106 may be etched by a photolithography process to form acontact hole 110 that exposes a portion of thebit line 104. The firstetch stop layer 108 may reduce the possibility of forming a bridge between adjacent contact holes by blocking the contact holes 110 from falling down. - A conductive material may be deposited on the first
etch stop layer 108 so as to fill up thecontact hole 110, forming a conductive layer. The conductive layer may be formed of tungsten (W). The conductive layer may be deposited by any method known in the art. According to a non-limiting example embodiment, the conductive layer may be deposited by a CVD process, a PECVD process, a physical vapor deposition (PVD) process, an atomic layer deposition (ALD) process, an electrochemical deposition (ECD) process, a metal organic CVD (MOCVD) process or a plasma-enhanced ALD (PEALD) process. - The conductive layer may be removed from the upper surface of the first
etch stop layer 108 to form acontact plug 112 in thecontact hole 110. The conductive layer may be removed by an etch-back process or a chemical mechanical polishing (CMP) process. - Referring to
FIG. 3B , afirst barrier layer 114, afirst metal layer 116, afirst capping layer 118 and/or a secondetch stop layer 120 may be successively stacked on thecontact plug 112 and the firstetch stop layer 108. Thefirst barrier layer 114 may be formed of titanium/titanium nitride (Ti/TiN). Thefirst metal layer 116 may be formed of aluminum (Al). Thefirst capping layer 118 may be formed of titanium/titanium nitride (Ti/TiN). The secondetch stop layer 120 may be formed of silicon germanium (SiGe). Each of these stacked layers may be deposited by any method known in the art such as CVD, PVD, ALD, ECD, MOCVD, PECVD or PEALD. - The second
etch stop layer 120 may function as an etch stopper during an etching process of opening the fuse box region, reducing the possibility of over-etching thefirst metal layer 116 and breaking thefuses 122 b. The secondetch stop layer 120 may have a thickness of about 1,000 Å to about 3,000 Å. - Referring to
FIG. 3C , by performing a photolithography process, the secondetch stop layer 120, thefirst capping layer 118, thefirst metal layer 116 and/or thefirst barrier layer 114 may be successively patterned to form afirst metal wiring 122 a and/or a plurality offuses 122 b. - The
first metal wiring 122 a may be electrically connected to theunderlying bit line 104 through thecontact plug 112. - Then, an insulating material may be deposited on the
first metal wiring 122 a, thefuses 122 b and/or the firstetch stop layer 108 to form asecond insulation interlayer 124. Thesecond insulation interlayer 124 may be formed of silicon oxide. Thesecond insulation interlayer 124 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. Thesecond insulation interlayer 124 may be partially etched by a photolithography process to form a viahole 126 that exposes a portion of thefirst metal wiring 122 a. - A
second barrier layer 128, asecond metal layer 130 and/or asecond capping layer 132 may be successively stacked on the viahole 126 and thesecond insulation interlayer 124. Thesecond barrier layer 128 may be formed of Ti/TiN. Thesecond metal layer 130 may be formed of aluminum. Thesecond capping layer 132 may be formed of Ti/TiN. Each of these stacked layers may be deposited by any method known in the art, such as CVD, PVD, ALD, ECD, MOCVD, PECVD or PEALD. The stacked layers may be patterned by a photolithography process to form asecond metal wiring 134 to be electrically connected with thefirst metal wiring 122 a through the viahole 126. - Referring to
FIG. 3D , an insulating material may be deposited on thesecond metal wiring 134 and/or thesecond insulation interlayer 124 to form athird insulation interlayer 136. Thethird insulation interlayer 136 may be formed using silicon oxide. Thethird insulation interlayer 136 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. An insulating material may be deposited on thethird insulation interlayer 136 to form afourth insulation interlayer 138. Thefourth insulation interlayer 138 may be formed of silicon nitride. Thefourth insulation interlayer 138 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. During the etching process of opening the fuse box region, thefourth insulation interlayer 138 may function as a hard mask with respect to the second and/orthird insulation interlayers - After coating a photoresist on the
