US20070286749A1 - Drive for vacuum pump - Google Patents

Drive for vacuum pump Download PDF

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Publication number
US20070286749A1
US20070286749A1 US11/800,092 US80009207A US2007286749A1 US 20070286749 A1 US20070286749 A1 US 20070286749A1 US 80009207 A US80009207 A US 80009207A US 2007286749 A1 US2007286749 A1 US 2007286749A1
Authority
US
United States
Prior art keywords
guide surfaces
vacuum pump
drive arrangement
set forth
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/800,092
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English (en)
Inventor
Juergen Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Assigned to PFEIFFER VACUUM GMBH reassignment PFEIFFER VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: WAGNER, JUERGEN
Publication of US20070286749A1 publication Critical patent/US20070286749A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0064—Magnetic couplings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00—Non-metallic inorganic materials
    • F05C2203/02—Glass

Definitions

  • the present invention relates to a drive arrangement for a vacuum pump and including a motor stator, a motor rotor, and a separation member arranged between the motor stator and the motor rotor.
  • Vacuum pumps have rotating shafts the bearing of which are often lubricated by operating means such as, e.g., oil. In many vacuum pumps, this operating means is simultaneously used for sealing the working chamber, e.g., in so-called vane rotary vacuum pumps. Vacuum pumps have one or more shafts at least one of which is driven and held.
  • operating means such as, e.g., oil.
  • this operating means is simultaneously used for sealing the working chamber, e.g., in so-called vane rotary vacuum pumps.
  • Vacuum pumps have one or more shafts at least one of which is driven and held.
  • an asynchronous motor is used as a motor. It is generally forbidden to locate a motor in a space filled with operating means. This requires a bulky, hermetical separation which is realized, according to the state of the art, primarily by using so-called split pot elements.
  • the split pot element is arranged either directly in the motor gap or in a magnetic coupling and is formed of a material in which an alternating magnetic field generates no or very small eddy currents.
  • An example of use of a split pot element in a vacuum pump is disclosed in German Publication DE-OS 10 2004 024 554. The use of a split pot element leads to increase of the motor gap which reduces the efficiency of the motor and increases power consumption.
  • the negative influence of the split pot element on the width of the motor gap is based on a sum of separate effects.
  • the walls because of manufacturing conditions, are parallel to each other only at a small degree, therefore, the wall thickness increases from the pot bottom to the attachment flange.
  • a one-sided attachment by the attachment flange causes tilting of the pot element.
  • the pot element height acts as an elongate lever, and tilting at the pot element bottom is the greatest. Therefore, the motor gap must be correspondingly large.
  • attachment with the flange can lead in many non-magnetic materials to a danger of distortion due to stresses caused by a non-uniform application of force over the flange connection.
  • An object of the invention is to provide a drive arrangement with a hermetically sealed separation between the rotor and stator components of an electric motor and with as small as possible motor gap.
  • a drive arrangement which includes at least two, coaxial with each other and axially spaced from each other, guide surfaces, and in which the separation member is formed as a separation sleeve which is supported and centered between the at least two guide surfaces, with the guide surfaces contacting the outer surface of the separation sleeve.
  • the separation member By forming the separation member as a separation sleeve which is supported and centered between at least two guide surfaces, with the guide surfaces contacting an outer surface of the separation sleeve, it is possible to form the separation member very precisely.
  • Sleeves can be produced with high precision by grinding, turning, or drawing process which provides for a uniform wall thickness over the sleeve length. Arrangement of the sleeve within coaxial surfaces insures a precise alignment of the separation sleeve, resulting in a small motor gap.
  • the guide surfaces are so arranged that they contact the sleeve outer surface. This is advantageous with separation sleeves formed of a weak magnetic material, because generally the sleeve may be heated by eddy currents and, as a result, would expand greater than the components with guide surfaces. Thereby, leakage can be produced.
  • this arrangement is advantageous as such separation sleeve does not become heated and, therefore, does not expand.
  • the tension which is produced in the separation sleeve can cause distortion.
  • At least two components which define, together with the separation member, a chamber in which the motor stator is located.
  • the at least two guide surfaces are provided, respectively, on the at least two components.
  • the at least two components are aligned relative to each other by respective connection surfaces provided on the at least two components and arranged coaxially with the guide surfaces. With two components carrying the guide surfaces, a guide surface is provided at each axial end of the coils. Therefore, the separation sleeve can be held at its ends and be precisely positioned.
  • the separation sleeve is formed as a glass tube.
  • Glass has a very small heat expansion coefficient, is non-magnetic, so that no eddy current is generated, and the glass tube can be produced with precise dimensions.
  • a type of glass having a high chemical resistance can be used.
  • elastomeric ring means is arranged on the outer side of the glass tube for sealing a space inside the glass tube from outside.
