TWM595325U - Mechanical arm capable of carrying board or box and storage mechanism of board or box - Google Patents

Abstract

This creation is about a mechanical arm that can transport a plate or box and a storage mechanism for the plate or box. It is a stereotype that rotates the horizontal plane direction for a long time. The concept is changed to achieve vertical rotation, so that the space between the adjacent boards or boxes when the box or board is stored can be effectively used, and the space is used as the position when the robot arm rotates The space needs to be rotated to allow the robotic arm to go deeper into the gap to take out the items; therefore, the storage mechanism of this creation can effectively use the internal space, so that the overall volume can be greatly reduced, thereby improving the space utilization rate of the plant.

Description

Mechanical arm capable of carrying board or box and storage mechanism of board or box

This creation is about a robotic arm, especially a robotic arm that can be used to carry a board or box. In view of the fact that the Patent Law belongs to a broad concept of creation for more than two creations, the relevant provisions of an application can be filed in an application. This creation also proposes a storage mechanism, especially a storage mechanism for panels or boxes.

In the process of wafer manufacturing and processing, it is necessary to move between each process area or between machines due to its process requirements, or the production process needs to be suspended due to unexpected conditions in the production line. In response to these conditions, a storage mechanism (also known as a storage mechanism, stocker) is needed to temporarily store wafers, or serve as a wafer transfer function.

Please refer to Taiwan Patent Application No. 107109352 "Reservoir", which discloses: a reservoir for storing multiple wafer carriers includes a frame, multiple cassette stoppers, multiple rafter components and multiple dividers , The frame includes a plurality of storage units, each of the plurality of storage units includes a carrier plate for carrying one of the plurality of wafer carriers, and a cassette stopper stands at the edge of each of the plurality of carrier plates On the upper side, the plurality of truss members are diagonally arranged across at least one side surface of at least one of the plurality of storage units, wherein each of the plurality of truss members includes shock absorbers, and the plurality of partitions are provided in the plurality of storage units The side surface of the unit is fixed to the frame.

Although the patent has the above-mentioned advantages, please refer to FIG. 5 of the patent. The lower half of the reference numeral 30 shows a robot arm that rotates in the horizontal direction to carry the contents stored in the reservoir. Wafers, therefore, when the robot arm rotates, additional space needs to be added to the storage for the rotation space required for the robot arm to rotate, which will cause the storage device to be bulky and not conducive to the space utilization of the plant. In addition, during the rotation in the horizontal direction, the wafer is easily affected by the centrifugal force, so the author believes that this type of storage is necessary for improvement.

In view of the deficiencies described in the prior art, the creator of this new type proposes a mechanical arm that can handle boards or boxes, including:

One body: The seat body is capable of forming a power connection with a conveying mechanism, and the top surface of the seat body is located on an imaginary horizontal plane.

A first arm: The first support arm has two opposite first ends and a second end, the first end is pivotally arranged on the top surface of the seat body, and the first support arm forms a first imaginary plane when pivoting on the first end as an axis And the first imaginary plane is perpendicular to the imaginary horizontal plane.

A second arm: The second support arm has two opposite third ends and a fourth end, the third end is pivotally disposed at the second end, and the second support arm forms a second imaginary plane when the third end is rotated , The second imaginary plane is parallel to the first imaginary plane.

One receiving board: The receiving plate is pivotally arranged at the fourth end, and the receiving plate is perpendicular to the second imaginary plane. The receiving plate is used to receive the plate body or the box body.

One control unit: The control unit signals the first arm, the second arm and the receiving plate respectively. The control unit can control the first arm, the second arm and the receiving plate to rotate so that the first When one arm and the second arm rotate to the beginning or end of the rotation path, the receiving plate is parallel to the imaginary horizontal plane.

In view of the fact that the mechanical arm inside the conventional stocker mainly rotates horizontally to achieve the functions of removing and storing wafers, this creation escapes this long-standing concept and changes it to a vertical rotation To design the robot arm, it can effectively use the distance between the adjacent boards or boxes when the storage mechanism stores the board or box, and the distance is used as the radius of rotation required when the robot arm rotates. The board or box is taken out and stored. In this way, the original creation can effectively use the space in the storage mechanism, and the volume of the storage system is greatly reduced, thereby improving the space utilization of the plant. In addition, the vertical rotation can prevent the plate or the box from falling due to the centrifugal force.

In view of the patent law, if more than two creations belong to a broad concept of creation, the relevant provisions of an application can be filed. This new creation also proposes a storage mechanism for panels or boxes, including:

A storage box with a space inside: The front side of the storage box is provided with an opening and a platform, and the top surface of the platform is connected to the bottom edge of the opening; a transport unit is provided in the space, and the transport unit and the front or rear side wall of the storage box One of them has a pitch for defining a front space or a rear space, and a first row of partition groups is arranged in the front space or the rear space, and the first row of partition groups includes a plurality of spaces arranged from top to bottom The first horizontal partition is used for partitioning out a plurality of first storage spaces for board or box.

The conveying unit includes a mechanical arm and a conveying mechanism that is power-connected to the mechanical arm. The conveying mechanism can drive the mechanical arm to move vertically. An arm, a second arm and a receiving plate, the top surface of the seat body is located in an imaginary horizontal plane; the first arm has two opposite first and second ends, the first end is pivotally arranged on the On the top surface of the seat body, the first support arm forms a first imaginary plane perpendicular to the imaginary horizontal plane when the first end is pivoted; the second support arm has two opposite third ends and a fourth end, the The third end is pivotally arranged at the second end, and when the second support arm rotates about the third end as an axis, a second imaginary plane parallel to the first imaginary plane is formed; the receiving plate is pivotally arranged at the fourth end , And the receiving plate is perpendicular to the second imaginary plane, the receiving plate is used to receive the plate body or the box body; a control unit respectively signals the first arm, the second arm, the receiving plate and the conveying mechanism, The control unit can control the first arm, the second arm and the receiving plate to rotate, so that when the first arm and the second arm rotate to the beginning or end of the rotation path, the receiving plate is parallel The imaginary horizontal plane, and the control unit can be used to control the operation of the conveying mechanism to control whether the receiving board receives the state of the board or the box.

The following is to further illustrate the advantages, features, requirements, and specific implementations of this new creation through the assistance of various drawings.

Please refer to FIG. 1, the new creation relates to a mechanical arm 1 that can be used to transport boards or boxes, including:

Block 11: Please refer to FIG. 1, the seat body 11 is capable of forming a power connection with a conveying mechanism 2, and the top surface of the seat body 11 is located on an imaginary horizontal plane. Anything that can drive the base 11 to move in the X-axis, Y-axis, or Z-axis direction is referred to as the conveying mechanism 2 in this creation. For the detailed operation of the conveying mechanism 2, please refer to the following content.

A first arm 12: Please refer to FIG. 1, the first support arm 12 has two opposite first ends and a second end. The first end is pivotally disposed on the top surface of the seat body 11. Taking the drawings in this specification as an example, the seat The top surface of the body 11 is preferably pivotally connected to the first end through a connecting member 11A, the first support arm 12 forms a first imaginary plane when the first end is pivoted, and the first imaginary plane is perpendicular The imaginary level. The first arm 12 is mainly driven directly or indirectly through the power unit, and can be pivoted about the first end as an axis, no matter how the first arm 12 is made by the first end as an axis Pivoting is the scope of this creative protection. Moreover, the rotation amount of the first arm 12 is mainly set by the control unit 3 described later to form the beginning and the end of the rotation path.

