US20070172983A1 - Three-dimensional package and method of making the same - Google Patents

Three-dimensional package and method of making the same Download PDF

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Publication number
US20070172983A1
US20070172983A1 US11645039 US64503906A US2007172983A1 US 20070172983 A1 US20070172983 A1 US 20070172983A1 US 11645039 US11645039 US 11645039 US 64503906 A US64503906 A US 64503906A US 2007172983 A1 US2007172983 A1 US 2007172983A1
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Prior art keywords
layer
conductive
wafer
hole
surface
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Abandoned
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US11645039
Inventor
Min-Lung Huang
Wei-Chung Wang
Po-Jen Cheng
Kuo-Chung Yee
Ching-Huei Su
Jian-Wen Lo
Chian-Chi Lin
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Advanced Semiconductor Engineering Inc
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Advanced Semiconductor Engineering Inc
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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76898Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657Stacked arrangements of devices
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06513Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06527Special adaptation of electrical connections, e.g. rewiring, engineering changes, pressure contacts, layout
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L51/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06541Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

The present invention relates to a three-dimensional package and a method of making the same. The three-dimensional package comprises a first wafer, at least one first hole, a first isolation layer, a first conductive layer, a first solder, a second wafer, at least one second hole, a second isolation layer, a second conductive layer, and a second solder. The first wafer has at least one first pad and a first protection layer exposing the first pad. The first hole penetrates the first wafer. The first isolation layer is disposed on the side wall of the first hole. The lower end of the first conductive layer extends below the surface of the first wafer. The first solder is disposed in the first hole, and is electrically connected to the first pad via the first conductive layer. The second wafer has at least one second pad and a second protection layer exposing the second pad. The second hole penetrates the second wafer. The second isolation layer is disposed on the side wall of the second hole. The lower end of the second conductive layer extends to below the surface of the second wafer and contacts the upper end of the first solder. The second solder is disposed in the second hole and is electrically connected to the second pad via the second conductive layer.

