US20080007730A1 - Microscope with higher resolution and method for increasing same - Google Patents
Microscope with higher resolution and method for increasing same Download PDFInfo
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- US20080007730A1 US20080007730A1 US11/806,459 US80645907A US2008007730A1 US 20080007730 A1 US20080007730 A1 US 20080007730A1 US 80645907 A US80645907 A US 80645907A US 2008007730 A1 US2008007730 A1 US 2008007730A1
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- 238000000034 method Methods 0.000 title claims description 10
- 230000005284 excitation Effects 0.000 claims abstract description 40
- 238000005286 illumination Methods 0.000 claims abstract description 6
- 210000001747 pupil Anatomy 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000009826 distribution Methods 0.000 description 24
- 229920013655 poly(bisphenol-A sulfone) Polymers 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 5
- 239000000975 dye Substances 0.000 description 4
- 230000010363 phase shift Effects 0.000 description 4
- 230000005283 ground state Effects 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 102000004169 proteins and genes Human genes 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 206010001497 Agitation Diseases 0.000 description 1
- 230000005526 G1 to G0 transition Effects 0.000 description 1
- 238000010870 STED microscopy Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000000695 excitation spectrum Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
Definitions
- the present invention relates to microscopes with higher resolution with partial spatial superposition in the illumination by an excitation beam and a de-excitation beam and/or a switching beam in a fluorescing sample.
- a diffraction-limited distribution of optical light (de-excitation light) is so modified by the diffraction-limited excitation distribution through a nonlinear interaction that the emission of the light can take place only from a sub-region.
- This sub-region (effectively Point Spread Function: PSF) can thereby be limited in all three spatial directions or only in a lateral direction. Suitable limits of the PSFs are thereby:
- phase masks in the pupil of the de-excitation light with radial phase shift See for example the article written by T. A. Klar, S. Jakobs, M. Dyba, A. Egner, and S. W. Hell, as published in Proceedings of National Academy of Sciences, U.S.A. 97, page 8206 (2000)) or of phase masks with quadrant-wise phase shift (In the article written by E. Engel et al. in Appl. Phys. B 77, pages 11-17 (2003)).
- the aim of the invention is to provide a method and microscope with which the corresponding distributions can be generated relatively easily and with greater efficiency (represented by the steepness of the gradients of the distributions).
- the present invention relates to a microscope with higher resolution with partial spatial superposition in the illumination by an excitation beam and a de-excitation beam and/or a switching beam in a fluorescent sample.
- the microscope the light from the sample is deflected.
- the excitation beam and/or in the de-excitation and/or switching beam at least one combination of devices exercising circular and radial influence on the spatial phase is provided.
- the present invention also covers a microscopic method accomplishing higher resolution.
- a fluorescent sample is illuminated with an excitation beam and a de-excitation beam and/or a switching beam successively in time.
- the selected beams are spatially superposed in part, with the spatial phase of the excitation and/or de-excitation and/or switching beam being subjected to circular and radial influence at the same time.
- FIG. 1 shows a schematic diagram of a portion of a microscope embodying the present invention.
- FIG. 2 shows a schematic diagram of a portion of a microscope embodying another version of the present invention.
- FIG. 3 graphically illustrates a radial mask R, a spiral mask S and a combination of a radial mask and a spiral mask SR in accordance with the present invention.
- FIGS. 4 a through 4 c graphically show the resulting distributions with de-excitation and the realization according to the first exemplary embodiment shown in FIG. 1 .
- FIGS. 5 a through 5 c graphically show the resulting distribution with the de-excitation according to FIG. 2 .
- FIGS. 6 a through 6 c show the distribution for the excitation in FIG. 2 .
- FIGS. 7 a through 7 c graphically show resulting distributions in the X-Z plane.
- FIGS. 8 a and 8 b show the distribution obtained in the prior art under the same conditions, namely with a mask with radial phase shift ( FIG. 8 a ) or with a spiral mask ( FIG. 8 b ) in de-excitation beam path.
- FIG. 3 shows a radial mask (R), a spiral mask (S) and a combination of a radial mask and a spiral mask (SR), whereby the combination is possible as a successive arrangement of R and S or as a furnished gray scale design.
- R ( r ) exp( ⁇ j ⁇ ) for r ⁇ a / ⁇ 2
- S ( ⁇ ) exp( ⁇ j ⁇ )
- SR ( r , ⁇ ) R ( r )+ S ( ⁇ )
- the different excitation and de-excitation beams are shown separately, for example, with reference to STED using short pulses.
- the excitation takes place first and the de-excitation takes place thereafter, with time delay, by the stimulated emission as known in the prior art.
- the remaining excited molecules relax with emission of fluorescence, which is detected.
- GSD Ground State Depletion
- B switching of dyes
- the excitation of the molecule takes place with the excitation beam, whereby the molecules remaining in the fluorescent state can emit fluorescent light, which is detected.
- the use of the pulsed light (as in STED) for the excitation and the de-excitation beam is not necessary.
- FIGS. 1 and 2 Reference symbols apply to both figures:
- the excitation AN takes place with a customary PSF, for instance, a point scanner, through the pupil optics PO, scanner SC and objective O upstream of and in the direction of sample PR.
- the de-excitation beam path AB is split into two beams by means of a beam splitter ST.
- One beam path with the delay DL (in which the extended length, achieved possibly by means of fiber optical waveguides, is greater than the coherence length of the used laser), comprises spiral mask SM, the other one comprises radial mask RM, whereby the delay ensures that there is incoherent superposition of the two partial beams behind beam combiner SV.
- the masks are imaged through the pupil optics PO at or in the vicinity of an objective pupil.
- FIG. 2 there is a similar de-excitation beam path AB as in FIG. 1 , whereby radial mask RM is replaced in this case by the combination mask RM/SM.
- the excitation beam path AN is also split by means of a second beam splitter ST 2 into two beam paths.
- a radial mask RM In the path of the partial beam with delay DL, there is a radial mask RM, which is imaged at the objective pupil or in its vicinity.
- the delay DL ensures that there is incoherent superposition of the partial beams behind the second beam splitter SV 2 .
- the delay must be greater than the coherence length of the source, which can be practically achieved in the case of highly coherent lasers only with fibers.
- Another possibility of incoherent superposition lies in the use of light with slightly different wavelengths (within the excitation spectrum for fluorescence (GSD) and/or for switching or of an emission spectrum (STED)). This is especially the preferable embodiment in the case of the CW lasers.
- the image of the pupil must generate a stationary phase distribution in the pupil plane of the objective.
- the excitation and the de-excitation beams arrive at the sample in general one after the other in the course of time.
- the sample is “prepared” with the de-excitation beam and subsequently the prepared state is “polled” by the excitation beam (GSD and switching), or the excitation is modified by a time-delayed de-excitation beam (STED).
- FIGS. 4 a through 4 c show the resulting distributions with de-excitation and the realization according to the first exemplary embodiment shown in FIG. 1 .
- a three-dimensional limitation appears in that region of the focus (object plane PR in FIG. 1 ) (in the middle of FIG. 4 c ), in which there is no de-excitation beam.
- FIGS. 5 a through 5 c show the resulting distribution with the de-excitation according to FIG. 2 .
- PR object plane PR
- FIGS. 6 a through 6 c show the distribution for the excitation in FIG. 2 .
- an excitation beam distribution extending longitudinally farther compared to the normal PSF, is generated in the object plane PR ( FIG. 6 b ).
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- Chemical & Material Sciences (AREA)
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- Optics & Photonics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
- 1. Field of the Invention
- The present invention relates to microscopes with higher resolution with partial spatial superposition in the illumination by an excitation beam and a de-excitation beam and/or a switching beam in a fluorescing sample.
