UA11022C2 - DEVICE FOR ionic and plasma processing of articles - Google Patents

DEVICE FOR ionic and plasma processing of articles

Info

Publication number
UA11022C2
UA11022C2 UA93005755A UA93005755A UA11022C2 UA 11022 C2 UA11022 C2 UA 11022C2 UA 93005755 A UA93005755 A UA 93005755A UA 93005755 A UA93005755 A UA 93005755A UA 11022 C2 UA11022 C2 UA 11022C2
Authority
UA
Ukraine
Prior art keywords
ionic
articles
plasma processing
insulating bushing
vacuum
Prior art date
Application number
UA93005755A
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Володимир Олександрович Дудкін
Владимир Александрович Дудкин
Володимир Єгорович Пуха
Владимир Егорович Пуха
Олександр Степанович Вус
Александр Степанович Вус
Original Assignee
Володимир Олександрович Дудкін
Владимир Александрович Дудкин
Володимир Єгорович Пуха
Владимир Егорович Пуха
Олександр Степанович Вус
Александр Степанович Вус
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Володимир Олександрович Дудкін, Владимир Александрович Дудкин, Володимир Єгорович Пуха, Владимир Егорович Пуха, Олександр Степанович Вус, Александр Степанович Вус filed Critical Володимир Олександрович Дудкін
Priority to UA93005755A priority Critical patent/UA11022C2/en
Publication of UA11022C2 publication Critical patent/UA11022C2/en

Links

Abstract

The invention relates to the ionic and plasma engineering and can be used for the vacuum application of coatings on the articles from different materials, mainly on long components. The device contains two water-cooled electrodes, one of which has a cylindrical form and is introduced with one end through the insulating bushing from the vacuum chamber, the extinguishing device is located round the cylindrical electrode ftom the side of insulating bushing, the incendiary device is located at the opposite end of cylindrical electrode, and source of powerof vacuum arc.
UA93005755A 1993-09-03 1993-09-03 DEVICE FOR ionic and plasma processing of articles UA11022C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UA93005755A UA11022C2 (en) 1993-09-03 1993-09-03 DEVICE FOR ionic and plasma processing of articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UA93005755A UA11022C2 (en) 1993-09-03 1993-09-03 DEVICE FOR ionic and plasma processing of articles

Publications (1)

Publication Number Publication Date
UA11022C2 true UA11022C2 (en) 1996-12-25

Family

ID=74552497

Family Applications (1)

Application Number Title Priority Date Filing Date
UA93005755A UA11022C2 (en) 1993-09-03 1993-09-03 DEVICE FOR ionic and plasma processing of articles

Country Status (1)

Country Link
UA (1) UA11022C2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2548016C1 (en) * 2013-10-16 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Сибирский государственный аэрокосмический университет имени академика М.Ф. Решетнева" (СибГАУ) Device for ion treatment of internal surfaces of millimetre range products
RU2715392C2 (en) * 2015-10-19 2020-02-27 Сайноджи Гмбх Electrode system for plasma treatment with dielectric barrier

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2548016C1 (en) * 2013-10-16 2015-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Сибирский государственный аэрокосмический университет имени академика М.Ф. Решетнева" (СибГАУ) Device for ion treatment of internal surfaces of millimetre range products
RU2715392C2 (en) * 2015-10-19 2020-02-27 Сайноджи Гмбх Electrode system for plasma treatment with dielectric barrier
US10932351B2 (en) 2015-10-19 2021-02-23 Cinogy, Gmbh Electrode array for a dielectrically impeded plasma treatment

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