UA11022C2 - DEVICE FOR ionic and plasma processing of articles - Google Patents
DEVICE FOR ionic and plasma processing of articlesInfo
- Publication number
- UA11022C2 UA11022C2 UA93005755A UA93005755A UA11022C2 UA 11022 C2 UA11022 C2 UA 11022C2 UA 93005755 A UA93005755 A UA 93005755A UA 93005755 A UA93005755 A UA 93005755A UA 11022 C2 UA11022 C2 UA 11022C2
- Authority
- UA
- Ukraine
- Prior art keywords
- ionic
- articles
- plasma processing
- insulating bushing
- vacuum
- Prior art date
Links
Abstract
The invention relates to the ionic and plasma engineering and can be used for the vacuum application of coatings on the articles from different materials, mainly on long components. The device contains two water-cooled electrodes, one of which has a cylindrical form and is introduced with one end through the insulating bushing from the vacuum chamber, the extinguishing device is located round the cylindrical electrode ftom the side of insulating bushing, the incendiary device is located at the opposite end of cylindrical electrode, and source of powerof vacuum arc.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UA93005755A UA11022C2 (en) | 1993-09-03 | 1993-09-03 | DEVICE FOR ionic and plasma processing of articles |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UA93005755A UA11022C2 (en) | 1993-09-03 | 1993-09-03 | DEVICE FOR ionic and plasma processing of articles |
Publications (1)
Publication Number | Publication Date |
---|---|
UA11022C2 true UA11022C2 (en) | 1996-12-25 |
Family
ID=74552497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
UA93005755A UA11022C2 (en) | 1993-09-03 | 1993-09-03 | DEVICE FOR ionic and plasma processing of articles |
Country Status (1)
Country | Link |
---|---|
UA (1) | UA11022C2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2548016C1 (en) * | 2013-10-16 | 2015-04-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Сибирский государственный аэрокосмический университет имени академика М.Ф. Решетнева" (СибГАУ) | Device for ion treatment of internal surfaces of millimetre range products |
RU2715392C2 (en) * | 2015-10-19 | 2020-02-27 | Сайноджи Гмбх | Electrode system for plasma treatment with dielectric barrier |
-
1993
- 1993-09-03 UA UA93005755A patent/UA11022C2/en unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2548016C1 (en) * | 2013-10-16 | 2015-04-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Сибирский государственный аэрокосмический университет имени академика М.Ф. Решетнева" (СибГАУ) | Device for ion treatment of internal surfaces of millimetre range products |
RU2715392C2 (en) * | 2015-10-19 | 2020-02-27 | Сайноджи Гмбх | Electrode system for plasma treatment with dielectric barrier |
US10932351B2 (en) | 2015-10-19 | 2021-02-23 | Cinogy, Gmbh | Electrode array for a dielectrically impeded plasma treatment |
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