A second arm 13: Please refer to FIG. 1, the second arm 13 has two opposite third and fourth ends, the third end is pivotally disposed on the second end, and the second arm 13 uses the third end as When the shaft rotates, a second imaginary plane is formed, and the second imaginary plane is parallel to the first imaginary plane. Similarly, the second arm 13 is mainly driven directly or indirectly through the power unit, and can be pivoted about the third end as an axis, no matter how the second arm 13 is passed, the third end can be The pivoting of the shaft is within the scope of this creation. Moreover, the rotation amount of the second arm 13 is mainly set by the control unit 3 described later to form the beginning and the end of the rotation path.

One receiving board 14: Please refer to FIG. 1, the receiving plate 14 is pivotally disposed at the fourth end, and the receiving plate 14 is perpendicular to the second imaginary plane. The receiving plate 14 is used to receive the board body or the box body C. Among them, the new creation is preferably used in the field of panels or semiconductors. When the creation is used in the field of panels, the plate body is preferably a glass panel. For example, if the objects received by the receiving plate 14 are plate-shaped structures, It is the board body referred to in this specification, such as but not limited to wood board and glass panel. When the new creation is used in the field of semiconductors, the box C is preferably a wafer box (also called wafer boat box, wafer transfer box, wafer transfer box, foup, cassetts). Box C is used to explain the advantages, characteristics, and operation methods of this creation. In addition, in order to prevent the receiving plate 14 from slipping from the receiving plate 14 during the receiving process, the top surface of the receiving plate 14 is preferably laid with an anti-slip unit, and the anti-slip unit may be The pad body with a higher friction coefficient may also have a surface with a plurality of particles, and when the invention is used in the semiconductor field, the anti-slip unit may be a protruding pillar for insertion on the bottom surface of the wafer box, in addition to having In addition to the positioning function, it also has the anti-slip function, and the limit is limited to the angle presented in the drawings of this specification. The anti-slip unit is not shown in each drawing.

One control unit 3: Please refer to FIG. 1 and FIG. 8. The control unit 3 is respectively connected to the first arm 12, the second arm 13 and the receiving plate 14. The control unit 3 can control the first arm 12, The second support arm 13 and the receiving plate 14 rotate so that when the first support arm 12 and the second support arm 13 rotate to the beginning or end of the rotation path, the receiving plate 14 is parallel to the imaginary horizontal plane. Taking this creation as an example, the seat body 11 is provided with a servo motor, and the first arm 12, the second arm 13 and the receiving plate 14 are respectively provided with a linkage mechanism, which is directly or indirectly connected to the servo motor 11. Actuating power connection, so that the control unit 3 controls the servo motor to be able to link each linkage mechanism to achieve the effect of controlling the rotation of the first arm 12, the second arm 13 and the receiving plate 14.

Please refer to FIG. 1, FIG. 3 and FIG. 8, during the creation process, the control unit 3 will control the conveying mechanism 2 to drive the base 11 to move according to the originally set program or according to the input command To the preset position. Then, the control unit 3 controls the rotation of the first arm 12, the second arm 13 and the receiving plate 14, respectively, driving the first arm 12 and the second arm 13 to the end of the rotation path, so that The receiving plate 14 extends below the box C (please refer to FIG. 4 and FIG. 5 for cooperation) to form a state like FIG. 3. At the same time, the receiving plate 14 is parallel to the bottom surface of the box C. Then, the control unit 3 controls the conveying mechanism 2 to drive the receiving plate 14 to move upward, so that the receiving plate 14 receives the box C. Next, the control unit 3 controls the first arm 12, the second arm 13 and the receiving plate 14 to rotate, driving the first arm 12 and the second arm 13 to the beginning of the rotation path. It is worth mentioning that during the process, the receiving plate 14 needs to be controlled to maintain a state parallel to the imaginary horizontal plane to prevent the box C from sliding down. Next, the control unit 3 controls the conveying mechanism 2 to drive the receiving plate 14 to the designated location to place the box C at the designated location. The operation principle in the process can be analogized as described above and will not be repeated here. .

