US20020020073A1 - Measuring machine - Google Patents
Measuring machine Download PDFInfo
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- US20020020073A1 US20020020073A1 US09/348,286 US34828699A US2002020073A1 US 20020020073 A1 US20020020073 A1 US 20020020073A1 US 34828699 A US34828699 A US 34828699A US 2002020073 A1 US2002020073 A1 US 2002020073A1
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- Prior art keywords
- moving mechanism
- moving
- aluminum
- probe
- measuring machine
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
A measuring machine having a base (10), a touch signal probe (P), a moving mechanism (20) for retaining the touch signal probe (P) movably in three-dimensional directions, and a controller (60) for controlling a movement of the moving mechanism (20) and for acquiring coordinates value of respective axes based on a contact signal from the touch signal probe (P) to measure a dimension etc. of a workpiece based on the coordinates value is provided. Main structural members structuring the moving mechanism (20), more specifically, a column (21), a supporter (22), a X-beam (23), a Z-axis structure (25) and a Z-axis spindle (26) are made of aluminum or aluminum alloy including aluminum as main component, which has large thermal conductivity, thereby making temperature distribution uniform to improve geometrical accuracy.
Description
- 1. Field of the Invention
- The present invention relates to a measuring machine such as a three-dimensional measuring machine and coordinates measuring machine. More specifically, it relates to a measuring machine having a base, a probe and a moving mechanism for relatively moving the base and the probe, in which accuracy with respect to temperature change is guaranteed, and furthermore, a accuracy-guaranteed temperature range can be extended.
- 2. Description of Related Art
- Conventionally, a measuring machine such as three-dimensional measuring machine and coordinates measuring machine has been known for measuring profile and dimension of a workpiece. Generally, such measuring machine has a base, a probe, a moving mechanism for moving the probe relative to the base in three-dimensional directions (X, Y and Z-axis directions), and a controller for; controlling the movement of the moving mechanism; for acquiring coordinate value of respective axes when the probe contacts the workpiece and; for measuring the dimension of the workpiece based on the coordinate values.
- Usually, main structural members such as the base and the moving mechanism of this type of measuring machine are made of materials having rigidity required for the respective components.
- For instance, the base is made of stone, ceramics and castings and has a covering member for covering the circumference thereof. Both leg portions of a portal frame of the moving mechanism is made of castings, and beam spanning between upper ends of the legs is made of ceramics, the combination of the parts constituting the moving mechanism.
- However, since the conventional measuring machine uses different material having rigidity required for respective portions, geometrical accuracy in temperature change is deteriorated.
- The deterioration in the geometrical accuracy is thought to be caused by following reasons:
- (1) Deterioration in geometrical accuracy according to difference in temperature distribution inside the machine
- Since the conventional measuring machine uses different material having rigidity required for respective portions, thermal conductivity differs in respective portions, thereby making the temperature distribution inside the machine uneven to deteriorate geometrical accuracy.
- (2) Deterioration in geometrical accuracy by attaching difference members
- Since members having different thermal expansion coefficient are directly attached in respective portions of the conventional measuring machine, the expansion amount of respective members differ when the temperature changes, thereby causing the deterioration of the geometrical accuracy.
- Some of the three-dimensional measuring machines have temperature correcting function, which try to expand the range of temperature in which the accuracy is guaranteed.
- However, the temperature correcting function can not effectively performed as long as the aforesaid problem (deterioration of geometrical accuracy in temperature change) is not solved.
- The object of the present invention is to provide a measuring machine for guaranteeing the geometrical accuracy in temperature change, thereby guaranteeing the accuracy in temperature accuracy and extending the range of temperature in which the accuracy is guaranteed.
- A measuring machine according to the present invention has a base, a probe and a moving mechanism for relatively moving the base and the probe. The measuring machine is characterized in that a main structural member of the moving mechanism is made of aluminum or aluminum alloy including aluminum as main component.
- According to the above arrangement, since the main structural member of the moving mechanism is made of aluminum or aluminum alloy including aluminum as main component, which have large thermal conductivity, temperature tracking ability against the temperature change can be improved, thereby making uniform temperature distribution of the entire machine.
- For instance, when the moving mechanism is made of a portal frame, a slider and a Z-axis spindle, the portal frame, the slider and the Z-axis spindle may be made of aluminum or aluminum alloy including aluminum as main component to make temperature distribution of the main structural member of the moving mechanism to be uniform.
- Accordingly, since the deterioration in geometrical accuracy in accordance with the temperature change can be restrained, the accuracy can be guaranteed irrespective of the temperature change and the accuracy-guaranteed temperature range can be extended.
- In the above, the moving mechanism preferably has first moving mechanism for linearly moving the probe, second moving mechanism for moving the probe in a direction orthogonal with the moving direction of the first moving mechanism, and third moving mechanism for moving the probe in a direction orthogonal with the moving direction of the first moving mechanism and the second moving mechanism.
- Accordingly, the probe can be moved in three-dimensional directions, thereby highly accurately measuring three-dimensional dimension of the workpiece.
- Further, at least one of the first, the second and the third moving mechanism preferably has a guide member fixed along the moving direction thereof, a slider movably provided to the guide member, a feed screw axis disposed to the guide member along the moving direction of the slider and having both ends being fixed to the guide member, and a nut member screwed to the feed screw axis for moving the slider in a longitudinal direction of the feed screw axis by a rotation of the feed screw axis, the guide member being formed of aluminum or aluminum alloy having aluminum as main component, and the feed screw axis being formed of steel and having an end portion supported to be slidable in an axial direction thereof.
- According to the above arrangement, since the feed screw axis can be slid in the axial direction thereof even when the guide member and the feed screw causes difference in expansion amount in accordance with the temperature change, the disadvantage caused by the difference of the thermal expansion rate of the guide member and the feed screw axis can be eliminated.
- Further, since the guide member is formed of aluminum or aluminum alloy having aluminum as main component, the temperature distribution of the main structural member of the moving mechanism can be made uniform. On the other hand, since the feed screw axis is formed of steel having large rigidity, the slide accuracy of the slider can be secured.
- When a member attached to the main structural member of the moving mechanism is made of a material other than aluminum or aluminum alloy having aluminum as main component, an elastic member is preferably inserted to the attachment portion of the main structural member and the member attached thereto.
- Accordingly, even when the main structural member and the member attached thereto cause difference in expansion amount in accordance with the temperature change, the difference can be absorbed by the elastic deformation of the elastic member, thereby solving the disadvantage caused by the difference in thermal expansion rate between the main structural member and the member attached thereto.
- Further, when the member attached to the main structural member of the moving mechanism is made of a material other than aluminum and aluminum alloy including aluminum as main component, the member attached to the main structural member of the moving mechanism preferably has an easily elastically deforming portion.
- Also in the above, even when the main structural member and the member attached thereto cause difference in expansion amount in accordance with the temperature change, the difference can also be absorbed by the elastic deformation of the elastic member, thereby solving the disadvantage caused by the difference in thermal expansion rate between the main structural member and the member attached thereto.
- Another measuring machine according to the present invention has a base, a probe and a moving mechanism for relatively moving the base and the probe, the base having a cover for covering the periphery thereof and a fan for circulating air to an inside and an outside of the cover.
- Accordingly, since the temperature distribution inside the cover for covering the base can be made uniform by the fan, the geometrical accuracy in temperature change can be guaranteed.
- Still another measuring machine according to the present invention has a base, a probe, a moving mechanism for moving the probe relative to the base, and a controller for controlling the movement of the moving mechanism. The measuring machine is characterized in having a thermal insulating cover for covering the controller and a fan for discharging waste heat from the controller to an outside thereof.
- According to the above, since the heat from the controller can be discharged to the outside by the fan, the bad influence by the heat can be restrained to the utmost, thereby also guaranteeing geometrical accuracy in temperature change.
- FIG. 1 is a perspective view showing a three-dimensional measuring machine according to an embodiment of the present invention;
- FIG. 2 is an illustration of a driving system of an Y-axis moving mechanism according to the aforesaid embodiment;
- FIG. 3 is a cross section showing a support mechanism for supporting an end of a ball screw axis of the driving system of the Y-axis moving mechanism shown in FIG. 2;
- FIG. 4 is a cross section showing another example of the support mechanism for supporting an end of the ball screw axis shown in FIG. 2;
- FIG. 5 is a perspective view showing a part of the moving mechanism in the aforesaid embodiment;
- FIG. 6 is a perspective view showing inner structure of FIG. 5;
- FIG. 7 is a partial cross section of FIG. 6;
- FIG. 8 is an illustration showing another example of FIG. 6;
- FIG. 9 is a cross section of a base in the aforesaid embodiment;
- FIG. 10 is perspective view showing a leg cover shown in FIG. 9;
- FIG. 11 is a perspective view showing a controller according to the aforesaid embodiment; and
- FIG. 12 is an exploded perspective view showing the controller according to the aforesaid embodiment.
- An embodiment in which a measuring machine according to the present invention is applied to a three-dimensional measuring machine will be described below.
- As shown in FIG. 1, the three-dimensional measuring machine according to the present invention has a
base 10, a touch signal probe P as a probe, amoving mechanism 20 for moving the touch signal probe P in three-dimensional directions (X, Y and Z-axis directions) relative to thebase 10, and acontroller 60 for controlling the movement of themoving mechanism 20 and for acquiring coordinates values of respective axes (X, Y and Z-axis) when the touch signal probe P contacts a workpiece to measure a dimension etc. of the workpiece based on the coordinates values. - The
moving mechanism 20 has acolumn 21 and asupporter 22 disposed on both sides of thebase 10 movably in back and forward direction (Y-axis direction), aX-beam 23 spanning over upper ends of thecolumn 21 and thesupporter 22, aslider 24 disposed along theX-beam 23 movably in right and left directions (X axis direction), and a Z-axis spindle 26 elevatably disposed on theslider 24 through a Z-axis structure 25. - The
column 21, thesupporter 22 and theX-beam 23 constitutes a Y-axis moving mechanism as first axis moving mechanism for moving the touch signal probe P in Y-axis direction, theslider 24 constitutes a X axis moving mechanism as second axis moving mechanism for moving the touch signal probe P in X-axis direction orthogonal with the Y-axis direction, and the Z-axis structure 25 and the Z-axis spindle 26 constitutes a Z-axis moving mechanism as third moving mechanism for moving the touch signal probe P in Z-axis direction orthogonal with the Y-axis and the X-axis directions. - [Measure against Temperature in X, Y and Z-axis moving mechanism]
- In the present embodiment, the main structural material of the X, Y and Z axis moving mechanism constituting the
moving mechanism 20 is made of aluminum or aluminum alloy having aluminum as main component, which has large thermal conductivity. More specifically, thecolumn 21, thesupporter 22 and theX-beam 23 constituting the Y-axis moving mechanism, theslider 24 constituting the X-axis moving mechanism, and the Z-axis structure 25 and the Z-axis spindle 26 constituting the Z-axis moving mechanism is made of aluminum or aluminum alloy having aluminum as main component, which have large thermal conductivity. - Accordingly, since the material of the main structure constituting the moving mechanism is made of aluminum or aluminum alloy having aluminum as main component, the temperature tracking ability against the temperature change can be improved, and consequently, the temperature distribution can be made uniform. Therefore, the geometrical accuracy in accordance with temperature change can be prevented from deterioration. Incidentally, the member made of aluminum or aluminum alloy having aluminum as main component, is not limited to the aforesaid specific structural member. It is preferable that all of the structural member except for portions required to be made of material other than aluminum or aluminum alloy having aluminum as main component should be made of the same material (aluminum or aluminum alloy having aluminum as main component).
- Further, the present embodiment has a displacement sensor (composed of a scale and detector) for detecting the movement position (coordinates value) of respective axis moving mechanism, and a scale attachment plate (member for fixing the scale) for fixing the scale to main structural material of respective axes is made of the same material (aluminum or aluminum alloy having aluminum as main component). For instance, as shown in FIG. 1, the displacement sensor for detecting the coordinate position in X-axis direction has the X-beam23 and a scale attachment plate 27 (a member for fixing a scale 28) which are made of the same material (aluminum or aluminum alloy having aluminum as main component).
- [Measure against Temperature in Driving System of X, Y and Z-axis Moving Mechanism]
- The X, Y and Z-axis moving mechanism has a driving system for moving respective movable members. For instance, as shown in FIG. 2, the Y-axis moving mechanism has a
guide member 31 fixed along a moving direction thereof (Y-axis direction), aslider 32 movably disposed to theguide member 31, aball screw axis 35 as a feed screw axis disposed on theguide member 31 along the moving direction of theslider 32 and having both ends being retained by theguide member 31 through thebearing source 36 for rotating theball screw axis 35, and adriving system 38 screwed to theball screw axis 35, fixed to theslider 32 and composed of anut member 37 for moving theslider 32 in a longitudinal direction of thefeed screw axis 35 while moving by the rotation of theball screw axis 35. - The
guide member 31 is made of aluminum or aluminum alloy having aluminum as main component, which has large thermal conductivity. Theball screw axis 35 is formed of steel having high rigidity. In other words, theguide member 31 and theball screw axis 35 are made of material having different thermal expansion rate. When materials having different thermal expansion rate are mutually attached, since expansion amount of the material in accordance with temperature change differ, there is a problem of flexure caused on either one of the members. - Accordingly, an end of the
ball screw axis 35 is supported by a theguide member 31 through thebearing 33 and the other end of theball screw axis 35 is supported by theguide member 31 through thethrust bearing 34 for slidably retaining the other end of theball screw axis 35 in axial direction. In other words, as shown in FIG. 3, the other end of theball screw axis 35 is supported by theguide member 31 rotatably and slidably in the axial direction by thethrust bearing 34, in which a plurality ofball 34B is rotatably buried on inner wall of acylindrical retainer 34A. - According to the above arrangement, even when the expansion amount of the
ball screw axis 35 and theguide member 31 differ on account of temperature change, since theball screw axis 35 slides in the axial direction thereof, the problem of flexure is not caused to any one of the members. - In the above, similar effect can be expected according to another arrangement shown in FIG. 4, in which a
ball bearing 41 is fitted to an end of theball screw axis 35 and theball bearing 41 is fitted to ahole 43 formed on abearing support 42 in “loose fit”. More specifically, theball bearing 41 is fitted to thehole 43 with a slight gap (e.g. clearance of approximately 5 μm) between outer circumference of theball bearing 41 and inner circumference of thehole 43 of the bearingsupport 42. - [Measure against Z-axis Moving Mechanism]
- As shown in FIG. 5, the Z-axis moving mechanism has a Z-
cover axis structure 25, which are fixed to the Z-axis structure 25 by abolt 52. More specifically, as shown in FIG. 6,brackets axis structure 25, twocover attachment plates 55 are oppositely fixed between the upper and thelower brackets covers bolt 52 to the twocover attachment plates 55. In other words, thecover attachment plate 55 is attached to the Z-axis structure 25 as the main structural member of the Z-axis moving mechanism through thebrackets - The Z-
axis structure 25 as the main structural member of the Z-axis moving mechanism is made of aluminum or aluminum alloy having aluminum as main component, which have large thermal conductivity and thecover attachment plate 55 attached to the Z-axis structure 25 through thebrackets - Accordingly, as shown in FIG. 7, an
elastic member 56 such as rubber is disposed to attachment portion of the Z-axis structure 25 and thecover attachment plate 55, more specifically attachment portion of thebrackets axis structure 25 and thecover attachment plate 55. - Specifically, a
hole 57 is formed on the bracket 53 (54) attached to the Z-axis structure 25 and a distallarge diameter portion 56A of theelastic member 56 is retained in thehole 57. On the other end of theelastic member 56, alarge diameter portion 56B and asmall diameter portion 56C are formed. After fitting thesmall diameter portion 56C to ahole 58 formed on thecover attachment plate 55 with thelarge diameter portion 56B sandwiched therebetween, thebracket 53 attached to the Z-axis structure 25 and thecover attachment plate 55 are fixed with theelastic member 56 sandwiched therebetween by screwing abolt 59 to theelastic member 56 from a side of thecover attachment plate 55. - According to the above arrangement, even when the expansion amount of the Z-
axis structure 25 and the expansion amount of thecover attachment plate 55 cause difference on account of temperature change, since the difference can be absorbed by the elastic deformation of theelastic member 56, the problem of flexure caused to either one of the members can be solved. - In the above, similar effect can be obtained by forming an
arm portion 55A of thecover attachment plate 55 to facilitate the elastic deformation, as shown in FIG. 8. In other words, low-rigidity portion (a portion easy to be elastically deformed) may be formed to a part of the member attached to the main structural member to facilitate elastic deformation to obtain the similar effect. Specifically, the thickness to be elastically deformed may be locally decreased, or small holes may be linearly arranged. - [Measure against Temperature on Base]
- As shown in FIG. 9, the
base 10 has a leg 11 having a table 11A on an upper surface thereof (see FIG. 1) and aleg cover 12 covering periphery of the leg 11. - As shown in FIG. 10, the
leg cover 12 is formed in rectangular frame configuration byplural cover members 12A to 12H. More specifically, theleg cover 12 is made of afront cover member 12A, a rightfront cover member 12B, a leftfront cover member 12C, a rightside cover member 12D, a leftside cover member 12D, a leftside cover member 12E, a rightrear cover member 12F, a leftrear cover member 12G and arear cover member 12H. - The
front cover member 12A and therear cover member 12H of thecover members 12A to 12H are formed of punching metal (perforated metal). Further, anaccommodating portion 13 for accommodating thecontroller 60 is formed on a side thereof and surrounding wall of the covering members has a plurality offan 14A to 14G respectively provided at a predetermined interval. - Accordingly, when the
fans 14A to 14G are actuated, the air is inhaled from the holes of thefront cover member 12A and therear cover member 12H into theleg cover 12 and is exhausted to the outside of theleg cover 12 through thefans 14A to 14G, thereby making the temperature distribution uniform inside the base. Accordingly, the geometrical accuracy in accordance with the temperature change can be guaranteed. - [Measure against Temperature of Controller]
- As shown in FIG. 11 and12, the
controller 60 is accommodated in arack 62 having acaster 61. An outside of therack 62 is covered by a thermal insulatingcover 63. The thermal insulatingcover 63 has amain cover 64 covering all sides of therack 62 except for a front and bottom side thereof, and anauxiliary cover 65 covering the front side of therack 62. Afan 66 for discharging the heat inside thecover 63 is provided on a side of the thermal insulatingcover 63. - Accordingly, since the heat from the
controller 60 is blocked by the thermal insulatingcover 63 and is discharged to the outside by thefan 66, bad influence by the heat can be restrained to the utmost, thereby guaranteeing the geometrical accuracy during the temperature change. - Though a three-dimensional measuring machine is described in the aforesaid embodiment, the present invention can be applied to the other measuring instrument such as two-dimensional measuring machine as long as the touch signal probe P is movable relative to the
base 10. Superior effect can be obtained by applying the present invention if mechanical change is caused by the temperature change. - As the probe for the three-dimensional measuring machine, the touch signal probe P is not only to be used but a non-contact type probe may also be used.
Claims (7)
1. A measuring machine having a base, a probe and a moving mechanism for relatively moving the base and the probe, wherein a main structural member of the moving mechanism is made of aluminum or aluminum alloy including aluminum as main component.
2. The measuring machine according to claim 1 , the moving mechanism comprising first moving mechanism for linearly moving the probe, second moving mechanism for moving the probe in a direction orthogonal with the moving direction of the first moving mechanism, and third moving mechanism for moving the probe in a direction orthogonal with the moving direction of the first moving mechanism and the second moving mechanism.
