US20030122279A1 - Mold assembly and method for encapsulating semiconductor device - Google Patents

Mold assembly and method for encapsulating semiconductor device Download PDF

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Publication number
US20030122279A1
US20030122279A1 US10/373,085 US37308503A US2003122279A1 US 20030122279 A1 US20030122279 A1 US 20030122279A1 US 37308503 A US37308503 A US 37308503A US 2003122279 A1 US2003122279 A1 US 2003122279A1
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Prior art keywords
mold
semiconductor chip
pressure
chip
releasing member
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Abandoned
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US10/373,085
Inventor
Hisayuki Tsuruta
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NEC Electronics Corp
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NEC Corp
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Publication of US20030122279A1 publication Critical patent/US20030122279A1/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565—Moulds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched

Definitions

  • the present invention relates to a mold assembly and a method for encapsulating a semiconductor device, more in detail to the mold assembly and the method capable of encapsulating a semiconductor chip with its surface exposed on the surface of a package.
  • a conventional method for molding the package of semiconductor chips includes two techniques, that is, a potting technique and a transfer technique.
  • a potting apparatus shown in FIG. 1 In the conventional potting technique for encapsulating a semiconductor chip with the bottom surface thereof exposed on the surface of a package, a potting apparatus shown in FIG. 1 is used.
  • the apparatus shown therein supplies a tape 102 reinforced with a frame 101 and moving on the sample stage of a potting device, and applies liquid resin thereto by moving a syringe 103 filled with the liquid resin along the tracks or locus specified by input data.
  • the movement is effected either by the X-Y-Z-direction movement of the syringe itself or the X-Y-direction movement of the sample stage.
  • the liquid resin in the syringe 103 is ejected for application by controlling the pressure of air in a dispenser unit 104 .
  • the liquid resin is expensive and its handling including storage and use thereof is difficult.
  • the amount of the ejected liquid resin depends on the viscosity of the resin, the pressure of the dispenser unit and a period of application time.
  • the diversity of the amount of the ejected liquid resin generates an unevenness of the thicknesses in the molds.
  • the planarity or flatness of the sample stage also generates the unevenness of the thicknesses in the molds.
  • the transfer technique for encapsulating semiconductor chips in a package by the molding is employed.
  • the current transfer technique involves other problems such that (1) burrs are generated at an exposed portion and a manufacturing cost rises due to an addition of a step of removing the burrs, and (2) the chip is directly clamped with the mold to generate damages in the chip.
  • an object of the present is to provide a mold assembly and a method for encapsulating a semiconductor device in which the molding for encapsulation preferably used in the transfer technique provides no burrs.
  • the present invention provides, in a first aspect thereof, a mold assembly for molding a semiconductor chip including: first and second mold halves disposed for relative movement with respect to each other in a first direction for closing and opening the mold assembly; and a mold releasing member disposed between the semiconductor chip and one of the first and second mold halves, the mold releasing member having a first surface in contact with the semiconductor chip during a closed state of the mold assembly, the mold releasing member having a property of being released from one of the first and second mold halves after molding by a resin, the first surface being larger than a surface of the semiconductor chip in contact with the first surface.
  • the present invention provides, in a second aspect thereof, a method for molding a semiconductor chip in a mold assembly having first and second mold halves disposed for relative movement with respect to each other, the method including the steps of: sandwiching a mold releasing member and the semiconductor chip between the first mold half and the second mold half, the mold releasing member having a property of elastically deforming, the releasing member and one of the first and second mold halves defining a cavity for receiving the semiconductor chip therein; and injecting resin in the cavity by using a first pressure lower than a pressure, which allows the mold releasing member to elastically deform, in a closed state of the mold assembly to thereby mold the semiconductor chip.
  • the use of the mold releasing member can prevent the generation of burrs because the edges of the surface of the semiconductor device is in contact with the film.
  • FIG. 1 is a vertical elevational view showing a potting apparatus used in a conventional method.
  • FIG. 2 is a vertical cross-sectional view showing an encapsulation mold for a semiconductor device in accordance with an embodiment of the present invention.
  • FIG. 3 is a top plan view showing a semiconductor chip to be encapsulated.
  • FIG. 4 is a cross-sectional view showing the chip of FIG. 3.
  • FIG. 5 is a cross-sectional view showing the encapsulation mold of FIG. 2 when it is fastened.
  • FIG. 6 is an enlarged vertical cross-sectional view of the mold for showing the function thereof.
  • FIG. 7 is a vertical cross-sectional view showing an encapsulation mold for semiconductor device in accordance with another embodiment.
