TWI811677B - Quartz hearth sintering furnace - Google Patents
Quartz hearth sintering furnace Download PDFInfo
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- TWI811677B TWI811677B TW110117308A TW110117308A TWI811677B TW I811677 B TWI811677 B TW I811677B TW 110117308 A TW110117308 A TW 110117308A TW 110117308 A TW110117308 A TW 110117308A TW I811677 B TWI811677 B TW I811677B
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- 239000010453 quartz Substances 0.000 title claims abstract description 109
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 109
- 238000005245 sintering Methods 0.000 title claims abstract description 43
- 239000000463 material Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 8
- 238000010304 firing Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 230000001595 contractor effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
本發明係提供一種石英爐膛燒結爐，主要在爐體內設置有至少一組石英爐膛，該爐體可為任意型式之單一燒結爐或是連續式燒結爐；該石英爐膛包括由上、下石英部材組成，該上石英部材為ㄇ字形，該相對之垂直內面具有凹陷部，該下石英部材為上短下長層疊狀之一字形，該上層被該上石英部材所完全罩覆；藉此實施上，該石英爐膛可提供乾淨且防污染之燒製環境，使最終燒製品的純度能達到最接近百分之一百的功效。又，該石英爐膛可於該上石英部之一頂邊形成有一突出之覆蓋部，可令一個以上的石英爐膛在進行搭接時，藉該覆蓋部之遮蔽，達到更好防污染效果。 The invention provides a quartz furnace sintering furnace, which is mainly provided with at least one group of quartz furnaces in the furnace body. The furnace body can be a single sintering furnace or a continuous sintering furnace of any type; the quartz furnace includes upper and lower quartz parts. Composition: the upper quartz member is in the shape of a U-shape, the opposite vertical inner surfaces have recessed portions, the lower quartz member is in the shape of a stacked Z-shape with a short top and a long bottom, and the upper layer is completely covered by the upper quartz member; thereby implementing On the other hand, the quartz furnace can provide a clean and pollution-proof firing environment, so that the purity of the final fired product can be as close as 100%. In addition, the quartz furnace can have a protruding covering portion formed on a top edge of the upper quartz portion, so that when more than one quartz furnace is overlapped, it can be shielded by the covering portion to achieve a better anti-pollution effect.
Description
本發明係關於一種燒結爐之內部爐膛的嶄新設計，特指一種要求燒結或熱處理時能提供乾淨且無污染之燒製環境，以使燒製品純度最接近百分之一百之石英爐膛燒結爐者。 The invention relates to a new design of the internal furnace of a sintering furnace, specifically a quartz furnace sintering furnace that requires a clean and pollution-free sintering environment during sintering or heat treatment so that the purity of the sintered products is as close as one hundred percent. By.
按，目前對於特定電子元件(如電池、電子原料)之燒結要求，因燒結溫度高，不僅在燒製過程令材料均勻性要良好，甚至在燒製後材料達到接近百分之一百的純度。換言之，在燒結過程中不能有任何的污染。 According to the current sintering requirements for specific electronic components (such as batteries and electronic raw materials), due to the high sintering temperature, not only must the material uniformity be good during the firing process, but the material must even reach a purity close to 100% after firing. . In other words, there cannot be any contamination during the sintering process.
習知採用連續式燒結爐係於該爐膛內的相對上、下內面埋設有發熱元件，以提供完善熱源，並在下方的發熱元件上設置有多數排列的圓管(如石英製成)或金屬板(如氧化鋁製成)，以提供燒製物送入並進行燒結。惟此種爐膛的構造設計經常無法達到要求，由於持續的高溫燒結作用下，以圓管而言，經常性的磨擦受力，會使該圓管磨損終至斷裂；以金屬板而言，則會使爐膛內金屬板氧化嚴重，同樣會有破裂損壞致無法使用，甚至這類爐膛皆無法避免灰塵或雜質的污染；再者，使用圓管及金屬板均會造成材質受熱不均勻之情形。以此即為習用爐膛結構中最大的缺失，亦為本發明所亟欲解決之難題。 It is known that continuous sintering furnaces are equipped with heating elements embedded in the upper and lower inner surfaces of the furnace to provide a complete heat source, and the heating elements below are provided with a plurality of arranged circular tubes (such as quartz) or A metal plate (e.g. made of alumina) to feed the fired product and allow it to sinter. However, the structural design of this kind of furnace often fails to meet the requirements. Due to the continuous high-temperature sintering, in the case of a round tube, the regular friction and stress will cause the round tube to wear and eventually break; in the case of a metal plate, the The metal plates in the furnace will be seriously oxidized, and they will also be cracked and damaged, making them unusable. Even this type of furnace cannot avoid contamination by dust or impurities. Furthermore, the use of round tubes and metal plates will cause uneven heating of the material. This is the biggest shortcoming in the conventional furnace structure, and it is also the problem that the present invention urgently wants to solve.
有鑑於此，本發明人乃針對既有燒結爐及爐膛構造所存在之 缺失及未盡完善處，特經不斷研究、實驗，終於開發出嶄新之本發明。 In view of this, the inventor has focused on the existing sintering furnace and furnace hearth structures. Despite the deficiencies and imperfections, a brand-new invention was finally developed through continuous research and experimentation.
本發明之主要目的，在於提供一種全新的石英爐膛燒結爐，以高純度石英材製成乾淨且防污染之新穎爐膛所形成之爐床或通道，藉由利用石英之高耐熱性，以利於燒製特定物質(如碳化矽、氧化鋁、氮化鎵等)，且使置於該石英爐膛內進行燒結或熱處理後的燒製物能在隔離污染的燒製環境下，因石英的光穿透性高而達受熱均勻效果，並能使燒製物之最終純度達到接近百分之一百的功效。 The main purpose of the present invention is to provide a new quartz hearth sintering furnace. The hearth or channel formed by a clean and pollution-proof novel furnace is made of high-purity quartz material. By utilizing the high heat resistance of quartz, it facilitates burning. Preparation of specific substances (such as silicon carbide, aluminum oxide, gallium nitride, etc.), and making the fired products placed in the quartz furnace for sintering or heat treatment can be in an isolated and polluted firing environment due to the light penetration of the quartz It has high properties and achieves uniform heating effect, and can make the final purity of the fired product reach close to 100%.
本發明之另一目的，在於提供一種石英爐膛燒結爐，藉由石英爐膛能串連搭接成一長條型式，得以適需求而運用於單一爐體以及連續式爐體內。 Another object of the present invention is to provide a quartz furnace sintering furnace, in which the quartz furnaces can be connected in series and overlapped to form a long strip, so that it can be used in a single furnace body and a continuous furnace body as required.
為達成上述目的，本發明人主要在燒結爐之本爐內設置有至少一組以上之石英爐膛，該石英爐膛包括由上、下石英部材組成，該石英爐膛相對之上、下方皆埋設有發熱件，周圍包覆有耐熱結構，並使該石英爐膛內穿設有輸送帶以承載燒製物，以使該燒製物(如碳化矽、氧化鋁等)於防污染之石英爐膛內進行燒結或熱處理時，能確實有效地提昇燒製物之純度。 In order to achieve the above object, the inventor mainly provided at least one set of quartz furnaces in the main furnace of the sintering furnace. The quartz furnaces are composed of upper and lower quartz parts. The quartz furnaces have heat-generating furnaces embedded in them both above and below. The parts are surrounded by a heat-resistant structure, and a conveyor belt is inserted through the quartz furnace to carry the fired products, so that the fired products (such as silicon carbide, alumina, etc.) can be sintered in the anti-pollution quartz furnace. Or during heat treatment, it can effectively improve the purity of the fired product.
於一實施例中，該石英爐膛之該上石英部材為ㄇ字形，該相對之垂直內面具有凹陷部，該下石英部材為由上部短下部長採層疊而成之一字形，該上部被該上石英部材所完全罩覆，以組成周圍封閉之中空通道型式。 In one embodiment, the upper quartz member of the quartz furnace is in a U-shape, and the opposite vertical inner surfaces have recessed portions. The lower quartz member is a Z-shape formed by stacking a short upper part and a long lower part, and the upper part is formed by the The upper quartz material is completely covered to form a surrounding closed hollow channel pattern.
於一實施例中，該石英爐膛之該上石英部材為ㄇ字形之一頂 邊形成有一突出之覆蓋部，可令一個以上的石英爐膛在進行搭接時，除容易搭接外，更能藉由該覆蓋部之跨接遮蔽作用，達到更好防污染效果。 In one embodiment, the upper quartz member of the quartz furnace is a U-shaped top A protruding covering part is formed on the edge, which not only facilitates overlapping of more than one quartz furnace, but also achieves a better anti-pollution effect through the bridging shielding effect of the covering part.
於一實施例中，該燒結爐可為任意型式之單一燒結爐或是連續式燒結爐。 In one embodiment, the sintering furnace can be any type of single sintering furnace or a continuous sintering furnace.
於另一實施例中，該石英爐膛更可進一步包括由上、下石英部材及前、後、左、右方向之周邊石英部材所構成，該上、下石英部材皆為由上部短下部長採層疊而成之一字形，該周邊石英部材則為平板型，以組成完全封閉之中空爐膛型式，適用於單一爐體之燒結爐。 In another embodiment, the quartz furnace may further include upper and lower quartz parts and peripheral quartz parts in the front, back, left and right directions. The upper and lower quartz parts are made of short upper parts and long lower parts. Stacked to form a zigzag shape, the surrounding quartz components are flat to form a completely enclosed hollow furnace type, suitable for sintering furnaces with a single furnace body.
(1):燒結爐 (1): Sintering furnace
(2):石英爐膛 (2):Quartz furnace
(21):上石英部材 (21): Upper quartz material
(211):凹陷部 (211): depression
(212):覆蓋部 (212): Covering Department
(22):下石英部材 (22): Lower quartz material
(221):上部 (221):upper part
(222):下部 (222):lower part
(223):斜面 (223): Inclined surface
(23):周邊石英部材 (23): Peripheral quartz materials
(3):耐熱結構 (3): Heat-resistant structure
(4):輸送帶 (4): Conveyor belt
第一圖係本發明一較佳實施例之整體結構側視圖。 The first figure is a side view of the overall structure of a preferred embodiment of the present invention.
第二圖係本發明一較佳實施例之燒結爐剖視圖。 The second figure is a cross-sectional view of a sintering furnace according to a preferred embodiment of the present invention.
第三圖係本發明一較佳實施例之石英爐膛分解、組合及搭接示意圖。 The third figure is a schematic diagram of the decomposition, assembly and overlapping of a quartz furnace according to a preferred embodiment of the present invention.
第四圖係本發明另一較佳實施例之石英爐膛分解暨組合圖。 The fourth figure is an exploded and assembled view of a quartz furnace according to another preferred embodiment of the present invention.
第五圖係本發明再一較佳實施例之石英爐膛外觀結構暨搭接示意圖。 The fifth figure is a schematic diagram of the appearance structure and overlapping of the quartz furnace according to another preferred embodiment of the present invention.
第六圖係本發明又一較佳實施例之石英爐膛分解及組合剖視示意圖。 The sixth figure is an exploded and assembled cross-sectional view of a quartz furnace according to another preferred embodiment of the present invention.
請參閱第一圖所示，係揭露本發明一較佳實施例之燒結爐整體側視圖；該燒結爐(1)為一連續式燒結爐，再配合參閱第二圖所示之燒結爐剖視圖，於爐體內部中央具有一石英爐膛(2)構成之通道，該石英爐膛(2)之上、下方皆設有發熱件(圖面未顯示)，且周圍外部再包覆有耐熱結構(3)，該石英爐膛(2)內並穿設有一輸送帶(4)，以利燒 製物在該石英爐膛(2)內進行燒結及移動。 Please refer to the first figure, which discloses an overall side view of the sintering furnace according to a preferred embodiment of the present invention; the sintering furnace (1) is a continuous sintering furnace, and refer to the cross-sectional view of the sintering furnace shown in the second figure. There is a passage composed of a quartz furnace (2) in the center of the furnace body. There are heating elements (not shown in the figure) above and below the quartz furnace (2), and the surrounding exterior is covered with a heat-resistant structure (3) , the quartz furnace (2) is also equipped with a conveyor belt (4) to facilitate burning The products are sintered and moved in the quartz furnace (2).
上述該燒結爐(1)亦可為任意型式之單一燒結爐，並在爐體內設置有一石英爐膛(2)構成之爐床。 The above-mentioned sintering furnace (1) can also be a single sintering furnace of any type, and a hearth composed of a quartz furnace (2) is provided in the furnace body.
請接續參閱第三圖所示，係揭露有一較佳實施例之石英爐膛分解及組合圖；該石英爐膛(2)之組成包括有：一上石英部材(21)及一下石英部材(22)；該上石英部材(21)為ㄇ字形，該相對之垂直內面具有一凹陷部(211)，該下石英部材(22)為由上部(221)短下部(222)長採層疊而成之一字形，該上部(221)被該上石英部材(21)所完全罩覆，以組成周圍封閉之中空通道型式；據此設置於連續式燒結爐內時，將多數的石英爐膛(2)利用首尾緊密靠合而組構成一長條狀之隧道式爐膛。 Please continue to refer to the third figure, which discloses an exploded and assembled diagram of a quartz furnace of a preferred embodiment; the quartz furnace (2) consists of: an upper quartz member (21) and a lower quartz member (22); The upper quartz member (21) is U-shaped, and the opposite vertical inner surface has a recessed portion (211). The lower quartz member (22) is formed by stacking a short upper portion (221) and a long lower portion (222). glyph, the upper part (221) is completely covered by the upper quartz member (21) to form a surrounding closed hollow channel pattern; when it is installed in a continuous sintering furnace, most of the quartz furnaces (2) are used from the beginning to the end. They are closely connected to form a long tunnel-shaped furnace.
當本發明之石英爐膛燒結爐於實施上，將燒製物送入該石英爐膛(2)內，由於該石英爐膛(2)乃採高純度石英材製成，熔點在攝氏1,600度以上，該燒製物的處理溫度約在攝氏1,150度左右，因此具有足夠耐熱性，及均勻加熱效果。另外，於該上石英部材(21)相對垂直內面之凹陷部(211)，能使該石英爐膛(2)進行燒結或熱處理時之高溫環境下，提供熱脹冷縮效用，令該上石英部材(21)避免與該下石英部材(22)產生變形或位移，而失去隔離作用。 When the quartz furnace sintering furnace of the present invention is implemented, the fired product is sent into the quartz furnace (2). Since the quartz furnace (2) is made of high-purity quartz material and the melting point is above 1,600 degrees Celsius, the The fired product is processed at a temperature of about 1,150 degrees Celsius, so it has sufficient heat resistance and a uniform heating effect. In addition, the recessed portion (211) on the relatively vertical inner surface of the upper quartz member (21) can provide a thermal expansion and contraction effect in a high-temperature environment when the quartz furnace (2) is sintering or heat-treated, so that the upper quartz The member (21) avoids deformation or displacement with the lower quartz member (22), thereby losing the isolation function.
再參閱第四圖所示，係揭露有另一較佳實施例之石英爐膛分解及組合圖，上述之石英爐膛(2)，其中的下石英部材(22)，可進一步在相對地自由邊形成斜面(223)，如此設置於長條狀石英爐膛的前端及末端，將利於輸送帶之輸送運轉。 Refer again to the fourth figure, which discloses an exploded and assembled view of a quartz furnace of another preferred embodiment. In the quartz furnace (2) mentioned above, the lower quartz member (22) can be further formed on the opposite free edge. The inclined plane (223), thus arranged at the front and end of the strip-shaped quartz furnace, will facilitate the conveying operation of the conveyor belt.
請參閱第五圖所示，係揭露有再一較佳實施例之石英爐膛外觀結構及搭接示意圖；該石英爐膛(2)在實施上，當應用於連續式燒結爐時，除了將多數的石英爐膛(2)採直接緊靠方式搭接成長條型式之外，更可設計於該石英爐膛(2)之上石英部材(21)的一頂邊形成有一突出之覆蓋部(212)，如此一來，便可令相互搭接之石英爐膛，更能藉由該覆蓋部之遮蔽作用，達到更好防污染效果。 Please refer to the fifth figure, which discloses the appearance structure and overlapping schematic diagram of the quartz furnace (2) of another preferred embodiment; in implementation, when the quartz furnace (2) is applied to a continuous sintering furnace, in addition to most of the In addition to directly overlapping the quartz furnace (2) into a long strip, a protruding covering portion (212) can be formed on a top edge of the quartz member (21) above the quartz furnace (2), so that In this way, the overlapping quartz furnaces can achieve better anti-pollution effects through the shielding effect of the covering part.
最後，再參閱第六圖所示，係揭露又一較佳實施例之石英爐膛分解圖及組合剖視圖；該石英爐膛(2)更可進一步包括由上、下石英部材(21、22)及前、後、左、右方向之周邊石英部材(23)所構成，該上、下石英部材(21、22)皆為由上部短下部長採層疊而成之一字形，該周邊石英部材(23)則為平板型，以組成完全封閉之中空爐膛型式，適用於單一爐體之燒結爐。 Finally, refer to the sixth figure, which discloses an exploded view and an assembled cross-sectional view of a quartz furnace of another preferred embodiment; the quartz furnace (2) may further include upper and lower quartz parts (21, 22) and a front , the peripheral quartz parts (23) in the rear, left and right directions. The upper and lower quartz parts (21, 22) are all in a zigzag shape formed by stacking short upper parts and long lower parts. The peripheral quartz parts (23) It is a flat plate type, forming a completely enclosed hollow furnace type, suitable for sintering furnaces with a single furnace body.
綜上所述，本發明之石英爐膛燒結爐為全新設計，於實際使用時，確實能達到預期之目的與功效，得以彰顯本發明之實用價值，亦符合專利之申請要件，爰依法具文提出申請。 To sum up, the quartz hearth sintering furnace of the present invention is a completely new design. When actually used, it can indeed achieve the expected purpose and effect, demonstrating the practical value of the present invention. It also meets the requirements for patent application. It is submitted in accordance with the law. Apply.
惟，以上所述僅為本發明之較佳實施例而已，非因此侷限本發明之專利範圍，故舉凡運用本發明說明書及圖式內容所為之簡易修飾及等效結構變化，均應同理包含於本發明之專利範圍內，合予陳明。 However, the above descriptions are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, any simple modifications and equivalent structural changes made by using the description and drawings of the present invention should be included in the same manner. Within the patent scope of the present invention, it is stated clearly.
(2):石英爐膛 (2):Quartz furnace
(21):上石英部材 (21): Upper quartz material
(211):凹陷部 (211): depression
(22):下石英部材 (22): Lower quartz material
(221):上部 (221):upper part
(222):下部 (222):lower part
Claims (3)
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| TW110117308A TWI811677B (en) | 2021-05-13 | 2021-05-13 | Quartz hearth sintering furnace |
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| TW110117308A TWI811677B (en) | 2021-05-13 | 2021-05-13 | Quartz hearth sintering furnace |
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| TW202244447A TW202244447A (en) | 2022-11-16 |
| TWI811677B true TWI811677B (en) | 2023-08-11 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM290987U (en) * | 2005-12-14 | 2006-05-21 | Ho Hsin Kiln Equipment Co Ltd | Improved kiln structure |
| CN103673586B (en) * | 2013-12-24 | 2015-03-04 | 中南大学 | Rotary sintering furnace |
| CN106643125A (en) * | 2015-10-30 | 2017-05-10 | 上海太阳能工程技术研究中心有限公司 | Conductive silver paste sintering furnace |
| CN206772043U (en) * | 2017-04-20 | 2017-12-19 | 常州聚和新材料股份有限公司 | A kind of quartz sintering dividing plate |
| TWM602197U (en) * | 2020-06-12 | 2020-10-01 | 厚星窯業設備有限公司 | Improved kiln structure |
| CN112050637A (en) * | 2020-07-29 | 2020-12-08 | 株洲红亚电热设备有限公司 | Energy-saving induction heating furnace |
| TWM616064U (en) * | 2021-05-13 | 2021-08-21 | 厚星窯業設備有限公司 | Quartz hearth sintering furnace |
-
2021
- 2021-05-13 TW TW110117308A patent/TWI811677B/en active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM290987U (en) * | 2005-12-14 | 2006-05-21 | Ho Hsin Kiln Equipment Co Ltd | Improved kiln structure |
| CN103673586B (en) * | 2013-12-24 | 2015-03-04 | 中南大学 | Rotary sintering furnace |
| CN106643125A (en) * | 2015-10-30 | 2017-05-10 | 上海太阳能工程技术研究中心有限公司 | Conductive silver paste sintering furnace |
| CN206772043U (en) * | 2017-04-20 | 2017-12-19 | 常州聚和新材料股份有限公司 | A kind of quartz sintering dividing plate |
| TWM602197U (en) * | 2020-06-12 | 2020-10-01 | 厚星窯業設備有限公司 | Improved kiln structure |
| CN112050637A (en) * | 2020-07-29 | 2020-12-08 | 株洲红亚电热设备有限公司 | Energy-saving induction heating furnace |
| TWM616064U (en) * | 2021-05-13 | 2021-08-21 | 厚星窯業設備有限公司 | Quartz hearth sintering furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202244447A (en) | 2022-11-16 |
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