Since the conventional mechanical arm rotates on the horizontal plane through the base body, the purpose of taking out or placing the board or the box body is achieved, which requires additional extra space inside the entire storage mechanism for the base body to rotate, which in turn makes The entire storage mechanism is bulky, and the plant space utilization rate is poor. For this reason, please refer to Figures 4 and 5, as the board or box is generally arranged and stored, there is a distance D between the two adjacent boards or boxes. For a long time, the horizontal plane rotation thought is changed to the vertical plane direction (that is, the first imaginary plane and the second imaginary plane described in the manual), so that this creation can be effective when used in storage systems Use the distance D as the rotation space required when the robotic arm 1 rotates. After the first arm 12 and the second arm 13 are rotated to the end of the rotation path, they just penetrate into the distance D, and then pass through the conveying mechanism 2. With the cooperation of the receiving plate 14, the box C is taken out or placed. Secondly, compared with the conventional mechanical arm, this creation can effectively save the space of the storage mechanism, and thus improve the space utilization rate of the plant.

In view of the patent law, if more than two creations belong to a broad concept of creation, the relevant provisions of an application can be filed. This new creation also proposes a storage mechanism for panels or boxes, including:

One storage box 4: Please refer to FIG. 2 together with FIG. 6 and FIG. 7, the storage box 4 has a space 41 inside, and the storage box 4 is provided with an opening 42 and a platform 43 on the front side, the top surface of the platform 43 is connected to the At the bottom edge of the opening 42, the platform 43 is mainly provided to place the board or the box. Taking the drawings in this specification as an example, the storage box 4 is provided to store the box C for the robot arm 1 to take This space 21 is placed. Taking the drawing of this creation manual as an example, the number of the opening 42 is preferably two.

One conveyor unit A: Please refer to FIG. 2 in conjunction with FIG. 6 and FIG. 7, the conveying unit A is provided in the space 21, and the conveying unit A is spaced from one of the front side wall or the rear side wall of the storage box 4 for defining A front space 411 or a rear space 412, a first row of partition groups 51 is disposed in the front space 411 or the rear space 412, the first row of partition groups 51 includes a plurality of first levels spaced from top to bottom To the partition 511, a plurality of first storage spaces 512 for placing plates or boxes are provided for partitioning. The internal space of the storage box 4 can pass through the conveying unit A and each panel group according to different needs With the cooperation of 51, the storage box 4 is separated from the storage space of different arrangements. For the detailed implementation, please refer to the following.

Please refer to FIG. 1 in conjunction with FIGS. 6, 7 and 8, the conveying unit A includes a mechanical arm 1 and a conveying mechanism 2 that is power-connected to the mechanical arm. The conveying mechanism 2 can drive the mechanical arm 1 to be vertical To move (such as Z-axis) or lateral (such as X-axis), the robot arm 1 includes a seat 11, a first arm 12, and a second arm that form a power connection with the conveying mechanism 2 13 and a receiving plate 14, the top surface of the seat body 11 is located in an imaginary horizontal plane; the first arm 12 has two opposite first and second ends, the first end is pivotally disposed on the top surface of the seat body 11 , The first arm 12 pivots around the first end to form a first imaginary plane perpendicular to the imaginary horizontal plane; the second arm 13 has two opposite third ends and a fourth end, the third The end is pivotally arranged at the second end, and the second support arm 13 forms a second imaginary plane parallel to the first imaginary plane when the third end is rotated as the axis; the receiving plate 14 is pivotally arranged at the fourth end , And the receiving plate 14 is perpendicular to the second imaginary plane, the receiving plate 14 is used to receive the board or the box C, as mentioned above, when the storage mechanism 4 of the present creation is introduced below, the storage mechanism 4 is also used As an example, the case C is used for storage.

