CN215887223U

CN215887223U - Atomic layer deposition apparatus for blowing powder

Info

Publication number: CN215887223U
Application number: CN202121336604.5U
Authority: CN
Inventors: 林俊成; 张容华; 古家诚
Original assignee: Xintianhong Xiamen Technology Co ltd
Current assignee: Xintianhong Xiamen Technology Co ltd
Priority date: 2021-06-16
Filing date: 2021-06-16
Publication date: 2022-02-22
Anticipated expiration: 2031-06-16

Abstract

The utility model provides an atomic layer deposition device for blowing powder, which mainly comprises a vacuum cavity, a shaft seal device and a driving unit, wherein the driving unit drives the vacuum cavity to rotate through the shaft seal device. The shaft seal device comprises an outer tube body and an inner tube body, wherein the inner tube body extends from the accommodating space of the outer tube body to the reaction space of the vacuum cavity body, and a protruding tube part is formed in the reaction space. The at least one air suction pipeline and the at least one air inlet pipeline are positioned in the inner pipe body, wherein the air inlet pipeline penetrates through the pipe wall protruding out of the pipe wall and extends to the reaction space from the inner pipe body. The extension pipe wall includes a plurality of air outlets facing the surface of the lower half of the reaction space and is used for conveying a non-reaction gas to the reaction space so as to blow the powder in the reaction space.

Description

Atomic layer deposition apparatus for blowing powder

Technical Field

The utility model relates to an atomic layer deposition device for blowing powder, wherein at least one extension pipeline extends into a reaction space of a vacuum cavity from a shaft seal device, and non-reaction gas is conveyed to the reaction space through a plurality of air outlets of the extension pipeline so as to blow the powder in the reaction space.

Background

Nanoparticles (nanoparticles) are generally defined as particles smaller than 100 nm in at least one dimension, which are physically and chemically distinct from macroscopic materials. In general, the physical properties of macroscopic materials are independent of their size, but nanoparticles are not, and thus have potential applications in biomedical, optical, and electronic fields.

Quantum dots (Quantum dots) are nanoparticles of semiconductors, and the currently studied semiconductor materials are II-VI materials, such as ZnS, CdS, CdSe, etc., of which CdSe is the most drawing attention. The size of the quantum dot is usually between 2 and 50 nm, and after the quantum dot is irradiated by ultraviolet rays, electrons in the quantum dot absorb energy and transition from a valence band to a conduction band. The excited electrons release energy by luminescence when they return from the conduction band to the valence band.

The energy gap of the quantum dot is related to the size of the quantum dot, the larger the size of the quantum dot is, the smaller the energy gap is, the longer wavelength light can be emitted after irradiation, and the smaller the size of the quantum dot is, the larger the energy gap is, the shorter wavelength light can be emitted after irradiation. For example, 5 to 6 nm quantum dots emit orange or red light, while 2 to 3 nm quantum dots emit blue or green light, depending on the material composition of the quantum dots.

Light generated by Light Emitting Diodes (LEDs) employing quantum dots can approach a continuous spectrum while having high color rendering properties and facilitating improvement of the light emitting quality of the LEDs. In addition, the wavelength of the emitted light can be adjusted by changing the size of the quantum dots, so that the quantum dots become the development focus of a new generation of light-emitting devices and displays.

Although the quantum dots have the advantages and characteristics, the quantum dots are easy to agglomerate in the application or manufacturing process. In addition, the quantum dots have higher surface activity and are easy to react with air and water vapor, so that the service life of the quantum dots is shortened.

In particular, when quantum dots are made into the sealant of the light emitting diode, an agglomeration effect may be generated, thereby reducing the optical performance of the quantum dots. In addition, after the quantum dots are manufactured into the sealant of the light emitting diode, external oxygen or moisture may still penetrate through the sealant to contact the surfaces of the quantum dots, so that the quantum dots are oxidized, and the efficiency or the service life of the quantum dots and the light emitting diode is affected. Surface defects and dangling bonds (dangling bonds) of the quantum dots can also cause non-radiative recombination (non-radiative recombination), which also affects the luminous efficiency of the quantum dots.

At present, the quantum well structure is formed by forming a thin film with a thickness of nanometer on the surface of the quantum dot through Atomic Layer Deposition (ALD), or forming a plurality of thin films on the surface of the quantum dot.

The atomic layer deposition can form a thin film with uniform thickness on the substrate, can effectively control the thickness of the thin film, and is theoretically suitable for three-dimensional quantum dots. When the quantum dots are placed on the carrier plate, contact points exist between adjacent quantum dots, so that precursors for atomic layer deposition cannot contact the contact points, and a thin film with uniform thickness cannot be formed on the surfaces of all the nano-particles.

SUMMERY OF THE UTILITY MODEL

In order to solve the above problems of the prior art, the present invention provides an atomic layer deposition apparatus for blowing powder, which mainly extends at least one gas inlet line from a shaft sealing device to a reaction space of a vacuum chamber and forms an extension line in the reaction space. The extension pipeline comprises a plurality of air outlets facing to one surface of the reaction space, and non-reaction gas is output through the plurality of air outlets of the extension pipeline to blow the powder in the reaction space, so that a film with uniform thickness is formed on the surface of each powder.

An objective of the present invention is to provide an atomic layer deposition apparatus for blowing powder, which mainly includes a driving unit, a shaft seal device and a vacuum chamber, wherein the driving unit is connected to the vacuum chamber through the shaft seal device and drives the vacuum chamber to rotate. The shaft seal device comprises an outer pipe body and an inner pipe body, wherein the inner pipe body is arranged in an accommodating space of the outer pipe body, and at least one air suction pipeline and at least one air inlet pipeline are arranged in the inner pipe body. The gas extraction line is used for extracting gas in the vacuum cavity, and the gas inlet line is used for conveying a non-reaction gas and/or a precursor gas into the reaction space.

The filtering unit is arranged at one side of the inner pipe body connected with the reaction space, and the air inlet pipeline penetrates through the filtering unit and extends into the reaction space from the inner pipe body so as to form an extending pipeline in the reaction space. The extension pipeline is close to the surface of the lower half part of the reaction space and comprises a plurality of air outlets, wherein the extension pipeline blows non-reaction gas to the surface of the lower half part of the reaction space through the plurality of air outlets so as to blow powder in the reaction space.

An objective of the present invention is to provide an atomic layer deposition apparatus for blowing powder, which mainly includes a driving unit, a shaft seal device and a vacuum chamber, wherein the driving unit is connected to the vacuum chamber through the shaft seal device and drives the vacuum chamber to rotate. The shaft seal device comprises an outer tube and an inner tube, wherein the inner tube extends from an accommodating space of the outer tube to a reaction space of the vacuum cavity and forms a protruding tube part in the reaction space.

The at least one air suction pipeline and the at least one air inlet pipeline are arranged in the inner pipe body, wherein the air inlet pipeline extends into the reaction space through a pipe wall of the protruding pipe part, and an extending pipeline is formed in the reaction space. The extension pipeline is close to the surface of the lower half part of the reaction space and comprises a plurality of air outlets, wherein the extension pipeline blows non-reaction gas to the surface of the lower half part of the reaction space through the plurality of air outlets so as to blow powder in the reaction space.

An objective of the present invention is to provide an atomic layer deposition apparatus for blowing powder, in which an inner tube of a shaft sealing apparatus extends from an accommodating space of an outer tube to a reaction space of a vacuum chamber, and a protruding tube is formed in the reaction space. The pipe wall of the protruding pipe part is provided with a plurality of air outlets, wherein the air outlets face to the surface of the lower half part of the vacuum cavity. The gas inlet pipeline in the inner tube body does not extend to the reaction space, but is in fluid connection with the plurality of air outlets on the tube wall of the inner tube body, and blows the non-reaction gas towards the surface of the lower half part of the reaction space through the plurality of air outlets, so as to be beneficial to blowing the powder in the reaction space.

In order to achieve the above object, the present invention provides an atomic layer deposition apparatus for blowing powder, comprising: a vacuum chamber including a reaction space for accommodating a plurality of powders; a shaft sealing device, which comprises an outer tube and an inner tube, wherein the outer tube has a containing space for containing the inner tube, the inner tube extends from the containing space of the outer tube to the reaction space of the vacuum cavity, and a protruding tube is formed in the reaction space; the driving unit is connected with the vacuum cavity through the outer pipe body of the shaft sealing device and drives the vacuum cavity to rotate through the outer pipe body; at least one gas extraction pipeline positioned in the inner pipe body, is in fluid connection with the reaction space of the vacuum cavity and is used for extracting gas in the reaction space; and at least one gas inlet pipeline which penetrates through a pipe wall of the protruding pipe part, extends from the inner pipe body into the reaction space and forms an extension pipeline in the reaction space, wherein the extension pipeline comprises a plurality of air outlets facing one side surface of the reaction space, and the extension pipeline blows a non-reaction gas out from the plurality of air outlets towards the direction of the side surface of the reaction space so as to blow the powder in the reaction space.

