US20030025846A1 - Display device, manufacturing method thereof and method of mending breakage of line in display device - Google Patents
Display device, manufacturing method thereof and method of mending breakage of line in display device Download PDFInfo
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- US20030025846A1 US20030025846A1 US10/210,713 US21071302A US2003025846A1 US 20030025846 A1 US20030025846 A1 US 20030025846A1 US 21071302 A US21071302 A US 21071302A US 2003025846 A1 US2003025846 A1 US 2003025846A1
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- storage capacitance
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
Definitions
- the present invention relates to a display device being able to mend a breakage of image signal line, a method of manufacturing the display device, and method of mending breakage of line in display devices, particularly appropriate for applying to liquid crystal display device.
- FIG. 6 is a plain view showing approximate one pixel in the conventional liquid crystal display.
- numerals 1 a, 1 b denote a scanning line
- numeral 2 a, 2 b denote an image signal line
- numeral 6 denotes a pixel electrode
- numeral 7 denotes a source electrode
- numeral 8 denotes a drain electrode
- numeral 14 denotes a part of breakage in line
- numeral 24 denotes a storage capacitance electrode (a first conductive electrode)
- numeral 25 denotes a gate electrode
- numeral 26 denotes a channel protecting film (insulating layer)
- numerals 27 a, 27 b denote a contact hole
- numeral 28 denotes a second conductive electrode
- numeral 29 denotes a third conductive electrode
- numerals 30 a, 30 b, 31 a, 31 b denote a point in which laser light is irradiated.
- FIG. 6 mending method will be explained for the case that image signal line 2 a breaks at a crossing area with scanning line lb.
- laser light is irradiated at two points, 31 a and 31 b, so that branching area of the image signal line 2 a is electrically connected to the third conductive electrode 29 , and the third conductive electrode 29 is electrically connected to storage capacitance electrode 2 .
- laser light is irradiated at the two points, 30 a and 30 b, so that the image signal line 2 a is electrically connected to the second conductive electrode 28 , and the second conductive electrode 28 is electrically connected to storage capacitance electrode 24 .
- FIG. 7 shows a structure of approximately one pixel of a-conventional liquid crystal display device in said prior art, where like reference numerals are used to identify like parts as that in FIG. 6.
- scanning line 1 is broken at a broken point 35
- the broken point 35 is bypassed through a storage capacitance electrode 34 with laser radiating on the laser radiating point 36 , thus broken line is mended.
- the present invention aims at solving the above problems and at improving the production yield through mending the breakage of image signal line without increase of process steps or decrease of aperture ratio.
- the first display device according to the present invention is a display device comprising:
- a pixel electrode being surrounded with said scanning line, said storage capacitance line and said image signal line;
- the second display device is a display device which is involved by the first display device according to the present invention, where said overlapped area of said storage capacitance line and said image signal line is formed by said image signal line and an extended area of said storage capacitance line which extends along one peripheral edge of said pixel electrode.
- said overlapped area of said storage capacitance line and said image signal line is formed by said image signal line and an extended area of said storage capacitance line which extends along one peripheral edge of said pixel electrode.
- the third display device is a display device which is involved by the first or the second display device according to the present invention, where at least two overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line are formed within one pixel area.
- the display device with above features it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- the fourth display device is a display device which is involved by the first, the second or the third display device according to the present invention, where said overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line has the area more than 4 micron by 10 micron square.
- said display device with above features it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- the first method of manufacturing a display device is method of manufacturing a display device including a scanning line formed onto an insulating substrate, a storage capacitance line formed in parallel to said scanning line, an image signal line formed across said scanning line and said storage capacitance line through an insulating layer, and a pixel electrode being surrounded with said scanning line, said storage capacitance line and said image signal line;
- said method comprising a step of forming at least one overlapped area of said storage capacitance line and said image signal line in the area other than the crossing region of said storage capacitance line and said image signal line within one pixel area.
- the second method of manufacturing a display device according to the present invention is a method of manufacturing a display device which is involved by the first method of manufacturing a display device according to the present invention, wherein said step of forming said overlapped area of said storage capacitance line and said image signal line is formed further includes a step of forming said overlapped area by said image signal line and an extended area of said storage capacitance line which extends along one peripheral edge of the pixel electrode.
- the third method of manufacturing a display device according to the present invention is method of manufacturing a display device which is involved by the first or the second method of manufacturing a display device according to the present invention, wherein said step of forming said overlapped area of said storage capacitance line and said image signal line further includes a step of forming at least two overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line within one pixel area.
- said step of forming said overlapped area of said storage capacitance line and said image signal line further includes a step of forming at least two overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line within one pixel area.
- the fourth method of manufacturing a display device according to the present invention is method of manufacturing a display device which is involved by the first, the second or the third method of manufacturing a display device according to the present invention, wherein in said step of forming said overlapped area of said storage capacitance line and said image signal line, said overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line has the area more than 4 micron by 10 micron square.
- the first method of mending the broken line in a display device is a method of mending the broken line in a display having a scanning line formed on an insulating substrate, a storage capacitance line formed in parallel to said scanning line, an image signal line being formed across said scanning line and said storage capacitance line through an insulating layer, and a pixel electrode being surrounded with said scanning line, said storage capacitance line and said image signal line, wherein said method includes steps of:
- the second method of mending the broken line in a display device is a method of mending the broken line in a display which is involved by the first method of mending the broken line in a display device according to the present invention, wherein said step of forming overlapped area of extended part of said storage capacitance line and said image signal line further including a step of forming at least two overlapped area of extended part of extended part of said storage capacitance line and said image signal line within one pixel region.