fourth insulation interlayer 138, the photoresist may be exposed and/or developed to formphotoresist pattern 140 for defining the fuse box region. - Referring to
FIG. 3E , using thephotoresist pattern 140 as an etching mask, thefourth insulation interlayer 138, thethird insulation interlayer 136 and/or thesecond insulation interlayer 124 may be successively etched to form anopening 142 that exposes the fuse box region. - Due to the total thickness of the second and
third insulation interlayers 124 and 136 (e.g., formed of silicon oxide at about 25,000 Å), thephotoresist pattern 140 may not be a sufficient mask during the etching process for forming theopening 142. Accordingly, thethird insulation interlayer 136 and/orsecond insulation interlayer 124 may be etched using thefourth insulation interlayer 138 as an etching mask. Thefourth insulation interlayer 138 may be formed of silicon nitride having an etch selectivity to silicon oxide. - The insulation interlayers may be more uniformly etched to, or stopped on, the first etch stop layer 108 (e.g., formed of silicon nitride). The etching may be more precisely stopped on the first
etch stop layer 108 even though the insulation interlayers may be over-etched, decreasing the likelihood of insufficient exposure of thefuses 122 b due to under-etching of the insulation interlayers. - During the etching process of forming the
opening 142, the secondetch stop layer 120, protecting thefirst metal layer 116 for thefuses 122 b, may retard the etching of thefirst metal layer 126. - Referring to
FIG. 3F , after etching the insulation interlayers to form theopening 142 and/or exposing the fuse box region as described above, thefuses 122 b may be etched until thefirst metal layer 116 for thefuses 122 b is at a thickness of about 2,000 Å. Thefuse 122 b may be etched to a predetermined thickness such that a cutting process for laser-repair may be performed more smoothly. - Due to more uniformly etching of the
first metal layer 116 by the secondetch stop layer 120 protecting thefirst metal layer 116 for thefuses 122 b, thefirst metal layer 116 may remain at the more uniform thickness. Thefuse 122 b may include thefirst barrier layer 114 and/or thefirst metal layer 116. - As shown in
FIG. 2 , thephotoresist patterns 140 may be removed by ashing and/or stripping processes. An insulating material may be continuously deposited to a thickness of about 1,000 Å to about 3,000 Å on the entire, or portion, of the resultant structure surface (e.g., on thefourth insulation interlayer 138, the firstetch stop layer 108 and/or thefuses 122 b) to form apassivation layer 144 for the exposedfuse 122 b. Thepassivation layer 144 may be formed of silicon nitride. Thepassivation layer 144 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. Thepassivation layer 144 may retard damage to the adjacent fuses during the process of cutting a fuse connected to a defective memory cell by a laser beam. -
FIG. 4 is a cross-sectional view illustrating a semiconductor device in accordance with another example embodiment of the present invention. - Referring to
FIG. 4 , abit line 204 may be formed on asemiconductor substrate 200 having a memory cell region and/or a fuse box region. - A
first insulation interlayer 206 having acontact hole 210 that exposes a portion of thebit line 204 may be formed on thebit line 204 and/or thesubstrate 200. Thefirst insulation interlayer 206 may be formed of silicon oxide. - A
contact plug 212 may be formed in thecontact hole 210. Thecontact plug 212 may be formed of a conductive material such as tungsten (W). - A
first metal wiring 220 a may be formed on thefirst insulation interlayer 206 of the memory cell region. Thefirst metal wiring 220 a may include afirst barrier layer 214, afirst metal layer 216 and/or afirst capping layer 218, which may be successively stacked. Spaced apart from each other, a plurality offuses 220 b may be formed on thefirst insulation interlayer 206 of the fuse box region. Each of thefuses 220 b may include thefirst barrier layer 214 and/or thefirst metal layer 216. - The
first barrier layer 214 may retard a reaction between thefirst metal layer 216, which may be formed using aluminum (Al), and thecontact plug 212, which may be formed using tungsten (W). The reaction of aluminum and tungsten may form undesirable by-products. Thefirst barrier layer 214 may improve adhesion of thefirst metal layer 216 to the underlyingfirst insulation interlayer 206 formed of silicon oxide. Thefirst barrier layer 214 may be formed of titanium/titanium nitride (Ti/TiN). - The
first capping layer 218 may retard oxidation of thefirst metal layer 216 and/or may protect thefirst metal layer 216. Thefirst capping layer 218 may be formed of titanium/titanium nitride (Ti/TiN). - An
etch stop layer 222 may be formed on thefirst metal wiring 220 a and/or thefirst insulation interlayer 206 of the memory cell region. Theetch stop layer 222 may be formed using any material which has an etch selectivity with respect to silicon dioxide (e.g., silicon nitride).Spacers 222 a for etch stopping are formed on both sidewalls of each of thefuses 220 b of the fuse box region. Thespacers 222 a may be formed of the same layer, or material, as theetch stop layer 222. - When etching the insulation interlayers formed of silicon oxide to form the fuse box region, the
etch stop layer 222 and/and thespacers 222 a for etch stopping may function as an etch stopper. The etching of the insulation interlayers may be more uniform. - A
second insulation interlayer 224, having anopening 242 that exposes the fuse box region, may be formed on thefirst metal wiring 220 a and/or theetch stop layer 222. Thesecond insulation interlayer 224 may be formed of silicon oxide. - A
second metal wiring 234 may be formed on thesecond insulation interlayer 224. Thesecond metal wiring 234 may be electrically connected with thefirst metal wiring 220 a through a viahole 226. The via hole may pass through thesecond insulation interlayer 224 to expose a portion of the underlyingfirst metal wiring 220 a. - The
second metal wiring 234 may be formed by successively stacking asecond barrier layer 228, asecond metal layer 230 and/or asecond capping layer 232. Thesecond barrier layer 228 may be formed of Ti/TiN. Thesecond metal layer 230 may be formed of aluminum (Al). Thesecond capping layer 232 may be formed of Ti/TiN. - A
third insulation interlayer 236 and/or afourth insulation interlayer 238, each having theopening 242 exposing the fuse box region, may be formed on thesecond metal wiring 234 and/or thesecond insulation interlayer 224. Thethird insulation interlayer 236 may be formed of silicon oxide. Thefourth insulation interlayer 238 may be formed of silicon nitride. Theopening 242, which exposes the fuse box region, may be formed through thefourth insulation interlayer 238, thethird insulation interlayer 236 and/or thesecond insulation interlayer 224. - A
passivation layer 244 may be continuously formed on thefourth insulation interlayer 238 and/or a plurality offuses 220 b. Thepassivation layer 244 may be formed of silicon nitride. When cutting a fuse connected to a defective memory cell by a laser beam in a laser-repair step, thepassivation layer 244 may decrease the possibility of damaging the adjacent fuses. - In the semiconductor device according to another example embodiment of the present invention, the
etch stop layer 222 and/or thespacers 222 a for etch stopping may function as an etch stopper during the etching of the insulation interlayers to open the fuse box region. The insulation interlayers may be more uniformly etched to theetch stop layer 222 in order that thefuses 220 b may be more uniformly formed. - Although the insulation interlayers may be over-etched to ensure the
fuses 220 b open, the etching process may be stopped more precisely on theetch stop layer 108 to reduce the chances of breaking thefuses 220 b. -
FIGS. 5A to 5D are cross-sectional views illustrating a method of manufacturing a semiconductor device shown inFIG. 4 . - Referring to
FIG. 5A , abit line 204, afirst insulation interlayer 206, acontact hole 210 and/or acontact plug 212 may be formed on asemiconductor substrate 200. Afirst barrier layer 214, afirst metal layer 216 and/or afirst capping layer 218 may be successively stacked on thecontact plug 212 and/or thefirst insulation interlayer 206. Thefirst barrier layer 214 may be formed of titanium/titanium nitride (Ti/TiN). Thefirst metal layer 216 may be formed of aluminum (Al). Thefirst capping layer 218 may be formed of titanium/titanium nitride (Ti/TiN). Each of these stacked layers may be deposited by any method known in the art, such as CVD, PVD, ALD, ECD, MOCVD, PECVD or PEALD. - By performing a photolithography process, the