The utility model provides another atomic layer deposition apparatus for blowing powder, comprising: a vacuum chamber including a reaction space for accommodating a plurality of powders; a shaft sealing device, which comprises an outer tube and an inner tube, wherein the outer tube is provided with a containing space for containing the inner tube; the filtering unit is positioned on one side of the inner pipe body connected with the reaction space; the driving unit is connected with the vacuum cavity through the outer pipe body of the shaft sealing device and drives the vacuum cavity to rotate through the outer pipe body; at least one gas extraction line positioned in the inner tube body, fluidly connected to the reaction space of the vacuum chamber through the filter unit, and used for extracting a gas in the reaction space; and at least one air inlet pipeline which is positioned in the inner pipe body, passes through the filtering unit, extends from the inner pipe body to the reaction space and forms an extension pipeline in the reaction space, wherein the extension pipeline comprises a plurality of air outlets facing one side surface of the reaction space, and the extension pipeline blows a non-reaction gas in the direction of the side surface of the reaction space through the plurality of air outlets so as to blow the powder in the reaction space.

The present invention also provides another atomic layer deposition apparatus for blowing powder, comprising: a vacuum chamber including a reaction space for accommodating a plurality of powders; a shaft sealing device, which comprises an outer tube and an inner tube, wherein the outer tube has a containing space for containing the inner tube, the inner tube extends from the containing space of the outer tube to the reaction space of the vacuum chamber, and a protruding tube is formed in the reaction space, the protruding tube comprises a plurality of air outlets, penetrates through a tube wall of the protruding tube, and faces to one side of the reaction space; the driving unit is connected with the vacuum cavity through the outer pipe body of the shaft sealing device and drives the vacuum cavity to rotate through the outer pipe body; at least one gas extraction pipeline positioned in the inner pipe body, is in fluid connection with the reaction space of the vacuum cavity and is used for extracting gas in the reaction space; and at least one air inlet pipeline which is positioned in the inner pipe body and the protruding pipe part, is in fluid connection with the plurality of air outlets and blows a non-reaction gas towards the side surface of the reaction space through the plurality of air outlets so as to blow the powder in the reaction space.

The atomic layer deposition device for blowing the powder is characterized in that a plurality of air outlets of the extension pipeline face the side face of the lower half part of the reaction space.

The atomic layer deposition device for blowing the powder is characterized in that the reaction space is a columnar body and comprises two bottom surfaces and a side surface, the side surface is connected with the two bottom surfaces, and the extension pipeline extends towards the bottom surface and the side surface of the reaction space.

The atomic layer deposition device for blowing the powder comprises at least one non-reactive gas delivery line, wherein the non-reactive gas delivery line extends from the inner pipe body to the reaction space and forms an extension line.

The atomic layer deposition device for blowing the powder comprises a filter unit positioned at one side of the inner tube body connected with the reaction space.

The atomic layer deposition device for blowing the powder comprises an outer tube body, an inner tube body, a filter unit and a vacuum cavity body, wherein the inner tube body extends from the accommodating space of the outer tube body to the reaction space of the vacuum cavity body, a protruding tube part is formed in the reaction space, and the filter unit is positioned on one side of the protruding tube part, which is connected with the reaction space.

The utility model has the beneficial effects that: a novel atomic layer deposition device for blowing powder is provided, which mainly extends at least one gas inlet pipeline from a shaft seal device to a reaction space of a vacuum cavity and forms an extension pipeline in the reaction space. The extension pipeline comprises a plurality of air outlets facing to one surface of the reaction space, and non-reaction gas is output through the plurality of air outlets of the extension pipeline to blow the powder in the reaction space, so that a film with uniform thickness is formed on the surface of each powder.

Drawings

FIG. 1 is a schematic perspective view of an atomic layer deposition apparatus for blowing powder according to an embodiment of the utility model.

FIG. 2 is a schematic cross-sectional view of an atomic layer deposition apparatus for blowing powder according to an embodiment of the utility model.

FIG. 3 is a schematic cross-sectional view of a shaft sealing device of an atomic layer deposition apparatus for blowing powder according to an embodiment of the present invention.

FIG. 4 is a schematic cross-sectional view of an atomic layer deposition apparatus for blowing powder according to another embodiment of the utility model.

FIG. 5 is a schematic cross-sectional view of an atomic layer deposition apparatus for blowing powder according to another embodiment of the utility model.

FIG. 6 is a schematic cross-sectional view of an atomic layer deposition apparatus for blowing powder according to another embodiment of the utility model.

FIG. 7 is a schematic cross-sectional view of an atomic layer deposition apparatus for blowing powder according to another embodiment of the utility model.