- (2) Description of Related Art
- Methods for increasing the optical resolution in a far-field with diffraction-limited resolution, which methods are based on nonlinear interaction of light with a sample, are known. Among such methods are microscopy with Stimulated Emission Depletion (STED) as discussed in U.S. Pat. No. 5,731,588, Ground State Depletion (GSD) as discussed in Hell and Kroug, Appl. Phys. B 60 (1995), pages 495-497, and optical modification (switching) of fluorescent substances as discussed in U.S. Pat. No. 7,064,824 B2.
- In both cases, a diffraction-limited distribution of optical light (de-excitation light) is so modified by the diffraction-limited excitation distribution through a nonlinear interaction that the emission of the light can take place only from a sub-region. This sub-region (effectively Point Spread Function: PSF) can thereby be limited in all three spatial directions or only in a lateral direction. Suitable limits of the PSFs are thereby:
-
- 1. 3D limitation on the excitation volume; and
- 2. Lateral limitation of the excitation volume with enlarged depth of focus.
- Thus, the prior art, which is not so efficient from the viewpoint of the steepness of the gradient, involves the use of phase masks in the pupil of the de-excitation light with radial phase shift (See for example the article written by T. A. Klar, S. Jakobs, M. Dyba, A. Egner, and S. W. Hell, as published in Proceedings of National Academy of Sciences, U.S.A. 97, page 8206 (2000)) or of phase masks with quadrant-wise phase shift (In the article written by E. Engel et al. in Appl. Phys. B 77, pages 11-17 (2003)).
- The use of the spiral masks in the STED microscopy was proposed in Török and P. R. T. Munro, Opt. Expr. 12 (2004), page 3605. However the use of a spiral mask, as described in the aforementioned article, generates neither an excitation distribution that is limited in all spatial directions, nor a distribution that exhibits enlarged depth of focus, as described in the following.
- The aim of the invention is to provide a method and microscope with which the corresponding distributions can be generated relatively easily and with greater efficiency (represented by the steepness of the gradients of the distributions).
- Compared to generation of the distributions through superposition of several point sources (U.S. Pat. No. 5,866,911 A1), the following solutions are clearly simpler. In addition to that, a more efficient 3D limitation is possible.
- The present invention relates to a microscope with higher resolution with partial spatial superposition in the illumination by an excitation beam and a de-excitation beam and/or a switching beam in a fluorescent sample. In the microscope, the light from the sample is deflected. In the excitation beam and/or in the de-excitation and/or switching beam, at least one combination of devices exercising circular and radial influence on the spatial phase is provided.
- The present invention also covers a microscopic method accomplishing higher resolution. Under the inventive method, a fluorescent sample is illuminated with an excitation beam and a de-excitation beam and/or a switching beam successively in time. The selected beams are spatially superposed in part, with the spatial phase of the excitation and/or de-excitation and/or switching beam being subjected to circular and radial influence at the same time.
- The invention is better understood by reading the following Detailed Description of the Preferred Embodiments with reference to the accompanying drawing figures, in which like reference numerals refer to like elements throughout, and in which:
-
FIG. 1 shows a schematic diagram of a portion of a microscope embodying the present invention. -
FIG. 2 shows a schematic diagram of a portion of a microscope embodying another version of the present invention. -
FIG. 3 graphically illustrates a radial mask R, a spiral mask S and a combination of a radial mask and a spiral mask SR in accordance with the present invention. -
FIGS. 4 a through 4 c graphically show the resulting distributions with de-excitation and the realization according to the first exemplary embodiment shown inFIG. 1 . -
FIGS. 5 a through 5 c graphically show the resulting distribution with the de-excitation according toFIG. 2 . -
FIGS. 6 a through 6 c show the distribution for the excitation inFIG. 2 . -
FIGS. 7 a through 7 c graphically show resulting distributions in the X-Z plane. -
FIGS. 8 a and 8 b show the distribution obtained in the prior art under the same conditions, namely with a mask with radial phase shift (FIG. 8 a) or with a spiral mask (FIG. 8 b) in de-excitation beam path. - In describing preferred embodiments of the present invention illustrated in the drawings, specific terminology is employed for the sake of clarity. However, the invention is not intended to be limited to the specific terminology so selected, and it is to be understood that each specific element includes all technical equivalents that operate in a similar manner to accomplish a similar purpose.
