US20020084434A1 - Lock device and lock method for knife gate valves - Google Patents

Lock device and lock method for knife gate valves Download PDF

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Publication number
US20020084434A1
US20020084434A1 US09/750,271 US75027100A US2002084434A1 US 20020084434 A1 US20020084434 A1 US 20020084434A1 US 75027100 A US75027100 A US 75027100A US 2002084434 A1 US2002084434 A1 US 2002084434A1
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Prior art keywords
swivel lock
shaft
lock member
knife
locking device
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US6398184B1 (en
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Craig Sowada
Richard Ruegemer
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DeZURIK Inc
SPX Technologies Inc
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Assigned to GS DEVELOPMENT CORPORATION reassignment GS DEVELOPMENT CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SPX CORPORATION
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Assigned to WELLS FARGO BUSINESS CREDIT CANADA ULC reassignment WELLS FARGO BUSINESS CREDIT CANADA ULC SECURITY AGREEMENT Assignors: SARTELL VALVES, INC.
Assigned to WELLS FARGO BANK, NATIONAL ASSOCIATION MAC N9312-040 reassignment WELLS FARGO BANK, NATIONAL ASSOCIATION MAC N9312-040 SECURITY AGREEMENT Assignors: SARTELL VALVES, INC.
Assigned to SARTELL VALVES, INC. reassignment SARTELL VALVES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SPX CORPORATION
Assigned to DEZURIK, INC. reassignment DEZURIK, INC. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: SARTELL VALVES, INC.
Assigned to WELLS FARGO BUSINESS CREDIT CANADA ULC reassignment WELLS FARGO BUSINESS CREDIT CANADA ULC SECURITY AGREEMENT Assignors: DEZURIK, INC.
Assigned to WELLS FARGO BANK, NATIONAL ASSOCIATION MAC N9312-040 reassignment WELLS FARGO BANK, NATIONAL ASSOCIATION MAC N9312-040 SECURITY AGREEMENT Assignors: DEZURIK, INC.
Assigned to WELLS FARGO BANK, NATIONAL ASSOCIATION reassignment WELLS FARGO BANK, NATIONAL ASSOCIATION SECURITY AGREEMENT Assignors: DEZURIK, INC.
Assigned to WELLS FARGO BUSINESS CREDIT CANADA ULC reassignment WELLS FARGO BUSINESS CREDIT CANADA ULC SECURITY AGREEMENT Assignors: DEZURIK, INC.
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K35/00—Means to prevent accidental or unauthorised actuation

Definitions

  • the present invention relates generally to a lock device and lock method for a valve, such as a knife gate valve. More particularly, the invention relates to a lock device and method that can lock the valve in a position such as an open and/or closed position.
  • Knik gate valves which may have a knife gate element that reciprocates between open and closed positions.
  • the knife generally moves in a reciprocating linear manner across the area of the fluid channel to form a gate by being actuated by an actuator such as a hydraulic or pneumatic actuator.
  • the present invention provides a device and method for locking a knife gate valve in a position, such as an open and/or closed position.
  • the invention can provide benefits such as preventing accidental opening or closing of the valve.
  • the invention provides a locking device for a knife gate valve having a housing and a reciprocating shaft that reciprocates a knife in back and forth directions.
  • the locking device has a pair of first posts disposed substantially parallel to the shaft, each first post having one end mounted to the housing, and each first post having a first engageable portion.
  • a swivel lock member is mounted to rotate substantially about the axis of the shaft and to reciprocate together with the shaft and the knife.
  • the swivel lock member is selectively rotatable between (1) an unlocked position at which the swivel lock member does not engage the first engageable portions and (2) a locked position at which the swivel lock member engages both of the first engageable portions to prevent the swivel lock member from movement in at least one of the back and forth directions along the axis of the shaft, thereby preventing the shaft and the knife from reciprocating movement in at least one of the back and forth directions when the swivel lock member is in the locked position and engaging the first engageable portions.
  • the invention provides a pair of second posts disposed substantially parallel to the shaft, each second post having one end mounted to the housing, and each second post has a second engageable portion.
  • the swivel lock is rotatable to a locked position at which the engaging portions each engage one of the second engageable portions to prevent the swivel lock member from movement in at least one of the back and forth directions along the axis of the shaft, thereby preventing the shaft and the knife from reciprocating movement in one of the back and forth directions when the swivel lock is in the locked position and engaging the second engageable portions.
  • the invention provides a method for locking a knife gate valve having a housing and a reciprocating shaft that reciprocates a knife in back and forth directions and has a pair of first posts disposed substantially parallel to the shaft, each first post having one end mounted to the housing, and each first post having a first engageable portion comprising the steps of positioning the knife in a desired position.
  • the rotating a swivel lock member is rotated substantially about the axis of the shaft into a locked position at which the swivel lock member engages both of the first engageable portions to prevent the swivel lock member from movement in at least one of the back and forth directions along the axis of the shaft, thereby preventing the shaft and the knife from reciprocating movement in at least one of the back and forth directions when the swivel lock member is in the locked position and engaging the first engageable portions.
  • FIG. 1 is a perspective view of a valve unlocked in a lowered, closed position.
  • FIG. 2 is a perspective view of a valve locked in a raised, open position.
  • FIG. 3 is a perspective view of a valve locked in a lowered, closed position.
  • FIG. 4 is a side view of a valve and cylinder actuator, with the valve locked in a lowered, closed position.
  • FIG. 5 is a side view of a valve and cylinder actuator, with the valve locked in a raised, open position.
  • FIG. 6 is a cross sectional view taken along line 6 - 6 in FIG. 4.
  • FIG. 7 is a side detail view of a swivel lock with a padlock installed.
  • FIG. 1 there is shown a valve 10 having a housing 12 .
  • a knife 14 slides through opening 16 in the housing 12 .
  • Reciprocation of the knife 14 in a gate of the valve 10 opens and closes the fluid path in the valve 10 .
  • the movement of the knife 14 is described herein for convenience as being vertical, with raised and lowered positions.
  • the valve 10 may of course be oriented in any direction, and the knife 14 may actually reciprocate horizontally or in any angled direction relative to the ground.
  • the knife 14 is moved vertically by a shaft 18 , and is attached to the shaft 18 by a clamp 20 .
  • the clamp 20 has a shaft portion 21 that is attached to the lower end of the shaft 18 .
  • the shaft 18 is moved vertically by a cylinder actuator 22 which may be hydraulic, pneumatic, electrical or powered by any suitable means.
  • a swivel lock 24 is attached to the clamp 20 adjacent to the end of the shaft 18 .
  • the swivel lock 24 has an internal bore with a bearing 25 sized to fit on an outer surface of the shaft portion 21 of the clamp 20 , so that the swivel lock 24 can freely rotate around the axis of the shaft portion 21 , but is restrained so that it cannot travel upwardly or downwardly along the shaft portion 21 in the direction of the axis of the shaft 18 .
  • the swivel lock 24 can alternatively be mounted to the shaft 18 so that the swivel lock 24 swivels around the shaft 18 but does not move axially along the shaft 18 .
  • the swivel lock has indentations 26 , 27 that can engage posts 28 , 32 , 36 and 40 as described below.
  • An upper post 28 extends downwardly from the cylinder actuator 22 and has a head 30 .
  • a second upper post 32 extends downwardly from the cylinder actuator 22 and has a head 34 .
  • a lower post 36 extends upwardly from the housing 12 and has a head 38 .
  • a second lower post 40 extends upwardly from the housing 12 and has a head 42 .
  • Side supports 44 and 46 connect the housing 12 and the cylinder actuator 22 .
  • the heads 30 , 34 , 38 and 42 form a change in diameter of the posts, and together with the adjacent regions of the posts the heads form an engageable portion that can be engaged in the indentations 26 and 27 of the swivel lock 24 .
  • FIG. 2 shows the valve 10 in an upright and locked position with the knife 14 extending from the opening 16 of the housing 12 , and attached to the shaft 18 by the clamp 20 .
  • the shaft 18 in this position is retracted due to force exerted by the cylinder actuator 22 to open the valve.
  • the swivel lock 24 adjacent the clamp 20 is engaged with and in contact with the upper posts 28 , 32 .
  • the indentation 27 fits partially around the diameter of post 32 , and has a smaller diameter than head 34 , so that the swivel lock 20 cannot move axially past the head 30 .
  • the swivel lock 24 has a vertical slot 50 with webbing 52 .
  • the swivel lock 24 has a hole 56 perpendicular to the axis of rotation of the swivel lock 24 at the vertical slot 50 in which a set screw 54 (see FIG. 7) may be inserted to prevent the swivel lock 24 from rotating from the position it is in when the set screw 54 is installed.
  • the set screw 54 can also be used to hold the swivel lock 24 in the unlocked position shown in FIG. 1.
  • the shaft 18 may have a dimple or indentation to receive the set screw 54 when the swivel lock 24 is rotated to a certain position.