Description of reference numerals:

10-an atomic layer deposition device to blow the powder; 11-vacuum chamber; 111-a cover plate; 1111-inner surface; 113-a cavity; 115-monitor wafer; 12-a reaction space; 121-powder; 122-a bottom surface; 124-side; 13-a shaft seal device; 130-a protruding tube portion; 131-an outer body; 132-a containing space; 133-an inner tube; 134-a connection space; 139-a filtration unit; 14-a gear; 15-a drive unit; 16-a heating device; 171-a suction line; 172-extension line; 1721-air outlet; 173-an air intake line; 175-non-reactive gas delivery line; 177-a heater; 179-temperature sensing unit; 191-a carrier plate; 193-fixed mount; 195-a connecting shaft.

Detailed Description

Referring to fig. 1, fig. 2 and fig. 3, a schematic perspective view, a schematic cross-sectional view and a schematic cross-sectional view of a shaft sealing device of an atomic layer deposition apparatus for blowing powder according to an embodiment of the utility model are respectively shown. As shown in the figure, the ald apparatus 10 for blowing powder mainly includes a vacuum chamber 11, a shaft seal device 13 and a driving unit 15, wherein the driving unit 15 is connected to the vacuum chamber 11 through the shaft seal device 13 and drives the vacuum chamber 11 to rotate.

The vacuum chamber 11 has a reaction space 12 for accommodating a plurality of powders 121, wherein the powders 121 may be Quantum dots (Quantum dots), such as ZnS, CdS, CdSe, and other II-VI semiconductor materials, and the thin film formed on the Quantum dots may be aluminum oxide (Al2O 3). The vacuum chamber 11 may include a cover 111 and a chamber 113, wherein an inner surface 1111 of the cover 111 covers the chamber 113 and forms a reaction space 12 therebetween.

In an embodiment of the present invention, a monitor wafer 115 may be disposed on the inner surface 1111 of the cover plate 111, and the monitor wafer 115 is located in the reaction space 12 when the cover plate 111 covers the chamber 113. When performing atomic layer deposition in the reaction space 12, a thin film is formed on the surface of the monitor wafer 115. In practical applications, the film thickness on the surface of the wafer 115 and the film thickness on the surface of the powder 121 may be further measured and monitored, and the relationship between the two may be calculated. The film thickness on the surface of the wafer 115 may then be monitored by metrology to convert to a film thickness on the surface of the powder 121.

The shaft sealing device 13 includes an outer tube 131 and an inner tube 133, wherein the outer tube 131 has a receiving space 132, and the inner tube 133 has a connecting space 134, for example, the outer tube 131 and the inner tube 133 may be hollow cylinders. The accommodating space 132 of the outer tube 131 is used for accommodating the inner tube 133, wherein the outer tube 131 and the inner tube 133 are coaxially disposed. The shaft seal device 13 can be a common shaft seal or a magnetic fluid shaft seal, and is mainly used to isolate the reaction space 12 of the vacuum chamber 11 from the external space to maintain the vacuum of the reaction space 12.

The driving unit 15 is connected to one end of the shaft sealing device 13 and drives the vacuum chamber 11 to rotate through the shaft sealing device 13, for example, the outer tube 131 is connected to the vacuum chamber 11 and drives the vacuum chamber 11 to rotate through the outer tube 131. In addition, the driving unit 15 is not connected to the inner tube 133, so that the inner tube 133 does not rotate when the driving unit 15 drives the outer tube 131 and the vacuum chamber 11 to rotate.

The driving unit 15 can drive the outer tube 131 and the vacuum chamber 11 to rotate continuously in the same direction, for example, clockwise or counterclockwise. In various embodiments, the driving unit 15 can drive the outer tube 131 and the vacuum chamber 11 to rotate clockwise by a specific angle and then rotate counterclockwise by a specific angle, for example, the specific angle can be 360 degrees. The vacuum chamber 11 stirs the powder 121 in the reaction space 12 while rotating, so that the powder 121 is uniformly heated and contacts with the precursor or the non-reactive gas.

In an embodiment of the utility model, the driving unit 15 can be a motor, and is connected to the outer tube 131 through at least one gear 14, and drives the outer tube 131 and the vacuum chamber 11 to rotate relative to the inner tube 133 through the gear 14.

At least one pumping line 171, at least one gas inlet line 173, at least one non-reactive gas delivery line 175, a heater 177 and/or a temperature sensing unit 179 may be disposed in the connection space 134 of the inner tube 133, as shown in fig. 2 and 3.

The gas pumping line 171 is fluidly connected to the reaction space 12 of the vacuum chamber 11 and is used for pumping out the gas in the reaction space 12, so that the reaction space 12 is in a vacuum state for performing the atomic layer deposition process. Specifically, the gas exhaust line 171 may be connected to a pump, and the gas in the reaction space 12 is exhausted by the pump.

The gas inlet line 173 is fluidly connected to the reaction space 12 of the vacuum chamber 11 and is used for delivering a precursor or a non-reactive gas to the reaction space 12, wherein the non-reactive gas may be an inert gas such as nitrogen or argon. For example, the gas inlet line 173 may be connected to a precursor storage tank and a non-reactive gas storage tank through a valve set and deliver the precursor into the reaction space 12 through the valve set so that the precursor deposits on the surface of the powder 121. In practice, the gas inlet line 173 may deliver a carrier gas (carrier gas) and the precursor into the reaction space 12. Non-reactive gases are then delivered into reaction space 12 through a set of valves and pumped through pumping line 171 to remove the precursors from reaction space 12. In one embodiment of the present invention, the gas inlet line 173 may be connected to a plurality of branch lines, and may sequentially deliver different precursors into the reaction space 12 through each branch line.

The gas inlet line 173 may increase the flow rate of the non-reactive gas supplied to the reaction space 12 and blow the powder 121 in the reaction space 12 by the non-reactive gas, so that the powder 121 is diffused to various regions of the reaction space 12 by the non-reactive gas.

In one embodiment of the present invention, the gas inlet line 173 may include at least one non-reactive gas delivery line 175 fluidly connected to the reaction space 12 of the vacuum chamber 11 and configured to deliver a non-reactive gas to the reaction space 12, for example, the non-reactive gas delivery line 175 may be connected to a nitrogen storage tank through a valve set and deliver nitrogen to the reaction space 12 through the valve set. The non-reactive gas is used to blow the powder 121 in the reaction space 12, and the driving unit 15 is used to drive the vacuum chamber 11 to rotate, so as to effectively and uniformly stir the powder 121 in the reaction space 12 and deposit a thin film with uniform thickness on the surface of each powder 121.

The gas inlet line 173 and the non-reactive gas delivery line 175 of the ald apparatus 10 for blowing powder are used to deliver non-reactive gas to the reaction space 12, wherein the gas inlet line 173 delivers a smaller flow of non-reactive gas to primarily remove the precursor in the reaction space 12, while the gas delivery line 175 delivers a larger flow of non-reactive gas to primarily blow the powder 121 in the reaction space 12.

Specifically, the gas inlet line 173 and the non-reactive gas transfer line 175 may transfer the non-reactive gas to the reaction space 12 at different time points, so that the non-reactive gas transfer line 175 may not be provided in practical applications, and the flow rate of the non-reactive gas transferred by the gas inlet line 173 at different time points may be adjusted. When the precursor in the reaction space 12 is to be removed, the flow rate of the non-reactive gas delivered to the reaction space 12 by the gas inlet line 173 is reduced, and when the powder 121 in the reaction space 12 is to be blown, the flow rate of the non-reactive gas delivered to the reaction space 12 by the gas inlet line 173 is increased.

When the driving unit 15 of the present invention drives the outer tube 131 and the vacuum chamber 11 to rotate, the inner tube 133, the pumping line 171, the gas inlet line 173, and/or the non-reactive gas delivery line 175 therein do not rotate, which is beneficial to improving the stability of the non-reactive gas and/or precursor delivered to the reaction space 12 by the gas inlet line 173 and/or the non-reactive gas delivery line 175.

The heater 177 heats the connecting space 134 and the inner tube 133, and heats the pumping line 171, the gas inlet line 173 and/or the non-reactive gas transporting line 175 in the inner tube 133 through the heater 177 to increase the temperature of the gas in the pumping line 171, the gas inlet line 173 and/or the non-reactive gas transporting line 175. For example, the temperature of the non-reactive gas and/or precursor delivered to the reaction space 12 by the gas inlet line 173 may be increased, and the temperature of the non-reactive gas delivered to the reaction space 12 by the non-reactive gas delivery line 175 may be increased. So that the temperature of the reaction space 12 is not substantially reduced or changed when the non-reactive gas and/or the precursor enters the reaction space 12. In addition, the temperature of the heater 177 or the connection space 134 can be measured by the temperature sensing unit 179 to know the operating state of the heater 177. Of course, another heating device 16 is usually disposed inside, outside or around the vacuum chamber 11, as shown in FIG. 4, wherein the heating device 16 is adjacent to or in contact with the vacuum chamber 11 and is used to heat the vacuum chamber 11 and the reaction space 12.

In the embodiment of the present invention, the gas inlet line 173 and/or the non-reactive gas delivery line 175 extends from the inner tube 133 of the shaft sealing device 13 to the reaction space 12 of the vacuum chamber 11 and extends toward a surface of the reaction space 12. For example, the gas inlet line 173 and/or the non-reactive gas delivery line 175 extend from the connecting space 134 of the inner body 133 to the reaction space 12 of the vacuum body 11, wherein the gas inlet line 173 and/or the non-reactive gas delivery line 175 extending to the reaction space 12 may be defined as an extension line 172.

In one embodiment of the present invention, the reaction space 12 may be a cylindrical body and includes two bottom surfaces 122 and at least one side surface 124, wherein the side surface 124 connects the two bottom surfaces 122. The extension line 172 in the reaction space 12 extends toward the bottom 122 and the side 124 of the reaction space 12, for example, a portion of the extension line 172 is closer to the side 124 of the lower half of the reaction space 12.

The extension pipe 172 may include a plurality of air outlets 1721, wherein the air outlets 1721 face a surface of the lower portion of the reaction space 12. For example, the extension line 172 may blow the non-reactive gas toward the side 124 of the lower half of the reaction space 12 through a plurality of outlets 1721, or blow the non-reactive gas in a direction radially outward of the vacuum chamber 11.

The extension pipe 172 of the present invention has a plurality of air outlets 1721, and the air outlets 1721 can blow the non-reactive gas and/or the reactive gas toward the powder 121 in the reaction space 12 in a similar spraying manner, so as to uniformly lift the powder 121 in the reaction space 12.

In the embodiment of the present invention, a filter unit 139 may be disposed at a side of the inner tube 133 near or connected to the reaction space 12, wherein the gas pumping line 171 in the inner tube 133 is fluidly connected to the reaction space 12 of the vacuum chamber 11 through the filter unit 139, and the gas inlet line 173 and/or the non-reactive gas transporting line 175 in the inner tube 133 passes through the filter unit 139 and forms an extended line 172 in the reaction space 12, as shown in fig. 2. By the arrangement of the filter unit 139, it is possible to prevent the powder 121 in the reaction space 12 from being lost by collectively drawing out the powder 121 when the gas in the reaction space 12 is drawn out by the gas-drawing line 171.

In one embodiment of the present invention, the extension line 172 has an L-shaped or stepped appearance and includes three segments and two inflection angles, wherein the inflection angles are about 90 degrees. The first segment of the extension line 172 is connected to the gas inlet line 173 and/or the non-reactive gas delivery line 175 in the inner pipe 133, and extends toward the cover plate 111 or the bottom surface 122 of the reaction space 12. A second section of the extension line 172 connects the first section with a turning angle between the second section and the first section, and the second section extends in the direction of the side 124 of the reaction space 12. The third section of the extension line 172 connects the second sections and extends in the direction of the bottom surface 122 or the cover plate 111 of the reaction space 12. Of course, the extension line 172 having three segments and two turning angles is only an embodiment of the present invention and is not limited by the scope of the present invention.

Specifically, in the embodiment of the utility model, the extension line 172 is disposed in the reaction space 12, and the extension line 172 having the air outlet 1721 is close to the powder 121 located at the lower half of the reaction space 12, wherein the air outlet 1721 blows air towards the powder 121 and the side surface 124 of the lower half of the reaction space 12 to lift the powder 121 in the reaction space 12.

In an embodiment of the utility model, as shown in fig. 4, the inner tube 133 extends from the accommodating space 132 of the outer tube 131 to the reaction space 12 of the vacuum chamber 11, and forms a protruding tube 130 in the reaction space 12. The gas inlet line 173 and/or the non-reactive gas delivery line 175 passes through the inner tube 133 and/or the wall of the protruding tube 130 in the reaction space 12, extends from the inner tube 133 into the reaction space 12, and forms an extension line 172 in the reaction space 12. In addition, a plurality of air outlets 1721 are formed on the side surface 124 of the extension pipe 172 near the lower half of the reaction space 12.

In another embodiment of the present invention, as shown in fig. 5, the gas inlet line 173 and/or the non-reactive gas transporting line 175 may not extend from the connecting space 134 of the inner pipe 133 into the reaction space 12. In other words, the extension pipe 172 is not disposed in the reaction space 12 of the chamber 11, but a plurality of air outlets 1331 are disposed on the inner tube 133 and/or the tube wall of the protruding tube 130 near the lower half of the vacuum chamber 12, wherein the air outlets pass through the tube wall of the protruding tube 130 and face a surface or side 124 of the lower half of the reaction space 12.

The gas extraction line 171, the gas inlet line 173, the non-reactive gas delivery line 175, the heater 177 and/or the temperature sensing unit 179 extend into the protruding tube portion 130, wherein the gas inlet line 173 or the non-reactive gas delivery line 175 is fluidly connected to a gas outlet 1331 located on the wall of the protruding tube portion 130 or the inner tube 133. Specifically, the air outlet 1331 provided on the pipe wall of the protruding pipe portion 130 or the inner pipe 133 is directed toward the side 124 of the lower half of the reaction space 12, so that the air inlet line 173 or the non-reactive gas delivery line 175 can blow the non-reactive gas toward the side 124 of the lower half of the reaction space 12 through the air outlet 1331 and blow the powder 121 in the reaction space 12 with the non-reactive gas. In an embodiment of the present invention, the gas inlet line 173 or the non-reactive gas delivery line 175 may be integrated into the inner surface of the inner tube 133 and connected to the gas outlet 1331 formed on the inner tube 133.

In another embodiment of the present invention, as shown in fig. 6, the inner tube 133 extends from the accommodating space 132 of the outer tube 131 into the reaction space 12, and a protruding tube 130 is disposed in the reaction space 12 of the chamber 11. A filter unit 139 may be disposed at one side of the protruding tube portion 130 connected to the reaction space 12, and a gas inlet line 173 and/or a non-reactive gas feeding line 175 passes through the filter unit 139, extends from the inner tube 133 into the reaction space 12, and forms an extension line 172 in the reaction space 12. In addition, a plurality of air outlets 1721 may be disposed on the pipe wall of the extension pipe 172 near the side 124 of the lower half of the reaction space 12, and the non-reactive gas is blown out toward the side 124 of the lower half of the reaction space 12 through the air outlets 1721.

In practical applications, the height of the air outlet 1721 of the extension line 172 can be adjusted, or the amount of the powder 121 in the reaction space 12 can be controlled, so that the powder 121 in the reaction space 12 does not cover the air outlet 1721 of the extension line 172 when the vacuum chamber 11 is standing and does not rotate, thereby reducing the loss of the powder 121. In addition, another filter unit may be disposed at the air outlet 1721 of the extension line 172 to further reduce the loss of the powder 121.

In another embodiment of the present invention, the extension line 172 may continuously supply the non-reactive gas to the reaction space 12, and may adjust the flow rate of the non-reactive gas. Specifically, the mode in which the extension line 172 outputs the non-reactive gas may include an agitation mode in which the flow rate of the non-reactive gas output from the extension line 172 is large and the powder 121 in the reaction space 12 may be agitated by the output non-reactive gas, and a general mode. The flow rate of the non-reactive gas output from the extension line 172 in the normal mode is small, and the powder 121 in the reaction space 12 may not be agitated, but the non-reactive gas output in the normal mode forms a positive pressure at the air outlet 1721 of the extension line 172 to prevent the powder 121 from entering the extension line 172 through the air outlet 1721.

In an embodiment of the present invention, the ald apparatus 10 for blowing powder may also include a carrier 191 and at least one fixing frame 193, wherein the carrier 191 may be a plate for carrying the driving unit 15, the vacuum chamber 11 and the shaft sealing device 13. For example, the carrier plate 191 is connected to the driving unit 15, and the sealing device 13 and the vacuum chamber 11 are connected by the driving unit 15. In addition, the shaft seal device 13 and/or the vacuum chamber 11 can also be connected to the bearing plate 191 through at least one support frame to improve the stability of the connection.

The bearing plate 191 may be connected to the fixing frame 193 through at least one connecting shaft 195, wherein the number of the fixing frames 193 may be two, and the two fixing frames are respectively disposed at two sides of the bearing plate 191. The bearing plate 191 can rotate relative to the fixing frame 193 by taking the shaft 195 as an axis to change the elevation angles of the driving unit 15, the shaft sealing device 13 and the vacuum chamber 11, so as to form a film with uniform thickness on the surface of each powder 121.

In one embodiment of the present invention, as shown in FIG. 7, the gas inlet line 173 and/or the non-reactive gas delivery line 175 extends from the inner tube 133 of the shaft sealing device 13 to the reaction space 12 of the vacuum chamber 11, and an extension line 172 is formed in the reaction space 12, wherein the extension line 172 extends toward the bottom surface 122 or the cover plate 111 of the vacuum chamber 11. At least one air outlet 1721 is disposed on the extension line 172, wherein the air outlet 1721 faces the side 124 or the bottom 122 of the vacuum chamber 11 or the cover 111 to blow the powder 121 in the reaction space 12.

The utility model has the advantages that:

a novel atomic layer deposition device for blowing powder is provided, which mainly extends at least one gas inlet pipeline from a shaft seal device to a reaction space of a vacuum cavity and forms an extension pipeline in the reaction space. The extension pipeline comprises a plurality of air outlets facing to one surface of the reaction space, and non-reaction gas is output through the plurality of air outlets of the extension pipeline to blow the powder in the reaction space, so that a film with uniform thickness is formed on the surface of each powder.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, i.e., all equivalent variations and modifications in the shape, structure, characteristics and spirit of the present invention described in the claims should be included in the scope of the present invention.

Claims

1. An atomic layer deposition apparatus for blowing a powder, comprising:

a vacuum chamber including a reaction space for accommodating a plurality of powders;

a shaft sealing device, including an outer tube and an inner tube, wherein the outer tube has a receiving space for receiving the inner tube, the inner tube extends from the receiving space of the outer tube to the reaction space of the vacuum chamber, and a protruding tube is formed in the reaction space;

a driving unit, which is connected with the vacuum cavity through the outer tube of the shaft seal device and drives the vacuum cavity to rotate through the outer tube;

at least one gas extraction line positioned in the inner tube body, fluidly connected to the reaction space of the vacuum chamber, and used for extracting a gas in the reaction space; and

at least one gas inlet pipeline, which passes through a pipe wall of the protruding pipe part, extends from the inner pipe body to the reaction space, and forms an extension pipeline in the reaction space, wherein the extension pipeline comprises a plurality of air outlets facing a side surface of the reaction space, and the extension pipeline blows a non-reaction gas from the plurality of air outlets towards the side surface of the reaction space to blow the powder in the reaction space.

2. The atomic layer deposition apparatus according to claim 1, wherein the plurality of outlets of the extension line face the side of the lower half of the reaction space.

3. The atomic layer deposition apparatus according to claim 2, wherein the reaction space is a cylindrical body including two bottom surfaces and the side surface, the side surface connects the two bottom surfaces, and the extension line extends toward the bottom surface and the side surface of the reaction space.

4. The atomic layer deposition apparatus according to claim 1, wherein the gas inlet line comprises at least one non-reactive gas delivery line extending from the inner tube into the reaction space and forming the extension line.

5. The atomic layer deposition apparatus according to claim 1, comprising a filter unit disposed at a side of the inner tube where the inner tube is connected to the reaction space.

6. An atomic layer deposition apparatus for blowing a powder, comprising:

a shaft sealing device, which comprises an outer tube and an inner tube, wherein the outer tube has a containing space for containing the inner tube;

a filter unit located at one side of the inner tube body connected with the reaction space;

at least one gas extraction line located in the inner tube body, fluidly connected to the reaction space of the vacuum chamber via the filter unit, and configured to extract a gas in the reaction space; and

at least one gas inlet pipeline, which is located in the inner tube body, passes through the filter unit, extends from the inner tube body to the reaction space, and forms an extension pipeline in the reaction space, wherein the extension pipeline comprises at least one air outlet facing a side surface or a bottom surface of the reaction space, and the extension pipeline blows a non-reaction gas in the direction of the side surface or the bottom surface of the reaction space through the air outlet so as to blow the powder in the reaction space.

7. The atomic layer deposition apparatus according to claim 6, wherein the inner tube extends from the receiving space of the outer tube to the reaction space of the vacuum chamber, and forms a protruding tube in the reaction space, and the filter unit is disposed at a side of the protruding tube connected to the reaction space.

8. An atomic layer deposition apparatus for blowing a powder, comprising:

a shaft sealing device, including an outer tube and an inner tube, wherein the outer tube has a receiving space for receiving the inner tube, the inner tube extends from the receiving space of the outer tube to the reaction space of the vacuum chamber, and a protruding tube is formed in the reaction space, wherein the protruding tube includes a plurality of air outlets, penetrates through a tube wall of the protruding tube, and faces a side of the reaction space;

at least one air inlet pipeline, which is positioned in the inner tube body and the protruding tube part, is in fluid connection with the plurality of air outlets, and blows a non-reaction gas towards the side surface of the reaction space through the plurality of air outlets so as to blow the powder in the reaction space.

9. The atomic layer deposition apparatus according to claim 8, wherein the plurality of outlets of the extension line face the side of the lower half of the reaction space.

10. The atomic layer deposition apparatus according to claim 8, wherein the gas inlet line comprises at least one non-reactive gas delivery line fluidly connected to the plurality of gas outlets.