TWM614877U - Powder atomic layer deposition device for preventing powder from sticking to inner wall - Google Patents

Abstract

The invention provides a powder atomic layer deposition device for preventing powder from sticking to the inner wall, which mainly includes a vacuum chamber, a shaft sealing device, a driving unit and a knocking device. The driving unit is connected to the rear wall of the vacuum chamber through a shaft sealing device, and drives the vacuum chamber to rotate. The shaft sealing device includes an outer tube body and an inner tube body, wherein the inner tube body is arranged in the accommodating space of the outer tube body. The percussion device includes a wheel body and a percussion unit, wherein the wheel body is connected with a shaft seal device or a vacuum cavity. At least one protrusion is provided on the wheel surface of the wheel body, and the percussion unit contacts the protrusion and the wheel surface of the wheel body. When the wheel body rotates, the percussion unit will move from the protrusion to the wheel surface and strike the wheel surface or the vacuum cavity to prevent the powder in the reaction space from sticking to the inner surface or inner wall of the vacuum cavity .

Description

Powder atomic layer deposition device for preventing powder from sticking to inner wall

The invention relates to a powder atomic layer deposition device that prevents powder from sticking to the inner wall. It includes a knocking device adjacent to the vacuum chamber. When the vacuum chamber rotates, the knocking device is driven to knock the vacuum chamber to avoid reaction. The powder in the space adheres to the inner surface or inner wall of the vacuum chamber.

Nanoparticles are generally defined as particles smaller than 100 nanometers in at least one dimension. Nanoparticles and macroscopic substances have completely different physical and chemical properties. Generally speaking, the physical properties of macroscopic matter have nothing to do with its size, but nanoparticle is not the case. Nanoparticles have potential applications in the fields of biomedicine, optics, and electronics.

Quantum dots (Quantum Dot) are semiconductor nano-particles. The currently studied semiconductor materials are II-VI materials, such as ZnS, CdS, CdSe, etc., of which CdSe has attracted the most attention. The size of quantum dots is usually between 2 and 50 nanometers. After the quantum dots are irradiated with ultraviolet light, the electrons in the quantum dots absorb energy and transition from the valence band to the conduction band. When the excited electron returns from the conduction band to the valence band, it releases energy through light emission.

The energy gap of a quantum dot is related to the size. The larger the size of the quantum dot, the smaller the energy gap, and will emit light with a longer wavelength after irradiation. The smaller the size of the quantum dot, the larger the energy gap, and the wavelength will be emitted after irradiation. Shorter light. For example, quantum dots of 5 to 6 nanometers will emit orange or red light, while quantum dots of 2 to 3 nanometers will emit blue or green light. Of course, the light color depends on the material composition of the quantum dots.

Light-emitting diodes (LEDs) using quantum dots can produce light close to a continuous spectrum, and at the same time have high color rendering properties, and help to improve the luminous quality of the light-emitting diodes. In addition, the wavelength of the emitted light can be adjusted by changing the size of the quantum dots, making the quantum dots the focus of the development of a new generation of light-emitting devices and displays.

Although quantum dots have the above-mentioned advantages and characteristics, they are prone to agglomeration during the application or manufacturing process. In addition, quantum dots have high surface activity and are easy to react with air and moisture, thereby shortening the lifespan of quantum dots.

Specifically, when the quantum dots are made into a sealant for light-emitting diodes, agglomeration effect may occur, which reduces the optical performance of the quantum dots. In addition, after quantum dots are made into the sealant of light-emitting diodes, external oxygen or moisture may still pass through the sealant and contact the surface of the quantum dots, causing the quantum dots to oxidize and affect the quantum dots and light-emitting diodes. The effectiveness or service life of the product. Surface defects and dangling bonds of quantum dots may also cause nonradiative recombination, which also affects the luminous efficiency of quantum dots.

At present, the industry mainly uses atomic layer deposition (ALD) to form a nanometer-thick film on the surface of quantum dots, or form a multilayer film on the surface of quantum dots to form a quantum well structure.

Atomic layer deposition can form a thin film with uniform thickness on the substrate, and can effectively control the thickness of the thin film. In theory, it is also suitable for three-dimensional quantum dots. When the quantum dots are placed on the carrier plate, there will be contact points between adjacent quantum dots, so that the precursors of atomic layer deposition cannot contact these contact points, and it is impossible to form a uniform thickness on the surface of all nano particles. film.

