US20050265862A1 - Pump - Google Patents

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Publication number
US20050265862A1
US20050265862A1 US11/142,759 US14275905A US2005265862A1 US 20050265862 A1 US20050265862 A1 US 20050265862A1 US 14275905 A US14275905 A US 14275905A US 2005265862 A1 US2005265862 A1 US 2005265862A1
Authority
US
United States
Prior art keywords
volume
seal member
changing body
diaphragm
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/142,759
Other languages
English (en)
Inventor
Shinya Yamamoto
Makoto Yoshikawa
Takao Mishina
Mamoru Kuwahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Assigned to KABUSHIKI KAISHA TOYOTA JIDOSHOKKI reassignment KABUSHIKI KAISHA TOYOTA JIDOSHOKKI ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KUWAHARA, MAMORU, MISHINA, TAKAO, YAMAMOTO, SHINYA, YOSHIKAWA, MAKOTO
Publication of US20050265862A1 publication Critical patent/US20050265862A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0036—Special features the flexible member being formed as an O-ring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F04B43/009—Special features systems, control, safety measures leakage control; pump systems with two flexible members; between the actuating element and the pumped fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/027—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/045—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like pumping flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/16—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by adjusting the capacity of dead spaces of working chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/50—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall
    • F16J15/52—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall by means of sealing bellows or diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2240/00—Components
    • F05B2240/57—Seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00—Function
    • F05B2260/60—Fluid transfer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/908—Seal for use in rotating and reciprocating arrangement
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Definitions

  • the present invention relates to a pump that performs a pumping action by the deformation of a volume-changing body such as a diaphragm thereof.
  • a clean room in which a semiconductor manufacturing equipment is placed is equipped with a pump. According to a pumping action of the pump, the pump draws air from the inside of the clean room to pass through a filter and returns the filtered air into the clean room.
  • a diaphragm pump of prior art discloses a diaphragm pump of prior art.
  • FIG. 4 shows the diaphragm pump according to the prior art.
  • the diaphragm pump includes a diaphragm case 103 and a diaphragm 102 and a piston 104 .
  • the diaphragm 102 is accommodated in the diaphragm case 103 for defining a pump chamber 101 .
  • the piston 104 is connected to the diaphragm 102 and supported by a cylinder 103 a provided in the diaphragm case 103 .
  • the piston 104 is reciprocated to deform (displace) the diaphragm 102 thereby changing the volume of the pump chamber, so that the pump performs a pumping action to draw air into the pump chamber 101 and discharge the air out of the pump chamber 101 .
  • a space that is located on the side of the diaphragm 102 opposite to the pump chamber 101 is continuously in communication with a sliding region S between the piston 104 and the cylinder 103 a.
  • lubricant such as grease and lubricating oil that is flowed from the sliding region S to the above space easily reaches the diaphragm 102 . If the diaphragm 102 is broken (torn or ruptured) due to its degradation, the lubricant may flow into the pump chamber 101 through the breakage part and be sent into the clean room.
  • the present invention is directed to a pump that prevents lubricant from flowing into a pump chamber even when a volume-changing body is broken.
  • a pump includes a unit case, a volume-changing body, a support portion, a driver and a seal member.
  • the volume-changing body is accommodated in the unit case for defining a pump chamber.
  • the support portion is provided in the unit case.
  • the driver is connected to the volume-changing body and slidably supported by the support portion. The driver is reciprocated to deform the volume-changing body thereby changing a volume of the pump chamber to perform a pumping action.
  • the seal member is provided between the unit case and the driver for preventing lubricant from leaking from a sliding region between the driver and the support portion to the volume-changing body.
  • the present invention also provides a pump including a first volume-changing body and a second volume-changing body.
  • the first volume-changing body is in the form of a diaphragm or a bellows.
  • the first volume-changing body is deformed thereby performing a pumping action.
  • the second volume-changing body is in the form of a diaphragm or a bellows.
  • the second volume-changing body is placed adjacent to the first volume-changing body.
  • the second volume-changing body is deformed for backup of the pumping action when the first volume-changing body is broken to malfunction, thereby continuously performing the pumping action.
  • FIG. 1 is a longitudinal cross-sectional view of a diaphragm pump of a first preferred embodiment according to the present invention
  • FIG. 2 is a longitudinal cross-sectional view of a diaphragm pump of a second preferred embodiment according to the present invention
  • FIG. 3 is a longitudinal cross-sectional view of a diaphragm pump of a third preferred embodiment according to the present invention.
  • FIG. 4 is a longitudinal cross-sectional view of a diaphragm pump according to prior art.
  • FIG. 1 shows a longitudinal cross-sectional view of the diaphragm pump (referred to merely as “pump” hereinafter).
  • the pump includes a diaphragm case 10 as a unit case, a diaphragm (volume-changing body) 14 supported by the diaphragm case 10 , a drive source 30 such as an electric motor, and a power transmission mechanism 31 (e.g. a mechanism that converts rotation of an electric motor into reciprocating movement) that connects the diaphragm 14 to the drive source 30 .
  • the power transmission mechanism 31 includes a driver 24 that is supported by the diaphragm case 10 and connected to the diaphragm 14 .
  • the driver 24 of the power transmission mechanism 31 is reciprocated to elastically deform (displace) the diaphragm 14 , so that the pump performs a pumping action.
  • air a fluid
  • a filter not shown
  • the diaphragm case 10 includes a first block 11 , a second block 12 fixedly joined to the first block 11 , and a body case 13 in which the first and second blocks 11 , 12 , and the diaphragm 14 are accommodated.
  • the body case 13 is formed in a cylindrical shape and has an end portion 13 a located on one end thereof (an upper end in FIG. 1 ).
  • the first and second blocks 11 , 12 are arranged in the body case 13 such that the first block 11 is located adjacent to the end portion 13 a.
  • the diaphragm 14 is made of a metal and has a disc shape with a uniform thickness.
  • the diaphragm 14 is flexible as is generally known.
  • the diaphragm 14 is fixed to the diaphragm case 10 with annular region of the outer peripheral portion thereof held between the first and second blocks 11 , 12 .
  • the first block 11 has a substantially mortar-shaped (cone-shaped) recess 11 a in the end face thereof adjacent to the second block 12 .
  • the opening of recess 11 a is closed by the diaphragm 14 , thus the enclosed internal space of the recess 11 a, thereby defining a pump chamber 15 .
  • the body case 13 (the end portion 13 a ) of the diaphragm case 10 has a suction passage 17 to which an external low-pressure piping (not shown) is connected, and a discharge passage 18 to which an external high-pressure piping (not shown) is connected.
  • the first block 11 has a suction port 25 that interconnects the pump chamber 15 and the suction passage 17 , and a discharge port 26 that interconnects the pump chamber 15 and the discharge passage 18 .
  • a suction valve 21 or a reed valve is provided between the suction port 25 in the first block 11 and the suction passage 17 in the body case 13 (the end portion 13 a ).
  • a discharge valve 22 or a reed valve is provided between the discharge port 26 in the first block 11 and the discharge passage 18 in the body case 13 (the end portion 13 a ).
  • the second block 12 has a cylinder (a cylindrical inner surface) 12 a as a support portion at the center thereof.
  • the second block 12 has a recess 12 b that has a circular cross section and is connected to the cylinder 12 a at the center portion of the end face thereof adjacent to the first block 11 .
  • the driver 24 includes a rod 41 connected to the drive source 30 , a piston 40 connected to the end (the upper end in FIG. 1 ) of the rod 41 , and a coupler 46 that connects the piston 40 to the center of the diaphragm 14 .
  • the piston 40 is inserted into the cylinder 12 a so that the piston 40 is slidably supported thereby.
  • the coupler 46 includes a disc-shaped first support member 47 located in the pump chamber 15 , and a disc-shaped second support member (coupling member) 48 that is located outside the pump chamber 15 and is fixedly joined to the end of the piston 40 .
  • the center portion of the diaphragm 14 is held between the first and second support members 47 , 48 .
  • the piston 40 is reciprocated along the longitudinal axis thereof (the vertical direction as seen in FIG. 1 ) by the operation of the drive source 30 with contacting the outer peripheral surface 40 b thereof to the cylinder 12 a.
  • the diaphragm 14 is deformed (displaced), thereby changing the volume of the pump chamber 15 .
  • lubricant having fluidity during the operation of the pump such as grease and lubricating oil
  • the lubricant may be flowed from the sliding region S toward the diaphragm 14 by the reciprocating movement of the piston 40 .
  • a seal member 50 is provided between the diaphragm case 10 and the driver 24 in detail, between the outer circumference of the recess 12 b and the driver 24 for preventing the lubricant, which is flowed from the sliding region S toward the diaphragm 14 , from reaching the diaphragm 14 .
  • the seal member 50 is accommodated in the recess 12 b of the second block 12 .
  • the seal member 50 is a disc-shaped diaphragm made of rubber. That is, the seal member 50 is a planar flexible body (elastic body).
  • the seal member 50 has a through hole 50 a through which the driver 24 is inserted at the center thereof.
  • a tension plate 51 is accommodated in the recess 12 b of the second block 12 .
  • the tension plate 51 is fixedly joined to the second block 12 (more specifically, a radially outer portion of the inner bottom surface of the recess 12 b ) by fixing means such as bolt (not shown).
  • An outer peripheral portion 50 c as a fixed end of the seal member 50 is fixed to the second block 12 , that is, to the diaphragm case 10 in such a manner that the outer peripheral portion 50 c is held at its annular region between the second block 12 and the tension plate 51 .
  • An inner peripheral portion 50 b as a movable end of the seal member 50 is also fixed to the driver 24 in such a manner that the inner peripheral portion 50 b is held at its annular region between the end surface 40 a of the piston 40 and the second support member 48 .
  • the lubricant that is flowed from the sliding region S toward the diaphragm 14 is prevented from leaking from the side of the lower surface of the seal member 50 to the side of the upper surface thereof via the inner peripheral portion 50 b.
  • the seal member 50 Since the seal member 50 is fixed to the diaphragm case 10 at the outer peripheral portion 50 c thereof and to the driver 24 at the inner peripheral portion 50 b thereof as described above, the seal member 50 is elastically deformed in accordance with the reciprocating movement of the piston 40 in such a manner that the inner peripheral portion 50 b is displaced relative to the outer peripheral portion 50 c in the direction of the longitudinal axis of the piston 40 (the vertical direction in FIG. 1 ). Namely, the seal member 50 is deformable, that is, in the form of a diaphragm.
  • the seal member 50 serves to prevent the lubricant from leaking from the sliding region S to the diaphragm 14 .
  • the elastic coefficient of the seal member 50 is set smaller than that of the diaphragm 14 .
  • the seal member 50 is provided between the diaphragm case 10 and the driver 24 for preventing the lubricant from leaking from the sliding region S between the piston 40 and the cylinder 12 a to the diaphragm (volume-changing body) 14 .
  • the seal member 50 is arranged in such a position so as to prevent the communication between the sliding region S and the space that is located on the side of the diaphragm 14 opposite to the pump chamber 15 . Therefore, if the diaphragm (volume-changing body) 14 is broken (torn or ruptured), the lubricant is prevented from flowing into the pump chamber 15 and is not sent into the clean room into which the air (the fluid) is supplied.
  • the seal member 50 is deformable in such a manner that the inner peripheral portion (movable end) 50 b is displaced relative to the outer peripheral portion (fixed end) 50 c. Also, the seal member 50 is fixed to the diaphragm case 10 at the outer peripheral portion (fixed end) 50 c and to the driver 24 at the inner peripheral portion (movable end) 50 b.
  • a seal member e.g. O-ring
  • the lubricant is reliably prevented from leaking from the sliding region S to the diaphragm (volume-changing body) 14 .
  • the inner peripheral portion (movable end) 50 b of the seal member 50 is held between the piston 40 and the second support member (a coupling member) 48 . Namely, with fixedly joining of the piston 40 and the second support member (the coupling member) 48 , the inner peripheral portion (movable end) 50 b of the seal member 50 is fixed to the driver 24 . Thus, assembling of the pump is made easier in comparison with the case when the inner peripheral portion (movable end) 50 b of the seal member 50 is fixed to the driver 24 with dedicated fixing means.
  • the elastic coefficient of the seal member 50 is set smaller than that of the diaphragm (volume-changing body) 14 .
  • excessive load is not applied to the seal member 50 during the operation of the pump, that is, during the reciprocating movement of the driver 24 .
  • the seal member 50 is prevented from being broken earlier than the diaphragm (volume-changing body) 14 , and the durability thereof is increased. Since the seal member 50 is located outside the pump chamber 15 , the internal pressure of the pump chamber 15 is not applied to the seal member 50 , which is one of factors that the durability of the seal member 50 is increased.
  • the seal member 50 or a diaphragm serves to function as a volume-changing body (a second volume-changing body), that is, functions to change the volume of the pump chamber 15 for backup when the diaphragm 14 is broken to malfunction.
  • the provision of the seal member 50 enables the pump to continuously perform the satisfactory pumping action even after the diaphragm 14 is broken to malfunction (5-1).
  • the inner peripheral portion 50 b of the seal member 50 is held between the piston 40 and the second support member 48 as described above, that is, the seal member 50 is placed adjacent to the diaphragm 14 , thereby leading to the reduction in the minimum volume of the pump chamber 15 after the diaphragm 14 is broken to malfunction.
  • this position of the seal member 50 is effective in that the pump continues to perform the satisfactory pumping action (5-2).
  • FIG. 2 shows a pump of the second preferred embodiment.
  • the differences from the pump of the first preferred embodiment will be described.
  • Like or same elements are referred to by the same reference numerals as those which have been used in describing the pump of the first preferred embodiment, and the description thereof is not reiterated.
  • the pump of the second preferred embodiment differs from the pump of the first preferred embodiment in that the seal member 50 and the tension plate 51 are removed, and also that a seal member 60 is provided.
  • the seal member 60 is a rubber bellows, that is, an accordion elastic body having a substantially cylinder shape.
  • the seal member 60 is located in the recess 12 b of the second block 12 in such a position so as to surround the opening of the cylinder 12 a.
  • Annular region of a first end or a fixed end 60 a (a lower end in FIG. 2 or an end on a side opposite to the diaphragm 14 ) of the seal member 60 is fixedly joined to the second block 12 (more specifically the radially inner of the bottom surface of the recess 12 b ), that is, to the diaphragm case 10 by fixing means (not shown) such as adhesive.
  • fixing means such as adhesive.
  • Annular region of a second end or a movable end 60 b (an upper end in FIG. 2 or an end adjacent to the diaphragm 14 ) of the seal member 60 is fixedly joined to the end surface the second support member 48 adjacent to the second block 12 , that is, to the driver 24 by fixing means (not shown) such as adhesive.
  • fixing means such as adhesive.
  • the seal member 60 Since the seal member 60 is fixed to the diaphragm case 10 at the first end 60 a and to the driver 24 at the second end 60 b, the seal member 60 is elastically deformed in accordance with the reciprocating movement of the piston 40 in such a manner that the second end 60 b is displaced relative to the first end 60 a in the direction of the longitudinal axis of the piston 40 . Since the seal member 60 is deformable, that is, a bellows, even though the seal member 60 is fixed to the diaphragm case 10 at the first end 60 a and to the driver 24 at the second end 60 b, the seal member 60 serves to prevent the lubricant from leaking from the sliding region S to the diaphragm 14 .
  • the elastic coefficient of the seal member 60 is set smaller than that of the diaphragm 14 .
  • the seal member 60 that is the bellows serves to function as a volume-changing body (a second volume-changing body) for backup when the diaphragm (volume-changing body) 14 is broken to malfunction. Namely, the provision of the seal member 60 enables the pump to continuously perform the satisfactory pumping action even after the diaphragm (volume-changing body) 14 is broken to malfunction.
  • FIG. 3 shows a pump of the third preferred embodiment.
  • the differences from the pump of the first preferred embodiment will be described.
  • Like or same elements are referred to by the same reference numerals as those which have been used in describing the pump of the first preferred embodiment, and the description thereof is not reiterated.
  • the pump of the third preferred embodiment differs from the pump of the first preferred embodiment in that the second block 12 and the driver 24 are removed.
  • an accommodation chamber 65 is defined on the side of the diaphragm 14 opposite to the pump chamber 15 .
  • a part of a rotary shaft 69 that is rotationally driven by the drive source 30 protrudes into the accommodation chamber 65 .
  • This protruding part (cam) 70 has a cam groove 70 a on the outer circumferential surface thereof.
  • the cam groove 70 a is inclined with respect to the central axis of the rotary shaft 69 .
  • a driver 71 is rotatably and slidably fitted on the cam 70 as a support portion.
  • the driver 71 and the rotary shaft 69 are components of the power transmission mechanism 31 .
  • the driver 71 includes a bearing 72 rotatably and slidably fitted on the outer circumferential surface of the cam 70 , and a cylindrical guide body 73 fixedly fitted on the bearing 72 .
  • the guide body 73 is secured (connected) to the center of the diaphragm 14 .
  • a cam chamber 73 a is defined in the guide body 73 .
  • a roller 74 is supported in the cam chamber 73 a by the guide body 73 through a radial bearing 75 . A part of the roller 74 is inserted into the cam groove 70 a through a through hole 72 a formed in the bearing 72 .
  • the roller 74 Due to the engagement of the outer circumferential surface of the part of the roller 74 with the cam groove 70 a, the roller 74 , that is, the driver 71 supporting the roller 74 is reciprocated in the direction of the central axis of the rotary shaft 69 (the vertical direction in FIG. 3 ) as the rotary shaft 69 rotates.
  • the diaphragm 14 is deformed to change the volume of the pump chamber 15 , so that the pump performs a pumping action.
  • a seal member 50 is located in the accommodation chamber 65 . Most part of the seal member 50 is outside of the driver 71 . Annular region of the outer peripheral portion 50 c of the seal member 50 is fixedly joined to the diaphragm case 10 by fixing means (not shown) such as adhesive and a combination of bolt and tension plate. Annular region of the inner peripheral portion 50 b of the seal member 50 is fixedly joined to the end surface of the driver 71 by fixing means (not shown) such as adhesive and a combination of bolt and tension plate.
  • the lubricant which is flowed from the driver 71 , that is, from the sliding region between the driver 71 and the cam 70 toward the diaphragm 14 , more specifically from a sliding region S 1 between the roller 74 and the cam groove 70 a and a sliding region S 2 between the bearing 72 and the outer peripheral surface of the cam 70 , is prevented from leaking from a side of a surface (a lower surface in FIG. 3 or a surface on a side opposite to the diaphragm 14 ) to a side of the other surface (an upper surface in FIG. 3 or a surface adjacent to the diaphragm 14 ) via the outer peripheral portion 50 c and the inner peripheral portion 50 b.
  • the seal member may be made of resin or metal.
  • An O-ring or a lip seal may be used as the seal member.
  • Such slide-type seal member is held by one of the diaphragm case and the driver and slides over the other, so that the seal member prevents the lubricant from leaking from the sliding region toward the volume-changing body.
  • the elastic coefficient of the seal member may be set equal to or greater than that of the volume-changing body.
  • the present invention is applicable to pumps other than a diaphragm pump, for example, to a pump using a bellows as a volume-changing body.
  • the present invention is applicable to a pump for pumping a gas other than air. Also, the present invention is applicable to a pump for pumping a liquid such as oil and water.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Reciprocating Pumps (AREA)
US11/142,759 2004-06-01 2005-05-31 Pump Abandoned US20050265862A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004-163519 2004-06-01
JP2004163519A JP2005344569A (ja) 2004-06-01 2004-06-01 ポンプ

Publications (1)

Publication Number Publication Date
US20050265862A1 true US20050265862A1 (en) 2005-12-01

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US11/142,759 Abandoned US20050265862A1 (en) 2004-06-01 2005-05-31 Pump

Country Status (6)

Country Link
US (1) US20050265862A1 (zh)
EP (1) EP1605164A1 (zh)
JP (1) JP2005344569A (zh)
KR (1) KR100682787B1 (zh)
CN (1) CN100412367C (zh)
TW (1) TWI268990B (zh)

Cited By (3)

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Publication number Priority date Publication date Assignee Title
US20080050271A1 (en) * 2006-08-23 2008-02-28 H2Gen Innovations, Inc. Method and apparatus for protective atmosphere recycling
US20090246035A1 (en) * 2008-03-28 2009-10-01 Smiths Medical Asd, Inc. Pump Module Fluidically Isolated Displacement Device
WO2024200305A1 (fr) * 2023-03-31 2024-10-03 Finx Dispositif générateur de flux fluidique à membrane actionnée par un piston

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KR100860104B1 (ko) 2007-08-21 2008-09-25 한국기계연구원 윤활제 격리 구조를 갖는 ｌｐｇ자동차용 비접촉식 용적형연료펌프
KR100856017B1 (ko) * 2008-04-11 2008-09-02 (주)용성엔지니어링 맥동펌프의 유체 분출부 구조
TW201139849A (en) * 2010-05-13 2011-11-16 Tricore Corp Inflating pump with integrally formed air bag and inlet/outlet valve
CN104870817A (zh) * 2012-12-21 2015-08-26 利乐拉瓦尔集团及财务有限公司 一种用于卫生处理应用的活塞泵装置
WO2018110869A1 (ko) * 2016-12-14 2018-06-21 최병철 쌍원 용적 펌프
KR101724657B1 (ko) * 2016-12-14 2017-04-07 최병철 쌍원 용적 펌프
CN108296448A (zh) * 2018-04-04 2018-07-20 河北新兴铸管有限公司 树脂灌注装置

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US1599899A (en) * 1923-09-26 1926-09-14 Delco Light Co Diaphragm pump
US2146398A (en) * 1936-05-14 1939-02-07 William H Lafferty Fuel pump
US2634684A (en) * 1950-10-17 1953-04-14 Enrique Clapes Massons Electromagnetically operated pump for raising liquids
US3119280A (en) * 1961-03-03 1964-01-28 Chemical Flow Controls Inc Reciprocating pump
US3373694A (en) * 1965-10-21 1968-03-19 John F. Taplin Cylinder and piston unit having noncollapsible dual rolling diaphragm
US3884597A (en) * 1973-06-04 1975-05-20 Kazuichi Ito Reciprocating pump
US4050861A (en) * 1974-05-30 1977-09-27 Toyota Jidosha Kogyo Kabushiki Kaisha Diaphragm pump
US4049366A (en) * 1975-01-23 1977-09-20 Erich Becker Diaphragm pump
US4035107A (en) * 1975-04-07 1977-07-12 Durotech Co. Pump system for high pressure abrasive liquids
US4256020A (en) * 1979-10-01 1981-03-17 Acf Industries, Incorporated Crashworthy fuel pump improvement
US4993925A (en) * 1988-11-10 1991-02-19 Knf Neuberger Gmbh Diaphragm pump with noise intercepting insert
US5533886A (en) * 1992-12-31 1996-07-09 Knf Neuberger Gmbh Membrane pump and method of operating the same
US5461966A (en) * 1993-07-05 1995-10-31 Knf Neuberger Gmbh Measuring gas pump
US5518375A (en) * 1993-07-13 1996-05-21 Yves Saint Laurent Parfums Device for the suction and delivery of a fluid, apparatus for dispersing a liquid comprising such a device
US5554014A (en) * 1993-08-25 1996-09-10 Knf Neuberger Gmbh Diaphragm pump with at least two diaphragms
US6019135A (en) * 1998-03-31 2000-02-01 Mitsubishi Denki Kabushiki Kaisha Diaphragm stopper construction for a high-pressure accumulator
US20040131472A1 (en) * 2003-01-06 2004-07-08 Shinya Yamamoto Reciprocating pump and vacuum pump

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080050271A1 (en) * 2006-08-23 2008-02-28 H2Gen Innovations, Inc. Method and apparatus for protective atmosphere recycling
WO2008024838A3 (en) * 2006-08-23 2008-04-17 H2Gen Innovations Inc Improved method and apparatus for protective atmosphere recycling
US7914746B2 (en) 2006-08-23 2011-03-29 Lummus Technology Inc. Method and apparatus for protective atmosphere recycling
US8012423B2 (en) 2006-08-23 2011-09-06 Lummus Technology Inc. Method and apparatus for protective atmosphere recycling
US20090246035A1 (en) * 2008-03-28 2009-10-01 Smiths Medical Asd, Inc. Pump Module Fluidically Isolated Displacement Device
WO2024200305A1 (fr) * 2023-03-31 2024-10-03 Finx Dispositif générateur de flux fluidique à membrane actionnée par un piston
FR3147333A1 (fr) * 2023-03-31 2024-10-04 Finx Dispositif générateur de flux fluidique à membrane actionnée par un piston

Also Published As

Publication number Publication date
CN100412367C (zh) 2008-08-20
TWI268990B (en) 2006-12-21
CN1704589A (zh) 2005-12-07
JP2005344569A (ja) 2005-12-15
TW200604437A (en) 2006-02-01
KR100682787B1 (ko) 2007-02-15
KR20060044812A (ko) 2006-05-16
EP1605164A1 (en) 2005-12-14

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