US20050191195A1 - Dual reciprocating bellows pump with interlock shaft means - Google Patents

Dual reciprocating bellows pump with interlock shaft means Download PDF

Info

Publication number
US20050191195A1
US20050191195A1 US11/043,134 US4313405A US2005191195A1 US 20050191195 A1 US20050191195 A1 US 20050191195A1 US 4313405 A US4313405 A US 4313405A US 2005191195 A1 US2005191195 A1 US 2005191195A1
Authority
US
United States
Prior art keywords
pump
bellows
interlock
working air
interlock shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/043,134
Other languages
English (en)
Inventor
Toshiki Oniduka
Tsuyoshi Watanabe
Tsutomu Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwaki Co Ltd
Original Assignee
Iwaki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwaki Co Ltd filed Critical Iwaki Co Ltd
Assigned to IWAKI CO., LTD. reassignment IWAKI CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ONIDUKA, TOSHIKI, SAWADA, TOSHIKI, WATANABE, TSUYOSHI
Publication of US20050191195A1 publication Critical patent/US20050191195A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/113—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/1136—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/084—Machines, pumps, or pumping installations having flexible working members having tubular flexible members the tubular member being deformed by stretching or distortion

Definitions

  • This invention relates to dual reciprocating bellows pumps with interlock shaft means, in which a pair of expansible and contractable cylindrical bellows, with a pump head interposed therebetween, are interlocked by paired interlock shafts as the interlock shaft means to each other, with the inside of the cylindrical bellows made to be pumping chambers for pump fed fluid such as semiconductor processing liquid and with the outside of the cylindrical bellows provided with working air chambers defined by a pump housing.
  • interlock shaft means is provided to couple together a pair of, i.e., left and right, bellows, so as to interlock these bellows to each other.
  • An arrangement of this type with the interlock shaft means disposed outside a pump housing and also another one with interlock shaft means disposed inside pumping chambers are well known in Japanese Patent disclosure No. 2003-314458.
  • the interlock shaft means is coupled to the extended ends of a member, which is movable in unison with the bellows and is extended to the outside of the pump housing.
  • a pump head disposed at the center of a pump housing has through bores open in pumping chambers, and interlock shafts are inserted through the through bores to be in frictional contact with the bore inner periphery.
  • the interlock shafts have their ends extending into the pumping chambers and operatively coupled to end members provided on the free ends of the bellows.
  • This invention is made in view of the above various problems, and its object is to provide a dual reciprocating bellows pump with interlock shaft means, which can prevent intrusion of undesired impurities in the pump feed liquid, is excellent in function and cost and permits ready size reduction design.
  • a dual reciprocating bellows pump with interlock shaft means comprising a pump housing, a pump head assembled in the pump housing at the center along the longitudinal axis thereof and capable of withdrawing and discharging pump feed liquid, a pair of, i.e., left and right, bellows having respective end parts sealedly mounted on the pump head and capable of expansively and contractably, reciprocating with a predetermined stroke in the pump housing in longitudinal directions thereof, paired end members each sealedly coupled to the free end of each bellows and capable of cooperating with the pump head defining pumping chambers inside the bellows and also defining working air chambers between the bellows and the housing, paired interlock shafts each having the two ends coupled to the pair of end members such as to cause reciprocation of each bellows in an interlocked relation to the reciprocation of the other bellows, inserted through through bores formed in the pump head and capable of being displaced in the longitudinal directions of the pump housing, working air feed means
  • the interlock shafts extend, in their state open to the left and right working air chambers, through through bores provided in the pump head into the working air chambers, and are not disposed in the pumping chambers. Seal means are provided between each through bores and each working air chamber, whereby the left and right working air chambers are isolated.
  • no bearing means for supporting any interlock shaft is needed.
  • the seal means each include a cylindrical guide member open at the two ends, inserted and secured in each through bore of the pump head extending into the left and right working air chambers, and paired elastic seal members each mounted in each open end of the guide member, the interlock shafts are each movably inserted in each cylindrical guide member, the inner diameter of the cylindrical guide members being greater than the outer diameter of the interlock shafts, and the elastic seal members effect isolation of the left and right working air chambers in sealed contact with the interlock shafts.
  • said cylindrical guide members are inserted through and secured in the through bores, and said elastic seal members are mounted on the two open ends of the guide members to be in sealed contact with the interlock shaft movable in said guide members.
  • a seal action of isolating the left and right working air chambers is executed.
  • the inner diameter of the cylindrical guide members is set to be greater than the outer diameter of the interlock shafts, and thus there is no possibility that the movement of the interlock shafts is interfered in contact with the cylindrical guide members.
  • a dual reciprocating bellows pump with interlock shaft means wherein the inner diameter of the through bores of the pump head is greater than the outer diameter of the interlock shafts, and paired elastic seal members are disposed in the through bores such as to be able to be in sealed contact with the interlock shafts, thereby effecting the isolation of the left and right working air chambers.
  • the interlock shafts are directly inserted through the through bores of the pump head, and a pair of elastic seal members are disposed in each through bore between the interlock shaft and the through bore. Again in this case, no bearing for supporting any interlock shaft is provided.
  • the elastic seal members are each constituted by a so-called lip seal having a thin tong-like seal contact part.
  • the lip seals are richly flexible, and can thus absorb even a slight distortion at the time of the pump assembling.
  • the left and right bellows are held in a pressurized state by working air. With this pressure balance, the bellows are thought to be horizontally reciprocating without great distortion. Thus, no greater load than on the interlock shaft in sealed contact with the lip seals is applied to the lip seals.
  • synthetic resin is used as the material of the pump constituent members inclusive of contact-with-liquid members of the pumping chambers accommodating pump feed fluid, that is, all resin pump design is made.
  • the interlock shafts are disposed in the working air chambers outside the bellows, there is no possibility that wear powder and wear dust are introduced into fluid in the pumping chambers defined in the bellows. Also, since the interlock shafts are disposed inside the pump housing, the coupling structure with respect to the bellows is simple, and size reduction design of the entire pump can be readily made.
  • the left and right bellows are held in a state pressurized by working air with the pumping operation.
  • seal means for isolating the working air chambers between interlock shafts and through bores of the pump head penetrated by the interlock shafts undergo reciprocation substantially horizontally without generation of great distortion, and thus it may be of a relatively simple arrangement.
  • the load on the interlock shafts is reduced, and it is possible to obtain smooth pumping operation.
  • the interlock shafts will not be in direct frictional contact with the guide members in their movement by setting the inner diameter of the guide members to be greater than the outer diameter of the interlock shafts.
  • the elastic seal members mounted on the open ends of the guide members can sufficiently effect isolation of the working air chambers.
  • lip seals as the elastic seal members, it is possible to obtain soft contact with the interlock shafts and absorb even slight distortion at the time of the pump assembling in the contact parts. The load on the interlock shafts thus can be further reduced.
  • FIG. 1 is a schematic sectional view showing a first embodiment of the dual reciprocating bellows pump with interlock shaft means according to the invention
  • FIG. 2 is a fragmentary enlarged-scale view showing the pump shown in FIG. 1 ;
  • FIG. 3 is a fragmentary sectional schematic view showing a second embodiment of the dual reciprocating bellows pump with interlock shaft means according to the invention
  • FIG. 4 is a fragmentary enlarged-scale view showing the pump shown in FIG. 3 ;
  • FIG. 5 is a fragmentary view showing a modification of the lip seal shown in FIG. 4 .
  • FIGS. 1 and 2 show the first embodiment of the dual reciprocating bellows pump with interlock shafts as interlock shaft means.
  • Reference numeral 1 designates a pump housing.
  • Reference numeral 2 designates a pump head disposed in the pump housing 1 at the center thereof in the longitudinal axis X-X.
  • the pump housing 1 comprises a pair of, i.e., left and right, parts with the pump head 2 as a border. These parts are assembled to be integral with the pump head 2 by a pair of assembling frames in a stage positioned by pins 3 .
  • Reference numeral 5 designates a pair of, i.e., left and right, cylindrical bellows, which have their stem parts 5 a mounted in a sealed stage on the central pump head 2 and expansively and contractably reciprocal with a predetermined stroke along the longitudinal axis X-X of the pump housing 1 .
  • Reference numeral 6 designates end members, which are each coupled in a sealed state to the free end of each bellows 5 , each define a pumping chamber 7 in each bellows 5 in cooperation with the pump head 2 and define a working air chamber 8 between each bellows 5 and the pump housing 1 .
  • the end members 6 are formed to be integral with the bellows 5 , respectively.
  • Reference numeral 10 designates interlock shafts constituted as the interlock shaft means, which are inserted through through bores 11 open to a pair of, i.e., working air chambers 8 , and extend into the working air chambers 8 , respectively.
  • Each free bellows end part is coupled by bolts 14 to each end member 6 via two coupling members 12 and 13 .
  • the two coupling members 12 and 13 are mounted by the bolts 14 to the corresponding end member 6 such as to sandwich the end member 6 .
  • the pair interlock shafts 10 are provided face to face in the working air chambers 8 in concentric positions in radial direction centered on the longitudinal axis X-X.
  • These interlock shafts 10 are movable along and parallel with the axis X-X such that one of the bellows 5 is interlocked with good balance to the reciprocation of the other bellows 5 along the axis X-X.
  • Reference numeral 15 designates paired cylindrical guide members, which are each inserted in and secured to each through bore 11 .
  • Each interlock shaft 10 is movably inserted in each guide member 15 .
  • the inner diameter ID of the guide members 15 is set to be greater than the outer diameter OD of the interlock shafts 10 .
  • the elastic seal members 16 have a ring-like shape, and are mounted on the open end parts 15 a of each cylindrical guide member 15 to be in elastic contact with the outer periphery of the interlock shaft 10 , thus effecting the sealed contact.
  • As the elastic seal members 16 it is particularly desired to use thin tong-like lip seals as in this embodiment.
  • Each elastic seal member 16 constituted by a lip seal is secured in its state that it is pushed against the open end part 15 a of the associated cylindrical guide member 15 and with its stem part 16 a clamped from the back side by a back-up member 17 , and its tong part 16 b extending radially inwardly is elastically held in sealed contact with the entire outer periphery of the associated interlock shaft 10 .
  • the pair of, i.e., left and right, elastic seal members 16 isolate the flow of working air in the left and right working air chambers 8 .
  • Working air feed switching mechanisms 18 mounted on the opposite end parts of the pump housing 1 selectively feed working air from an air source 19 via a control valve 20 to the part of, i.e., working air chambers 8 .
  • working air is thus fed to one of the working air chambers 8 , the associated bellows 5 undergoes contracting movement, which is transmitted via the interlock shafts 10 to the other bellows 5 , while causing release of the working air from the other bellows 5 to cause expansion movement thereof. This operation is repeated.
  • the working air feed switching mechanisms 18 each include an air inlet port 21 , an air discharge port 22 , a piston 23 and a cylinder 24 , and they constitute an operating air feed means together with the control valve 20 and the air source 19 connected via ducts 25 to 28 to them.
  • This means may be the same as what is disclosed in Japanese Patent Disclosure No. 2003-314458, and its detailed arrangement is not described.
  • the left and right bellows 5 repeatedly undergo expansion and contracting movement in response to the working air feed switching operation to cause pumping operation of withdrawing and discharging pump feed fluid such as semiconductor processing liquid or a chemical liquid accommodated in the pumping chambers 7 in the bellows 5 .
  • the in-flow and out-flow of the pump feed liquid to and from the pumping chambers 7 are effected via valves 30 provided on the pump head 2 .
  • Each pumping chamber 7 has a withdrawal guide and a discharge guide valve 30 provided as a pair.
  • these paired valves 30 are shown side by side in the direction of the paper surface, and only one set of the paired valves 30 is seen. These valves are communicated with withdrawal and discharge ports (not shown) provided on the pump head 2 .
  • the arrangement in this part is the same as what is disclosed in the above Japanese Patent Disclosure No. 2003-314458, and its detailed description is not given.
  • the pumping operation is executed in such a manner that the pair of, i.e., left and right, bellows 5 undergoes reciprocation along the longitudinal axis X-X in a state that they are interlocked to each other by the interlock shafts 10 in response to the selective feed of working air.
  • the left and right working air chambers 8 are always in a state pressurized by working air and held balanced.
  • the bellows 5 thus are not excessively deviated from the direction of the axis X-X and distorted or do not bring about vibrations.
  • the interlock shafts 10 are likewise moved substantially along the direction of the axis X-X, and they do not to come to be in excessive contact with the cylindrical guide members 10 and can be moved smoothly.
  • the interlock shafts 10 do not require any special bearing, but require only the elastic seal members 16 , which isolate the left and right working air chambers 8 and are solely in contact at the time of the usual movement. The load on the interlock shafts 10 is thus extremely reduced, and the generation of wear powder, wear particles and wear dust from the contact parts are suppressed as much as possible.
  • the pump constituents may all be readily manufactured from synthetic resin. Particularly, it is desirable to use richly corrosion-resistant synthetic resin for the contact-with-liquid parts of the pumping members 7 accommodating the pump feed liquid, such as the bellows 5 , the pump head 2 and the valve 30 .
  • the interlock shafts 10 and cylindrical guide members 15 are desirably made of such synthetic resin as PEEK (polyeterethylketone) resin.
  • the lip seals constituting the elastic seal members 16 are desirably filler-containing PTFE (polytetrafluoroethylene) resin.
  • FIGS. 3 and 4 show a second embodiment of the dual reciprocating bellows pump according to the invention.
  • elements like those in the preceding first embodiment are designated by like reference numerals, and their description is not given in detail.
  • the inner diameter of the through bores 11 formed on the central pump head 2 is set to be greater than the outer diameter of the interlock shafts 10 .
  • a pair of, i.e., left and right, ring-like elastic seal members 16 are disposed in a spaced-apart relation to each other and held in contact with the interlock shaft 10 inserted through the through bore 11 , thus blocking the flow of working air in the left and right operating air chambers 8 to effect isolation of the two chambers 8 .
  • each elastic seal member 16 constituted by a lip seal has an L-shaped sectional profile, and its stem part 16 a is secured in a threaded annular recess 31 formed on each side of the pump head 2 by screwing a threaded ring-like seal retainer 32 in the recess 31 .
  • Reference numeral 33 designates a tool insertion bore formed in the seal retainer 32 .
  • the seal retainer 32 is fitted in the annular recess 31 by inserting a suitable tool.
  • a tong part 16 b of the lip seal 16 extending from the stem part 16 a and bent radially inwardly, is in elastic frictional contact in a ring-like form on the entire outer periphery of the interlock shaft 10 , thus effecting a seal contact therein.
  • the interlock shafts 10 are in contact only with these elastic seal members 16 and not in direct contact with the inner surfaces of the through bores 11 of the pump head 2 .
  • no particular bearing for the interlock shafts 10 is necessary.
  • FIGS. 3 and 4 are provided for describing one interlock shaft 10 and relative arrangement thereto.
  • a pair of interlock shafts 10 are disposed in the working air chambers 8 .
  • the material of these constituent members like the first embodiment all the elements can be readily made from appropriate resin.
  • FIG. 5 shows a modification of the lip seal constituting the elastic seal member in corresponding to the part shown in FIG. 4 .
  • the stem part 16 a is formed to have an enlarged shape so that it also serves as the seal retainer 16 shown in the second embodiment.
  • the stem part 16 a of the lip seal 16 is held in an annular recess 31 without thread such that it is pushed from the outside by the end face 1 a of the housing 1 , and the thin tong part 16 b extends such that it is bent radially inwardly to be in sealed contact with the outer periphery of the interlock shaft 10 .
  • the elastic seal member 16 may be of various shapes, but its part in contact with the interlock shaft 10 is desirably of a thin tong-like shape.
  • interlock shafts 10 are shown to be of rod-like shape. However, it is possible to use any other shape such as angular shapes as well, and the illustrated arrangement is by no means limitative.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
US11/043,134 2004-01-27 2005-01-27 Dual reciprocating bellows pump with interlock shaft means Abandoned US20050191195A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004018038A JP2005214014A (ja) 2004-01-27 2004-01-27 連動シャフトを備えた２連往復動ベローズポンプ
JP2004-18038 2004-01-27

Publications (1)

Publication Number Publication Date
US20050191195A1 true US20050191195A1 (en) 2005-09-01

Family

ID=34879041

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/043,134 Abandoned US20050191195A1 (en) 2004-01-27 2005-01-27 Dual reciprocating bellows pump with interlock shaft means

Country Status (3)

Country Link
US (1) US20050191195A1 (zh)
JP (1) JP2005214014A (zh)
CN (1) CN2777241Y (zh)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100119392A1 (en) * 2007-06-06 2010-05-13 Nippon Pillar Packaing Co., Ltd. Reciprocating pump
US20130078121A1 (en) * 2011-09-22 2013-03-28 Cheng-Wei Lin Separation type pneumatic dual partition membrane pump and external pneumatic control valve thereof
US8636484B2 (en) 2009-01-09 2014-01-28 Tom M. Simmons Bellows plungers having one or more helically extending features, pumps including such bellows plungers, and related methods
US20140140869A1 (en) * 2012-11-21 2014-05-22 John M. Simmons Pneumatic reciprocating fluid pump with reinforced shaft
TWI477697B (zh) * 2011-09-22 2015-03-21
US20170167475A1 (en) * 2014-07-10 2017-06-15 Eagle Industry Co., Ltd. Liquid supply system
US12018672B2 (en) 2020-04-02 2024-06-25 Idex Health And Science Llc Precision volumetric pump with a bellows hermetic seal

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547451B2 (ja) * 2007-11-22 2010-09-22 シグマテクノロジー有限会社 ベローズポンプおよびベローズポンプの運転方法
WO2010143469A1 (ja) * 2009-06-10 2010-12-16 株式会社イワキ 二連往復動ポンプ
TWI452207B (zh) * 2012-01-12 2014-09-11 Hong Kel Trading Co Ltd 往復式泵浦
CN103291590B (zh) * 2013-06-13 2015-06-24 中国第一汽车股份有限公司无锡油泵油嘴研究所 一种双隔膜泵
KR101476982B1 (ko) * 2013-10-14 2014-12-30 주식회사 이노디스 벨로우즈 펌프
CN104675682B (zh) * 2015-02-06 2017-03-15 张瑞 一种容积泵装置
EP3115607B1 (de) * 2015-07-10 2018-02-21 J. Wagner AG Doppelmembranpumpe
KR20190098228A (ko) * 2017-02-03 2019-08-21 이글 고오교 가부시키가이샤 액체 공급 시스템
KR101733634B1 (ko) 2017-02-24 2017-05-08 주식회사 이노디스 벨로우즈 펌프
CN112412732A (zh) * 2020-11-18 2021-02-26 崔海龙 风囊泵
CN113464408B (zh) * 2021-07-16 2023-03-10 浙江启尔机电技术有限公司 一种波纹管泵泵壳及采用其的波纹管泵
KR102524485B1 (ko) * 2021-08-11 2023-04-24 주식회사 이노디스 벨로우즈 펌프

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5195878A (en) * 1991-05-20 1993-03-23 Hytec Flow Systems Air-operated high-temperature corrosive liquid pump
US5326234A (en) * 1993-02-17 1994-07-05 Versa-Matic Tool, Inc. Fluid driven pump
US5480292A (en) * 1993-05-19 1996-01-02 Asti Sae Dual chamber pump
US6241487B1 (en) * 1998-11-10 2001-06-05 Warren Rupp, Inc. Fluid powered diaphragm pump
US6474961B1 (en) * 1999-09-29 2002-11-05 Oliver Timmer Compact dual diaphragm pump
US6644940B2 (en) * 2000-12-18 2003-11-11 Yamada Corporation Restarting device for a fluid operated double diaphragm piston pump
US6874997B2 (en) * 2002-04-19 2005-04-05 Iwaki Co., Ltd. Pump system using a control fluid to drive a switching valve mechanism for an actuating fluid

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5195878A (en) * 1991-05-20 1993-03-23 Hytec Flow Systems Air-operated high-temperature corrosive liquid pump
US5326234A (en) * 1993-02-17 1994-07-05 Versa-Matic Tool, Inc. Fluid driven pump
US5480292A (en) * 1993-05-19 1996-01-02 Asti Sae Dual chamber pump
US6241487B1 (en) * 1998-11-10 2001-06-05 Warren Rupp, Inc. Fluid powered diaphragm pump
US6474961B1 (en) * 1999-09-29 2002-11-05 Oliver Timmer Compact dual diaphragm pump
US6644940B2 (en) * 2000-12-18 2003-11-11 Yamada Corporation Restarting device for a fluid operated double diaphragm piston pump
US6874997B2 (en) * 2002-04-19 2005-04-05 Iwaki Co., Ltd. Pump system using a control fluid to drive a switching valve mechanism for an actuating fluid

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100119392A1 (en) * 2007-06-06 2010-05-13 Nippon Pillar Packaing Co., Ltd. Reciprocating pump
US8568114B2 (en) * 2007-06-06 2013-10-29 Nippon Pillar Packing Co., Ltd. Reciprocating pump
US8636484B2 (en) 2009-01-09 2014-01-28 Tom M. Simmons Bellows plungers having one or more helically extending features, pumps including such bellows plungers, and related methods
US20130078121A1 (en) * 2011-09-22 2013-03-28 Cheng-Wei Lin Separation type pneumatic dual partition membrane pump and external pneumatic control valve thereof
US8672645B2 (en) * 2011-09-22 2014-03-18 Dino Technology Co., Ltd. Separation type pneumatic dual partition membrane pump and external pneumatic control valve thereof
TWI477697B (zh) * 2011-09-22 2015-03-21
US20140140869A1 (en) * 2012-11-21 2014-05-22 John M. Simmons Pneumatic reciprocating fluid pump with reinforced shaft
TWI582312B (zh) * 2012-11-21 2017-05-11 固瑞克液體處理公司 具有強化軸的氣動往復式液壓泵
US9856865B2 (en) * 2012-11-21 2018-01-02 White Knight Fluid Handling Inc. Pneumatic reciprocating fluid pump with reinforced shaft
US20170167475A1 (en) * 2014-07-10 2017-06-15 Eagle Industry Co., Ltd. Liquid supply system
US10233913B2 (en) * 2014-07-10 2019-03-19 Eagle Industry Co., Ltd. Liquid supply system
US12018672B2 (en) 2020-04-02 2024-06-25 Idex Health And Science Llc Precision volumetric pump with a bellows hermetic seal

Also Published As

Publication number Publication date
JP2005214014A (ja) 2005-08-11
CN2777241Y (zh) 2006-05-03

Similar Documents

Publication Publication Date Title
US20050191195A1 (en) Dual reciprocating bellows pump with interlock shaft means
US10302102B2 (en) Seal assemblies for reciprocating and rotary applications
FI75656C (fi) Taetningsanordning.
US6966339B2 (en) Spool valve arrangement
CN111486261B (zh) 具有流量控制针的比例流量控制阀提升阀芯
JP2011522193A (ja) 流体サーボ及び用途
KR20110127611A (ko) 유체압 기기
JP5973197B2 (ja) ピストン式作動流体圧アクチュエータ、および制御弁
KR20010070404A (ko) 파일롯형 2포트 밸브
KR20140034070A (ko) 벨로우즈 펌프
US20200049255A1 (en) Sealing device
US6637314B2 (en) Actuator
EP2702271B1 (en) High pressure pump with reduced seal wear
JP7372246B2 (ja) ピストン－シリンダユニット
US6205906B1 (en) Rodless cylinder
US10989302B2 (en) Method and device for mounting shaft seals permitting eccentric motion
US10344594B2 (en) Actuator bearing arrangement
US7017915B2 (en) Stem or shaft seal arrangement
JP5068344B2 (ja) ポンプ
JP3742791B2 (ja) ポンプ
US20240141889A1 (en) Seal structure for reciprocating pump with cylindrical collar portion
CA2974813C (en) Method and device for mounting shaft seals permitting eccentric motion
RU2282061C2 (ru) Объемный насос
GB2062133A (en) Axial Sealing Device for High Fluid Pressures
US20050042120A1 (en) Fluid-moving device with an internal passageway and a clearance seal

Legal Events

Date Code Title Description
AS Assignment

Owner name: IWAKI CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ONIDUKA, TOSHIKI;WATANABE, TSUYOSHI;SAWADA, TOSHIKI;REEL/FRAME:015768/0553

Effective date: 20050125

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION