TWM612090U - Supporting mechanism and substrate container having the same - Google Patents

Abstract

A substrate container includes a shell, two side support units and a support mechanism. Each side support unit includes at least one support member. The supporting mechanism includes a fixed frame and a cantilever assembly. The fixing frame has an installation through hole, which has a first hole portion, a second hole portion and a shoulder portion. The cantilever assembly includes a holding seat, a supporting arm and an adjusting piece. The holding seat is arranged in the second hole and has a holding hole and at least one adjustment hole. The support arm passes through the first hole portion of the installation perforation to be fixed to the holding hole, and the support arm has a top surface inclined on the left and right sides and forms a supporting edge. The adjusting member can be adjusted in the front-to-rear direction through the adjusting hole, and the end abuts against the wall surface of the fixing frame at the shoulder. Through the implementation of this creation, the substrate container and its supporting mechanism can be simplified to make it easy to assemble and adjust.

Description

Supporting mechanism and substrate container with the supporting mechanism

The invention relates to a supporting mechanism and a substrate container with the supporting mechanism, in particular to a supporting mechanism for supporting a large-area fragile material substrate and a substrate container with the supporting mechanism.

Currently, most of the substrates used in the semiconductor, solar, and optoelectronic industries are fragile objects such as glass or silicon wafers. In addition, these fragile substrates are becoming thinner and larger in area. Therefore, during transportation or storage, the unsupported part of the substrate with a larger area is likely to bend and sag due to gravity. Therefore, if the storage and transportation container only supports the peripheral side of the substrate and does not support the center of the substrate, the substrate is likely to be excessive Risk of bending and breaking. At the same time, the substrate with too much sagging and bending will also cause difficulties in the automatic pick-and-place equipment during alignment and pick-and-place, which not only easily slows down the progress of the operation, but also causes collisions or the substrate to fall, which may cause the substrate to be broken. Cracked and damaged.

Therefore, most of the existing substrate containers such as cassettes, accommodating boxes or carrying boxes for accommodating large-scale substrates are provided with a central support rod. The central support rod is generally arranged between the left and right side walls of a container such as a cassette, and then is extended forward from the rear wall of the container or a fixing mechanism such as a fixing post at the adjacent rear wall to support the middle part of the substrate. Generally, the central support rod is mostly a cantilever structure, and only the rear end is fixed to the fixing mechanism on the rear side of the container to facilitate the robotic arm of the automatic pick-and-place device to extend from the opening to the bottom of the substrate for picking. put. Since the central support rod has a considerable length, how to make the central support rod have a certain strength to avoid excessive sagging of the front end, and make the container that contains the substrate in the multi-layer space storage method easy to adjust after assembly, so that each support can be easily adjusted. The central support rods of a piece of substrate can be pointed in the correct direction to keep the same and correct spacing between the central support rods, and each substrate to be supported can maintain a considerable level and flatness. These are all issues that need to be solved when designing the substrate container and support rod structure. And as far as the existing technology is concerned, there is still a lot of room for improvement.

Therefore, one of the objectives of the present invention is to provide a supporting mechanism that can solve the aforementioned problems.

Therefore, the supporting mechanism of the present invention includes a fixed frame and a cantilever assembly. The fixing frame extends in the up and down direction and includes a front face, a back face opposite to the front face, and a mounting hole. The installation through hole has a first hole connected to the front face and a second hole connected to the first hole and connected to the rear face. At least one shoulder is formed between the first hole and the second hole, and the width of the first hole adjacent to the at least one shoulder is smaller than that of the second hole adjacent to the at least one shoulder width. The cantilever assembly includes a holding seat, a supporting arm and at least one adjusting member. The holding seat is disposed in the second hole portion of the mounting perforation and has a holding hole and at least one adjustment hole located on at least one of the upper and lower sides of the holding hole and penetrating the holding seat back and forth, and the holding seat is adjacent to the holding seat. The width of the at least one shoulder is greater than the width of the first hole adjacent to the at least one shoulder. The support arm extends in the front-rear direction and passes through the first hole portion of the mounting hole to be fixed in the holding hole of the holding seat, and the support arm has a left and right A top surface extending obliquely upward, and a higher side of the top surface forms a supporting edge. Each of the adjusting parts can be adjusted in the front-to-rear direction through and fixed to an adjusting hole, and the end of the adjusting member is forwardly abutted against the wall surface of the fixing frame at the shoulder.

