UA81965C2 - Integral thin-film module - Google Patents
Integral thin-film module Download PDFInfo
- Publication number
- UA81965C2 UA81965C2 UAA200601532A UAA200601532A UA81965C2 UA 81965 C2 UA81965 C2 UA 81965C2 UA A200601532 A UAA200601532 A UA A200601532A UA A200601532 A UAA200601532 A UA A200601532A UA 81965 C2 UA81965 C2 UA 81965C2
- Authority
- UA
- Ukraine
- Prior art keywords
- film
- amorphous
- silicon
- nanocrystalline
- laser
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract description 9
- 239000010408 film Substances 0.000 abstract description 59
- 239000000463 material Substances 0.000 abstract description 18
- 238000000034 method Methods 0.000 abstract description 16
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract description 14
- 230000008569 process Effects 0.000 abstract description 6
- 230000009466 transformation Effects 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 230000009467 reduction Effects 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 19
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 15
- 229910052782 aluminium Inorganic materials 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 229910021423 nanocrystalline silicon Inorganic materials 0.000 description 12
- 229920009441 perflouroethylene propylene Polymers 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 12
- 239000011521 glass Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 229910052727 yttrium Inorganic materials 0.000 description 7
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 238000001953 recrystallisation Methods 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000005275 alloying Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 210000001520 comb Anatomy 0.000 description 4
- 150000003376 silicon Chemical class 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 2
- 239000005041 Mylar™ Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
Интегральный тонкопленочный фотомодуль относится к области приборостроения. Интегральный тонкопленочный фотомодуль содержит прокладку с нанесенным слоем аморфного кремния i-типа проводимости, области, которые чередуются между собой, имея разный тип проводимости, разную величину легирования и ширину запрещенной зоны, просветленное покрытие на лицевой поверхности, омические контакты. При этом области, которые чередуются между собой, создают в первичной пленке аморфного кремния в виде встречных гребенок в горизонтальном направлении, а гетероструктурные области изготавливают с изменяемым соотношением кристаллической, микрокристаллической, нанокристаллической и аморфной фаз. Изобретение обеспечивает уменьшение количества технологическ�
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UAA200601532A UA81965C2 (en) | 2006-02-14 | 2006-02-14 | Integral thin-film module |
PCT/UA2006/000028 WO2007094747A1 (fr) | 2006-02-14 | 2006-05-22 | Module photographique intégré à film mince à passages verticaux électrons-trous |
US12/228,485 US20080308144A1 (en) | 2006-02-14 | 2008-08-13 | Integrated thin-layer photovoltaic module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UAA200601532A UA81965C2 (en) | 2006-02-14 | 2006-02-14 | Integral thin-film module |
Publications (1)
Publication Number | Publication Date |
---|---|
UA81965C2 true UA81965C2 (en) | 2008-02-25 |
Family
ID=38371828
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
UAA200601532A UA81965C2 (en) | 2006-02-14 | 2006-02-14 | Integral thin-film module |
Country Status (3)
Country | Link |
---|---|
US (1) | US20080308144A1 (ru) |
UA (1) | UA81965C2 (ru) |
WO (1) | WO2007094747A1 (ru) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20090065124A (ko) * | 2007-12-17 | 2009-06-22 | 한국전자통신연구원 | 실리콘 나노선을 이용한 바이오 센서 및 그 제조 방법 |
EP2438632A4 (en) * | 2009-06-03 | 2014-01-22 | First Solar Inc | PHOTOVOLTAIC MODULE WITH AUTOMATIC RESTORATION |
US8431815B2 (en) * | 2009-12-22 | 2013-04-30 | Los Alamos National Security, Llc | Photovoltaic device comprising compositionally graded intrinsic photoactive layer |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1825246A1 (ru) * | 1988-12-26 | 1995-04-10 | Институт энергетических проблем химической физики АН СССР | Приемник электромагнитного излучения |
US5677236A (en) * | 1995-02-24 | 1997-10-14 | Mitsui Toatsu Chemicals, Inc. | Process for forming a thin microcrystalline silicon semiconductor film |
US6506321B1 (en) * | 1997-10-24 | 2003-01-14 | Sumitomo Special Metals Co., Ltd. | Silicon based conductive material and process for production thereof |
JP3046965B1 (ja) * | 1999-02-26 | 2000-05-29 | 鐘淵化学工業株式会社 | 非晶質シリコン系薄膜光電変換装置の製造方法 |
JP2001177133A (ja) * | 1999-12-20 | 2001-06-29 | Kanegafuchi Chem Ind Co Ltd | ハイブリッド型薄膜光電変換装置の製造方法 |
UA67068A (en) * | 2003-06-25 | 2004-06-15 | Nat Tech Univ Kyiv Polytech | Method for producing a thin-film photoelectric converter with several vertical electron-hole junctions |
US20060130891A1 (en) * | 2004-10-29 | 2006-06-22 | Carlson David E | Back-contact photovoltaic cells |
-
2006
- 2006-02-14 UA UAA200601532A patent/UA81965C2/uk unknown
- 2006-05-22 WO PCT/UA2006/000028 patent/WO2007094747A1/ru active Application Filing
-
2008
- 2008-08-13 US US12/228,485 patent/US20080308144A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20080308144A1 (en) | 2008-12-18 |
WO2007094747A1 (fr) | 2007-08-23 |
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