US20080075613A1 - Motivating fluid vacuum pump - Google Patents

Motivating fluid vacuum pump Download PDF

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Publication number
US20080075613A1
US20080075613A1 US11/796,505 US79650507A US2008075613A1 US 20080075613 A1 US20080075613 A1 US 20080075613A1 US 79650507 A US79650507 A US 79650507A US 2008075613 A1 US2008075613 A1 US 2008075613A1
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US
United States
Prior art keywords
driving agent
vacuum pump
pump according
agent vacuum
jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/796,505
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English (en)
Inventor
Marco Doms
Jorg Muller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayer AG
Original Assignee
Technische Universitaet Hamburg TUHH
Tutech Innovation GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universitaet Hamburg TUHH, Tutech Innovation GmbH filed Critical Technische Universitaet Hamburg TUHH
Assigned to TUTECH INNOVATION GMBH, TECHNISCHE UNIVERSITAT HAMBURG-HARBURG reassignment TUTECH INNOVATION GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DOMS, MARCO, MULLER, JORG
Publication of US20080075613A1 publication Critical patent/US20080075613A1/en
Assigned to BAYER TECHNOLOGY SERVICES GMBH reassignment BAYER TECHNOLOGY SERVICES GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TECHNISCHE UNIVERSITAT HAMBURG-HARBURG, TUTECH INNOVATION GMBH
Priority to US12/486,300 priority Critical patent/US8172548B2/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles

Definitions

  • the invention concerns a miniaturized driving agent vacuum pump which uses preferably planar jet and pump wall geometries structured in keeping with microsystem technology and a suitable driving agent for vacuum creation. It is distinguished by simple manufacturability, small size and thereby good integration capability, for example into mobile systems, operation in a pressure region extending from about one atmosphere to several Pascal, higher suction efficiency and position independent functionality.
  • Pumps for the transport of gases or for the creation of a vacuum exist in macroscopic scale in a number of type variations: displacement pumps, molecular pumps, sorption pumps, condensors, kyro pumps and driving agent pumps.
  • Each of these varieties is suited for application within a specific pressure region; to create a pregiven pressure it can be necessary to operate a number of these pumps in series.
  • the sizes of these customary vacuum pumps even in their smallest construction forms lie in the area of several tens of cubic centimeters. Therefore these pumps cannot be sensibly integrated into systems with microcomponents (for example, sensors).
  • microcomponents for example, sensors.
  • the application of, for example, miniaturized analysis devices, which for their function require a vacuum pressure or a constant gas flow is therefore closely coupled to the development of suitable micro gas pumps.
  • Micropumps use different physical or chemical principles to create a pumping effect (see: Nam-Trung Nguyen, Xiaoyang Huang, Toh Kok Chuan, MEMS-Micropumps: A Review, Transactions of the ASME, Vol. 124 (June 2002), 384-392; P. Woias, Micropumps—summarizing the first two decades, Proc. SPIE, Vol. 4560 (2001), 39-52). Many of the systems are limited in their application to liquid medium; only a few suit themselves to the pumping of gases or to the creation of a vacuum.
  • the micropump of the invention uses the functional principle of driving agent pumps described in DIN 28 400, part 2, which principle is based on a rapidly flowing vapor phase or liquid driving agent expanded by moving through a jet.
  • the gas particles in the container to be evacuated move into this driving agent stream and while in that stream receive impacts with the driving agent molecules giving them impulses in the pumping direction.
  • a special standing among driving medium pumps is taken by diffusion pumps, in the case of which, in contrast to other stream pumps, the mixing process of the driving agent with the gas to be evacuated does not occur in a turbulent boundary layer, but takes place by diffusion of the gas into the driving stream.
  • FIG. 1 by way of example the pumping principle for all driving agent pumps is illustrated by the aid of the construction of a diffusion pump: in a boiling space 12 , by way of a heater 11 , a suitable driving agent (for example silicon oil) is heated; the resulting driving agent vapor 14 , escapes at supersonic speed from the jets 15 , and transmits downwardly directed impulses onto the molecules of the gas 18 to be evacuated.
  • the driving agent vapor stream 17 condenses on the cooled walls of the pump body 16 and is returned again to the supply container 12 .
  • the gas molecules retain their impulses and moving with the vapor stream reach the next lower jet stage. Below these last jets the gas is taken away through the fore vacuum pipe 13 , by means of a fore pump. The pumped away gas is further compressed from stage to stage, so that in the case of a constant mass flow its volume flow is correspondingly reduced; the pump area between the jets and the wall likewise diminishes accordingly from top to bottom, and the highest permissible pressure at the fore vacuum side is hereby increased (see: Wutz, Adam, Walcher, Why und Kir der Vakuumtechnik, Vieweg Verlag Braunschweig, 5. Edition (1992)).
  • the novelty of the invention lies in the conversion of this principle into a miniaturized form, preferably into a planar form adequate for microsystem techniques. Resulting from this utilization of miniaturization are further advantages.
  • the driving agent vacuum pump consisting of an evaporating chamber at high pressure and a pump chamber at low pressure, separated by a jet arrangement
  • the pumping effect is achieved by a flow at high speed through a preferably planar arrangement of jets vertical in depth and located between two parallel plates which close the chambers in the jet region.
  • an opening is provided in the pump chamber above the jet arrangement to draw in the medium to be pumped and an opening for the discharge of the compressed gas is provided below the jet arrangement.
  • a planar jet arrangement made of, for example, one or two Laval jets is used, for a purpose of expanding and accelerating selectively up to supersonic speed a liquid, gas or vapor phase driving agent under pressure. With this the jet stream can achieve supersonic speed.
  • the driving agent vacuum pump is usable at high pressures from about one atmosphere.
  • the number of jets arranged below one another and therewith a number of pressure steps high compression ratios are achievable.
  • suitable dimensions for the pump, of the driving agent and of the evaporating temperature the working pressure range can be varied widely.
  • a condensable medium or a gaseous medium is used as the driving agent.
  • a liquid is used with in one implementation the liquid driving agent being evaporated by a heater in the form of an electrically heated coil arranged in the evaporating chamber.
  • the driving agent is already delivered to the evaporating chamber in gaseous form.
  • the increased pressure of the driving agent inside of the jet arrangement can be achieved either by suitable measures outside of the micropump or in the case of a vapor phase driving means by way of a heater and evaporator integrated in the pump so that a liquid can be achieved.
  • the scaling of the measurements of the pump into the region of the free path of the gas molecules in the pressure region makes possible an operation in a pressure region of about one atmosphere down to several Pascal.
  • a particle filter can, for example, be integrated in the evaporation chamber.
  • a similar filter can also be integrated into the delivery and discharge channels at the input and output of the evaporating chamber.
  • the driving agent ejected from the jets which produces the actual pumping effect, in the case of the use of gases or liquids can be transported in a suitable way from the pump, and in the case of the use of a vapor phase driving agent it can be condensed on the pump walls and, as the case may or may not be, can then be returned to the heater integrated in the pump. There it is again vaporized and it transitions into a driving agent circuit to make possible a closed system supplied outwardly with only energy for the heater.
  • the vacuum pump is provided with cooling of the outer wall of the pump chamber.
  • the condensation of the vapor phase driving agent can for example be accomplished by way of channels in the walls or by cooling ribs, which are filled with a liquid or a gas which removes heat from the sidewalls used for the condensation; alternatively for this also Peltier elements can be used.
  • connection is provided between the evaporating chamber and a pump chamber through which a condensed driving agent is returned and which connection at the same time serves as a pressure stage.
  • a return of the condensed driving agent from the pump chamber to the evaporating chamber can, for example, be carried out by one or more capillary shaped channels which is or are covered by a layer having an outer surface energy higher than that of the pump chamber.
  • a pressure measurement is integrated with the pump.
  • several pressure sensors can be integrated into the pump. These pressure sensors can be applied to the pumping chamber at the high vacuum side and the fore vacuum side, as well as to the evaporating chamber and by means of suitable switching technology measures can detect the pressure difference between the mentioned measuring points.
  • a flow measurement based for example on a microsystem technique realized heating wire principle can be made at the suction intake pipe (suction intake region) and/or possibly at the outlet.
  • FIG. 1 is a cross-sectioned schematic illustration of a diffusion pump.
  • FIG. 2 is a schematic perspective view of a micro agent driving pump.
  • the construction of the invention consists, for example, of three substrates of which the middle substrate contains the jet structures and it is distinguished by a high heat conductibility in order to facilitate the evaporation and condensation of a liquid driving agent.
  • the system or the driving agent vacuum pump is made of three substrates, the middle substrate of which because of its good heat conductibility, mechanical and chemical stability as well as its structurabilty is preferably structured by way of anisotropic etching methods, is silicon and the substrates which close its two sides are preferably because of its low thermal conductivity made of anodically bonded glass.
  • the middle substrate because of its good heat conduction is made of a galvanic metal structure, for example one made by UV-Liga technique, preferably galvanically washed on to a lower glass substrate and an upper glass substrate as a seal.
  • the two outer substrates can contain needed connection channels and, as the case may be, can serve as carriers for the integrated pressure or flow sensors and to close the evaporating chamber and the pumping space.
  • silicon preferably anisotropically structured boron silicate glass, can be used because of its good chemical and mechanical stability, and even galvanically finished metal structures and glass substrates or structures made by injection molding processes and polymer substrates can be used.
  • the driving agent vacuum pump according to the invention is preferably closed by polymer substrates and also the jet arrangement is created by, for example, an injection molded structure.
  • the microdriving agent pump has the following advantages: the pump can be used for existing or in the future developed miniaturized systems, without necessarily increasing their construction shape.
  • micro driving agent pump because of its small internal measurements can be used below a pressure of about one atmosphere and, according to its implementation with several jet stages and a suitable driving agent, a pressure of down to several Pascal can be reached.
  • the micro driving agent pump consists of a silicon substrate structured by plasma etching methods and two anodically bonded boron silicate glass substrates as covers above and below the silicon substrate, one of which boron silicate glass substrates provides an access from the outside into the evaporating chamber for the external supply of a driving agent.
  • FIG. 2 One such system is shown in FIG. 2 by way of example: through the opening 3 , a vapor phase driving agent is delivered, which is expanded through the jets 5 , and provides impulses onto the gas molecules delivered to the high vacuum side 6 , through channel 7 , connected to a volume.
  • the driving agent condenses on the water cooled side walls of the pump 3 , and the evacuated gas molecules move out of the micropump through the vacuum fore side 2 , and the outlet 1 .
  • the side length of the system has a value of about 15 mm.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
US11/796,505 2004-10-29 2007-04-27 Motivating fluid vacuum pump Abandoned US20080075613A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/486,300 US8172548B2 (en) 2004-10-29 2009-06-17 Driving agent vacuum pump