- Based on the present invention, it is possible to realize the following:
-
- 1. Excitation: Conventional PSF
- De-excitation: Incoherent superposition of a distribution with spiral phase in a pupil with the other distribution with one with radial phase in the pupil.
- 2. Excitation: Incoherent superposition of conventional PSF with one radial phase in the pupil.
- De-excitation: Incoherent superposition of a distribution with spiral phase in the pupil and one with spiral phase+radial phase.
- 1. Excitation: Conventional PSF
-
FIG. 3 shows a radial mask (R), a spiral mask (S) and a combination of a radial mask and a spiral mask (SR), whereby the combination is possible as a successive arrangement of R and S or as a furnished gray scale design. - In this way, the phase values are shown with gray scale coding (white=0, black=2π):
R(r)=exp(−jπ) for r<a/√2
S(φ)=exp(−jφ)
SR(r,φ)=R(r)+S(φ) -
- with r: radial coordinate and φ: angular coordinate in the pupil (a: radius of the pupil).
- In the following arrangements, the different excitation and de-excitation beams are shown separately, for example, with reference to STED using short pulses. In this case, the excitation takes place first and the de-excitation takes place thereafter, with time delay, by the stimulated emission as known in the prior art. The remaining excited molecules relax with emission of fluorescence, which is detected.
- These arrangements can also be used in other methods for high resolution, such as (A) Ground State Depletion (GSD) (See: S. W. Hell and M. Kroug, Appl. Phys. B 60 (1995) page 495) or (B) switching of dyes (U.S. Pat. No. 7,064,824 B2). In (A), at first the dye is brought into the triplet state through repeated excitation, for which the de-excitation beam is used. The part of the dye remaining in the ground state is then excited by the excitation beam and fluorescence is detected. In (B) the molecules are switched by the de-excitation beam and are thus brought into a non-fluorescent state. Thereafter, the excitation of the molecule takes place with the excitation beam, whereby the molecules remaining in the fluorescent state can emit fluorescent light, which is detected. In both cases, the use of the pulsed light (as in STED) for the excitation and the de-excitation beam is not necessary.
- Description of
FIGS. 1 and 2 (reference symbols apply to both figures): -
- AN: Excitation beam path
- AB: De-excitation beam path
- DE Detector
- SC: Scanner
- O: Objective
- ST: Beam splitter
- SV: Beam combiner
- PO: Pupil optics
- DL: Delay for extending the path of the light
- SM: Spiral mask
- RM: Radial mask
- PR: Sample
- In
FIG. 1 , the excitation AN takes place with a customary PSF, for instance, a point scanner, through the pupil optics PO, scanner SC and objective O upstream of and in the direction of sample PR. The de-excitation beam path AB is split into two beams by means of a beam splitter ST. One beam path with the delay DL (in which the extended length, achieved possibly by means of fiber optical waveguides, is greater than the coherence length of the used laser), comprises spiral mask SM, the other one comprises radial mask RM, whereby the delay ensures that there is incoherent superposition of the two partial beams behind beam combiner SV. The masks are imaged through the pupil optics PO at or in the vicinity of an objective pupil. - In
FIG. 2 , there is a similar de-excitation beam path AB as inFIG. 1 , whereby radial mask RM is replaced in this case by the combination mask RM/SM. The excitation beam path AN is also split by means of a second beam splitter ST2 into two beam paths. In the path of the partial beam with delay DL, there is a radial mask RM, which is imaged at the objective pupil or in its vicinity. The delay DL ensures that there is incoherent superposition of the partial beams behind the second beam splitter SV2. - The delay must be greater than the coherence length of the source, which can be practically achieved in the case of highly coherent lasers only with fibers. Another possibility of incoherent superposition lies in the use of light with slightly different wavelengths (within the excitation spectrum for fluorescence (GSD) and/or for switching or of an emission spectrum (STED)). This is especially the preferable embodiment in the case of the CW lasers. Thus, for example, for the switching and the excitation of the protein Dronpa, radiations of 488 nm as well as of 477 nm are used. Thus, in the de-excitation beam path in the arrangement of
FIG. 1 , 488 nm radiation is generated by the spiral mask and 477 nm radiation by the radial mask and can be combined using suitable dichroic beam splitters. The same holds true for the excitation and the de-excitation beam paths in the arrangement ofFIG. 2 . - The image of the pupil must generate a stationary phase distribution in the pupil plane of the objective.
- Regardless of the nature of the sample interaction, the excitation and the de-excitation beams arrive at the sample in general one after the other in the course of time. Either the sample is “prepared” with the de-excitation beam and subsequently the prepared state is “polled” by the excitation beam (GSD and switching), or the excitation is modified by a time-delayed de-excitation beam (STED).
- With that in mind, incoherent superposition of the excitation and the detection beams is ensured.
- Next, the cross sections along the lateral coordinates (horizontal) and the axial coordinates (vertical) are shown for each case, whereby the distributions exhibit rotational symmetry with respect to the axial (optical) axis.
-
FIGS. 4 a through 4 c show the resulting distributions with de-excitation and the realization according to the first exemplary embodiment shown inFIG. 1 . One can see that a three-dimensional limitation appears in that region of the focus (object plane PR inFIG. 1 ) (in the middle ofFIG. 4 c), in which there is no de-excitation beam. -
FIGS. 5 a through 5 c show the resulting distribution with the de-excitation according toFIG. 2 . One can see that in the object plane PR (5 c), a region, extending in the axial direction and limited laterally, appears, in which there is no de-excitation beam. -
FIGS. 6 a through 6 c show the distribution for the excitation inFIG. 2 . One can see that inFIG. 6 c, an excitation beam distribution, extending longitudinally farther compared to the normal PSF, is generated in the object plane PR (FIG. 6 b). - Simulation Results:
- The PSFs (assumed normalized to 1 in equation (1)) used for the switching-off leads to reduction in the excitability (or the excitation) of the dye according to:
A(x, y, z)=exp{−σD·PSF s(x, y, z)} (1)
where σ indicates the cross section of the switching (or of the de-excitation) and D indicates the irradiation energy per unit area. The total PSF obtained from the excitation with a PSFa is then:
PSF(x, y, z)=A(x, y, z)·PSF a(x, y, z)} (2) - Below that, the x-z sections through the PSF for the case of the switchable protein Dronpa are shown (lateral=horizontal, axial=vertical). Thereby, the switching-off with a cross section of 0.07 cm2/mW/s is assumed (See: S. Habuchi et al., Proc. Natl. Acad. Sci. U.S.A. 102, page 9511 (2005)).
- For irradiation energy of 3 W/cm2/s (that is, for instance, 3 mW in 10 □s focused on 1 □m2), one obtains the distribution as in
FIG. 7 a for the realization 2 (with the de-excitation corresponding toFIG. 5 c and the excitation corresponding toFIG. 6 c), and, for the realization 1 (with the de-excitation corresponding toFIG. 4 c and the excitation corresponding toFIG. 6 b) one obtains the distribution as inFIG. 7 b compared to that with conventional PSF (FIG. 7 c). - For comparison, let the distribution obtained in the prior art under the same conditions, namely with a mask with radial phase shift (
FIG. 8 a) or with a spiral mask (FIG. 8 b) in de-excitation beam path, be shown. One can clearly see that in case ofFIG. 8 a there is indeed an axial limitation of the PSF, but one obtains a lateral limitation that is not acceptable. Hence the resolution is improved only in the axial direction. In case ofFIG. 8 b, the same applies in regard to the exclusively lateral improvement of the resolution. In contrast toFIG. 7 a, in this case there is no enlargement in the depth of focus that is of relevance in applications. - Modifications and variations of the above-described embodiments of the present invention are possible, as appreciated by those skilled in the art in light of the above teachings. It is therefore to be understood that, within the scope of the appended claims and their equivalents, the invention may be practiced otherwise than as specifically described.