In some embodiments, the fixing frame has a plurality of the mounting holes and a plurality of the cantilever components arranged at intervals in the vertical direction, and the number of the mounting holes is greater than or equal to the number of the cantilever components.

In some embodiments, the cross-sectional area of the first hole adjacent to the at least one shoulder is smaller than the cross-sectional area of the second hole and the holder adjacent to the at least one shoulder, respectively.

In some embodiments, the cantilever assembly further has a clamping block movably disposed in the holding hole of the corresponding holding seat and abutting against the top surface of the corresponding support arm, the clamping block and the The holding seat clamps and fixes the support arm together.

In some embodiments, each of the holding seats further has a limiting hole communicating with the holding hole from the outside thereof, and each of the cantilever components further has a limiting member adjustable through the limiting hole, The end of the limiting member is connected to the clamping block to drive the clamping block to press against the top surface of the support arm to be fixed.

In some embodiments, each holding seat further has at least one protrusion that abuts forward against the wall surface of the fixing frame at the shoulder, and the holding seat can swing with the at least one protrusion as a fulcrum.

In some embodiments, each holding seat has a pair of protrusions, and the protrusions are symmetrically arranged on both sides of the holding hole.

In some embodiments, each of the holding seats is provided with at least one adjustment hole at least on the upper side of the protrusion.

In some embodiments, at least one adjusting hole is provided on each of the upper and lower sides of the protrusion, and the adjusting members are respectively penetrated and fixedly fixed in the adjusting holes.

In some embodiments, each of the adjusting members is an adjusting screw, and the inner wall of each adjusting hole has a thread that matches with the corresponding adjusting screw.

Another objective of the present invention is to provide a substrate container with the aforementioned supporting mechanism.

The substrate container of the present invention is used for accommodating and carrying at least one substrate. The substrate container includes: an outer shell, including an opening on the front side, a rear wall opposite to the opening, and two uprights respectively connected to the left and right sides of the rear wall A side wall, a bottom wall connecting the rear wall and the bottom side of the upright side walls, and a top wall opposite to the bottom wall and connecting the rear wall and the top side of the upright side walls; at least two side support units are respectively provided at The surface of the two upright side walls in the shell or the surface adjacent to the two upright side walls. Each of the side supporting units includes at least one supporting member. When the supporting members of each side supporting unit are multiple, the supporting members are arranged at intervals along the up-down direction on the side supporting unit where they are located, and the positions of the supporting members of the side supporting units Align with each other; and an aforementioned supporting mechanism, and the supporting edges of each supporting arm in the supporting mechanism are respectively aligned with the upper edges of a set of aligned supporting members in the side supporting units.

The present invention has at least the following functions: by making the support arm into a configuration in which the top surface is inclined to the left and right, and the support edge formed by the higher side of the top surface forms a line connection with the substrate It can greatly reduce the occurrence of particles and pollution caused by the friction between the substrate and the support arm. Furthermore, by using the clamping block to lean against the top surface of the support arm to clamp and fix the support arm together with the holder, the area where the support arm is clamped and fixed can be greatly increased, so that the support arm can be fixed more firmly And reliable. In addition, the holding seat for holding the support arm and the adjusting member used to adjust the inclination angle of the support arm are arranged on the rear side of the fixing frame, and the holding seat and the adjusting member are adjacent to and facing the back of the substrate container, so that the assembly and maintenance personnel can It is easy to access the adjusting member from the back of the substrate container for adjustment without being limited to the limited space on the front side of the substrate container, thus facilitating assembly and maintenance. At the same time, because the support arm and the holding seat used to fix the support arm are respectively arranged on the front and rear sides of the fixing frame, the support arm and the holding seat are connected to each other through the installation hole through the fixing frame, so the front and rear of the fixing frame can be balanced. The force on both sides does not cause deformation due to excessive force on one side, which shortens the service life of the fixing frame and/or the substrate container.

