ATE473374T1 - Treibmittel-vakuumpumpe - Google Patents

Treibmittel-vakuumpumpe

Info

Publication number
ATE473374T1
ATE473374T1 AT05803340T AT05803340T ATE473374T1 AT E473374 T1 ATE473374 T1 AT E473374T1 AT 05803340 T AT05803340 T AT 05803340T AT 05803340 T AT05803340 T AT 05803340T AT E473374 T1 ATE473374 T1 AT E473374T1
Authority
AT
Austria
Prior art keywords
vacuum pump
jet
arrangement
chamber
opening
Prior art date
Application number
AT05803340T
Other languages
English (en)
Inventor
Marco Doms
Joerg Mueller
Original Assignee
Bayer Technology Services Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bayer Technology Services Gmbh filed Critical Bayer Technology Services Gmbh
Application granted granted Critical
Publication of ATE473374T1 publication Critical patent/ATE473374T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT05803340T 2004-10-29 2005-10-31 Treibmittel-vakuumpumpe ATE473374T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004053006A DE102004053006A1 (de) 2004-10-29 2004-10-29 Treibmittelpumpe in Mikrosystemtechnik
PCT/EP2005/011660 WO2006045634A1 (de) 2004-10-29 2005-10-31 Treibmittel-vakuumpumpe

Publications (1)

Publication Number Publication Date
ATE473374T1 true ATE473374T1 (de) 2010-07-15

Family

ID=35538743

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05803340T ATE473374T1 (de) 2004-10-29 2005-10-31 Treibmittel-vakuumpumpe

Country Status (5)

Country Link
US (1) US20080075613A1 (de)
EP (1) EP1805420B1 (de)
AT (1) ATE473374T1 (de)
DE (2) DE102004053006A1 (de)
WO (1) WO2006045634A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6119566B2 (ja) * 2012-12-27 2017-04-26 株式会社デンソー エジェクタ
US10037869B2 (en) 2013-08-13 2018-07-31 Lam Research Corporation Plasma processing devices having multi-port valve assemblies

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3310227A (en) * 1965-04-12 1967-03-21 Milleron Norman Surge and backstreaming porous diaphragm filter for vacuum system
US3275221A (en) * 1965-05-27 1966-09-27 Varian Associates Automatic high vacuum system
US4251713A (en) * 1978-04-21 1981-02-17 Varian Associates, Inc. Electric heater assembly for diffusion pumps
US5038852A (en) * 1986-02-25 1991-08-13 Cetus Corporation Apparatus and method for performing automated amplification of nucleic acid sequences and assays using heating and cooling steps
SU1742526A1 (ru) * 1990-03-14 1992-06-23 Научно-производственное объединение "Вакууммашприбор" Пароструйный вакуумный насос
DE69106240T2 (de) * 1990-07-02 1995-05-11 Seiko Epson Corp Mikropumpe und Verfahren zur Herstellung einer Mikropumpe.
US5347876A (en) * 1992-01-07 1994-09-20 Gas Research Institute Gas flowmeter using thermal time-of-flight principle
US6743636B2 (en) * 2001-05-24 2004-06-01 Industrial Technology Research Institute Microfluid driving device
DE20120138U1 (de) * 2001-12-12 2002-02-28 Festo Ag & Co Vakuumerzeugervorrichtung
US7367781B2 (en) * 2003-01-16 2008-05-06 The Regents Of The University Of Michigan Packaged micromachined device such as a vacuum micropump, device having a micromachined sealed electrical interconnect and device having a suspended micromachined bonding pad

Also Published As

Publication number Publication date
EP1805420B1 (de) 2010-07-07
EP1805420A1 (de) 2007-07-11
DE102004053006A1 (de) 2006-05-04
WO2006045634A1 (de) 2006-05-04
DE502005009877D1 (de) 2010-08-19
US20080075613A1 (en) 2008-03-27

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Legal Events

Date Code Title Description
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