Claims (8)
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DE102006026204A DE102006026204A1 (en) | 2006-05-31 | 2006-05-31 | Microscope with increased resolution |
DE102006026204.2 | 2006-05-31 | ||
DE102006026204 | 2006-05-31 |
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US7709809B2 US7709809B2 (en) | 2010-05-04 |
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EP (1) | EP1862839B2 (en) |
JP (1) | JP5269340B2 (en) |
AT (1) | ATE545054T1 (en) |
DE (1) | DE102006026204A1 (en) |
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CN102809672A (en) * | 2012-08-06 | 2012-12-05 | 中国科学院化学研究所 | Combining system of super-resolution confocal optical microscope and scanning probe microscope |
DE102013100172A1 (en) * | 2013-01-09 | 2014-07-10 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | A method for spatially high resolution imaging of a luminophor structure of a sample |
US9024279B2 (en) | 2010-04-22 | 2015-05-05 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. | Determining the distribution of a substance by scanning with a measuring front |
WO2019221622A1 (en) * | 2018-05-18 | 2019-11-21 | Ibmc - Instituto De Biologia Molecular E Celular | Device for improving performance in sted and resolft microscopy using a single phase mask |
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2006
- 2006-05-31 DE DE102006026204A patent/DE102006026204A1/en not_active Withdrawn
-
2007
- 2007-04-24 JP JP2007113766A patent/JP5269340B2/en not_active Expired - Fee Related
- 2007-05-25 AT AT07010431T patent/ATE545054T1/en active
- 2007-05-25 EP EP07010431.0A patent/EP1862839B2/en not_active Not-in-force
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US9024279B2 (en) | 2010-04-22 | 2015-05-05 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. | Determining the distribution of a substance by scanning with a measuring front |
CN101975991A (en) * | 2010-09-30 | 2011-02-16 | 浙江大学 | Method for extending focal depth based on amplitude modulation, polarization and phase modulation and device thereof |
CN101975992A (en) * | 2010-09-30 | 2011-02-16 | 浙江大学 | Focal-depth expanding method and device based on phase and polarization |
CN102809672A (en) * | 2012-08-06 | 2012-12-05 | 中国科学院化学研究所 | Combining system of super-resolution confocal optical microscope and scanning probe microscope |
DE102013100172A1 (en) * | 2013-01-09 | 2014-07-10 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | A method for spatially high resolution imaging of a luminophor structure of a sample |
US9267888B2 (en) | 2013-01-09 | 2016-02-23 | Max-Planck-Gesellschaft Zur Foerderung Der Wissens | Method of spatial high resolution imaging of a structure of a sample, the structure comprising a luminophore |
US10684225B2 (en) * | 2015-03-31 | 2020-06-16 | Laser-Laboratorium Goettingen E.V | Method and scanning fluorescence microscope for multi-dimensional high-resolution imaging a structure or a path of a particle in a sample |
WO2019221622A1 (en) * | 2018-05-18 | 2019-11-21 | Ibmc - Instituto De Biologia Molecular E Celular | Device for improving performance in sted and resolft microscopy using a single phase mask |
US11487098B2 (en) * | 2018-05-18 | 2022-11-01 | Ibmc—Instituto De Biologia Molecular E Celular | Device for improving performance in STED and RESOLFT microscopy using a single phase mask |
Also Published As
Publication number | Publication date |
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JP2007323058A (en) | 2007-12-13 |
EP1862839B1 (en) | 2012-02-08 |
DE102006026204A1 (en) | 2007-12-06 |
EP1862839B2 (en) | 2020-02-26 |
JP5269340B2 (en) | 2013-08-21 |
EP1862839A1 (en) | 2007-12-05 |
US7709809B2 (en) | 2010-05-04 |
ATE545054T1 (en) | 2012-02-15 |
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