TWI747623B - Calibration compensation system and method for wafer box storage - Google Patents

Abstract

A calibration compensation system for wafer box storage includes an arithmetic processor, a motion controller, a first CCD lens, a second CCD lens, a first laser light source transceiver, a second laser light source transceiver and a mechanical arm. The first laser light source transceiver is used to capture the first depth component value of the first shed target coordinate of the first shed target center and send it to the arithmetic processor. The second laser light source transceiver is used to capture the second depth component value of the second shed target coordinate of the second shed target center and send it to the arithmetic processor. The mechanical arm makes corrections to the corresponding ordinary shed according to the control signal and the position and the angle compensation data of the motion controller to complete the alignment of the wafer box and the ordinary shed.

Description

Correction and compensation system and method for wafer box storage

A wafer cassette storage, especially a correction and compensation system and method for wafer cassette storage.

The invention patent of the Republic of China Publication No. 201730067 discloses a related wafer cassette storage device, which includes: a pair of storage parts, each has a plurality of racks for wafer cassette storage in a row, each pair of racks Are arranged opposite to each other; and a transfer device is arranged between the pair of storage parts, and a pair of guide rails are laid along the pair of storage parts, and a trolley is set on the pair of guide rails, and a rotating table is set on the trolley, A mast is provided on the rotating platform, a lifting platform is provided on the mast, a transfer mechanism is provided on the lifting platform, and the transfer mechanism has a fork; therefore, the transfer device is controlled by the transfer of the trolley and the lifting platform The lift control and the rotation control of the rotating table move the transfer mechanism to the front of the designated shelf, and then extend the transfer mechanism to allow the fork to enter the shelf, and then take out or put the wafer box into it, resulting in the wafer box being It is transferred between the scaffolds for storage management.

At present, the existing school shed technology adopts the way of man-machine collaboration. After the mechanical arm is manually controlled to reach the positioning, adjust the support plate on the shed to make the relative position of the arm and the support plate consistent to complete the school shed action. A lot of manpower and time must be consumed in the process. Therefore, how to solve the above-mentioned problems and deficiencies of the prior art is a subject that the related industry urgently wants to develop.

The present invention provides a correction and compensation system for wafer cassette storage, which can automatically detect and feedback the position to give the robot arm the correction function, and reduce the teaching time of personnel.

The present invention provides a calibration and compensation system for wafer cassette storage, which is used to calibrate and compensate a plurality of ordinary sheds in the wafer cassette storage to be the same as the reference shed, each of which has a first shed target center and a The second shed is a target center, the reference shed has a first reference target center and a second reference target center, and the first reference target coordinate of the first reference target center has a first reference length component value and a first reference width The component value and the first reference depth component value, and the second reference target coordinate of the second reference target center has a second reference length component value, a second reference width component value and a second reference depth component value, and the wafer cassette is stored The correction and compensation system includes an arithmetic processor, a motion controller, a first CCD lens, a second CCD lens, a first laser light source transceiver, a second laser light source transceiver, and a robotic arm. The motion controller is connected to the computing processor, the first CCD lens is electrically connected to the computing processor, the second CCD lens is electrically connected to the computing processor, the first laser light source transceiver is electrically connected to the computing processor, and the second CCD lens is electrically connected to the computing processor. The laser light source transceiver is electrically connected to the computing processor, and the robotic arm is electrically connected to the motion controller. The arithmetic processor is used to receive the relevant data of the ordinary shed to calculate the position and angle compensation data of the ordinary shed. The motion controller receives the position and angle compensation data sent by the arithmetic processor, and the motion controller contains a database. The first CCD lens is used to capture the first length component value and the first width component value of the first shed target coordinate of the first shed target center of the ordinary shed and transmit to the arithmetic processor. The second CCD lens is used to capture the second length component value and the second width component value of the second shed target coordinate of the second shed target center of the ordinary shed and transmit the second length component value and the second width component value to the arithmetic processor. The first laser light source transceiver is used to capture the first depth component value of the first shed target coordinate at the center of the first shed target and send it to the arithmetic processor. The second laser light source transceiver is used to capture the second depth component value of the second shed target coordinate at the center of the second shed target and send it to the arithmetic processor. The robotic arm is based on the control signal of the motion controller The position and angle compensation data will be corrected to the corresponding ordinary shelf to complete the alignment of the wafer cassette and the ordinary shelf.

