DE502005009877D1 - Treibmittel-vakuumpumpe - Google Patents

Treibmittel-vakuumpumpe

Info

Publication number
DE502005009877D1
DE502005009877D1 DE502005009877T DE502005009877T DE502005009877D1 DE 502005009877 D1 DE502005009877 D1 DE 502005009877D1 DE 502005009877 T DE502005009877 T DE 502005009877T DE 502005009877 T DE502005009877 T DE 502005009877T DE 502005009877 D1 DE502005009877 D1 DE 502005009877D1
Authority
DE
Germany
Prior art keywords
vacuum pump
jet
arrangement
chamber
blowing agents
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE502005009877T
Other languages
English (en)
Inventor
Marco Doms
Joerg Mueller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayer AG
Original Assignee
Bayer Technology Services GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bayer Technology Services GmbH filed Critical Bayer Technology Services GmbH
Publication of DE502005009877D1 publication Critical patent/DE502005009877D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE502005009877T 2004-10-29 2005-10-31 Treibmittel-vakuumpumpe Active DE502005009877D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004053006A DE102004053006A1 (de) 2004-10-29 2004-10-29 Treibmittelpumpe in Mikrosystemtechnik
PCT/EP2005/011660 WO2006045634A1 (de) 2004-10-29 2005-10-31 Treibmittel-vakuumpumpe

Publications (1)

Publication Number Publication Date
DE502005009877D1 true DE502005009877D1 (de) 2010-08-19

Family

ID=35538743

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102004053006A Withdrawn DE102004053006A1 (de) 2004-10-29 2004-10-29 Treibmittelpumpe in Mikrosystemtechnik
DE502005009877T Active DE502005009877D1 (de) 2004-10-29 2005-10-31 Treibmittel-vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102004053006A Withdrawn DE102004053006A1 (de) 2004-10-29 2004-10-29 Treibmittelpumpe in Mikrosystemtechnik

Country Status (5)

Country Link
US (1) US20080075613A1 (de)
EP (1) EP1805420B1 (de)
AT (1) ATE473374T1 (de)
DE (2) DE102004053006A1 (de)
WO (1) WO2006045634A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6119566B2 (ja) * 2012-12-27 2017-04-26 株式会社デンソー エジェクタ
US10037869B2 (en) 2013-08-13 2018-07-31 Lam Research Corporation Plasma processing devices having multi-port valve assemblies

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3310227A (en) * 1965-04-12 1967-03-21 Milleron Norman Surge and backstreaming porous diaphragm filter for vacuum system
US3275221A (en) * 1965-05-27 1966-09-27 Varian Associates Automatic high vacuum system
US4251713A (en) * 1978-04-21 1981-02-17 Varian Associates, Inc. Electric heater assembly for diffusion pumps
US5038852A (en) * 1986-02-25 1991-08-13 Cetus Corporation Apparatus and method for performing automated amplification of nucleic acid sequences and assays using heating and cooling steps
SU1742526A1 (ru) * 1990-03-14 1992-06-23 Научно-производственное объединение "Вакууммашприбор" Пароструйный вакуумный насос
DE69106240T2 (de) * 1990-07-02 1995-05-11 Seiko Epson Corp Mikropumpe und Verfahren zur Herstellung einer Mikropumpe.
US5347876A (en) * 1992-01-07 1994-09-20 Gas Research Institute Gas flowmeter using thermal time-of-flight principle
US6743636B2 (en) * 2001-05-24 2004-06-01 Industrial Technology Research Institute Microfluid driving device
DE20120138U1 (de) * 2001-12-12 2002-02-28 Festo Ag & Co Vakuumerzeugervorrichtung
US7367781B2 (en) * 2003-01-16 2008-05-06 The Regents Of The University Of Michigan Packaged micromachined device such as a vacuum micropump, device having a micromachined sealed electrical interconnect and device having a suspended micromachined bonding pad

Also Published As

Publication number Publication date
ATE473374T1 (de) 2010-07-15
EP1805420B1 (de) 2010-07-07
EP1805420A1 (de) 2007-07-11
DE102004053006A1 (de) 2006-05-04
WO2006045634A1 (de) 2006-05-04
US20080075613A1 (en) 2008-03-27

Similar Documents

Publication Publication Date Title
MY193429A (en) Method to manipulate a well using an overbalanced pressure container
TW200726453A (en) Priming a microsurgical system
ATE433191T1 (de) Schaltkammer eines hochspannungsschalters mit einem heizvolumen veränderbarer grösse
TW200639901A (en) Device for operating gas in vacuum or low-pressure environment and for observation of the operation
DE602007006227D1 (de) Unterwasservorrichtung zum betrieb von unterwassereinrichtungen
EP1865200A4 (de) Hybridkompressor
DE602006004563D1 (de) Hen
UY29148A1 (es) Recipiente de presion con paneles de vacio diferenciales
NZ757743A (en) Refrigerator
ATE423589T1 (de) Inhalationstherapiegeräte-kompressor
WO2007078573A3 (en) Apparatus and method for pumping in an ion optical device
ATE540216T1 (de) Pulsstrahltriebwerk
BRPI0509952A (pt) compressor linear
DE502005009877D1 (de) Treibmittel-vakuumpumpe
TR200903715T1 (tr) Bir evaporatör.
ATE556281T1 (de) Economiser-kammer zur minimierung von druckpulsationen
BR0300259A (pt) Válvula para compressor hermético
CA2518520A1 (en) Device for operating gas in vacuum or low-pressure environment and for observation of the operation
JP2008544135A5 (de)
EP1734247A3 (de) Kolben
DE602005012050D1 (de) Drucksteuerverfahren
ATE389806T1 (de) Vakuumpumpkreislauf und damit ausgerüstete maschine zur behandlung von behältern
BRPI0607189A2 (pt) um compressor
EA200801876A1 (ru) Усовершенствованный вертикальный вакуум-выпарной аппарат непрерывного действия
ATE366886T1 (de) Rückschlagventil