  • the set screw 54 may engage the cylindrical surface of the shaft 18 and frictionally engage it with sufficient force to prevent rotation of the swivel lock 24 until the set screw 54 is released.
  • the set screw need not be removed once installed; it can be backed off to permit rotation of the swivel member and can be tightened to hold the swivel member in the locked or unlocked position.
  • an obstructing member 70 may be inserted through the slot 50 to obstruct access to the head of the set screw 54 , so that the set screw 54 cannot be loosened until the obstructing member 70 is removed.
  • the obstructing member 70 is a padlock, although in some instances it may be desirable to use other locks, pins or other obstructing devices.
  • a safety lockout hasp may be used, which is a hasp to which several padlocks can be separately attached and detached, so that different users can place and remove individual padlocks and all padlocks must be removed to remove the hasp.
  • FIG. 3 shows the valve 10 in a lowered and locked position with the knife 14 inserted into the opening 16 of the housing 12 .
  • the shaft 18 in this position is extended downward due to force exerted by the cylinder actuator 22 to close the valve.
  • the swivel lock 24 is engaged and in contact with the lower posts 36 , 40 .
  • the indentation 27 fits partially around the diameter of post 40 , and has a smaller diameter than head 42 , so that the swivel lock 20 cannot move axially past the head 42 .
  • the swivel lock 24 engaging the posts are possible.
  • the posts may have one or more areas with a reduced diameter that can be engaged by the indentations 26 , 27 of the swivel lock 24 .
  • the swivel lock 24 may have projections that engage slots or holes in the posts.
  • pairs of upper and lower posts are described, a pair of single rods spanning from the housing 12 to the actuator 22 can also be used.
  • the swivel member 24 could engage with any structure besides posts, such as one or more beams or plates with indentations or projections, or any other structure that engages with the swivel lock when rotated to a certain position.
  • Rotating the swivel lock in one direction causes it to engage the posts to prevent vertical movement of the knife (i.e., locks the knife).
  • Rotating the swivel lock in the other direction causes the swivel lock 24 to disengage from the posts to permit vertical movement of the knife (i.e., unlocks the knife).
  • the swivel lock 24 is rotatable manually. Alternatively the swivel lock 24 may be power operated and/or rotated via remote control.
  • valve open locking position of the swivel lock and the valve closed locking position of the swivel lock are at the same rotational position about the axis and are at different axial locations along the axis. However, if the posts are positioned differently, the swivel lock may have a valve open locking position that is rotationally different than the valve open locking position.
  • FIG. 4 shows a perspective view of the valve 10 in combination with the valve apparatus 60 of the valve 10 .
  • the valve 10 is in the lowered, locked position.
  • FIG. 5 shows a perspective view of the valve 10 in the upright and locked position.
  • the vertical slot 50 is pictured without the set screw 54 inserted.
  • FIG. 6 shows a cross sectional view of the valve 10 taken along line 6 - 6 in FIG. 4.
  • the valve 10 is in the lowered and locked position.
  • the swivel lock 24 is engaged and in contact with the lower posts 36 , 40 .
  • FIG. 7 shows the swivel lock 24 with a an obstructing member 70 in the form of a padlock inserted through the vertical slot.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Preventing Unauthorised Actuation Of Valves (AREA)

Abstract

The present invention provides a device and method for locking a knife gate valve in a position, such as an open and/or closed position. The locking device has a pair of first posts disposed substantially parallel to the shaft. A swivel lock member is mounted to rotate substantially about the axis of the shaft and to reciprocate together with the shaft and the knife. The swivel lock member is selectively rotatable between an unlocked position at which the swivel lock member does not engage the first engageable portions and a locked position at which the swivel lock member engages both of the first engageable portions to prevent the swivel lock member from movement in at least one of the back and forth directions along the axis of the shaft.

Description

    FIELD OF THE INVENTION
  • The present invention relates generally to a lock device and lock method for a valve, such as a knife gate valve. More particularly, the invention relates to a lock device and method that can lock the valve in a position such as an open and/or closed position. [0001]
    • BACKGROUND OF THE INVENTION
  • Various valves are known, including knife gate valves, which may have a knife gate element that reciprocates between open and closed positions. The knife generally moves in a reciprocating linear manner across the area of the fluid channel to form a gate by being actuated by an actuator such as a hydraulic or pneumatic actuator. [0002]
  • There is a need in the art for a simple, convenient, inexpensive device and method to lock the valve in the open and/or closed positions. For example, it may be desired to be able to lock the valve in an open position to avoid problems that might occur should the valve accidentally be activated to close at an improper time, such as during repair. Without a lock, the accidental closing of the valve could cause damage to a partially disassembled valve, or to parts located in the path of travel of the gate of the valve. Also, accidental opening or closing of a valve due to a control failure could damage other machinery associated with the flow system with which the valve is associated. [0003]
    • SUMMARY OF THE INVENTION
  • The present invention provides a device and method for locking a knife gate valve in a position, such as an open and/or closed position. The invention can provide benefits such as preventing accidental opening or closing of the valve. In one aspect, the invention provides a locking device for a knife gate valve having a housing and a reciprocating shaft that reciprocates a knife in back and forth directions. The locking device has a pair of first posts disposed substantially parallel to the shaft, each first post having one end mounted to the housing, and each first post having a first engageable portion. A swivel lock member is mounted to rotate substantially about the axis of the shaft and to reciprocate together with the shaft and the knife. The swivel lock member is selectively rotatable between (1) an unlocked position at which the swivel lock member does not engage the first engageable portions and (2) a locked position at which the swivel lock member engages both of the first engageable portions to prevent the swivel lock member from movement in at least one of the back and forth directions along the axis of the shaft, thereby preventing the shaft and the knife from reciprocating movement in at least one of the back and forth directions when the swivel lock member is in the locked position and engaging the first engageable portions. [0004]
  • In another aspect, the invention provides a pair of second posts disposed substantially parallel to the shaft, each second post having one end mounted to the housing, and each second post has a second engageable portion. The swivel lock is rotatable to a locked position at which the engaging portions each engage one of the second engageable portions to prevent the swivel lock member from movement in at least one of the back and forth directions along the axis of the shaft, thereby preventing the shaft and the knife from reciprocating movement in one of the back and forth directions when the swivel lock is in the locked position and engaging the second engageable portions. [0005]
  • In still another aspect, the invention provides a method for locking a knife gate valve having a housing and a reciprocating shaft that reciprocates a knife in back and forth directions and has a pair of first posts disposed substantially parallel to the shaft, each first post having one end mounted to the housing, and each first post having a first engageable portion comprising the steps of positioning the knife in a desired position. The rotating a swivel lock member is rotated substantially about the axis of the shaft into a locked position at which the swivel lock member engages both of the first engageable portions to prevent the swivel lock member from movement in at least one of the back and forth directions along the axis of the shaft, thereby preventing the shaft and the knife from reciprocating movement in at least one of the back and forth directions when the swivel lock member is in the locked position and engaging the first engageable portions. [0006]
  • There has thus been outlined, rather broadly, the more important features of the invention in order that the detailed description thereof that follows may be better understood, and in order that the present contribution to the art may be better appreciated. There are, of course, additional features of the invention that will be described below and which will form the subject matter of the claims appended hereto. [0007]
  • In this respect, before explaining at least one embodiment of the invention in detail, it is to be understood that the invention is not limited in its application to the details of construction and to the arrangements of the components set forth in the following description or illustrated in the drawings. The invention is capable of other embodiments and of being practiced and carried out in various ways. Also, it is to be understood that the phraseology and terminology employed herein, as well as the abstract included below, are for the purpose of description and should not be regarded as limiting. [0008]
  • As such, those skilled in the art will appreciate that the conception upon which this disclosure is based may readily be utilized as a basis for the designing of other structures, methods and systems for carrying out the several purposes of the present invention. It is important, therefore, that the claims be regarded as including such equivalent constructions insofar as they do not depart from the spirit and scope of the present invention.[0009]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a perspective view of a valve unlocked in a lowered, closed position. [0010]
  • FIG. 2 is a perspective view of a valve locked in a raised, open position. [0011]
  • FIG. 3 is a perspective view of a valve locked in a lowered, closed position. [0012]
  • FIG. 4 is a side view of a valve and cylinder actuator, with the valve locked in a lowered, closed position. [0013]
  • FIG. 5 is a side view of a valve and cylinder actuator, with the valve locked in a raised, open position. [0014]
  • FIG. 6 is a cross sectional view taken along line [0015] 6-6 in FIG. 4.
  • FIG. 7 is a side detail view of a swivel lock with a padlock installed. [0016]
    • DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS OF THE INVENTION
  • Referring now to the figures, wherein like reference numerals indicate like elements, in FIG. 1 there is shown a [0017] valve 10 having a housing 12. A knife 14 slides through opening 16 in the housing 12. Reciprocation of the knife 14 in a gate of the valve 10 opens and closes the fluid path in the valve 10. The movement of the knife 14 is described herein for convenience as being vertical, with raised and lowered positions. However, the valve 10 may of course be oriented in any direction, and the knife 14 may actually reciprocate horizontally or in any angled direction relative to the ground.
