TWM623607U - Metal thermal conductive sheet structure with microparticles and phase change - Google Patents

Metal thermal conductive sheet structure with microparticles and phase change Download PDF

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TWM623607U
TWM623607U TW110211133U TW110211133U TWM623607U TW M623607 U TWM623607 U TW M623607U TW 110211133 U TW110211133 U TW 110211133U TW 110211133 U TW110211133 U TW 110211133U TW M623607 U TWM623607 U TW M623607U
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metal
thermally conductive
heat
particles
solid
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陳宥嘉
方惠杰
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東莞錢鋒特殊膠黏製品有限公司
華越科技股份有限公司
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Abstract

一種具微粒及相變化的金屬導熱薄片構造,包含一導熱基體,以液態金屬合金為基體;一奈米級高導熱粉末,以平均尺寸10nm~10μm的微粒,溶入該導熱基體中,並使該導熱基體增黏相變化為一固態金屬導熱薄片,其厚度0.3cm~0.5cm;以及該固態金屬導熱薄片置於一熱源表面,受熱相變化為液態金屬,延展成為一厚度小於0.3cm的金屬導熱膠薄層構造,具有極佳黏著力且不會有固液分離的現象。藉此,可解決習用的「液態金屬」導熱材料及「傳統導熱膏」所造成的缺失;以該固態金屬導熱薄片的構造,通過相變化或金屬氧化過程,即能在晶片上順利延展呈薄層狀,其操作過程便捷不會傷害到晶片,且薄層狀的導熱膠,可降低熱阻,具有散熱佳及安全穩定性等多重功效增進。 A metal heat-conducting thin sheet structure with particles and phase changes, comprising a heat-conducting matrix with a liquid metal alloy as the matrix; a nano-scale high heat-conducting powder, with particles with an average size of 10nm-10μm, dissolved in the heat-conducting matrix, and making the The thermally conductive substrate is phase-changed into a solid metal thermally conductive sheet with a thickness of 0.3cm~0.5cm; and the solid metal thermally conductive sheet is placed on the surface of a heat source, and the heated phase changes to liquid metal, extending into a metal with a thickness of less than 0.3cm Thermally conductive adhesive thin layer structure, with excellent adhesion and no solid-liquid separation. In this way, the defects caused by the conventional "liquid metal" thermal conductive material and "traditional thermal conductive paste" can be solved; with the structure of the solid metal thermal conductive sheet, through the phase change or metal oxidation process, it can be smoothly extended on the wafer to form a thin layer. Layered, the operation process is convenient and will not damage the chip, and the thin layer of thermally conductive adhesive can reduce thermal resistance, and has multiple functions such as good heat dissipation, safety and stability.

Description

具微粒及相變化的金屬導熱薄片構造 Metal thermally conductive foil structure with particles and phase changes

本創作涉及一種具微粒及相變化的金屬導熱薄片構造,尤指一種具有極佳黏著力且不會有固液分離現象的金屬導熱膠薄層構造。 This creation involves a metal thermally conductive sheet structure with particles and phase changes, especially a metal thermally conductive adhesive thin layer structure with excellent adhesion and no solid-liquid separation.

近年來由於高功率的中央處理單元(CPU)、圖形處理單元(GPU)等的半導體元件的發展迅速。而電子裝置愈趨於輕薄多工,且由於電子元件密度提高、頻率增快,經長時間使用後會導致於局部出現過熱現象,通常電子裝置的晶片在工作時是主要熱源,散熱不僅是為了降低晶片自身溫度以保證其能在要求的溫度範圍內正常工作,同時還要兼顧散熱時不能造成殼體局部過熱,給消費者造成不良使用體驗,目前電子裝置之散熱方式,主要是利用簡單的開孔、熱傳導、熱對流等方式,但該些散熱方式已無法滿足現今高效能晶片所產生之熱能,因此會有過熱的問題,熱能無法均勻散佈,導致電子裝置內部的散熱效率降低,進而導致系統指令降頻或過慢死機的現象也時有發生。 In recent years, semiconductor elements such as high-power central processing units (CPUs), graphics processing units (GPUs), and the like have developed rapidly. Electronic devices are becoming more and more thin and multi-tasking, and due to the increase in the density and frequency of electronic components, local overheating may occur after long-term use. Usually, the chip of electronic devices is the main heat source during operation, and heat dissipation is not only for the purpose of Reduce the temperature of the chip itself to ensure that it can work normally within the required temperature range. At the same time, it is necessary to take into account that the heat dissipation cannot cause local overheating of the casing, resulting in a poor user experience for consumers. At present, the heat dissipation method of electronic devices mainly uses simple However, these heat dissipation methods can no longer meet the heat energy generated by today's high-performance chips, so there will be problems of overheating, and the heat energy cannot be distributed evenly, resulting in a decrease in the heat dissipation efficiency inside the electronic device, which in turn leads to The phenomenon of system command frequency reduction or too slow crash also occurs from time to time.

「液態金屬」是一種常溫下呈現液狀的低熔點合金,其主要成分為鎵銦錫合金、銦鉍錫合金,或銦鉍鋅合金等所構成;其性質穩定且具有優異的導熱及導電性,因此目前有很多業者以「液態金屬」作為導熱材料來解決上述問題。惟查,使用液態金屬作為散熱材料也並非沒有缺失;相對于傳統商用熱介面材料,鎵基液態金屬具有極低的熱阻,良好的流動性。目前已經有研究人員開發了一種以鎵、銦、鉍、錫為主要成分的合金,其總熱阻最低為0.5K.mm2/W。但是,鎵及鎵合金表面張力較大(0.5- 0.72N/m),塗布操作較為困難,存在與基材潤濕不良的缺點;液態金屬良好的流動性使其容易從介面處溢出,存在使電子元器件短路的風險。 "Liquid metal" is a low melting point alloy that is liquid at room temperature. Its main components are gallium indium tin alloy, indium bismuth tin alloy, or indium bismuth tin alloy, etc.; its properties are stable and have excellent thermal and electrical conductivity. , so many companies currently use "liquid metal" as a thermal conductive material to solve the above problems. However, the use of liquid metal as a heat dissipation material is not without lack; compared with traditional commercial thermal interface materials, gallium-based liquid metal has extremely low thermal resistance and good fluidity. At present, some researchers have developed an alloy with gallium, indium, bismuth and tin as the main components, and its total thermal resistance is at least 0.5K. mm 2 /W. However, the surface tension of gallium and gallium alloys is relatively large (0.5-0.72N/m), the coating operation is difficult, and there is a disadvantage of poor wetting with the substrate; the good fluidity of liquid metal makes it easy to overflow from the interface, which makes the Risk of short circuit of electronic components.

目前液態金屬在達到相變化溫度時,其流動性大幅提高,容易溢出污染電子元器件,因此針對半導體塗抹周邊需要設計密封結構,並且以加設中框和鋪墊密封材料,以達到防漏、吸收液態金屬用量公差,加大散熱模組設計難度和局限性。液態金屬在常溫條件下呈現液狀,對塗裝工藝有一定限制,液態金屬只能單一塗抹在中央處理單元(CPU)、圖形處理單元(GPU)等半導體晶片表面,而不能塗抹在散熱模組平面處且不流動。液態金屬與晶片材質浸潤性差,在施工過程中多數呈液珠狀,施工難度大於傳統導熱膏,需要嚴格控制液態金屬的用量以防洩漏。 At present, when the liquid metal reaches the phase change temperature, its fluidity is greatly improved, and it is easy to overflow and pollute electronic components. Therefore, a sealing structure needs to be designed for the surrounding area of the semiconductor coating, and a middle frame and a padding sealing material are added to prevent leakage and absorption. The tolerance of liquid metal consumption increases the difficulty and limitation of heat dissipation module design. Liquid metal is liquid at room temperature, which has certain restrictions on the coating process. Liquid metal can only be applied to the surface of semiconductor chips such as central processing units (CPUs) and graphics processing units (GPUs), but not on heat dissipation modules. flat and not flowing. Liquid metal and chip materials have poor wettability, and most of them are in the form of liquid beads during the construction process. The construction is more difficult than traditional thermal paste. It is necessary to strictly control the amount of liquid metal to prevent leakage.

相反的,使用傳統導熱膏的缺點是他的流動性或延展性差,當其塗抹在中央處理單元(CPU)、圖形處理單元(GPU)等半導體晶片表面,或塗抹在散熱模組平面處,在操作扣合過程時需使用很大的作用力,才能將傳統導熱膏壓擠,此時很容易傷害半導體晶片,因此使用傳統導熱膏,半導體晶片與散熱模組之間始終無法降低導熱膏的厚度,使其厚度都在0.4cm以上,然過厚的導熱膏其熱阻大,影響其導熱性,為其缺失。 On the contrary, the disadvantage of using traditional thermal paste is that it has poor fluidity or ductility. When it is applied to the surface of semiconductor wafers such as central processing units (CPUs) and graphics processing units (GPUs), or applied to the plane of the heat dissipation module, in the When operating the snap-fit process, a large force is required to squeeze the traditional thermal paste, which is easy to damage the semiconductor chip. Therefore, using traditional thermal paste, the thickness of the thermal paste cannot be reduced between the semiconductor chip and the heat dissipation module. , so that the thickness is more than 0.4cm, but the thermal resistance of too thick thermal paste is large, which affects its thermal conductivity and is missing.

再按,市面上液態金屬薄片,在到達相變化溫度後,會形成流動性較好的流體,無法高效填補晶片與散熱模組之間的間隙,甚至因長時間慢慢流失,導致模組與晶片之間的介面材料缺料,晶片溫度逐漸上升,從而引發晶片過熱降頻保護。 Press again, after the liquid metal sheet on the market reaches the phase change temperature, it will form a fluid with better fluidity, which cannot efficiently fill the gap between the chip and the heat dissipation module, and even loses slowly for a long time. The interface material between the chips is short of material, and the temperature of the chips gradually rises, thereby triggering the overheating and frequency reduction protection of the chips.

是以,本創作人有鑑於上述問題點,乃針對液態金屬導熱材料及傳統導熱膏所造成的缺失,進一步提出解決方案。 Therefore, in view of the above problems, the author further proposes solutions for the deficiencies caused by liquid metal thermal conductive materials and traditional thermal conductive pastes.

緣是,本創作之主要目的,在提供一種具微粒及相變化的金屬導熱薄片構造,具有散熱佳及安全穩定性等多重功效增進。 The reason is that the main purpose of this creation is to provide a metal thermal conductive sheet structure with particles and phase changes, which has multiple functions such as good heat dissipation, safety and stability.

為達上述目的,本創作所採用的技術手段包含有:一導熱基體,以液態金屬合金為基體;一奈米級高導熱粉末,以平均尺寸10nm~10μm的微粒,溶入該導熱基體中,並使該導熱基體增黏相變化為一固態金屬導熱薄片,其厚度0.3cm~0.5cm;以及該固態金屬導熱薄片置於一熱源表面,受熱相變化為液態金屬,延展成為一厚度小於0.3cm的金屬導熱膠薄層構造。 In order to achieve the above purpose, the technical means used in this creation include: a thermally conductive matrix, using a liquid metal alloy as the matrix; a nano-scale high thermal conductivity powder, with particles with an average size of 10nm~10μm, dissolved in the thermally conductive matrix, and make the thermally conductive substrate phase change into a solid metal thermally conductive sheet with a thickness of 0.3cm~0.5cm; and the solid metal thermally conductive sheet is placed on the surface of a heat source, and the heated phase changes into a liquid metal, extending into a thickness less than 0.3cm A thin layer of metal thermally conductive adhesive is constructed.

依據上揭特徵,該熱源溫度大於58℃時,該固態金屬導熱薄片產生相變化。 According to the above-mentioned feature, when the temperature of the heat source is greater than 58° C., the solid metal thermal conductive sheet undergoes a phase change.

依據上揭特徵,該奈米級高導熱粉末,為圓型或類圓型的微粒構造。 According to the above-mentioned features, the nano-scale high thermal conductivity powder is of circular or quasi-circular particle structure.

依據上揭特徵,該奈米級高導熱粉末,可包括由金屬粉末或非金屬粉末所構成的微粒。 According to the above-mentioned features, the nano-scale high thermal conductivity powder may include particles composed of metal powder or non-metal powder.

依據上揭特徵,該熱源包括為一半導體晶片,且該半導體晶片上對應設有一散熱器。 According to the above-mentioned feature, the heat source includes a semiconductor chip, and a heat sink is correspondingly provided on the semiconductor chip.

依據上揭特徵,該散熱器與該金屬導熱膠薄層構造的接觸面上,更包括設有一防腐蝕層。 According to the above-mentioned feature, the contact surface of the heat sink and the metal thermally conductive adhesive thin layer structure further includes an anti-corrosion layer.

藉助上揭技術手段,本創作可解決習用的「液態金屬」導熱材料及「傳統導熱膏」所造成的缺失;以該固態金屬導熱薄片的構造,達到相變化溫度後,形成膠固體或膏體,在有間隙的界面中完全填充,成為良好的界面材料,即能在晶片上順利延展呈薄層狀,可均勻結合在該熱源表面,且未出現固液分離現象,其操作過程不會傷害到晶片,且薄 層狀的導熱膠,可降低熱阻,具有散熱佳及安全穩定性等多重功效增進。 With the help of the above-mentioned technical means, this creation can solve the deficiencies caused by the conventional "liquid metal" thermal conductive material and "traditional thermal conductive paste"; with the structure of the solid metal thermal conductive sheet, after reaching the phase change temperature, it forms a solid or paste. , It is completely filled in the interface with gaps and becomes a good interface material, that is, it can be smoothly extended on the wafer to form a thin layer, and can be evenly combined on the surface of the heat source, and there is no solid-liquid separation phenomenon, and its operation process will not hurt. to wafer, and thin The layered thermally conductive adhesive can reduce thermal resistance, and has multiple functions such as good heat dissipation and safety and stability.

10:導熱基體 10: Thermally conductive substrate

20:奈米級高導熱粉末 20: Nano-scale high thermal conductivity powder

30:固態金屬導熱薄片 30: Solid metal thermal conductive sheet

30a:金屬導熱膠薄層構造 30a: Thin-layer structure of metal thermally conductive adhesive

31:氧化 31: Oxidation

40:熱源(半導體晶片) 40: heat source (semiconductor wafer)

41:電路板 41: circuit board

42:擋牆 42: Retaining Wall

50:散熱器 50: Radiator

51:防腐蝕層 51: Anti-corrosion layer

圖1本創作相變化的流程圖。 Figure 1. The flow chart of the phase change of this creation.

圖2本創作可行實施例的立體分解圖。 Figure 2 is an exploded perspective view of a possible embodiment of the present creation.

圖3本創作相變化的立體示意圖。 Figure 3 is a three-dimensional schematic diagram of the phase change of the present creation.

圖4本創作導熱膠薄層構造示意圖。 Figure 4 is a schematic diagram of the structure of the thin layer of thermally conductive adhesive in this creation.

圖5A本創作使用狀態參考剖視圖,顯示固態金屬導熱薄片30。 FIG. 5A is a cross-sectional view for reference in the use state of the present invention, showing the solid metal thermally conductive sheet 30 .

圖5B本創作使用狀態參考剖視圖,顯示導熱膠薄層構造30a。 FIG. 5B is a cross-sectional view for reference in the use state of the present invention, showing a thin layer structure 30a of thermally conductive adhesive.

圖6係圖5B中6所圈位置的放大圖。 FIG. 6 is an enlarged view of the position circled by 6 in FIG. 5B .

以下係藉由特定的具體實施例說明本新型之實施方式,熟習此技藝之人士可由本說明書所揭示之內容輕易地了解本新型之其他優點與功效。本新型亦可藉由其他不同的具體實施例加以施行或應用,本說明書中的各項細節亦可基於不同觀點與應用,在不悖離本新型之精神下進行各種修飾與變更。 The following describes the implementation of the present invention by means of specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied by other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the spirit of the present invention.

首先,請參閱圖1~圖6所示,本創作「具微粒及相變化的金屬導熱薄片構造」的可行實施例,包含有:一導熱基體10,以液態金屬合金為基體;包括鎵、銦、鉍、錫、鋅等合金,例如:鎵銦錫合金、銦鉍錫合金,或銦鉍鋅合金等,但不限定於此。在一可行實施例中,以液態鎵基金屬合金為基體10,能以高純鎵、高純銦、高純錫,三者純度為99.9999%,將塊狀金屬鎵加熱至100℃熔化為液態,按品質比稱取鎵(68.5%)、銦(21.5%)、錫(10%),將上述比例原料放置於塑膠容器中,將其放在60℃溫水中加熱 攪拌,直至金屬銦、錫完全溶解,可製得的液態鎵基合金,其熔點約為10℃的鎵銦錫三元合金,但不限定於此。 First, please refer to FIG. 1 to FIG. 6 , a feasible embodiment of the “metal thermally conductive sheet structure with particles and phase changes” of the present invention includes: a thermally conductive substrate 10 using a liquid metal alloy as the substrate; including gallium, indium , bismuth, tin, zinc and other alloys, for example: gallium indium tin alloy, indium bismuth tin alloy, or indium bismuth zinc alloy, etc., but not limited to this. In a feasible embodiment, the liquid gallium-based metal alloy is used as the substrate 10, and the bulk metal gallium can be heated to 100°C and melted into a liquid state with high-purity gallium, high-purity indium, and high-purity tin, and the purity of the three is 99.9999%. Weigh gallium (68.5%), indium (21.5%), and tin (10%) by mass ratio, place the above-mentioned raw materials in a plastic container, and heat them in warm water at 60°C Stir until the metal indium and tin are completely dissolved, and a liquid gallium-based alloy can be obtained, which is a gallium indium tin ternary alloy with a melting point of about 10° C., but is not limited to this.

一奈米級高導熱粉末20,以平均尺寸10nm~10μm的微粒,溶入該導熱基體10中,並使該導熱基體10增黏相變化為一固態金屬導熱薄片30,其厚度(t1)0.3cm~0.5cm;以及該固態金屬導熱薄片30置於一熱源40表面,受熱相變化延展成為一厚度(t2)小於0.3cm的金屬導熱膠薄層構造30a。 A nano-scale high thermal conductivity powder 20 is dissolved in the thermally conductive substrate 10 with particles having an average size of 10 nm˜10 μm, and the thermally conductive substrate 10 is viscous and phase-changed into a solid metal thermally conductive sheet 30 , the thickness (t 1 ) 0.3cm~0.5cm; and the solid metal thermally conductive sheet 30 is placed on the surface of a heat source 40, and the heated phase change extends into a metal thermally conductive adhesive thin layer structure 30a with a thickness (t 2 ) less than 0.3cm.

本實施例中,該熱源40溫度大於58℃時,該固態金屬導熱薄片30開始產生相變化,延展成該金屬導熱膠薄層構造30a,呈膏狀體(Paste)或膠固體(Glue Solid)的非液態薄層狀結構型態,具有極佳黏著力,可均勻結合在該熱源40表面,且未出現固液分離現象。此外,亦可如圖4所示,該固態金屬導熱薄片30表層經氧化31之後,也能成為表面具有極佳黏著力的金屬導熱膠薄層構造30a,與相變化的過程相同,可均勻結合在該熱源40表面。 In this embodiment, when the temperature of the heat source 40 is greater than 58° C., the solid metal thermally conductive sheet 30 begins to undergo a phase change, and extends into the metal thermally conductive adhesive thin layer structure 30a in the form of a paste or a glue solid. The non-liquid thin-layered structure has excellent adhesion and can be uniformly combined on the surface of the heat source 40 without the phenomenon of solid-liquid separation. In addition, as shown in FIG. 4 , after the surface layer of the solid metal thermal conductive sheet 30 is oxidized 31 , it can also become a metal thermal conductive adhesive thin layer structure 30 a with excellent adhesion on the surface, which is the same as the process of phase change and can be uniformly combined on the surface of the heat source 40 .

本實施例中,該熱源40包括為一半導體晶片,且該半導體晶片40上對應設有一散熱器50。 In this embodiment, the heat source 40 includes a semiconductor chip, and a heat sink 50 is correspondingly provided on the semiconductor chip 40 .

本實施例中,該奈米級高導熱粉末20,可為圓型或類圓型的微粒構造,以平均尺寸小於10μm的微粒構造為較佳,但不限定於此。且該奈米級高導熱粉末20包括由金屬粉末或非金屬粉末所構成的微粒,諸如:金(Au)、銀(Ag)、塑料微珠、玻璃微珠、氧化鋁、碳化硅、氮化硼等等材料皆可實施。 In this embodiment, the nano-scale high thermal conductivity powder 20 may have a circular or quasi-circular particle structure, preferably a particle structure with an average size of less than 10 μm, but is not limited thereto. And the nano-scale high thermal conductivity powder 20 includes particles composed of metal powder or non-metal powder, such as: gold (Au), silver (Ag), plastic microbeads, glass microbeads, alumina, silicon carbide, nitride Materials such as boron can be implemented.

本實施例中,該散熱器50與該複合導熱膠結構層30的接觸面上,更包括設有一防腐蝕層51。該防腐蝕層51包括由鎳金屬所構成,但不限定於此。鎳金屬具有極佳的抗腐蝕性,且可以用電鍍或塗布的技術,使其附著在該散熱器50上。如此一來,可使該散熱器50不易受到該金屬導 熱膠薄層構造30a材料的侵蝕,可確保其使用壽命及可靠度。該半導體晶片40及該散熱器50為先前技術(Prior Art),非本創作的專利標的,容不贅述。 In this embodiment, the contact surface of the heat sink 50 and the composite thermally conductive adhesive structure layer 30 further includes an anti-corrosion layer 51 . The anti-corrosion layer 51 includes, but is not limited to, nickel metal. Nickel metal has excellent corrosion resistance and can be attached to the heat sink 50 by electroplating or coating techniques. In this way, the heat sink 50 is not easily affected by the metal conduction. The erosion of the material of the hot glue thin layer structure 30a can ensure its service life and reliability. The semiconductor chip 40 and the heat sink 50 are prior art, which are not the subject of the patent of this creation, and will not be described in detail.

本實施例中,該半導體晶片40係設在電路板41上,且電路板41上設有圍繞該半導體晶片40的擋牆42。雖然本創作的金屬導熱膠薄層構造30a是呈現膏狀體(Paste)或膠固體(Glue Solid),不易有液體洩漏出來,造成短路的問題。但為百分百安全起見,如遇到該半導體晶片40異常而過熱,致使該金屬導熱膠薄層構造30a有軟化疑慮,此時該擋牆42可確保不會造成液體洩漏出來,造成短路的問題,具有雙重的安全性保障。 In this embodiment, the semiconductor chip 40 is disposed on the circuit board 41 , and the circuit board 41 is provided with a retaining wall 42 surrounding the semiconductor chip 40 . Although the metal thermally conductive adhesive thin layer structure 30a of the present invention is in the form of a paste or a glue solid, it is not easy for liquid to leak out and cause a short circuit problem. However, for the sake of 100% safety, if the semiconductor chip 40 is abnormally overheated, causing the metal thermally conductive adhesive thin layer structure 30a to be softened, the retaining wall 42 can ensure that the liquid will not leak out and cause a short circuit. problem with double security.

本創作與習用的「液態金屬」導熱材料及「傳統導熱膏」主要的區別技術特徵如后: The main differences between this creation and the conventional "liquid metal" thermal conductive material and "traditional thermal paste" are as follows:

一、本創作在液態金屬中添加金屬或無機非金屬粉末,經過劇烈攪拌先形成一固態金屬導熱薄片30,能降低液態金屬流動性,方便並顯著改善其在各種基底上的潤濕性;此為習用的「液態金屬」導熱材料的所無法達到,習用的「液態金屬」在達到相變化溫度時,其流動性大幅提高,容易溢出污染電子元器件,而本創作則可有效改善此一問題點。因該金屬導熱膠薄層構造30a常溫下是呈現膏狀體或膠固體,這與習用的「液態金屬」導熱材料完全不同,因此不用擔心液體洩漏出來,造成短路的問題,進而具有安全穩定性的功效增進。 1. In this creation, metal or inorganic non-metallic powder is added to the liquid metal, and a solid metal thermal conductive sheet 30 is formed after vigorous stirring, which can reduce the fluidity of the liquid metal, and facilitate and significantly improve its wettability on various substrates; this The conventional "liquid metal" thermal conductive material cannot achieve it. When the conventional "liquid metal" reaches the phase change temperature, its fluidity is greatly improved, and it is easy to overflow and contaminate electronic components. This work can effectively improve this problem. point. Because the metal thermally conductive adhesive thin-layer structure 30a is a paste or a solid at room temperature, which is completely different from the conventional "liquid metal" thermally conductive material, so there is no need to worry about the liquid leaking out and causing a short circuit, and thus has safety and stability. efficacy increased.

二、本創作的固態金屬導熱薄片30方便設置在熱源40上,通過相變化或氧化過程,即能在晶片上順利延展呈薄層狀的金屬導熱膠薄層構造30a,具有極佳黏著力以及填縫性,且如圖6所示,該金屬導熱膠薄層構造30a的厚度(t2)可小於0.3cm,由於該金屬導熱膠薄層構造30a的厚度越薄越好,因此本創作的固態金屬導熱薄片30,解決傳統導熱膏流動性或延展 性差,導致導熱膏過厚的缺點,具有其操作過程不會傷害到晶片,且薄層狀的金屬導熱膠薄層構造30a,可降低熱阻,具有散熱佳及安全穩定性等多重功效增進。 2. The solid metal thermally conductive sheet 30 of the present invention is conveniently placed on the heat source 40, and through the phase change or oxidation process, the thin-layered metal thermally conductive adhesive thin-layer structure 30a can be smoothly extended on the wafer, and has excellent adhesion and gap filling, and as shown in FIG. 6 , the thickness (t2) of the metal thermally conductive adhesive thin-layer structure 30a can be less than 0.3 cm. Since the thickness of the metal thermally conductive adhesive thin-layer structure 30a is as thin as possible, the solid state of the present invention Metal thermal conductive sheet 30, to solve the fluidity or extension of traditional thermal paste The disadvantage is that the thermal paste is too thick due to poor thermal conductivity. The operation process will not damage the chip, and the thin-layered metal thermal paste thin layer structure 30a can reduce thermal resistance, improve heat dissipation, and improve safety and stability.

三、該金屬導熱膠薄層構造30a是呈現膏狀體(Paste)或膠固體(Glue Solid),並非是剛性體或固狀體,因此其具有彈性,以其設置在該半導體晶片40與散熱器50之間,不僅可以使該半導體晶片40和散熱器50的介面緊密貼合,顯著降低半導體晶片40和散熱器50之間的接觸熱阻;且因其具有彈性,可使該半導體晶片40與散熱器50之間,具有一彈性緩衝力,如此一來,該半導體晶片40不易受到該散熱器50的壓力而造成損害。 3. The metal thermally conductive adhesive thin layer structure 30a is in the form of a paste or a glue Solid), not a rigid body or a solid body, so it has elasticity, and it is arranged between the semiconductor chip 40 and the heat sink 50, not only can the interface between the semiconductor chip 40 and the heat sink 50 be closely attached, significantly Reduce the contact thermal resistance between the semiconductor chip 40 and the heat sink 50; and because of its elasticity, an elastic buffer force can be provided between the semiconductor chip 40 and the heat sink 50, so that the semiconductor chip 40 is not easily affected The pressure of the heat sink 50 causes damage.

藉助上揭技術手段,本創作金屬導熱膠薄層構造30a,可同時解決習用的「液態金屬」導熱材料及「傳統導熱膏」所造成的缺失,藉助上揭技術手段,本創作可解決習用的「液態金屬」導熱材料及「傳統導熱膏」所造成的缺失;以該固態金屬導熱薄片30的構造,達到相變化溫度後,形成膠固體或膏體,在有間隙的界面中完全填充,成為良好的界面材料,即能在晶片40上順利延展呈薄層狀,可均勻結合在該熱源40表面,且未出現固液分離現象,其操作過程不會傷害到晶片,且薄層狀的導熱膠,可降低熱阻,具有散熱佳及安全穩定性等多重功效增進。 With the help of the above-mentioned technical means, the thin layer structure 30a of metal thermally conductive adhesive in this creation can simultaneously solve the deficiencies caused by the conventional "liquid metal" thermally conductive material and the "traditional thermally conductive paste". The defect caused by the "liquid metal" thermal conductive material and the "traditional thermal conductive paste"; with the structure of the solid metal thermal conductive sheet 30, after reaching the phase change temperature, it forms a solid or paste, which is completely filled in the interface with gaps to become A good interface material can smoothly spread on the wafer 40 in a thin layer, and can be evenly combined on the surface of the heat source 40 without solid-liquid separation. Adhesive can reduce thermal resistance, and has multiple functions such as good heat dissipation, safety and stability.

綜上所述,本創作所揭示之構造,為昔所無,且確能達到功效之增進,並具可供產業利用性,完全符合新型專利要件,祈請 鈞局核賜專利,以勵創新,無任德感。 To sum up, the structure disclosed in this creation is unprecedented, and can indeed achieve the improvement of efficacy, and is available for industrial use, and fully meets the requirements of a new type of patent. , without any sense of virtue.

惟,上述所揭露之圖式、說明,僅為本創作之較佳實施例,大凡熟悉此項技藝人士,依本案精神範疇所作之修飾或等效變化,仍應包括在本案申請專利範圍內。 However, the drawings and descriptions disclosed above are only the preferred embodiments of the present creation, and modifications or equivalent changes made by those familiar with the art in accordance with the spirit of the present case should still be included in the scope of the patent application of the present case.

30:固態金屬導熱薄片 30: Solid metal thermal conductive sheet

40:熱源(半導體晶片) 40: heat source (semiconductor wafer)

41:電路板 41: circuit board

42:擋牆 42: Retaining Wall

50:散熱器 50: Radiator

51:防腐蝕層 51: Anti-corrosion layer

Claims (4)

一種具微粒及相變化的金屬導熱薄片構造,包含有:一導熱基體,以液態金屬合金為基體;一奈米級高導熱粉末,以平均尺寸10nm~10μm的微粒,溶入該導熱基體中,並使該導熱基體增黏相變化為一固態金屬導熱薄片,其厚度0.3cm~0.5cm;該固態金屬導熱薄片置於一熱源表面,受熱相變化延展成為一厚度小於0.3cm的金屬導熱膠薄層構造;該熱源包括為一半導體晶片,且該半導體晶片上對應設有一散熱器;以及該散熱器與該固態金屬導熱薄片的接觸面上,更包括設有一防腐蝕層。 A metal heat-conducting thin sheet structure with particles and phase changes, comprising: a heat-conducting matrix, using a liquid metal alloy as the matrix; a nano-scale high heat-conducting powder, in the form of particles with an average size of 10nm-10μm, dissolved in the heat-conducting matrix, The thermal conductive substrate is phase-changed into a solid metal thermally conductive sheet with a thickness of 0.3cm-0.5cm; the solid metal thermally conductive sheet is placed on the surface of a heat source, and the heated phase change extends into a thin metal thermally conductive adhesive with a thickness of less than 0.3cm. Layer structure; the heat source includes a semiconductor chip, and a radiator is correspondingly arranged on the semiconductor chip; and a contact surface between the radiator and the solid metal heat-conducting sheet further includes an anti-corrosion layer. 如申請專利範圍第1項所述之具微粒及相變化的金屬導熱薄片構造,其中,該熱源溫度大於58℃時,該固態金屬導熱薄片產生相變化。 The structure of the thermally conductive metal sheet with particles and phase change as described in item 1 of the claimed scope, wherein when the temperature of the heat source is greater than 58° C., the solid thermally conductive metal sheet undergoes a phase change. 如申請專利範圍第1項所述之具微粒及相變化的金屬導熱薄片構造,其中,該奈米級高導熱粉末為圓型或類圓型的微粒構造。 The metal thermally conductive sheet structure with particles and phase change as described in claim 1, wherein the nanoscale high thermal conductivity powder is a circular or quasi-circular particle structure. 如申請專利範圍第1項所述之具微粒及相變化的金屬導熱薄片構造,其中,該奈米級高導熱粉末包括由金屬粉末或非金屬粉末所構成的微粒。 The metal thermally conductive thin sheet structure with particles and phase change as described in claim 1, wherein the nanoscale high thermal conductivity powder includes particles composed of metal powder or non-metallic powder.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI864624B (en) * 2022-07-28 2024-12-01 台灣積體電路製造股份有限公司 Package structures and method forming the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI864624B (en) * 2022-07-28 2024-12-01 台灣積體電路製造股份有限公司 Package structures and method forming the same

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