  • the elastomeric ring means bears against the outer surface of the separation sleeve.
  • the at least two components form stationary, axially spaced from each other, stops for the glass tube, with an axial distance between the stops being greater than a length of the glass tube. This insures that the separation sleeve is not stressed, but rather is floatingly supported in the axial direction.
  • the motor rotor including permanent magnets and the motor stator including electrical coils, there is formed a motor with a high efficiency and a narrow motor gap.
  • a vacuum pump includes pumping components, a shaft for supporting the pumping components, and a drive arrangement for driving the shaft.
  • the drive arrangement includes, as discussed above, motor stator and rotor, a separation member arranged between the motor stator and the motor rotor, and at least two, coaxial with each other and axially spaced from each other, guide surfaces.
  • the separation member is formed as a separation sleeve which is supported and centered between the at least two guide surfaces, with the guide surfaces contacting an outer surface of the separation sleeve.
  • inventive drive arrangement in vacuum pumps formed as vane rotary pumps or Roots pumps enhances the advantages the inventive drive arrangement provides.
  • FIG. 1 shows a cross-sectional view of a vane rotary vacuum pump
  • FIG. 2 shows a cross-sectional view of a further embodiment of a vacuum pump drive arrangement according to the present invention.
  • FIG. 1 shoes a vane rotary vacuum pump 1 , further just a vacuum pump, sealed and lubricated with oil 16 .
  • the main component of the vacuum pump is a support 2 to which components of the pump system, on one hand, and the drive arrangement, on the other hand, are secured.
  • a shaft 3 is rotatably supported in a slide bearing 4 and eccentrically extends through a cylindrical hollow chamber of the vacuum pump 1 .
  • the hollow chamber is formed by a body having a cylindrical opening and cover plates at its opposite axial ends.
  • the shaft 3 supports one or more vanes 5 which contact the walls of the hollow chamber, thereby forming a compression chamber 6 .
  • the rotation of the shaft 3 and the resulting movement of the vanes produce the per se known pumping effect.
  • the shaft 3 carries permanent magnets 7 which cooperate with electrical coils 8 for rotating the shaft 3 . Between the permanent magnets 7 and the electrical coils 8 , there is provided a motor gap, shown at an increased, overproportional scale.
  • a separation member 9 which is formed as a glass tube, is arranged in the motor gap.
  • the glass tube 9 is supported against a cylindrical guide surface 10 provided on the support 2 and against a likewise cylindrical guide surface 11 provided on a cover 12 .
  • the guide surfaces 10 and 11 are coaxial and are axially spaced apart from each other. With the glass tube having a constant outer diameter, the guide surfaces 10 , 11 would have the same radices.
  • connection surfaces 17 insure coaxiality of the guide surfaces 10 , 11 .
  • the connection surfaces 17 are provided on the inner side of the spacer 14 , on the support 2 and on the cover 12 . In the right low portion of FIG.
  • connection surfaces which are provided on the support 2 and the cover 12 , are designated with a reference numeral 17 a
  • connection surfaces on the spacer 14 are designated with a reference numeral 17 b
  • the connection surfaces 17 b of the spacer 14 can be produced in a common operational step, e.g., by turning.
  • the guide surface 10 and the connection surface 17 a on the support 2 and the guide surface 11 and the connection surface 17 a on the cover 12 can be produced in one operational step.
  • the alignment of the cover 12 and the support 2 and, thereby, of the guide surfaces 10 and 17 a is, as a result, very precise and produces a small motor gap.
  • the support 2 and the cover 12 provide stops in both axial directions.
  • the distance between the stops is greater than the axial length of the glass tube so that the glass tube has a certain axial play. It is advantageous when the guide surfaces do not have narrow tolerances as no preload is produced. In this case, the glass tube is displaceable within certain limits.
  • Elastomeric rings 13 support the glass tube 9 floatingly for axial and radial displacement, with the guide surfaces 10 , 11 guiding the glass tube 9 .
  • FIG. 2 shows an improved embodiment of the inventive drive.
  • the support 2 is formed that it simultaneously functions as a spacer.
  • the support 2 , the separation tube 9 , and the cover 12 form a chamber in which the electrical coils 8 are arranged.
  • the embodiment of FIG. 2 is more compact than that of FIG. 1 .
  • FIG. 2 Another advantage of the embodiment of FIG. 2 consists in that the number of coaxial with each other surfaces is reduced. Only one connection interface between the cover 2 and support 2 is needed, so that the guide surfaces 17 are provided only in this region. The guide surfaces on the support can be formed in one operational step.
  • the guide surface 11 and the connection surface on the cover can be formed.
  • the coaxiality of the guide surfaces with respective connection surfaces and of the guide surfaces with each other is very precise. All of this insures a very high precision of the entire arrangement, and a clearance between the permanent magnets 7 , which are supported on the shaft 3 , and the electrical coils 8 can be retained optimally small.
  • the power parameters of the motor are correspondingly improved or a necessary motor power consumption is reduced as losses, which are associated with the motor gap, are significantly reduced.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Compressor (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
US11/800,092 2006-05-16 2007-05-02 Drive for vacuum pump Abandoned US20070286749A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006022772A DE102006022772A1 (de) 2006-05-16 2006-05-16 Antriebsanordnung für eine Vakuumpumpe
DE102006022772.7 2006-05-16

Publications (1)

Publication Number Publication Date
US20070286749A1 true US20070286749A1 (en) 2007-12-13

Family

ID=38325789

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/800,092 Abandoned US20070286749A1 (en) 2006-05-16 2007-05-02 Drive for vacuum pump

Country Status (4)

Country Link
US (1) US20070286749A1 (fr)
EP (1) EP1857681B1 (fr)
JP (1) JP5303117B2 (fr)
DE (1) DE102006022772A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110234035A1 (en) * 2009-05-27 2011-09-29 Heinrich Wittschier Magnetic coupling and split case for a magnetic coupling
CN102280965A (zh) * 2010-06-12 2011-12-14 中国科学院沈阳科学仪器研制中心有限公司 真空泵用屏蔽电机
US20170122321A1 (en) * 2014-06-27 2017-05-04 Ateliers Busch Sa Method of Pumping in a System of Vacuum Pumps and System of Vacuum Pumps
US11293436B2 (en) * 2017-03-29 2022-04-05 Hong Wang Vacuuming device and vacuum apparatus

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007060147A1 (de) * 2007-12-13 2009-06-18 Pfeiffer Vacuum Gmbh Drehschiebervakuumpumpe
DE102012222795B4 (de) 2012-12-11 2016-06-09 Magna powertrain gmbh & co kg Kraftfahrzeug mit einem Antriebsmotor und einer Vorrichtung zur Erzeugung eines Unterdrucks für einen Servoverbraucher
DE102015010846B4 (de) 2015-08-19 2017-04-13 Nidec Gpm Gmbh Elektromotorisch angetriebene Vakuumpumpe
DE102015118022B4 (de) * 2015-10-22 2024-05-29 Pfeiffer Vacuum Gmbh Rotationsverdrängervakuumpumpe
DE102018111891A1 (de) * 2017-05-31 2018-12-06 Schaeffler Technologies AG & Co. KG Betätigungsaktor mit abdichtendem Spaltrohr

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3143676A (en) * 1960-10-17 1964-08-04 Allis Chalmers Mfg Co Sealing arrangement for canned pumps
US3195466A (en) * 1959-05-25 1965-07-20 Porter Co Inc H K Electric motor construction
US3911300A (en) * 1971-08-13 1975-10-07 Taco Inc Encapsulated wet dynamoelectric machine rotor
US4877985A (en) * 1986-12-29 1989-10-31 Byrd William A Dynamoelectric machine
US5044895A (en) * 1984-12-22 1991-09-03 Leybold Aktiengesellschaft Oil supply device for a rotary machine
US5577883A (en) * 1992-06-19 1996-11-26 Leybold Aktiengesellschaft Gas friction vacuum pump having a cooling system
US20030170132A1 (en) * 2000-05-06 2003-09-11 Heinrich Englander Machine, preferably a vacuum pump, with magnetic bearings
US20040136842A1 (en) * 2002-07-04 2004-07-15 Minebea Co., Ltd. Fan motor
US6809442B2 (en) * 2001-09-26 2004-10-26 Nissan Motor Co., Ltd. Stator structure for rotary electric machine
US6847140B2 (en) * 2002-02-28 2005-01-25 Standex International Corp. Fluid barrier for motor rotor
US20050232791A1 (en) * 2002-05-29 2005-10-20 Leybold Vakuum Gmbh Dual-shaft vacuum pump