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102004053006A DE102004053006A1 (de) 2004-10-29 2004-10-29 Treibmittelpumpe in Mikrosystemtechnik
DE102004053006.8 2004-10-29
PCT/EP2005/011660 WO2006045634A1 (de) 2004-10-29 2005-10-31 Treibmittel-vakuumpumpe

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/011660 Continuation WO2006045634A1 (de) 2004-10-29 2005-10-31 Treibmittel-vakuumpumpe

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/486,300 Continuation-In-Part US8172548B2 (en) 2004-10-29 2009-06-17 Driving agent vacuum pump

Publications (1)

Publication Number Publication Date
US20080075613A1 true US20080075613A1 (en) 2008-03-27

Family

ID=35538743

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/796,505 Abandoned US20080075613A1 (en) 2004-10-29 2007-04-27 Motivating fluid vacuum pump

Country Status (5)

Country Link
US (1) US20080075613A1 (de)
EP (1) EP1805420B1 (de)
AT (1) ATE473374T1 (de)
DE (2) DE102004053006A1 (de)
WO (1) WO2006045634A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014103276A1 (ja) * 2012-12-27 2014-07-03 株式会社デンソー エジェクタ
US10037869B2 (en) 2013-08-13 2018-07-31 Lam Research Corporation Plasma processing devices having multi-port valve assemblies

