UA7798A1 - Manufactirung method for microelectronic circuit - Google Patents

Manufactirung method for microelectronic circuit

Info

Publication number
UA7798A1
UA7798A1 UA4746093A UA4746093A UA7798A1 UA 7798 A1 UA7798 A1 UA 7798A1 UA 4746093 A UA4746093 A UA 4746093A UA 4746093 A UA4746093 A UA 4746093A UA 7798 A1 UA7798 A1 UA 7798A1
Authority
UA
Ukraine
Prior art keywords
emission
manufactirung
microelectronic circuit
laser
power density
Prior art date
Application number
UA4746093A
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Сергій Михайлович Ротнер
Сергей Михайлович Ротнер
Юрій Михайлович Ротнер
Юрий Михайлович Ротнер
Олександр Павлович Ряпосов
Александр Павлович Ряпосов
Original Assignee
Інженерний Центр "Алмаз" При Одеському Державному Університеті Ім. І.І. Мечнікова
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Інженерний Центр "Алмаз" При Одеському Державному Університеті Ім. І.І. Мечнікова filed Critical Інженерний Центр "Алмаз" При Одеському Державному Університеті Ім. І.І. Мечнікова
Priority to UA4746093A priority Critical patent/UA7798A1/en
Publication of UA7798A1 publication Critical patent/UA7798A1/en

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  • Laser Beam Processing (AREA)

Abstract

The manufacturing method includes forming conductor elements by means of a selective treatment with laser emission of the workpiece surface made of aluminum nitride. While forming conductor elements it is used a laser with emission wavelength = 1,06 μm and duration emission 2•10-6s and selective treatment of workpiece is made in two steps: at first with emission power density Q = 5•106-7•107W/cm2 and then with emission power density Q = 3•107- 6•107 W/cm2.
UA4746093A 1989-10-03 1989-10-03 Manufactirung method for microelectronic circuit UA7798A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UA4746093A UA7798A1 (en) 1989-10-03 1989-10-03 Manufactirung method for microelectronic circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UA4746093A UA7798A1 (en) 1989-10-03 1989-10-03 Manufactirung method for microelectronic circuit

Publications (1)

Publication Number Publication Date
UA7798A1 true UA7798A1 (en) 1995-12-26

Family

ID=74555211

Family Applications (1)

Application Number Title Priority Date Filing Date
UA4746093A UA7798A1 (en) 1989-10-03 1989-10-03 Manufactirung method for microelectronic circuit

Country Status (1)

Country Link
UA (1) UA7798A1 (en)

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