US20010034104A1 - Method for manufacturing semiconductor device - Google Patents
Method for manufacturing semiconductor device Download PDFInfo
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- US20010034104A1 US20010034104A1 US09/739,499 US73949900A US2001034104A1 US 20010034104 A1 US20010034104 A1 US 20010034104A1 US 73949900 A US73949900 A US 73949900A US 2001034104 A1 US2001034104 A1 US 2001034104A1
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- 238000000034 method Methods 0.000 title claims abstract description 42
- 239000004065 semiconductor Substances 0.000 title claims abstract description 40
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000010410 layer Substances 0.000 claims abstract description 83
- 230000002093 peripheral effect Effects 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 125000006850 spacer group Chemical group 0.000 claims abstract description 24
- 239000011229 interlayer Substances 0.000 claims abstract description 17
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 15
- 238000005468 ion implantation Methods 0.000 claims abstract description 9
- 150000002500 ions Chemical class 0.000 claims description 22
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 9
- 238000000038 ultrahigh vacuum chemical vapour deposition Methods 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000002019 doping agent Substances 0.000 claims description 6
- 238000002513 implantation Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 5
- 229960002050 hydrofluoric acid Drugs 0.000 claims description 5
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 230000004907 flux Effects 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 2
- 229910052785 arsenic Inorganic materials 0.000 claims description 2
- 238000007598 dipping method Methods 0.000 claims description 2
- 239000011574 phosphorus Substances 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 239000005368 silicate glass Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 abstract description 3
- 238000007796 conventional method Methods 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
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- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823475—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type interconnection or wiring or contact manufacturing related aspects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
- H01L29/66621—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation using etching to form a recess at the gate location
Definitions
- the present invention relates to a semiconductor device; and, more particularly, to a method for manufacturing the semiconductor device incorporated therein a contact region with uniformity by using a selective epitaxial growth of a single crystal silicon.
- a diffusion region is achieved by annealing after implanting impurity ions into a semiconductor substrate.
- a depth of the diffusion region should be shallow.
- FIGS. 1A to 1 F there are provided cross sectional views setting forth a conventional method for manufacturing a semiconductor device using an enlarged margin self aligned contact (EMSAC).
- EMSAC enlarged margin self aligned contact
- the manufacturing steps begin with a preparation of a semiconductor substrate 110 incorporating therein isolation regions 112 , wherein a reference numeral 160 , 180 denote a cell area and a peripheral circuit area, respectively. Thereafter, an gate oxide layer, a gate electrode layer and a mask layer are formed on the semiconductor substrate 110 , subsequently, and then they are patterned into a first predetermined configuration, thereby obtaining two gate structures provided with gate dielectrics 114 , gate electrodes 116 and mask patterns 118 as shown in FIG. 1A.
- one gate structure is disposed on the cell area 160 and the other one is disposed on the peripheral area 180 .
- impurity ions 145 are implanted into the semiconductor substrate in the cell area 160 , thereby obtaining a shallow contact region 122 . And then, first side wall spacers 120 are formed on sides of the gate structures.
- a second insulating layer and a third insulating layer are formed on the semiconductor substrate 110 and the gate structures. And next, the second and the third insulating layers are patterned into a second predetermined configuration using a mask in the cell area 160 , whereby a second patterned insulating layer 124 A and a third patterned insulating layer 126 A are formed in the cell area 160 and a second side wall spacer 124 B and a third side wall spacer 126 B are formed in the peripheral area 180 . Thereafter, the impurity ions are implanted into the semiconductor substrate in the peripheral area 180 , thereby obtaining a deep contact region 128 as shown in FIG. 1C.
- the third patterned insulating layer 126 A and the third side wall spacer 126 B are removed by a wet etching method using fluoric acid. Then, an interlayer insulating layer 130 is formed on entire surface and flattened by using a chemical mechanical polishing (CMP) technique.
- CMP chemical mechanical polishing
- the interlayer insulating layer 130 is selectively etched into a third predetermined configuration using a mask, whereby the interlayer insulating layer 130 in the cell area 160 are removed and the second patterned insulating layer 124 A is patterned into a side wall pattern 124 A′ as shown in FIG. 1E.
- a conductive layer is deposited on entire surface and flattened by the CMP technique until a height of the conductive layer in the cell area 160 is identical to that of the interlayer insulating layer 130 A in the peripheral area 180 .
- a contact plug 132 is obtained as shown in FIG. 1F.
- the conventional method as described above using the EMSAC process has a drawback that total manufacturing steps are too complicated. And further, it takes a long time to adjust uniformity of the surface height delicately when employing the CMP process. Additionally, the shallow contact region to prevent the short channel effect, may be deteriorated due to a loss of the semiconductor substrate.
- an object of the present invention to provide a semiconductor device incorporating therein a shallow contact region in a cell area and a deep contact region in a peripheral area by using a selective epitaxial growth of a single crystal silicon layer, thereby enhancing a contact margin in the cell area and obtaining the deep contact region with a uniform depth in the peripheral region.
- a method for manufacturing a semiconductor device for use in a memory cell comprising the steps of: a) preparing a semiconductor substrate provided with a cell area and a peripheral area; b) forming gate structures formed on the semiconductor substrate which one is disposed in the cell are and the other is disposed in the peripheral area, wherein the gate structures includes gate dielectrics, gate electrodes and mask patterns; c) forming a first side wall spacer on a side of each gate structure; d) growing up a single crystal silicon layer formed on an exposed portion of the semiconductor substrate by using a selective epitaxial growth method; e) forming a second and a third insulating layers on the substrate and the gate structures and patterning into a first predetermined configuration, thereby forming a second and a third patterned insulating layers in the cell area and forming a second and a third side wall spacers in the peripheral area; d) carrying out an ion implantation to semiconductor substrate
- FIGS. 1A, 1B, 1 C, 1 D, 1 E and 1 F are schematic cross sectional views setting forth a conventional method for manufacturing a semiconductor device.
- FIGS. 2A, 2B, 2 C, 2 D, 2 E and 2 F are schematic cross sectional views setting forth a method for manufacturing a semiconductor device in accordance with a preferred embodiment of the present invention.
- FIGS. 2A to 2 F cross sectional views setting forth a method for manufacturing a semiconductor memory device in accordance with a preferred embodiment of the present invention.
- the manufacturing steps begin with a preparation of a semiconductor substrate 210 incorporating therein isolation regions 212 , wherein reference numerals 260 , 280 denote a cell area and a peripheral circuit area, respectively. Thereafter, an gate oxide layer, a gate electrode layer and a mask layer are formed on the semiconductor substrate 210 , subsequently, and then they are patterned into a first predetermined configuration, thereby obtaining two gate structures provided with gate dielectrics 214 , gate electrodes 216 and mask patterns 218 as shown in FIG. 2A.
- the mask layer is formed to a thickness ranging from approximately 1,000 ⁇ to approximately 2,000 ⁇ using a plasma enhanced nitride.
- one gate structure is disposed on the cell area 260 and the other one is disposed on the peripheral area 280 .
- a first insulating layer (not shown) is formed to a thickness in the range of 200 ⁇ to 500 ⁇ and patterned into a first predetermined configuration, thereby obtaining first side wall spacers 220 which are made of a nitride layer for example.
- the first side wall spacers 220 are used as an etching barrier in a post manufacturing process.
- a surface of the semiconductor substrate 210 is cleaned by using a method selected from a group consisting of RCA, UV/O3, dipping in fluoric acid (HF) or the combination thereof.
- a single crystal silicon layer 222 is grown up on an exposed portion of the semiconductor device 210 by using a selective epitaxial growth.
- the single crystal silicon layer 222 is achieved by using a low pressure chemical vapor (LPCVD) or an ultra high vacuum chemical vapor deposition (UHVCVD) method.
- LPCVD low pressure chemical vapor
- UHVCVD ultra high vacuum chemical vapor deposition
- a hydrogen bake process is carried out at a temperature in the range of 800° C. to 900° C. for 1 to 5 minutes.
- the deposition is carried out on condition that fluxes of dichlorosilane (DCS) and HCl range from 30 sccm to 300 sccm and from 30 sccm to 200 sccm, respectively.
- DCS dichlorosilane
- HCl range from 30 sccm to 300 sccm and from 30 sccm to 200 sccm, respectively.
- the LPCVD is performed at a temperature in the range of 750° C. to 950° C. and at a pressure in the range of 10 Torr to 100
- the deposition is carried out using silane or disilane gas at a temperature in the range of 750° C. to 950° C. and at a pressure in the range of 10 Torr to 100 Torr.
- silane or disilane gas at a temperature in the range of 750° C. to 950° C. and at a pressure in the range of 10 Torr to 100 Torr.
- single crystal silicon doped with phosphine with 50-300 sccm is used as the single crystal silicon layer 224 .
- a second insulating layer and a third insulating layer are formed on the semiconductor substrate 210 and the gate structures, subsequently.
- the second and the third insulating layers are patterned into a second predetermined configuration using a mask in the cell area 260 , whereby a second patterned insulating layer 224 A and a third patterned insulating layer 226 A are formed in the cell area 260 , and a second side wall spacer 224 B and a third side wall spacer 226 B are formed in the peripheral area 280 .
- the third side wall spacer 226 B is formed in order to make the depth of the diffusion region to be uniform in a following manufacturing step.
- the second insulating layer is formed to a thickness in the range of 100 ⁇ to 200 ⁇ using a nitride layer and the third insulating layer is formed to a thickness ranging from 300 ⁇ to 500 ⁇ using a thermal oxide layer.
- the impurity ions are implanted into the semiconductor substrate in the peripheral area 280 , thereby obtaining a deep contact region 230 .
- a contact region 230 is a p-type
- the ion implantation is carried out using a dopant such as B or BF 2 with a dose amount of 1E15 ion/cm 2 to 1E17 ion/cm 2 .
- a dopant such as B or BF 2 with a dose amount of 1E15 ion/cm 2 to 1E17 ion/cm 2 .
- an implantation energy of B ranges from 5 KeV to 50 KeV
- that of BF 2 ranges from 10 KeV to 100 KeV.
- the ion implantation is carried out using a dopant such as As or P with a dose amount of 1E15 ion/cm 2 to 1E17 ion/cm 2 .
- a dopant such as As or P with a dose amount of 1E15 ion/cm 2 to 1E17 ion/cm 2 .
- an implantation energy of As ranges from 10 KeV to 100 KeV, and that of phosphorus (P) ranges from 10 KeV to 70 KeV.
- the third patterned insulating layer 226 A and the third side wall spacer 226 B are removed by a wet etching method using fluoric acid.
- an interlayer insulating layer 232 e.g., made of BPSG, is formed to a thickness in the range of 4,000 ⁇ to 8,000 ⁇ on entire surface and flattened by using a chemical mechanical polishing (CMP) technique.
- CMP chemical mechanical polishing
- the interlayer insulating layer 232 is selectively etched into a third predetermined configuration using a mask, whereby the interlayer insulating layer 232 in the cell area 260 is removed and the second patterned insulating layer 224 A is patterned into a side wall pattern 224 A, as shown in FIG. 2E.
- a conductive layer is deposited on entire surface and flattened by the CMP technique until a height of the conductive layer in the cell area 260 is identical to that of the interlayer insulating layer 232 A in the peripheral area 280 .
- a contact plug 234 is obtained, as shown in FIG. 2F.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
- The present invention relates to a semiconductor device; and, more particularly, to a method for manufacturing the semiconductor device incorporated therein a contact region with uniformity by using a selective epitaxial growth of a single crystal silicon.
- Generally, in a P-N contact semiconductor device, a diffusion region is achieved by annealing after implanting impurity ions into a semiconductor substrate. In order to prevent a short channel effect due to a side diffusion of the diffusion region in a semiconductor device with a narrow channel space, a depth of the diffusion region should be shallow.
- Referring to FIGS. 1A to1F, there are provided cross sectional views setting forth a conventional method for manufacturing a semiconductor device using an enlarged margin self aligned contact (EMSAC).
- The manufacturing steps begin with a preparation of a
semiconductor substrate 110 incorporatingtherein isolation regions 112, wherein areference numeral semiconductor substrate 110, subsequently, and then they are patterned into a first predetermined configuration, thereby obtaining two gate structures provided withgate dielectrics 114,gate electrodes 116 andmask patterns 118 as shown in FIG. 1A. Here, one gate structure is disposed on thecell area 160 and the other one is disposed on theperipheral area 180. - In a next step as shown in FIG. 1B,
impurity ions 145 are implanted into the semiconductor substrate in thecell area 160, thereby obtaining ashallow contact region 122. And then, firstside wall spacers 120 are formed on sides of the gate structures. - In an ensuing step, a second insulating layer and a third insulating layer are formed on the
semiconductor substrate 110 and the gate structures. And next, the second and the third insulating layers are patterned into a second predetermined configuration using a mask in thecell area 160, whereby a second patternedinsulating layer 124A and a third patternedinsulating layer 126A are formed in thecell area 160 and a secondside wall spacer 124B and a thirdside wall spacer 126B are formed in theperipheral area 180. Thereafter, the impurity ions are implanted into the semiconductor substrate in theperipheral area 180, thereby obtaining adeep contact region 128 as shown in FIG. 1C. - In a subsequent step, the third patterned
insulating layer 126A and the thirdside wall spacer 126B are removed by a wet etching method using fluoric acid. Then, aninterlayer insulating layer 130 is formed on entire surface and flattened by using a chemical mechanical polishing (CMP) technique. - Thereafter, the
interlayer insulating layer 130 is selectively etched into a third predetermined configuration using a mask, whereby theinterlayer insulating layer 130 in thecell area 160 are removed and the second patternedinsulating layer 124A is patterned into aside wall pattern 124A′ as shown in FIG. 1E. - Finally, a conductive layer is deposited on entire surface and flattened by the CMP technique until a height of the conductive layer in the
cell area 160 is identical to that of theinterlayer insulating layer 130A in theperipheral area 180. Thus, acontact plug 132 is obtained as shown in FIG. 1F. - The conventional method as described above using the EMSAC process has a drawback that total manufacturing steps are too complicated. And further, it takes a long time to adjust uniformity of the surface height delicately when employing the CMP process. Additionally, the shallow contact region to prevent the short channel effect, may be deteriorated due to a loss of the semiconductor substrate.
- It is, therefore, an object of the present invention to provide a semiconductor device incorporating therein a shallow contact region in a cell area and a deep contact region in a peripheral area by using a selective epitaxial growth of a single crystal silicon layer, thereby enhancing a contact margin in the cell area and obtaining the deep contact region with a uniform depth in the peripheral region.
- In accordance with one aspect of the present invention, there is provided a method for manufacturing a semiconductor device for use in a memory cell, the method comprising the steps of: a) preparing a semiconductor substrate provided with a cell area and a peripheral area; b) forming gate structures formed on the semiconductor substrate which one is disposed in the cell are and the other is disposed in the peripheral area, wherein the gate structures includes gate dielectrics, gate electrodes and mask patterns; c) forming a first side wall spacer on a side of each gate structure; d) growing up a single crystal silicon layer formed on an exposed portion of the semiconductor substrate by using a selective epitaxial growth method; e) forming a second and a third insulating layers on the substrate and the gate structures and patterning into a first predetermined configuration, thereby forming a second and a third patterned insulating layers in the cell area and forming a second and a third side wall spacers in the peripheral area; d) carrying out an ion implantation to semiconductor substrate in the peripheral area; e) removing the third patterned insulating layer and the third side wall spacer; f) forming an interlayer insulating layer on the semiconductor substrate and the gate structures; g) patterning the interlayer insulating layer into a second predetermined configuration, whereby the interlayer insulating layer does not remain in the cell area and the second patterned insulating layer is patterned into a side wall pattern; h) forming a conductive layer on the cell area and the peripheral area; and i) planarizing a surface of the conductive layer, thereby obtaining a contact plug in the cell area.
- The above and other objects and features of the present invention will become apparent from the following description of the preferred embodiments given in conjunction with the accompanying drawings, in which:
- FIGS. 1A, 1B,1C, 1D, 1E and 1F are schematic cross sectional views setting forth a conventional method for manufacturing a semiconductor device; and
- FIGS. 2A, 2B,2C, 2D, 2E and 2F are schematic cross sectional views setting forth a method for manufacturing a semiconductor device in accordance with a preferred embodiment of the present invention.
- There are provided in FIGS. 2A to2F cross sectional views setting forth a method for manufacturing a semiconductor memory device in accordance with a preferred embodiment of the present invention.
- The manufacturing steps begin with a preparation of a
semiconductor substrate 210 incorporating thereinisolation regions 212, whereinreference numerals semiconductor substrate 210, subsequently, and then they are patterned into a first predetermined configuration, thereby obtaining two gate structures provided withgate dielectrics 214,gate electrodes 216 andmask patterns 218 as shown in FIG. 2A. The mask layer is formed to a thickness ranging from approximately 1,000 Å to approximately 2,000 Å using a plasma enhanced nitride. Here, one gate structure is disposed on thecell area 260 and the other one is disposed on theperipheral area 280. - In a next step, a first insulating layer (not shown) is formed to a thickness in the range of 200 Å to 500 Å and patterned into a first predetermined configuration, thereby obtaining first
side wall spacers 220 which are made of a nitride layer for example. The firstside wall spacers 220 are used as an etching barrier in a post manufacturing process. Thereafter, a surface of thesemiconductor substrate 210 is cleaned by using a method selected from a group consisting of RCA, UV/O3, dipping in fluoric acid (HF) or the combination thereof. Then, a singlecrystal silicon layer 222 is grown up on an exposed portion of thesemiconductor device 210 by using a selective epitaxial growth. - The single
crystal silicon layer 222 is achieved by using a low pressure chemical vapor (LPCVD) or an ultra high vacuum chemical vapor deposition (UHVCVD) method. In case of using the LPCVD method, to begin with, a hydrogen bake process is carried out at a temperature in the range of 800° C. to 900° C. for 1 to 5 minutes. Thereafter, the deposition is carried out on condition that fluxes of dichlorosilane (DCS) and HCl range from 30 sccm to 300 sccm and from 30 sccm to 200 sccm, respectively. And it is preferable that the LPCVD is performed at a temperature in the range of 750° C. to 950° C. and at a pressure in the range of 10 Torr to 100 Torr. - In addition, in case of using the UHVCVD method, it is preferable that the deposition is carried out using silane or disilane gas at a temperature in the range of 750° C. to 950° C. and at a pressure in the range of 10 Torr to 100 Torr. At this time, single crystal silicon doped with phosphine with 50-300 sccm is used as the single crystal silicon layer224. By using the above method, impurities in the single
crystal silicon layer 222 diffuse into thesemiconductor substrate 210, thereby forming ashallow contact region 228 to a depth of 300 Å to 800 Å. - In an ensuing step, as shown in FIG. 2C, a second insulating layer and a third insulating layer are formed on the
semiconductor substrate 210 and the gate structures, subsequently. And next, the second and the third insulating layers are patterned into a second predetermined configuration using a mask in thecell area 260, whereby a second patternedinsulating layer 224A and a third patternedinsulating layer 226A are formed in thecell area 260, and a secondside wall spacer 224B and a thirdside wall spacer 226B are formed in theperipheral area 280. The thirdside wall spacer 226B is formed in order to make the depth of the diffusion region to be uniform in a following manufacturing step. The second insulating layer is formed to a thickness in the range of 100 Å to 200 Å using a nitride layer and the third insulating layer is formed to a thickness ranging from 300 Å to 500 Å using a thermal oxide layer. Thereafter, the impurity ions are implanted into the semiconductor substrate in theperipheral area 280, thereby obtaining adeep contact region 230. - If a
contact region 230 is a p-type, the ion implantation is carried out using a dopant such as B or BF2 with a dose amount of 1E15 ion/cm2 to 1E17 ion/cm2. At this time, it is preferable that an implantation energy of B ranges from 5 KeV to 50 KeV, and that of BF2 ranges from 10 KeV to 100 KeV. - Moreover, if the
contact region 230 is an n-type, the ion implantation is carried out using a dopant such as As or P with a dose amount of 1E15 ion/cm2 to 1E17 ion/cm2. At this time, it is preferable that an implantation energy of As ranges from 10 KeV to 100 KeV, and that of phosphorus (P) ranges from 10 KeV to 70 KeV. - In a subsequent step, as shown in FIG. 2D, the third patterned insulating
layer 226A and the third side wall spacer 226B are removed by a wet etching method using fluoric acid. Then, aninterlayer insulating layer 232, e.g., made of BPSG, is formed to a thickness in the range of 4,000 Å to 8,000 Å on entire surface and flattened by using a chemical mechanical polishing (CMP) technique. - Thereafter, the
interlayer insulating layer 232 is selectively etched into a third predetermined configuration using a mask, whereby theinterlayer insulating layer 232 in thecell area 260 is removed and the second patterned insulatinglayer 224A is patterned into aside wall pattern 224A, as shown in FIG. 2E. - Finally, a conductive layer is deposited on entire surface and flattened by the CMP technique until a height of the conductive layer in the
cell area 260 is identical to that of the interlayer insulatinglayer 232A in theperipheral area 280. Thus, acontact plug 234 is obtained, as shown in FIG. 2F. - In the present invention, by using the selective epitaxial growth of the single crystal silicon layer, it is possible to improve a contact margin in the cell area and further to obtain the deep contact region with a uniform depth in the peripheral region.
- While the present invention has been described with respect to the particular embodiments, it will be apparent to those skilled in the art that various changes and modifications may be made without departing from the scope of the invention as defined in the following claims.
Claims (19)
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KR1019990061869A KR20010063781A (en) | 1999-12-24 | 1999-12-24 | Fabricating method for semiconductor device |
KR1999-61869 | 1999-12-24 | ||
KR99-61869 | 1999-12-24 |
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US20010034104A1 true US20010034104A1 (en) | 2001-10-25 |
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Cited By (1)
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---|---|---|---|---|
US20090242995A1 (en) * | 2007-11-16 | 2009-10-01 | Panasonic Corporation | Semiconductor device and method for fabricating the same |
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JP3782119B2 (en) * | 1992-07-17 | 2006-06-07 | 株式会社東芝 | Semiconductor memory device |
JPH0982952A (en) * | 1995-09-13 | 1997-03-28 | Toshiba Corp | Semiconductor device and manufacture thereof |
US5960319A (en) * | 1995-10-04 | 1999-09-28 | Sharp Kabushiki Kaisha | Fabrication method for a semiconductor device |
-
1999
- 1999-12-24 KR KR1019990061869A patent/KR20010063781A/en not_active Application Discontinuation
-
2000
- 2000-12-20 US US09/739,499 patent/US6355533B2/en not_active Expired - Lifetime
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US20090242995A1 (en) * | 2007-11-16 | 2009-10-01 | Panasonic Corporation | Semiconductor device and method for fabricating the same |
US8502301B2 (en) | 2007-11-16 | 2013-08-06 | Panasonic Corporation | Semiconductor device and method for fabricating the same |
Also Published As
Publication number | Publication date |
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KR20010063781A (en) | 2001-07-09 |
JP2001244437A (en) | 2001-09-07 |
JP4698021B2 (en) | 2011-06-08 |
US6355533B2 (en) | 2002-03-12 |
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