US20060141911A1 - Device for the abrasive machining of surfaces of elements and in particular optical elements or workpieces - Google Patents
Device for the abrasive machining of surfaces of elements and in particular optical elements or workpieces Download PDFInfo
- Publication number
- US20060141911A1 US20060141911A1 US10/527,468 US52746805A US2006141911A1 US 20060141911 A1 US20060141911 A1 US 20060141911A1 US 52746805 A US52746805 A US 52746805A US 2006141911 A1 US2006141911 A1 US 2006141911A1
- Authority
- US
- United States
- Prior art keywords
- tool
- outlet
- inlet
- machining
- machined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/116—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
Definitions
- the invention relates to a device for abrasive machining of surfaces of components, particularly optical components or work pieces.
- abrasively machining surfaces as is necessary for example for the manufacture of optical components such as lenses, prisms, plane parallel plates etc, but also of molds for casting or molding optical components,.
- a surface to be machined is first subjected to a grinding operation, and possibly also to a fine grinding operation using contacting tools such as, for example, disk-wheel grinders, spherical grinders etc., and subsequently to a polishing operation using a polishing tool.
- contacting tools such as, for example, disk-wheel grinders, spherical grinders etc.
- polishing operation using a polishing tool.
- Most machining operations in which relatively much material is removed require a final polishing of the surface, at least when optical surfaces are to be produced.
- the polishing of spherical surfaces is performed in prior art on a large surface using a polishing disk.
- the invention is based on the object of providing a device for abrasive machining of surfaces, and particularly for grinding and/or polishing of surfaces of optical components, which permits fast machining of the surface irrespective of the shape of the particular surface being machined.
- the device for abrasive machining of surfaces and particularly for grinding and/or polishing optical components comprises a tool having a fluid inlet and a fluid outlet.
- a supply unit conveys a liquid in which abrasive agents are dissolved to the fluid inlet. This liquid flows through the tool to an outlet from which it emerges from the tool.
- this tool is positioned by a positioning means in such manner relative to the surface to be machined that the outlet from which the liquid emerges faces the surface to be machined, in particular with a small intervening space.
- the area of the annular gap defined between the boundary walls of the outlet and the surface to be machined be smaller than the cross-sectional area of the inlet.
- the liquid in which abrasive agents are dissolved emerges from the annular gap along the radial direction of the tool under a pressure which is substantially higher than the pressure under which it flows into the inlet.
- the machining of the surface of the work piece is performed by the liquid flowing out in the radial direction.
- the surface in the region of the annular gap is thus machined so as to be linearly ground or polished in accordance with the kind of abrasive agents dissolved in the, liquid. Because of the linear working, the machining time is shortened by some orders of magnitude when compared with that of known methods or devices in which there is a substantially point-shaped engagement between the tool and the work piece.
- the ratio of the pressure under which the liquid flows into the tool to the pressure under which the liquid emerges from the annular gap is inversely proportional portional to the ratio of the cross-sectional area of the inlet to the cross-sectional area of the formed annular gap.
- the “processing pressure” can be set by the positioning of the tool relative to the work piece—in other words, by an adjustment of the height of the annular gap—without the pressure under which the supply unit conveys the liquid having to be changed.
- the supply unit can convey the liquid at a pressure of less than 20 bar, preferably less than 5bar, and possibly even at only atmospheric pressure.
- the cross-sectional area of the inlet is preferred for the cross-sectional area of the inlet to be greater than the cross-sectional area of the formed annular gap by a factor of at least 5. With this it is furthermore preferred for the height of the formed annular gap to be smaller than 3 mm and, in particular, about 1 mm.
- the positioning means prefferably have a control unit for controlling the positioning of the tool according to the surface data of the surface to be produced.
- the positioning of the tool it is preferred for the positioning of the tool to be so effected that the height of the annular gap remains constant during a shift along respective tracks.
- the positioning device can shift the tool relative to the work piece, i.e. to the surface to be machined, along any tracks.
- the track may be a meandering track, with either the tool or the work piece or both being moved.
- the tool and the component of which a surface is to be machined can be simultaneously shifted.
- the outlet In order to effect a homogeneous machining of the surface along the annular gap it is furthermore preferred for the outlet to have a circular cross-section, and for the tool to have an outside contour in the shape of a (regular) cylinder at least in the region of the outlet.
- a machining of the surface occurring only linearly (or circularly) in the region of the annular gap, and not also at the center of the outlet, is achieved by the cross-sectional area of the inlet being smaller than that of the outlet.
- the size of the tool to be conformed to the shape of the surface to be machined:
- the outer diameter of the tool in the region of the outlet may be of the order of magnitude of one half of the aperture of an optical component, so that a very fast machining of the surface is achieved with the greatest possible homogeneity of the machining operation.
- the outer diameter of the tool is preferably of the order of magnitude of the smallest radius (smallest principal radius of curvature) of the surface; hereby it is ensured that the height of the annular gap is practically constant along the entire formed annular gap.
- the device of the invention can be used for machining any surfaces of components or work pieces which in principle may be of any material.
- the device of the invention can be used for machining steel turbine blades.
- the work pieces concerned may be of quartz, optical glass or synthetic material; if molds are to be produced for the casting and/or molding etc. of optical components, the work pieces may also be of a metal such as steel or a ceramic material.
- abrasion depends substantially not on the design of the tool, but on the kind of liquid or abrasive agent(s) dissolved in the liquid used, one and the same device may be used successively for grinding, possibly fine grinding, and finally for polishing a component or work piece in one and the same mount.
- a change between the individual kinds of machining then necessitates merely a replacement or exchange of the working fluids used in each case.
- the device of the invention it is especially preferred for the device of the invention to used for machining a spherical surfaces.
- FIG. 1 is a device according to the invention, used in machining a plane surface
- FIG. 2 is a device according to the invention, used in machining a curved surface, and particularly an a spherical surface.
- FIG. 1 illustrates a device according to the invention, of which only a tool 1 is shown, used in machining a plane surface 21 of a work piece 2 which, without limitation of the generality, is a plane parallel plate.
- the tool 1 has an inlet 11 , and an outlet 12 having a cross-sectional area which is greater than that of the inlet 11 .
- a not shown supply unit conveys a liquid in which abrasive agents such as grinding agents or polishing agents are dissolved into the inlet 11 of the tool 1 .
- the tool 1 is positioned by a not shown positioning unit in such manner relative to the work piece 2 that between the boundary walls 13 of the outlet 12 and the surface 21 an annular gap 3 is formed, the cross-sectional area of which is smaller and preferably substantially smaller than the cross-sectional area of the inlet 11 .
- the pressure with which the liquid emerges from the annular gap 3 is increase in the ratio of the cross-sectional areas of the inlet 11 and the annular gap 3 .
- the pressure which is effective for the machining of the work piece surface 21 is thus substantially greater than the delivery pressure.
- the not shown positioning means shifts the tool 1 parallel to the surface of the work piece 2 , whilst an also not shown rotary unit rotates the work piece 2 about an axis 22 , so that the line-shaped engagement along the annular gap 3 is shifted across the work piece 2 in such manner that the entire surface 21 is uniformly machined, for example polished.
- the diameter of the tool 1 is of the order of magnitude of the radius of the work piece 2 .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/931,552 US20080119113A1 (en) | 2001-03-20 | 2007-10-31 | Method for machining surfaces |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10113599A DE10113599A1 (de) | 2001-03-20 | 2001-03-20 | Vorrichtung zur abrasiven Bearbeitung von Flächen von optischen Elementen |
DE10113599.8 | 2001-03-20 | ||
PCT/EP2002/003120 WO2002074489A1 (de) | 2001-03-20 | 2002-03-20 | Vorrichtung zur abrasiven bearbeitung von flächen von elementen und insbesondere von optischen elementen bzw. werkstücken |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/931,552 Division US20080119113A1 (en) | 2001-03-20 | 2007-10-31 | Method for machining surfaces |
Publications (1)
Publication Number | Publication Date |
---|---|
US20060141911A1 true US20060141911A1 (en) | 2006-06-29 |
Family
ID=7678280
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/527,468 Abandoned US20060141911A1 (en) | 2001-03-20 | 2002-03-20 | Device for the abrasive machining of surfaces of elements and in particular optical elements or workpieces |
US11/931,552 Abandoned US20080119113A1 (en) | 2001-03-20 | 2007-10-31 | Method for machining surfaces |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/931,552 Abandoned US20080119113A1 (en) | 2001-03-20 | 2007-10-31 | Method for machining surfaces |
Country Status (4)
Country | Link |
---|---|
US (2) | US20060141911A1 (de) |
EP (1) | EP1409199B1 (de) |
DE (2) | DE10113599A1 (de) |
WO (1) | WO2002074489A1 (de) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080248729A1 (en) * | 2007-04-04 | 2008-10-09 | Fisba Optik Ag | Method and Apparatus for Manufacturing Optical Elements |
CN102284911A (zh) * | 2011-07-22 | 2011-12-21 | 中国科学院长春光学精密机械与物理研究所 | 一种长程抛光稳定间隙装置 |
KR101226757B1 (ko) * | 2003-07-18 | 2013-01-25 | 유니버시다드 나시오날 오토노마 드 멕시코 | 광학 표면 및 반도체 표면을 조연마 및 미세 연마하기 위한유체역학적 방사상 유속 툴 |
CN103128671A (zh) * | 2013-02-05 | 2013-06-05 | 浙江工业大学 | 硬脆材料复杂曲面零件的约束磨粒流抛光加工装置 |
CN103128672A (zh) * | 2013-02-05 | 2013-06-05 | 浙江工业大学 | 一种约束磨粒流抛光工具头 |
CN103128673A (zh) * | 2013-02-05 | 2013-06-05 | 浙江工业大学 | 硬脆材料的约束磨粒流抛光工具头 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1022293C2 (nl) | 2002-12-31 | 2004-07-15 | Tno | Inrichting en werkwijze voor het vervaardigen of bewerken van optische elementen en/of optische vormelementen, alsmede dergelijke elementen. |
DE10314625B3 (de) * | 2003-04-01 | 2004-10-14 | Optotech Optikmaschinen Gmbh | Verfahren und Vorrichtung zum Nacharbeiten von Präzisionsoberflächen |
WO2005063441A1 (de) * | 2003-12-23 | 2005-07-14 | C. Hilzinger-Thum | Verfahren und vorrichtung zur oberflächenrevision |
NL1026526C2 (nl) * | 2004-06-30 | 2005-05-31 | Tno | Inrichting en werkwijze voor het vervaardigen of bewerken van optische elementen en/of optische vormelementen, alsmede dergelijke elementen. |
EP1618993B9 (de) * | 2004-07-22 | 2009-03-18 | Fisba Optik Ag | Verfahren zum Schleifen und/oder Polieren von Oberflächen |
EP1618992B1 (de) * | 2004-07-22 | 2008-10-15 | Fisba Optik Ag | Vorrichtung und Verfahren zum Schleifen und/oder Polieren von Oberflächen |
GB2471119B (en) * | 2009-06-17 | 2013-11-27 | Nebb Technology As | Rotor or stator blade and method for forming such rotor or stator blade |
DE102009033206A1 (de) | 2009-07-15 | 2011-01-27 | Brand, Guido | Polierverfahren und Poliervorrichtung zur Korrektur von geometrischen Abweichungsfehlern auf Präzisionsoberflächen |
CN105234825A (zh) * | 2015-09-25 | 2016-01-13 | 安庆市凯立金刚石科技有限公司 | 一种用于金刚石膜射流抛光装置 |
DE102015224933A1 (de) | 2015-12-11 | 2017-06-14 | Siltronic Ag | Monokristalline Halbleiterscheibe und Verfahren zur Herstellung einer Halbleiterscheibe |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3769762A (en) * | 1972-03-07 | 1973-11-06 | Altair Scient Inc | Method for controlled lapping of optical surfaces to correct deviations from desired contours |
US4038786A (en) * | 1974-09-27 | 1977-08-02 | Lockheed Aircraft Corporation | Sandblasting with pellets of material capable of sublimation |
US4956944A (en) * | 1987-03-19 | 1990-09-18 | Canon Kabushiki Kaisha | Polishing apparatus |
US5700181A (en) * | 1993-09-24 | 1997-12-23 | Eastman Kodak Company | Abrasive-liquid polishing and compensating nozzle |
US5759086A (en) * | 1994-11-04 | 1998-06-02 | Trumpf Gmbh & Co. | Method and machine tool for cutting workpieces |
US6093088A (en) * | 1998-06-30 | 2000-07-25 | Nec Corporation | Surface polishing machine |
US6244927B1 (en) * | 1998-08-31 | 2001-06-12 | Ingersoll-Rand Company | Multi-functional sensing methods and apparatus therefor |
US6280302B1 (en) * | 1999-03-24 | 2001-08-28 | Flow International Corporation | Method and apparatus for fluid jet formation |
US6425804B1 (en) * | 2000-03-21 | 2002-07-30 | Hewlett-Packard Company | Pressurized delivery system for abrasive particulate material |
US6643882B1 (en) * | 1999-06-17 | 2003-11-11 | Ebara Corporation | Substrate cleaning apparatus |
US6769956B1 (en) * | 2002-02-04 | 2004-08-03 | Oberg Industries | Apparatus and method for rapid, precise positioning of a grit-blasting nozzle |
US7008293B2 (en) * | 2001-09-11 | 2006-03-07 | Olympus Optical Co., Ltd. | Positioning jig, spray polishing device using positioning jig and spray polishing method |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5531634A (en) * | 1995-02-03 | 1996-07-02 | Schott; Paul | Method of using an abrasive material for blast cleaning of solid surfaces |
US5573446A (en) * | 1995-02-16 | 1996-11-12 | Eastman Kodak Company | Abrasive air spray shaping of optical surfaces |
DE19747838C2 (de) * | 1997-10-19 | 2001-07-12 | Gp Granulate Pneumatic Geraete | Verfahren und Vorrichtung zum trockenen Entfernen von Beschichtungen, Graffiti oder sonstigen oberflächlichen Verunreinigungen |
NL1007589C1 (nl) * | 1997-11-20 | 1999-05-25 | Tno | Werkwijze en inrichting voor het bewerken van een werkstuk. |
US6306010B1 (en) * | 1999-10-26 | 2001-10-23 | Industrial Gasket, Inc. | Method of forming a hole in a glass reflector |
-
2001
- 2001-03-20 DE DE10113599A patent/DE10113599A1/de not_active Withdrawn
-
2002
- 2002-03-20 DE DE50208850T patent/DE50208850D1/de not_active Expired - Lifetime
- 2002-03-20 US US10/527,468 patent/US20060141911A1/en not_active Abandoned
- 2002-03-20 WO PCT/EP2002/003120 patent/WO2002074489A1/de active IP Right Grant
- 2002-03-20 EP EP02716837A patent/EP1409199B1/de not_active Expired - Lifetime
-
2007
- 2007-10-31 US US11/931,552 patent/US20080119113A1/en not_active Abandoned
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3769762A (en) * | 1972-03-07 | 1973-11-06 | Altair Scient Inc | Method for controlled lapping of optical surfaces to correct deviations from desired contours |
US4038786A (en) * | 1974-09-27 | 1977-08-02 | Lockheed Aircraft Corporation | Sandblasting with pellets of material capable of sublimation |
US4956944A (en) * | 1987-03-19 | 1990-09-18 | Canon Kabushiki Kaisha | Polishing apparatus |
US5700181A (en) * | 1993-09-24 | 1997-12-23 | Eastman Kodak Company | Abrasive-liquid polishing and compensating nozzle |
US5759086A (en) * | 1994-11-04 | 1998-06-02 | Trumpf Gmbh & Co. | Method and machine tool for cutting workpieces |
US6093088A (en) * | 1998-06-30 | 2000-07-25 | Nec Corporation | Surface polishing machine |
US6244927B1 (en) * | 1998-08-31 | 2001-06-12 | Ingersoll-Rand Company | Multi-functional sensing methods and apparatus therefor |
US6280302B1 (en) * | 1999-03-24 | 2001-08-28 | Flow International Corporation | Method and apparatus for fluid jet formation |
US6643882B1 (en) * | 1999-06-17 | 2003-11-11 | Ebara Corporation | Substrate cleaning apparatus |
US6425804B1 (en) * | 2000-03-21 | 2002-07-30 | Hewlett-Packard Company | Pressurized delivery system for abrasive particulate material |
US7008293B2 (en) * | 2001-09-11 | 2006-03-07 | Olympus Optical Co., Ltd. | Positioning jig, spray polishing device using positioning jig and spray polishing method |
US6769956B1 (en) * | 2002-02-04 | 2004-08-03 | Oberg Industries | Apparatus and method for rapid, precise positioning of a grit-blasting nozzle |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101226757B1 (ko) * | 2003-07-18 | 2013-01-25 | 유니버시다드 나시오날 오토노마 드 멕시코 | 광학 표면 및 반도체 표면을 조연마 및 미세 연마하기 위한유체역학적 방사상 유속 툴 |
US20080248729A1 (en) * | 2007-04-04 | 2008-10-09 | Fisba Optik Ag | Method and Apparatus for Manufacturing Optical Elements |
US7987015B2 (en) * | 2007-04-04 | 2011-07-26 | Fisba Optik Ag | Method and apparatus for manufacturing optical elements |
CN102284911A (zh) * | 2011-07-22 | 2011-12-21 | 中国科学院长春光学精密机械与物理研究所 | 一种长程抛光稳定间隙装置 |
CN103128671A (zh) * | 2013-02-05 | 2013-06-05 | 浙江工业大学 | 硬脆材料复杂曲面零件的约束磨粒流抛光加工装置 |
CN103128672A (zh) * | 2013-02-05 | 2013-06-05 | 浙江工业大学 | 一种约束磨粒流抛光工具头 |
CN103128673A (zh) * | 2013-02-05 | 2013-06-05 | 浙江工业大学 | 硬脆材料的约束磨粒流抛光工具头 |
Also Published As
Publication number | Publication date |
---|---|
EP1409199A1 (de) | 2004-04-21 |
WO2002074489A1 (de) | 2002-09-26 |
EP1409199B1 (de) | 2006-11-29 |
DE50208850D1 (de) | 2007-01-11 |
US20080119113A1 (en) | 2008-05-22 |
DE10113599A1 (de) | 2002-10-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |