TWM620928U - Wafer suspension arm - Google Patents

Abstract

This model is a wafer suspension arm, which includes a body. The body includes a connecting part, a right arm and a left arm. The connecting part is penetrated with a plurality of air inlets. The shapes and positions of the right arm and the left arm Protruding laterally from the connecting part symmetrically, the right arm and the left arm respectively have a bearing surface and a first-class road surface. Each bearing surface is formed with a plurality of outer inclined holes and a plurality of inner inclined holes, each outer inclined hole and each The inner oblique holes are arranged at intervals and extend along the axial direction of the right arm and the left arm. Each flow channel surface is recessed with a plurality of corresponding flow channels and each flow channel is communicated with each air inlet; a bottom cover, which Cover the bottom surface of the main body; by adjusting the pressure of the gas blown from the holes, the wafer can be suspended and positioned above the left arm and the right arm to avoid scratching the wafer during the movement.

Description

Wafer suspension arm

The present invention relates to a wafer moving arm, in particular to a wafer levitation arm that uses air blowing to generate negative pressure so that the wafer can be suspended and positioned on it.

In the prior art wafer handling equipment, the mechanism for grabbing and moving the wafer is a vacuum chuck arm (FORK). The vacuum chuck arm includes a claw-shaped sheet body and a plurality of suction cups, and the claw-shaped sheet body is penetrated with a plurality of flow channels. , Each flow channel is connected to an external suction device, and each suction cup is assembled on the claw-shaped sheet body and communicated with each flow channel. The suction device is used for pumping, so that the vacuum chuck arm can use its suction cup to suck the wafer On top of it, the effect of handling wafers is achieved.

However, the aforementioned method of adsorption and fixation is easy to cause friction and scratches between the wafer and the claw-shaped sheet due to slight movements at the moment of wafer adsorption and during the movement process. The scratches will cause the wafer to be scratched. The yield rate of the vacuum chuck is reduced; therefore, the overall structure of the vacuum chuck arm of the prior art has the above-mentioned problems and shortcomings, and it needs to be improved.

In view of the shortcomings of the prior art, the present invention provides a wafer suspension arm. The left arm and the right arm are provided with a plurality of outer oblique holes and a plurality of inner oblique holes, so that the wafer can be suspended and positioned on the left arm and the right arm. The above purpose.

In order to achieve the above-mentioned new purpose, the technical means adopted by the present invention is to design a wafer suspension arm, which includes: A body comprising a connecting part, a right arm and a left arm. The connecting part has a top surface and a bottom surface. The shape and position respectively protrude laterally on the connecting part symmetrically, the adjacent side of the right arm and the left arm is the inner side, and the other side opposite to the inner side is the outer side, and the right branch The arm and the left support arm respectively have a bearing surface and a flow channel surface. The bearing surface and the flow channel surface are two opposite sides, each of which has a height gradually decreasing from the outer side to the inner side. Inclined surface, each of the bearing surfaces is formed with a plurality of outer oblique holes and a plurality of inner oblique holes, each of the outer oblique holes respectively penetrates the right arm and the left arm, and each of the outer oblique holes penetrates from the outer side surface In the direction of the inner side surface, the outer oblique holes are arranged at intervals and extend along the axial direction of the right arm and the left arm. Each inner oblique hole penetrates the right arm and the left arm, and each The direction in which the inner oblique holes penetrate is the direction from the inner side to the outer side, each of the inner oblique holes is located in the inner direction of each of the outer oblique holes, and the inner oblique holes are arranged at intervals and along the right arm and the left branch. The arm extends in the axial direction, and each of the flow channel surfaces is concavely provided with a plurality of inner oblique flow channels and a plurality of outer oblique flow channels. The outer oblique flow channel communicates with each of the outer oblique holes and each of the air inlet holes; a bottom cover is fixed on the bottom surface and each of the flow channel surfaces of the connecting portion, and covers each of the inner oblique flow channels and each of the flow channels. The external oblique runner.

Furthermore, in the wafer suspension arm, each of the supporting surfaces is further concavely formed with a plurality of gas collecting grooves, and each of the gas collecting grooves is arranged at intervals along the axial direction of the right arm and the left arm. Adjacent to the outer side surface, the inner diameter of each gas collecting groove gradually decreases from the inner side surface toward the outer side surface to form a tapered shape.

Furthermore, in the wafer suspension arm, each of the gas collecting grooves has an inlet end and an outlet end, the inlet end is adjacent to the outer oblique hole, the outlet end is adjacent to the outer side surface, and each gas collecting groove The number of grooves is five, and the direction of the outlet end of the gas collecting groove in the middle is perpendicular to the outer side surface, and the direction of each outlet port of each gas collecting groove on both sides is toward the gas collecting groove in the middle direction.

Furthermore, in the wafer suspension arm, each of the flow channel surfaces is recessed with a plurality of inner slanted slot holes and a plurality of outer slanted slot holes, and each of the inner slanted slot holes is a tapered hole and is connected to each of the inner slanted holes. Each of the outer oblique slot holes is a tapered hole and communicates with each of the outer oblique holes.

Furthermore, the wafer suspension arm further includes a plurality of first positioning blocks and a plurality of second positioning blocks, each of the first positioning blocks is protrudingly provided on the top surface of the connecting portion and is respectively adjacent to the right support For the arm and the left supporting arm, each of the second positioning blocks is respectively protrudingly arranged at the end of the right supporting arm and the end of the left supporting arm.

Furthermore, in the wafer suspension arm, the connecting portion has a front side surface, the front side surface is located between the top surface and the bottom surface, and the front side surface is a concave arc surface, and each of the first positioning blocks A first abutting surface is respectively formed, and the first abutting surface is adjacent to and aligned with the front side surface.

Furthermore, in the wafer suspension arm, each of the second positioning blocks is respectively formed with a second abutting surface, the second abutting surface is an arc surface facing the inner side surface and the shape corresponds to the front The shape of the side.

Furthermore, in the wafer suspension arm, each of the outer oblique holes and each of the inner oblique holes of the right arm and the left arm has two rows and are arranged in a left-right staggered arrangement, and each of the outer oblique holes The inner diameter of and the inner diameter of each of the oblique holes gradually increase from one end adjacent to the connecting portion toward the other end.

Furthermore, in the wafer suspension arm, the angle between the axis line of each of the inner oblique holes and the axis line of each of the outer oblique holes with respect to the flow channel surface is in an angle range of 25-50 degrees.

Furthermore, in the wafer suspension arm, the inner diameter of each of the inner oblique holes and each of the outer oblique holes ranges from 0.1 mm to 0.3 mm.

The advantage of this new model is that by adjusting the gas pressure blown by the outer and inner oblique holes, the wafer can be suspended and positioned above the left arm and the right arm, so that the wafer can be moved without touching the wafer. Round, and avoid scratching the wafer during the movement; and set the first positioning The block and the second positioning block can further abut against the side of the wafer and confine the wafer in it, so as to prevent the wafer from being thrown out from the side.

10: body

11: Connection part

111: top surface

112: Bottom

113: front side

114: air inlet

115: first positioning block

116: connector

117: The first abutment surface

12: Right arm

13: Left arm

14: Bearing surface

141: Outer oblique hole

142: Internal oblique hole

143: Air Gathering Trough

144: second positioning block

145: entrance side

146: Exit

147: Second abutment surface

15: Runner surface

151: Internal oblique flow channel

152: External oblique runner

153: Internal chute hole

154: Outer chute hole

20: bottom cover

30: Wafer

Figure 1 is a three-dimensional external view of the present invention.

Figure 2 is an exploded view of the present invention.

Figure 3 is another perspective exploded view of the present invention.

Figure 4 is a bottom view of the flow channel of the present invention.

Figure 5 is a partial cross-sectional view of the left arm of the present invention.

Figure 6 is another partial cross-sectional view of the left arm of the present invention.

Figure 7 is a front view of the present invention.

Figure 8 is a schematic diagram of the local flow field of the present invention.

In conjunction with the drawings and the preferred embodiments of the present invention, the following further describes the technical means adopted by the present invention to achieve the intended purpose of the novel.

Please refer to FIG. 1 and FIG. 2, the wafer suspension arm of the present invention includes a body 10 and a bottom cover 20.

Please refer to Figures 1, 2 and 5, the main body 10 includes a connecting portion 11, a right arm 12 and a left arm 13, the connecting portion 11 is a piece and has a top surface 111, a bottom surface 112 and A front side surface 113. The top surface 111 and the bottom surface 112 are two opposite sides. The front side surface 113 is located between the top surface 111 and the bottom surface 112. The front side surface 113 is a concave arc surface. 114 and protruding with a plurality of first positioning blocks 115, each air inlet 114 is respectively provided with a connector 116, the connector 116 is used Connected to an external air supply pipeline (not shown in the figure), each first positioning block 115 is adjacent to the right arm 12 and the left arm 13 respectively, and each first positioning block 115 forms a first abutting surface 117, An abutting surface 117 is adjacent to the front side surface 113 and aligned with the front side surface 113.

The right arm 12 and the left arm 13 respectively protrude from the connecting portion 11 in a symmetrical shape and position. Specifically, they protrude from the front side surface 113 of the connecting portion 11 at a horizontal interval. The right arm 12 and the left arm 13 are opposite to each other. The adjacent side is the inner side, and the other side relative to the inner side is the outer side. Because the right arm 12 and the left arm 13 have the same structure and are symmetrical, the left arm 13 is taken as an example. 13 has a bearing surface 14 and a flow channel surface 15. The bearing surface 14 and the flow channel surface 15 are two opposite side surfaces. The bearing surface 14 is an inclined surface whose height gradually decreases from the outer side to the inner side. Each bearing surface 14 is formed with A plurality of outer oblique holes 141, a plurality of inner oblique holes 142, a plurality of air collecting grooves 143 and a second positioning block 144, each of the outer oblique holes 141 penetrates the bearing surface 14 and the flow channel surface 15 of the left arm 13 and the penetrating direction is From the outer side to the inner side, the outer oblique holes 141 are arranged at intervals and extend along the axial direction of the left arm 13. In this embodiment, the outer oblique holes 141 have two rows and are staggered left and right. The inner diameter of the oblique hole 141 gradually increases from the end adjacent to the connecting portion 11 toward the end of the left arm 13, and the preferred inner diameter ranges from 0.1 to 0.3 mm, and the axis of each outer oblique hole 141 is relative to the flow The angle range of the included angle of the road surface 15 is 25-50 degrees, but it is not limited to this, and the form and arrangement of the outer inclined holes 141 can be changed according to the needs of the user.

Please refer to Figure 1, Figure 4 to Figure 6, each inner inclined hole 142 penetrates the bearing surface 14 and flow channel surface 15 of the left arm 13 and from the inner side to the outer side, each inner inclined hole 142 is located on each outer side At the inner side of the oblique holes 141, the oblique holes 142 are arranged at intervals and extend along the axial direction of the left arm 13. In this embodiment, the oblique holes 142 have two rows and are arranged in a left-right staggered arrangement. The inner diameter of 142 gradually increases from the end adjacent to the connecting portion 11 toward the end of the left arm 13, and the preferred inner diameter ranges from 0.1 to 0.3 mm, and the axis of each inner oblique hole 142 is relative to the flow channel surface The angle of the included angle of 15 ranges from 25 to 50 degrees, but is not limited to this, and the form and arrangement of the inner inclined holes 142 can be changed according to user requirements.

Please refer to FIG. 1, each gas collecting groove 143 is recessed in the bearing surface 14 and adjacent to the outer side at intervals. Each gas collecting groove 143 has an inlet end 145 and an outlet end 146, and the inlet end 145 is adjacent to the outer inclined hole 141 , The outlet end 146 is adjacent to the outer side, and the inner diameter of the gas collecting groove 143 gradually decreases from the inlet end 145 to the outlet end 146 to form a tapered shape. In this embodiment, the number of the gas collecting grooves 143 of the left arm 13 There are five, arranged at intervals along the axial direction of the left arm 13, the outlet end 146 of the gas collecting groove 143 in the middle is perpendicular to the outer side surface, and the outlet port of the gas collecting groove 143 on the two sides faces the middle. The direction of the gas collecting groove 143, but not limited to this, the setting of the gas collecting groove 143 and the number and form of the gas collecting groove 143 can be changed according to the needs of the user.

The second positioning block 144 is protruded from the end of the left arm 13 and the second positioning block 144 is formed with a second abutting surface 147. The second abutting surface 147 is an arc surface facing the inner surface and the shape corresponds to the front The shape of the side 113.

Please refer to Figures 3 and 4, each flow channel surface 15 is recessed with a plurality of inner oblique flow channels 151, a plurality of outer oblique flow channels 152, a plurality of inner oblique slots 153 and a plurality of outer oblique slots 154, each of which is an inner oblique flow The passage 151 extends in the axial direction of the left arm 13 and communicates with each of the inner inclined holes 142 and each air inlet 114, and each of the outer inclined flow passages 152 extends in the axial direction of the left arm 13 and is connected to the outer inclined holes. 141 and each air inlet hole 114 are connected, each inner oblique slot hole 153 is a tapered hole and communicates with each inner oblique hole 142, and each outer oblique slot hole 154 is a tapered hole and communicates with each outer oblique hole 141.

The bottom cover 20 is a one piece body, which is fixed on the bottom surface 112 of the connecting portion 11 and each flow channel surface 15. Each outer inclined flow channel 152 is closed to form an internal space.

When the new model is used, please refer to Figure 1, Figure 4 and Figure 7. It can be used by connecting to a robot arm (not shown in the figure) through the connecting part 11. The connecting head 116 and the air supply pipeline (not shown in the figure) Show) connection. When the present invention moves to one side of the wafer 30, the gas supply pipeline transports the gas from the gas inlet 114 to each of the inner inclined flow passages 151 and each of the outer inclined flow passages 152, and the gas flows in each of the inner inclined flow passages. 151 and each external oblique flow channel 152 flows in At the time, it will blow out from the inner inclined holes 142 and the outer inclined holes 141 respectively; please refer to Figure 1, Figure 7 and Figure 8. Since the left arm 13 and the right arm 12 have the same gas blowing pattern, the right arm The arm 12 is an example to illustrate the gas flow state. The gas blown out through the oblique inner hole 142 hits the wafer 30 and then reflects and flows out in the downward direction. The gas blown out through the left arm 13 is also the same. The space surrounded by the circles 30 will form a vacuum belt, which is a vacuum effect. The gas blown out through the outer inclined hole 141 is compressed and accelerated to flow out from the side direction through the narrow space between the right arm 12 and the wafer 30 , And part of the gas will flow through the gas collecting trough 143, the necking design of the gas collecting trough 143 will make the gas flow out again, and according to the Baililian law, the pressure of the gas with a faster flow rate is lower than that of the gas with a slow flow rate, because The flow rate of the gas under the wafer 30 is faster than that of the gas above the wafer 30. Therefore, the gas blown out through the outer oblique hole 141 flows through the lower part of the wafer 30 at a pressure that is higher than the pressure at the upper part of the wafer 30. In addition, the aforementioned vacuum belt is formed between the left arm 13 and the right arm 12, so that the pressure above the wafer 30 is greater than the pressure below the wafer 30 to approach the invention, and then the user can adjust the inclined holes The pressure of the gas blown from 142 and the outer inclined holes 141 makes the thrust of the gas blowing under the wafer 30 equal to the pressure above the wafer 30, and the wafer 30 can be suspended and positioned above the left arm 13 and the right arm 12 , To achieve the effect of moving the wafer 30 without touching the wafer 30, and avoiding the wafer 30 from being scratched during the moving process.

Please refer to FIGS. 1 and 7. In the foregoing process, since the first positioning block 115 and the second positioning block 144 are provided, the first abutting surface 117 and the second abutting surface 147 can further abut against the wafer 30 The side edge of φ is confined in it, so as to prevent the wafer 30 from being thrown out from the side edge.

The above is only the preferred embodiment of this creation, and does not impose any formal restriction on this creation. Although this creation has been disclosed as above in preferred embodiments, it is not intended to limit this creation. Any technical field has Generally knowledgeable persons, without departing from the scope of this creative technical solution, can use the technical content disclosed above to make some changes or modifications as equivalent embodiments of equivalent changes. However, any content that does not deviate from this creative technical solution shall be based on this The technical essence of the creation Any simple modifications, equivalent changes and modifications made in the embodiments still fall within the scope of the technical solution for creation.

10: body

11: Connection part

111: top surface

112: Bottom

113: front side

114: air inlet

115: first positioning block

116: connector

117: The first abutment surface

12: Right arm

13: Left arm

14: Bearing surface

141: Outer oblique hole

142: Internal oblique hole

143: Air Gathering Trough

144: second positioning block

145: entrance side

146: Exit

147: Second abutment surface

Claims (10)

A wafer suspension arm, comprising: a body, comprising a connecting part, a right arm and a left arm, the connecting part has a top surface and a bottom surface, the top surface is penetrated with a plurality of air inlets, the The shape and position of the right arm and the left arm respectively protrude laterally from the connecting portion in a symmetrical manner. One side is the outer side, the right arm and the left arm respectively have a bearing surface and a flow channel surface, the bearing surface and the flow channel surface are two opposite sides, each bearing surface is a height from the outer side Inclined surfaces that gradually decrease toward the inner side surface, each of the bearing surfaces is formed with a plurality of outer oblique holes and a plurality of inner oblique holes, each of the outer oblique holes respectively penetrates the right arm and the left arm, and each of the outer oblique holes The penetrating direction is the direction from the outer side to the inner side, the outer oblique holes are arranged at intervals and extend along the axial direction of the right arm and the left arm, and each inner oblique hole penetrates the right arm respectively And the left arm, and the direction in which each of the inner oblique holes penetrates is the direction from the inner side to the outer side, each of the inner oblique holes is located in the inner direction of each of the outer oblique holes, and the inner oblique holes are arranged at intervals and Extending along the axial direction of the right arm and the left arm, each flow channel surface is concavely provided with a plurality of inner oblique flow channels and a plurality of outer oblique flow channels, each of the inner oblique flow channel and each of the inner oblique holes and each The air inlet holes are connected, and each of the outer inclined flow passages is communicated with each of the outer inclined holes and each of the air inlet holes; a bottom cover is fixed on the bottom surface of the connecting portion and each of the flow channel surfaces, and Cover each of the inner oblique flow passages and each of the outer oblique flow passages. The wafer suspension arm according to claim 1, wherein each of the bearing surfaces is further concavely formed with a plurality of gas collecting grooves, and each of the gas collecting grooves is arranged at intervals along the axial direction of the right arm and the left arm. Adjacent to the outer side surface, the inner diameter of each gas collecting groove gradually decreases from the inner side surface toward the outer side surface to form a tapered shape. The wafer suspension arm according to claim 2, wherein each of the gas collecting grooves has an inlet end and an outlet end, the inlet end is adjacent to the outer inclined hole, the outlet end is adjacent to the outer side surface, and each of the collectors The number of gas grooves is five, and the direction of the outlet end of the gas collecting groove in the middle is perpendicular to the outer side surface, and the direction of each outlet port of the gas collecting groove on both sides is toward the gas collecting groove in the middle. Slot direction. The wafer suspension arm according to any one of claims 1 to 3, wherein each of the flow channel surfaces is recessed with a plurality of inner chute holes and a plurality of outer chute holes, and each of the inner chute holes is a tapered hole and It is communicated with each of the inner oblique holes, and each of the outer oblique slot holes is a tapered hole and communicates with each of the outer oblique holes. The wafer suspension arm according to claim 4, further comprising a plurality of first positioning blocks and a plurality of second positioning blocks, each of the first positioning blocks is protrudingly provided on the top surface of the connecting portion and is respectively adjacent to the right support For the arm and the left supporting arm, each of the second positioning blocks is respectively protrudingly arranged at the end of the right supporting arm and the end of the left supporting arm. The wafer suspension arm according to claim 5, wherein the connecting portion has a front side surface, the front side surface is located between the top surface and the bottom surface, and the front side surface is a concave arc surface, and each of the first positioning blocks A first abutting surface is respectively formed, and the first abutting surface is adjacent to and aligned with the front side surface. The wafer suspension arm according to claim 6, wherein each of the second positioning blocks is respectively formed with a second abutting surface, and the second abutting surface is an arc surface facing the inner side surface and the shape corresponds to the front The shape of the side. The wafer suspension arm according to claim 7, wherein each of the outer oblique holes and each of the inner oblique holes of the right arm and the left arm have two rows and are arranged in a left and right staggered arrangement, and each of the outer oblique holes The inner diameter of and the inner diameter of each of the oblique holes gradually increase from one end adjacent to the connecting portion toward the other end. The wafer suspension arm according to claim 8, wherein the angle between the axis line of each of the inner oblique holes and the axis line of each of the outer oblique holes with respect to the flow channel surface is in the range of 25-50 degrees. The wafer suspension arm according to claim 9, wherein the inner diameter of each of the inner oblique holes and each of the outer oblique holes ranges from 0.1 mm to 0.3 mm.

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