TWM616064U - Quartz hearth sintering furnace - Google Patents

Abstract

This creation provides a quartz hearth sintering furnace, which is mainly provided with at least one set of quartz hearths in the furnace body. The furnace body can be a single sintering furnace of any type or a continuous sintering furnace; the quartz hearth includes upper and lower quartz parts. Composition, the upper quartz member is in the shape of a U, the opposite vertical inner surface has a recess, the lower quartz member is in a zigzag shape with a short upper part and a long lower part, and the upper layer is completely covered by the upper quartz member; Above, the quartz furnace can provide a clean and pollution-proof firing environment, so that the purity of the final fired product can reach the closest 100% efficiency. In addition, the quartz furnace can be formed with a protruding covering part on one of the top edges of the upper quartz part, so that when more than one quartz furnace is overlapped, the covering part can be shielded to achieve a better anti-pollution effect.

Description

Quartz hearth sintering furnace

This creation is about a new design of the internal furnace of a sintering furnace. It specifically refers to a quartz furnace sintering furnace that can provide a clean and pollution-free firing environment during sintering or heat treatment, so that the purity of the fired product is as close as 100%. By.

According to the current sintering requirements for specific electronic components (such as batteries and electronic raw materials), due to the high sintering temperature, not only the uniformity of the material during the firing process must be good, but the material even reaches close to 100% purity after firing . In other words, there can be no contamination during the sintering process.

In the prior art, a continuous sintering furnace is used to embed heating elements on the opposite upper and lower inner surfaces of the furnace to provide a perfect heat source, and a plurality of arranged round tubes (such as quartz) or Metal plates (such as aluminum oxide) to provide the fired material to be fed and sintered. However, the structural design of this kind of furnace often fails to meet the requirements. Due to the continuous high-temperature sintering action, in the case of a circular tube, the constant frictional force will cause the tube to wear and eventually break; in the case of a metal plate, it is It will cause serious oxidation of the metal plate in the furnace, and it will also be broken and damaged, making it unusable. Even this type of furnace cannot avoid the pollution of dust or impurities. Moreover, the use of round tubes and metal plates will cause uneven heating of the material. This is the biggest defect in the conventional furnace structure, and it is also the problem that this creation urgently wants to solve.

In view of this, the creator of the original sintering furnace and the structure of the furnace has the deficiencies and imperfections, through continuous research and experimentation, finally developed a brand-new original creation.

The main purpose of this creation is to provide a brand-new quartz furnace sintering furnace, which is made of high-purity quartz material to make a clean and anti-pollution novel furnace bed or channel formed by the use of the high heat resistance of quartz to facilitate burning Special materials (such as silicon carbide, aluminum oxide, gallium nitride, etc.) are prepared, and the fired product placed in the quartz furnace for sintering or heat treatment can be isolated and polluted in the firing environment due to the light penetration of the quartz High performance and uniform heating effect, and can make the final purity of the fired material reach close to 100%.

Another purpose of this creation is to provide a quartz hearth sintering furnace, by which the quartz hearth can be connected in series into a long type, which can be applied to a single furnace body and a continuous furnace body according to the needs.

In order to achieve the above purpose, the creator mainly installs at least one set of quartz furnace in the furnace of the sintering furnace. The quartz furnace includes upper and lower quartz parts. The quartz furnace is relatively upper and lower with heating The parts are covered with a heat-resistant structure, and the quartz furnace is pierced with a conveyor belt to carry the fired product, so that the fired product (such as silicon carbide, alumina, etc.) can be sintered in the pollution-proof quartz furnace Or during heat treatment, it can effectively improve the purity of the fired product.

In one embodiment, the upper quartz part of the quartz furnace is in the shape of a "", the opposite vertical inner surface has a recessed part, the lower quartz part is a monogram formed by stacking the upper part with the short and the lower part, and the upper part is covered by the The upper quartz material is completely covered to form a closed hollow channel type around it.

In one embodiment, the upper quartz member of the quartz furnace is a U-shaped top side with a protruding covering part formed on the top side, which can make it easier to overlap when more than one quartz furnace is overlapped. By the bridging and shielding effect of the covering part, a better anti-pollution effect is achieved.

In one embodiment, the sintering furnace can be any type of single sintering furnace or continuous sintering furnace.

In another embodiment, the quartz furnace may further include upper and lower quartz parts and front, rear, left, and right peripheral quartz parts. Stacked into a zigzag shape, the surrounding quartz parts are flat-plate, to form a completely enclosed hollow furnace type, suitable for a sintering furnace with a single furnace body.

(1): Sintering furnace

(2): Quartz hearth

(21): Upper quartz parts

(211): Depressed part

(212): Covering Department

(22): Lower quartz parts

(221): upper part

(222): Lower

(223): Bevel

(23): Peripheral quartz parts

(3): Heat-resistant structure

(4): Conveyor belt

The first figure is a side view of the overall structure of a preferred embodiment of the invention.

The second figure is a cross-sectional view of the sintering furnace of a preferred embodiment of this invention.

The third figure is a schematic diagram of the decomposition, combination and overlap of the quartz furnace in a preferred embodiment of this creation.

The fourth diagram is a decomposition and assembly diagram of the quartz furnace of another preferred embodiment of this creation.

The fifth figure is a schematic diagram of the appearance structure and overlap of the quartz furnace of another preferred embodiment of this creation.

The sixth figure is a schematic cross-sectional view of the quartz furnace in another preferred embodiment of this creation.

Please refer to the first figure, which discloses the overall side view of the sintering furnace of a preferred embodiment of the invention; the sintering furnace (1) is a continuous sintering furnace, and in conjunction with the cross-sectional view of the sintering furnace shown in the second figure, There is a channel composed of a quartz furnace (2) in the center of the furnace body, and heating elements (not shown in the figure) are provided above and below the quartz furnace (2), and the surrounding exterior is covered A heat-resistant structure (3) is provided, and a conveyor belt (4) is penetrated in the quartz furnace (2) to facilitate sintering and movement of fired objects in the quartz furnace (2).

The above-mentioned sintering furnace (1) can also be a single sintering furnace of any type, and a hearth composed of a quartz furnace (2) is arranged in the furnace body.

Please continue to refer to the third figure, which discloses a preferred embodiment of the decomposition and assembly diagram of the quartz furnace; the composition of the quartz furnace (2) includes: an upper quartz component (21) and a lower quartz component (22); The upper quartz material (21) is in the shape of a "U", the opposite vertical inner surface has a depression (211), and the lower quartz material (22) is formed by stacking an upper part (221) and a short lower part (222). The upper part (221) is completely covered by the upper quartz material (21) to form a closed hollow channel type; accordingly, when it is installed in a continuous sintering furnace, most quartz furnaces (2) are used both end and end Closely close together to form a long tunnel furnace.

When the quartz furnace sintering furnace of this creation is implemented, the fired product is sent into the quartz furnace (2). Since the quartz furnace (2) is made of high-purity quartz material, the melting point is above 1,600 degrees Celsius. The processing temperature of the fired product is about 1,150 degrees Celsius, so it has sufficient heat resistance and uniform heating effect. In addition, the concave portion (211) of the upper quartz member (21) relative to the vertical inner surface can enable the quartz furnace (2) to perform sintering or heat treatment in a high temperature environment, providing thermal expansion and contraction effects, so that the upper quartz The member (21) avoids deformation or displacement with the lower quartz member (22) and loses the isolation effect.

Refer to the fourth figure again, which discloses another preferred embodiment of the quartz furnace decomposition and assembly diagram. In the above-mentioned quartz furnace (2), the lower quartz component (22) can be further formed on the relatively free edge Inclined surface (223), so set at the front end of the long quartz furnace And the end will facilitate the conveying operation of the conveyor belt.

Please refer to Figure 5, which discloses a schematic diagram of the appearance structure and overlap of the quartz furnace of another preferred embodiment; the quartz furnace (2) is implemented in a continuous sintering furnace, except for most The quartz furnace (2) adopts a direct close method to lap the long strip type, and it can also be designed to form a protruding covering part (212) on a top edge of the quartz member (21) on the quartz furnace (2). As a result, the overlapping quartz furnaces can be better protected from pollution by the shielding effect of the covering part.

Finally, referring to Figure 6 again, an exploded view and a combined cross-sectional view of the quartz furnace chamber of another preferred embodiment are disclosed; the quartz furnace chamber (2) may further include upper and lower quartz parts (21, 22) and front The upper and lower quartz parts (21, 22) are formed by stacking the upper part and the lower part and the lower part in a zigzag shape. The peripheral quartz parts (23) It is a flat plate type, which is composed of a completely enclosed hollow hearth type, and is suitable for a sintering furnace with a single furnace body.

In summary, the quartz hearth sintering furnace of this creation is a brand new design. In actual use, it can indeed achieve the expected purpose and effect, which can demonstrate the practical value of this creation, and it also meets the requirements of patent application. It is proposed in accordance with the law. Application.

However, the above descriptions are only the preferred embodiments of this creation, which do not limit the scope of the creation of this creation. Therefore, all simple modifications and equivalent structural changes made by using this creation specification and schematic content should be included in the same way. Within the scope of the patent of this creation, it is combined to Chen Ming.

(2): Quartz hearth

(21): Upper quartz parts

(211): Depressed part

(22): Lower quartz parts

(221): upper part

(222): Lower

Claims (5)

A quartz furnace sintering furnace is mainly provided with at least one set of quartz furnaces in the furnace body of the sintering furnace. The quartz furnace is covered with a heat-resistant structure, and the quartz furnace is equipped with a conveyor belt that carries the fired product so that the fired product is sintered or heat-treated in the pollution-proof quartz furnace. The quartz hearth sintering furnace according to claim 1, wherein the upper quartz part of the quartz hearth is in the shape of a letter, and the inside is a relatively vertical inner surface and has a recessed part, and the lower quartz part is laminated from the upper part and the lower part to the longer part. In a zigzag shape, the upper part is completely covered by the upper quartz material to form a closed hollow channel type around it. The quartz hearth sintering furnace according to claim 1, wherein the upper quartz part of the quartz hearth has a U-shaped top side and a protruding covering part is formed on the top side, which can make it easier to lap more than one quartz hearth. In addition to the overlap, the shielding effect of the covering part can be used to achieve a better anti-pollution effect. The quartz hearth sintering furnace according to claim 1, wherein the sintering furnace can be a single sintering furnace of any type or a continuous sintering furnace. The quartz hearth sintering furnace according to claim 1, wherein the quartz hearth further includes upper and lower quartz parts and peripheral quartz parts in the front, rear, left and right directions, and the upper and lower quartz parts are composed of upper and lower quartz parts. The short lower part and the longer part are stacked to form a zigzag shape, and the surrounding quartz parts are of flat plate type to form a completely closed hollow hearth type.

Images