  • The [0018] knife 14 is moved vertically by a shaft 18, and is attached to the shaft 18 by a clamp 20. The clamp 20 has a shaft portion 21 that is attached to the lower end of the shaft 18. The shaft 18 is moved vertically by a cylinder actuator 22 which may be hydraulic, pneumatic, electrical or powered by any suitable means. A swivel lock 24 is attached to the clamp 20 adjacent to the end of the shaft 18. The swivel lock 24 has an internal bore with a bearing 25 sized to fit on an outer surface of the shaft portion 21 of the clamp 20, so that the swivel lock 24 can freely rotate around the axis of the shaft portion 21, but is restrained so that it cannot travel upwardly or downwardly along the shaft portion 21 in the direction of the axis of the shaft 18. The swivel lock 24 can alternatively be mounted to the shaft 18 so that the swivel lock 24 swivels around the shaft 18 but does not move axially along the shaft 18. The swivel lock has indentations 26, 27 that can engage posts 28, 32, 36 and 40 as described below.
  • An [0019] upper post 28 extends downwardly from the cylinder actuator 22 and has a head 30. A second upper post 32 extends downwardly from the cylinder actuator 22 and has a head 34. A lower post 36 extends upwardly from the housing 12 and has a head 38. A second lower post 40 extends upwardly from the housing 12 and has a head 42. Side supports 44 and 46 connect the housing 12 and the cylinder actuator 22. The heads 30, 34, 38 and 42 form a change in diameter of the posts, and together with the adjacent regions of the posts the heads form an engageable portion that can be engaged in the indentations 26 and 27 of the swivel lock 24.
  • FIG. 2 shows the [0020] valve 10 in an upright and locked position with the knife 14 extending from the opening 16 of the housing 12, and attached to the shaft 18 by the clamp 20. The shaft 18 in this position is retracted due to force exerted by the cylinder actuator 22 to open the valve. The swivel lock 24 adjacent the clamp 20 is engaged with and in contact with the upper posts 28, 32. In the embodiment shown, the indentation 27 fits partially around the diameter of post 32, and has a smaller diameter than head 34, so that the swivel lock 20 cannot move axially past the head 30.
  • The [0021] swivel lock 24 has a vertical slot 50 with webbing 52. The swivel lock 24 has a hole 56 perpendicular to the axis of rotation of the swivel lock 24 at the vertical slot 50 in which a set screw 54 (see FIG. 7) may be inserted to prevent the swivel lock 24 from rotating from the position it is in when the set screw 54 is installed. The set screw 54 can also be used to hold the swivel lock 24 in the unlocked position shown in FIG. 1. The shaft 18 may have a dimple or indentation to receive the set screw 54 when the swivel lock 24 is rotated to a certain position. Alternatively, the set screw 54 may engage the cylindrical surface of the shaft 18 and frictionally engage it with sufficient force to prevent rotation of the swivel lock 24 until the set screw 54 is released. In the preferred embodiment, the set screw need not be removed once installed; it can be backed off to permit rotation of the swivel member and can be tightened to hold the swivel member in the locked or unlocked position.
  • Once the set screw [0022] 54 has been tightened to hold the swivel lock 24 against rotation, an obstructing member 70 (see FIG. 7) may be inserted through the slot 50 to obstruct access to the head of the set screw 54, so that the set screw 54 cannot be loosened until the obstructing member 70 is removed. In the preferred embodiment shown, the obstructing member 70 is a padlock, although in some instances it may be desirable to use other locks, pins or other obstructing devices. For example, a safety lockout hasp may be used, which is a hasp to which several padlocks can be separately attached and detached, so that different users can place and remove individual padlocks and all padlocks must be removed to remove the hasp.
  • FIG. 3 shows the [0023] valve 10 in a lowered and locked position with the knife 14 inserted into the opening 16 of the housing 12. The shaft 18 in this position is extended downward due to force exerted by the cylinder actuator 22 to close the valve. The swivel lock 24 is engaged and in contact with the lower posts 36, 40. In the embodiment shown, the indentation 27 fits partially around the diameter of post 40, and has a smaller diameter than head 42, so that the swivel lock 20 cannot move axially past the head 42. Of course other ways of the swivel lock 24 engaging the posts are possible. For example, the posts may have one or more areas with a reduced diameter that can be engaged by the indentations 26, 27 of the swivel lock 24. Alternatively the swivel lock 24 may have projections that engage slots or holes in the posts. Although pairs of upper and lower posts are described, a pair of single rods spanning from the housing 12 to the actuator 22 can also be used. Alternatively, the swivel member 24 could engage with any structure besides posts, such as one or more beams or plates with indentations or projections, or any other structure that engages with the swivel lock when rotated to a certain position. Rotating the swivel lock in one direction causes it to engage the posts to prevent vertical movement of the knife (i.e., locks the knife). Rotating the swivel lock in the other direction causes the swivel lock 24 to disengage from the posts to permit vertical movement of the knife (i.e., unlocks the knife). The swivel lock 24 is rotatable manually. Alternatively the swivel lock 24 may be power operated and/or rotated via remote control.
  • In the examples shown the valve open locking position of the swivel lock and the valve closed locking position of the swivel lock are at the same rotational position about the axis and are at different axial locations along the axis. However, if the posts are positioned differently, the swivel lock may have a valve open locking position that is rotationally different than the valve open locking position. [0024]
  • FIG. 4 shows a perspective view of the [0025] valve 10 in combination with the valve apparatus 60 of the valve 10. The valve 10 is in the lowered, locked position.
  • FIG. 5 shows a perspective view of the [0026] valve 10 in the upright and locked position. The vertical slot 50 is pictured without the set screw 54 inserted.
  • FIG. 6 shows a cross sectional view of the [0027] valve 10 taken along line 6-6 in FIG. 4. The valve 10 is in the lowered and locked position. The swivel lock 24 is engaged and in contact with the lower posts 36, 40.
  • FIG. 7 shows the [0028] swivel lock 24 with a an obstructing member 70 in the form of a padlock inserted through the vertical slot.
  • The above description and drawings are only illustrative of preferred embodiments which achieve the objects, features, and advantages of the present invention, and it is not intended that the present invention be limited thereto. Any modification of the present invention which comes within the spirit and scope of the following claims is considered to be part of the present invention. [0029]

Claims (17)

What is claimed is:
1. A locking device for a knife gate valve having a housing and a reciprocating shaft that reciprocates a knife in back and forth directions, the locking device comprising:
a pair of first posts disposed substantially parallel to the shaft, each first post having one end mounted to the housing, and each first post having a first engageable portion; and
a swivel lock member mounted to rotate substantially about the axis of the shaft and to reciprocate together with the shaft and the knife, said swivel lock member selectively rotatable between (1) an unlocked position at which said swivel lock member does not engage said first engageable portions and (2) a locked position at which said swivel lock member engages both of said first engageable portions to prevent said swivel lock member from movement in at least one of the back and forth directions along the axis of said shaft, thereby preventing said shaft and said knife from reciprocating movement in at least one of the back and forth directions when said swivel lock member is in the locked position and engaging said first engageable portions.
2. A locking device according to claim 1, wherein said swivel lock member has a pair of indentations each adapted to engage one of said first engageable portions.
3. A locking device according to claim 1, wherein said first engageable portions include a head having a first diameter greater than a second diameter of an adjacent portion of said first posts.
4. A locking device according to claim 3, wherein said swivel lock member has a pair of indentations that each have a width less than the first diameter and at least as great as the second diameter to engage said post with movement in at least one of the back and forth directions blocked by a respective head.
5. A locking device according to claim 1, wherein said first engageable portions include a portion of said first posts at which said respective post changes diameter.
6. A locking device according to claim 1, further comprising:
a pair of second posts disposed substantially parallel to the shaft, each second post having one end mounted to the housing, and each second post having a second engageable portion, wherein said swivel lock is rotatable to a second locked position at which said engaging portions each engage one of said second engageable portions to prevent said swivel lock member from movement in at least one of the back and forth directions along the axis of said shaft, thereby preventing said shaft and said knife from reciprocating movement in one of the back and forth directions when said swivel lock is in the locked position and engaging said second engageable portions.
7. A locking device according to claim 6, wherein the first locking position and the second locking position are at the same rotational position about the axis and are at different axial locations along the axis.
8. A locking device according to claim 6, wherein said indentations are each adapted to engage one of said second engageable portions.
9. A locking device according to claim 6, wherein said second engageable portions include a head having a third diameter greater than a fourth diameter of an adjacent portion of said second posts.
10. A locking device according to claim 9, wherein said indentations each have a width less than the third diameter and at least as great as the fourth diameter to engage said post with movement in at least one of the back and forth directions blocked by a respective head.
11. A locking device according to claim 6, wherein said second engageable portions include a portion of said second posts at which said respective post changes diameter.