  • a mold assembly for encapsulating a semiconductor device includes a transfer assembly mold having a fixed, upper mold half 11 and a movable, lower mold half 12 .
  • the lower mold half 12 includes a mold body member 13 having a top, shallow concave surface 14 and a chip holder 15 engaged and received in the concave surface 14 .
  • the upper mold half 11 includes a holder 16 and a thrust mold 17 .
  • the thrust mold 17 is guided by the holder 16 for slidable movement with respect to the holder 16 in a direction of the relative movement between the upper mold half 11 and the lower mold half 12 .
  • An elastic member 18 preferably a coned disc spring, is disposed between the bottom surface of the holder 16 and the top surface of the thrust mold 17 .
  • a vacuum space 19 is formed around the thrust mold 17 .
  • a thin film 21 is disposed between the upper mold half 11 and the lower mold half 12 .
  • the film 21 has a property of being elastically deformed wherein it reduces the thickness thereof to some extent when compressed. The film 21 is sucked from a space between the holder 16 and the thrust mold 17 to be attracted to the upper mold half 11 .
  • the chip holder 15 shown in FIGS. 3 and 4 includes a frame 22 , a wired pattern layer 23 having an adhesive layer and solder balls, and a plurality of chips 24 arranged on the wired pattern layer 23 .
  • the top adhesive layer of the wired pattern layer 23 is bonded onto the bottom surface of the frame 22 .
  • the plurality of chips 24 are bonded to the wired pattern layer 23 through an opening 25 formed in the frame 22 .
  • the chip holder 15 is mounted in the lower mold half 12 as shown in FIG. 2.
  • the wired pattern layer 23 of the chip holder 15 is engaged with and received in the concave surface 14 .
  • the concave surface 14 has channels formed in accordance with the shapes of the chip holder 15 and the wired pattern layer 23 .
  • the mold assembly is closed by ascending the lower mold half 12 to be in close contact with the upper mold half 11 as shown in FIG. 5.
  • An enclosed cull 26 is formed between the upper mold half 11 and the lower mold half 12 and solid resin is supplied in the cull 26 .
  • a plunger 27 is fitted in the lower mold half 12 , and a runner 28 communicated with the cull 26 is formed in the upper mold half 11 .
  • the bottom of the runner 28 is open at the bottom surface of the holder 16 .
  • the film 21 is automatically supplied and discharged by a known mechanism not shown in the drawings.
  • the mechanism may include one or more supply rollers for supplying the film from a wound film roll and one or more discharge rollers for discharging the used film by winding-up after the transfer molding.
  • the rollers are disposed at both ends of the upper mold half 11 , and the supply and the discharge of the film are simultaneously conducted by moving the film by the plurality of rollers.
  • the resin 31 in the cull 26 is melted with heat, supplied to the cavity through the runner 28 by the pressure applied by the plunger 27 , and then supplied to the opening 25 of the chip holder 15 .
  • the closed state is shown more in detail in FIG. 6 in which the film 21 is pressed between the resin 31 and the thrust mold 17 to be elastically deformed and a part of the film 21 is compressed by the plurality of the chips 24 . Since the melted resin 31 does not enter into the space between the top surface of the chip 24 and the bottom surface of the thrust mold 17 , no burrs are generated on the edges of the top surface of the chips 14 .
  • the thrust mold 17 of the upper mold half 11 resides in a floating state in order to prevent damages, such as a crack in the chip 24 , generated due to abnormal pressure rise between both the mold halves and unevenness of the chip thicknesses.
  • the setting of the pressure by the thrust mold 17 at this time is higher than an injection molding pressure so that no adverse influence by the injection molding pressure is produced.
  • the pressure determined in this manner effectively prevents the generation of the burrs mentioned before. While a preferable effective injection pressure is 100 kg/cm 2 , a preferable setting of the pressure by the thrust mold 17 is 200 kg/cm 2 .
  • the combination of the film 21 and the pressure by the thrust mold 17 enables the uniform pressing of all the chips regardless of the unevenness of the chip thicknesses, thereby effectively preventing the generation of the burrs on the surface.
  • a chip holder 15 a is different from the chip holder, 15 in FIG. 3.
  • a chip 24 is fixed onto a lead frame 30 , and a bonding wire 29 connects the lead frame 30 and the electrode of the chip 24 .
  • a heat spreader 32 is opposed to the bottom surface of the lead frame 30 .
  • An upper cavity 34 into which the chip 24 and the lead frame 30 enter is formed at the bottom part of the upper mold half 11 , and a lower cavity 35 is formed at the corresponding part of the lower mold half 12 .
  • the heat spreader 32 in place of the chip 24 is exposed and encapsulated in the lower cavity 35 .
  • the film 21 a is supplied between the lower mold half 12 and the chip holder 15 a , and the mold assembly is closed as shown in FIG. 7.
  • the film 21 a is pressed between the bottom surface of the lower cavity 35 and the bottom surface of the heat spreader 32 .
  • the side surfaces of the heat spreader 32 are covered with the resin supplied from the runner 28 while exposing the bottom surface of the heat spreader 32 .
  • the generation of the burrs at the edges of the surface of the heat spreader 32 is prevented.
  • the burr generation is prevented by properly pressing the film 21 a on the heat spreader 32 by the injection pressure of the resin.
  • the floating mechanism of the elastic member 18 in FIG. 2 is unnecessary in the present embodiment because the chip 24 is not oppressed.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

A mold assembly including: a first mold half; a second mold half relatively movable with respect to the first mold half; and a thin film disposes between the both mold halves and in contact with the surface of a semiconductor chip. Because of the contact between the edges of the surface of the semiconductor chip and the thin film, the portion of the semiconductor chip at which the burr is liable to be generated is protected and no burrs are generated.

Description

    BACKGROUND OF THE INVENTION
  • (a) Field of the Invention [0001]
  • The present invention relates to a mold assembly and a method for encapsulating a semiconductor device, more in detail to the mold assembly and the method capable of encapsulating a semiconductor chip with its surface exposed on the surface of a package. [0002]
  • (b) Description of the Related Art [0003]
  • A conventional method for molding the package of semiconductor chips includes two techniques, that is, a potting technique and a transfer technique. [0004]
  • In the conventional potting technique for encapsulating a semiconductor chip with the bottom surface thereof exposed on the surface of a package, a potting apparatus shown in FIG. 1 is used. The apparatus shown therein supplies a [0005] tape 102 reinforced with a frame 101 and moving on the sample stage of a potting device, and applies liquid resin thereto by moving a syringe 103 filled with the liquid resin along the tracks or locus specified by input data. The movement is effected either by the X-Y-Z-direction movement of the syringe itself or the X-Y-direction movement of the sample stage. The liquid resin in the syringe 103 is ejected for application by controlling the pressure of air in a dispenser unit 104.
  • The liquid resin is expensive and its handling including storage and use thereof is difficult. In addition, the amount of the ejected liquid resin depends on the viscosity of the resin, the pressure of the dispenser unit and a period of application time. The diversity of the amount of the ejected liquid resin generates an unevenness of the thicknesses in the molds. The planarity or flatness of the sample stage also generates the unevenness of the thicknesses in the molds. [0006]
  • Further, in the potting technique described above, some deficiencies exist mainly because no pressure can be applied during the application of the resin. The adherence between the semiconductor chip and the resin in the potting technique is weaker due to the application of no pressure than that in the transfer technique, and peeling-off of the resin at the interface is liable to occur. Further, in the potting technique, in order to prevent a void, the syringe slowly moves to apply the liquid resin, and accordingly a cycle of application time is long and its throughout is lower than that of the transfer technique. When the solder balls on the bottom surface of the tape are disposed outside of the chip (fan-out structure), an inconvenience for the balls may be generated such as co-planarity deficiency and ball missing due to the lower strength of the resin. [0007]
  • In order to remove the above deficiencies in the potting technique, the transfer technique for encapsulating semiconductor chips in a package by the molding is employed. However, the current transfer technique involves other problems such that (1) burrs are generated at an exposed portion and a manufacturing cost rises due to an addition of a step of removing the burrs, and (2) the chip is directly clamped with the mold to generate damages in the chip. [0008]
    • SUMMARY OF THE INVENTION
  • In view of the foregoing, an object of the present is to provide a mold assembly and a method for encapsulating a semiconductor device in which the molding for encapsulation preferably used in the transfer technique provides no burrs. [0009]
  • The present invention provides, in a first aspect thereof, a mold assembly for molding a semiconductor chip including: first and second mold halves disposed for relative movement with respect to each other in a first direction for closing and opening the mold assembly; and a mold releasing member disposed between the semiconductor chip and one of the first and second mold halves, the mold releasing member having a first surface in contact with the semiconductor chip during a closed state of the mold assembly, the mold releasing member having a property of being released from one of the first and second mold halves after molding by a resin, the first surface being larger than a surface of the semiconductor chip in contact with the first surface. [0010]
  • The present invention provides, in a second aspect thereof, a method for molding a semiconductor chip in a mold assembly having first and second mold halves disposed for relative movement with respect to each other, the method including the steps of: sandwiching a mold releasing member and the semiconductor chip between the first mold half and the second mold half, the mold releasing member having a property of elastically deforming, the releasing member and one of the first and second mold halves defining a cavity for receiving the semiconductor chip therein; and injecting resin in the cavity by using a first pressure lower than a pressure, which allows the mold releasing member to elastically deform, in a closed state of the mold assembly to thereby mold the semiconductor chip. [0011]
  • In accordance with the first and the second aspects of the present invention, the use of the mold releasing member can prevent the generation of burrs because the edges of the surface of the semiconductor device is in contact with the film. [0012]
  • The above and other objects, features and advantages of the present invention will be more apparent from the following description.[0013]
    • BRIEF DESCRIPTION OF DRAWINGS
  • FIG. 1 is a vertical elevational view showing a potting apparatus used in a conventional method. [0014]
  • FIG. 2 is a vertical cross-sectional view showing an encapsulation mold for a semiconductor device in accordance with an embodiment of the present invention. [0015]
  • FIG. 3 is a top plan view showing a semiconductor chip to be encapsulated. [0016]
  • FIG. 4 is a cross-sectional view showing the chip of FIG. 3. [0017]
  • FIG. 5 is a cross-sectional view showing the encapsulation mold of FIG. 2 when it is fastened. [0018]
  • FIG. 6 is an enlarged vertical cross-sectional view of the mold for showing the function thereof. [0019]
  • FIG. 7 is a vertical cross-sectional view showing an encapsulation mold for semiconductor device in accordance with another embodiment.[0020]
    • PREFERRED EMBODIMENTS OF THE INVENTION