3. The measuring machine according to claim 2 , wherein at least one of the first, the second and the third moving mechanism has a guide member fixed along the moving direction thereof, a slider movably provided to the guide member, a feed screw axis disposed on the guide member along the moving direction of the slider and having both ends being fixed to the guide member, and a nut member screwed to the feed screw axis for moving the slider in a longitudinal direction of the feed screw axis by a rotation of the feed screw axis,
the guide member being formed of aluminum or aluminum alloy having aluminum as main component, and
the feed screw axis being formed of steel and having an end portion supported to be slidable in an axial direction thereof.
4. The measuring machine according to claim 1 , wherein a member attached to the main structural member of the moving mechanism is made of a material other than aluminum or aluminum alloy having aluminum as main component; and
wherein an elastic member is inserted to the attachment portion of the main structural member and the member attached thereto.
5. The measuring machine according to claim 1 , wherein a member attached to the main structural member of the moving mechanism is made of a material other than aluminum and aluminum alloy including aluminum as main component, the member having an easily elastically deforming portion.
6. A measuring machine having a base, a probe and a moving mechanism for relatively moving the base and the probe, the base having a cover for covering the periphery thereof and a fan for circulating air to an inside and an outside of the cover.
7. A measuring machine having a base, a probe, a moving mechanism for moving the probe relative to the base, and a controller for controlling the movement of the moving mechanism, comprising;
a thermal insulating cover for covering the controller and a fan for discharging waste heat from the controller to an outside of thereof.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP10-197327 | 1998-07-13 | ||
JP19732798A JP3633788B2 (en) | 1998-07-13 | 1998-07-13 | measuring device |
Publications (2)
Publication Number | Publication Date |
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US20020020073A1 true US20020020073A1 (en) | 2002-02-21 |
US6370787B1 US6370787B1 (en) | 2002-04-16 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US09/348,286 Expired - Lifetime US6370787B1 (en) | 1998-07-13 | 1999-07-07 | Measuring machine |
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US (1) | US6370787B1 (en) |
JP (1) | JP3633788B2 (en) |
DE (1) | DE19932446B4 (en) |
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DE19534425A1 (en) * | 1995-09-16 | 1997-03-20 | Zeiss Carl Fa | Coordinate measuring device, the probe of which is movably supported over several axes of rotation |
DE19605776A1 (en) * | 1996-02-16 | 1997-08-21 | Zeiss Carl Fa | Coordinate measuring device with a stylus, the orientation of which is adjustable |
US5926782A (en) * | 1996-11-12 | 1999-07-20 | Faro Technologies Inc | Convertible three dimensional coordinate measuring machine |
US6044569A (en) * | 1997-02-10 | 2000-04-04 | Mitutoyo Corporation | Measuring method and measuring instrument |
US6058618A (en) * | 1997-09-09 | 2000-05-09 | Giddings & Lewis, Inc. | Coordinate measuring machine |
-
1998
- 1998-07-13 JP JP19732798A patent/JP3633788B2/en not_active Expired - Fee Related
-
1999
- 1999-07-07 US US09/348,286 patent/US6370787B1/en not_active Expired - Lifetime
- 1999-07-12 DE DE19932446A patent/DE19932446B4/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US20120029857A1 (en) * | 2010-08-02 | 2012-02-02 | Mitutoyo Corporation | Industrial machine |
US8676527B2 (en) * | 2010-08-02 | 2014-03-18 | Mitutoyo Corporation | Industrial machine |
CN104330005A (en) * | 2014-10-28 | 2015-02-04 | 重庆佳速汽车零部件有限公司 | Checking tool for lever end position of gear lever |
CN107768558A (en) * | 2017-11-30 | 2018-03-06 | 惠州市天翔昌运电子有限公司 | Aluminum alloy battery lid further processing technique and aluminum alloy battery lid |
CN111141832A (en) * | 2019-12-31 | 2020-05-12 | 北京机电工程研究所 | High-temperature-resistant acoustic emission sensor based on active air cooling |
Also Published As
Publication number | Publication date |
---|---|
US6370787B1 (en) | 2002-04-16 |
JP2000028303A (en) | 2000-01-28 |
JP3633788B2 (en) | 2005-03-30 |
DE19932446B4 (en) | 2012-07-26 |
DE19932446A1 (en) | 2000-02-10 |
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