US20010009524A1 - Semiconductor device having a test circuit - Google Patents
Semiconductor device having a test circuit Download PDFInfo
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- US20010009524A1 US20010009524A1 US09/761,727 US76172701A US2001009524A1 US 20010009524 A1 US20010009524 A1 US 20010009524A1 US 76172701 A US76172701 A US 76172701A US 2001009524 A1 US2001009524 A1 US 2001009524A1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C29/38—Response verification devices
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C29/44—Indication or identification of errors, e.g. for repair
Definitions
- the present invention relates to a semiconductor device having a test circuit, and more particularly, to a test circuit of a synchronous DRAM that writes and reads data in synchronism with a clock signal.
- DDR-SDRAMs double data rate-SDRAMs are now being used instead of single data rate (SDR)-SDRAMs.
- SDR single data rate
- CM read command
- the DDR-SDRAM acquires the read command when a first reference clock signal CLK goes high.
- a predetermined read latency RL elapses, the DDR-SDRAM generates a second reference clock signal DQS and output data DQ.
- the output data DQ is output in synchronism with the leading edge and trailing edge of the second reference clock signal DQS.
- the data rate of the DDR-SDRAM is twice as great as that of the SDR-SDRAM.
- the DDR-SDRAM receives the second reference clock signal DQS and input data DQ during a write mode.
- the DDR-SDRAM performs data writing in synchronism with the leading edge and trailing edge of the second reference clock signal DQS.
- the data rate of the DDR-SDRAM may be higher than that of a conventional tester.
- the DDR-SDRAM is provided with a test circuit.
- a typical test circuit 100 includes a test mode switching circuit 3 .
- Data DaN is read in parallel with data DbN from a memory circuit 1 .
- the data DaN, DbN is provided to the multiplexer circuit 2 in accordance with the reference clock signal CLK and the operation control signal CM.
- the multiplexer circuit 2 is controlled by the test mode switching circuit 3 , which includes switch circuits SW 1 , SW 2 .
- the second reference clock signal DQS is provided to the multiplexer circuit 2 via the switch circuit SW 1 .
- the second reference clock signal DQS and a selection signal SL are provided to the multiplexer circuit 2 via the switch circuits SW 1 , SW 2 , respectively.
- the selection signal SL selects read data DaN or read data DbN.
- the multiplexer circuit 2 alternately provides the read data DaN and DbN to the output circuit 4 in synchronism with the leading and trailing edges of the second reference clock signal DQS.
- the output circuit 4 outputs the read data DaN, DbN as the output data DQ.
- the multiplexer circuit 2 when the selection signal SL received by the multiplexer circuit 2 goes high during the test mode, the multiplexer circuit 2 provides the read data DaN to the output circuit 4 when the second reference clock signal DQS goes high.
- the output circuit 4 outputs the read data DaN as the output data DQ.
- the multiplexer circuit 2 When the selection signal SL goes low during the test mode, the multiplexer circuit 2 provides the read data DbN to the output circuit 4 when the second reference clock signal DQS goes high.
- the output circuit 4 outputs the read data DbN as the output data DQ.
- the test circuit 100 provides the output data DQ to a tester at a data rate that is one half of the data rate of the DDR-SDRAM.
- the tester compares data prewritten to the memory circuit 1 with the output data DQ and determines whether the DDR-SDRAM is functioning normally.
- the data rate of the output data DQ generated by the test circuit 100 is one half of that of the DDR-SDRAM, the time required to read cell information from every memory cell of the memory circuit 1 is twice as long as the time required for the output data DQ to be generated at the normal data rate of the DDR-SDRAM. This prolongs test time and increases test costs.
- test circuit 100 is not capable of detecting whether the DDR-SDRAM is outputting the output data DQ at the normal data rate (i.e., double data rate).
- Japanese Unexamined Patent Publication No. 11-101855 describes a test circuit having a frequency divider.
- the frequency divider divides a reference clock signal, which is provided from an external device, to generate a divisional clock signal.
- the divisional clock signal is used as the second reference signal to decrease the data rate of the test circuit.
- a control circuit may be incorporated in the test circuit.
- the control circuit would increase the circuit area of the test circuit.
- the frequency divider would also increase the circuit area of the test circuit since the frequency divider includes a relatively large number of elements.
- the present invention provides a semiconductor device including an internal circuit for generating data.
- An I/O circuit receives the data and outputs output data in correspondence with a rising edge and a falling edge of a reference clock signal.
- a comparison determination circuit receives the output data, compares the output data with an expected data value, and generates determination result data in correspondence with the rising edge and the falling edge of the reference clock signal.
- the present invention further provides a semiconductor device including an internal circuit for generating data in correspondence with a first reference clock signal.
- An I/O circuit receives the data and outputs output data in correspondence with a rising edge and a falling edge of a second reference clock signal.
- a comparison determination circuit receives the output data, compares the output data with an expected data value, and generates determination result data in correspondence with the rising edge and the falling edge of the second reference clock signal.
- FIG. 1 is a chart showing signal waveforms during a read mode in a prior art DDR-SDRAM
- FIG. 2 is a schematic block diagram of a DDR-SDRAM having a prior art test circuit
- FIG. 3 is a chart showing waveforms of signals in the prior art test circuit of FIG. 2;
- FIG. 4 is a schematic block diagram of a semiconductor memory according to a first embodiment of the present invention.
- FIG. 5 is a schematic block diagram of a semiconductor memory having a test circuit according to a second embodiment of the present invention.
- FIG. 6 is a schematic circuit diagram of a comparison circuit of the test circuit of FIG. 5;
- FIG. 7 is a schematic circuit diagram of a determination circuit of the test circuit of FIG. 5;
- FIG. 8 is a chart showing waveforms of signals in the test circuit of FIG. 5;
- FIG. 9 is a schematic circuit diagram of a comparison circuit of a test circuit according to a third embodiment of the present invention.
- FIG. 10 is a schematic circuit diagram of a comparison circuit of a test circuit according to a fourth embodiment of the present invention.
- FIG. 11 is a schematic circuit diagram of a further comparison circuit of the test circuit according to the fourth embodiment of the present invention.
- FIG. 12 is a schematic circuit diagram of a determination circuit of the test circuit according to the fourth embodiment of the present invention.
- FIG. 13 is a schematic circuit diagram of a determination circuit of a test circuit according to a fifth embodiment of the present invention.
- FIG. 14 is a chart showing waveforms of signals in the test circuit of the fifth embodiment.
- FIG. 15 is a chart showing waveforms of signals in a test circuit according to a sixth embodiment of the present invention.
- FIG. 16 is a schematic block diagram of a semiconductor memory having a test circuit according to a seventh embodiment of the present invention.
- FIG. 17 is a schematic circuit diagram of a phase shift circuit of the test circuit of FIG. 16.
- FIG. 18 is a chart showing waveforms of signals in the test circuit of FIG. 16.
- a semiconductor device 200 has an internal circuit 1 and a test circuit 202 .
- the test circuit 202 includes a comparison determination circuit 16 .
- the internal circuit 1 operates in correspondence with a first reference clock signal CLK.
- the I/O circuit 15 receives data DQ from the internal circuit 1 and outputs the data DQ.
- the I/O circuit 15 also provides data to the internal circuit 1 in accordance with the second reference clock signal DQS.
- the comparison determination circuit 16 compares determination subject data DQ, which is output from the internal circuit 1 , with its expected value EX to generate a comparison determination result TR.
- the employment of the expected value EX eliminates the necessity for matching the data rate of the data DQ output from the internal circuit 1 with the data rate of an external tester and shortens test time.
- a DDR-SDRAM 300 includes a memory circuit 1 , a multiplexer circuit 2 , an output circuit 4 , and a test circuit 302 .
- the test circuit 302 has switch circuits SW 3 , SW 4 , a comparison circuit 5 a, and a determination circuit 6 a.
- the switch circuits SW 3 , SW 4 form a test mode switching circuit and become conductive during the test mode.
- the memory circuit 1 receives a reference clock signal CLK and an operation control signal CM, which includes a read command.
- the read data is provided to the multiplexer circuit 2 .
- the multiplexer circuit 2 alternately provides the read data DaN, DbN to the output circuit 4 in correspondence with the second reference clock signal DQS.
- the output circuit 4 outputs the read data DaN, DbN as the output data DQ.
- the output data DQ is provided to the comparison circuit 5 a via the switch circuit SW 3 .
- the second reference clock signal DQS is provided to the comparison circuit 5 a via the switch circuit SW 4 .
- the comparison circuit 5 a is also provided with data of the expected value EX, which is identical to the data prewritten to the memory circuit 1 .
- the comparison circuit 5 a compares the output data DQ with the expected value EX and provides the comparison result CR to the determination circuit 6 a.
- the determination circuit 6 a receives the second reference clock signal DQS via the switch circuit SW 4 .
- the determination circuit 6 a provides an external tester with a determination result TR based on the second reference clock signal DQS and the comparison result CR.
- the comparison circuit 5 a includes transfer gates 9 a, 9 b, latch circuits 8 a, 8 b, and EOR circuits 7 a, 7 b.
- the latch circuit 8 a receives output data DQ via the transfer gate 9 a
- the latch circuit 8 b receives output data DQ via the transfer gate 9 b.
- the transfer gates 9 a, 9 b and the latch circuits 8 a, 8 b form a serial-parallel conversion circuit.
- the second reference clock signal DQS is provided to the n-channel gate of the transfer gate 9 a and the p-channel gate of the transfer gate 9 b.
- the second reference clock signal DQS is also received by the p-channel gate of the transfer gate 9 a and the n-channel gate of the transfer gate 9 b via an inverter 10 a.
- the transfer gate 9 a becomes conductive and the transfer gate 9 b becomes non-conductive.
- the output signal of the latch circuit 8 a is provided to a first input terminal of the EOR circuit 7 a, and the expected value EX is provided to a second input terminal of the EOR circuit 7 a.
- a comparison result CR 1 is output from the EOR circuit 7 a.
- the output signal of the latch circuit 8 b is provided to a first input terminal of the EOR circuit 7 b, and the expected value EX is provided to a second input terminal of the EOR circuit 7 b.
- a comparison result CR 2 is output from the EOR circuit 7 b.
- read data DaN, DbN is output alternately from the output circuit 4 , read data DaN is latched by the latch circuit 8 a and read data DbN is latched by the latch circuit 8 b in correspondence with the leading edge and trailing edge of the second reference clock signal DQS.
- the EOR circuit 7 a compares the output signal of the latch circuit 8 a with the expected value EX. When the output signal of the latch circuit 8 a matches the expected value EX, the comparison signal CR 1 output from the EOR circuit 7 a goes low.
- the EOR circuit 7 b compares the output signal of the latch circuit 8 b with the expected value EX. When the output signal of the latch circuit 8 b matches the expected value EX, the comparison signal CR 2 output from the EOR circuit 7 b goes low.
- the comparison results of the EOR circuits 7 a, 7 b each go high when the expected value EX does not match the output signal of the associated latch circuit.
- the determination circuit 6 a includes an OR circuit 12 a, a latch circuit 8 c, an n-channel MOS transistor Tr 1 and an inverter 10 b.
- the OR circuit 12 a receives the comparison results CR 1 , CR 2 from the comparison circuit 5 a and provides an OR logic output signal to the latch circuit 8 c via the NMOS transistor Tr 1 .
- the latch circuit 8 c outputs the determination result TR.
- the gate of the transistor Tr 1 receives the second reference clock signal DQS via the inverter 10 b.
- the determination circuit 6 a when the comparison results CR 1 , CR 2 output from the comparison circuit 5 a go low, the signal output from the OR circuit 12 a goes low. If any one of the comparison results CR 1 , CR 2 goes high, the signal output from the OR circuit 12 a goes high.
- the OR logic output signal is latched by the latch circuit 8 c.
- the determination signal TR is output from the latch circuit 8 c.
- test circuit 302 of the DDR-SDRAM will now be discussed with reference to FIG. 8.
- Cell information such as the value of “1” is written to each memory cell of the memory circuit 1 before starting a test.
- the switch circuits SW 3 , SW 4 become conductive.
- the transfer gates of the comparison circuit 5 a become conductive and non-conductive in response to the leading edge and trailing edge of the second reference clock signal DQS.
- the latch circuits 8 a, 8 b respectively latch the read data DaN, DbN that passes through the transfer gates 9 a, 9 b.
- the read data DaN, DbN latched by the latch circuits 8 a, 8 b and the expected value EX are compared by the EOR circuits 7 a, 7 b.
- the comparison results CR 1 , CR 2 are output from the EOR circuit 7 a, 7 b, respectively.
- the comparison result CR 2 is output delayed from the comparison result CR 1 by one-half cycle of the second reference clock signal DQS.
- the expected value EX is high, as is the data prewritten to the memory circuit 1 .
- the comparison results CR 1 , CR 2 go low.
- the OR circuit 12 a of the determination circuit 6 a is provided with the comparison results CR 1 , CR 2 .
- the OR circuit 12 a outputs the determination result TR in response to the trailing edge of the second reference clock signal DQS. In this case, when the comparison results CR 1 , CR 2 are both low, the determination result TR goes low.
- test circuit 302 of the DDR-SDRAM 300 of the second embodiment has the advantages described below.
- the test circuit 302 eliminates the necessity for decreasing the data rate of an external device in correspondence with the data reading rate of the DDR-SDRAM 300 .
- the test circuit 302 has a relatively small circuit area. Thus, the circuit area of the DDR-SDRAM 300 does not have to be increased.
- a comparison circuit 5 b of a test circuit includes transfer gates 9 c, 9 d, 9 e, 9 f, inverters 10 c, 10 d, latch circuits 8 d, 8 e, 8 f, 8 g, and EOR circuits 7 d, 7 e, 7 f, 7 g.
- the configuration of the comparison circuit 5 b is equivalent to two sets of the comparison circuit 5 a.
- the transfer gates 9 c, 9 d receive output data DQ via an n-channel MOS transistor Tr 2 .
- the transfer gates 9 e, 9 f receive output data DQ via an n-channel MOS transistor Tr 3 .
- the gates of the transistors Tr 2 , Tr 3 receive a counter output signal from a counter circuit 11 a.
- the counter circuit 11 a counts the second reference clock signal DQS and outputs the counter output signal so that the transistors Tr 2 , Tr 3 are alternately activated every other cycle of the second reference clock signal DQS.
- the comparison circuit 5 b is provided with the output data DQ and the second reference clock signal DQS.
- the latch circuit 8 d latches the read data Da 1 .
- the latch circuit 8 e latches the read data Db 1 .
- the latch circuit 8 f latches read data Da 2 .
- the latch circuit 8 g latches read data Db 2 .
- the latching of the read data is shifted among the latch circuits 8 d - 8 g every half cycle of the second reference clock signal DQS.
- the read data latch period of each latch circuit is two cycles of the second reference clock signal DQS.
- the read data latched by the latch circuits 8 d - 8 g is compared with the expected value EX by the associated EOR circuits 7 d - 7 g. Comparison results CR 3 -CR 6 are output from the EOR circuits 7 d - 7 g, respectively.
- a determination circuit which is preferably a four input OR circuit, receives the comparison results CR 3 -CR 6 of the comparison circuit 5 b and outputs the determination result TR.
- the latch circuits 8 d - 8 g generate latched output signals having frequencies that are half of those of the latched output signals of the latches 8 a, 8 b (FIG. 6).
- the comparison and determination operations are performed in a further stable manner.
- a comparison circuit 5 c of a test circuit may include an EOR circuit 7 h.
- the EOR circuit 7 h compares read data DQ, which is received from the output circuit 4 , with the expected value EX and outputs a comparison result CR.
- the comparison result CR output from the comparison circuit 5 c goes low when the read data DQ and the expected value EX are matched and goes high when the read data DQ and the expected value EX do not match.
- a test circuit includes a determination circuit 6 b (FIG. 12) and either the comparison circuit 5 c of FIG. 10 or the comparison circuit 5 d of FIG. 11.
- the determination circuit 6 b includes a serial-parallel conversion circuit and a determination section connected to the serial-parallel conversion circuit.
- the determination circuit 6 b receives the comparison result CR from the comparison circuit 5 c or 5 d.
- the comparison result CR is provided to a latch circuit 8 i via a transfer gate 9 g and to a latch circuit 8 j via a transfer gate 9 h.
- the transfer gate 9 g becomes conductive and the transfer gate 9 h becomes nonconductive. This provides the comparison result CR to the latch circuit 8 i via the transfer gate 9 g, and the latch circuit 8 i provides the latched comparison result CR to the OR circuit 12 b.
- the determination circuit 6 c includes a counter circuit 11 b, transistors Tr 5 , Tr 6 , transfer gates 9 i, 9 j, 9 k, 9 m, inverters 10 g, 10 h, and latch circuits 8 l, 8 m, 8 n, 8 p, 8 q.
- the determination circuit 6 c functions in the same manner as the comparison circuit 5 b of FIG. 9.
- Count signals N 1 , N 2 having a high level are alternately output from the counter circuit 11 b each time a pulse of the second reference clock signal DQS is counted to alternately activate the transistors Tr 5 , Tr 6 .
- the output circuit 4 When entering the test mode, the output circuit 4 outputs read data DaN, DbN as output data.
- the comparison result CR of the read data Da 3 goes high.
- the high comparison result CR is latched by the latch circuit 8 l.
- the determination result TR output from the latch circuit 8 q goes high.
- the tester detects abnormal functioning of the DDR-SDRAM based on the high determination result TR.
- the frequency of the latched output signals of the latch circuits 8 l, 8 m, 8 n, 8 p is one half the frequency of the latched output signals of the latch circuits 8 a, 8 b of FIG. 6. Accordingly, the determination operation is performed more stably.
- the output frequency of the determination signal TR is one-eighth the output data-rate of the output data DQ and one-fourth the frequency of the second reference clock signal DQS. This ensures the determination of abnormal functioning by the external tester.
- FIG. 15 is a chart showing the waveforms of signals in a test circuit according to a sixth embodiment of the present invention.
- the read latency RL of the memory circuit 1 is set at 2.5.
- the test circuit 302 of FIG. 5 is employed as the test circuit of the sixth embodiment.
- the comparison circuit 5 a and the determination circuit 6 a function in accordance with the second reference clock signal DQS regardless of the reference clock signal CLK.
- the comparison circuit 5 a and the determination circuit 6 a function in the same manner as in the second embodiment, even if the read latency RL changes.
- test circuit 302 functions stably. Further, the test circuits of the third to fifth embodiment also function stably regardless of the read latency of the memory circuit 1 .
- a test circuit includes a comparison circuit 5 a, a determination circuit 6 a, and a phase shift circuit 14 .
- the second reference clock signal DQS is provided to the comparison circuit 5 a and the determination circuit 6 a via the phase shift circuit 14 .
- the phase shift circuit 14 includes inverters 10 k, 10 j, a plurality of n-channel MOS transistors Trn, and a plurality of capacitors C.
- the second reference clock signal DQS is provided to the inverter 10 j.
- the input terminal of the inverter 10 j is connected to the drains of the NMOS transistors Trn.