In an embodiment of the present invention, the arithmetic processor calculates the first length compensation component value according to the first reference length component value, the second reference length component value, the first length component value and the second length component value, and It is one of the position and angle compensation data.

In an embodiment of the present invention, the arithmetic processor calculates the first width compensation component value according to the first reference width component value, the second reference width component value, the first width component value and the second width component value, and It is one of the position and angle compensation data.

In an embodiment of the present invention, the distance between the first CCD lens and the second CCD lens is a first fixed length, and the arithmetic processor is based on the first reference width component value, the second reference width component value, and the first width The component value, the second width component value and the first fixed length are used to calculate the first angle compensation value, which is one of the position and angle compensation data.

In an embodiment of the present invention, the arithmetic processor calculates the first depth compensation component value according to the first reference depth component value, the first depth component value, the second reference depth component value, and the second depth component value. It is one of the position and angle compensation data.

In an embodiment of the present invention, the distance between the first laser light source transceiver and the second laser light source transceiver is a second fixed length, and the arithmetic processor is based on the first reference depth component value and the first depth component value. Value, the second reference depth component value, the second depth component value and the second fixed length to calculate the second angle compensation value, which is one of the position and angle compensation data.

In an embodiment of the present invention, the compensation sequence is to first compensate the first length compensation component value and the first width compensation component value of all the plurality of ordinary sheds in sequence, and then sequentially compensate the first length compensation component value of all the plurality of ordinary sheds A depth compensation component value, and finally the first length compensation component value, the first width compensation component value and the first depth compensation component value of all the multiple ordinary sheds are sequentially compensated.

In an embodiment of the present invention, if one of the position and angle compensation data exceeds a preset value, the staff will be notified for processing, and then the staff will determine whether to take a photo again or measure the depth, and if so, proceed Re-photograph or measure the depth; if not, record the abnormal value of the ordinary booth and store it in the database.

The present invention provides a correction and compensation method for wafer box storage, which is used in a correction and compensation system for wafer box storage, which corrects and compensates multiple ordinary sheds in the wafer box storage to be the same as the reference shed, and each ordinary shed has The first shed target center and the second shed target center, the reference shed has a first reference target center and a second reference target center, and the first reference target coordinate of the first reference target center has the first reference The length component value, the first reference width component value and the first reference depth component value, and the second reference target coordinate of the second reference target center has a second reference length component value, a second reference width component value and a second reference Depth component value, the correction and compensation system of wafer cassette storage includes arithmetic processor, motion controller, first CCD lens, second CCD lens, first laser light source transceiver, second laser light source transceiver and robotic arm, The motion controller includes a database, the motion controller is connected to the computing processor, the first CCD lens is electrically connected to the computing processor, the second CCD lens is electrically connected to the computing processor, and the first laser light source transceiver is electrically connected Connected to the computing processor, the second laser light source transceiver is electrically connected to the computing processor, and the robotic arm is electrically connected to the motion controller. The calibration compensation method of the wafer cassette storage includes the following steps: calibration start; measurement reference shelf ; Make the first correction; make the second correction; make the third correction and the end of the correction. The steps of performing the first correction include: capturing the first length component value and the first width component value of the first shed target coordinate of the first shed target center of the ordinary shed through the first CCD lens and transmit it To the arithmetic processor; through the second CCD lens, to capture the second length component value and the second width component value of the second shed target coordinate of the second shed target center of the ordinary shed and send it to the arithmetic processor ; Through the arithmetic processor, according to the first reference length component value, the second reference length component value, the first length component value and the second length component value to calculate the first length compensation component value; through the arithmetic processor, according to the first Reference width component value, second reference width component value, The first width component value and the second width component value are used to calculate the first width compensation component value; through the arithmetic processor, according to the first reference width component value, the second reference width component value, the first width component value, and the second width The component value and the first fixed length are used to calculate the first angle compensation value; to determine whether the compensation correction amount exceeds the preset value; Shed to make corrections. The step of performing the second correction includes: capturing the first depth component value of the first shed target coordinate at the center of the first shed target through the first laser light source transceiver and send it to the arithmetic processor; The second laser light source transceiver to capture the second depth component value of the second shed target coordinate at the center of the second shed target and send it to the arithmetic processor; through the arithmetic processor, according to the first reference depth component Value, the first depth component value, the second reference depth component value and the second depth component value to calculate the first depth compensation component value; through the arithmetic processor, according to the first reference depth component value, the first depth component value, the first depth component value Two reference depth component values, a second depth component value, and a second fixed length are used to calculate the second angle compensation value; determine whether the compensation correction amount exceeds the preset value; and if not, use the robot arm according to the control signal of the motion controller and The position and angle compensation data are corrected to the corresponding normal shed. Perform the third correction, which is a step of performing the first correction and the second correction at the same time. Wherein, the distance between the first CCD lens and the second CCD lens is a first fixed length, and the distance between the laser light source transceiver and the second laser light source transceiver is a second fixed length, where the position and angle compensation The data includes a first length compensation component value, a first width compensation component value, a first angle compensation value, a first depth compensation component and a second angle compensation value.