One control unit 3: Please refer to FIG. 8, the signals are respectively connected to the first arm 12, the second arm 13, the receiving plate 14 and the conveying mechanism 2, and the control unit 3 is used to control the first arm 12 and the The rotation of the second arm 13 and the receiving plate 14 is such that when the first arm 12 and the second arm 13 rotate to the beginning or end of the rotation path, the receiving plate 14 is parallel to the imaginary horizontal plane, and the control unit 3 can be used to control the operation of the conveying mechanism 2 to control whether the receiving plate 14 receives the box C or not.

The above-mentioned introduction about the robotic arm has been quite well introduced in the paragraph of the robotic arm 1 that can be used to carry the board or box, and it will not be repeated here. The following are various embodiments of the storage mechanism 4:

Please refer to FIG. 7 and FIG. 2, the internal storage method of the storage box 4 can be changed according to customer needs, for example, the storage box 4 only has an area A1 B1 for storing the box C. At this time, the The conveying mechanism 2 can only drive the robot arm 1 to move vertically. When the box C is placed on the platform 43, the conveyor 2 first drives the robot arm 1 to move vertically down to the opening 42, and then, After the receiving plate 14 receives the box C, the conveying mechanism 2 drives the robot arm 1 to move vertically up to the horizontal partition 511, and then puts the box C in the first storage space 512.

As mentioned above, the storage mechanism in this creation is mainly to escape from the long-term rotation of the horizontal plane, and to rotate in the direction of the vertical plane perpendicular to the horizontal plane (that is, the first imaginary plane and the second imaginary plane described in the manual), please cooperate As shown in FIG. 4 and FIG. 5, in this way, when the present invention is used in a storage system, the distance D can be effectively used as the rotation space required when the robot arm 1 rotates, through the first arm 12 and the second After the support arm 13 rotates to the end of the rotation path, it just penetrates into the distance D, and then through the cooperation of the conveying mechanism 2 and the receiving plate 14, the box C is taken out or placed. Compared with the conventional mechanical arm, this creation can effectively save the space of the storage mechanism, thereby improving the space utilization rate of the plant; in addition, by placing each box C vertically, the creation of this creation forms a tower storage method. Increase the overall capacity to further increase the space utilization rate of the plant.

Please refer to FIG. 7, the internal storage method of the storage box 4 can also form that the conveying unit A is located in the center of the space, and the area A B1 and the area B B2 are respectively located in the front and back direction of the conveying unit. At this time, the conveying mechanism 2 The action method is still to drive the robot arm 1 to move vertically, and its implementation is as follows: the conveying unit A and the front side wall or the rear side wall of the storage box 4 respectively have a distance to define the front space 411 and the Rear space 412; The first row of partition groups 51 is disposed in the front space 411, and a second row of partition groups 52 is disposed in the rear space 412. The second row of partition groups 52 includes a phase from top to bottom A plurality of second horizontal partitions 521 are provided at intervals, so as to partition out a plurality of second storage spaces 522 for placing the board or box C.

Another internal storage method of the storage box 4 is similar to the foregoing, the difference is that the storage position is changed from front to back to left and right, which can be coordinated as shown in FIG. 7, at this time, the plate or the box inside the storage box 4 is Whether it is placed in front of the conveyor unit A, side A zone B1 and C zone B3, or placed after the conveyor unit A, side B zone B2 and D zone B4, so that the conveyor unit A not only needs to drive the robot arm 1 to do In addition to the vertical movement, it is also necessary to control the robot arm 1 to move back and forth in the A zone B1 and the C zone B3 (or the B zone B2 and the D zone B4, the implementation method is: in the front space 411 or the rear space One of the 412 spaced apart sets the first row of partition groups and a third row of partition groups, the third row of partition groups includes a plurality of third horizontal partitions spaced from top to bottom for the area A plurality of third storage spaces for placing plates or boxes are separated, limited by the angle of view shown in the drawings, the third row of partition groups is not shown in the drawings; in the direction of the opening 42 in the space 41 It is defined as the front, and the right, back, and left are defined in the clockwise direction. The conveying mechanism 2 can drive the robot arm 1 to move in the left and right directions.