- the sources of the transistors Trn are connected to the ground GND via the associated capacitors C.
- the gates of the transistors Trn are provided with a phase control signal PH.
- the phase control signal PH is generated by, for example, an external tester to select the transistor Trn that is to be activated.
- the output signal of the inverter 10 j is output as the phase shift signal DQSP via the inverter 10 k.
- the phase control signal PH adjusts the number of transistors Trn that are to be activated and the capacity of the input terminal of the inverter 10 j.
- the phase shift signal DQSP is delayed relative to the second clock signal DQS. That is, the time delay of the phase shift signal DQSP is adjusted by adjusting the capacity of the input terminal of the inverter 10 j.
- test circuit in addition to a DDR-SDRAM, may be applied to a semiconductor device that outputs data at a high speed.
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Abstract
Description
- The present invention relates to a semiconductor device having a test circuit, and more particularly, to a test circuit of a synchronous DRAM that writes and reads data in synchronism with a clock signal.
- To increase the operational speed of SDRAMs, double data rate (DDR)-SDRAMs are now being used instead of single data rate (SDR)-SDRAMs. The rate for reading and writing data in the DDR-SDRAM is twice as great as that of the SDR-SDRAM.
- With reference to FIG. 1, when a DDR-SDRAM receives an operation control signal CM (read command), the DDR-SDRAM acquires the read command when a first reference clock signal CLK goes high. When a predetermined read latency RL elapses, the DDR-SDRAM generates a second reference clock signal DQS and output data DQ.
- In this state, the output data DQ is output in synchronism with the leading edge and trailing edge of the second reference clock signal DQS. Thus, the data rate of the DDR-SDRAM is twice as great as that of the SDR-SDRAM.
- The DDR-SDRAM receives the second reference clock signal DQS and input data DQ during a write mode. The DDR-SDRAM performs data writing in synchronism with the leading edge and trailing edge of the second reference clock signal DQS.
- When testing the DDR-SDRAM, the data rate of the DDR-SDRAM may be higher than that of a conventional tester. Thus, to match the data rate of the DDR-SDRAM with that of a tester, the DDR-SDRAM is provided with a test circuit.
- With reference to FIG. 2, a
typical test circuit 100 includes a testmode switching circuit 3. Data DaN is read in parallel with data DbN from amemory circuit 1. The data DaN, DbN is provided to themultiplexer circuit 2 in accordance with the reference clock signal CLK and the operation control signal CM. - The
multiplexer circuit 2 is controlled by the testmode switching circuit 3, which includes switch circuits SW1, SW2. During a normal mode, the second reference clock signal DQS is provided to themultiplexer circuit 2 via the switch circuit SW1. During a test mode, the second reference clock signal DQS and a selection signal SL are provided to themultiplexer circuit 2 via the switch circuits SW1, SW2, respectively. The selection signal SL selects read data DaN or read data DbN. - With reference to FIG. 1, during the normal mode, the
multiplexer circuit 2 alternately provides the read data DaN and DbN to theoutput circuit 4 in synchronism with the leading and trailing edges of the second reference clock signal DQS. Theoutput circuit 4 outputs the read data DaN, DbN as the output data DQ. - Referring to FIG. 3, when the selection signal SL received by the
multiplexer circuit 2 goes high during the test mode, themultiplexer circuit 2 provides the read data DaN to theoutput circuit 4 when the second reference clock signal DQS goes high. Theoutput circuit 4 outputs the read data DaN as the output data DQ. - When the selection signal SL goes low during the test mode, the
multiplexer circuit 2 provides the read data DbN to theoutput circuit 4 when the second reference clock signal DQS goes high. Theoutput circuit 4 outputs the read data DbN as the output data DQ. - In this manner, the
test circuit 100 provides the output data DQ to a tester at a data rate that is one half of the data rate of the DDR-SDRAM. The tester compares data prewritten to thememory circuit 1 with the output data DQ and determines whether the DDR-SDRAM is functioning normally. - However, since the data rate of the output data DQ generated by the
test circuit 100 is one half of that of the DDR-SDRAM, the time required to read cell information from every memory cell of thememory circuit 1 is twice as long as the time required for the output data DQ to be generated at the normal data rate of the DDR-SDRAM. This prolongs test time and increases test costs. - Further, the
test circuit 100 is not capable of detecting whether the DDR-SDRAM is outputting the output data DQ at the normal data rate (i.e., double data rate). - Japanese Unexamined Patent Publication No. 11-101855 describes a test circuit having a frequency divider. The frequency divider divides a reference clock signal, which is provided from an external device, to generate a divisional clock signal. The divisional clock signal is used as the second reference signal to decrease the data rate of the test circuit.
- However, when the operational time delay of the frequency divider results in a time lag between the leading edge of the reference clock signal and the leading edge of the divisional clock signal, the tester cannot perform proper comparison of the write data and the read data. To eliminate the time lag between the divisional clock signal and the reference clock signal, a control circuit may be incorporated in the test circuit. However, the control circuit would increase the circuit area of the test circuit. The frequency divider would also increase the circuit area of the test circuit since the frequency divider includes a relatively large number of elements.
- It is an object of the present invention to provide a semiconductor device having a test circuit that does not require an increase in the circuit area and shortens the test time.
- To achieve the above object, the present invention provides a semiconductor device including an internal circuit for generating data. An I/O circuit receives the data and outputs output data in correspondence with a rising edge and a falling edge of a reference clock signal. A comparison determination circuit receives the output data, compares the output data with an expected data value, and generates determination result data in correspondence with the rising edge and the falling edge of the reference clock signal.
- To achieve the above object, the present invention further provides a semiconductor device including an internal circuit for generating data in correspondence with a first reference clock signal. An I/O circuit receives the data and outputs output data in correspondence with a rising edge and a falling edge of a second reference clock signal. A comparison determination circuit receives the output data, compares the output data with an expected data value, and generates determination result data in correspondence with the rising edge and the falling edge of the second reference clock signal.
- Other aspects and advantages of the present invention will become apparent from the following description, taken in conjunction with the accompanying drawings, illustrating by way of example the principles of the invention.
- The invention, together with objects and advantages thereof, may best be understood by reference to the following description of the presently preferred embodiments together with the accompanying drawings in which:
- FIG. 1 is a chart showing signal waveforms during a read mode in a prior art DDR-SDRAM;
- FIG. 2 is a schematic block diagram of a DDR-SDRAM having a prior art test circuit;
- FIG. 3 is a chart showing waveforms of signals in the prior art test circuit of FIG. 2;
- FIG. 4 is a schematic block diagram of a semiconductor memory according to a first embodiment of the present invention;
- FIG. 5 is a schematic block diagram of a semiconductor memory having a test circuit according to a second embodiment of the present invention;
- FIG. 6 is a schematic circuit diagram of a comparison circuit of the test circuit of FIG. 5;
- FIG. 7 is a schematic circuit diagram of a determination circuit of the test circuit of FIG. 5;
- FIG. 8 is a chart showing waveforms of signals in the test circuit of FIG. 5;
- FIG. 9 is a schematic circuit diagram of a comparison circuit of a test circuit according to a third embodiment of the present invention;
- FIG. 10 is a schematic circuit diagram of a comparison circuit of a test circuit according to a fourth embodiment of the present invention;
- FIG. 11 is a schematic circuit diagram of a further comparison circuit of the test circuit according to the fourth embodiment of the present invention;
- FIG. 12 is a schematic circuit diagram of a determination circuit of the test circuit according to the fourth embodiment of the present invention;
- FIG. 13 is a schematic circuit diagram of a determination circuit of a test circuit according to a fifth embodiment of the present invention;
- FIG. 14 is a chart showing waveforms of signals in the test circuit of the fifth embodiment;
- FIG. 15 is a chart showing waveforms of signals in a test circuit according to a sixth embodiment of the present invention;
- FIG. 16 is a schematic block diagram of a semiconductor memory having a test circuit according to a seventh embodiment of the present invention;
- FIG. 17 is a schematic circuit diagram of a phase shift circuit of the test circuit of FIG. 16; and
- FIG. 18 is a chart showing waveforms of signals in the test circuit of FIG. 16.
- In the drawings, like numerals are used for like elements throughout.
- With reference to FIG. 4, a
semiconductor device 200 according to a first embodiment of the present invention has aninternal circuit 1 and atest circuit 202. Thetest circuit 202 includes acomparison determination circuit 16. Theinternal circuit 1 operates in correspondence with a first reference clock signal CLK. In accordance with a second reference clock signal DQS, the I/O circuit 15 receives data DQ from theinternal circuit 1 and outputs the data DQ. The I/O circuit 15 also provides data to theinternal circuit 1 in accordance with the second reference clock signal DQS. In correspondence with the second reference clock signal DQS, thecomparison determination circuit 16 compares determination subject data DQ, which is output from theinternal circuit 1, with its expected value EX to generate a comparison determination result TR. The employment of the expected value EX eliminates the necessity for matching the data rate of the data DQ output from theinternal circuit 1 with the data rate of an external tester and shortens test time. - With reference to FIG. 5, a DDR-
SDRAM 300 according to a second embodiment of the present invention includes amemory circuit 1, amultiplexer circuit 2, anoutput circuit 4, and atest circuit 302. Thetest circuit 302 has switch circuits SW3, SW4, acomparison circuit 5 a, and adetermination circuit 6 a. The switch circuits SW3, SW4 form a test mode switching circuit and become conductive during the test mode. - The
memory circuit 1 receives a reference clock signal CLK and an operation control signal CM, which includes a read command. Data DaN, DbN (N=1, 2,. . . ) is read from thememory circuit 1 in correspondence with the reference clock signal CLK and the read command. The read data is provided to themultiplexer circuit 2. - The
multiplexer circuit 2 alternately provides the read data DaN, DbN to theoutput circuit 4 in correspondence with the second reference clock signal DQS. Theoutput circuit 4 outputs the read data DaN, DbN as the output data DQ. - The output data DQ is provided to the
comparison circuit 5 a via the switch circuit SW3. The second reference clock signal DQS is provided to thecomparison circuit 5 a via the switch circuit SW4. During the test mode, thecomparison circuit 5 a is also provided with data of the expected value EX, which is identical to the data prewritten to thememory circuit 1. Thecomparison circuit 5 a compares the output data DQ with the expected value EX and provides the comparison result CR to thedetermination circuit 6 a. - The
determination circuit 6 a receives the second reference clock signal DQS via the switch circuit SW4. Thedetermination circuit 6 a provides an external tester with a determination result TR based on the second reference clock signal DQS and the comparison result CR. - With reference to FIG. 6, the
comparison circuit 5 a includestransfer gates latch circuits EOR circuits latch circuit 8 a receives output data DQ via thetransfer gate 9 a, and thelatch circuit 8 b receives output data DQ via thetransfer gate 9 b. Thetransfer gates latch circuits - The second reference clock signal DQS is provided to the n-channel gate of the
transfer gate 9 a and the p-channel gate of thetransfer gate 9 b. The second reference clock signal DQS is also received by the p-channel gate of thetransfer gate 9 a and the n-channel gate of thetransfer gate 9 b via aninverter 10 a. When the second reference clock signal DQS goes high, thetransfer gate 9 a becomes conductive and thetransfer gate 9 b becomes non-conductive. - The output signal of the
latch circuit 8 a is provided to a first input terminal of theEOR circuit 7 a, and the expected value EX is provided to a second input terminal of theEOR circuit 7 a. A comparison result CR1 is output from theEOR circuit 7 a. - The output signal of the
latch circuit 8 b is provided to a first input terminal of theEOR circuit 7 b, and the expected value EX is provided to a second input terminal of theEOR circuit 7 b. A comparison result CR2 is output from theEOR circuit 7 b. - When the read data DaN, DbN is output alternately from the
output circuit 4, read data DaN is latched by thelatch circuit 8 a and read data DbN is latched by thelatch circuit 8 b in correspondence with the leading edge and trailing edge of the second reference clock signal DQS. - The
EOR circuit 7 a compares the output signal of thelatch circuit 8 a with the expected value EX. When the output signal of thelatch circuit 8 a matches the expected value EX, the comparison signal CR1 output from theEOR circuit 7 a goes low. TheEOR circuit 7 b compares the output signal of thelatch circuit 8 b with the expected value EX. When the output signal of thelatch circuit 8 b matches the expected value EX, the comparison signal CR2 output from theEOR circuit 7 b goes low. The comparison results of theEOR circuits - With reference to FIG. 7, the
determination circuit 6 a includes an ORcircuit 12 a, alatch circuit 8 c, an n-channel MOS transistor Tr1 and aninverter 10 b. The ORcircuit 12 a receives the comparison results CR1, CR2 from thecomparison circuit 5 a and provides an OR logic output signal to thelatch circuit 8 c via the NMOS transistor Tr1. Thelatch circuit 8 c outputs the determination result TR. The gate of the transistor Tr1 receives the second reference clock signal DQS via theinverter 10 b. - In the
determination circuit 6 a, when the comparison results CR1, CR2 output from thecomparison circuit 5 a go low, the signal output from theOR circuit 12 a goes low. If any one of the comparison results CR1, CR2 goes high, the signal output from theOR circuit 12 a goes high. - When the second reference clock signal DQS goes low, the OR logic output signal is latched by the
latch circuit 8 c. The determination signal TR is output from thelatch circuit 8 c. - The operation of the
test circuit 302 of the DDR-SDRAM will now be discussed with reference to FIG. 8. - Cell information, such as the value of “1”, is written to each memory cell of the
memory circuit 1 before starting a test. When a test mode is set, the switch circuits SW3, SW4 become conductive. - In this state, the
memory circuit 1 receives the reference clock signal CLK and the read control signal Read. After a predetermined latency RL (in this case, RL=2) elapses from when thememory circuit 1 acquires the read control signal, themultiplexer circuit 2 is provided with the second reference clock signal DQS. Themultiplexer circuit 2 alternately provides theoutput circuit 4 with data DaN, DbN read from thememory circuit 1 in response to the leading edge and trailing edge of the second reference clock signal DQS. Theoutput circuit 4 outputs the read data DaN, DbN as the output data DQ. - The transfer gates of the
comparison circuit 5 a become conductive and non-conductive in response to the leading edge and trailing edge of the second reference clock signal DQS. Thelatch circuits transfer gates - The read data DaN, DbN latched by the
latch circuits EOR circuits EOR circuit - The expected value EX is high, as is the data prewritten to the
memory circuit 1. Thus, if the read data DaN, DbN are high, the comparison results CR1, CR2 go low. - The OR
circuit 12 a of thedetermination circuit 6 a is provided with the comparison results CR1, CR2. The ORcircuit 12 a outputs the determination result TR in response to the trailing edge of the second reference clock signal DQS. In this case, when the comparison results CR1, CR2 are both low, the determination result TR goes low. - With reference to FIG. 8, for example, when the
EOR circuit 7 a is provided with read data Da3, which is low and has an error, and the second reference clock signal DQS goes high, the comparison signal CR1 output from theEOR circuit 7 a goes high. As a result, the determination result TR goes high when the second reference clock signal DQS goes low. Based on the high determination result TR, the tester detects abnormal functioning of the DDR-SDRAM 300. - The
test circuit 302 of the DDR-SDRAM 300 of the second embodiment has the advantages described below. - (1) The
test circuit 302 eliminates the necessity for decreasing the data rate of an external device in correspondence with the data reading rate of the DDR-SDRAM 300. - (2) The DDR-
SDRAM 300 is tested at the normal data rate. Thus, the data rate of the external tester does not have to be increased. - (3) The
test circuit 302 has a relatively small circuit area. Thus, the circuit area of the DDR-SDRAM 300 does not have to be increased. - With reference to FIG. 9, a
comparison circuit 5 b of a test circuit according to a third embodiment of the present invention includestransfer gates inverters latch circuits EOR circuits comparison circuit 5 b is equivalent to two sets of thecomparison circuit 5 a. Thetransfer gates transfer gates - The gates of the transistors Tr2, Tr3 receive a counter output signal from a
counter circuit 11 a. Thecounter circuit 11 a counts the second reference clock signal DQS and outputs the counter output signal so that the transistors Tr2, Tr3 are alternately activated every other cycle of the second reference clock signal DQS. - The
comparison circuit 5 b is provided with the output data DQ and the second reference clock signal DQS. When the second reference clock signal DQS does high, thelatch circuit 8 d latches the read data Da1. Then, when the second reference clock signal DQS goes low, thelatch circuit 8 e latches the read data Db1. Next, when the second reference clock signal DQS goes high, thelatch circuit 8 f latches read data Da2. Then, when the second reference clock signal DQS goes low, thelatch circuit 8 g latches read data Db2. - Accordingly, the latching of the read data is shifted among the
latch circuits 8 d-8 g every half cycle of the second reference clock signal DQS. The read data latch period of each latch circuit is two cycles of the second reference clock signal DQS. The read data latched by thelatch circuits 8 d-8 g is compared with the expected value EX by the associatedEOR circuits 7 d-7 g. Comparison results CR3-CR6 are output from theEOR circuits 7 d-7 g, respectively. - A determination circuit, which is preferably a four input OR circuit, receives the comparison results CR3-CR6 of the
comparison circuit 5 b and outputs the determination result TR. - In a test circuit according to a third embodiment of the present invention, the
latch circuits 8 d-8 g generate latched output signals having frequencies that are half of those of the latched output signals of thelatches - With reference to FIG. 10, a
comparison circuit 5 c of a test circuit according to a fourth embodiment of the present invention may include an EOR circuit 7 h. The EOR circuit 7 h compares read data DQ, which is received from theoutput circuit 4, with the expected value EX and outputs a comparison result CR. The comparison result CR output from thecomparison circuit 5 c goes low when the read data DQ and the expected value EX are matched and goes high when the read data DQ and the expected value EX do not match. - A
comparison circuit 5 d such as that of FIG. 11 may be used in lieu of thecomparison circuit 5 c. Thecomparison circuit 5 d includes a latch circuit 8 h and an EOR circuit 7 i. The EOR circuit 7 i compares read data DQ, which is received from theoutput circuit 4 via the latch circuit 8 h, with the expected value EX and outputs a comparison result CR. The latch circuit 8 h stabilizes the comparison of the EOR circuit 7 i. The second reference clock signal DQS is not provided to thecomparison circuits - A test circuit according to a fourth embodiment of the present invention includes a
determination circuit 6 b (FIG. 12) and either thecomparison circuit 5 c of FIG. 10 or thecomparison circuit 5 d of FIG. 11. Thedetermination circuit 6 b includes a serial-parallel conversion circuit and a determination section connected to the serial-parallel conversion circuit. Thedetermination circuit 6 b receives the comparison result CR from thecomparison circuit latch circuit 8 i via atransfer gate 9 g and to alatch circuit 8 j via atransfer gate 9 h. - The second reference clock signal DQS is provided to the n-channel gate of the
transfer gate 9 g and the p-channel gate of thetransfer gate 9 h. The second reference clock signal DQS is also provided via aninverter 10 e to the p-channel gate of thetransfer gate 9 g and the n-channel gate of thetransfer gate 9 h. - When the second reference clock signal DQS goes high, the
transfer gate 9 g becomes conductive and thetransfer gate 9 h becomes non-conductive. When the second reference clock signal DQS goes low, thetransfer gate 9 h becomes conductive and thetransfer gate 9 g becomes non-conductive. - The latched output signals of the
latch circuits OR circuit 12 b. The OR logic output signal of theOR circuit 12 b is provided to alatch circuit 8 k via an n-channel MOS transistor Tr4. Thelatch circuit 8 k outputs a determination result TR. The gate of the transistor Tr4 is provided with the second reference clock signal DQS via aninverter 10 f. - In the
determination circuit 6 b, when the second reference clock signal DQS goes high, thetransfer gate 9 g becomes conductive and thetransfer gate 9 h becomes nonconductive. This provides the comparison result CR to thelatch circuit 8 i via thetransfer gate 9 g, and thelatch circuit 8 i provides the latched comparison result CR to theOR circuit 12 b. - When the second reference clock signal DQS goes low, the
transfer gate 9 h becomes conductive, and thetransfer gate 9 g becomes non-conductive. This provides the comparison result CR to thelatch circuit 8 j via thetransfer gate 9 h, and the comparison result CR latched by thelatch circuit 8 j is provided to theOR circuit 12 b. - The OR
circuit 12 b outputs the OR logic signal of the comparison results CR latched by thelatch circuits latch circuit 8 k latches the OR logic output signal of theOR circuit 12 b, and thelatch circuit 8 k outputs the determination result TR. - In the test circuit of the fourth embodiment, the read data DaN, DbN and the expected value EX are compared by the
comparison circuit 5 c or thecomparison circuit 5 d, and the comparison result CR is provided to thedetermination circuit 6 b. In thedetermination circuit 6 b, the comparison result CR of the read data DaN, DbN is sequentially latched by thelatch circuits OR circuit 12 b. As long as the latched comparison results are both low, the OR logic output signal generated by theOR circuit 12 b is low. When the second reference clock signal DQS goes low, the OR logic output signal is output from thelatch circuit 8 k as the determination result TR. - A test circuit according to a fifth embodiment of the present invention includes a determination circuit6 c (FIG. 13) and the
comparison circuit 5 c of FIG. 10 or thecomparison circuit 5 d of FIG. 11. - The determination circuit6 c includes a
counter circuit 11 b, transistors Tr5, Tr6,transfer gates inverters latch circuits comparison circuit 5 b of FIG. 9. - The comparison results CR latched by the
latch circuits OR circuit 12 c. The logic output signal of theOR circuit 12 c is provided to thelatch circuit 8 q via an n-channel MOS transistor Tr7. - Count signals N1, N2 having a high level are alternately output from the
counter circuit 11 b each time a pulse of the second reference clock signal DQS is counted to alternately activate the transistors Tr5, Tr6. - The count signal N2 is provided to a first input terminal of the AND
circuit 13. The second reference clock signal DQS is provided to a second input terminal of the ANDcircuit 13 via an inverter 10 i. The AND logic output signal of the ANDcircuit 13 is provided to the gate of the transistor Tr7. - When the count signal N2 of the
counter circuit 11 b is high and the second reference clock signal DQS goes low, the AND logic output signal of the ANDcircuit 13 goes high and activates the transistor Tr7. This causes thelatch circuit 8 q to latch the OR logic output signal of theOR circuit 12 c. Thelatch circuit 8 q outputs the determination signal TR. - The operation of the test circuit of the fifth embodiment will now be discussed with reference to FIG. 14. When entering the test mode, the
output circuit 4 outputs read data DaN, DbN as output data. - The read data DaN, DbN are compared with the expected value EX by the
comparison circuit - In the determination circuit6 c, the transistors Tr5, Tr6, which respectively function in accordance with the count signals N1, N2 of the
counter circuit 11 b, and thetransfer gates 9 i-9 m, which function in accordance with the second reference clock signal DQS, cause thelatch circuits latch circuits OR circuit 12 c. The OR logic output signal is output from theOR circuit 12 c. - When the count signal N2 is high and the second reference clock signal DQS goes low, the OR logic output signal of the
OR circuit 12 c is latched by thelatch circuit 8 q, and the determination result TR is output from thelatch circuit 8 q. In this manner, when the determination circuit 6 c is continuously provided with the low comparison result CR, the determination result TR remains low. - For example, if the read data Da3 goes low due to an error, the comparison result CR of the read data Da3 goes high. The high comparison result CR is latched by the latch circuit 8 l. Then, when the count signal N2 goes high and the second reference clock signal DQS goes low, the determination result TR output from the
latch circuit 8 q goes high. The tester detects abnormal functioning of the DDR-SDRAM based on the high determination result TR. - The test circuit of the DDR-SDRAM of the fifth embodiment has the advantages described below.
- (1) The frequency of the latched output signals of the
latch circuits latch circuits - (2) The output frequency of the determination signal TR is one-eighth the output data-rate of the output data DQ and one-fourth the frequency of the second reference clock signal DQS. This ensures the determination of abnormal functioning by the external tester.
- FIG. 15 is a chart showing the waveforms of signals in a test circuit according to a sixth embodiment of the present invention. In the sixth embodiment, the read latency RL of the
memory circuit 1 is set at 2.5. Thetest circuit 302 of FIG. 5 is employed as the test circuit of the sixth embodiment. - The
comparison circuit 5 a and thedetermination circuit 6 a function in accordance with the second reference clock signal DQS regardless of the reference clock signal CLK. - Thus, the
comparison circuit 5 a and thedetermination circuit 6 a function in the same manner as in the second embodiment, even if the read latency RL changes. - Accordingly, regardless of the read latency RL of the
memory circuit 1, thetest circuit 302 functions stably. Further, the test circuits of the third to fifth embodiment also function stably regardless of the read latency of thememory circuit 1. - With reference to FIG. 16, a test circuit according to a seventh embodiment of the present invention includes a
comparison circuit 5 a, adetermination circuit 6 a, and aphase shift circuit 14. The second reference clock signal DQS is provided to thecomparison circuit 5 a and thedetermination circuit 6 a via thephase shift circuit 14. - With reference to FIG. 17, the
phase shift circuit 14 includesinverters inverter 10 j. The input terminal of theinverter 10 j is connected to the drains of the NMOS transistors Trn. The sources of the transistors Trn are connected to the ground GND via the associated capacitors C. - The gates of the transistors Trn are provided with a phase control signal PH. The phase control signal PH is generated by, for example, an external tester to select the transistor Trn that is to be activated.
- The output signal of the
inverter 10 j is output as the phase shift signal DQSP via theinverter 10 k. - In the
phase shift circuit 14, the phase control signal PH adjusts the number of transistors Trn that are to be activated and the capacity of the input terminal of theinverter 10 j. In accordance with the capacity of the input terminal of theinverter 10 j, the phase shift signal DQSP is delayed relative to the second clock signal DQS. That is, the time delay of the phase shift signal DQSP is adjusted by adjusting the capacity of the input terminal of theinverter 10 j. - With reference to FIG. 18, by adjusting the time delay of the phase shift signal DQSP, the timing for latching the read data DaN, DbN of the
comparison circuit 5 a is changed. Thus, by adjusting the time delay of the phase shift signal DQSP, the range that enables normal output of the low determination signal TR is detected. The detection enables measurement of the data output period of data DaN, DbN. - It should be apparent to those skilled in the art that the present invention may be embodied in many other specific forms without departing from the spirit or scope of the invention. Particularly, it should be understood that the present invention may be embodied in the following forms.
- In addition to a DDR-SDRAM, a test circuit according to the present invention may be applied to a semiconductor device that outputs data at a high speed.
- The present examples and embodiments are to be considered as illustrative and not restrictive, and the invention is not to be limited to the details given herein, but may be modified within the scope and equivalence of the appended claims.
Claims (12)
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JP2000011626A JP4975203B2 (en) | 2000-01-20 | 2000-01-20 | Semiconductor device |
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JP2000-011626 | 2000-01-20 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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US20020138798A1 (en) * | 2001-03-26 | 2002-09-26 | Birgit Stabenau | Configuration for testing an integrated semiconductor memory and method for testing the memory |
US20050149792A1 (en) * | 2002-12-20 | 2005-07-07 | Fujitsu Limited | Semiconductor device and method for testing the same |
EP1574867A1 (en) * | 2002-12-20 | 2005-09-14 | Fujitsu Limited | Semiconductor device and method for testing the same |
US20110161719A1 (en) * | 2009-12-31 | 2011-06-30 | Industrial Technology Research Institute | Processing devices |
CN102467978A (en) * | 2010-10-29 | 2012-05-23 | 海力士半导体有限公司 | Input/output circuit and method of semiconductor apparatus and system with the same |
CN104700902A (en) * | 2013-12-09 | 2015-06-10 | 慧荣科技股份有限公司 | Data storage device and mode detection method thereof |
US20220188027A1 (en) * | 2020-12-14 | 2022-06-16 | Samsung Electronics Co., Ltd. | Semiconductor memory device and test system including the same |
Families Citing this family (2)
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KR100451466B1 (en) | 2002-10-31 | 2004-10-08 | 주식회사 하이닉스반도체 | Memory device in Semiconductor for enhancing ability of test |
KR100618828B1 (en) * | 2003-06-04 | 2006-08-31 | 삼성전자주식회사 | Semiconductor memory devices and operating methods that are configured to output data bits at a lower rate in a test mode of operation |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2974219B2 (en) * | 1990-08-02 | 1999-11-10 | 三菱電機株式会社 | Test circuit for semiconductor memory device |
JP3365480B2 (en) | 1997-09-26 | 2003-01-14 | 日本電気株式会社 | Test circuit and test method for semiconductor integrated circuit and semiconductor device |
JPH11203864A (en) * | 1998-01-14 | 1999-07-30 | Mitsubishi Electric Corp | Synchronous type semiconductor storage device |
JPH11219600A (en) * | 1998-02-03 | 1999-08-10 | Mitsubishi Electric Corp | Semiconductor integrated circuit device |
JPH11312400A (en) * | 1998-02-24 | 1999-11-09 | Matsushita Electric Ind Co Ltd | Semiconductor integrated circuit |
JP4204685B2 (en) * | 1999-01-19 | 2009-01-07 | 株式会社ルネサステクノロジ | Synchronous semiconductor memory device |
-
2000
- 2000-01-20 JP JP2000011626A patent/JP4975203B2/en not_active Expired - Fee Related
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US20020138798A1 (en) * | 2001-03-26 | 2002-09-26 | Birgit Stabenau | Configuration for testing an integrated semiconductor memory and method for testing the memory |
US6829738B2 (en) * | 2001-03-26 | 2004-12-07 | Infineon Technologies Ag | Configuration for testing an integrated semiconductor memory and method for testing the memory |
US20050149792A1 (en) * | 2002-12-20 | 2005-07-07 | Fujitsu Limited | Semiconductor device and method for testing the same |
EP1574867A1 (en) * | 2002-12-20 | 2005-09-14 | Fujitsu Limited | Semiconductor device and method for testing the same |
EP1574867A4 (en) * | 2002-12-20 | 2006-01-25 | Fujitsu Ltd | Semiconductor device and method for testing the same |
KR100793221B1 (en) * | 2002-12-20 | 2008-01-10 | 후지쯔 가부시끼가이샤 | Semiconductor device and method for testing the same |
US20110161719A1 (en) * | 2009-12-31 | 2011-06-30 | Industrial Technology Research Institute | Processing devices |
US8499188B2 (en) * | 2009-12-31 | 2013-07-30 | Industrial Technology Research Institute | Processing device for determining whether to output a first data using a first clock signal or a second data using delay from the first clock signal according to a control signal |
CN102467978A (en) * | 2010-10-29 | 2012-05-23 | 海力士半导体有限公司 | Input/output circuit and method of semiconductor apparatus and system with the same |
CN104700902A (en) * | 2013-12-09 | 2015-06-10 | 慧荣科技股份有限公司 | Data storage device and mode detection method thereof |
US10162532B2 (en) | 2013-12-09 | 2018-12-25 | Silicon Motion, Inc. | Data storage device and mode-detection method thereof |
US20220188027A1 (en) * | 2020-12-14 | 2022-06-16 | Samsung Electronics Co., Ltd. | Semiconductor memory device and test system including the same |
US11520528B2 (en) * | 2020-12-14 | 2022-12-06 | Samsung Electronics Co., Ltd. | Semiconductor memory device and test system including the same |
US11989459B2 (en) | 2020-12-14 | 2024-05-21 | Samsung Electronics Co., Ltd. | Semiconductor memory device and test system including the same |
Also Published As
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JP4975203B2 (en) | 2012-07-11 |
US6310826B2 (en) | 2001-10-30 |
JP2001202798A (en) | 2001-07-27 |
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