first capping layer 218, thefirst metal layer 216 and/or thefirst barrier layer 214 may be successively patterned to form afirst metal wiring 220 a and/or a plurality offuses 220 b. Thefirst metal wiring 220 a may be electrically connected to theunderlying bit line 204 through thecontact plug 212. - Referring to
FIG. 5B , after forming thefirst metal wiring 220 a and/or a plurality offuses 220 b, an insulating material may be deposited on thefirst metal wiring 220 a, thefuses 220 b and/or thefirst insulation interlayer 206 to form anetch stop layer 222. Theetch stop layer 222 may be formed of any material that has an etch selectivity with respect to silicon oxide (e.g., silicon nitride). Theetch stop layer 222 may have a thickness of about 1,000 Å to about 4,000 Å. Theetch stop layer 222 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. - The
etch stop layer 222 may serve as an etch stopper during a etching process of opening the fuse box region. - An insulating material may be deposited on the
etch stop layer 222 to form asecond insulation interlayer 224. Thesecond insulation interlayer 224 may be formed of silicon oxide. Thesecond insulation interlayer 224 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. Thesecond insulation interlayer 224 may be partially etched by a photolithography process to form a viahole 226 that exposes a portion of thefirst metal wiring 220 a. Due to the formation of the etch stop layer 222 (e.g., formed of silicon nitride) on thefirst metal wiring 220 a, the etching process of forming the viahole 226 may be performed up to theetch stop layer 222. Theetch stop layer 222, formed on thefirst metal wiring 220 a, may be substantially removed in order to electrically connect thefirst metal wiring 220 a with a second metal wiring. - A
second barrier layer 228, asecond metal layer 230 and/or asecond capping layer 232 may be successively stacked on thesecond insulation interlayer 224 to fill up the viahole 226. Thesecond barrier layer 228 may be formed of Ti/TiN. Thesecond metal layer 230 may be formed of aluminum (Al). Thesecond capping layer 232 may be formed of Ti/TiN. Each of these stacked layers may be deposited by any method known in the art, such as CVD, PVD, ALD, ECD, MOCVD, PECVD or PEALD. - The stacked layers may be patterned by a photolithography process to form a
second metal wiring 234. Thesecond metal wiring 234 may be electrically connected with thefirst metal wiring 220 a through the viahole 226. Referring toFIG. 5C , an insulating material may be deposited on thesecond metal wiring 234 and/or thesecond insulation interlayer 224 to form athird insulation interlayer 236. Thethird insulation interlayer 236 may be formed of silicon oxide. Thethird insulation interlayer 236 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. An insulating material may be deposited on thethird insulation interlayer 236 to form afourth insulation interlayer 238. Thefourth insulation interlayer 238 may be formed of silicon nitride. Thefourth insulation interlayer 238 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. During an etching process of opening the fuse box region, thefourth insulation interlayer 238 may function as a hard mask with respect to the second and/orthird insulation interlayers - After coating a photoresist on the
fourth insulation interlayer 238, the photoresist may be exposed and/or developed to formphotoresist patterns 240 for defining the fuse box region. - Using the
photoresist patterns 240 as an etching mask, thefourth insulation interlayer 238, thethird insulation interlayer 236 and/or thesecond insulation interlayer 224 may be successively etched to form anopening 242 that may expose the fuse box region. - The insulation interlayers may be etched to, or stopped more precisely on, the
etch stop layer 222. The etching may be stopped on theetch stop layer 222 although the insulation interlayers may be over-etched, decreasing the possibility of under-exposing thefuse 220 b due to the insufficient etching of the insulation interlayers. - Referring to
FIG. 5D , thefuses 220 b may be etched until thefirst metal layer 216 for the fuse 222 b remains at a thickness of about 2,000 Å. Thefuse 220 b may be etched to a predetermined thickness in order that a cutting process for laser-repair may be more smoothly performed. - Accordingly, each of the
fuses 220 b may include thefirst barrier layer 214 and/or thefirst metal layer 216. - According to an example embodiment of the present invention, if the etch rate of the
first metal layer 216 for thefuse 220 b is similar to the etch rate theetch stop layer 222, theetch stop layer 222 of the fuse box region and thefirst metal layer 216 may be simultaneously removed during etching of thefuses 220 b. As a result,spacers 222 a for etch stopping may be formed on sidewalls of eachfuse 220 b. Thespacers 222 a may be formed of the same material, or layer, as theetch stop layer 222. - As shown in
FIG. 4 , thephotoresist patterns 240 may be removed by ashing and/or stripping processes. An insulating material may be repeatedly deposited to a thickness of about 1,000 Å to about 3,000 Å on the surface of the resultant structure (e.g., on thefourth insulation interlayer 238, thefirst insulation interlayer 206, the spacers for etch stopping 222 a and/or thefuses 122 b) to form apassivation layer 244 for the exposedfuse 220 b. - The
passivation layer 244 may be formed of silicon nitride. Thepassivation layer 244 may be formed by any suitable method known in the art, such as CVD, PECVD or HDP-CVD. Thepassivation layer 244 may reduce the possibility of damaging the adjacent fises during a laser-repair step of cutting a fuse connected to a defective memory cell by a laser beam. - According to example embodiments of the present invention, the process of etching the insulation interlayers to open the fuse box region may be performed on a semiconductor device with an etch stop layer having an etch selectivity with respect to the insulation interlayers.
- Accordingly, the insulation interlayers may be more uniformly etched to the etch stop layer such that the fuses may be formed more uniformly. Although the insulation interlayers may be over-etched to ensure the fuses open, the etching process may be stopped more precisely on the etch stop layer to reduce the probability of breaking the fuses. Although some example embodiments of the present invention have been described, it is understood that the present invention should not be limited to these embodiments but various changes and modifications can be made by one skilled in the art within the spirit and scope of the present invention as hereinafter claimed.
Claims (16)
1. A semiconductor device comprising:
a semiconductor substrate;
a first insulation interlayer formed on the semiconductor substrate;
a first etch stop layer formed on the first insulation interlayer;
a lower metal wiring formed on the first etch stop layer;
a plurality of fuses formed on the first etch stop layer; and
a second insulation interlayer formed on the lower metal wiring and the first etch stop layer.
2. The semiconductor device of claim 1 , wherein the first etch stop layer includes a material having an etch selectivity with respect to the second insulation interlayer.
3. The semiconductor device of claim 1 , wherein the plurality of fuses are spaced apart from each other, and each fuse includes a barrier layer and a metal layer.
4. The semiconductor device of claim 1 , further comprising a third insulation interlayer formed on an upper metal wiring to be electrically connected with the lower metal wiring; and a fourth insulation interlayer formed on the third insulation interlayer.
5. The semiconductor device of claim 1 , further comprising a passivation layer continuously formed on the second insulation interlayer, the first etch stop layer and the plurality of fuses in order to reduce damage to adjacent fuses.
6. The semiconductor device of claim 5 , wherein the passivation layer includes silicon nitride.
7. The semiconductor device of claim 1 , wherein the lower metal wiring includes a barrier layer, a metal layer, a capping layer and a second etch stop layer, which are successively stacked.
8. The semiconductor device of claim 7 , wherein the first etch stop layer includes silicon nitride, and the second etch stop layer includes silicon germanium (SiGe).
9. The semiconductor device of claim 1 , wherein the lower metal wiring is in a memory cell region, and the plurality of fuses are in a fuse box region.
10. The semiconductor device of claim 9 , wherein the second insulation interlayer has an opening exposing the fuse box region.
11. A semiconductor device comprising:
a semiconductor substrate;
a first insulation interlayer formed on the semiconductor substrate;
a metal wiring formed on the first insulation interlayer;
a plurality of fuses formed on the first insulation interlayer;
an etch stop layer formed on the metal wiring and the first insulation interlayer;
spacers formed on both sidewalls of each of the fuses for etch stopping, the spacers being formed of the same material as the etch stop layer; and
a second insulation interlayer formed on the metal wiring and the first etch stop layer.
12. The semiconductor device of claim 11 , wherein the metal wiring and the etch stop layer are in a cell region, and the plurality of fuses are in a fuse box region.
13. The semiconductor device of claim 12 , wherein the second insulation layer has an opening exposing a portion of the fuse box region.
14. The semiconductor device of claim 11 , further comprising a passivation layer continuously formed on the second insulation interlayer, the first insulation interlayer, the spacers and the plurality of fuses.
15. The semiconductor device of claim 11 , wherein the metal wiring includes a barrier layer, a metal layer and a capping layer, which are successively stacked; and each fuse includes the barrier layer and the metal layer.
16-26. (canceled)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/382,168 US20090184391A1 (en) | 2005-06-22 | 2009-03-10 | Semiconductor devices having fuses and methods of forming the same |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050053768A KR100695872B1 (en) | 2005-06-22 | 2005-06-22 | Fuse of semiconductor device and Method of forming the same |
KR2005-53768 | 2005-06-22 | ||
US11/447,944 US7510914B2 (en) | 2005-06-22 | 2006-06-07 | Semiconductor devices having fuses and methods of forming the same |
US12/382,168 US20090184391A1 (en) | 2005-06-22 | 2009-03-10 | Semiconductor devices having fuses and methods of forming the same |
Related Parent Applications (1)
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US11/447,944 Division US7510914B2 (en) | 2005-06-22 | 2006-06-07 | Semiconductor devices having fuses and methods of forming the same |
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US20090184391A1 true US20090184391A1 (en) | 2009-07-23 |
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US11/447,944 Active 2026-11-04 US7510914B2 (en) | 2005-06-22 | 2006-06-07 | Semiconductor devices having fuses and methods of forming the same |
US12/382,168 Abandoned US20090184391A1 (en) | 2005-06-22 | 2009-03-10 | Semiconductor devices having fuses and methods of forming the same |
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US11/447,944 Active 2026-11-04 US7510914B2 (en) | 2005-06-22 | 2006-06-07 | Semiconductor devices having fuses and methods of forming the same |
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US (2) | US7510914B2 (en) |
KR (1) | KR100695872B1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7098491B2 (en) * | 2003-12-30 | 2006-08-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Protection circuit located under fuse window |
KR100735023B1 (en) * | 2005-11-09 | 2007-07-03 | 삼성전자주식회사 | Semiconductor device having a fuse and fabrication method thereof |
JP4959267B2 (en) | 2006-03-07 | 2012-06-20 | ルネサスエレクトロニクス株式会社 | Method for increasing resistance value of semiconductor device and electric fuse |
JP5060100B2 (en) * | 2006-10-26 | 2012-10-31 | ルネサスエレクトロニクス株式会社 | Manufacturing method of semiconductor device |
KR100831980B1 (en) * | 2007-03-05 | 2008-05-26 | 주식회사 하이닉스반도체 | Method for fabricating semiconductor device |
KR101586270B1 (en) * | 2009-02-04 | 2016-01-19 | 삼성전자주식회사 | Semiconductor device including fuse |
KR101096922B1 (en) | 2009-09-10 | 2011-12-22 | 주식회사 하이닉스반도체 | Fuse of semiconductor devicd and method for forming using the same |
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Also Published As
Publication number | Publication date |
---|---|
US20060289899A1 (en) | 2006-12-28 |
US7510914B2 (en) | 2009-03-31 |
KR100695872B1 (en) | 2007-03-19 |
KR20060134240A (en) | 2006-12-28 |
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