US11509115B2 - Electrically pumped photonic-crystal surface-emitting laser - Google Patents

Electrically pumped photonic-crystal surface-emitting laser Download PDF

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US11509115B2
US11509115B2 US17/145,691 US202117145691A US11509115B2 US 11509115 B2 US11509115 B2 US 11509115B2 US 202117145691 A US202117145691 A US 202117145691A US 11509115 B2 US11509115 B2 US 11509115B2
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gallium
indium
metal electrode
antimonide
layer
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Chien-Hung Lin
Bo-Tsun Chou
Chih-Yuan Weng
Yu-Chen Chen
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Phosertek Corp
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    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
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    • H01S5/2004—Confining in the direction perpendicular to the layer structure
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Definitions

  • the invention relates to an electrically pumped photonic-crystal surface-emitting laser, which the first metal electrode and the second metal electrode facing the same direction, and the first metal electrode is connected to the first connecting metal and the second metal electrode is connected to the second connecting metal for making the photonic crystal structure become flip chip.
  • U.S. Pat. No. 10,340,659B1 disclosed an electrically pumped surface-emitting photonic crystal laser, comprising: a substrate having a top surface and a bottom surface; a first cladding layer arranged on said top surface of the substrate; an active layer with a quantum structure arranged on said first cladding layer; a second cladding layer arranged on said active layer; a contact layer arranged on said second cladding layer in a shape of mesa and including a plurality of holes to form a photonic crystal structure, said photonic crystal structure further having a first area on a top surface thereof; an electrical currents confining structure arranged on said photonic crystal structure and on said active layer and including an opening corresponding to said first area on the photonic crystal structure, so as to confine electrical currents within the first area; a transparent conducting layer arranged on said electrical currents confining structure and including a second area on a top surface thereof, covering said first area of the photonic crystal structure and having said second area vertically aligned with said
  • the metal anode and the metal cathode need to be wire bonding, a common bonding technique, however, it will produce a strong parasitic inductance effect during signal transmission and causing the signal distortion, and since the transparent conducting layer is made of indium tin oxide (ITO) which will absorb, refract and scattering the light, so the laser emitting effect is reduced. Moreover, since the conventional laser structure has bad heat dissipation, it will easily get degraded under high current operation.
  • ITO indium tin oxide
  • It is a primary objective of the present invention is to provide an electrically pumped photonic-crystal surface-emitting laser, which the first metal electrode and the second metal electrode facing the same direction, and the first metal electrode is connected to the first connecting metal and the second metal electrode is connected to the second connecting metal, so as to skip the wire bonding process and avoid the signal distortion problem.
  • Another objective of the present invention is to provide an electrically pumped photonic-crystal surface-emitting laser, which the first metal electrode and the second metal electrode facing the same direction, and the first metal electrode is connected to the first connecting metal and the second metal electrode is connected to the second connecting metal, so as to omit the transparent conducting layer for avoid the light absorb, refract and scattering and further improve the efficiency of laser emitting.
  • Another objective of the present invention is to provide an electrically pumped photonic-crystal surface-emitting laser, which the first metal electrode and the second metal electrode facing the same direction, and the first metal electrode is connected to the first connecting metal and the second metal electrode is connected to the second connecting metal, so as to replace conventional laser structure and further improve the heat dispassion efficiency.
  • the electrically pumped photonic-crystal surface-emitting laser includes a first substrate having a first surface and a second surface; a first cladding layer arranged on the first surface of the first substrate; a first separate confinement heterostructure arranged on the first cladding layer; an active layer arranged on the first separate confinement heterostructure and having a quantum structure; a second separate confinement heterostructure arranged on the active layer; a second cladding layer arranged on the second separate confinement heterostructure; a contact layer arranged on said second cladding layer making the first substrate, the first cladding layer, the first separate confinement heterostructure, the active layer, the second separate confinement heterostructure and the second cladding layer form an epitaxy structure, the epitaxy structure has a first mesa, the first mesa has multiple air holes and forming a photonic crystal structure, the epitaxy structure further has a second mesa, the second mesa and photonic crystal structure is facing the same direction; an insulating
  • the second cladding layer has a thickness between 10 to 3000 nm.
  • the air holes are arranged in 2-dimension.
  • the quantum structure includes at least a layer of quantum well or a layer of quantum dots or a layer of quantum wire.
  • the material of the layer of quantum well, the layer of quantum dots and the layer of the quantum wire is composed of: gallium arsenide (GaAs), gallium Phosphide (GaP), gallium nitride (GaN), indium arsenide (InAs), indium phosphide (InP), indium nitride (InN), indium gallium arsenide (InGaAs), indium gallium phosphide (InGaP), indium gallium nitride (InGaN), aluminium gallium arsenide (AlGaAs), aluminum gallium indium arsenide (AlGaInAs), aluminum gallium indium phosphide (AlGaInP), indium gallium aluminium nitride (InGaAlN), gallium indium arsenide phosphide (GaInAsP), indium antimonide (InSb), gallium antimonide (GaSb), aluminium
  • the material of the substrate is composed of: gallium nitride (GaN), allium arsenide (GaAs), indium phosphide (InP) and gallium antimonide (GaSb).
  • the present invention has the first metal electrode and the second metal electrode facing the same direction, and the first metal electrode is connected to the first connecting metal and the second metal electrode is connected to the second connecting metal, so the present invention does not require the transparent conducting layer and can avoid the problem of light the light absorb, refract and scattering, also, the present invention can improve the heat dispassion efficiency and skip the wire bonding process, and further avoid the parasitic inductance.
  • FIG. 1A is a schematic diagram of an epitaxy structure of the present invention.
  • FIG. 1B is a schematic diagram illustrating fabrication of a hard mask of the present invention
  • FIG. 1C is a schematic diagram illustrating a geometric pattern formed on the hard mask of the present invention.
  • FIG. 1D is a schematic diagram illustrating imprint of the geometric pattern
  • FIG. 1E is a schematic diagram illustrating the hard mask being removed
  • FIG. 1F is a schematic diagram illustrating a first mesa formed by etching
  • FIG. 1G is a schematic diagram illustrating a second mesa formed by etching
  • FIG. 1H is a schematic diagram illustrating fabrication of an insulating layer of the present invention.
  • FIG. 1I is a schematic diagram illustrating deposition of a first metal electrode of the present invention
  • FIG. 1J is a schematic diagram illustrating deposition of a second metal electrode of the present invention.
  • FIG. 1K is a schematic diagram illustrating the flip chip process of the photonic crystal structure of the present invention.
  • FIG. 1L is a schematic diagram illustrating the first metal electrode connecting to the first connecting metal and the second metal electrode connecting to the second connecting metal;
  • FIG. 1M is a schematic diagram illustrating finishing the flip chip process of the photonic crystal structure of the present invention.
  • FIG. 2A is a perspective view of first substrate, first mesa, second mesa and first metal electrode of the present invention under an electron microscope;
  • FIG. 2B is a perspective view of first substrate, second mesa and second metal electrode of the present invention under an electron microscope;
  • FIG. 2C is a perspective view of first substrate, first mesa, second mesa, first metal electrode and second metal electrode of the present invention under an electron microscope;
  • FIG. 3 is an application example of the present invention.
  • the present invention is an electrically pumped photonic-crystal surface-emitting laser, comprising: a first substrate 11 A having a first surface 111 and a second surface 112 , in a preferred embodiment, the substrate 11 A can be composed of gallium nitride (GaN), allium arsenide (GaAs), indium phosphide (InP) and gallium antimonide (GaSb), but the present invention is not limited to such application.
  • GaN gallium nitride
  • GaAs allium arsenide
  • InP indium phosphide
  • GaSb gallium antimonide
  • the first cladding layer 12 can be composed of aluminium gallium arsenide (AlGaAs), allium arsenide (GaAs), aluminium gallium nitride (AlGaN), aluminum gallium indium arsenide (AlGaInAs), aluminum gallium indium phosphide (AlGaInP), aluminum gallium antimonide (AlGaSb), gallium arsenide antimonide (GaAsSb), aluminum gallium arsenide antimonide (AlGaAsSb) or the combination thereof, but the present invention is not limited to such application.
  • AlGaAs aluminium gallium arsenide
  • GaAs allium arsenide
  • AlGaN aluminium gallium nitride
  • AlGaInAs aluminum gallium indium arsenide
  • AlGaInP aluminum gallium indium phosphide
  • AlGaInP aluminum gallium antimonide
  • AlGaSb gall
  • the quantum structure includes at least a layer of quantum well or a layer of quantum dots or a layer of quantum wire;
  • the quantum well, the quantum dot and the quantum wire can be composed of gallium arsenide (GaAs), gallium Phosphide (GaP), gallium nitride (GaN), indium arsenide (InAs), indium phosphide (InP), indium nitride (InN), indium gallium arsenide (InGaAs), indium gallium phosphide (InGaP), indium gallium nitride (InGaN), aluminium gallium arsenide (AlGaAs), aluminum gallium indium arsenide (AlGaInAs), aluminum gallium indium phosphide (AlGaInP), indium gallium aluminium nitride (InGaA
  • AlGaAs aluminium gallium arsenide
  • GaAs allium arsenide
  • AlGaN aluminium gallium nitride
  • AlGaInAs aluminum gall
  • GaN gallium nitride
  • GaAs allium arsenide
  • InP indium phosphide
  • GaSb gallium antimonide
  • the first substrate 11 A, the first cladding layer 12 , the first separate confinement heterostructure 13 , the active layer 14 , the second separate confinement heterostructure 15 and the second cladding layer 16 fabricated an epitaxy structure W, and the number of the layer of the epitaxy structure W is not limited.
  • the hard mask M is fabricated by having silicon nitride (SiNx) deposited on the epitaxy structure W, but the present invention is not limited to such application.
  • a photonic crystal pattern F is formed by having positive photoresist R applied on the epitaxy structure W within a square area of 290 ⁇ m; but the present invention is not limited to such application.
  • FIG. 1D illustrated the imprint of the photonic crystal pattern F.
  • the photonic crystal pattern F is imprinted onto the hard mask M and then the positive photoresist R is removed; then the photonic crystal pattern F is further imprinted onto the epitaxy structure W. Since a waveguide pattern of the quantum structure 141 mostly restricts the laser within the active layer 14 , deep etching is required for better bonding. When the depth of etching is greater than 500 nm, the bonding efficiency of the photonic crystals is better, but the present invention is not limited to such application.
  • FIG. 1E further illustrated removal of the hard mask M, and the second cladding layer 16 has a plurality of air holes h to form the photonic crystal structure S
  • the periodicity a of the photonic crystal structure S is 385 nm, 388 nm, 390 nm, 393 nm or 395 nm, but the present invention is not limited to such application.
  • the air holes h are arranged in a column shape with a depth of 520-540 nm and a diameter of 130-140 nm; and the air holes h are arranged in 2-dimension, but the present invention is not limited to such application.
  • a square mesa of 310 ⁇ m with an etching depth of 450 nm and the first mesa H 1 is etched on the epitaxy structure W.
  • the purpose of the first mesa H 1 is to limit the laser beams within the photonic crystals and reduce leakage currents, in preferred embodiment, the second cladding layer 16 and the contact layer 17 form the first mesa H 1 , but the present invention is not limited to such application.
  • the second mesa H 2 is etched on the epitaxy structure W, and the second mesa H 2 is facing the same direction as the photonic crystal structure S, in preferred embodiment, the second mesa H 2 is etched to the first substrate 11 A, but the present invention is not limited to such application.
  • FIG. 1G illustrated the fabrication of an insulating layer I. Since photonic crystals have infinite periodicity, theoretically, there would not be loss on boundaries; however, the photonic crystals for application actually have finite periodicity, so there would be loss on boundaries during operation. Therefore, to reduce the loss on boundaries during operation, an area of the photonic crystals is arranged to be greater than a gain area of the device; additionally, the photonic crystals having an area 2-3 times greater than a gain area of the device can still produce laser beams successfully.
  • the insulating layer I is fabricated on the photonic crystal structure S and the second mesa H 2 , and having an aperture I 1 and a groove I 2 , and the aperture I 1 is fabricated correspondingly to the photonic crystal structure S and the groove I 2 is fabricated correspondingly the second mesa H 2 to confine electrical currents within the first areas A 1 and to enable the laser pattern to exist within the photonic crystal structure S similar to one with infinite periodicity.
  • the insulating layer I is made of a material selected from a group consisting of SiNx, silicon oxide (SiOx) and polyimide, but the present invention is not limited to such application.