Finally, the internal storage method of the storage box 4 is that the plates or the box C can be placed in the areas A1 to B1 to B4. In this way, the conveying mechanism 2 needs to drive the robot arm 1 to move vertically In addition, the mechanical arm 1 needs to be driven to move laterally. The implementation manner is as follows: the first row of spacer groups 51 and the third row of spacer groups 53 are arranged at intervals in the front space 411. The column partition group includes a plurality of third horizontal partitions arranged at intervals from top to bottom to provide a third storage space for partitioning a plurality of plates or boxes; the columns are spaced apart in the rear space 412 The second-row separator group 52 and the fourth-row separator group are provided, and the second-row separator group 52 includes a plurality of second horizontal separators 521 spaced from top to bottom to provide a plurality of partitions The second storage space 522 for placing the board or box body, the fourth row of partition groups includes a plurality of fourth horizontal partitions spaced from top to bottom, so that a plurality of partitions can be separated to place the board or The fourth storage space of the box body is the same as the reason for the third-row separator group, the fourth-row separator group is not shown in the figure; the direction in the space 41 toward the opening 42 is defined as the front, The clockwise direction defines the right side, the rear side, and the left side. The conveying mechanism 2 can drive the robot arm 2 to move in the left-right direction. Also, taking FIG. 1 of this specification as an example, in the form of this embodiment, the conveying mechanism 2 includes a first conveying mechanism 21 that can directly or indirectly drive the robot arm 1 to move in the X-axis direction, and a A second conveying mechanism 22 that can drive the robot arm 1 and the first conveying mechanism 21 to move in the Z-axis direction.

When this creation is used to store wafer cassettes, in order to provide a better storage environment for the wafers inside the wafer cassette, this creation can provide an inert gas to the wafer cassette. For this, please refer to FIG. The creation can be further implemented as follows: under the condition that the receiving plate 14 is used to receive the box body, an inert gas supply unit 6 is further provided on one side of the storage box 4, and the inert gas supply unit 6 can communicate with the box body C for delivering inert gas into the box C.

Please refer to FIG. 8 and FIG. 1. As the conveying mechanism 2 increases with the use time, it may happen that the robot arm 1 cannot be accurately moved to the preset position, resulting in the receiving plate 14 being unable to receive the plate stably. The body or the box C, which in turn puts the board or the box C at the risk of tilt damage, to avoid this situation, the creation further has an automatic correction function, the implementation of which is: an information connection The position detector 7 of the control unit 3 can be used to detect the position of the receiving board 14 to receive the box or the board to obtain a position detection result; the control unit 3 can be used according to the The position detection result adjusts the action of the conveying mechanism 2 for adjusting the position of the receiving plate 14 to receive the box C or the plate.

According to the above embodiment, in case the control unit 3 is still unable to correct the receiving position of the receiving plate 14, in order to reduce the risk, the author further provides an alarm function to alert the relevant staff to make remedial and correction in advance. When the position detection result does not satisfy a preset value, the control unit 3 controls the conveying mechanism 2 according to the position detection result to re-drive the receiving plate 14 to receive the box or the plate; the control unit 3. The information is connected to an alarm 8. If the position detection result does not satisfy a preset value twice in succession, the control unit 3 controls the alarm 8 to operate.

In addition to the above-mentioned various functions, this creation also provides a warehousing logistics management function. The implementation mode is that an RFID reader 9 connected to the control unit is further provided, and the RFID reader 9 can be used to read the board. The RFID on the outside of the body or the box body obtains an RFID reading data for the control unit 3 to store the RFID reading data. In this way, the control unit 3 can determine the storage position of the board or the box newly according to the RFID reading result, or can be used to count the reading results of each RFID to understand the usage status of the storage mechanism in each period of time.

Moreover, regardless of whether the control unit 3 controls the rotation of the first arm 12, the second arm 13 and the receiving plate 14, or through the linkage unit, the first arm 12, the second arm 13 and the The receiving plates 14 are formed to rotate one after another, which are all within the scope of this specification.

In summary, this case complies with the requirements stipulated in the Patent Law, and the patent application is filed in accordance with the law. The above description only lists the preferred embodiments of the new creation, and the scope of rights in this case is still mainly listed in the claims.

A: Conveyor unit B1: Area A B2: Area B B3: Area C B4: District D D: spacing 1: Robotic arm 11: seat body 11A: Link 12: First arm 13: Second arm 14: Undertake board 2: Conveying mechanism 21: The first conveying mechanism 22: Second conveying mechanism 3: Control unit 4: storage box 41: Space 411: Front space 412: back space 42: opening 43: Platform 51: The first column partition group 511: first horizontal partition 512: first storage space 52: second column partition group 521: Second horizontal partition 522: Second storage space 6: Inert gas supply unit 7: Position detector 8: Alarm 9: RFID reader X: X axis Y: Y axis Z: Z axis

Figure 1 is a three-dimensional appearance of the robot arm of the new creation; Figure 2 is a front view of the appearance of another independent item of the new creation; Figure 3 is a schematic diagram of the right side of the new creation of the mechanical arm when it is activated; Figure 4 is a schematic diagram of the top view of the newly created mechanical arm when it is actuated; Figure 5 is a schematic diagram of the rear side view of the newly created mechanical arm when it is actuated; Figure 6 is a schematic perspective view of the right side of another independent item of the new creation; Figure 7 is a schematic top perspective view of another independent item of the new creation; Figure 8 is a schematic diagram of the connection of various elements of the new creation.

A: Conveyor unit

C: box

1: Robotic arm

11: seat body

11A: Link

12: First arm

13: Second arm

14: Undertake board

2: Conveying mechanism

21: The first conveying mechanism

22: Second conveying mechanism

X: X axis

Y: Y axis

Z: Z axis

Claims (10)