In summary, the correction and compensation system and method for wafer cassette storage proposed in the present invention can achieve the following effects:

1. With one-key calibration function (connect the visual coordinate with the mechanical coordinate, so that the visual system has the measurement function).

2. Equipped with automatic detection and feedback position for the robot arm to correct the function, reducing the time for personnel to teach.

3. Provide manageable and controllable data to detect or correct storage position deviations.

The following detailed descriptions are given through specific embodiments, so that it will be easier to understand the purpose, technical content, features, and effects of the present invention.

100: Correction and compensation system for wafer cassette storage

500: Process of correction and compensation method for wafer cassette storage

S510, S520, S530, S540: steps

600: Benchmark shed measurement process method

S610, S620, S630, S640: steps

700: The first correction process of the correction compensation method for wafer cassette storage

S701, S702, S703, S704, S705, S706, S707, S708, S709, S710: steps

800: The second correction process of the correction compensation method for wafer cassette storage

S801, S802, S803, S804, S805, S806, S807, S808, S809, S810: steps

900: The third correction process of the correction compensation method for wafer cassette storage

S901, S902, S903, S904, S905, S906, S907, S908, S909, S910, S911: steps

110: arithmetic processor

120: Motion controller

122: database

130: The first CCD lens

140: The second CCD lens

150: The first laser light source transceiver

160: The second laser light source transceiver

170: Robotic Arm

AC: First shed target center

BC: Target Center of the Second Shed

CS: Control signal

GA: Ordinary Shed

L1: The first fixed length

L2: second fixed length

PDS: position and angle compensation data

X1: the first length component value

Y1: the first depth component value

Z1: the first width component value

X2: second length component value

Y2: second depth component value

Z2: second width component value

The first figure is a schematic diagram of the correction and compensation system of the wafer cassette storage of the present invention.

The second figure is a schematic diagram of the shed position calibration of the calibration compensation system of the wafer cassette storage of the present invention.

The third figure is another schematic diagram of the shed calibration of the calibration compensation system of the wafer cassette storage of the present invention.

The fourth figure is another schematic diagram of the shed calibration of the calibration compensation system of the wafer cassette storage of the present invention.

The fifth figure is a flowchart of the calibration and compensation method of the wafer cassette storage of the present invention.

The sixth figure is a flow chart of the reference shed measurement flow chart of the calibration and compensation method for the wafer cassette storage of the present invention.

The seventh figure is the first correction flow chart of the correction and compensation method for wafer cassette storage of the present invention.

The eighth figure is the second correction flow chart of the correction and compensation method of the wafer cassette storage of the present invention.

The ninth figure is the third correction flow chart of the correction and compensation method for the wafer cassette storage of the present invention.