100: substrate container

1: shell

11: opening

12: back wall

13: Upright side wall

14: bottom wall

15: top wall

16: card slot

17: Base

2: Side support unit

21: Support

3: Container door

31: Latch mechanism

32: keyhole

4: Supporting mechanism

41: fixed frame

411: front

412: back

413: Installation perforation

413a: The first hole

413b: second hole

413c: Shoulder

42: Cantilever assembly

421: Holder

421a: Holding hole

421b: adjustment hole

421c: limit hole

421d: Locking screw hole

421e: raised

422: Support arm

422a: Support edge

422b: Top surface

423: clamping block

424: adjustment piece

425: limit piece

426: screw lock

5: Substrate

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: Figure 1 is a perspective view of an embodiment of the substrate container of the present invention; Figure 2 is a perspective exploded view of the embodiment Figure 3 is a perspective view of a supporting mechanism of this embodiment; Figure 4 is a perspective view of another perspective of the supporting mechanism of this embodiment; Figure 5 is an incomplete view obtained from the section line VV of Figure 4 Sectional view; Figure 6 is a perspective exploded view of the supporting mechanism of this embodiment; Figure 7 is a perspective exploded view of the support mechanism of the embodiment from another perspective; Figure 8 is a perspective view of a cantilever assembly of the support mechanism of the embodiment; Figure 9 is the cantilever of the support mechanism of the embodiment A top view of the assembly; and FIG. 10 is a rear view of the cantilever assembly of the support mechanism of the embodiment.

Referring to FIGS. 1 to 2, an embodiment of the substrate container 100 of the present invention includes a housing 1, two side supporting units 2 and a supporting mechanism 4.

The housing 1 includes an opening 11 on the front side, a rear wall 12 opposite to the opening 11, two upright side walls 13 respectively connected to the left and right sides of the rear wall 12, connecting the rear wall 12 and the bottom of the upright side walls 13 A bottom wall 14 on the side, and a top wall 15 opposite to the bottom wall 14 and connecting the rear wall 12 and the top side of the upright side walls 13.

In order to keep the internal environment of the substrate container 100 and the carried objects clean, the substrate container 100 may further have a container door 3. The container door 3 in this embodiment is provided with four sets of latch mechanisms 31, and has four lock holes 32 corresponding to the latch mechanisms 31, respectively. The bottom wall 14, the top wall 15 and the upright side walls 13 are respectively provided with two grooves 16 corresponding to the latch mechanism 31 of a container door 3 around the opening 11.

Each of the slots 16 is respectively used for the corresponding latch mechanism 31 to be locked in the up/down or left/right direction. When the user or the automated loading and unloading equipment wants to open or close the substrate container 100, a key (not shown) can be used to extend into each lock hole 32 to control the corresponding latch mechanism 31 to be locked into or out of the corresponding card slot 16, so that the container door 3 can be closed and fixed with the casing 1 or the container door 3 can be separated from the casing 1, thereby closing or opening the opening 11.

In some applications that require high cleanliness, the substrate container 100 in this embodiment can also be provided with a sealing unit on at least one of the periphery of the container door 3 or around the opening 11 of the housing 1. (Not shown in the figure), when the container door 3 and the housing 1 are closed and fixed to close the opening 11, a sealing unit can be used to fill the gap between the container door 3 and the housing 1 so that the substrate container 100 Keep a good seal inside to achieve better sealing and clean keeping effect.

In addition, the housing 1 often includes a base 17 connected to the underside of the bottom wall 14. Because the walls of the housing 1 are often thinner due to the need for lighter weight, they cannot provide sufficient strength. Therefore, the base 17 can provide a stable foundation so that the substrate container 100 has sufficient overall structural strength without deformation during transportation. In addition, the base 17 can also be provided with or formed with various connection interfaces or/and sensing means that cooperate with the machine or the automation equipment according to the needs of use.

At least one set of side support units 2 are respectively provided in the housing 1 adjacent to the surfaces of the two upright side walls 13. Each side of the supporting unit 2 includes a plurality of supporting members 21 arranged at intervals in the up and down direction, and the positions of the supporting members 21 of the supporting units 2 on both sides are aligned one to one left and right, so that a set of mutually aligned The supporting members 21 jointly support a substrate 5. Wherein, each of the support members may be in the shape of a long rib or a block, and is not limited to the aspect of this embodiment.

In addition to the above-mentioned implementation aspects, each side support unit 2 can also be directly provided on the surface of the upright side wall 13. The surface of each upright side wall 13 or the surface adjacent to each upright side wall 13 can also be provided with two or more side support units 2. As long as the supporting members 21 on the side supporting units 2 are mutually Aligned, each group of the supporting members 21 aligned with each other can jointly support a substrate 5.

Referring to FIGS. 2 to 5, the supporting mechanism 4 includes a fixing frame 41 and a plurality of cantilever assemblies 42. The fixing frame 41 is arranged inside the housing 1 adjacent to the rear wall 12 and extends in the up and down direction. The bottom end of the fixing frame 41 abuts against the bottom wall 14, and the top end of the fixing frame 41 abuts against the bottom surface of the top wall 15.

When assembling, the top end of the fixing frame 41 in this embodiment is first clamped to the bottom surface of the top wall 15, and then the bottom end of the fixing frame 41 is pressed against the bottom wall 14, and finally through the locking member ( (Not shown) and the base 17 are screw-locked and fixed. In order to achieve a more stable fixing effect, the top end of the fixing frame 41 can also be screwed and fixed to the top wall 15 with a locking member (not shown), which is not limited in this embodiment.

The fixing frame 41 has a front face 411 facing the opening 11, a rear face 412 opposite to the front face 411 and facing the rear wall 12, and a plurality of mounting holes 413 arranged at intervals in the vertical direction. The mounting hole 413 has a first hole portion 413 a connected to the front surface 411 and a second hole portion 413 b connected to the first hole portion 413 a and connected to the rear surface 412.

At least one shoulder 413c is formed between the first hole 413a and the second hole 413b, and the width of the first hole 413a adjacent to the at least one shoulder 413c is smaller than that of the second hole 413b adjacent to the at least one shoulder 413c. A width at the shoulder 413c.

Referring to FIGS. 5 to 10, the cantilever components 42 are correspondingly disposed in the mounting holes 413 respectively. Each cantilever assembly 42 includes a holding seat 421, a supporting arm 422 and at least one adjusting member 424.

The holding seat 421 is disposed in the second hole portion 413b of the corresponding mounting hole 413, and has There is a holding hole 421a. The support arm 422 extends along the front-rear direction and passes through the first hole 413 a and then is fixed in the holding hole 421 a of the holding seat 421. In this embodiment, the cross-sectional area of the first hole portion 413a at the at least one shoulder 413c is smaller than the cross-sectional area of the second hole portion 413b, so it can also be smaller than the cross-sectional area of the second hole portion 413b. The holding seat 421 is adjacent to the cross-sectional area of the at least one shoulder 413c.

Such a structure allows the support arm 422 to pass through the first hole 413a and be fixed in the holding hole 421a of the holding seat 421, and then the holding seat 421 is stopped by the at least one shoulder 413c. Instead of coming out of the first hole 413a forward, the supporting arm 422 is also fixed and cannot be drawn forward.

In addition to the above-mentioned implementation aspects, in other implementation aspects, the widths of the second hole 413b and the holding seat 421 adjacent to the at least one shoulder 413c are both larger than the first hole. The width of the portion 413a at this point, but the cross-sectional area of both the second hole portion 413b and the holding seat 421 need not be larger than the design of the first hole portion 413a.

For example, the second hole portion and the first hole portion may be square holes with the same shape and size, but the second hole portion rotates an angle relative to the first hole portion so that the four sides of the two are not parallel. At this time, the position of each shoulder is located at each side of the first hole, and the width of the second hole at each shoulder is greater than the width of the first hole at that location. At this time, as long as the shape and size of the holding seat are similar to the second hole, it can also be stopped by the shoulders to prevent the support arm fixed in the holding hole from being drawn forward.

In addition to the examples of different implementations mentioned above, the first hole portion, the second hole portion, and the holding seat can also have various shapes and sizes, as long as the second hole portion and the holding seat are adjacent to each other. The condition that the width of the at least one shoulder is greater than the width of the first hole can be the same In this way, the accidental situation that the support arm fixed in the holding hole of the holding seat is prevented from coming out or being drawn out is prevented.

The support arm 422 has a top surface 422b extending obliquely to the left and right. The higher side of the top surface 422b forms a supporting edge 422a. The supporting edges 422a are respectively aligned with the upper edges of a group of the supporting members 21 aligned with each other in the side supporting units 2 (see FIG. 2), and jointly support a substrate 5 with the group of supporting members 21.

Since the supporting edge 422a is aligned with the upper edges of a set of the supporting members 21 that are aligned, the supporting arm 422 abuts in a manner that the supporting edge 422a and the substrate 5 are in line contact. This can not only provide sufficient support for the entire longitudinal range of the central part of the substrate 5, but also greatly reduce the area where friction may occur between the support arm 422 and the substrate 5, and effectively reduce the particle pollution caused by friction. .

In order to more stably fix the support arm 422 in the holding hole 421 a of the holding seat 421, the cantilever assembly 42 further has a clamping block 423. The clamping block 423 is movably disposed in the corresponding holding hole 421 a of the corresponding holding seat 421 and abuts against the top surface 422 b of the corresponding supporting arm 422 to clamp the supporting arm 422 together with the holding seat 421.

As shown in FIGS. 6 and 8, the bottom surface of the clamping block 423 is in surface contact with the top surface 422b of the corresponding support arm 422, and can slide along the top surface 422b. The holding seat 421 also has a limiting hole 421c communicating with the holding hole 421a from its outside, and the cantilever assembly 42 also has a limiting member 425 adjustable through the limiting hole 421c. The end of the limiting member 425 is connected to the clamping block 423 so as to drive the clamping block 423 to slide upward along the top surface 422b and then press the top surface 422b to be fixed.

More specifically, the limiting member 425 in this embodiment is a screw, and the limiting hole 421c is connected from the outside of the holding seat 421 away from the supporting edge 422a of the supporting arm 422 to the The retaining hole 421a and the inner wall have threads that are matched with the limiting member 425. By adjusting the limiting member 425 to the direction of the supporting edge 422a, the clamping block 423 is pushed up and the clamping block 423 is tightly fixed, and the clamping block 423 and the holding seat 421 can be clamped together. The support arm 422 is held and fixed.

In a modified embodiment, the limiting hole 421c can be connected to the holding hole 421a from the outside of the holding seat 421 adjacent to the supporting edge 422a of the supporting arm 422, and the limiting member 425 is also A screw, and the clamping block 423 relative to the limiting hole 421c can form a screw hole with a thread matching the limiting member 425 inside. In this state, by adjusting the limiting member 425 to drive the clamping block 423 closer to itself, the same fixing effect can also be achieved.

In addition, the holding seat 421 in this embodiment also has a pair of protrusions 421e that abut against the wall surface of the fixing frame 41 on the shoulder 413c, and two are respectively located on the upper and lower sides of the holding hole 421a and pass through the holding seat front and rear. The adjustment holes 421b of the 421, two adjustment members 424 corresponding to the adjustment holes 421b, two locking screw holes 421d located on the left and right sides of the holding hole 421a and passing through the holding seat 421 front and rear, and two corresponding holes The screw lock pieces 426 arranged in the lock screw holes 421d.

After the support arm 422 is assembled into the holding hole 421a of the corresponding holding seat 421 and clamped and fixed, the assembler can move the support arm 422 together with the holding seat 421 and other components from the rear of the fixing frame 41. Pass through the mounting hole 413 until the pair of protrusions 421e on the front surface of the holding seat 421 abut against the wall surface of the fixing frame 41 at the shoulder 413c in the second hole 413b. At this time, the holding seat 421 can swing with the pair of protrusions 421e as a fulcrum.

The adjusting holes 421b respectively pass through the adjusting pieces 424. Each adjusting member 424 is an adjusting screw, and the inner wall of each adjusting hole 421b has a thread that matches with the corresponding adjusting screw. By adjusting the position of the adjusting member 424 in the adjusting hole 421b to determine the length of the cantilever component 42 protruding from the adjusting hole 421b, the cantilever assembly 42 where it is located can be pushed to swing up and down with the pair of protrusions 421e as the fulcrum, and then the support arm 422 is adjusted to its correct orientation in the vertical direction.

After the holding seat 421 and the supporting arm 422 fixed on it are adjusted to the correct orientation, the bolts 426 can be respectively passed through the locking screw holes 421d and locked on the fixing frame 41. In order to connect the fixing base 421 to the fixing frame 41. In this way, the group of cantilever components 42 can be correctly assembled to the fixing frame 41.

In summary, the substrate container 100 of the present invention is formed by making the supporting arm 422 into a configuration in which the top surface 422b is inclined to the left and right, and the supporting edge 422a formed by the higher side of the top surface 422b The formation of line contact with the substrate 5 can greatly reduce the generation of particles and pollution caused by the friction between the substrate 5 and the support arm 422. Furthermore, by using the clamping block 423 to abut on the top surface 422b of the support arm 422 to form surface contact with it, and then clamp and fix the support arm 422 together with the fixing seat 421, the support arm 422 can be clamped and fixed greatly. The area of the support arm 422 can be fixed more firmly and securely. In addition, a holding seat 421 for holding the supporting arm 422 and an adjusting member 424 for adjusting the inclination angle of the supporting arm 422 are disposed on the rear side of the fixing frame 41, and the holding seat 421 and the adjusting member 424 are adjacent to and facing the substrate container 100. The rear allows assembly and maintenance personnel to easily access the adjusting member 424 from the rear of the substrate container 100 for adjustment without being limited to the limited space in the substrate container 100 on the front side of the rear wall 12, thus facilitating assembly and maintenance . At the same time, because the support arm 422 and the fixing used to fix the support arm 422 The seats 421 are respectively arranged on the front and rear sides of the fixing frame 41. The support arms 422 and the holding seats 421 are connected to each other through the mounting holes 413 formed on the fixing frame 41, so that the front and rear sides of the fixing frame 41 can be balanced. Therefore, the service life of the fixing frame 41 and/or the substrate container 100 can be shortened, so that it will not be deformed due to excessive force on one side. Therefore, it can indeed achieve the purpose of new cost.

However, the above-mentioned are only examples of the present model. When the scope of implementation of the present model cannot be limited by this, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present model and the contents of the patent specification still belong to This new patent covers the scope.

4: Supporting mechanism

41: fixed frame

411: front

412: back

413: Installation perforation

42: Cantilever assembly

422: Support arm

Claims (11)

A supporting mechanism includes: a fixing frame extending in the up and down direction and including a front face, a back face opposite to the front face, and a mounting hole. The mounting hole has a first hole connected to the front face and a first hole connected to the first hole. The hole is connected to the second hole at the back, at least one shoulder is formed between the first hole and the second hole, and the width of the first hole adjacent to the at least one shoulder is smaller than the The width of the second hole adjacent to the at least one shoulder; and a cantilever assembly, the cantilever assembly includes a holding seat, arranged in the second hole of the mounting hole, and having a holding hole and located above and below the holding hole At least one of the two sides passes through at least one adjustment hole of the holding seat front and rear, and the width of the holding seat adjacent to the at least one shoulder is greater than the width of the first hole adjacent to the at least one shoulder, a The support arm extends in the front-rear direction and passes through the first hole portion of the mounting hole to be fixed in the holding hole of the holding seat, and the support arm has a top surface extending obliquely in the left and right directions. The side with the higher surface forms a supporting edge, and at least one adjusting member, each of the adjusting members can be adjusted in the front-to-rear direction through and fixed to an adjusting hole, and the end is located forwardly against the fixing frame. The wall at the shoulder. The support mechanism according to claim 1, wherein the fixing frame has a plurality of the mounting holes and a plurality of the cantilever components arranged at intervals in the up and down direction, and the number of the mounting holes is greater than or equal to the number of the cantilever components . The supporting mechanism according to claim 1, wherein the cross-sectional area of the first hole portion adjacent to the at least one shoulder is smaller than the cross-sectional area of the second hole portion and the holding seat adjacent to the at least one shoulder portion, respectively. The support mechanism according to claim 1, wherein the cantilever assembly further has a clamping block movably arranged in the corresponding holding hole of the holding seat and abutting against the corresponding top surface of the support arm, the The clamping block and the fixing seat jointly clamp and fix the support arm. The support mechanism according to claim 4, wherein each of the holding seats further has a limiting hole communicating with the holding hole from the outside thereof, and each of the cantilever components further has a limiting hole that can be adjusted through The limiting member, the end of the limiting member is connected to the clamping block to drive the clamping block against the top surface of the support arm to be fixed. The supporting mechanism according to claim 1, wherein each of the holding seats further has at least one protrusion that abuts forward against the wall surface of the fixing frame at the shoulder, and the holding seat can serve as the at least one protrusion The fulcrum swings. The supporting mechanism according to claim 6, wherein each of the holding seats has a pair of the protrusions, and the protrusions are symmetrically arranged on both sides of the holding hole. The supporting mechanism according to claim 6 or 7, wherein each of the holding seats is provided with at least one adjustment hole at least on the upper side of the protrusion. The supporting mechanism according to claim 8, wherein each of the holding seats is provided with at least one adjustment hole on the upper and lower sides of the protrusion, and the adjustment pieces are respectively penetrated and adjusted to be fixed to the Adjust the hole. The support mechanism according to claim 1, wherein each of the adjusting members is an adjusting screw, and the inner wall of each adjusting hole has a thread that matches with the corresponding adjusting screw. A substrate container for accommodating and carrying at least one substrate, the substrate container comprising: a shell, including an opening on the front side, a rear wall opposite to the opening, Two upright side walls respectively connecting the left and right sides of the back wall, a bottom wall connecting the back wall and the bottom side of the upright side walls, and a bottom wall opposite to the bottom wall and connecting the back wall and the top side of the upright side walls A top wall; at least two side support units are respectively provided on the surface of the two upright side walls or adjacent to the surface of the two upright side walls in the housing, each side supporting unit includes at least one supporting member, when each side supporting unit When there are multiple supporting members, the supporting members are arranged at intervals along the up and down direction on the side supporting unit where they are located, and the positions of the supporting members of the side supporting units are aligned with each other; and The supporting mechanism according to any one of claims 1 to 10, and the supporting edge of each supporting arm in the supporting mechanism is respectively aligned with the upper edge of a set of the supporting members in the side supporting units Positive.

Images