Description

    BACKGROUND OF THE INVENTION
  • [0001]
    1. Field of the Invention
  • [0002]
    The present invention relates to a package and a method of making the same, and more particularly to a three-dimensional package and a method of making the same.
  • [0003]
    2. Description of the Related Art
  • [0004]
    Referring to FIG. 1, it shows a schematic view of a three-dimensional package before reflow disclosed in U.S. Pat. No. 4,499,655. The conventional three-dimensional package 1 comprises a first unit 10 and a second unit 20. The first unit 10 comprises a first wafer 11, at least one first hole 12, a first conductive layer 13 and a first solder 14. The first wafer 11 has a first surface 111 and a second surface 112. The first surface 111 has at least one first pad (not shown) and a first protection layer 113 exposing the first pad. The first hole 12 penetrates the first wafer 11. The first conductive layer 13 is disposed on the side wall of the first hole 12 and covers the first pad and the first protection layer 113. The first solder 14 is disposed in the first hole 12 and is electrically connected to the first pad via the first conductive layer 13. The upper end of the first solder 14 extends above the first surface 111 of the first wafer 11, and the lower end extends below the second surface 112 of the first wafer 11.
  • [0005]
    The second unit 20 is stacked on the first unit 10. The second unit 20 comprises a second wafer 21, at least one second hole 22, a second conductive layer 23 and a second solder 24. The second wafer 21 has a first surface 211 and a second surface 212. The first surface 211 has at least one second pad (not shown) and a second protection layer 213 exposing the second pad. The second hole 22 penetrates the second wafer 21. The second conductive layer 23 is disposed on the side wall of the second hole 22 and covers the second pad and the second protection layer 213. The second solder 24 is disposed in the second hole 22 and is electrically connected to the second pad via the second conductive layer 23. The upper end of the second solder 24 extends above the first surface 211 of the second wafer 21, and the lower end of the second solder 24 extends below the second surface 212 of the second wafer 21. The lower end of the second solder 24 is aligned with and contacts the upper end of the first solder 14. After performing a reflow process, the first unit 10 and the second unit 20 are joined to form a conventional three-dimensional package 1, as shown in FIG. 2.
  • [0006]
    In the conventional three-dimensional package 1, the first solder 14 and the second solder 24 are formed by disposing the first wafer 11 and the second wafer 21 above a solder bath, and the solder enter the first hole 12 and the second hole 22 according to the capillary phenomenon so as to form the first solder 14 and the second solder 24.
  • [0007]
    The disadvantages of the conventional three-dimensional package 1 are described as follows. As the first solder 14 and the second solder 24 are formed according to the capillary phenomenon, the upper and the lower ends of the foregoing solders are in a hemispherical shape (FIG. 1). As such, when the first unit 10 and the second unit 20 are aligned and joined, alignment becomes more difficult and the joining between the first unit 10 and the second unit 20 after reflow is not stable. Moreover, after the joining of the first unit 10 and the second unit 20, the overall height cannot be effectively reduced due to the excess hemispherical solders.
  • [0008]
    Therefore, it is necessary to provide a three-dimensional package and a method of making the same to solve the above problems.
  • SUMMARY OF THE INVENTION
  • [0009]
    The main objective of the invention is to provide a method of making a three-dimensional package, which comprises the following steps:
  • [0010]
    (a) providing a wafer, having a first surface and a second surface, the first surface having at least one pad and a protection layer exposing the pad;
  • [0011]
    (b) forming at least one blind hole on the first surface of the wafer;
  • [0012]
    (c) forming an isolation layer on the side wall of the blind hole;
  • [0013]
    (d) forming a conductive layer covering the pad, the protection layer, and the isolation layer;
  • [0014]
    (e) forming a dry film on the conductive layer, wherein the dry film has an opening at the position corresponding to the blind hole;
  • [0015]
    (f) filling the blind hole with a solder;
  • [0016]
    (g) removing the dry film;
  • [0017]
    (h) patterning the conductive layer;
  • [0018]
    (i) removing a part of the second surface of the wafer and a part is of the isolation layer, so as to expose a part of the conductive layer;
  • [0019]
    (j) stacking a plurality of the wafers, so as to perform the reflow process; and
  • [0020]
    (k) cutting the stacked wafers, so as to form a plurality of three-dimensional packages.
  • [0021]
    As such, the lower end of the conductive layer is exposed below the second surface of the wafer. Therefore, during the reflow process after stacking, the lower end of the conductive layer is inserted into the solder of the lower wafer, so as to enhance the joint between the conductive layer and the solder, and effectively reduce the overall height of the three-dimensional package after joining.
  • [0022]
    Another objective of the present invention is to provide a three-dimensional package, which comprises a first unit and a second unit. The first unit comprises a first wafer, at least one first hole, a first isolation layer, a first conductive layer, and a first solder.
  • [0023]
    The first wafer has a first surface and a second surface. The first surface has at least one first pad and a first protection layer exposing the first pad. The first hole penetrates the first wafer. The first isolation layer is disposed on the side wall of the first hole. The first conductive layer covers the first pad, a part of the first protection layer, and the first isolation layer. The lower end of the first conductive layer extends below the second surface of the first wafer. The first solder is disposed in the first hole, and is electrically connected to the first pad via the first conductive layer.
  • [0024]
    The second unit is stacked on the first unit. The second unit comprises a second wafer, at least one second hole, a second isolation layer, a second conductive layer, and a second solder. The second wafer has a first surface and a second surface. The first surface has at least one second pad and a second protection layer exposing the second pad. The second hole penetrates the second wafer. The second isolation layer is disposed on the side wall of the second hole. The second conductive layer covers the second pad, a part of the second protection layer, and the second isolation layer. The lower end of the second conductive layer extends to below the second surface of the second wafer and contacts the upper end of the first solder. The second solder is disposed in the second hole and is electrically connected to the second pad via the second conductive layer.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • [0025]
    FIG. 1 shows a schematic view of the three-dimensional package before reflow disclosed in U.S. Pat. No. 4,499,655;
  • [0026]
    FIG. 2 shows a schematic view of the three-dimensional package after reflow disclosed in U.S. Pat. No. 4,499,655;
  • [0027]
    FIG. 3 shows a schematic flow chart of the method for making a three-dimensional package according to the first embodiment of the present invention;
  • [0028]
    FIGS. 4 to 17 show the schematic views of each step of the method of making a three-dimensional package according to the first embodiment of the present invention;
  • [0029]
    FIG. 18 shows a schematic flow chart of the method for making a three-dimensional package according to the second embodiment of the present invention;
  • [0030]
    FIGS. 19 to 21 show the schematic views of a part of the steps of the method for making a three-dimensional package according to the second embodiment of the present invention; and
  • [0031]
    FIG. 22 shows a cross-sectional view of the three-dimensional package according to the present invention.
  • DETAILED DESCRIPTION OF THE INVENTION
  • [0032]
    Referring to FIG. 3, it shows a schematic flow chart of the method for making a three-dimensional package according to the first embodiment of the present invention. Referring to FIGS. 4 to 17, the schematic views of each step of the method for making a three-dimensional package according to the first embodiment of the present invention are shown. First, referring to FIGS. 3 and 4, as shown in step S301, a wafer 31 is provided. The wafer 31 has a first surface 311 and a second surface 312. The first surface 311 has at least one pad 32 and a protection layer 33 exposing the pad 32.
  • [0033]
    Then, referring to FIGS. 3 and 5, as shown in step S302, at least one blind hole 34 is formed in the first surface 311 of the wafer 31. In the embodiment, the blind hole 34 is disposed beside the pad 32. However, in other applications, the blind hole 34 can penetrate the pad 32.
  • [0034]
    Next, referring to FIGS. 3 and 6, as shown in step S303, an isolation layer 35 is formed on the side wall of the blind hole 34.
  • [0035]
    Afterward, referring to FIGS. 3 and 7, as shown in step S304, a conductive layer 36 is formed to cover the pad 32, the protection layer 33, and the isolation layer 35. The conductive layer 36 is made of Ti, Cu, Cu/Ti alloy, or other metals.
  • [0036]
    Then, referring to FIGS. 3 and 8, as shown in step S305, a dry film 37 is formed on the conductive layer 36. The dry film 37 has an opening 371 at the position corresponding to the blind hole 34.
  • [0037]
    After that, referring to FIGS. 3 and 9, preferably, as shown in step S306, the blind hole 34 is filled with a solder 38. In the embodiment, the blind hole 34 is filled with the solder 38 by plating. However, it should be understood that the blind hole 34 can be filled with the solder 38 by other manners.
  • [0038]
    Then, referring to FIGS. 3 and 10, as shown in step S307, the dry film 37 is removed, and the conductive layer 36 is patterned.
  • [0039]
    Afterward, referring to FIGS. 3 and 11, preferably, as shown in step S308, a passivation layer 39 is formed on the conductive layer 36 to protect the patterned conductive layer 36. The passivation layer 39 can be formed by any conventional manners. Moreover, it should be understood that this step is optional.
  • [0040]
    Then, as shown in step S309, a part of the second surface 312 of the wafer 31 and a part of the isolation layer 35 are removed to expose a part of the conductive layer 36. Referring to FIG. 12, in the present embodiment, the second surface 312 of the wafer 31 is first ground by means of backside grinding until the second surface 312 and the lower end of the isolation layer 35 are at the same level, i.e., the lower end of the isolation layer 35 is exposed on the second surface 312. Then, the second surface 312 of the wafer 31 and the lower end of the isolation layer 35 are etched to expose the lower end of the conductive layer 36. At this moment, the lower end of the conductive layer 36 extends below the second surface 312 of the wafer 31, as shown in FIG. 13. However, it should be understood that in other applications, the second surface 312 of the wafer 31 can be directly etched to expose the lower end of the conductive layer 36, without using the backside grinding method.
  • [0041]
    Afterward, referring to FIGS. 3 and 14, preferably, as shown in step S310, a barrier layer 40 is formed on the lower end of the conductive layer 36, and covers the lower end of the exposed conductive layer 36. The barrier layer 40 is Ni, Cr, Cr/Cu alloy, or other metals. It should be understood that this step is optional. Moreover, preferably, a lower solder 41 is further formed below the barrier layer 40 or the conductive layer 36 and is attached to the barrier layer 40 or the lower end of the exposed conductive layer 36. It should be understood that this step is also optional.
  • [0042]
    Next, referring to FIGS. 3 and 15, as shown in step S311, a plurality of the wafers 31 are stacked. The conductive layers 36 and the solders 38 of the upper and lower wafers 31 are aligned with each other.
  • [0043]
    Then, referring to FIGS. 3 and 16, as shown in step S312, the reflow process is performed to make the wafers 31 joined by welding the conductive layer 36 and the solder 38.
  • [0044]