In order to solve the problem of consuming a lot of manpower and time cost for the existing manual calibration sheds, the inventor has improved the criticism of existing products after years of research and development. The following will describe in detail how the present invention uses a wafer box storage Correct the compensation system to achieve the most efficient functional requirements.

Please refer to Figures 1 to 4 at the same time. Figure 1 is a schematic diagram of the calibration and compensation system for wafer cassette storage of the present invention. The second figure is a schematic diagram of the shed position calibration of the calibration compensation system of the wafer cassette storage of the present invention. The third figure is the shed calibration of the correction and compensation system for wafer cassette storage of the present invention. Another schematic diagram of the standard. The fourth figure is another schematic diagram of the shed calibration of the calibration compensation system of the wafer cassette storage of the present invention. The calibration and compensation system 100 for wafer cassette storage provided by the embodiment of the present invention is used to calibrate and compensate multiple ordinary sheds in the wafer cassette storage to be the same as a reference shed, and each ordinary shed has a first shed. A target center and a second shed target center, the fiducial shed has a first fiducial target center and a second fiducial target center, and one of the first fiducial target centers has a first fiducial target coordinate having A first reference length component value, a first reference width component value, and a first reference depth component value, and a second reference target coordinate of the second reference target center has a second reference length component value, a A second reference width component value and a second reference depth component value.

In the embodiment of the present invention, the correction and compensation system 100 for wafer cassette storage includes an arithmetic processor 110, a motion controller 120, a first CCD lens 130, a second CCD lens 140, a first laser light source transceiver 150, and a second The laser light source transceiver 160 and the robotic arm 170. The motion controller 120 is connected to the computing processor 110, the first CCD lens 130 is electrically connected to the computing processor 110, the second CCD lens 140 is electrically connected to the computing processor 110, and the first laser light source transceiver 150 is electrically connected To the computing processor 110, the second laser light source transceiver 160 is electrically connected to the computing processor 110, and the robotic arm 170 is electrically connected to the motion controller 120.

First, the first CCD lens 130 captures the first length component value X1 and the first width component value Z1 of the first shed target center AC of the ordinary shed GA and sends them to the arithmetic processor 110. The second CCD lens 140 captures the second length component value X2 and the second width component value Z2 of the second shed target center BC of the ordinary shed GA and sends them to the arithmetic processor 110. After that, the first laser light source transceiver 150 captures the first depth component value Y1 of the first shed target coordinate of the first shed target center AC and transmits it to the arithmetic processor 110, and the second laser light source transmits and receives The device 160 captures the second depth component value Y2 of the second shed target coordinate of the second shed target center BC and transmits it to the arithmetic processor 110. Next, the arithmetic processor 110 will receive the relevant data of the general shed GA to calculate the position and angle compensation data of the general shed GA, and the motion controller 120 will receive the calculation processing The position and angle compensation data transmitted by the controller 110, in which the motion controller 120 includes a database 122. Finally, the robotic arm 170 will correct the corresponding ordinary shelf GA according to the control signal CS of the motion controller 120 and the position and angle compensation data PDS to complete the alignment between the wafer cassette and the ordinary shelf GA.

Furthermore, the arithmetic processor 110 calculates the first length compensation component value according to the first reference length component value, the second reference length component value, the first length component value X1 and the second length component value X2, which is the position One with angle compensation data PDS. In addition, the arithmetic processor 110 calculates the first width compensation component value according to the first reference width component value, the second reference width component value, the first width component value Z1 and the second width component value Z2, which are the position and the angle One of the compensation data.

In addition, the distance between the first CCD lens 130 and the second CCD lens 140 is the first fixed length L1, and the arithmetic processor 110 will perform the calculation according to the first reference width component value, the second reference width component value, and the first width component value Z1. , The second width component value Z2 and the first fixed length L1 are used to calculate the first angle compensation value, which is one of the position and angle compensation data PDS. The arithmetic processor 110 calculates the first depth compensation component value according to the first reference depth component value, the first depth component value Y1, the second reference depth component value, and the second depth component value Y2, which is the position and angle compensation data One of PDS. In addition, the distance between the first laser light source transceiver 150 and the second laser light source transceiver 160 is the second fixed length L2. After that, the arithmetic processor 110 will perform the calculation according to the first reference depth component value and the first depth component value. Y1, the second reference depth component value, the second depth component value Y2 and the second fixed length L2 are used to calculate the second angle compensation value, which is one of the position and angle compensation data PDS.