  • Now, the present invention is more specifically described with reference to accompanying drawings. [0021]
  • First Embodiment [0022]
  • A mold assembly for encapsulating a semiconductor device includes a transfer assembly mold having a fixed, [0023] upper mold half 11 and a movable, lower mold half 12. The lower mold half 12 includes a mold body member 13 having a top, shallow concave surface 14 and a chip holder 15 engaged and received in the concave surface 14.
  • The [0024] upper mold half 11 includes a holder 16 and a thrust mold 17. The thrust mold 17 is guided by the holder 16 for slidable movement with respect to the holder 16 in a direction of the relative movement between the upper mold half 11 and the lower mold half 12. An elastic member 18, preferably a coned disc spring, is disposed between the bottom surface of the holder 16 and the top surface of the thrust mold 17. A vacuum space 19 is formed around the thrust mold 17. A thin film 21 is disposed between the upper mold half 11 and the lower mold half 12. The film 21 has a property of being elastically deformed wherein it reduces the thickness thereof to some extent when compressed. The film 21 is sucked from a space between the holder 16 and the thrust mold 17 to be attracted to the upper mold half 11.
  • The [0025] chip holder 15 shown in FIGS. 3 and 4 includes a frame 22, a wired pattern layer 23 having an adhesive layer and solder balls, and a plurality of chips 24 arranged on the wired pattern layer 23. As shown in FIG. 4, the top adhesive layer of the wired pattern layer 23 is bonded onto the bottom surface of the frame 22. The plurality of chips 24 are bonded to the wired pattern layer 23 through an opening 25 formed in the frame 22.
  • The [0026] chip holder 15 is mounted in the lower mold half 12 as shown in FIG. 2. The wired pattern layer 23 of the chip holder 15 is engaged with and received in the concave surface 14. The concave surface 14 has channels formed in accordance with the shapes of the chip holder 15 and the wired pattern layer 23.
  • The mold assembly is closed by ascending the [0027] lower mold half 12 to be in close contact with the upper mold half 11 as shown in FIG. 5. An enclosed cull 26 is formed between the upper mold half 11 and the lower mold half 12 and solid resin is supplied in the cull 26. A plunger 27 is fitted in the lower mold half 12, and a runner 28 communicated with the cull 26 is formed in the upper mold half 11. The bottom of the runner 28 is open at the bottom surface of the holder 16.
  • The [0028] film 21 is automatically supplied and discharged by a known mechanism not shown in the drawings. The mechanism may include one or more supply rollers for supplying the film from a wound film roll and one or more discharge rollers for discharging the used film by winding-up after the transfer molding. The rollers are disposed at both ends of the upper mold half 11, and the supply and the discharge of the film are simultaneously conducted by moving the film by the plurality of rollers.
  • In the closed state of the mold assembly shown in FIG. 5, the bottom peripheral surface of the [0029] holder 16 and the bottom surface of the thrust mold 17 are in contact with the top surface of the film to form a single plane.
  • The [0030] resin 31 in the cull 26 is melted with heat, supplied to the cavity through the runner 28 by the pressure applied by the plunger 27, and then supplied to the opening 25 of the chip holder 15.
  • The closed state is shown more in detail in FIG. 6 in which the [0031] film 21 is pressed between the resin 31 and the thrust mold 17 to be elastically deformed and a part of the film 21 is compressed by the plurality of the chips 24. Since the melted resin 31 does not enter into the space between the top surface of the chip 24 and the bottom surface of the thrust mold 17, no burrs are generated on the edges of the top surface of the chips 14.
  • The [0032] thrust mold 17 of the upper mold half 11 resides in a floating state in order to prevent damages, such as a crack in the chip 24, generated due to abnormal pressure rise between both the mold halves and unevenness of the chip thicknesses. The setting of the pressure by the thrust mold 17 at this time is higher than an injection molding pressure so that no adverse influence by the injection molding pressure is produced. The pressure determined in this manner effectively prevents the generation of the burrs mentioned before. While a preferable effective injection pressure is 100 kg/cm2, a preferable setting of the pressure by the thrust mold 17 is 200 kg/cm2.
  • The combination of the [0033] film 21 and the pressure by the thrust mold 17 enables the uniform pressing of all the chips regardless of the unevenness of the chip thicknesses, thereby effectively preventing the generation of the burrs on the surface.
  • In another embodiment shown in FIG. 7, a [0034] chip holder 15 a is different from the chip holder, 15 in FIG. 3. A chip 24 is fixed onto a lead frame 30, and a bonding wire 29 connects the lead frame 30 and the electrode of the chip 24.
  • A [0035] heat spreader 32 is opposed to the bottom surface of the lead frame 30. An upper cavity 34 into which the chip 24 and the lead frame 30 enter is formed at the bottom part of the upper mold half 11, and a lower cavity 35 is formed at the corresponding part of the lower mold half 12. In the present embodiment, the heat spreader 32 in place of the chip 24 is exposed and encapsulated in the lower cavity 35.
  • The [0036] film 21 a is supplied between the lower mold half 12 and the chip holder 15 a, and the mold assembly is closed as shown in FIG. 7. The film 21 a is pressed between the bottom surface of the lower cavity 35 and the bottom surface of the heat spreader 32. The side surfaces of the heat spreader 32 are covered with the resin supplied from the runner 28 while exposing the bottom surface of the heat spreader 32.
  • Also in the present embodiment, the generation of the burrs at the edges of the surface of the [0037] heat spreader 32 is prevented. In this case, the burr generation is prevented by properly pressing the film 21 a on the heat spreader 32 by the injection pressure of the resin. The floating mechanism of the elastic member 18 in FIG. 2 is unnecessary in the present embodiment because the chip 24 is not oppressed.
  • Since the above embodiments are described only for examples, the present invention is not limited to the above embodiments and various modifications or alternations can be easily made therefrom by those skilled in the art without departing from the scope of the present invention. [0038]

Claims (4)

What is claimed:
1. A method for molding a semiconductor chip in a mold assembly having first and second mold halves disposed for relative movement with respect to each other, said method comprising the steps of:
sandwiching a mold releasing member and the semiconductor chip between said first mold half and said second mold half, the mold releasing member having a property of elastically deforming, the releasing member and one of said first and second mold halves defining a cavity for receiving the semiconductor chip therein; ands
injecting resin in the cavity by using a first pressure lower than a pressure, which allows the mold releasing member to elastically deform, in a closed state of the mold assembly to thereby mold the semiconductor chip.
2. The method as defined in claim 1, wherein the mold releasing member is a film having a substantially uniform thickness.
3. The method as defined in claim 1, further comprising the step of releasing the mold releasing member from the one of the first and second mold halves.
4. The method as defined in claim 1, wherein the closed state is achieved by elastically holding at least one of the first and second mold halves, and the first pressure is lower than a pressure that allows the mold assembly to open from the closed state.
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JP14767399A JP3450223B2 (en) 1999-05-27 1999-05-27 Semiconductor device sealing mold and semiconductor device sealing method
JP11-147673 1999-05-27
US09/577,592 US6554598B1 (en) 1999-05-27 2000-05-25 Mold assembly for encapsulating semiconductor device
US10/373,085 US20030122279A1 (en) 1999-05-27 2003-02-26 Mold assembly and method for encapsulating semiconductor device

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US7241414B2 (en) * 2004-06-25 2007-07-10 Asm Technology Singapore Pte Ltd. Method and apparatus for molding a semiconductor device
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KR20010049421A (en) 2001-06-15
JP2000334782A (en) 2000-12-05

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