12. A method for locking a knife gate valve having a housing and a reciprocating shaft that reciprocates a knife in back and forth directions and has a pair of first posts disposed substantially parallel to the shaft, each first post having one end mounted to the housing, and each first post having a first engageable portion comprising the steps of:
positioning the knife in a desired position; and
rotating a swivel lock member mounted to rotate substantially about the axis of the shaft and to reciprocate together with the shaft and the knife into a locked position at which the swivel lock member engages both of the first engageable portions to prevent the swivel lock member from movement in at least one of the back and forth directions along the axis of the shaft, thereby preventing the shaft and the knife from reciprocating movement in at least one of the back and forth directions when the swivel lock member is in the locked position and engaging the first engageable portions.
13. The method according to claim 12, wherein the step of rotating the swivel lock into the locked position is performed manually.
14. The method according to claim 12, further comprising the step of rotating the swivel lock member to an unlocked position at which the swivel lock does not engage the engageable portions.
15. The method according to claim 12, further comprising the step of tightening a set screw to prevent the swivel lock member from rotating about the axis of the shaft.
16. The method according to claim 15, further comprising the step of inserting an obstructing member through a slot in the swivel lock member to obstruct access to a head of the set screw.
17. A method according to claim 16, wherein the obstructing member comprises a padlock.
US09/750,271 2000-12-29 2000-12-29 Lock device and lock method for knife gate valves Expired - Lifetime US6398184B1 (en)

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Families Citing this family (333)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7559528B2 (en) * 2006-06-30 2009-07-14 Honeywell International Inc. Manual lock pin with lanyard
US10378106B2 (en) 2008-11-14 2019-08-13 Asm Ip Holding B.V. Method of forming insulation film by modified PEALD
US9394608B2 (en) 2009-04-06 2016-07-19 Asm America, Inc. Semiconductor processing reactor and components thereof
US8802201B2 (en) 2009-08-14 2014-08-12 Asm America, Inc. Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
US9312155B2 (en) 2011-06-06 2016-04-12 Asm Japan K.K. High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules
US9793148B2 (en) 2011-06-22 2017-10-17 Asm Japan K.K. Method for positioning wafers in multiple wafer transport
US10364496B2 (en) 2011-06-27 2019-07-30 Asm Ip Holding B.V. Dual section module having shared and unshared mass flow controllers
US10854498B2 (en) 2011-07-15 2020-12-01 Asm Ip Holding B.V. Wafer-supporting device and method for producing same
US20130023129A1 (en) 2011-07-20 2013-01-24 Asm America, Inc. Pressure transmitter for a semiconductor processing environment
US9017481B1 (en) 2011-10-28 2015-04-28 Asm America, Inc. Process feed management for semiconductor substrate processing
US8946830B2 (en) 2012-04-04 2015-02-03 Asm Ip Holdings B.V. Metal oxide protective layer for a semiconductor device
US9558931B2 (en) 2012-07-27 2017-01-31 Asm Ip Holding B.V. System and method for gas-phase sulfur passivation of a semiconductor surface
US9659799B2 (en) 2012-08-28 2017-05-23 Asm Ip Holding B.V. Systems and methods for dynamic semiconductor process scheduling
US9021985B2 (en) 2012-09-12 2015-05-05 Asm Ip Holdings B.V. Process gas management for an inductively-coupled plasma deposition reactor
US9324811B2 (en) 2012-09-26 2016-04-26 Asm Ip Holding B.V. Structures and devices including a tensile-stressed silicon arsenic layer and methods of forming same
US10714315B2 (en) 2012-10-12 2020-07-14 Asm Ip Holdings B.V. Semiconductor reaction chamber showerhead
US9640416B2 (en) 2012-12-26 2017-05-02 Asm Ip Holding B.V. Single-and dual-chamber module-attachable wafer-handling chamber
US20160376700A1 (en) 2013-02-01 2016-12-29 Asm Ip Holding B.V. System for treatment of deposition reactor
US9589770B2 (en) 2013-03-08 2017-03-07 Asm Ip Holding B.V. Method and systems for in-situ formation of intermediate reactive species
US9484191B2 (en) 2013-03-08 2016-11-01 Asm Ip Holding B.V. Pulsed remote plasma method and system
US8993054B2 (en) 2013-07-12 2015-03-31 Asm Ip Holding B.V. Method and system to reduce outgassing in a reaction chamber
US9018111B2 (en) 2013-07-22 2015-04-28 Asm Ip Holding B.V. Semiconductor reaction chamber with plasma capabilities
US9793115B2 (en) 2013-08-14 2017-10-17 Asm Ip Holding B.V. Structures and devices including germanium-tin films and methods of forming same
US9240412B2 (en) 2013-09-27 2016-01-19 Asm Ip Holding B.V. Semiconductor structure and device and methods of forming same using selective epitaxial process
US9556516B2 (en) 2013-10-09 2017-01-31 ASM IP Holding B.V Method for forming Ti-containing film by PEALD using TDMAT or TDEAT
US10179947B2 (en) 2013-11-26 2019-01-15 Asm Ip Holding B.V. Method for forming conformal nitrided, oxidized, or carbonized dielectric film by atomic layer deposition
US10683571B2 (en) 2014-02-25 2020-06-16 Asm Ip Holding B.V. Gas supply manifold and method of supplying gases to chamber using same
US9447498B2 (en) 2014-03-18 2016-09-20 Asm Ip Holding B.V. Method for performing uniform processing in gas system-sharing multiple reaction chambers
US10167557B2 (en) 2014-03-18 2019-01-01 Asm Ip Holding B.V. Gas distribution system, reactor including the system, and methods of using the same
US11015245B2 (en) 2014-03-19 2021-05-25 Asm Ip Holding B.V. Gas-phase reactor and system having exhaust plenum and components thereof
US9404587B2 (en) * 2014-04-24 2016-08-02 ASM IP Holding B.V Lockout tagout for semiconductor vacuum valve
US10858737B2 (en) 2014-07-28 2020-12-08 Asm Ip Holding B.V. Showerhead assembly and components thereof
US9543180B2 (en) 2014-08-01 2017-01-10 Asm Ip Holding B.V. Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum
US9890456B2 (en) 2014-08-21 2018-02-13 Asm Ip Holding B.V. Method and system for in situ formation of gas-phase compounds
US10941490B2 (en) 2014-10-07 2021-03-09 Asm Ip Holding B.V. Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
US9657845B2 (en) 2014-10-07 2017-05-23 Asm Ip Holding B.V. Variable conductance gas distribution apparatus and method
KR102300403B1 (en) 2014-11-19 2021-09-09 에이에스엠 아이피 홀딩 비.브이. Method of depositing thin film
KR102263121B1 (en) 2014-12-22 2021-06-09 에이에스엠 아이피 홀딩 비.브이. Semiconductor device and manufacuring method thereof
US9478415B2 (en) 2015-02-13 2016-10-25 Asm Ip Holding B.V. Method for forming film having low resistance and shallow junction depth
JP6523710B2 (en) * 2015-02-27 2019-06-05 黒崎播磨株式会社 Connection switching structure between slide metal frame of sliding nozzle device and drive device
US10529542B2 (en) 2015-03-11 2020-01-07 Asm Ip Holdings B.V. Cross-flow reactor and method
US10276355B2 (en) 2015-03-12 2019-04-30 Asm Ip Holding B.V. Multi-zone reactor, system including the reactor, and method of using the same
US10458018B2 (en) 2015-06-26 2019-10-29 Asm Ip Holding B.V. Structures including metal carbide material, devices including the structures, and methods of forming same
US10600673B2 (en) 2015-07-07 2020-03-24 Asm Ip Holding B.V. Magnetic susceptor to baseplate seal
US9899291B2 (en) 2015-07-13 2018-02-20 Asm Ip Holding B.V. Method for protecting layer by forming hydrocarbon-based extremely thin film
US10043661B2 (en) 2015-07-13 2018-08-07 Asm Ip Holding B.V. Method for protecting layer by forming hydrocarbon-based extremely thin film
US10083836B2 (en) 2015-07-24 2018-09-25 Asm Ip Holding B.V. Formation of boron-doped titanium metal films with high work function
US10087525B2 (en) 2015-08-04 2018-10-02 Asm Ip Holding B.V. Variable gap hard stop design
US9647114B2 (en) 2015-08-14 2017-05-09 Asm Ip Holding B.V. Methods of forming highly p-type doped germanium tin films and structures and devices including the films
US9711345B2 (en) 2015-08-25 2017-07-18 Asm Ip Holding B.V. Method for forming aluminum nitride-based film by PEALD
US9960072B2 (en) 2015-09-29 2018-05-01 Asm Ip Holding B.V. Variable adjustment for precise matching of multiple chamber cavity housings
US9909214B2 (en) 2015-10-15 2018-03-06 Asm Ip Holding B.V. Method for depositing dielectric film in trenches by PEALD
US10211308B2 (en) 2015-10-21 2019-02-19 Asm Ip Holding B.V. NbMC layers
US10322384B2 (en) 2015-11-09 2019-06-18 Asm Ip Holding B.V. Counter flow mixer for process chamber
US9455138B1 (en) 2015-11-10 2016-09-27 Asm Ip Holding B.V. Method for forming dielectric film in trenches by PEALD using H-containing gas
US9905420B2 (en) 2015-12-01 2018-02-27 Asm Ip Holding B.V. Methods of forming silicon germanium tin films and structures and devices including the films
US9607837B1 (en) 2015-12-21 2017-03-28 Asm Ip Holding B.V. Method for forming silicon oxide cap layer for solid state diffusion process
US9627221B1 (en) 2015-12-28 2017-04-18 Asm Ip Holding B.V. Continuous process incorporating atomic layer etching
US9735024B2 (en) 2015-12-28 2017-08-15 Asm Ip Holding B.V. Method of atomic layer etching using functional group-containing fluorocarbon
US11139308B2 (en) 2015-12-29 2021-10-05 Asm Ip Holding B.V. Atomic layer deposition of III-V compounds to form V-NAND devices
US10468251B2 (en) 2016-02-19 2019-11-05 Asm Ip Holding B.V. Method for forming spacers using silicon nitride film for spacer-defined multiple patterning
US10529554B2 (en) 2016-02-19 2020-01-07 Asm Ip Holding B.V. Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
US9754779B1 (en) 2016-02-19 2017-09-05 Asm Ip Holding B.V. Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
US10501866B2 (en) 2016-03-09 2019-12-10 Asm Ip Holding B.V. Gas distribution apparatus for improved film uniformity in an epitaxial system
US10343920B2 (en) 2016-03-18 2019-07-09 Asm Ip Holding B.V. Aligned carbon nanotubes
US9892913B2 (en) 2016-03-24 2018-02-13 Asm Ip Holding B.V. Radial and thickness control via biased multi-port injection settings
US10190213B2 (en) 2016-04-21 2019-01-29 Asm Ip Holding B.V. Deposition of metal borides
US10087522B2 (en) 2016-04-21 2018-10-02 Asm Ip Holding B.V. Deposition of metal borides
US10865475B2 (en) 2016-04-21 2020-12-15 Asm Ip Holding B.V. Deposition of metal borides and silicides
US10367080B2 (en) 2016-05-02 2019-07-30 Asm Ip Holding B.V. Method of forming a germanium oxynitride film
US10032628B2 (en) 2016-05-02 2018-07-24 Asm Ip Holding B.V. Source/drain performance through conformal solid state doping
KR102592471B1 (en) 2016-05-17 2023-10-20 에이에스엠 아이피 홀딩 비.브이. Method of forming metal interconnection and method of fabricating semiconductor device using the same
US11453943B2 (en) 2016-05-25 2022-09-27 Asm Ip Holding B.V. Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor
US10388509B2 (en) 2016-06-28 2019-08-20 Asm Ip Holding B.V. Formation of epitaxial layers via dislocation filtering
US10612137B2 (en) 2016-07-08 2020-04-07 Asm Ip Holdings B.V. Organic reactants for atomic layer deposition
US9859151B1 (en) 2016-07-08 2018-01-02 Asm Ip Holding B.V. Selective film deposition method to form air gaps
US9793135B1 (en) 2016-07-14 2017-10-17 ASM IP Holding B.V Method of cyclic dry etching using etchant film
US10714385B2 (en) 2016-07-19 2020-07-14 Asm Ip Holding B.V. Selective deposition of tungsten
KR102354490B1 (en) 2016-07-27 2022-01-21 에이에스엠 아이피 홀딩 비.브이. Method of processing a substrate
US9812320B1 (en) 2016-07-28 2017-11-07 Asm Ip Holding B.V. Method and apparatus for filling a gap
US10177025B2 (en) 2016-07-28 2019-01-08 Asm Ip Holding B.V. Method and apparatus for filling a gap
US10395919B2 (en) 2016-07-28 2019-08-27 Asm Ip Holding B.V. Method and apparatus for filling a gap
KR102532607B1 (en) 2016-07-28 2023-05-15 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and method of operating the same
US9887082B1 (en) 2016-07-28 2018-02-06 Asm Ip Holding B.V. Method and apparatus for filling a gap
US10090316B2 (en) 2016-09-01 2018-10-02 Asm Ip Holding B.V. 3D stacked multilayer semiconductor memory using doped select transistor channel
US10410943B2 (en) 2016-10-13 2019-09-10 Asm Ip Holding B.V. Method for passivating a surface of a semiconductor and related systems
US10643826B2 (en) 2016-10-26 2020-05-05 Asm Ip Holdings B.V. Methods for thermally calibrating reaction chambers
US11532757B2 (en) 2016-10-27 2022-12-20 Asm Ip Holding B.V. Deposition of charge trapping layers
US10229833B2 (en) 2016-11-01 2019-03-12 Asm Ip Holding B.V. Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
US10714350B2 (en) 2016-11-01 2020-07-14 ASM IP Holdings, B.V. Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures
US10643904B2 (en) 2016-11-01 2020-05-05 Asm Ip Holdings B.V. Methods for forming a semiconductor device and related semiconductor device structures
US10435790B2 (en) 2016-11-01 2019-10-08 Asm Ip Holding B.V. Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
US10134757B2 (en) 2016-11-07 2018-11-20 Asm Ip Holding B.V. Method of processing a substrate and a device manufactured by using the method
KR102546317B1 (en) 2016-11-15 2023-06-21 에이에스엠 아이피 홀딩 비.브이. Gas supply unit and substrate processing apparatus including the same
US10340135B2 (en) 2016-11-28 2019-07-02 Asm Ip Holding B.V. Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride
KR20180068582A (en) 2016-12-14 2018-06-22 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US11581186B2 (en) 2016-12-15 2023-02-14 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus
US9916980B1 (en) 2016-12-15 2018-03-13 Asm Ip Holding B.V. Method of forming a structure on a substrate
US11447861B2 (en) 2016-12-15 2022-09-20 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus and a method of forming a patterned structure
KR20180070971A (en) 2016-12-19 2018-06-27 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US10269558B2 (en) 2016-12-22 2019-04-23 Asm Ip Holding B.V. Method of forming a structure on a substrate
US10867788B2 (en) 2016-12-28 2020-12-15 Asm Ip Holding B.V. Method of forming a structure on a substrate
US11390950B2 (en) 2017-01-10 2022-07-19 Asm Ip Holding B.V. Reactor system and method to reduce residue buildup during a film deposition process
US10655221B2 (en) 2017-02-09 2020-05-19 Asm Ip Holding B.V. Method for depositing oxide film by thermal ALD and PEALD
US10468261B2 (en) 2017-02-15 2019-11-05 Asm Ip Holding B.V. Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
US10283353B2 (en) 2017-03-29 2019-05-07 Asm Ip Holding B.V. Method of reforming insulating film deposited on substrate with recess pattern
US10529563B2 (en) 2017-03-29 2020-01-07 Asm Ip Holdings B.V. Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
US10103040B1 (en) 2017-03-31 2018-10-16 Asm Ip Holding B.V. Apparatus and method for manufacturing a semiconductor device
USD830981S1 (en) 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
KR102457289B1 (en) 2017-04-25 2022-10-21 에이에스엠 아이피 홀딩 비.브이. Method for depositing a thin film and manufacturing a semiconductor device
US10892156B2 (en) 2017-05-08 2021-01-12 Asm Ip Holding B.V. Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
US10446393B2 (en) 2017-05-08 2019-10-15 Asm Ip Holding B.V. Methods for forming silicon-containing epitaxial layers and related semiconductor device structures
US10770286B2 (en) 2017-05-08 2020-09-08 Asm Ip Holdings B.V. Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
US10504742B2 (en) 2017-05-31 2019-12-10 Asm Ip Holding B.V. Method of atomic layer etching using hydrogen plasma
US10886123B2 (en) 2017-06-02 2021-01-05 Asm Ip Holding B.V. Methods for forming low temperature semiconductor layers and related semiconductor device structures
US11306395B2 (en) 2017-06-28 2022-04-19 Asm Ip Holding B.V. Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
US10685834B2 (en) 2017-07-05 2020-06-16 Asm Ip Holdings B.V. Methods for forming a silicon germanium tin layer and related semiconductor device structures
KR20190009245A (en) 2017-07-18 2019-01-28 에이에스엠 아이피 홀딩 비.브이. Methods for forming a semiconductor device structure and related semiconductor device structures
US10541333B2 (en) 2017-07-19 2020-01-21 Asm Ip Holding B.V. Method for depositing a group IV semiconductor and related semiconductor device structures
US11018002B2 (en) 2017-07-19 2021-05-25 Asm Ip Holding B.V. Method for selectively depositing a Group IV semiconductor and related semiconductor device structures
US11374112B2 (en) 2017-07-19 2022-06-28 Asm Ip Holding B.V. Method for depositing a group IV semiconductor and related semiconductor device structures
US10590535B2 (en) 2017-07-26 2020-03-17 Asm Ip Holdings B.V. Chemical treatment, deposition and/or infiltration apparatus and method for using the same
US10605530B2 (en) 2017-07-26 2020-03-31 Asm Ip Holding B.V. Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
US10312055B2 (en) 2017-07-26 2019-06-04 Asm Ip Holding B.V. Method of depositing film by PEALD using negative bias
US10692741B2 (en) 2017-08-08 2020-06-23 Asm Ip Holdings B.V. Radiation shield
US10770336B2 (en) 2017-08-08 2020-09-08 Asm Ip Holding B.V. Substrate lift mechanism and reactor including same
US10249524B2 (en) 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly
US11769682B2 (en) 2017-08-09 2023-09-26 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
US11139191B2 (en) 2017-08-09 2021-10-05 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
US10236177B1 (en) 2017-08-22 2019-03-19 ASM IP Holding B.V.. Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures
USD900036S1 (en) 2017-08-24 2020-10-27 Asm Ip Holding B.V. Heater electrical connector and adapter
US11830730B2 (en) 2017-08-29 2023-11-28 Asm Ip Holding B.V. Layer forming method and apparatus
US11056344B2 (en) 2017-08-30 2021-07-06 Asm Ip Holding B.V. Layer forming method
KR102491945B1 (en) 2017-08-30 2023-01-26 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US11295980B2 (en) 2017-08-30 2022-04-05 Asm Ip Holding B.V. Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
KR102401446B1 (en) 2017-08-31 2022-05-24 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US10607895B2 (en) 2017-09-18 2020-03-31 Asm Ip Holdings B.V. Method for forming a semiconductor device structure comprising a gate fill metal
KR102630301B1 (en) 2017-09-21 2024-01-29 에이에스엠 아이피 홀딩 비.브이. Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same
US10844484B2 (en) 2017-09-22 2020-11-24 Asm Ip Holding B.V. Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
US10658205B2 (en) 2017-09-28 2020-05-19 Asm Ip Holdings B.V. Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
US10403504B2 (en) 2017-10-05 2019-09-03 Asm Ip Holding B.V. Method for selectively depositing a metallic film on a substrate
US10319588B2 (en) 2017-10-10 2019-06-11 Asm Ip Holding B.V. Method for depositing a metal chalcogenide on a substrate by cyclical deposition
US10923344B2 (en) 2017-10-30 2021-02-16 Asm Ip Holding B.V. Methods for forming a semiconductor structure and related semiconductor structures
KR102443047B1 (en) 2017-11-16 2022-09-14 에이에스엠 아이피 홀딩 비.브이. Method of processing a substrate and a device manufactured by the same
US10910262B2 (en) 2017-11-16 2021-02-02 Asm Ip Holding B.V. Method of selectively depositing a capping layer structure on a semiconductor device structure
US11022879B2 (en) 2017-11-24 2021-06-01 Asm Ip Holding B.V. Method of forming an enhanced unexposed photoresist layer
WO2019103613A1 (en) 2017-11-27 2019-05-31 Asm Ip Holding B.V. A storage device for storing wafer cassettes for use with a batch furnace
TWI791689B (en) 2017-11-27 2023-02-11 荷蘭商Ａｓｍ智慧財產控股私人有限公司 Apparatus including a clean mini environment
US10290508B1 (en) 2017-12-05 2019-05-14 Asm Ip Holding B.V. Method for forming vertical spacers for spacer-defined patterning
US10872771B2 (en) 2018-01-16 2020-12-22 Asm Ip Holding B. V. Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
TWI799494B (en) 2018-01-19 2023-04-21 荷蘭商Ａｓｍ 智慧財產控股公司 Deposition method
US11482412B2 (en) 2018-01-19 2022-10-25 Asm Ip Holding B.V. Method for depositing a gap-fill layer by plasma-assisted deposition
USD903477S1 (en) 2018-01-24 2020-12-01 Asm Ip Holdings B.V. Metal clamp
US11018047B2 (en) 2018-01-25 2021-05-25 Asm Ip Holding B.V. Hybrid lift pin
US10535516B2 (en) 2018-02-01 2020-01-14 Asm Ip Holdings B.V. Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures
USD880437S1 (en) 2018-02-01 2020-04-07 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
US11081345B2 (en) 2018-02-06 2021-08-03 Asm Ip Holding B.V. Method of post-deposition treatment for silicon oxide film
CN111699278B (en) 2018-02-14 2023-05-16 Asm Ip私人控股有限公司 Method for depositing ruthenium-containing films on substrates by cyclical deposition processes
US10896820B2 (en) 2018-02-14 2021-01-19 Asm Ip Holding B.V. Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
US10731249B2 (en) 2018-02-15 2020-08-04 Asm Ip Holding B.V. Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
KR102636427B1 (en) 2018-02-20 2024-02-13 에이에스엠 아이피 홀딩 비.브이. Substrate processing method and apparatus
US10658181B2 (en) 2018-02-20 2020-05-19 Asm Ip Holding B.V. Method of spacer-defined direct patterning in semiconductor fabrication
US10975470B2 (en) 2018-02-23 2021-04-13 Asm Ip Holding B.V. Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
US11473195B2 (en) 2018-03-01 2022-10-18 Asm Ip Holding B.V. Semiconductor processing apparatus and a method for processing a substrate
US11629406B2 (en) 2018-03-09 2023-04-18 Asm Ip Holding B.V. Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
US11114283B2 (en) 2018-03-16 2021-09-07 Asm Ip Holding B.V. Reactor, system including the reactor, and methods of manufacturing and using same
KR102646467B1 (en) 2018-03-27 2024-03-11 에이에스엠 아이피 홀딩 비.브이. Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
US11088002B2 (en) 2018-03-29 2021-08-10 Asm Ip Holding B.V. Substrate rack and a substrate processing system and method
US10510536B2 (en) 2018-03-29 2019-12-17 Asm Ip Holding B.V. Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber
US11230766B2 (en) 2018-03-29 2022-01-25 Asm Ip Holding B.V. Substrate processing apparatus and method
KR102501472B1 (en) 2018-03-30 2023-02-20 에이에스엠 아이피 홀딩 비.브이. Substrate processing method
KR20190128558A (en) 2018-05-08 2019-11-18 에이에스엠 아이피 홀딩 비.브이. Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures
TW202349473A (en) 2018-05-11 2023-12-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Methods for forming a doped metal carbide film on a substrate and related semiconductor device structures
KR102596988B1 (en) 2018-05-28 2023-10-31 에이에스엠 아이피 홀딩 비.브이. Method of processing a substrate and a device manufactured by the same
US11270899B2 (en) 2018-06-04 2022-03-08 Asm Ip Holding B.V. Wafer handling chamber with moisture reduction
US11718913B2 (en) 2018-06-04 2023-08-08 Asm Ip Holding B.V. Gas distribution system and reactor system including same
US11286562B2 (en) 2018-06-08 2022-03-29 Asm Ip Holding B.V. Gas-phase chemical reactor and method of using same
KR102568797B1 (en) 2018-06-21 2023-08-21 에이에스엠 아이피 홀딩 비.브이. Substrate processing system
US10797133B2 (en) 2018-06-21 2020-10-06 Asm Ip Holding B.V. Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
KR20210027265A (en) 2018-06-27 2021-03-10 에이에스엠 아이피 홀딩 비.브이. Periodic deposition method for forming metal-containing material and film and structure comprising metal-containing material
WO2020002995A1 (en) 2018-06-27 2020-01-02 Asm Ip Holding B.V. Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
KR20200002519A (en) 2018-06-29 2020-01-08 에이에스엠 아이피 홀딩 비.브이. Method for depositing a thin film and manufacturing a semiconductor device
US10612136B2 (en) 2018-06-29 2020-04-07 ASM IP Holding, B.V. Temperature-controlled flange and reactor system including same
US10388513B1 (en) 2018-07-03 2019-08-20 Asm Ip Holding B.V. Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
US10755922B2 (en) 2018-07-03 2020-08-25 Asm Ip Holding B.V. Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
US10767789B2 (en) 2018-07-16 2020-09-08 Asm Ip Holding B.V. Diaphragm valves, valve components, and methods for forming valve components
US10483099B1 (en) 2018-07-26 2019-11-19 Asm Ip Holding B.V. Method for forming thermally stable organosilicon polymer film
US11053591B2 (en) 2018-08-06 2021-07-06 Asm Ip Holding B.V. Multi-port gas injection system and reactor system including same