    Finally, referring to FIGS. 3 and 17, as shown in step S313, the stacked wafer 31 is cut to form a plurality of three-dimensional package structures 42. Preferably, as shown in step S314, at least one solder ball 43 is formed below the three-dimensional package structure 42. The solder ball 43 is disposed on the lower end of the conductive layer 36 in the lower wafer 31. It should be understood that this step is optional.
  • [0045]
    Referring to FIG. 18, it shows the schematic flow chart of the method for making a three-dimensional package structure according to the second embodiment of the present invention. The steps S401 to S410 are identical to the steps S301 to S310 of the first embodiment. The difference between the second embodiment and the first embodiment is described as follows. In the step S411 of the present embodiment, the wafer 31 is cut to form a plurality of units 44, 45, as shown in FIG. 19. Then, in step S412, the units 44, 45 are stacked, wherein the conductive layers 36 and the solders 38 of the upper and the lower wafers 31 are aligned with each other, as shown in FIG. 20. Finally, in step S413, the reflow process is performed to form a plurality of three-dimensional package structures 42, as shown in FIG. 21. The three-dimensional package structure 42 (FIG. 21) made according to this embodiment is identical to the three-dimensional package structure 42 (FIG. 17) made according to the first embodiment.
  • [0046]
    Preferably, in step S414, at least one solder ball 43 is formed below the three-dimensional package structure 42. The solder ball 43 is disposed on the lower end of the conductive layer 36 in the lower wafer 31. It should be understood that this step is optional.
  • [0047]
    Referring to FIG. 22, it shows a cross-sectional view of the three-dimensional package of the present invention. The three-dimensional package 5 in this figure is identical to the three-dimensional package 42 in FIGS. 17 and 21. However, for the convenience of illustration, the identical elements are designated by different reference numbers. The three-dimensional package 5 comprises a first unit 50 and a second unit 60. The first unit 50 comprises a first wafer 51, at least one first hole 52, a first isolation layer 53, a first conductive layer 54, and a first solder 55.
  • [0048]
    The first wafer 51 is a wafer or a chip, and has a first surface 511 and a second surface 512. The first surface 511 has at least one first pad 513 and a first protection layer 514 exposing the first pad 513. The first hole 52 penetrates the first wafer 51. In the present embodiment, the first hole 52 is disposed beside the first pad 513. However, in other applications, the first hole 52 can penetrate the first pad 513.
  • [0049]
    The first isolation layer 53 is disposed on the side wall of the first hole 52. The first conductive layer 54 covers the first pad 513, a part of the first protection layer 514, and the first isolation layer 53. The lower end of the first conductive layer 54 extends below the lower end of the second surface 512 of the first wafer 51. Preferably, the first unit 50 further comprises a first barrier layer (not shown) covering the lower end of the first conductive layer 54.
  • [0050]
    The first solder 55 is disposed inside the first hole 52, and is electrically connected to the first pad 513 via the first conductive layer 54. Preferably, a passivation layer (not shown) is further disposed above the first conductive layer 54 and covers the first conductive layer 54 to protect the first conductive layer 54.
  • [0051]
    The second unit 60 is stacked above the first unit 50. The second unit 60 comprises a second wafer 61, at least one second hole 62, a second isolation layer 63, a second conductive layer 64, and a second solder 65. The second wafer 61 is a wafer or a chip, and has a first surface 611 and a second surface 612. The first surface 611 has at least one second pad 613 and a second protection layer 614 exposing the second pad 613. The second hole 62 penetrates the second wafer 61. In the present embodiment, the second hole 62 is disposed beside the second pad 613. However, in other applications, the second hole 62 can penetrate the second pad 613.
  • [0052]
    The second isolation layer 63 is dispose on the side wall of the second hole 62. The second conductive layer 64 covers the second pad 613, a part of the second protection layer 614, and the second isolation layer 63. The lower end of the second conductive layer 64 extends below the second surface 612 of the second wafer 61 and contacts the upper end of the first solder 55. Preferably, the second unit 60 further comprises a second barrier layer (not shown) covering the lower end of the second conductive layer 64.
  • [0053]
    The second solder 65 is disposed inside the second hole 62 and is electrically connected to the second pad 613 via the second conductive layer 64. Preferably, a passivation layer (not shown) is disposed above the second conductive layer 64 and covers the second conductive layer 64 to protect the second conductive layer 64.
  • [0054]
    Preferably, the three-dimensional package structure 5 further comprises at least one solder ball 43 disposed on the lower end of the first conductive layer 54.
  • [0055]
    In the three-dimensional package structure 5, as the lower end of the second conductive layer 64 is exposed below the second surface 612 of the second unit 60, during the reflow process, the lower end of the second conductive layer 64 is inserted into the first solder 55, so as to enhance the joint between the second conductive layer 64 and the first solder 55. Further, the first hole 52 and the second hole 62 can be designed as a taper shape to enhance the foregoing joint. Moreover, the lower end of the second conductive layer 64 is inserted into the first solder 55, such that the overall height of the three-dimensional package 5 after joining can be effectively reduced.
  • [0056]
    While several embodiments of the present invention have been illustrated and described, various modifications and improvements can be made by those skilled in the art. The embodiments of the present invention are therefore described in an illustrative but not restrictive sense. It is intended that the present invention may not be limited to the particular forms as illustrated, and that all modifications which maintain the spirit and scope of the present invention are within the scope as defined in the appended claims.