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275221A (en) * 1965-05-27 1966-09-27 Varian Associates Automatic high vacuum system
US3310227A (en) * 1965-04-12 1967-03-21 Milleron Norman Surge and backstreaming porous diaphragm filter for vacuum system
US4251713A (en) * 1978-04-21 1981-02-17 Varian Associates, Inc. Electric heater assembly for diffusion pumps
US5038852A (en) * 1986-02-25 1991-08-13 Cetus Corporation Apparatus and method for performing automated amplification of nucleic acid sequences and assays using heating and cooling steps
US5259737A (en) * 1990-07-02 1993-11-09 Seiko Epson Corporation Micropump with valve structure
US5347876A (en) * 1992-01-07 1994-09-20 Gas Research Institute Gas flowmeter using thermal time-of-flight principle
US20020176802A1 (en) * 2001-05-24 2002-11-28 Chen-Kuei Chung Microfluid driving device
US20040179946A1 (en) * 2003-01-16 2004-09-16 Gianchandani Yogesh B. Packaged micromachined device such as a vacuum micropump, device having a micromachined sealed electrical interconnect and device having a suspended micromachined bonding pad

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1742526A1 (ru) * 1990-03-14 1992-06-23 Научно-производственное объединение "Вакууммашприбор" Пароструйный вакуумный насос
DE20120138U1 (de) * 2001-12-12 2002-02-28 Festo Ag & Co Vakuumerzeugervorrichtung

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3310227A (en) * 1965-04-12 1967-03-21 Milleron Norman Surge and backstreaming porous diaphragm filter for vacuum system
US3275221A (en) * 1965-05-27 1966-09-27 Varian Associates Automatic high vacuum system
US4251713A (en) * 1978-04-21 1981-02-17 Varian Associates, Inc. Electric heater assembly for diffusion pumps
US5038852A (en) * 1986-02-25 1991-08-13 Cetus Corporation Apparatus and method for performing automated amplification of nucleic acid sequences and assays using heating and cooling steps
US5259737A (en) * 1990-07-02 1993-11-09 Seiko Epson Corporation Micropump with valve structure
US5347876A (en) * 1992-01-07 1994-09-20 Gas Research Institute Gas flowmeter using thermal time-of-flight principle
US20020176802A1 (en) * 2001-05-24 2002-11-28 Chen-Kuei Chung Microfluid driving device
US20040179946A1 (en) * 2003-01-16 2004-09-16 Gianchandani Yogesh B. Packaged micromachined device such as a vacuum micropump, device having a micromachined sealed electrical interconnect and device having a suspended micromachined bonding pad

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014103276A1 (ja) * 2012-12-27 2014-07-03 株式会社デンソー エジェクタ
JP2014142166A (ja) * 2012-12-27 2014-08-07 Denso Corp エジェクタ
US9618245B2 (en) 2012-12-27 2017-04-11 Denso Corporation Ejector
US10037869B2 (en) 2013-08-13 2018-07-31 Lam Research Corporation Plasma processing devices having multi-port valve assemblies

Also Published As

Publication number Publication date
ATE473374T1 (de) 2010-07-15
EP1805420B1 (de) 2010-07-07
EP1805420A1 (de) 2007-07-11
DE102004053006A1 (de) 2006-05-04
WO2006045634A1 (de) 2006-05-04
DE502005009877D1 (de) 2010-08-19

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Legal Events

Date Code Title Description
AS Assignment

Owner name: TECHNISCHE UNIVERSITAT HAMBURG-HARBURG, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DOMS, MARCO;MULLER, JORG;REEL/FRAME:019436/0362

Effective date: 20070605

Owner name: TUTECH INNOVATION GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DOMS, MARCO;MULLER, JORG;REEL/FRAME:019436/0362

Effective date: 20070605

AS Assignment

Owner name: BAYER TECHNOLOGY SERVICES GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:TECHNISCHE UNIVERSITAT HAMBURG-HARBURG;TUTECH INNOVATION GMBH;REEL/FRAME:022452/0962

Effective date: 20090217

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION