TWM599909U - 一種用於對電子元件進行紅外線檢查的裝置 - Google Patents

一種用於對電子元件進行紅外線檢查的裝置 Download PDF

Info

Publication number
TWM599909U
TWM599909U TW109206913U TW109206913U TWM599909U TW M599909 U TWM599909 U TW M599909U TW 109206913 U TW109206913 U TW 109206913U TW 109206913 U TW109206913 U TW 109206913U TW M599909 U TWM599909 U TW M599909U
Authority
TW
Taiwan
Prior art keywords
electronic component
imaging unit
infrared
infrared imaging
inspection
Prior art date
Application number
TW109206913U
Other languages
English (en)
Chinese (zh)
Inventor
光榮 胡
Original Assignee
馬來西亞商正齊科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 馬來西亞商正齊科技有限公司 filed Critical 馬來西亞商正齊科技有限公司
Publication of TWM599909U publication Critical patent/TWM599909U/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/509—Detectors infrared

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
TW109206913U 2018-08-30 2019-07-29 一種用於對電子元件進行紅外線檢查的裝置 TWM599909U (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI2018703073 2018-08-30
MYPI2018703073A MY197078A (en) 2018-08-30 2018-08-30 An apparatus for infrared inspection of an electronic component and method thereof

Publications (1)

Publication Number Publication Date
TWM599909U true TWM599909U (zh) 2020-08-11

Family

ID=69738688

Family Applications (2)

Application Number Title Priority Date Filing Date
TW108126732A TW202009476A (zh) 2018-08-30 2019-07-29 一種用於對電子元件進行紅外線檢查的裝置及方法
TW109206913U TWM599909U (zh) 2018-08-30 2019-07-29 一種用於對電子元件進行紅外線檢查的裝置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW108126732A TW202009476A (zh) 2018-08-30 2019-07-29 一種用於對電子元件進行紅外線檢查的裝置及方法

Country Status (4)

Country Link
KR (1) KR102246219B1 (ko)
MY (1) MY197078A (ko)
PH (1) PH12019000264A1 (ko)
TW (2) TW202009476A (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI797689B (zh) * 2021-05-24 2023-04-01 馬來西亞商正齊科技有限公司 檢查電子元件內部缺陷的裝置及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101001113B1 (ko) * 2008-11-12 2010-12-14 주식회사 코로 웨이퍼 결함의 검사장치 및 검사방법
JP5594254B2 (ja) * 2011-08-09 2014-09-24 三菱電機株式会社 シリコン基板の検査装置、および検査方法
CN104160366A (zh) * 2011-11-28 2014-11-19 康宁股份有限公司 使用平面透明薄板的稳固的光学触摸屏系统和方法
KR101341620B1 (ko) * 2012-06-14 2013-12-13 전자부품연구원 3차원 형상 측정 시스템 및 방법
DE102013108308A1 (de) * 2013-08-01 2015-02-19 Schott Ag Verfahren und Vorrichtung zur Detektion in Bandrollen aus sprödhartem oder sprödbrechendem, zumindest teiltransparentem Material, sowie deren Verwendung

Also Published As

Publication number Publication date
KR20200026708A (ko) 2020-03-11
KR102246219B1 (ko) 2021-04-29
TW202009476A (zh) 2020-03-01
MY197078A (en) 2023-05-24
PH12019000264A1 (en) 2020-03-09

Similar Documents

Publication Publication Date Title
US10935503B2 (en) Apparatus, method and computer program product for defect detection in work pieces
JP7339643B2 (ja) 溶液に浸された眼用レンズの屈折力および厚さを検査するためのシステムおよび方法
CN108717062A (zh) 一种大口径超精密表面的暗场缺陷检测装置及其测量方法
JP5664167B2 (ja) 検査装置
TW201409021A (zh) 檢測樣品表面缺陷之檢測系統及其檢測方法
TW201520541A (zh) 接合基板的紅外線檢查
CN109827974B (zh) 一种树脂滤光片膜裂检测设备及检测方法
TWI495867B (zh) Application of repeated exposure to multiple exposure image blending detection method
JP2019516239A5 (ko)
TWM599909U (zh) 一種用於對電子元件進行紅外線檢查的裝置
TW201239347A (en) Method for checking membrane surface and apparatus using the same
TW201341785A (zh) 用以檢查物品缺陷之系統及方法
TW201350838A (zh) 隱形眼鏡邊緣檢測裝置
KR20170087328A (ko) 비전검사모듈 및 비전검사방법
KR101188404B1 (ko) 디스플레이 패널 글라스 표면의 결함 검사 방법
JP2005274173A (ja) ウエハー基板、液晶ディスプレイ用透明ガラス等の被検査物の表面上の異物・表面検査方法およびその装置
CN208672536U (zh) 一种大口径超精密表面的暗场缺陷检测装置
TWI493177B (zh) 一種檢測具週期性結構光學薄膜的瑕疵檢測方法及其檢測裝置
JP2004212353A (ja) 光学的検査装置
TWI715662B (zh) 檢查裝置
KR20140031687A (ko) 기판 표면 검사 시스템 및 검사 방법
JP2015224912A (ja) 欠陥測定装置及び欠陥測定方法
JP2021015035A5 (ja) 画像表示装置の検査方法、製造方法及び検査装置
TWM457889U (zh) 面板瑕疵檢測之裝置
WO2022249527A1 (ja) 検査装置及び検査方法