Claims (8)

  1. 1. A three-dimensional package, comprising:
    a first unit, comprising:
    a first wafer, having a first surface and a second surface, the first surface having at least one first pad and a first protection layer exposing the first pad;
    at least one first hole, penetrating the first wafer;
    a first isolation layer, disposed on the side wall of the first hole;
    a first conductive layer, covering the first pad, a part of the first protection layer, and the first isolation layer, wherein the lower end of the first conductive layer extends below the second surface of the first wafer; and
    a first solder, disposed in the first hole and electrically connected to the first pad via the first conductive layer; and
    a second unit stacked on the first unit, comprising:
    a second wafer, having a first surface and a second surface, wherein the first surface has at least one second pad and a second protection layer exposing the second pad;
    at least one second hole penetrating the second wafer;
    a second isolation layer, disposed on the side wall of the second hole;
    a second conductive layer, covering the second pad, a part of the second protection layer, and the second isolation layer, wherein the lower end of the second conductive layer extends to below the second surface of the second wafer and contacts the upper end of the first solder, and
    a second solder, disposed in the second hole and electrically connected to the second pad via the second conductive layer.
  2. 2. The three-dimensional package according to claim 1, wherein the first hole penetrates the first pad.
  3. 3. The three-dimensional package according to claim 1, wherein the second hole penetrates the second pad.
  4. 4. The three-dimensional package according to claim 1, wherein the first unit further comprises a first passivation layer covering the first conductive layer.
  5. 5. The three-dimensional package according to claim 1, wherein the second unit further comprises a second passivation layer covering the second conductive layer.
  6. 6. The three-dimensional package according to claim 1, wherein the first unit further comprises a first barrier layer covering the lower end of the first conductive layer.
  7. 7. The three-dimensional package according to claim 1, wherein the second unit further comprises a second barrier layer covering the lower end of the second conductive layer.
  8. 8. The three-dimensional package according to claim 1, further comprising at least one solder ball disposed at the lower end of the first conductive layer.
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US20100072618A1 (en) * 2008-09-22 2010-03-25 Stats Chippac, Ltd. Semiconductor Device and Method of Forming a Wafer Level Package with Bump Interconnection
US20100072599A1 (en) * 2008-09-22 2010-03-25 Stats Chippac, Ltd. Semiconductor Device and Method of Forming a Wafer Level Package with Top and Bottom Solder Bump Interconnection
US20100320591A1 (en) * 2009-06-19 2010-12-23 Zigmund Ramirez Camacho Integrated circuit packaging system with contact pads and method of manufacture thereof
US8940636B2 (en) 2008-03-27 2015-01-27 STATS ChipPAC, Ltc. Through hole vias at saw streets including protrusions or recesses for interconnection

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KR100871382B1 (en) * 2007-06-26 2008-12-02 주식회사 하이닉스반도체 Through silicon via stack package and method for manufacturing of the same
US20090051046A1 (en) * 2007-08-24 2009-02-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method for the same
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US20100320591A1 (en) * 2009-06-19 2010-12-23 Zigmund Ramirez Camacho Integrated circuit packaging system with contact pads and method of manufacture thereof

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