Днепропетровский Государственный Аграрный Университет
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Application filed by Дніпропетровський Державний Аграрний Університет, Днепропетровский Государственный Аграрный УниверситетfiledCriticalДніпропетровський Державний Аграрний Університет
Priority to UA98052723ApriorityCriticalpatent/UA30545A/en
Publication of UA30545ApublicationCriticalpatent/UA30545A/en
The invention relates to the formula of abrasive pastes designed for smooth finish and lapping metal surfaces and can be used in the process for treatment of metals. An abrasive paste contains abrasive and stearin. In addition, it contains oligourethaneacrylate and mineral oil.
Copper chemical-mechanical polishing process using a fixed abrasive polishing pad and a copper layer chemical-mechanical polishing solution specifically adapted for chemical-mechanical polishing with a fixed abrasive pad