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Publication number Priority date Publication date Assignee Title
CH291138A (de) * 1950-03-08 1953-06-15 Pumpenbau Brugg K Ruetschi Umwälzaggregat für Zentralheizungen, mit einem Spaltrohrmotor und einer von demselben angetriebenen Umwälzpumpe.
JPS5017042Y1 (fr) * 1970-06-12 1975-05-27
DE3540959A1 (de) * 1984-12-22 1986-07-03 Leybold-Heraeus GmbH, 5000 Köln Oelfoerdereinrichtung fuer vakuumpumpen
JPH0727814Y2 (ja) * 1987-04-24 1995-06-21 株式会社荏原製作所 真空ポンプ駆動用モ−タ
DE8915926U1 (fr) * 1989-09-26 1992-05-07 Wilo-Werk Gmbh & Co Pumpen- Und Apparatebau, 4600 Dortmund, De
DE4220015A1 (de) * 1992-06-19 1993-12-23 Leybold Ag Gasreibungsvakuumpumpe
DE102004024554B4 (de) 2004-05-18 2018-01-25 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3195466A (en) * 1959-05-25 1965-07-20 Porter Co Inc H K Electric motor construction
US3143676A (en) * 1960-10-17 1964-08-04 Allis Chalmers Mfg Co Sealing arrangement for canned pumps
US3911300A (en) * 1971-08-13 1975-10-07 Taco Inc Encapsulated wet dynamoelectric machine rotor
US5044895A (en) * 1984-12-22 1991-09-03 Leybold Aktiengesellschaft Oil supply device for a rotary machine
US4877985A (en) * 1986-12-29 1989-10-31 Byrd William A Dynamoelectric machine
US5577883A (en) * 1992-06-19 1996-11-26 Leybold Aktiengesellschaft Gas friction vacuum pump having a cooling system
US20030170132A1 (en) * 2000-05-06 2003-09-11 Heinrich Englander Machine, preferably a vacuum pump, with magnetic bearings
US6809442B2 (en) * 2001-09-26 2004-10-26 Nissan Motor Co., Ltd. Stator structure for rotary electric machine
US6847140B2 (en) * 2002-02-28 2005-01-25 Standex International Corp. Fluid barrier for motor rotor
US20050232791A1 (en) * 2002-05-29 2005-10-20 Leybold Vakuum Gmbh Dual-shaft vacuum pump
US20040136842A1 (en) * 2002-07-04 2004-07-15 Minebea Co., Ltd. Fan motor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110234035A1 (en) * 2009-05-27 2011-09-29 Heinrich Wittschier Magnetic coupling and split case for a magnetic coupling
CN102280965A (zh) * 2010-06-12 2011-12-14 中国科学院沈阳科学仪器研制中心有限公司 真空泵用屏蔽电机
US20170122321A1 (en) * 2014-06-27 2017-05-04 Ateliers Busch Sa Method of Pumping in a System of Vacuum Pumps and System of Vacuum Pumps
US10760573B2 (en) * 2014-06-27 2020-09-01 Ateliers Busch Sa Method of pumping in a system of vacuum pumps and system of vacuum pumps
US11293436B2 (en) * 2017-03-29 2022-04-05 Hong Wang Vacuuming device and vacuum apparatus

Also Published As

Publication number Publication date
EP1857681A3 (fr) 2008-06-04
JP5303117B2 (ja) 2013-10-02
EP1857681B1 (fr) 2015-07-08
JP2007309314A (ja) 2007-11-29
DE102006022772A1 (de) 2007-11-22
EP1857681A2 (fr) 2007-11-21

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AS Assignment

Owner name: PFEIFFER VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:WAGNER, JUERGEN;REEL/FRAME:019342/0887

Effective date: 20070425

STCB Information on status: application discontinuation

Free format text: ABANDONED -- AFTER EXAMINER'S ANSWER OR BOARD OF APPEALS DECISION