TWM626067U - Conductive crucible high-temperature evaporator heated by plasma transferred arc - Google Patents

Conductive crucible high-temperature evaporator heated by plasma transferred arc Download PDF

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TWM626067U
TWM626067U TW110215334U TW110215334U TWM626067U TW M626067 U TWM626067 U TW M626067U TW 110215334 U TW110215334 U TW 110215334U TW 110215334 U TW110215334 U TW 110215334U TW M626067 U TWM626067 U TW M626067U
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crucible
conductive
transfer arc
temperature evaporator
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TW110215334U
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趙登永
彭家斌
余善海
潘經珊
張仁東
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大陸商江蘇博遷新材料股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D1/00Evaporating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D1/00Evaporating
    • B01D1/14Evaporating with heated gases or vapours or liquids in contact with the liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D1/00Evaporating
    • B01D1/30Accessories for evaporators ; Constructional details thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Plasma Technology (AREA)

Abstract

本創作公開了一種使用電漿轉移弧加熱的導電坩堝高溫蒸發器,包括殼體、導電坩堝、轉移弧槍和電源,導電坩堝包括坩堝本體和坩堝蓋,坩堝本體的底壁內設置有進氣腔,進氣腔的一側通過若干個載流氣輸入預熱通道與坩堝本體的內腔連通,進氣腔的另一側連接的若干個導氣通道端部均延伸至殼體的外側,坩堝本體的底部與殼體的底部之間連接有導電棒,轉移弧槍安裝於殼體上方且其下端延伸至坩堝蓋內側。本創作結構簡單,內部加熱溫度高,適合於沸點高的材料製備成粉體時使用。This creation discloses a conductive crucible high-temperature evaporator heated by a plasma transfer arc, which includes a casing, a conductive crucible, a transfer arc gun and a power source. The conductive crucible includes a crucible body and a crucible cover. The bottom wall of the crucible body is provided with an air inlet. one side of the air inlet cavity is communicated with the inner cavity of the crucible body through several carrier gas input preheating channels, and the ends of several air guide channels connected to the other side of the air inlet cavity all extend to the outside of the shell. A conductive rod is connected between the bottom of the main body and the bottom of the shell, and the transfer arc gun is installed above the shell and its lower end extends to the inside of the crucible cover. The invention has simple structure and high internal heating temperature, and is suitable for preparing powder from materials with high boiling point.

Description

使用電漿轉移弧加熱的導電坩堝高溫蒸發器Conductive Crucible High Temperature Evaporator Using Plasma Transfer Arc Heating

本創作涉及高溫蒸發器領域,具體涉及一種使用電漿轉移弧加熱的導電坩堝高溫蒸發器。This creation relates to the field of high-temperature evaporators, in particular to a conductive crucible high-temperature evaporator heated by a plasma transfer arc.

在使用蒸發冷凝氣相法製備各種粉體時,需要用到高溫蒸發器。現有的高溫蒸發器多採用電加熱,如中頻加熱、電阻加熱和電漿電弧加熱等,或幾種加熱方法配合使用,某些特殊領域還會採用雷射加熱。而不同的加熱方法對高溫蒸發器的結構有不同的要求。例如,中頻加熱需要坩堝或坩堝內的被加熱體導電,並且加熱結構在坩堝的外側環繞安裝。又例如,電阻加熱需要自身結構耐溫性能較好,加熱結構可以在坩堝底部或周邊安裝,也可以在坩堝頂部安裝插入被加熱體的加熱結構以實現接觸加熱。再例如,電漿電弧加熱需要將在電極間產生的電漿電弧自高溫蒸發器的上方向下噴射,在電漿弧下方設置被加熱體。電漿非轉移弧高溫蒸發器的結構相對簡單,可以不需要坩堝而直接向弧中間噴射原料,原料在經過電漿非轉移弧時被加熱,但輸入能量相對較小。而電漿轉移弧需要兩個相間隔的電極,電漿轉移弧槍為陰極,被加熱體為陽極,此種加熱結構的優點是加熱能量高,高溫蒸發器內部的溫度高,特別適合於沸點高的材料製備成粉體時使用,但是結構較為複雜。When preparing various powders by the vapor-condensation gas-phase method, a high-temperature evaporator is required. The existing high-temperature evaporators mostly use electric heating, such as intermediate frequency heating, resistance heating and plasma arc heating, etc., or several heating methods are used in combination, and laser heating is also used in some special fields. Different heating methods have different requirements on the structure of the high temperature evaporator. For example, intermediate frequency heating requires the crucible or the heated body in the crucible to conduct electricity, and the heating structure is installed around the outside of the crucible. For another example, resistance heating requires good temperature resistance of its own structure. The heating structure can be installed at the bottom or the periphery of the crucible, or a heating structure inserted into the heated body can be installed at the top of the crucible to realize contact heating. For another example, in plasma arc heating, the plasma arc generated between the electrodes needs to be sprayed downward from above the high-temperature evaporator, and the object to be heated is arranged below the plasma arc. The structure of the plasma non-transferred arc high temperature evaporator is relatively simple, and the raw material can be directly sprayed into the middle of the arc without the need for a crucible. The raw material is heated when passing through the plasma non-transferred arc, but the input energy is relatively small. The plasma transfer arc requires two electrodes spaced apart, the plasma transfer arc gun is the cathode, and the heated body is the anode. The advantages of this heating structure are high heating energy and high temperature inside the high-temperature evaporator, especially suitable for boiling point. It is used when the high material is prepared into powder, but the structure is more complicated.

本創作針對背景技術中的不足,提供了一種結構簡單且適合於沸點高的材料製備成粉體時用的使用電漿轉移弧加熱的導電坩堝高溫蒸發器。In view of the deficiencies in the background technology, the present invention provides a conductive crucible high-temperature evaporator with a simple structure and suitable for preparing powder from a material with a high boiling point, which is heated by a plasma transfer arc.

為實現上述目的,本創作技術解決方案如下:In order to achieve the above purpose, the technical solution of this creation is as follows:

一種使用電漿轉移弧加熱的導電坩堝高溫蒸發器,包括殼體、導電坩堝、轉移弧槍和電源,所述導電坩堝設置於殼體的內腔中,所述導電坩堝包括坩堝本體和安裝於坩堝本體上方的坩堝蓋,所述坩堝本體的底壁內設置有進氣腔,進氣腔的一側通過若干個載流氣輸入預熱通道與坩堝本體內腔連通,進氣腔的另一側連接有若干個導氣通道,若干個導氣通道的端部均延伸至殼體的外側,坩堝本體的底部與殼體的底部之間連接有導電棒,所述轉移弧槍安裝於殼體上方且轉移弧槍的下端延伸至坩堝蓋的內側,轉移弧槍和導電棒分別與電源電性連接。A conductive crucible high-temperature evaporator heated by plasma transfer arc includes a shell, a conductive crucible, a transfer arc gun and a power source, the conductive crucible is arranged in the inner cavity of the shell, and the conductive crucible includes a crucible body and a The crucible cover above the crucible body is provided with an air inlet cavity in the bottom wall of the crucible body. Several air guide channels are connected, the ends of the several air guide channels all extend to the outside of the casing, a conductive rod is connected between the bottom of the crucible body and the bottom of the casing, and the transfer arc gun is installed above the casing And the lower end of the transfer arc gun extends to the inner side of the crucible cover, and the transfer arc gun and the conductive rod are respectively electrically connected with the power source.

可選的,所述殼體包括設置於坩堝本體外側的下桶體和設置於坩堝蓋外側的上蓋,上蓋安裝於下桶體的上端,下桶體與坩堝本體之間、上蓋與坩堝蓋之間均設置有保溫層。保溫層可採用耐高溫的氈類材料或陶瓷材料。Optionally, the casing includes a lower barrel disposed outside the crucible body and an upper cover disposed outside the crucible cover, the upper cover is mounted on the upper end of the lower barrel, between the lower barrel and the crucible body, and between the upper cover and the crucible cover. All rooms are provided with insulation layers. The thermal insulation layer can be made of high temperature resistant felt material or ceramic material.

可選的,所述下桶體和上蓋均設置有夾套結構,夾套結構與設置在殼體外側的體外循環冷卻液系統連接。Optionally, both the lower barrel body and the upper cover are provided with a jacket structure, and the jacket structure is connected to an extracorporeal circulation cooling liquid system arranged outside the casing.

可選的,所述導電坩堝的材質為金屬或石墨等耐高溫導電材料。Optionally, the material of the conductive crucible is a high temperature resistant conductive material such as metal or graphite.

可選的,所述坩堝本體的內腔為上大下小的內凹狀結構,坩堝蓋的內腔為下大上小的圓拱狀或錐台狀結構。Optionally, the inner cavity of the crucible body is a concave structure with a large upper and a small lower, and the inner cavity of the crucible cover is a dome-shaped or frustum-shaped structure with a large lower and a smaller upper.

可選的,所述轉移弧槍與坩堝蓋之間、轉移弧槍與殼體之間均設置有絕緣通氣間隙,絕緣通氣間隙的寬度為5-50mm。Optionally, insulating ventilation gaps are provided between the transfer arc gun and the crucible cover and between the transfer arc gun and the housing, and the width of the insulating ventilation gap is 5-50 mm.

可選的,所述殼體的上端還設置有加料通道、出氣回液通道及若干個用於檢測觀查的觀測口,加料通道、出氣回液通道及觀測口延伸至坩堝蓋的內側。Optionally, the upper end of the casing is further provided with a feeding channel, a gas outlet and liquid return channel, and several observation ports for inspection and observation.

可選的,所述轉移弧槍的噴嘴底端面位於距離坩堝本體的上端面的-150mm ~+150mm處。Optionally, the bottom end face of the nozzle of the transfer arc gun is located at a distance of -150mm to +150mm from the upper end face of the crucible body.

可選的,所述進氣腔的形狀為圓環狀或扇環狀,且導氣通道的數量為1-18個。Optionally, the shape of the air inlet cavity is a circular ring or a fan ring, and the number of air guide channels is 1-18.

可選的,若干個所述載流氣輸入預熱通道呈扇環形分佈於坩堝本體的側壁上,且載流氣輸入預熱通道與坩堝本體的內腔的連通處的載流氣入口連通,載流氣入口的高度為5-50mm。Optionally, a plurality of the carrier gas input preheating channels are distributed on the side wall of the crucible body in a fan ring shape, and the carrier gas input preheating channels are communicated with the carrier gas inlet at the connection point of the inner cavity of the crucible body, and the carrier gas inlet is connected. The height is 5-50mm.

相對於現有技術,本創作有益效果如下:Compared with the prior art, the beneficial effects of this creation are as follows:

本創作結構簡單,設計合理;且內部加熱溫度高,適合於沸點高的材料製備成粉體時使用,具有廣闊的市場前景。The invention is simple in structure and reasonable in design; and has a high internal heating temperature, which is suitable for preparing powders from materials with high boiling points, and has broad market prospects.

下面將結合本創作實施例中的附圖,對本創作實施例中的技術方案進行清楚、完整地描述,顯然,所描述的實施例僅僅是本創作一部分實施例,而不是全部的實施例。The technical solutions in the creative embodiment will be clearly and completely described below with reference to the accompanying drawings in the creative embodiment. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments.

在本創作的描述中,需要理解的是,術語「中」、「上」、「下」、「前」、「後」、「左」、「右」、「垂直」、「水平」、「頂」、「底」 「內」、「外」等指示的方位或位置關係為基於附圖所示的方位或位置關係,僅是為了便於描述本創作和簡化描述,而不是指示或暗示所指的裝置或元件必須具有特定的方位、以特定的方位構造和操作,因此不能理解為對本創作的限制。In the description of this creation, it is to be understood that the terms "middle", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", " The orientation or positional relationship indicated by top, bottom, inside, and outside is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the creation and simplifying the description, rather than indicating or implying that The device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present invention.

在本創作中,除非另有明確的規定和限定,術語「設置」、「安裝」、「相連」、「連接」、 「固定」等術語應做廣義理解,例如,可以是固定連接,也可以是可拆卸連接;可以是機械連接;可以是直接相連,也可以通過中間媒介間接相連。對於本領域的普通技術人員而言,可以根據具體情況理解上述術語在本創作中的具體含義。In this creation, unless otherwise expressly specified and limited, terms such as "setting", "installation", "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it may be a fixed connection or It is a detachable connection; it can be a mechanical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present creation can be understood according to specific situations.

如圖1所示,一種使用電漿轉移弧加熱的導電坩堝高溫蒸發器,包括殼體、導電坩堝、轉移弧槍5和電源6。導電坩堝設置於殼體的內腔中。導電坩堝的材質為金屬或石墨等耐高溫導電材料,在高溫下不與被加熱物產生物理或化學反應。殼體由設置於坩堝本體3外側的下桶體1和設置於坩堝蓋4外側的上蓋2組成。上蓋2安裝於下桶體1的上端,下桶體1與坩堝本體3之間、上蓋2與坩堝蓋4之間均設置有保溫層12,保溫層12採用耐高溫的氈類材料或陶瓷材料。下桶體1和上蓋2均設置有夾套結構16,夾套結構16與設置在殼體外側的體外循環冷卻液系統7連接,利用循環冷卻液進行冷卻以保護設備。導電坩堝由坩堝本體3和安裝於坩堝本體3上方的坩堝蓋4組成。坩堝本體3的內腔為上大下小的內凹狀結構,坩堝蓋4的內腔為下大上小的圓拱狀或錐台狀結構。坩堝本體3的底壁內設置有進氣腔8,進氣腔8的一側通過若干個載流氣輸入預熱通道9與坩堝本體3的內腔連通。若干個載流氣輸入預熱通道9呈扇環形分佈於坩堝本體3的側壁上,且載流氣輸入預熱通道9與坩堝本體3的內腔的連通處的載流氣入口20連通,載流氣入口20高度為5-50mm。進氣腔8的另一側連接有若干個導氣通道10,若干個導氣通道10的端部均延伸至殼體外側。進氣腔8的形狀為圓環狀或扇環狀,且與進氣腔8連通的導氣通道10的數量為1-18個。坩堝本體3的底部與殼體的底部之間連接有導電棒11。轉移弧槍5安裝於殼體的上方,且轉移弧槍5的下端延伸至坩堝蓋4的內側。轉移弧槍5的噴嘴底端面位於距離坩堝本體3的上端面的-150mm ~+150mm處。轉移弧槍5和導電棒11分別與電源6電性連接。As shown in FIG. 1 , a conductive crucible high-temperature evaporator heated by a plasma transfer arc includes a casing, a conductive crucible, a transfer arc gun 5 and a power source 6 . The conductive crucible is arranged in the inner cavity of the housing. The material of the conductive crucible is a high-temperature conductive material such as metal or graphite, which does not have a physical or chemical reaction with the heated object at high temperature. The casing is composed of a lower barrel 1 arranged outside the crucible body 3 and an upper cover 2 arranged outside the crucible cover 4 . The upper cover 2 is installed on the upper end of the lower barrel 1, and a thermal insulation layer 12 is provided between the lower barrel 1 and the crucible body 3, and between the upper cover 2 and the crucible cover 4, and the thermal insulation layer 12 is made of high-temperature resistant felt materials or ceramic materials. . Both the lower barrel 1 and the upper cover 2 are provided with a jacket structure 16, which is connected to an extracorporeal circulating cooling liquid system 7 arranged outside the casing, and is cooled by circulating cooling liquid to protect the equipment. The conductive crucible is composed of a crucible body 3 and a crucible cover 4 installed above the crucible body 3 . The inner cavity of the crucible body 3 is a concave structure with a large upper and a small lower, and the inner cavity of the crucible cover 4 is a dome-shaped or frustum-shaped structure with a large lower and a small upper. The bottom wall of the crucible body 3 is provided with an air inlet cavity 8 , and one side of the air inlet cavity 8 is communicated with the inner cavity of the crucible body 3 through a plurality of carrier gas input preheating channels 9 . A plurality of carrier gas input preheating channels 9 are distributed on the side wall of the crucible body 3 in a fan ring shape, and the carrier gas input preheating channels 9 are communicated with the carrier gas inlet 20 at the connection point of the inner cavity of the crucible body 3, and the carrier gas inlet 20 The height is 5-50mm. The other side of the air inlet cavity 8 is connected with several air guide passages 10 , and the ends of the several air guide passages 10 all extend to the outside of the casing. The shape of the air inlet cavity 8 is annular or fan-shaped, and the number of the air guide passages 10 communicating with the air inlet cavity 8 is 1-18. A conductive rod 11 is connected between the bottom of the crucible body 3 and the bottom of the casing. The transfer arc gun 5 is installed above the casing, and the lower end of the transfer arc gun 5 extends to the inner side of the crucible cover 4 . The bottom end face of the nozzle of the transfer arc gun 5 is located at a distance of -150mm to +150mm from the upper end face of the crucible body 3 . The transfer arc gun 5 and the conductive rod 11 are respectively electrically connected to the power source 6 .

轉移弧槍5與坩堝蓋4之間、轉移弧槍5與殼體之間均設置有絕緣通氣間隙13,絕緣通氣間隙13的寬度為5-50mm。殼體的上蓋2上還設置有加料通道14、出氣回液通道15及若干個用於檢測觀查的觀測口(圖中未示出)。加料通道14、出氣回液通道15及觀測口延伸至坩堝蓋4的內側。加料通道14與用於供料的體外加料系統17連接。觀測口可用於安裝視鏡或安裝檢測探頭。Between the transfer arc gun 5 and the crucible cover 4, and between the transfer arc gun 5 and the casing, an insulating ventilation gap 13 is provided, and the width of the insulating ventilation gap 13 is 5-50 mm. The upper cover 2 of the casing is also provided with a feeding channel 14 , a gas outlet and liquid return channel 15 and several observation ports (not shown in the figure) for inspection and observation. The feeding channel 14 , the gas outlet and liquid return channel 15 and the observation port extend to the inner side of the crucible cover 4 . The feeding channel 14 is connected to an extracorporeal feeding system 17 for feeding. The viewing port can be used to install sight glasses or to install inspection probes.

本創作使用轉移弧槍5,從高溫蒸發器頂部向下伸入高溫蒸發器的內部的坩堝蓋4內,置於坩堝本體3內的被加熱體的上方。轉移弧槍5為陰極,被加熱體19為陽極,在陰極與陽極之間通過電漿氣電弧18導通,以對作為陽極的被加熱體19持續大功率加熱。被加熱體19置於耐高溫的導電坩堝內,坩堝本體3的底部設置的導電棒11與高溫蒸發器外的電源6連通並與陰極形成導電迴路。上蓋2與下桶體1之間為密封連接,上蓋2或下桶體1與其他結構之間的連接均為密封連接,以保證高溫蒸發器內與高溫蒸發器外的大氣間隔。載流氣轉移弧槍使用的電漿氣、轉移弧槍5與上蓋2之間的絕緣通氣間隙13中流通的氣體及其他進入高溫蒸發器的氣體均為惰性且不與被加熱體19產生化學反應的氣體,或主氣源為惰性氣體添加少量用於反應成份。In this invention, a transfer arc gun 5 is used, which extends downward from the top of the high-temperature evaporator into the crucible cover 4 inside the high-temperature evaporator, and is placed above the heated body in the crucible body 3 . The transferred arc gun 5 is the cathode, the heated body 19 is the anode, and the plasma gas arc 18 conducts between the cathode and the anode to continuously heat the heated body 19 as the anode with high power. The heated body 19 is placed in a high-temperature-resistant conductive crucible, and the conductive rod 11 provided at the bottom of the crucible body 3 communicates with the power source 6 outside the high-temperature evaporator and forms a conductive loop with the cathode. The upper cover 2 and the lower barrel 1 are in a sealed connection, and the connections between the upper cover 2 or the lower barrel 1 and other structures are all sealed connections to ensure the air gap between the high temperature evaporator and the outside of the high temperature evaporator. The plasma gas used in the carrier gas transfer arc gun, the gas circulating in the insulating ventilation gap 13 between the transfer arc gun 5 and the upper cover 2 and other gases entering the high temperature evaporator are all inert and do not chemically react with the heated body 19 gas, or the main gas source is an inert gas with a small amount of reactive components added.

以上顯示和描述了本創作的基本原理和主要特徵和本創作的優點,對於本領域技術人員而言,顯然本創作不限於上述示範性實施例的細節,而且在不背離本創作的精神或基本特徵的情況下,能夠以其他的具體形式實現本創作。因此,無論從哪一點來看,均應將實施例看作是示範性的,而且是非限制性的,本創作的範圍由所附請求項而不是上述說明限定,因此旨在將落在請求項的等同要件的含義和範圍內的所有變化囊括在本創作內。The above shows and describes the basic principles and main features of the present creation and the advantages of the present creation. For those skilled in the art, it is obvious that the present creation is not limited to the details of the above-mentioned exemplary embodiments, and does not deviate from the spirit or basic of the present creation. In the case of the feature, the present invention can be realized in other specific forms. Therefore, the embodiments are to be regarded in all respects as exemplary and not restrictive, and the scope of the present invention is defined by the appended claims rather than the foregoing description, and is therefore intended to fall within the scope of the claims. All changes within the meaning and scope of the equivalents of , are included in this creation.

1:下桶體 2:上蓋 3:坩堝本體 4:坩堝蓋 5:轉移弧槍 6:電源 7:體外循環冷卻液系統 8:進氣腔 9:載流氣輸入預熱通道 10:導氣通道 11:導電棒 12:保溫層 13:絕緣通氣間隙 14:加料通道 15:出氣回液通道 16:夾套結構 17:體外加料系統 18:轉移電漿電弧 19:被加熱體 20:載流氣入口 1: Lower barrel 2: upper cover 3: Crucible body 4: Crucible cover 5: Transfer arc gun 6: Power 7: Extracorporeal circulation coolant system 8: Intake chamber 9: Carrier gas input preheating channel 10: Air guide channel 11: Conductive rod 12: Insulation layer 13: Insulation ventilation gap 14: Feeding channel 15: Air outlet and liquid return channel 16: Jacket structure 17: In vitro feeding system 18: Transfer Plasma Arc 19: heated body 20: Carrier gas inlet

通過閱讀參照以下附圖對非限制性實施例所作的詳細描述,本創作的其它特徵、目的和優點將會變得更明顯。Other features, objects and advantages of the present invention will become more apparent upon reading the detailed description of the non-limiting embodiments with reference to the following drawings.

圖1為本創作實施例的剖視結構示意圖。FIG. 1 is a schematic cross-sectional structure diagram of an embodiment of the invention.

1:下桶體 1: Lower barrel

2:上蓋 2: upper cover

3:坩堝本體 3: Crucible body

4:坩堝蓋 4: Crucible cover

5:轉移弧槍 5: Transfer arc gun

6:電源 6: Power

7:體外循環冷卻液系統 7: Extracorporeal circulation coolant system

8:進氣腔 8: Intake chamber

9:載流氣輸入預熱通道 9: Carrier gas input preheating channel

10:導氣通道 10: Air guide channel

11:導電棒 11: Conductive rod

12:保溫層 12: Insulation layer

13:絕緣通氣間隙 13: Insulation ventilation gap

14:加料通道 14: Feeding channel

15:出氣回液通道 15: Air outlet and liquid return channel

16:夾套結構 16: Jacket structure

17:體外加料系統 17: In vitro feeding system

18:轉移電漿電弧 18: Transfer Plasma Arc

19:被加熱體 19: heated body

20:載流氣入口 20: Carrier gas inlet

Claims (10)

一種使用電漿轉移弧加熱的導電坩堝高溫蒸發器,其包括一殼體、一導電坩堝、一轉移弧槍和一電源;該導電坩堝設置於該殼體的內腔中,且該導電坩堝包括一坩堝本體和安裝於該坩堝本體上方的一坩堝蓋;該坩堝本體的底壁內設置有一進氣腔,該進氣腔的一側通過複數載流氣輸入預熱通道並與該坩堝本體的內腔連通,而該進氣腔的另一側連接有複數導氣通道,且該複數導氣通道的端部均延伸至該殼體的外側;該坩堝本體的底部與該殼體的底部之間連接有一導電棒;該轉移弧槍安裝於該殼體上方且該轉移弧槍的下端延伸至該坩堝蓋的內側;該轉移弧槍和該導電棒分別與該電源電性連接。A conductive crucible high-temperature evaporator heated by plasma transfer arc includes a shell, a conductive crucible, a transfer arc gun and a power source; the conductive crucible is arranged in the inner cavity of the shell, and the conductive crucible includes A crucible body and a crucible cover installed above the crucible body; an air inlet cavity is set in the bottom wall of the crucible body, and one side of the air inlet cavity is fed into the preheating channel through a plurality of carrier gases and is connected with the inner part of the crucible body The other side of the air inlet cavity is connected with a plurality of air guide channels, and the ends of the plurality of air guide channels all extend to the outside of the shell; between the bottom of the crucible body and the bottom of the shell A conductive rod is connected; the transfer arc gun is installed above the shell and the lower end of the transfer arc gun extends to the inner side of the crucible cover; the transfer arc gun and the conductive rod are respectively electrically connected with the power supply. 如請求項1所述之使用電漿轉移弧加熱的導電坩堝高溫蒸發器,其中該殼體包括設置於該坩堝本體外側的一下桶體和設置於該坩堝蓋外側的一上蓋;該上蓋安裝於該下桶體的上端,而該下桶體與該坩堝本體之間,以及該上蓋與該坩堝蓋之間均設置有一保溫層。The conductive crucible high-temperature evaporator using plasma transfer arc heating according to claim 1, wherein the casing comprises a lower barrel disposed outside the crucible body and an upper cover disposed outside the crucible cover; the upper cover is installed on the The upper end of the lower barrel, between the lower barrel and the crucible body, and between the upper cover and the crucible cover are provided with a thermal insulation layer. 如請求項2所述之使用電漿轉移弧加熱的導電坩堝高溫蒸發器,其中該下桶體和該上蓋均設置有一夾套結構,該夾套結構與設置在該殼體外側的一體外循環冷卻液系統連接。The conductive crucible high-temperature evaporator using plasma transfer arc heating as claimed in claim 2, wherein the lower barrel body and the upper cover are both provided with a jacket structure, and the jacket structure is provided with an external circuit outside the shell. Coolant system connection. 如請求項1所述之使用電漿轉移弧加熱的導電坩堝高溫蒸發器,其中該導電坩堝的材質為金屬或石墨耐高溫導電材料。The conductive crucible high-temperature evaporator using plasma transfer arc heating according to claim 1, wherein the conductive crucible is made of metal or graphite high-temperature-resistant conductive material. 如請求項1所述之使用電漿轉移弧加熱的導電坩堝高溫蒸發器,其中該坩堝本體的內腔為上大下小的內凹狀結構,且該坩堝蓋的內腔為下大上小的圓拱狀或錐台狀結構。The conductive crucible high-temperature evaporator using plasma transfer arc heating according to claim 1, wherein the inner cavity of the crucible body is a concave structure with a large upper and a small lower, and the inner cavity of the crucible cover is large at the bottom and small at the top dome-shaped or frustum-shaped structure. 如請求項1所述之使用電漿轉移弧加熱的導電坩堝高溫蒸發器,中該轉移弧槍與該坩堝蓋之間,以及該轉移弧槍與該殼體之間均設置有一絕緣通氣間隙,該絕緣通氣間隙的寬度為5-50mm。The conductive crucible high-temperature evaporator using plasma transfer arc heating according to claim 1, wherein an insulating ventilation gap is provided between the transfer arc gun and the crucible cover, and between the transfer arc gun and the shell, The width of the insulating ventilation gap is 5-50mm. 如請求項1所述之使用電漿轉移弧加熱的導電坩堝高溫蒸發器,其中該殼體的上端還設置有一加料通道、一出氣回液通道及複數用於檢測觀查的觀測口,該加料通道、該出氣回液通道及該觀測口延伸至該坩堝蓋的內側。The conductive crucible high-temperature evaporator using plasma transfer arc heating as described in claim 1, wherein the upper end of the casing is further provided with a feeding channel, a gas outlet and liquid return channel and a plurality of observation ports for detection and observation. The channel, the gas outlet and liquid return channel and the observation port extend to the inner side of the crucible cover. 如請求項1所述之使用電漿轉移弧加熱的導電坩堝高溫蒸發器,其中該轉移弧槍的噴嘴底端面位於距離該坩堝本體的上端面的-150mm ~+150mm處。The conductive crucible high-temperature evaporator using plasma transfer arc heating according to claim 1, wherein the bottom end face of the nozzle of the transfer arc gun is located at a distance of -150mm to +150mm from the upper end face of the crucible body. 如請求項1所述之使用電漿轉移弧加熱的導電坩堝高溫蒸發器,其中該進氣腔的形狀為圓環狀或扇環狀,且該複數導氣通道的數量為1-18個。The conductive crucible high temperature evaporator using plasma transfer arc heating according to claim 1, wherein the shape of the air inlet cavity is a circular ring or a fan ring, and the number of the plurality of air guide channels is 1-18. 如請求項1所述之使用電漿轉移弧加熱的導電坩堝高溫蒸發器,其中該複數載流氣輸入預熱通道呈扇環形分佈於該坩堝本體的側壁上,且該複數載流氣輸入預熱通道與該坩堝本體內腔的連通處之一載流氣入口連通,該載流氣入口的高度為5-50mm。The conductive crucible high-temperature evaporator using plasma transfer arc heating as described in claim 1, wherein the plurality of carrier gas input preheating channels are distributed on the side wall of the crucible body in a fan ring shape, and the plurality of carrier gas input preheating channels It is communicated with one of the carrier gas inlets in the communication part of the inner cavity of the crucible body, and the height of the carrier gas inlet is 5-50mm.
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