  • FIG. 1I illustrated the deposition of the first metal electrode 18 and then deposit titanium (Ti) and gold (Au) to make the first metal electrode 18 be arranged on the insulating layer I and covered on the photonic crystal structure S, but the present invention is not limited to such application.
  • FIG. 1J illustrated the deposition of nickel (Ni), germanium (Ge) and gold (Au) to fabricate the second metal electrode 19 on the first mesa H 1 and be protruded out of the groove I 2 , making the first metal electrode 18 and the second metal electrode 19 face the same direction, but the present invention is not limited to such application.
  • a second substrate 11 B having a third face 113 and a fourth surface 114 , on the third face 113 of the second substrate 11 B has a first connecting metal 1131 and a second connecting metal 1132 , then covering the first substrate 11 A on the second substrate 11 B, and further make the first metal electrode 18 connect to the first connecting metal 1131 and make the second metal electrode 19 connect to the second connecting metal 1132 for making the photonic crystal structure S become flip chip; Then the electrically pumped surface-emitting photonic crystal laser 10 is fabricated after rapid thermal annealing process. Still, the present invention is not limited to such application.
  • the structure above the active layer 14 is a p-type semiconductor with beryllium dopant at an amount of 10 18 cm ⁇ 3 and the structure under the active layer 14 is an n-type semiconductor with silicon and tellurium dopant at an amount of 10 18 cm ⁇ 3 , and the heavily doped area is in amount of 10 19 cm ⁇ 3 .
  • the materials fabricating the first substrate 11 A, the first cladding layer 12 , the first separate confinement heterostructure 13 , the second separate confinement heterostructure 15 , the second cladding layer 16 , the contact layer 17 and the second substrate 11 B also allow a wavelength of the laser to include blue and infrared lights.
  • FIG. 2A showing a perspective view of, the first mesa H 1 and the second mesa H 2 and first metal electrode 18 of the present invention under an electron microscope
  • the first mesa H 1 and the second mesa H 2 are fabricated by wet or dry etch
  • the second mesa H 2 is etched curve while using wet etch and is vertical while using dry etch.
  • FIG. 2B showing, it presents the first mesa H 1 , the second mesa H 2 and the second metal electrode 19
  • the thickness of the second metal electrode 19 can be increased.
  • FIG. 2C showing, it presents the first substrate 11 A, the first mesa H 1 , the second mesa H 2 , the first metal electrode 18 and the second metal electrode 19 .
  • the present invention has the quantum structure 141 as the gain media to successfully fabricate the electrically pumped surface-emitting photonic crystal laser operable at room temperature.
  • the periodicity a of the photonic crystal structure S is 385 nm, 388 nm, 390 nm, 393 nm or 395 nm, a wavelength of emitted laser beam is around 1.3 ⁇ m; in other words, the wavelength of emitted laser beam is variable since the wavelength becomes longer as the periodicity a of the photonic crystal structure S gets longer.
  • the present invention does not require complex techniques of wafer fusion bonding and epitaxial regrowth for fabrication; instead, it has the epitaxy structure W etched from the top for fabrication of the photonic crystal structure S, so as to enable laser beams to be emitted from a front surface of the epitaxy structure W and to bring features of surface-emission and narrow divergence angle.
  • both embodiments have the first metal electrode 18 , the second metal electrode 19 , the first connecting metal 1131 and the second connecting metal 1132 operated to reduce impedance and electrically pump the quantum structure 141 ; then the quantum structure 141 emits laser beams L to the first metal electrode 18 , then reflect a surface laser L to the photonic crystal structure S, the second separate confinement heterostructure 15 , the active layer 14 , the first cladding layer 12 , the first separate confinement heterostructure 13 and the second surface 112 of the first substrate 11 A, so as to achieve emitting laser form the back surface of the epitaxy structure W.

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US20070201527A1 (en) * 2006-02-28 2007-08-30 Canon Kabushiki Kaisha Vertical cavity surface emitting laser
US20100103972A1 (en) * 2007-03-23 2010-04-29 Sumitomo Electric Industries, Ltd. Photonic crystal laser and method of manufacturing photonic crystal laser

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US20100103972A1 (en) * 2007-03-23 2010-04-29 Sumitomo Electric Industries, Ltd. Photonic crystal laser and method of manufacturing photonic crystal laser

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