- the third method of mending the broken line in a display device according to the present invention is a method of mending the broken line in a display which is involved by the first or the second method of mending the broken line in a display device according to the present invention, where a process in which in said overlapped area of extended part of said storage capacitance line and said image signal line, extended part of said storage capacitance line and said image signal line are connected includes a process in which extended part of said storage capacitance line and said image signal line are connected by laser radiation.
- the fourth method of mending the broken line in a display device is a method of mending the broken line in a display which is involved by the first, the second or the third method of mending the broken line in a display device according to the present invention, wherein said step of separating a region between a region closest to said storage capacitance line from said storage capacitance line in a connected area of extended part of said storage capacitance line and said image signal line further includes a step of separating a region between a region closest to said storage capacitance line from said storage capacitance line by laser radiation process in a connected area of extended part of said storage capacitance line and said image signal line.
- the fifth method of mending the broken line in a display device is a method of mending the broken line in a display which is involved by the first method of mending the broken line in a display device according to the present invention, wherein said step of separating a region between a region closest to said storage capacitance line from said storage capacitance line in a connected area of extended part of said storage capacitance line and said image signal line is replaced to a step of separating extended part of the storage capacitance line which extends along the opposite edge of one peripheral edge of said pixel electrode from said pixel electrode in a connected area of extended part of said storage capacitance line and said image signal line, and also in a region including a region between a region closest to said storage capacitance line and said storage capacitance line, being parallel to storage capacitance line.
- the sixth method of mending the broken line in a display device is a method of mending the broken line in a display which is defined as the fifth method of mending the broken line in a display device according to the present invention, wherein said step of separating extended part of the storage capacitance line which extends along the opposite edge of one peripheral edge of said pixel electrode is separated from said pixel electrode in a connected area of extended part of said storage capacitance line and said image signal line, and also in a region including a region between a region closest to said storage capacitance line and said storage capacitance line, being parallel to storage capacitance line is replaced to a step of separating extended part of the storage capacitance line which extends along the opposite edge of one peripheral edge of said pixel electrode from said pixel electrode by a laser radiation in a connected area of extended part of said storage capacitance line and said image signal line, and also in a region including a region between a region closest to said storage capacitance line and said storage capacitance
- FIG. 1 is a plain view showing approximately one pixel in a display device according to the first embodiment of the present invention
- FIG. 2 is the first plain view illustrating mending method of a broken image signal line according to the first embodiment of the present invention
- FIG. 3 is a cross sectional view taken along line A-A in the FIG. 2;
- FIG. 4 is the second plain view illustrating mending method of a broken image signal line according to the first embodiment of the present invention
- FIG. 5 is a plain view showing approximately one pixel in a display device according to the second embodiment of the present invention.
- FIG. 6 is a plain view showing approximately one pixel in a display device in prior art.
- FIG. 7 is also a plain view showing approximately one pixel in a display device in prior art.
- FIG. 1 is a plain view of approximately one pixel in active-matrix type liquid crystal display with use thin film transistor (hereafter called TFT) according to the present invention.
- FIG. 2 is a first plain view illustrating the mending method of the broken image signal line.
- FIG. 3 is a cross sectional view taken along the line A-A in FIG. 2.
- FIG. 4 is a second plane view illustrating the mending method of the broken image signal line.
- FIG. 1 is a plane view showing approximately one pixel having a common Cs structure where storage capacitance is obtained with overlapped area of a pixel electrode and storage capacitance line and its extended part.
- the fabricating process is described with refer to FIGS. 1 to 3 .
- the first conductive film which later forms scanning line 1 and storage capacitance line 3 , is deposited on an insulating substrate 16 .
- the first conductive film is made of metal film such as Al, Cr, Cu, Ta, Mo or alloys of these metals and other additional substances.
- the first conductive film is patterned to form scanning line 1 and storage capacitance line 3 . As shown in FIG.
- the storage capacitance line 3 is patterned so that an extended part 4 of the storage capacitance line which extends along one peripheral edge (side) of the pixel electrode is formed in the area other than crossing region of storage capacitance line 3 and image signal line 2 within one pixel area, and further the extended part 4 of said storage capacitance line has projecting part 5 and the said projecting part 5 has the area 11 where projecting part overlaps with image signal line 2 .
- the said overlapped area 11 is formed at two positions being near each end along elongated direction of image signal line in one pixel so that mending area of broken line is as wide as possible. Further, the said overlapped area 11 is patterned so that extended part 13 of storage capacitance line is formed along the edge opposite to one peripheral edge of the said pixel electrode.
- gate insulator layer 17 is made of SiNx, SiOx, SiOxNy or layered films of them.
- Semiconductive layer 9 is made of amorphous silicon (a—Si) or polycrystalline silicon (p—Si). Further as ohmic contacting layer, n—a—Si or n—p—Si which is a—Si or p—Si contained with small amount dopant such as phosphor, is used. Then with photolithography, semiconductive layer and ohmic contacting layer are patterned for example by dry-etching process.
- the second conductive film is coated which forms later image signal line 2 .
- the second conductive layer Al, Cr, Cu, Ta, Mo, or alloys of these metals and other additional substance, layered films with different metallic layer or layer which composition varies in the direction of film thickness can be used. Then, with photolithography, the layer is patterned to form image signal line. At the time of patterning of the image signal line, source electrode 7 and drain electrode 8 are also formed.
- interlayer insulating film 18 is coated. Then, with photolithography, said interlayer insulating film 18 is patterned. As the interlayer insulating film, SiNx, SiOx, SiOxNy or the layered film of them is used as for the gate insulating film 17 . By patterning of the interlayer insulating film 18 , contact hole 10 is formed. As a result, drain electrode 8 can be electrically connected to pixel electrode 6 later mentioned through said contact hole 10 .
- conductive film being transparent metal such as ITO or SnO 2 which later forms pixel electrode 6 , is coated on the interlayer insulating film 18 and with photolithography, said conductive film is patterned so that said conductive film is surrounded with scanning line 1 , storage capacitance line 3 and image signal line 2 , thus insulating substrate with TFT formed (hereafter called arraying substrate) is completed.
- the laser light is preferably YAG laser or EXCIMER laser, and more preferably, wavelength of the laser light is in the range of 0.1 to 1.06 micron.
- the laser light may be irradiated from either side, top surface (image signal line side) or bottom surface (storage capacitance line side) of arraying substrate.
- output density of the laser irradiated on metal as above is preferably in the range of 1E+2 to 1E+4 J/m 2 .
- Radiation area of the laser at radiating area 15 is preferably approximately 2 micron in diameter.
- the laser is preferably irradiated at 3 or 4 points in the overlapped area of 11 of image signal line 2 and projecting part 5 in extended area 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode.
- the required area of the overlapped area 11 of image signal line 2 and projecting part 5 in extended area 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode depends on the width of image signal line 2 and accuracy in positioning of storage capacitance line and image signal line in the patterning step.
- the overlapped area is larger than approximately 2 micron by 5 micron square, it can be connected, and when it is larger than 4 micron by 10 micron square, laser with 2 micron in diameter can be certainly irradiated at 3 or 4 points in it even if there occurs errors of position (1 micron at maximum) of said storage capacitance line and image signal line, which brings preferable results of more stable connection of the lines and more reliable mending of the breakage of the line.
- the pixel electrode 6 may be conducted to the extended area 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode, and further the storage capacitance line 3 may be conducted to the pixel electrode 6 , which results in a short-circuit in image signal line and the pixel electrode.
- short-circuit in image signal line and the storage capacitance line can be certainly prevented by cutting the region which includes; the cutting region 20 which is between the storage capacitance line 3 and the region closest to the storage capacitance line 3 in connected area of the image signal line and the projecting part of the extended part of the storage capacitance line which extends along one peripheral edge of the pixel electrode, and also includes; the extended part of the storage capacitance line which extends along the pixel electrode 6 and the opposite edge of one peripheral edge of the pixel electrode, being parallel to the storage capacitance line.
- the pixel electrode 6 may be patterned so as not to overlap the cutting area 20 as in shown as R in FIG. 4. In this case, pixel electrode 6 is patterned so that said pixel electrode 6 is enough separated from both the storage capacitance line 3 or the extended part 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode, thereby no conduction occurs there during laser radiation on the cutting area 20 .
- the present embodiment shows an example where there are two overlapped areas 11 of the image signal line and the projecting part in extended part of the storage capacitance line which extends along one peripheral edge of the pixel electrode, it does not mean any limitations in the number of the overlapped areas. There may be three overlapped areas, and further even only one overlapped area with its area as large as possible within one pixel may enable to mend a breakage of the image signal line.
- FIG. 5 is a plain view of approximately one pixel in active-matrix type liquid crystal display with using TFT, where like reference numerals are used to identify like parts as that in FIGS. 1 to 4 .
- overlapped area 23 is formed with a projecting part in the image signal line and the extended part of the storage capacitance line which extends along one peripheral edge of the pixel electrode. Fabricating process of the second embodiment according to the present invention is same as that of the first embodiment and is not explained here.
- the short-circuit of the image signal line and the storage capacitance line can be prevented; by cutting the cutting area 20 which is between the storage capacitance line and the region closest to said storage capacitance line, and in the connected area of projecting part of the image signal line and extended area of the storage capacitance line which extends along one peripheral edge of the pixel electrode, or as shown as cutting area 21 of extended part of the storage capacitance line and the pixel electrode in FIG. 5, by cutting the area which includes said cutting area 20 and the extended part of the storage capacitance line which extends along the pixel electrode and the opposite edge of one peripheral edge of the pixel electrode, being parallel to the storage capacitance line.
- the pixel electrode 6 may be patterned so as to not to overlap with the cutting area 20 , which is shown as R in FIG. 5.
- pixel electrode 6 is patterned so that said pixel electrode 6 is enough separated from both the storage capacitance line 3 and the extending part 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode, thereby no conduction occurs there during laser radiation on the cutting area 20 .
- laser cutting is enough only on the cutting area 20 as in the first embodiment, and therefore such structure prevents a short-circuit of the image signal line and the storage capacitance line, suppresses a point failure of said pixel, and is effective to obtain liquid crystal display with excellent display quality.
- more than 2 micron by 5 micron square may be sufficient, and preferably, more than 4 micron by 10 micron square.
- the scanning line and the storage capacitance line may be made of different conductive layer with each other. Further, above embodiments may applicable to every display device which is provided with a storage capacitance line across a image signal line through an insulating layer.
- display device with liquid crystal is described, they are not limited to the liquid crystal device but applicable to display devices such as electroluminescence device or device using field sequential, or any display device which is provided with a storage capacitance line across a image signal line through an insulating layer.
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Abstract
The present invention is directed to a display device including a scanning line (1) formed on an insulating substrate; a storage capacitance line (3) formed in parallel to said scanning line; an image signal line (2) formed across said scanning line (1) and said storage capacitance line (3) through an insulating layer; and a pixel electrode (6) being surrounded with said scanning line (1), said storage capacitance line (3) and said image signal line (2); wherein at least one overlapped area (11) of said storage capacitance line (3) and said image signal line (2) is defined in the area other than the crossing region of the storage capacitance line (3) and the image signal line (2) within one pixel area; whereby, breakage of the image signal line is mended without increasing the production step, and production yield is improved.
Description
- The present invention relates to a display device being able to mend a breakage of image signal line, a method of manufacturing the display device, and method of mending breakage of line in display devices, particularly appropriate for applying to liquid crystal display device.
- In the conventional display devices such as active-matrix type liquid crystal display, mending method of a breakage of image signal line, is disclosed for example in Japanese Unexamined Patent Publication No. 61852/1997. FIG. 6 is a plain view showing approximate one pixel in the conventional liquid crystal display. In FIG. 6,
numerals numeral numeral 6 denotes a pixel electrode,numeral 7 denotes a source electrode,numeral 8 denotes a drain electrode,numeral 14 denotes a part of breakage in line,numeral 24 denotes a storage capacitance electrode (a first conductive electrode),numeral 25 denotes a gate electrode,numeral 26 denotes a channel protecting film (insulating layer),numerals numeral 28 denotes a second conductive electrode,numeral 29 denotes a third conductive electrode,numerals - In FIG. 6, mending method will be explained for the case that
image signal line 2 a breaks at a crossing area with scanning line lb. In this case, laser light is irradiated at two points, 31 a and 31 b, so that branching area of theimage signal line 2 a is electrically connected to the thirdconductive electrode 29, and the thirdconductive electrode 29 is electrically connected tostorage capacitance electrode 2. Then, laser light is irradiated at the two points, 30 a and 30 b, so that theimage signal line 2 a is electrically connected to the secondconductive electrode 28, and the secondconductive electrode 28 is electrically connected tostorage capacitance electrode 24. And, laser light is irradiated at thepoint 32,storage capacitance electrode 24 is separated frompixel electrode 6. Further, laser light is irradiated at thepoint 33, thereby drainelectrode 8 andgate electrode 25 in thin film transistor are electrically connected. By the above treatments, path line shown by a series of arrows is formed in FIG. 6.Storage capacitance electrode 24 is utilized as a part of signal electrode thus a breakage of image signal line is mended. - However, in above mentioned technology, although mending of image signal line is possible, there is a problem that a pattern for mending of image signal line is needed, which causes an increase in the number of masks and the number of production step. Further, the region for mending pattern is required, which causes a decrease in aperture ratio in a pixel.
- Besides, prior art for mending of broken line by use of storage capacitance line is disclosed for example Japanese Unexamined Patent Publication No. 61852/1997. FIG. 7 shows a structure of approximately one pixel of a-conventional liquid crystal display device in said prior art, where like reference numerals are used to identify like parts as that in FIG. 6. In FIG. 7, when
scanning line 1 is broken at abroken point 35, thebroken point 35 is bypassed through astorage capacitance electrode 34 with laser radiating on thelaser radiating point 36, thus broken line is mended. However, in said prior art, although the breakage of the scanning line is mended by bypassing through the storage capacitance electrode, there is no description on mending of a breakage of the image signal line. Further, because thestorage capacitance line 34 used for mending is connected topixel electrode 6 through a contact hole, it is difficult to mend the breakage in the image signal line by using storage capacitance line. - The present invention aims at solving the above problems and at improving the production yield through mending the breakage of image signal line without increase of process steps or decrease of aperture ratio.
- The first display device according to the present invention is a display device comprising:
- a scanning line formed on an insulating substrate;
- a storage capacitance line formed in parallel to said scanning line;
- an image signal line formed across said scanning line and said storage capacitance line through an insulating layer; and
- a pixel electrode being surrounded with said scanning line, said storage capacitance line and said image signal line;
- wherein at least one overlapped area of said storage capacitance line and said image signal line is formed in an area other than the crossing region of the storage capacitance line and the image signal line within one pixel area. In the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- The second display device according to the present invention is a display device which is involved by the first display device according to the present invention, where said overlapped area of said storage capacitance line and said image signal line is formed by said image signal line and an extended area of said storage capacitance line which extends along one peripheral edge of said pixel electrode. In the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- The third display device according to the present invention is a display device which is involved by the first or the second display device according to the present invention, where at least two overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line are formed within one pixel area. In the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- The fourth display device according to the present invention is a display device which is involved by the first, the second or the third display device according to the present invention, where said overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line has the area more than 4 micron by 10 micron square. In the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- The first method of manufacturing a display device according to the present invention is method of manufacturing a display device including a scanning line formed onto an insulating substrate, a storage capacitance line formed in parallel to said scanning line, an image signal line formed across said scanning line and said storage capacitance line through an insulating layer, and a pixel electrode being surrounded with said scanning line, said storage capacitance line and said image signal line;
- said method comprising a step of forming at least one overlapped area of said storage capacitance line and said image signal line in the area other than the crossing region of said storage capacitance line and said image signal line within one pixel area. In the fabrication method of the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- The second method of manufacturing a display device according to the present invention is a method of manufacturing a display device which is involved by the first method of manufacturing a display device according to the present invention, wherein said step of forming said overlapped area of said storage capacitance line and said image signal line is formed further includes a step of forming said overlapped area by said image signal line and an extended area of said storage capacitance line which extends along one peripheral edge of the pixel electrode. In the fabrication method of the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of manufacturing steps.
- The third method of manufacturing a display device according to the present invention is method of manufacturing a display device which is involved by the first or the second method of manufacturing a display device according to the present invention, wherein said step of forming said overlapped area of said storage capacitance line and said image signal line further includes a step of forming at least two overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line within one pixel area. In the method of manufacturing the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- The fourth method of manufacturing a display device according to the present invention is method of manufacturing a display device which is involved by the first, the second or the third method of manufacturing a display device according to the present invention, wherein in said step of forming said overlapped area of said storage capacitance line and said image signal line, said overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line has the area more than 4 micron by 10 micron square. In the method of manufacturing the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of manufacturing steps.
- The first method of mending the broken line in a display device according to the present invention is a method of mending the broken line in a display having a scanning line formed on an insulating substrate, a storage capacitance line formed in parallel to said scanning line, an image signal line being formed across said scanning line and said storage capacitance line through an insulating layer, and a pixel electrode being surrounded with said scanning line, said storage capacitance line and said image signal line, wherein said method includes steps of:
- forming at least one overlapped area of said image signal line and the extended area of said storage capacitance line which extends along one peripheral edge of said pixel electrode in the area other than the crossing region of storage capacitance line and image signal line within one pixel area;
- connecting extended part of said storage capacitance line with said image signal line in said overlapped area of extended part of said storage capacitance line and said image signal line; and
- separating a region between a region closest to said storage capacitance line from said storage capacitance line in a connected area of extended part of said storage capacitance line and said image signal line. In the method of mending the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of manufacturing steps.
- The second method of mending the broken line in a display device according to the present invention is a method of mending the broken line in a display which is involved by the first method of mending the broken line in a display device according to the present invention, wherein said step of forming overlapped area of extended part of said storage capacitance line and said image signal line further including a step of forming at least two overlapped area of extended part of extended part of said storage capacitance line and said image signal line within one pixel region. In the method of mending the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of manufacturing steps.
- The third method of mending the broken line in a display device according to the present invention is a method of mending the broken line in a display which is involved by the first or the second method of mending the broken line in a display device according to the present invention, where a process in which in said overlapped area of extended part of said storage capacitance line and said image signal line, extended part of said storage capacitance line and said image signal line are connected includes a process in which extended part of said storage capacitance line and said image signal line are connected by laser radiation. In the mending method of the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- The fourth method of mending the broken line in a display device according to the present invention is a method of mending the broken line in a display which is involved by the first, the second or the third method of mending the broken line in a display device according to the present invention, wherein said step of separating a region between a region closest to said storage capacitance line from said storage capacitance line in a connected area of extended part of said storage capacitance line and said image signal line further includes a step of separating a region between a region closest to said storage capacitance line from said storage capacitance line by laser radiation process in a connected area of extended part of said storage capacitance line and said image signal line. In the mending method of the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of production steps.
- The fifth method of mending the broken line in a display device according to the present invention is a method of mending the broken line in a display which is involved by the first method of mending the broken line in a display device according to the present invention, wherein said step of separating a region between a region closest to said storage capacitance line from said storage capacitance line in a connected area of extended part of said storage capacitance line and said image signal line is replaced to a step of separating extended part of the storage capacitance line which extends along the opposite edge of one peripheral edge of said pixel electrode from said pixel electrode in a connected area of extended part of said storage capacitance line and said image signal line, and also in a region including a region between a region closest to said storage capacitance line and said storage capacitance line, being parallel to storage capacitance line. In the method of mending the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of manufacturing steps.
- The sixth method of mending the broken line in a display device according to the present invention is a method of mending the broken line in a display which is defined as the fifth method of mending the broken line in a display device according to the present invention, wherein said step of separating extended part of the storage capacitance line which extends along the opposite edge of one peripheral edge of said pixel electrode is separated from said pixel electrode in a connected area of extended part of said storage capacitance line and said image signal line, and also in a region including a region between a region closest to said storage capacitance line and said storage capacitance line, being parallel to storage capacitance line is replaced to a step of separating extended part of the storage capacitance line which extends along the opposite edge of one peripheral edge of said pixel electrode from said pixel electrode by a laser radiation in a connected area of extended part of said storage capacitance line and said image signal line, and also in a region including a region between a region closest to said storage capacitance line and said storage capacitance line, being parallel to storage capacitance line. In the method of mending the display device with above features, it is possible to mend a breakage of the image signal line without increase of the numbers of manufacturing steps.
- FIG. 1 is a plain view showing approximately one pixel in a display device according to the first embodiment of the present invention;
- FIG. 2 is the first plain view illustrating mending method of a broken image signal line according to the first embodiment of the present invention;
- FIG. 3 is a cross sectional view taken along line A-A in the FIG. 2;
- FIG. 4 is the second plain view illustrating mending method of a broken image signal line according to the first embodiment of the present invention;
- FIG. 5 is a plain view showing approximately one pixel in a display device according to the second embodiment of the present invention;
- FIG. 6 is a plain view showing approximately one pixel in a display device in prior art; and
- FIG. 7 is also a plain view showing approximately one pixel in a display device in prior art.
- The first embodiment of the present invention is described with refer to FIGS.1-4. FIG. 1 is a plain view of approximately one pixel in active-matrix type liquid crystal display with use thin film transistor (hereafter called TFT) according to the present invention. FIG. 2 is a first plain view illustrating the mending method of the broken image signal line. FIG. 3 is a cross sectional view taken along the line A-A in FIG. 2. FIG. 4 is a second plane view illustrating the mending method of the broken image signal line.
- FIG. 1 is a plane view showing approximately one pixel having a common Cs structure where storage capacitance is obtained with overlapped area of a pixel electrode and storage capacitance line and its extended part. The fabricating process is described with refer to FIGS.1 to 3. The first conductive film which later forms scanning
line 1 andstorage capacitance line 3, is deposited on an insulatingsubstrate 16. The first conductive film is made of metal film such as Al, Cr, Cu, Ta, Mo or alloys of these metals and other additional substances. Next, with photolithography, the first conductive film is patterned to form scanningline 1 andstorage capacitance line 3. As shown in FIG. 1, thestorage capacitance line 3 is patterned so that anextended part 4 of the storage capacitance line which extends along one peripheral edge (side) of the pixel electrode is formed in the area other than crossing region ofstorage capacitance line 3 andimage signal line 2 within one pixel area, and further theextended part 4 of said storage capacitance line has projectingpart 5 and the said projectingpart 5 has thearea 11 where projecting part overlaps withimage signal line 2. - In the present embodiment, the said overlapped
area 11 is formed at two positions being near each end along elongated direction of image signal line in one pixel so that mending area of broken line is as wide as possible. Further, the said overlappedarea 11 is patterned so thatextended part 13 of storage capacitance line is formed along the edge opposite to one peripheral edge of the said pixel electrode. - Then, with use of coating apparatus such as plasma CVD,
gate insulator layer 17,semiconductive layer 9, ohmic contact layer (not shown) is coated in series.Gate insulator 17 is made of SiNx, SiOx, SiOxNy or layered films of them.Semiconductive layer 9 is made of amorphous silicon (a—Si) or polycrystalline silicon (p—Si). Further as ohmic contacting layer, n—a—Si or n—p—Si which is a—Si or p—Si contained with small amount dopant such as phosphor, is used. Then with photolithography, semiconductive layer and ohmic contacting layer are patterned for example by dry-etching process. - Next, the second conductive film is coated which forms later
image signal line 2. As the second conductive layer, Al, Cr, Cu, Ta, Mo, or alloys of these metals and other additional substance, layered films with different metallic layer or layer which composition varies in the direction of film thickness can be used. Then, with photolithography, the layer is patterned to form image signal line. At the time of patterning of the image signal line,source electrode 7 and drainelectrode 8 are also formed. - Next, with use of coating apparatus such as plasma CVD,
interlayer insulating film 18 is coated. Then, with photolithography, saidinterlayer insulating film 18 is patterned. As the interlayer insulating film, SiNx, SiOx, SiOxNy or the layered film of them is used as for thegate insulating film 17. By patterning of theinterlayer insulating film 18,contact hole 10 is formed. As a result,drain electrode 8 can be electrically connected topixel electrode 6 later mentioned through saidcontact hole 10. - And, conductive film being transparent metal such as ITO or SnO2, which later forms
pixel electrode 6, is coated on theinterlayer insulating film 18 and with photolithography, said conductive film is patterned so that said conductive film is surrounded withscanning line 1,storage capacitance line 3 andimage signal line 2, thus insulating substrate with TFT formed (hereafter called arraying substrate) is completed. - During fabrication of arraying substrate as described above, due to foreign substance generated in the step of coating or patterning of image signal line, there may occurs a
breakage 14 of the image signal line as in FIG. 2. Said breakage of the line is discovered by the inspection with image inspection monitor in each step of fabrication of arraying substrate. Normally, when a breakage of image signal line occurs, said voltage is supplied from drive circuit to the breakage point but not supplied far side from said breakage point, which brings about a decrease in production yield due to line failure. - Accordingly, to mend the breakage of line, as shown in FIG. 2, by radiation of laser at the
laser radiating area 15 in overlappedarea 11 ofimage signal line 2 and projectingpart 5 inextended area 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode, as shown in FIG. 3, meltedmetal 19 connects theextended area 4 of storage capacitance line andimage signal line 2. The laser light is preferably YAG laser or EXCIMER laser, and more preferably, wavelength of the laser light is in the range of 0.1 to 1.06 micron. The laser light may be irradiated from either side, top surface (image signal line side) or bottom surface (storage capacitance line side) of arraying substrate. As for the intensity of the laser light, output density of the laser irradiated on metal as above is preferably in the range of 1E+2 to 1E+4 J/m2. Radiation area of the laser at radiatingarea 15 is preferably approximately 2 micron in diameter. Further, from a viewpoint of stability in contact resistance, the laser is preferably irradiated at 3 or 4 points in the overlapped area of 11 ofimage signal line 2 and projectingpart 5 inextended area 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode. - The required area of the overlapped
area 11 ofimage signal line 2 and projectingpart 5 inextended area 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode, depends on the width ofimage signal line 2 and accuracy in positioning of storage capacitance line and image signal line in the patterning step. When the overlapped area is larger than approximately 2 micron by 5 micron square, it can be connected, and when it is larger than 4 micron by 10 micron square, laser with 2 micron in diameter can be certainly irradiated at 3 or 4 points in it even if there occurs errors of position (1 micron at maximum) of said storage capacitance line and image signal line, which brings preferable results of more stable connection of the lines and more reliable mending of the breakage of the line. - Next, laser is irradiated to cut a cutting
area 20 which is between thestorage capacitance line 3 and the region closest to thestorage capacitance line 3 in connected area in the overlapped area of theimage signal line 2 and projectingpart 5 inextended area 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode. By doing this, a short-circuit between the voltage supplied to the storage capacitance line and the voltage supplied to the image signal line is prevented. - Further, cutting by laser radiation is preferably done at only cutting
point 20, however, in actual cutting of thecutting point 20 by laser, thepixel electrode 6 may be conducted to theextended area 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode, and further thestorage capacitance line 3 may be conducted to thepixel electrode 6, which results in a short-circuit in image signal line and the pixel electrode. In this case, short-circuit in image signal line and the storage capacitance line can be certainly prevented by cutting the region which includes; the cuttingregion 20 which is between thestorage capacitance line 3 and the region closest to thestorage capacitance line 3 in connected area of the image signal line and the projecting part of the extended part of the storage capacitance line which extends along one peripheral edge of the pixel electrode, and also includes; the extended part of the storage capacitance line which extends along thepixel electrode 6 and the opposite edge of one peripheral edge of the pixel electrode, being parallel to the storage capacitance line. - In this case, voltage of the pixel becomes equal to that of the image signal line, which means that said pixel consequently becomes failure. However, by such treatment, a substantial line failure due to a breakage of said image signal line can be converted to a slight damage of point failure, which enables an increase in the production yield for the display device.
- Further, in order to prevent the sort-circuit of the image signal line and the storage capacitance line due to the laser radiation on the cutting
area 20, thepixel electrode 6 may be patterned so as not to overlap the cuttingarea 20 as in shown as R in FIG. 4. In this case,pixel electrode 6 is patterned so that saidpixel electrode 6 is enough separated from both thestorage capacitance line 3 or theextended part 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode, thereby no conduction occurs there during laser radiation on the cuttingarea 20. By adopting such structure, laser cutting is enough only on the cuttingarea 20, and therefore such structure prevents a short-circuit of the image signal line and the storage capacitance line, suppresses a point failure of said pixel, and is effective to obtain liquid crystal display with excellent display quality. - Due to the structure or process described above, a breakage of the image signal line can be mended with neither inconvenience such as short-circuit of the image signal line and the storage capacitance line nor increase in the number of production steps.
- Furthermore, although the present embodiment shows an example where there are two overlapped
areas 11 of the image signal line and the projecting part in extended part of the storage capacitance line which extends along one peripheral edge of the pixel electrode, it does not mean any limitations in the number of the overlapped areas. There may be three overlapped areas, and further even only one overlapped area with its area as large as possible within one pixel may enable to mend a breakage of the image signal line. Even in the case where only one overlappedarea 11 in said pixel is provided, a short-circuit of the image signal line and the storage capacitance line can be prevented by forming and cutting the region near the storage capacitance line, whereextended part 4 of the storage capacitance line and theimage signal line 2 do not overlap so as to retain the cuttingarea - The second embodiment of the present invention will be described with refer to FIG. 5. FIG. 5 is a plain view of approximately one pixel in active-matrix type liquid crystal display with using TFT, where like reference numerals are used to identify like parts as that in FIGS.1 to 4. In FIG. 5, being different from the first embodiment of the present invention, overlapped
area 23 is formed with a projecting part in the image signal line and the extended part of the storage capacitance line which extends along one peripheral edge of the pixel electrode. Fabricating process of the second embodiment according to the present invention is same as that of the first embodiment and is not explained here. - Then, as in the first embodiment of the present invention, laser is irradiated on the
laser radiating area 15 in the overlappedarea 23 of the projecting part in the image signal line and the extended part of the storage capacitance line which extends along one peripheral edge of the pixel electrode, thereby theimage signal line 2 andextended part 4 of the storage capacitance line are connected. And, as in the first embodiment, the short-circuit of the image signal line and the storage capacitance line can be prevented; by cutting the cuttingarea 20 which is between the storage capacitance line and the region closest to said storage capacitance line, and in the connected area of projecting part of the image signal line and extended area of the storage capacitance line which extends along one peripheral edge of the pixel electrode, or as shown as cuttingarea 21 of extended part of the storage capacitance line and the pixel electrode in FIG. 5, by cutting the area which includes said cuttingarea 20 and the extended part of the storage capacitance line which extends along the pixel electrode and the opposite edge of one peripheral edge of the pixel electrode, being parallel to the storage capacitance line. By doing this, similar effect as in the first embodiment can be expected. - Further, as in the first embodiment of the present invention, the
pixel electrode 6 may be patterned so as to not to overlap with the cuttingarea 20, which is shown as R in FIG. 5. In this case,pixel electrode 6 is patterned so that saidpixel electrode 6 is enough separated from both thestorage capacitance line 3 and the extendingpart 4 of the storage capacitance line which extends along one peripheral edge of the pixel electrode, thereby no conduction occurs there during laser radiation on the cuttingarea 20. By adopting such structure, laser cutting is enough only on the cuttingarea 20 as in the first embodiment, and therefore such structure prevents a short-circuit of the image signal line and the storage capacitance line, suppresses a point failure of said pixel, and is effective to obtain liquid crystal display with excellent display quality. - Further, as for the area of the overlapped
region 23 of the projecting part of the image signal line and the extended part of the storage capacitance line which extends along one peripheral edge of the pixel electrode, more than 2 micron by 5 micron square may be sufficient, and preferably, more than 4 micron by 10 micron square. - Although in the present embodiment, an example is described where two overlapped
regions 23 of the projecting part of the image signal line and the extended part of the storage capacitance line which extends along one peripheral edge of the pixel electrode are formed near each end of the elongated direction of the image signal line within one pixel so as to mending area is as wide as possible, it does not mean any limitations in the number of the overlapped areas. There may be more than three overlapped regions, or even only one overlapped region with area as wide as possible within one pixel can mend a breakage of the image signal line. Even in the case where only one overlappedregion 23 is provided in one pixel, by forming and cutting the region near thestorage capacitance line 3 in which the projectingpart 22 of the image signal line and the extended part of the storage capacitance line do not overlap, so as to retain the cuttingpart - Further, although in the first and second embodiments, an example where the scanning line and the storage capacitance line are made of identical conductive layer is described, the scanning line and the storage capacitance line may be made of different conductive layer with each other. Further, above embodiments may applicable to every display device which is provided with a storage capacitance line across a image signal line through an insulating layer.
- Further, although in the first and second embodiments, display device with liquid crystal is described, they are not limited to the liquid crystal device but applicable to display devices such as electroluminescence device or device using field sequential, or any display device which is provided with a storage capacitance line across a image signal line through an insulating layer.
Claims (14)
1. A display device comprising:
a scanning line formed on an insulating substrate;
a storage capacitance line formed in parallel to said scanning line;
an image signal line formed across said scanning line and said storage capacitance line through an insulating layer; and
a pixel electrode being surrounded with said scanning line, said storage capacitance line and said image signal line;
wherein at least one overlapped area of said storage capacitance line and said image signal line is formed in an area other than the crossing region of the storage capacitance line and the image signal line within one pixel area.
2. The display device of claim 1 , wherein said overlapped area of said storage capacitance line and said image signal line is formed by said image signal line and an extended area of said storage capacitance line which extends along one peripheral edge of said pixel electrode.
3. The display device of any one of claim 1 or 2, wherein at least two of said overlapped area of said storage capacitance line and said image signal line are formed within one pixel area.
4. The display device of claim 1 or 2, wherein said overlapped area of said storage capacitance line and said image signal line has an area of at least 4 μm×10 μm.
5. Method for manufacturing a display device, wherein said display device comprises:
a scanning line formed on an insulating substrate;
a storage capacitance line formed in parallel to said scanning line;
an image signal line formed across said scanning line and said storage capacitance line through an insulating layer; and
a pixel electrode being surrounded with said scanning line, said storage capacitance line and said image signal line;
said method comprising a step of forming at least one overlapped area of said storage capacitance line and said image signal line in the area other than the crossing region of said storage capacitance line and said image signal line within one pixel area.
6. The method of claim 5 , wherein said step of forming said overlapped area of said storage capacitance line and said image signal line is formed further includes a step of forming said overlapped area by said image signal line and an extended area of said storage capacitance line which extends along one peripheral edge of the pixel electrode.
7. The method of claim 5 , wherein said step of forming said overlapped area of said storage capacitance line and said image signal line further includes a step of forming at least two overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line within one pixel area.
8. The method of claim 5 or 6, wherein in said step of forming said overlapped area of said storage capacitance line and said image signal line, said overlapped area of the image signal line and said storage capacitance line or extended area of storage capacitance line has the area more than 4 micron by 10 micron square.
9. Method of mending the broken line in a display device according to the present invention is a method of mending the broken line in a display having a scanning line formed on an insulating substrate, a storage capacitance line formed in parallel to said scanning line, an image signal line being formed across said scanning line and said storage capacitance line through an insulating layer, and a pixel electrode being surrounded with said scanning line, said storage capacitance line and said image signal line, wherein said method includes steps of:
forming at least one overlapped area of said image signal line and the extended area of said storage capacitance line which extends along one peripheral edge of said pixel electrode in the area other than the crossing region of storage capacitance line and image signal line within one pixel area;
connecting extended part of said storage capacitance line with said image signal line in said overlapped area of extended part of said storage capacitance line and said image signal line; and
separating a region between a region closest to said storage capacitance line from said storage capacitance line in a connected area of extended part of said storage capacitance line and said image signal line.
10. The method of claim 9 , wherein said step of forming overlapped area of extended part of said storage capacitance line and said image signal line further including a step of forming at least two overlapped area of extended part of extended part of said storage capacitance line and said image signal line within one pixel region.
11. The method of claim 9 or 10, wherein a process in which in said overlapped area of extended part of said storage capacitance line and said image signal line, extended part of said storage capacitance line and said image signal line are connected includes a process in which extended part of said storage capacitance line and said image signal line are connected by laser radiation.
12. The method of claim 9 or 10, wherein said step of is separating a region between a region closest to said storage capacitance line from said storage capacitance line in a connected area of extended part of said storage capacitance line and said image signal line further includes a step of separating a region between a region closest to said storage capacitance line from said storage capacitance line by laser radiation process in a connected area of extended part of said storage capacitance line and said image signal line.
13. The method of claim 9 , wherein said step of separating a region between a region closest to said storage capacitance line from said storage capacitance line in a connected area of extended part of said storage capacitance line and said image signal line is replaced to a step of separating extended part of the storage capacitance line which extends along the opposite edge of one peripheral edge of said pixel electrode from said pixel electrode in a connected area of extended part of said storage capacitance line and said image signal line, and also in a region including a region between a region closest to said storage capacitance line and said storage capacitance line, being parallel to said storage capacitance line.
14. The method of claim 13 , wherein said step of separating extended part of the storage capacitance line which extends along the opposite edge of one peripheral edge of said pixel electrode is separated from said pixel electrode in a connected area of extended part of said storage capacitance line and said image signal line, and also in a region including a region between a region closest to said storage capacitance line and said storage capacitance line, being parallel to said storage capacitance line is replaced to a step of separating extended part of the storage capacitance line which extends along the opposite edge of one peripheral edge of said pixel electrode from said pixel electrode by a laser radiation in a connected area of extended part of said storage capacitance line and said image signal line, and also in a region including a region between a region closest to said storage capacitance line and said storage capacitance line, being parallel to said storage capacitance line.
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US10/948,392 US7113252B2 (en) | 2001-07-31 | 2004-09-22 | Method of mending breakage of line in display device |
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US8040336B2 (en) | 2005-09-09 | 2011-10-18 | Au Optronics Corp. | Rescue circuit line, display device having the same and method for manufacturing the same |
US20070216824A1 (en) * | 2006-03-15 | 2007-09-20 | Chi-Nan Liao | Display Panel Having Repair Lines and Signal Lines Disposed at Different Substrates |
US7894011B2 (en) | 2006-03-15 | 2011-02-22 | Au Optronics Corp. | Display panel having repair lines and signal lines disposed at different substrates |
US20110063539A1 (en) * | 2006-03-15 | 2011-03-17 | Chi-Nan Liao | Display panel having repair lines and signal lines disposed at different substrates |
US8026993B2 (en) | 2006-03-15 | 2011-09-27 | Au Optronics Corp. | Display panel having repair lines and signal lines disposed at different substrates |
Also Published As
Publication number | Publication date |
---|---|
US7113252B2 (en) | 2006-09-26 |
KR20030011563A (en) | 2003-02-11 |
US20050052445A1 (en) | 2005-03-10 |
JP2003043951A (en) | 2003-02-14 |
TW576941B (en) | 2004-02-21 |
JP4954395B2 (en) | 2012-06-13 |
KR100761604B1 (en) | 2007-09-27 |
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