US10883175B2 (en) 2018-08-09 2021-01-05 Asm Ip Holding B.V. Vertical furnace for processing substrates and a liner for use therein
US10829852B2 (en) 2018-08-16 2020-11-10 Asm Ip Holding B.V. Gas distribution device for a wafer processing apparatus
US11430674B2 (en) 2018-08-22 2022-08-30 Asm Ip Holding B.V. Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
US11024523B2 (en) 2018-09-11 2021-06-01 Asm Ip Holding B.V. Substrate processing apparatus and method
KR20200030162A (en) 2018-09-11 2020-03-20 에이에스엠 아이피 홀딩 비.브이. Method for deposition of a thin film
US11049751B2 (en) 2018-09-14 2021-06-29 Asm Ip Holding B.V. Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
CN110970344A (en) 2018-10-01 2020-04-07 Asm Ip控股有限公司 Substrate holding apparatus, system including the same, and method of using the same
US11232963B2 (en) 2018-10-03 2022-01-25 Asm Ip Holding B.V. Substrate processing apparatus and method
KR102592699B1 (en) 2018-10-08 2023-10-23 에이에스엠 아이피 홀딩 비.브이. Substrate support unit and apparatuses for depositing thin film and processing the substrate including the same
US10847365B2 (en) 2018-10-11 2020-11-24 Asm Ip Holding B.V. Method of forming conformal silicon carbide film by cyclic CVD
US10811256B2 (en) 2018-10-16 2020-10-20 Asm Ip Holding B.V. Method for etching a carbon-containing feature
KR102546322B1 (en) 2018-10-19 2023-06-21 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and substrate processing method
KR102605121B1 (en) 2018-10-19 2023-11-23 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and substrate processing method
USD948463S1 (en) 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
US10381219B1 (en) 2018-10-25 2019-08-13 Asm Ip Holding B.V. Methods for forming a silicon nitride film
US11087997B2 (en) 2018-10-31 2021-08-10 Asm Ip Holding B.V. Substrate processing apparatus for processing substrates
KR20200051105A (en) 2018-11-02 2020-05-13 에이에스엠 아이피 홀딩 비.브이. Substrate support unit and substrate processing apparatus including the same
US11572620B2 (en) 2018-11-06 2023-02-07 Asm Ip Holding B.V. Methods for selectively depositing an amorphous silicon film on a substrate
US11031242B2 (en) 2018-11-07 2021-06-08 Asm Ip Holding B.V. Methods for depositing a boron doped silicon germanium film
US10847366B2 (en) 2018-11-16 2020-11-24 Asm Ip Holding B.V. Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
US10818758B2 (en) 2018-11-16 2020-10-27 Asm Ip Holding B.V. Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
US10559458B1 (en) 2018-11-26 2020-02-11 Asm Ip Holding B.V. Method of forming oxynitride film
US11217444B2 (en) 2018-11-30 2022-01-04 Asm Ip Holding B.V. Method for forming an ultraviolet radiation responsive metal oxide-containing film
KR102636428B1 (en) 2018-12-04 2024-02-13 에이에스엠 아이피 홀딩 비.브이. A method for cleaning a substrate processing apparatus
US11158513B2 (en) 2018-12-13 2021-10-26 Asm Ip Holding B.V. Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
JP2020096183A (en) 2018-12-14 2020-06-18 エーエスエム・アイピー・ホールディング・ベー・フェー Method of forming device structure using selective deposition of gallium nitride, and system for the same
TW202405220A (en) 2019-01-17 2024-02-01 荷蘭商Ａｓｍ Ｉｐ 私人控股有限公司 Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
KR20200091543A (en) 2019-01-22 2020-07-31 에이에스엠 아이피 홀딩 비.브이. Semiconductor processing device
CN111524788B (en) 2019-02-01 2023-11-24 Asm Ip私人控股有限公司 Method for topologically selective film formation of silicon oxide
JP2020136677A (en) 2019-02-20 2020-08-31 エーエスエム・アイピー・ホールディング・ベー・フェー Periodic accumulation method for filing concave part formed inside front surface of base material, and device
KR20200102357A (en) 2019-02-20 2020-08-31 에이에스엠 아이피 홀딩 비.브이. Apparatus and methods for plug fill deposition in 3-d nand applications
KR102626263B1 (en) 2019-02-20 2024-01-16 에이에스엠 아이피 홀딩 비.브이. Cyclical deposition method including treatment step and apparatus for same
KR102638425B1 (en) 2019-02-20 2024-02-21 에이에스엠 아이피 홀딩 비.브이. Method and apparatus for filling a recess formed within a substrate surface
JP2020133004A (en) 2019-02-22 2020-08-31 エーエスエム・アイピー・ホールディング・ベー・フェー Base material processing apparatus and method for processing base material
KR20200108243A (en) 2019-03-08 2020-09-17 에이에스엠 아이피 홀딩 비.브이. Structure Including SiOC Layer and Method of Forming Same
KR20200108248A (en) 2019-03-08 2020-09-17 에이에스엠 아이피 홀딩 비.브이. STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
KR20200108242A (en) 2019-03-08 2020-09-17 에이에스엠 아이피 홀딩 비.브이. Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-Deposited Silicon Nitride Layer
JP2020167398A (en) 2019-03-28 2020-10-08 エーエスエム・アイピー・ホールディング・ベー・フェー Door opener and substrate processing apparatus provided therewith
KR20200116855A (en) 2019-04-01 2020-10-13 에이에스엠 아이피 홀딩 비.브이. Method of manufacturing semiconductor device
US11447864B2 (en) 2019-04-19 2022-09-20 Asm Ip Holding B.V. Layer forming method and apparatus
KR20200125453A (en) 2019-04-24 2020-11-04 에이에스엠 아이피 홀딩 비.브이. Gas-phase reactor system and method of using same
KR20200130118A (en) 2019-05-07 2020-11-18 에이에스엠 아이피 홀딩 비.브이. Method for Reforming Amorphous Carbon Polymer Film
KR20200130121A (en) 2019-05-07 2020-11-18 에이에스엠 아이피 홀딩 비.브이. Chemical source vessel with dip tube
KR20200130652A (en) 2019-05-10 2020-11-19 에이에스엠 아이피 홀딩 비.브이. Method of depositing material onto a surface and structure formed according to the method
JP2020188255A (en) 2019-05-16 2020-11-19 エーエスエム アイピー ホールディング ビー．ブイ． Wafer boat handling device, vertical batch furnace, and method
JP2020188254A (en) 2019-05-16 2020-11-19 エーエスエム アイピー ホールディング ビー．ブイ． Wafer boat handling device, vertical batch furnace, and method
USD947913S1 (en) 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD975665S1 (en) 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
USD935572S1 (en) 2019-05-24 2021-11-09 Asm Ip Holding B.V. Gas channel plate
USD922229S1 (en) 2019-06-05 2021-06-15 Asm Ip Holding B.V. Device for controlling a temperature of a gas supply unit
KR20200141002A (en) 2019-06-06 2020-12-17 에이에스엠 아이피 홀딩 비.브이. Method of using a gas-phase reactor system including analyzing exhausted gas
KR20200143254A (en) 2019-06-11 2020-12-23 에이에스엠 아이피 홀딩 비.브이. Method of forming an electronic structure using an reforming gas, system for performing the method, and structure formed using the method
USD944946S1 (en) 2019-06-14 2022-03-01 Asm Ip Holding B.V. Shower plate
USD931978S1 (en) 2019-06-27 2021-09-28 Asm Ip Holding B.V. Showerhead vacuum transport
KR20210005515A (en) 2019-07-03 2021-01-14 에이에스엠 아이피 홀딩 비.브이. Temperature control assembly for substrate processing apparatus and method of using same
JP2021015791A (en) 2019-07-09 2021-02-12 エーエスエム アイピー ホールディング ビー．ブイ． Plasma device and substrate processing method using coaxial waveguide
CN112216646A (en) 2019-07-10 2021-01-12 Asm Ip私人控股有限公司 Substrate supporting assembly and substrate processing device comprising same
KR20210010307A (en) 2019-07-16 2021-01-27 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
KR20210010816A (en) 2019-07-17 2021-01-28 에이에스엠 아이피 홀딩 비.브이. Radical assist ignition plasma system and method
KR20210010820A (en) 2019-07-17 2021-01-28 에이에스엠 아이피 홀딩 비.브이. Methods of forming silicon germanium structures
US11643724B2 (en) 2019-07-18 2023-05-09 Asm Ip Holding B.V. Method of forming structures using a neutral beam
JP2021019198A (en) 2019-07-19 2021-02-15 エーエスエム・アイピー・ホールディング・ベー・フェー Method of forming topology-controlled amorphous carbon polymer film
TW202113936A (en) 2019-07-29 2021-04-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation
CN112309899A (en) 2019-07-30 2021-02-02 Asm Ip私人控股有限公司 Substrate processing apparatus
CN112309900A (en) 2019-07-30 2021-02-02 Asm Ip私人控股有限公司 Substrate processing apparatus
US11227782B2 (en) 2019-07-31 2022-01-18 Asm Ip Holding B.V. Vertical batch furnace assembly
US11587814B2 (en) 2019-07-31 2023-02-21 Asm Ip Holding B.V. Vertical batch furnace assembly
US11587815B2 (en) 2019-07-31 2023-02-21 Asm Ip Holding B.V. Vertical batch furnace assembly
KR20210018759A (en) 2019-08-05 2021-02-18 에이에스엠 아이피 홀딩 비.브이. Liquid level sensor for a chemical source vessel
USD965524S1 (en) 2019-08-19 2022-10-04 Asm Ip Holding B.V. Susceptor support
USD965044S1 (en) 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
JP2021031769A (en) 2019-08-21 2021-03-01 エーエスエム アイピー ホールディング ビー．ブイ． Production apparatus of mixed gas of film deposition raw material and film deposition apparatus
KR20210024423A (en) 2019-08-22 2021-03-05 에이에스엠 아이피 홀딩 비.브이. Method for forming a structure with a hole
USD949319S1 (en) 2019-08-22 2022-04-19 Asm Ip Holding B.V. Exhaust duct
USD930782S1 (en) 2019-08-22 2021-09-14 Asm Ip Holding B.V. Gas distributor
USD940837S1 (en) 2019-08-22 2022-01-11 Asm Ip Holding B.V. Electrode
USD979506S1 (en) 2019-08-22 2023-02-28 Asm Ip Holding B.V. Insulator
KR20210024420A (en) 2019-08-23 2021-03-05 에이에스엠 아이피 홀딩 비.브이. Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane
US11286558B2 (en) 2019-08-23 2022-03-29 Asm Ip Holding B.V. Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
KR20210029090A (en) 2019-09-04 2021-03-15 에이에스엠 아이피 홀딩 비.브이. Methods for selective deposition using a sacrificial capping layer
KR20210029663A (en) 2019-09-05 2021-03-16 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US11562901B2 (en) 2019-09-25 2023-01-24 Asm Ip Holding B.V. Substrate processing method
CN112593212B (en) 2019-10-02 2023-12-22 Asm Ip私人控股有限公司 Method for forming topologically selective silicon oxide film by cyclic plasma enhanced deposition process
TW202129060A (en) 2019-10-08 2021-08-01 荷蘭商Ａｓｍ Ｉｐ控股公司 Substrate processing device, and substrate processing method
TW202115273A (en) 2019-10-10 2021-04-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of forming a photoresist underlayer and structure including same
KR20210045930A (en) 2019-10-16 2021-04-27 에이에스엠 아이피 홀딩 비.브이. Method of Topology-Selective Film Formation of Silicon Oxide
US11637014B2 (en) 2019-10-17 2023-04-25 Asm Ip Holding B.V. Methods for selective deposition of doped semiconductor material
KR20210047808A (en) 2019-10-21 2021-04-30 에이에스엠 아이피 홀딩 비.브이. Apparatus and methods for selectively etching films
KR20210050453A (en) 2019-10-25 2021-05-07 에이에스엠 아이피 홀딩 비.브이. Methods for filling a gap feature on a substrate surface and related semiconductor structures
US11646205B2 (en) 2019-10-29 2023-05-09 Asm Ip Holding B.V. Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
KR20210054983A (en) 2019-11-05 2021-05-14 에이에스엠 아이피 홀딩 비.브이. Structures with doped semiconductor layers and methods and systems for forming same
US11501968B2 (en) 2019-11-15 2022-11-15 Asm Ip Holding B.V. Method for providing a semiconductor device with silicon filled gaps
KR20210062561A (en) 2019-11-20 2021-05-31 에이에스엠 아이피 홀딩 비.브이. Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
CN112951697A (en) 2019-11-26 2021-06-11 Asm Ip私人控股有限公司 Substrate processing apparatus
KR20210065848A (en) 2019-11-26 2021-06-04 에이에스엠 아이피 홀딩 비.브이. Methods for selectivley forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
CN112885693A (en) 2019-11-29 2021-06-01 Asm Ip私人控股有限公司 Substrate processing apparatus
CN112885692A (en) 2019-11-29 2021-06-01 Asm Ip私人控股有限公司 Substrate processing apparatus
JP2021090042A (en) 2019-12-02 2021-06-10 エーエスエム アイピー ホールディング ビー．ブイ． Substrate processing apparatus and substrate processing method
KR20210070898A (en) 2019-12-04 2021-06-15 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
TW202125596A (en) 2019-12-17 2021-07-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of forming vanadium nitride layer and structure including the vanadium nitride layer
KR20210080214A (en) 2019-12-19 2021-06-30 에이에스엠 아이피 홀딩 비.브이. Methods for filling a gap feature on a substrate and related semiconductor structures
TW202140135A (en) 2020-01-06 2021-11-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Gas supply assembly and valve plate assembly
US11993847B2 (en) 2020-01-08 2024-05-28 Asm Ip Holding B.V. Injector
KR20210095050A (en) 2020-01-20 2021-07-30 에이에스엠 아이피 홀딩 비.브이. Method of forming thin film and method of modifying surface of thin film
TW202130846A (en) 2020-02-03 2021-08-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of forming structures including a vanadium or indium layer
KR20210100010A (en) 2020-02-04 2021-08-13 에이에스엠 아이피 홀딩 비.브이. Method and apparatus for transmittance measurements of large articles
US11776846B2 (en) 2020-02-07 2023-10-03 Asm Ip Holding B.V. Methods for depositing gap filling fluids and related systems and devices
TW202146715A (en) 2020-02-17 2021-12-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method for growing phosphorous-doped silicon layer and system of the same
TW202203344A (en) 2020-02-28 2022-01-16 荷蘭商Ａｓｍ Ｉｐ控股公司 System dedicated for parts cleaning
KR20210116240A (en) 2020-03-11 2021-09-27 에이에스엠 아이피 홀딩 비.브이. Substrate handling device with adjustable joints
KR20210116249A (en) 2020-03-11 2021-09-27 에이에스엠 아이피 홀딩 비.브이. lockout tagout assembly and system and method of using same
KR20210117157A (en) 2020-03-12 2021-09-28 에이에스엠 아이피 홀딩 비.브이. Method for Fabricating Layer Structure Having Target Topological Profile
KR20210124042A (en) 2020-04-02 2021-10-14 에이에스엠 아이피 홀딩 비.브이. Thin film forming method
TW202146689A (en) 2020-04-03 2021-12-16 荷蘭商Ａｓｍ Ｉｐ控股公司 Method for forming barrier layer and method for manufacturing semiconductor device
TW202145344A (en) 2020-04-08 2021-12-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Apparatus and methods for selectively etching silcon oxide films
US11821078B2 (en) 2020-04-15 2023-11-21 Asm Ip Holding B.V. Method for forming precoat film and method for forming silicon-containing film
US11996289B2 (en) 2020-04-16 2024-05-28 Asm Ip Holding B.V. Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods
KR20210132600A (en) 2020-04-24 2021-11-04 에이에스엠 아이피 홀딩 비.브이. Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element
CN113555279A (en) 2020-04-24 2021-10-26 Asm Ip私人控股有限公司 Method of forming vanadium nitride-containing layers and structures including the same
TW202146831A (en) 2020-04-24 2021-12-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Vertical batch furnace assembly, and method for cooling vertical batch furnace
KR20210134226A (en) 2020-04-29 2021-11-09 에이에스엠 아이피 홀딩 비.브이. Solid source precursor vessel
KR20210134869A (en) 2020-05-01 2021-11-11 에이에스엠 아이피 홀딩 비.브이. Fast FOUP swapping with a FOUP handler
KR20210141379A (en) 2020-05-13 2021-11-23 에이에스엠 아이피 홀딩 비.브이. Laser alignment fixture for a reactor system
TW202147383A (en) 2020-05-19 2021-12-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Substrate processing apparatus
KR20210145078A (en) 2020-05-21 2021-12-01 에이에스엠 아이피 홀딩 비.브이. Structures including multiple carbon layers and methods of forming and using same
KR20210145080A (en) 2020-05-22 2021-12-01 에이에스엠 아이피 홀딩 비.브이. Apparatus for depositing thin films using hydrogen peroxide
TW202201602A (en) 2020-05-29 2022-01-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Substrate processing device
TW202218133A (en) 2020-06-24 2022-05-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method for forming a layer provided with silicon
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Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2679858A (en) * 1950-10-10 1954-06-01 Manning H Kemp Adjustable nonchattering relief valve
DE2634885C2 (en) * 1976-08-03 1985-10-31 Leybold-Heraeus GmbH, 5000 Köln Pendulum slide
US4745944A (en) * 1987-10-15 1988-05-24 Francart Jr Armand Self-cleaning, fluid pressure biased gate valve
US5404734A (en) * 1993-02-19 1995-04-11 Martinez; Louis Secure locking arrangement
CA2097901A1 (en) 1993-06-07 1994-12-07 Controles B.V.L. Ltee/B.V.L. Controls, Ltd. Retaining mechanism for a liquid dispensing apparatus valve
US5560233A (en) 1993-06-14 1996-10-01 Watkins; Gerald Air brake valve shackle
US6082393A (en) * 1997-10-22 2000-07-04 Tye; Randy G. Emergency shutoff valve exerciser for steam turbine and methods for installing and operating same
US6170882B1 (en) * 1998-04-13 2001-01-09 J. David Prest Coupling for waste water outlets
US6007047A (en) * 1998-06-05 1999-12-28 Phipps; Jack M. Rotary actuator for stem valves
US6044860A (en) 1999-02-01 2000-04-04 Spx Corporation Adjustable lockout device for knife gate valves

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