A mechanical arm that can handle boards or boxes includes: A body: It can be used to form a power connection with a conveying mechanism, and the top surface of the body is located in an imaginary horizontal plane; A first support arm: having two opposite first ends and a second end, the first end is pivotally arranged on the top surface of the seat body, the first support arm forms a first hypothesis when pivoting on the first end as an axis A plane, and the first imaginary plane is perpendicular to the imaginary horizontal plane; A second support arm: having two opposite third ends and a fourth end, the third end is pivotally arranged at the second end, and the second support arm forms a second hypothesis when the third end is rotated A plane, the second imaginary plane is parallel to the first imaginary plane; A receiving plate: pivotally arranged at the fourth end, and the receiving plate is perpendicular to the second imaginary plane, the receiving plate is used to receive the plate body or the box body; A control unit: respectively connecting the first arm, the second arm and the receiving plate with signals, the control unit can control the first arm, the second arm and the receiving plate to rotate so that the When the first arm and the second arm rotate to the beginning or end of the rotation path, the receiving plate is parallel to the imaginary horizontal plane. A storage mechanism for boards or boxes, including: A storage box with a space inside, and an opening and a platform are provided on the front side of the storage box, and the top surface of the platform is connected to the bottom edge of the opening; a transport unit is provided in the space, and the transport unit There is a distance from one of the front side wall or the rear side wall of the storage box to define a front space or a rear space, and a first row of partition plates is arranged in the front space or the rear space. The plate group includes a plurality of first horizontal partitions spaced from top to bottom to provide a first storage space for partitioning a plurality of plates or boxes; the conveying unit includes a mechanical arm and a power connection The conveying mechanism of the robotic arm can drive the robotic arm to move vertically. The robotic arm includes a seat body, a first support arm, a second support arm and a For the receiving plate, the top surface of the seat body is located in an imaginary horizontal plane; the first support arm has two opposite first and second ends, the first end is pivotally disposed on the top surface of the seat body, and the first support arm is The first end is a first imaginary plane perpendicular to the imaginary horizontal plane when the shaft pivots; the second arm has two opposite third ends and a fourth end, and the third end is pivotally disposed at the second end, And when the second arm rotates around the third end as an axis, a second imaginary plane parallel to the first imaginary plane is formed; the receiving plate is pivotally disposed at the fourth end, and the receiving plate is perpendicular to the second imaginary plane , The receiving board is used to receive the board body or the box body; a control unit respectively signals the first arm, the second arm, the receiving board and the conveying mechanism, and the control unit can control the first arm , The second arm and the receiving plate rotate so that when the first arm and the second arm rotate to the beginning or end of the rotation path, the receiving plate is parallel to the imaginary horizontal plane, and the control unit is available for control The action of the conveying mechanism is used to control whether the receiving board receives the state of the board or the box. The storage mechanism for a plate or box as described in item 2 of the patent application scope, wherein the conveying unit has a distance from the front or rear side wall of the storage box respectively to define the front space and the rear space; The first row of baffle groups is disposed in the front space, and a second row of baffle groups is disposed in the rear space. The second row of baffle groups includes a plurality of second horizontal partitions spaced from top to bottom, A plurality of second storage spaces for board or box can be separated by the supply area. The storage mechanism for a plate or box as described in item 2 of the scope of the patent application, wherein the first row of partition groups and the third row of partition groups are arranged at intervals in one of the front space or the rear space, The third row of partition plates includes a plurality of third horizontal partition plates spaced from top to bottom to provide a third storage space for partitioning a plurality of plates or boxes; The direction of the opening is defined as the front, and the clockwise direction defines the right, rear, and left. The conveying mechanism can drive the robot arm to move in the left and right directions. The storage mechanism for a plate or box as described in item 2 of the scope of the patent application, wherein the first row of baffle groups and a third row of baffle groups are arranged at intervals in the front space The group includes a plurality of third horizontal partitions spaced from top to bottom to provide a third storage space for partitioning a plurality of plates or boxes; a second space is arranged in the rear space A column separator group and a fourth column separator group, the second column separator group includes a plurality of second horizontal separators arranged at intervals from top to bottom, so that the plurality of partitions can be separated to provide a plate or a box The second storage space, the fourth row of partitions includes a plurality of fourth horizontal partitions spaced from top to bottom to provide a fourth storage space for partitioning a plurality of plates or boxes ; The direction towards the opening in the space is defined as the front, and the clockwise direction defines the right, rear, and left. The conveying mechanism can drive the robot arm to move in the left and right directions. The storage mechanism of the board or box as described in any one of the items 2 to 5 of the patent application scope, wherein under the condition that the receiving plate is used to receive the box, an inert is further provided on one side of the storage box A gas supply unit, the inert gas supply unit can be connected to the box body for delivering inert gas into the box body. As described in item 6 of the patent scope, the storage mechanism of the board or box is provided with a position detector connected to the control unit. The position detector can be used to detect that the receiving board receives the box or A position detection result is obtained from the position of the board body; the control unit can adjust the operation of the conveying mechanism according to the position detection result, so as to adjust the position of the receiving board to receive the box body or the board body. If the storage mechanism of the board or box is described in item 7 of the patent application scope, when the position detection result does not satisfy a preset value, the control unit controls the conveying mechanism to re-drive the transport mechanism according to the position detection result The receiving board receives the box or the board; the control unit information is connected to an alarm. If the position detection result does not satisfy a preset value twice in succession, the control unit controls the operation of the alarm. The storage mechanism of the board or box as described in item 2 of the patent scope, wherein an RFID reader connected to the control unit is further provided, and the RFID reader can be used to read the board or the box The RFID outside the body obtains an RFID reading data for the control unit to store the RFID reading data. The storage mechanism of the board body or box body as described in item 9 of the patent application scope, wherein a slip prevention unit is laid on the top surface of the receiving board.

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