TWM631916U - Separate base for rotating disc of grinding machine - Google Patents

Abstract

A detachable base for a grinding machine rotating disk, a plurality of upper covers are arranged around a fixed seat on which the grinding machine rotating disk is fixed, wherein the lower surface of the first end of each upper cover is provided with a first connection structure, and the second end is provided with a first connection structure. There is a first fixing structure; the lower covers are respectively matched with the lower covers, and the first end of each lower cover is provided with a second connecting structure, and the second connecting structure and the first connecting structure are rotatably connected to each other or Separated from each other, the second end of each lower cover is provided with a second fixing structure, and the first fixing structure and the second fixing structure can be mutually fixed or unfixed.

Description

Separate base for grinding machine rotating disc

The present invention relates to the field of rotary disks for wafer grinding machines, particularly a grinding machine rotary disk base that can quickly separate the base for easy cleaning or replacement.

With the development of high integration of product components, high flatness of the wafer surface requires reliable wafer grinding. The wafer grinding machine is generally provided with a plurality of grinding heads under a machine table, and the grinding heads are used to grind the surface of the wafer placed below when the grinding heads are driven to rotate, so that the surface of the wafer can reach the required flatness. .

1 is a schematic diagram showing a partial structure of a conventional wafer lapping machine, wherein a base B is fixed to the lapping machine A from bottom to top with screws D under the lapping machine A, and a lapping head C is arranged under the base B, and the base The side of B also uses another screw D1 to fix the bracket E for installing the sensor to the bottom of the base B from bottom to top.

The grinding machine must be used with chemical liquid when grinding the wafer, so that the chemical liquid will be sprayed on the base B and the screws D, D1 and the recesses of the matching screws below it to cause adhesion and crystallization. In order to avoid adhesion or crystallization. The crystallized substances fall off during the grinding process and affect the grinding quality and yield. The wafer grinder must be removed from the base B for cleaning after a period of use. However, since the base B is fixed with screws D from bottom to top Therefore, it is very inconvenient to disassemble the base B, and it takes a lot of time; at the same time, the disassembly or installation of the bracket E must also be carried out from the bottom of the base B, and the operation is also inconvenient.

The purpose of the present invention is to provide a detachable base that can easily separate the base of the rotating disk of the wafer grinder for cleaning or replacement.

Another object of the present invention is to provide a detachable base for a rotary disk of a wafer grinder, which can prevent the sensor bracket mounted on the base from being attached and crystallized due to the splash of chemical liquid, so that it falls to the ground. On the polished wafer, the polishing quality and yield are affected.

The detachable base of the grinding machine rotating disk provided by this creation includes: a fixed seat, which is fixedly arranged on the grinding machine rotating disk; a plurality of upper covers are arranged on the circumference of the fixed seat, and each of the upper covers The surface is provided with a first connecting structure, and the second end of each upper cover is provided with a first fixing structure; and a plurality of lower covers are arranged under the upper covers in a matching manner, and the first end of each lower cover is provided with a A second connection structure, the second connection structure and the first connection structure can be rotatably connected to or separated from each other, a second fixing structure is provided at the second end of each of the lower covers, and the first fixing structure is connected to the second connection structure. The fixing structures can be mutually fixed or unfixed. With the detachable base of the present invention, when the base needs to be cleaned, the lower cover can be easily separated and removed from the upper cover, and after the cleaning is completed, the lower cover can be conveniently connected to the upper cover and fixed, which has high operation efficiency.

Preferably, the upper cover can be respectively provided with a first connecting structure on opposite sides of the lower surface of the first end thereof, and a second connecting structure can be respectively provided on the opposite sides of the first end of the lower cover. Thereby, a balanced operation can be obtained by connecting the lower cover and the upper cover through the first connection structure and the second connection structure.

Preferably, the first connection structure may have an extension rod protruding from the lower surface of the upper cover, and a rotating shaft connected to the end of the extension rod, the extension rod and the rotating shaft together form a T-shaped rod; and the The second connecting structure may have a sliding groove in which the extension rod can move, and a rotating shaft groove communicating with the sliding groove and allowing the rotating shaft to slide therein. The sliding groove and the rotating shaft groove together form a T-shaped groove . The first end of the lower cover and the first end of the upper cover can be slidably and rotatably matched to complete the connection, or separated, allowing the lower cover to be The cover is easily attached to the upper cover, or the lower cover can be detached from the upper cover.

Preferably, in the present invention, an accommodating space extending upward to a depth can be formed on the lower surface of the upper cover, and a through hole connected to the accommodating space is formed on the upper surface of the upper cover; There is a positioning block. After the positioning block is inserted into the accommodating space from bottom to top, a fixing element is used to fix the positioning block in the accommodating space through the through hole. Thereby, the T-bar can be easily attached to the upper cover.

Preferably, the first fixing structure may include a recess formed at the second end of the upper cover, and at least one screw hole is provided on the bottom surface of the recess; and the second fixing structure may include a recess formed at the bottom of the lower cover. A lug at the second end is provided with at least one hole corresponding to the at least one screw hole. Thereby, when the first end of the lower cover is connected to the first end of the upper cover, and the lower cover is rotated relative to the upper cover to abut against each other, the screw can be inserted through the hole from the side and locked into the screw hole to lock the The second end of the lower cover is fixed to the second end of the upper cover, so as to prevent the screw from being sprayed by chemical liquid during the grinding process.

Preferably, in the present invention, a plurality of first suction element elements can be arranged on the upper cover, and a plurality of second suction elements corresponding to the first suction element elements can be arranged on the lower cover. The first adsorption element and the second adsorption element are used to adsorb the lower cover to the upper cover.

In one embodiment of the present invention, the first adsorption element and the second adsorption element can be magnets with different magnetic properties, respectively.

In another embodiment of the present invention, the first adsorption element and the second adsorption element may be, one of them is a magnet, and the other is a metal with magnetic attraction properties.

In an embodiment of the present invention, a bracket for installing the sensor may be further included, the bracket is formed with a side plate, and the side plate is used to be fixed on the side of the upper cover. In this way, the screws used to fix the brackets can be prevented from being sprayed by chemical liquids during the grinding process.

The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary, only used to explain the present invention, and should not be construed as a limitation of the present invention.

In the description of the present invention, it should be noted that, unless otherwise expressly specified and limited, the terms "installation" and "connection" should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integrated connection. ground connection; either directly or indirectly through an intermediary. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.

As shown in FIG. 2A to FIG. 2C and FIG. 3 , the detachable base of the rotating disc of the grinding machine provided by the present invention is arranged around the fixed base 2 under the grinding machine 1 and a plurality of upper covers 22 are arranged. The lower surface of one end is provided with a first connecting structure 221, and the opposite second end is provided with a first fixing structure 222; the lower covers 23 are respectively matched under the upper covers 22, and the first end of each lower cover 23 is provided with There is a second connection structure 232, the second connection structure 232 and the first connection structure 221 can be connected to each other to rotate or be separated from each other, the second end of each lower cover 23 is provided with a second fixing structure 231, the first fixing structure 231 The structure 222 and the second fixing structure 231 can be fixed or released from each other. Therefore, when the lower cover 23 moves its first end to the first end below the upper cover 22 in an inclined state (as shown in FIG. 2A ), the first connection structure 221 can be further connected with the second connection structure 232 and Rotate the lower cover 23 upward relative to the upper cover 22 (as shown in FIG. 2B ) until the lower cover 23 and the upper cover 22 are in close contact, and then fix the first fixing structure 222 and the second fixing structure 231 to each other to complete the lower cover. 23 is assembled under the upper cover 22 (as shown in FIG. 2C ), or the first fixing structure 222 and the second fixing structure 231 can be released from the fixing, and the lower cover 23 can be rotated downward relative to the upper cover 22, and then the first connection The structure 221 and the second connecting structure 232 are separated from each other to remove the lower cover 23 so as to facilitate cleaning of the lower cover 23 . More preferably, a plurality of first adsorption elements 223 can be implanted in several positions inside the upper cover 22, and a plurality of second adsorption elements 233 can be implanted in several positions inside the lower cover 23, the first adsorption elements 223 and the The two adsorption elements 233 have the property of mutually adsorbing each other, so that when the lower cover 23 is abutted against the upper cover 22, the first adsorption element 223 and the second adsorption element 233 are used to adsorb each other to temporarily fix the lower cover 23 to the upper cover 22, and then the lower cover 23 is temporarily fixed to the upper cover 22. The first fixing structure 222 and the second fixing structure 231 are fixed to each other, or when the fixing is released, the lower cover 23 will not be suddenly separated from the upper cover 22 and fall off.

More specifically, the separate base of the grinding machine rotating disc of the present creation includes: a fixing base 21, a plurality of upper covers 22 and a plurality of lower covers 23; wherein, the fixing base 21 is used for being arranged on the rotating disc of the grinding machine. The lower seat body has a central hole 24 for installing the central axis of the grinding machine (not shown in the figure), and a plurality of upper covers 22 are arranged around the circumference of the fixed seat 21. For example, as shown in FIG. The upper covers 22 are arranged at an equal angle around the circumference, and a lower cover 23 is matched under each upper cover 22; when the upper cover 22 and the lower cover 23 are both arranged on the fixed seat 21, a grinding head mounting hole 25 is formed for installation and grinding. Grinding head for wafers.

The detailed structure of the upper cover 22 and the lower cover 23 and the assembly relationship between the two will be further described below. Since the structures of each of the upper cover 22 and the lower cover 23 arranged around the fixing base 21 are the same, only one of the upper cover 22 and the lower cover 23 is used. The structure of the lower cover 23 is further described, wherein FIG. 4 is a schematic diagram showing the rotation and separation of the lower cover 23 relative to the upper cover 22; FIG. 5 is a schematic diagram showing the structure of the upper cover 22; FIG. 7 is a schematic diagram showing the structure of the lower cover 23 ; and FIG. 8 is a partial enlarged view of the area “8” in FIG. 7 .

As shown in FIG. 4 to FIG. 6 , the lower surface of the first end of the upper cover 22 is provided with a first connecting structure 221 , and the opposite second end is provided with a first fixing structure 222 . Preferably, the first connecting structures 221 are symmetrically arranged on opposite sides of the lower surface of the first end of the upper cover 22 ; each of the first connecting structures 221 may have an extension rod protruding from the lower surface of the upper cover 22 . 2211, and a shaft 2212 connected to the end of the extension rod 2211. The central axes of the extension rod 2211 and the shaft 2212 are perpendicular to each other to form a T-shaped rod (as shown in FIG. 6).

Also as shown in FIG. 6 , in the way that the T-bar is arranged on the upper cover 22 , a accommodating space extending upward to a depth can be respectively formed on the lower surfaces of the opposite sides of the first end of the upper cover 22 , and the upper cover 22 A through hole 26 connected to the accommodating space is formed on the upper surface of the T-bar; a positioning block 220 can be formed on the upper end of the extension rod 2211, and the positioning block 220 is placed into the accommodating space from bottom to top, and then The positioning block 220 is fixed in the accommodating space by locking the positioning block 220 through the through hole 26 with a fixing element (such as a screw), so that the T-shaped rod is fixed to the upper cover 22 and only the extension rod 2211 and the rotating shaft 2212 are exposed. Thereby, the assembly between the T-bar and the upper cover 22 can be facilitated.

As shown in FIG. 4 , the first fixing structure 222 may include a concave portion 2221 formed at the second end of the upper cover 22 , and at least one screw hole 2222 is provided on the bottom surface of the concave portion 2221 . A nickel-plated magnet can be implanted inside the upper cover 22 as the first adsorption element 223, and then the surface of the upper cover 22 is sealed with a plastic plate to prevent the magnet from rusting. Similarly, a nickel-plated opposite magnetic magnet can be implanted inside the lower cover 23 corresponding to the position of the first adsorption element 223 of the upper cover 22 as the second adsorption element 233, and then the surface of the lower cover 23 is sealed with a plastic plate to avoid the magnet rust. Alternatively, one of the first adsorption element 223 and the second adsorption element 233 may be a magnet, and the other may be a metal with magnetic attraction properties.

As shown in FIG. 4 , FIG. 7 and FIG. 8 , the lower cover 23 is configured to be matched under the upper cover 22 , the first end of the lower cover 23 is provided with a second connection structure 232 , and the opposite second end is provided with a second connection structure 232 . There is a second fixing structure 231 . Preferably, the second connecting structures 232 are symmetrically arranged on opposite sides of the first end of the lower cover 23 . As shown in FIG. 7 and FIG. 8 , the second connecting structure 232 can be formed on the lower cover 23 by extending inward from the first end to form a T-shaped groove formed by the interconnected sliding groove 2321 and the rotating shaft groove 2322 . , wherein the width of the shaft slot 2322 is greater than the width of the chute 2321 for the shaft 2212 to slide along the shaft slot 2322 and the extension rod 2211 to slide along the chute 2321, and the shaft 2212 can rotate in the shaft slot 2322; When the T-shaped rod slides into the T-shaped groove, the connection between the first connection structure 221 and the second connection structure 232 is completed. In addition, preferably inclined surfaces 2313 with a suitable inclination angle are formed on the upper surfaces of the opposite sides of the chute 2321, so that the lower cover 23 can connect the second connection structure 232 and the first connection structure 221 to each other at an inclined angle.

As shown in FIG. 4 , the second fixing structure 231 disposed at the second end of the lower cover 23 may be a lug 2311 formed at the second end of the lower cover 23 , and a lug 2311 corresponding to the first fixing structure 222 is disposed on the lug 2311 . At least one hole 2312 of at least one screw hole 2222; wherein, the size of the lug 2311 is preferably matched with the concave portion 2221 of the first fixing structure 222, so that the lug 2311 can be fitly accommodated in the concave portion 2221.

The upper cover 22 is pre-fixedly arranged around the fixing base 21, and the lower cover 23 is assembled under the upper cover 22 in a detachable manner. Usually, the part of the base where the chemical liquid for grinding is sprayed is the part of the lower cover 23, Therefore, when cleaning the base, just remove the lower cover 23. The following describes the assembly and separation operations of the lower cover 23 and the upper cover 22:

As shown in FIGS. 2A to 2C , when the lower cover 23 is combined with the upper cover 22 , the first end of the lower cover 23 is moved to the first end below the upper cover 22 in an inclined state (as shown in FIG. 2A ) shown), and make the extension rod 2211 and the rotating shaft 2212 of the T-shaped rod of the first connecting structure 221 slide into the sliding groove 2321 and the rotating shaft groove 2322 of the second connecting structure 232 respectively (as shown in FIG. 2B ), and then put the lower cover 23 Rotate up until it is pressed against the upper cover 22, and make the lugs 2311 of the second fixing structure 231 enter the recesses 2221 of the first fixing structure 221. In this state, the first adsorption element 223 and the second adsorption element 233 are used. Adhere to each other to temporarily fix the lower cover 23 to the upper cover 22 to avoid falling off, and then lock the screws through the holes 2312 of the lugs 2311 into the screw holes 2222 at the bottom of the recess 2221 to complete the fixing of the lower cover 23 and the upper cover 22 (as shown in the figure). 2C). When the lower cover 23 is to be removed, the lower cover 23 can be rotated after the screws locked into the screw holes 2222 are reversely removed, so that the lugs 2311 are separated from the recesses 2221, and then the lower cover 23 is pulled to release the T-bar T-slot, and then remove the lower cover 23. Since the bottom of the lower cover 23 is completely free of screws or other fixing elements, it is possible to prevent the chemical liquid during the grinding process from splashing onto the screws or other fixing elements and the concave holes for matching the screws, etc., thereby avoiding adhering chemical substances or crystals. Dropping onto the polished wafer affects polishing quality and yield.

On the other hand, as shown in FIG. 9 , in the present invention, a bracket 3 for installing the sensor can also be provided on the side of the upper cover 22 to prevent the bracket 3 from being exposed under the lower cover 23 and being sprayed with chemical liquid. The bracket 3 is installed on the upper cover 22, and the bracket 3 can be integrally bent to form the side plate 31, and the side plate 31 is provided with a plurality of holes 311, and the side of the upper cover 23 is provided with a plurality of corresponding holes 311. Through the holes 311, the screws can be locked into the screw holes on the side of the upper cover 22, thereby preventing the screws used for fixing the bracket 3 from being sprayed by chemical liquid during the grinding process.

Although embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the present invention. The scope of the invention is defined by the scope of the patent application and its equivalents.

"This Creation" 1: Grinder 2: base 21: Fixed seat 22: upper cover 220: Positioning block 221: The first connection structure 2211: Extension rod 2212: Spindle 222: First fixed structure 2221: Recess 2222: screw hole 223: The first adsorption element 23: Lower cover 231: First fixed structure 2311: Lugs 2312: Hole 2313: Bevel 232: Second connection structure 2321: Chute 2322: Shaft slot 233: Second adsorption element 24: Center hole 25: Grinding head mounting hole 26: Through hole 3: Bracket 31: Side panels 311: Hole "Knowledge" A: Grinder B: base C: grinding head D, D1: screw E: bracket

1 is a schematic diagram showing a partial structure of a conventional wafer grinder; FIG. 2A is a schematic diagram showing that the split base of the present invention slides the first end of the lower cover to the first end of the upper cover; FIG. 2B is a schematic diagram showing the relative rotation after connecting the first end of the lower cover and the first end of the upper cover according to the present invention; FIG. 2C is a schematic diagram showing the present invention after the lower cover is rotated to abut against the upper cover; FIG. 3 is a schematic view showing the appearance of the detachable base structure of the present invention; FIG. 4 is a schematic diagram showing the rotation and separation of the lower cover of the detachable base of the present invention relative to the upper cover; FIG. 5 is a schematic diagram showing the upper cover structure of the detachable base of the present invention; Fig. 6 is a partial enlarged view of the "6" area of Fig. 5; FIG. 7 is a schematic diagram showing the structure of the lower cover of the detachable base of the present invention; Fig. 8 is a partial enlarged view of the area "8" in Fig. 7; and FIG. 9 is a partial schematic diagram showing the installation of the bracket on the side of the upper cover of the base of the present invention.

22: upper cover

221: The first connection structure

222: First fixed structure

2221: Recess

2222: screw hole

223: The first adsorption element

23: Lower cover

231: First fixed structure

2311: Lugs

2312: Hole

232: Second connection structure

Claims (10)

A detachable base for a rotary disc of a grinding machine, comprising: a fixed seat, fixedly arranged on the rotating plate of the grinding machine; A plurality of upper covers are arranged on the circumference of the fixed seat, the lower surface of the first end of each of the upper covers is provided with a first connecting structure, and the second end of each of the upper covers is provided with a first fixing structure; and A plurality of lower covers are arranged below the upper covers in a matched manner, and the first end of each of the lower covers is provided with a second connection structure, and the second connection structure and the first connection structure can be rotatably connected to or separated from each other , the second end of each lower cover is provided with a second fixing structure, and the first fixing structure and the second fixing structure can be mutually fixed or unfixed. The detachable base for a rotary disc of a grinder according to claim 1, wherein the first connecting structure is respectively provided on the opposite sides of the lower surface of the first end of the upper cover, and the first connecting structure of the first end of the lower cover is The second connection structures are respectively provided on opposite sides. The detachable base of the grinding machine rotating disc of claim 2, wherein, The first connecting structure has an extension rod protruding from the lower surface of the upper cover, and a rotating shaft connected to the end of the extension rod, the extension rod and the rotating shaft together form a T-shaped rod; and The second connecting structure has a sliding slot in which the extension rod can move, and a rotating shaft slot communicating with the sliding slot and allowing the rotating shaft to slide therein. The sliding slot and the rotating shaft slot together form a T-shaped slot . The detachable base of the rotary disk of a grinding machine according to claim 3, wherein the upper surfaces of the opposite sides of the chute are formed with an inclined surface. The detachable base of the grinding machine rotating disc of claim 3, wherein, An accommodating space extending upward to a depth is formed on the lower surface of the upper cover, and a through hole is formed on the upper surface of the upper cover which communicates with the accommodating space; and The upper end of the extension rod is provided with a positioning block. After the positioning block is inserted into the accommodating space from bottom to top, a fixing element is used to fix the positioning block in the accommodating space through the through hole. The detachable base of the grinding machine rotating disc of claim 3, wherein, The first fixing structure includes a recess formed at the second end of the upper cover, and at least one screw hole is provided on the bottom surface of the recess; and The second fixing structure includes a lug formed on the second end of the lower cover, and the lug is provided with at least one hole corresponding to the at least one screw hole, and a screw is respectively passed through the hole to be locked into the screw holes. The detachable base of the rotary disk of a grinding machine as claimed in claim 1, wherein the upper cover is provided with a plurality of first suction element elements, and the lower cover is provided with a plurality of second suction elements corresponding to the first suction element elements When the lower cover is abutted against the upper cover, the lower cover is adsorbed to the upper cover by the first adsorption element and the second adsorption element. The detachable base of the rotary disk of a grinding machine as claimed in claim 7, wherein the first adsorption element and the second adsorption element are magnets with different magnetic properties, respectively. The detachable base of the rotary disk of a grinding machine as claimed in claim 7, wherein one of the first adsorption element and the second adsorption element is a magnet, and the other is a metal with magnetic attraction properties. The detachable base of the grinding machine rotating disk according to claim 1, further comprising a bracket for installing the sensor, the bracket is formed with a side plate, and the side plate is used for fixing the side of the upper cover.

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