In order to solve the above-mentioned problems faced by the prior art, the present invention proposes a powder atomic layer deposition device that prevents powder from sticking to the inner wall. A knocking device is mainly provided on the vacuum chamber or the shaft sealing device, and the knocking device is used to knock The vacuum chamber causes the inner surface or inner wall of the vacuum chamber to vibrate to shake off the powder adhering to the inner surface or inner wall of the vacuum chamber during the deposition process.

An object of the present invention is to provide a powder atomic layer deposition device that prevents powder from sticking to the inner wall, which mainly includes a driving unit, a shaft sealing device, a vacuum chamber and a knocking device, wherein the driving unit passes through the shaft sealing device Connect and drive the vacuum chamber to rotate.

The percussion device includes a wheel body and a percussion unit, wherein the wheel body is connected to the shaft sealing device or the vacuum cavity, and at least one protrusion is provided on the wheel surface of the wheel body. The percussion unit contacts the protrusion and the wheel surface of the wheel body. During the rotation of the wheel body, the percussion unit will move from the protrusion to the wheel surface, and strike the wheel surface or the vacuum cavity of the wheel body to make a vacuum. The cavity is vibrated to remove the powder adhering to the inner surface or inner wall of the vacuum cavity.

An object of the present invention is to provide a powder atomic layer deposition device that prevents powder from sticking to the inner wall, which mainly includes a driving unit, a shaft sealing device, a vacuum chamber and a knocking device, wherein the driving unit passes through the shaft sealing device The vacuum chamber is connected, and the percussion device is arranged on the shaft seal device or the vacuum chamber. When the drive unit drives the vacuum chamber to rotate through the shaft seal device, the wheel of the percussion device will rotate along with it, and the percussion part of the percussion unit will move back and forth between the protrusion of the wheel and the surface of the wheel, and knock Beat the wheel surface or vacuum cavity of the wheel body.

Specifically, the tapping device provided by the present invention does not require an additional motor, so that the tapping part of the tapping unit can continuously tap the vacuum cavity and/or wheel body, which can simplify the structure and manufacture of the powder atomic layer deposition device Cost, while achieving the purpose of removing sticky powder.

The percussion device of the present invention includes a wheel body and a percussion unit, wherein the percussion unit includes a percussion part and a fixed part. The striking part is connected to the fixing part through at least one guiding unit, so that the striking part can move along the guiding unit relative to the fixing part and strike the wheel surface and/or the vacuum cavity of the wheel body.

In order to achieve the above-mentioned purpose, the present invention proposes a powder atomic layer deposition device that prevents powder from sticking to the inner wall, which includes: a vacuum chamber, including a reaction space for accommodating a plurality of powders; and a shaft sealing device connected to the vacuum chamber The body includes an outer tube body and an inner tube body, wherein the outer tube body has an accommodating space for accommodating the inner tube body; a driving unit connected to the shaft sealing device, and the vacuum chamber is driven by the shaft sealing device Rotation; at least one gas extraction line, located in the inner tube, fluidly connected to the reaction space of the vacuum chamber, and used to extract a gas in the reaction space; at least one gas inlet line, located in the inner tube, fluidly connected to the reaction space of the vacuum chamber Space, and used to deliver a precursor gas to the reaction space; and a percussion device, including: a wheel body connected to the shaft sealing device or the vacuum chamber, and rotating with the shaft sealing device, wherein a wheel surface is arranged on the wheel body At least one protrusion, the protrusion includes a first surface and a second surface, one side of the first surface and the second surface is connected to the wheel surface of the wheel body, and the other end of the first surface and the second surface are connected to each other , And the included angle between the first surface and the tread of the wheel body is greater than 90 degrees; and a percussion unit, adjacent to the wheel body, wherein the percussion unit will be on the convex part of the wheel body and the wheel surface when the wheel body rotates. Displacement between them, and knock the wheel surface or the vacuum cavity.

In the powder atomic layer deposition device for preventing powder from sticking to the inner wall, the knocking unit includes a knocking part and a fixing part. The knocking part is connected to the fixing part and used for displacement relative to the fixing part and the wheel body.

In the powder atomic layer deposition device for preventing powder from adhering to the inner wall, the percussion unit includes an elastic unit connected to the percussion part, and the elastic unit provides the percussion unit with a restoring force toward the wheel body.

In the powder atomic layer deposition device for preventing powder from sticking to the inner wall, the percussion unit includes a buffer part connected to the percussion part, and the percussion part strikes the vacuum cavity or the wheel body through the buffer part.

In the powder atomic layer deposition device for preventing powder from sticking to the inner wall, the angle between the second surface of the protrusion and the tread of the wheel body is less than 90 degrees.

In the powder atomic layer deposition device for preventing powder from sticking to the inner wall, the gas inlet pipeline includes at least one non-reactive gas delivery pipeline and at least one reactive gas delivery pipeline, and the non-reactive gas delivery pipeline is used to deliver a non-reactive gas To the reaction space, the powder in the reaction space is blown, and the reaction gas delivery pipeline is used to deliver the precursor gas to the reaction space.

In the powder atomic layer deposition device for preventing powder from sticking to the inner wall, the non-reactive gas conveying pipeline includes an extended pipeline, and the extended pipeline is located in the reaction space.

The powder atomic layer deposition device for preventing powder from sticking to the inner wall includes a filter unit located at one end of the inner tube body connected to the reaction space, the suction line is fluidly connected to the reaction space through the filter unit, and the extension line passes through the filter unit.

In the powder atomic layer deposition device for preventing powder from sticking to the inner wall, the inner tube extends from the accommodating space of the outer tube to the reaction space of the vacuum chamber, and a protruding tube is formed in the reaction space.

In the powder atomic layer deposition device for preventing powder from sticking to the inner wall, the vacuum chamber includes a front wall, a rear wall and a side wall, the front wall faces the rear wall, and the front wall is connected to the rear wall via the side wall, and A reaction space is formed between the front wall, the rear wall and the side wall, and the percussion device is adjacent to the rear wall of the vacuum chamber.

Please refer to Fig. 1, Fig. 2 and Fig. 3, which are respectively a front perspective view, a cross-sectional schematic diagram of an embodiment of a new type of powder atomic layer deposition device for preventing powder from adhering to the inner wall, and a schematic cross-sectional view of the powder atomic layer preventing powder from adhering to the inner wall. A schematic cross-sectional view of an embodiment of the shaft sealing device of the deposition device. As shown in the figure, the powder atomic layer deposition device 10 for preventing powder from adhering to the inner wall mainly includes a vacuum chamber 11, a shaft sealing device 13, a driving unit 15 and a knocking device 14, wherein the driving unit 15 passes through the shaft seal The device 13 is connected to the vacuum chamber 11 and drives the vacuum chamber 11 to rotate.

In an embodiment of the present invention, the vacuum chamber 11 includes a front wall 111, a rear wall 113 and a side wall 115, wherein the front wall 111 faces the rear wall 113, and the side wall 115 is located between the front wall 111 and the rear wall 113 , And connect the front wall 111 and the rear wall 113 to form a reaction space 12 between the front wall 111, the rear wall 113 and the side wall 115.

The reaction space 12 is used to accommodate a plurality of powders 121, wherein the powder 121 can be a quantum dot (Quantum Dot), such as ZnS, CdS, CdSe and other II-VI semiconductor materials, and the thin film formed on the quantum dot can be two oxides Aluminum (Al2O3). In an embodiment of the present invention, the vacuum chamber 11 may include a cover 117 and a cavity 119, wherein the cover 117 is used to cover and connect the cavity 119 to form a reaction space 12 therebetween. The cover plate 117 may be the front wall 111 of the vacuum chamber 11, and the chamber 119 is formed by the rear wall 113 and the side wall 115 of the vacuum chamber 11.

The shaft sealing device 13 is connected to the rear wall 113 of the vacuum chamber 11 and includes an outer tube body 131 and an inner tube body 133. The outer tube body 131 has an accommodation space 132, and the inner tube body 133 has a connection space 134. For example, the outer tube body 131 and the inner tube body 133 may be hollow cylindrical bodies. The accommodating space 132 of the outer tube body 131 is used for accommodating the inner tube body 133, wherein the outer tube body 131 and the inner tube body 133 are coaxially arranged. The shaft sealing device 13 may be a common shaft seal or a magnetic fluid shaft seal, and is mainly used to isolate the reaction space 12 of the vacuum chamber 11 from the external space, so as to maintain the vacuum of the reaction space 12.

The driving unit 15 is connected to one end of the shaft sealing device 13, and the other end of the shaft sealing device 13 is connected to the rear wall 113 of the vacuum chamber 11. The driving unit 15 drives the vacuum chamber 11 to rotate through the shaft sealing device 13, for example, the driving unit 15 is a motor that connects the rear wall 113 of the vacuum chamber 11 through the outer tube body 131, and drives the vacuum chamber 11 to rotate through the outer tube body 131. In addition, the driving unit 15 is not connected to the inner tube body 133, so when the driving unit 15 drives the outer tube body 131 and the vacuum chamber 11 to rotate, the inner tube body 133 will not rotate with it.

The driving unit 15 can drive the outer tube 131 and the vacuum chamber 11 to continuously rotate in the same direction, for example, to continuously rotate clockwise or counterclockwise. When the vacuum chamber 11 rotates, the powder 121 in the reaction space 12 is stirred, so that the powder 121 is evenly heated and comes into contact with the precursor or non-reactive gas.

The connecting space 134 of the inner tube body 133 can be provided with at least one gas extraction line 171, at least one gas inlet line 173, at least one non-reactive gas delivery line 175, a heater 177 and/or a temperature sensing unit 179, as shown in FIG. 2 and Figure 3.

The gas extraction line 171 is fluidly connected to the reaction space 12 of the vacuum chamber 11 and is used to extract the gas in the reaction space 12 so that the reaction space 12 is in a vacuum state for the atomic layer deposition process. Specifically, the pumping line 171 can be connected to a pump, and the gas in the reaction space 12 can be pumped out through the pump.

The gas inlet line 173 is fluidly connected to the reaction space 12 of the vacuum chamber 11 and is used to transport a precursor and/or a non-reactive gas to the reaction space 12, where the non-reactive gas may be an inert gas such as nitrogen or argon. In practical applications, the gas inlet line 173 may transport a carrier gas and precursors into the reaction space 12 together. In addition, the gas inlet line 173 can also transport the non-reactive gas into the reaction space 12 and pump the gas through the gas extraction line 171 to remove the precursors in the reaction space 12. In an embodiment of the present invention, the gas inlet pipeline 173 can be connected to a plurality of branch pipelines, and different precursors can be sequentially delivered into the reaction space 12 through each branch pipeline.

The gas inlet line 173 can increase the flow rate of the non-reactive gas delivered to the reaction space 12, and blow the powder 121 in the reaction space 12 through the non-reactive gas, so that the powder 121 is driven by the non-reactive gas and diffuses into the reaction space 12 Various areas.

In an embodiment of the present invention, the gas inlet pipeline 173 may include at least one non-reactive gas delivery pipeline 175 and at least one reactive gas delivery pipeline. The non-reactive gas delivery pipeline 175 is fluidly connected to the reaction space 12 of the vacuum chamber 11 and is used to deliver a non-reactive gas to the reaction space 12, and the reactive gas delivery pipeline is used to deliver the precursor gas to the reaction space 12. The non-reactive gas is used to blow the powder 121 in the reaction space 12 and cooperate with the driving unit 15 to drive the vacuum chamber 11 to rotate, which can effectively and uniformly stir the powder 121 in the reaction space 12 and deposit thickness on the surface of each powder 121 Uniform film. The reaction gas delivery pipeline is fluidly connected to the reaction space 12 and is used to deliver the precursor to the reaction space 12.

The vacuum chamber 11 is driven to rotate through the drive unit 15 via the shaft sealing device 13, and the non-reactive gas is transported to the reaction space 12 through the gas inlet line 173, although the powder 121 in the reaction space 12 can be stirred. However, in practical applications, there is still a certain amount of powder 121 sticking to the inner surface or inner wall of the vacuum chamber 11, so that the precursor conveyed to the reaction space 12 cannot contact the powder 121 stuck on the vacuum chamber 11 Therefore, it is impossible to form a uniform thickness thin film on the surface of all the powder 121.

In order to solve the above-mentioned and the problems faced by the prior art, the present invention proposes to install a percussion device 14 on the vacuum chamber 11 or the shaft seal device 13, wherein the percussion device 14 includes a wheel body 141 and a percussion unit 143. The percussion unit 143 contacts the wheel body 141. The wheel body 141 is connected to the vacuum chamber 11 or the shaft sealing device 13 and rotates with the shaft sealing device 13 and/or the vacuum chamber 11, wherein the wheel body 141 can be screwed to the rear wall 113 or side wall of the vacuum chamber 11 115, or the wheel body 141 is sleeved on the shaft sealing device 13.

At least one raised portion 145 is provided on the wheel surface 1411 of the wheel body 141, as shown in FIGS. 4 and 5, wherein the raised portion 145 can protrude toward the radially outer side of the wheel body 141, and is shaped like the wheel body 141. The center of the circle is inclined in a spiral shape. In an embodiment of the present invention, the protrusion 145 of the wheel body 141 includes a first surface 1451 and a second surface 1453, wherein one side of the first surface 1451 and the second surface 1453 is connected to the wheel surface 1411 of the wheel body 141 , And the other side of the first surface 1451 and the second surface 1453 are connected to each other. The angle between the first surface 1451 and the second surface 1453 is less than 90 degrees, the angle between the first surface 1451 and the wheel surface 1411 is greater than 90 degrees, and the angle between the second surface 1453 and the wheel surface 1411 is less than 90 degrees .

The percussion unit 143 is adjacent to the wheel body 141. When the wheel body 141 rotates, the percussion unit 143 will move between the protrusion 145 of the wheel body 141 and the wheel surface 1411, and strike the wheel surface 1411 or 1411 of the wheel body 141. Vacuum chamber 11.

Specifically, the knocking unit 143 includes a knocking portion 1431 and a fixing portion 1433. The knocking portion 1431 is connected to the fixing portion 1433 and can be displaced relative to the fixing portion 1433. The striking part 1431 can be connected to the fixing part 1433 through at least one guiding unit 1435. For example, the guiding unit 1435 can be a guide rail or a guide groove, so that the striking part 1431 can move along the guiding unit 1435 relative to the fixing part 1433.

The striking part 1431 of the striking unit 143 contacts the periphery or outer surface of the wheel body 141, and the striking part 1431 will repeatedly shift between the protrusion 145 and the wheel surface 1411 when the wheel body 141 rotates. Specifically, when the wheel body 141 rotates with the vacuum chamber 11 and/or the shaft seal device 13, the knocking portion 1431 moves along the wheel surface 1411 to the first surface 1451 of the protrusion 145, and follows the first surface 1451 of the protrusion 145. The surface 1451 is displaced relative to the fixed portion 1433 in a direction away from the wheel body 141. When the percussion portion 1431 is displaced to the boundary between the first surface 1451 and the second surface 1453, the percussion portion 1431 will be displaced from the protrusion 145 toward the wheel surface 1411 and strike the wheel surface 1411 and/or vacuum of the wheel body 141 Cavity 11. In an embodiment of the present invention, the percussion portion 1431 can be displaced from the protrusion 145 to the wheel surface 1411 along the radial direction of the wheel body 141, wherein when the wheel body 141 rotates relative to the percussion unit 143, the percussion unit The knocking portion 1431 of 143 does not contact the second surface 1453 of the protrusion 145.

In an embodiment of the present invention, the percussion unit 143 can be arranged on the upper half of the wheel body 141. When the wheel body 141 rotates relative to the percussion unit 143, the percussion portion 1431 will be subjected to the action of gravity. 145 is displaced or dropped in the direction of the wheel surface 1411. In practical applications, the striking part 1431 can be connected to a heavy object, or the weight of the striking part 1431 can be increased to increase the force of the striking part 1431 to strike the wheel body 141 and/or the vacuum cavity 11.

In another embodiment of the present invention, the percussion portion 1431 can be connected to an elastic unit 1437. For example, the percussion portion 1431 can be connected to the fixed portion 1433 through the elastic unit 1437, and the restoring force of the elastic unit 1437 drives the percussion portion 1431 from the convex The raised portion 145 is displaced in the direction of the wheel surface 1411.

When the striking part 1431 strikes the wheel body 141 and/or the side wall 115 of the vacuum chamber 11, the vacuum chamber 11 will vibrate, causing the adhered powder 121 to leave the inner surface or inner wall of the vacuum chamber 11 and scatter In the reaction space 12 of the vacuum chamber 11. The arrangement of the driving unit 15, the air inlet pipe 173 and the percussion device 14 can effectively solve the problem of the powder 121 sticking to the vacuum chamber 11 and facilitate the formation of a thin film of uniform thickness on the surface of most of the powder 121.

In an embodiment of the present invention, a buffer portion 147 may be provided on the knocking portion 1431, as shown in FIG. 6, wherein the knocking portion 1431 knocks the wheel body 141 and/or the side wall 115 of the vacuum chamber 11 through the buffer portion 147 In order to avoid damage to the vacuum chamber 11 and/or the knocking device 14 during the knocking process, for example, the buffer part 147 may be a rubber pad.

The percussion device 14 of the present invention is adjacent to the side wall 115 or the rear wall 113 of the vacuum chamber 11, and will not interfere with the movement of disassembling or installing the vacuum chamber 11 and/or the cover plate 117, and is beneficial to simplify the prevention of powder contamination. The design and configuration of the powder atomic layer deposition device 10 adhered to the inner wall.

In addition, the percussion device 14 of the present invention does not need to be provided with a driving device, such as a motor, only the wheel body 141 is set on the vacuum chamber 11 or the shaft sealing device 13, and then the shaft sealing device 13 and the vacuum chamber are driven by the driving unit 15 11 rotates, the knocking portion 1431 will move back and forth between the protrusion 145 and the wheel surface 1411, and continue to knock the wheel body 141 and/or the vacuum cavity 11.

Both the gas inlet line 173 and the non-reactive gas delivery line 175 of the powder atomic layer deposition apparatus 10 that prevent powder from sticking to the inner wall are used to deliver the non-reactive gas to the reaction space 12, and the non-reactive gas delivered by the gas inlet line 173 is The flow rate is small and is mainly used to remove the precursors in the reaction space 12, while the flow rate of the non-reactive gas transported by the non-reactive gas delivery line 175 is relatively large and is mainly used to blow the powder 121 in the reaction space 12.

Specifically, the time points at which the gas inlet line 173 and the non-reactive gas conveying line 175 convey the non-reactive gas to the reaction space 12 are different. Therefore, in actual applications, the non-reactive gas conveying line 175 may not be provided, and the gas inlet line 173 may be adjusted in time. The flow of non-reactive gas delivered at different time points. When the precursors in the reaction space 12 are to be removed, the flow rate of the non-reactive gas delivered by the gas inlet line 173 to the reaction space 12 can be reduced, and when the powder 121 in the reaction space 12 is to be blown, the gas inlet line 173 is added to deliver The flow rate of the non-reactive gas to the reaction space 12.

When the driving unit 15 of the present invention drives the outer tube body 131 and the vacuum chamber 11 to rotate, the inner tube body 133 and its internal air extraction pipeline 171, intake pipeline 173 and/or non-reactive gas delivery pipeline 175 will not rotate with it , It is beneficial to improve the stability of the non-reactive gas and/or precursor that the gas inlet pipe 173 and/or the non-reactive gas delivery pipe 175 transports to the reaction space 12.

The heater 177 is used to heat the connection space 134 and the inner tube body 133, and heat the gas extraction line 171, the gas inlet line 173, and/or the non-reactive gas delivery line 175 in the inner tube body 133 to increase the gas extraction line 171 and the gas inlet The temperature of the gas in the gas pipeline 173 and/or the non-reactive gas delivery pipeline 175. The temperature sensing unit 179 is used to measure the temperature of the heater 177 or the connecting space 134 to know the working state of the heater 177.

One end of the inner tube 133 connected to the reaction space 12 may be provided with a filter unit 139, wherein the suction line 171, the gas inlet line 173, and/or the non-reactive gas delivery line 175 in the inner tube 133 are fluidly connected to the vacuum chamber via the filter unit 139体11的反应空间12。 Body 11 of the reaction space 12.

The gas extraction line 171 is connected to the reaction space 12 through the filter unit 139, which can prevent the powder 121 in the reaction space 12 from being drawn out when the gas extraction line 171 extracts the gas in the reaction space 12, which can reduce the loss of the powder 121.

In an embodiment of the present invention, as shown in FIG. 6, the gas inlet line 173 and/or the non-reactive gas delivery line 175 can be extended from the connecting space 134 of the inner tube body 133 of the shaft sealing device 13 to the reaction space of the vacuum chamber 11 Within 12, the gas inlet line 173 and/or the non-reactive gas delivery line 175 extending to the reaction space 12 can be defined as an extension line 172. The extension line 172 may pass through the filter unit 139 and extend to the reaction space 12. In addition, a heating device 16 may be disposed inside, outside or around the vacuum chamber 11, wherein the heating device 16 is adjacent to or in contact with the side wall 115 of the vacuum chamber 11 and is used to heat the vacuum chamber 11 and the reaction space 12.

In an embodiment of the present invention, the gas inlet pipe 173, the non-reactive gas delivery pipe 175 and/or the extension pipe 172 located in the reaction space 12 extend toward the front wall 111 of the vacuum chamber 11. In different embodiments, the gas inlet pipe 173, the non-reactive gas delivery pipe 175, and/or the extension pipe 172 located in the reaction space 12 can also be bent toward the side wall 115 and/or the rear wall 113 of the vacuum chamber 11 and extend. In addition, the extension pipeline 172 may include at least one air outlet 1721, wherein the air outlet 1721 faces the front wall 111 and/or the side wall 115 of the vacuum chamber.

In another embodiment of the present invention, the extension pipeline 172 can continuously transport the non-reactive gas to the reaction space 12 and can adjust the flow rate of the non-reactive gas. Specifically, the non-reactive gas output mode of the extension line 172 may include agitation mode and general mode. In the agitation mode, the flow rate of the non-reactive gas output by the extension line 172 is relatively large, and the output non-reactive gas can agitate the reaction space 12的粉121。 The powder 121. In the general mode, the flow rate of the non-reactive gas output from the extension line 172 is small, and may not agitate the powder 121 in the reaction space 12, but the non-reactive gas output in the general mode will form a positive pressure at the air outlet 1721 of the extension line 172 , To prevent the powder 121 from entering the extension pipeline 172 from the air outlet 1721.

In an embodiment of the present invention, the powder atomic layer deposition device 10 for preventing powder from adhering to the inner wall may include a carrying portion 191 for carrying the driving unit 15, the vacuum chamber 11, the shaft sealing device 13, and/or percussion装置14。 Device 14. For example, the supporting portion 191 is connected to the driving unit 15, the vacuum chamber 11 is connected to the supporting portion 191 through at least one first supporting frame 193, and the percussion device 14 is connected to the supporting portion 191 through at least one second supporting frame 195.

In an embodiment of the present invention, as shown in FIG. 7, the inner tube 133 of the shaft sealing device 13 can extend from the accommodating space 132 of the outer tube 131 to the reaction space 12 of the vacuum chamber 11, so that the inner tube 133 is in A protruding pipe portion 130 is formed in the reaction space 12.

In practical application, the wheel body 141 of the percussion device 14 can be arranged on the rear wall 113 of the vacuum chamber 11, and the percussion portion 1431 can be extended from the wheel body 141 to the side wall 115 of the vacuum cavity 11, so that the percussion portion 1431 The wheel surface 1411 of the wheel body 141 and the side wall 115 of the vacuum chamber 11 can be knocked.

The above is only one of the preferred embodiments of the present invention, and is not intended to limit the scope of implementation of the present invention, that is, all the equivalent changes and changes in the shape, structure, characteristics and spirit described in the scope of the patent application of the present invention Modifications should be included in the scope of the patent application for this new model.

10: Powder atomic layer deposition device to prevent powder from sticking to the inner wall 11: Vacuum chamber 111: front wall 113: Back Wall 115: sidewall 117: cover 119: Cavity 12: reaction space 121: powder 13: Shaft seal device 130: protruding tube 131: Outer tube body 132: accommodating space 133: inner tube body 134: Connecting Space 139: filter unit 14: Percussion device 141: Wheel Center 1411: wheel noodle 143: Percussion unit 1431: Percussion Department 1433: fixed part 1435: Guidance Unit 1437: Elastic Unit 145: Bulge 1451: first surface 1453: second surface 147: Buffer 15: drive unit 16: heating device 171: Extraction line 172: Extension pipeline 1721: air outlet 173: intake line 175: Non-reactive gas pipeline 177: heater 179: temperature sensing unit 191: Carrying Department 193: The first support frame 195: second support frame

[Figure 1] is a perspective view of the front side of an embodiment of a new type of powder atomic layer deposition device for preventing powder from sticking to the inner wall.

[Figure 2] is a schematic cross-sectional view of an embodiment of a new type of powder atomic layer deposition device for preventing powder from sticking to the inner wall.

[Figure 3] is a schematic cross-sectional view of an embodiment of a shaft sealing device of a new type of powder atomic layer deposition device that prevents powder from sticking to the inner wall.

[Fig. 4] is a perspective view of the back side of an embodiment of a new type of powder atomic layer deposition device for preventing powder from sticking to the inner wall.

[Figure 5] is a schematic side view of an embodiment of a knocking device of a new type of powder atomic layer deposition device for preventing powder from sticking to the inner wall.

[Figure 6] is a schematic cross-sectional view of another embodiment of the new type of powder atomic layer deposition device for preventing powder from sticking to the inner wall.

[Figure 7] is a schematic cross-sectional view of another embodiment of the new powder atomic layer deposition device for preventing powder from sticking to the inner wall.

10: Powder atomic layer deposition device to prevent powder from sticking to the inner wall

11: Vacuum chamber

117: cover

119: Cavity

13: Shaft seal device

14: Percussion device

141: Wheel Center

143: Percussion unit

1431: Percussion Department

1433: fixed part

1435: Guidance Unit

1437: Elastic Unit

15: drive unit

191: Carrying Department

Claims (10)

A powder atomic layer deposition device for preventing powder from sticking to the inner wall, including: A vacuum chamber, including a reaction space for accommodating a plurality of powders; A shaft sealing device connected to the vacuum chamber and comprising an outer tube body and an inner tube body, wherein the outer tube body has an accommodating space for accommodating the inner tube body; A driving unit connected to the shaft sealing device, and driving the vacuum chamber to rotate through the shaft sealing device; At least one gas extraction pipeline located in the inner tube, fluidly connected to the reaction space of the vacuum chamber, and used to extract a gas in the reaction space; At least one gas inlet line located in the inner tube, fluidly connected to the reaction space of the vacuum chamber, and used to deliver a precursor gas to the reaction space; and A percussion device, including: A wheel body is connected to the shaft sealing device or the vacuum chamber and rotates with the shaft sealing device, wherein at least one protrusion is provided on a wheel surface of the wheel body, and the protrusion includes a first surface and a first surface. Two surfaces, one side of the first surface and the second surface is connected to the wheel surface of the wheel body, and the other end of the first surface and the second surface are connected to each other, and the first surface and the wheel body The angle between the wheels is greater than 90 degrees; and A percussion unit adjacent to the wheel body, wherein when the wheel body rotates, the percussion unit will move between the protrusion of the wheel body and the wheel surface, and strike the wheel surface of the wheel body Or the vacuum chamber. The powder atomic layer deposition device for preventing powder from sticking to the inner wall according to claim 1, wherein the knocking unit includes a knocking part and a fixing part, and the knocking part is connected to the fixing part and used to be opposite to the The fixed part and the wheel body are displaced. The powder atomic layer deposition device for preventing powder from sticking to the inner wall according to claim 2, wherein the percussion unit includes an elastic unit connected to the percussion part, and the elastic unit provides the percussion unit facing the wheel body One resilience. The powder atomic layer deposition device for preventing powder from sticking to the inner wall according to claim 2, wherein the knocking unit includes a buffer part connected to the knocking part, and the knocking part knocks the vacuum cavity through the buffering part Or the wheel body. The powder atomic layer deposition device for preventing powder from adhering to the inner wall according to claim 1, wherein the angle between the second surface of the protrusion and the wheel surface of the wheel body is less than 90 degrees. The powder atomic layer deposition device for preventing powder from adhering to the inner wall according to claim 1, wherein the gas inlet pipeline includes at least one non-reactive gas delivery pipeline and at least one reactive gas delivery pipeline, and the non-reactive gas delivery pipeline is used for A non-reactive gas is delivered to the reaction space to blow the powder in the reaction space, and the reaction gas delivery pipeline is used to deliver the precursor gas to the reaction space. The powder atomic layer deposition device for preventing powder from sticking to the inner wall according to claim 6, wherein the non-reactive gas delivery pipeline includes an extended pipeline, and the extended pipeline is located in the reaction space. The powder atomic layer deposition device for preventing powder from sticking to the inner wall according to claim 7, comprising a filter unit located at one end of the inner tube body connected to the reaction space, and the suction line is fluidly connected to the reaction space via the filter unit , And the extension pipeline passes through the filter unit. The powder atomic layer deposition device for preventing powder from sticking to the inner wall according to claim 1, wherein the inner tube extends from the accommodating space of the outer tube to the reaction space of the vacuum chamber, and in the A protruding tube is formed in the reaction space. The powder atomic layer deposition device for preventing powder from sticking to the inner wall according to claim 1, wherein the vacuum chamber includes a front wall, a rear wall and a side wall, the front wall faces the rear wall, and the front wall The wall is connected to the rear wall via the side wall, and the reaction space is formed between the front wall, the rear wall and the side wall, and the percussion device is adjacent to the rear wall of the vacuum chamber.

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