It is worth mentioning that the compensation sequence is to first compensate the first length compensation component value and the first width compensation component value of all the ordinary sheds in sequence, then compensate the first depth compensation component value of all the ordinary sheds in sequence, and finally Compensate the first length compensation component value, the first width compensation component value and the first depth compensation component value of all the ordinary sheds in sequence. If one of the position and angle compensation data exceeds the preset value, an alarm will be notified to the personnel for processing, and then the personnel will determine whether to take a photo or measure again Depth measurement, if yes, take a photo again or measure the depth; if not, record the abnormal value of the ordinary booth and store it in the database.

Please refer to the fifth figure. The fifth figure is a flowchart of the calibration and compensation method of the wafer cassette storage of the present invention. The process 500 of the calibration compensation method for wafer cassette storage includes the following steps: calibration start, reference shed measurement (step S510), first calibration (step S520), second calibration (step S530), and third calibration (step S530). Step S540) and the calibration ends. Please refer to the sixth figure. The sixth figure is a flow chart of the reference shed measurement flow chart of the calibration and compensation method for the wafer cassette storage of the present invention. The reference shed measurement process method 600 includes the following steps: move the arm to the reference shed (step S610), CCD camera calculation (step S620), laser measurement distance (step S630), record the reference value (X, Y, Z) ) And store it in the database, and obtain the data of the benchmark shed through the above steps. The reference shelf has a first reference target center and a second reference target center, and the first reference target coordinate of the first reference target center has a first reference length component value, a first reference width component value, and a first reference depth component The second reference target coordinate at the center of the second reference target has a second reference length component value, a second reference width component value, and a second reference depth component value.

Please refer to FIG. 7, FIG. 8, and FIG. 9. FIG. The eighth figure is the second correction flow chart of the correction and compensation method of the wafer cassette storage of the present invention. The ninth figure is the third correction flow chart of the correction and compensation method for the wafer cassette storage of the present invention. The first correction process 700 of the correction and compensation method for wafer cassette storage includes the following steps: move the arm to the first shed (step S701); calculate the CCD camera (step S702); calculate the correction amount and store it in the database (step S702) S703); determine whether the correction amount exceeds the setting (step S704); compensate the correction amount (X, Z) (step S705); determine whether to correct all the booths (step S706); alarm notification personnel processing (step S707); personnel determine whether Re-photograph (step S708); record the abnormal value of the booth and store it in the database (step S709); move the arm to the next booth (step S710). The second correction process 800 of the correction and compensation method for wafer cassette storage includes the following steps: move the arm to the first shed (step S801); measure the distance with the laser (step S802); calculate the correction amount and store it in the database (Step S803); Determine whether the correction amount Exceeding the setting (step S804); compensation correction amount (Y) (step S805); determine whether to correct all booths (step S806); alarm notification personnel processing (step S807); personnel determine whether to re-measure (step S808); record The shed value is abnormal and stored in the database (step S809); the arm moves to the next shed (step S810). The third correction process 900 of the correction and compensation method for wafer cassette storage includes the following steps: moving the arm to the next shed (step S901); CCD photographing calculation (step S902); lightning measurement and distance measurement (step S903); calculation and correction And store it in the database (step S904); determine whether the correction amount exceeds the setting (step S905); compensate the correction amount (X, Z) (step S906); determine whether to correct all the booths (step S907); alert the staff Processing (step S908); personnel judge whether to re-measure (step S909); record the abnormal value of the booth and store it in the database (step S910); move the arm to the next booth (step S911).

In detail, in the first correction stage, the first CCD lens is used to capture the first length component value and the first width component value of the first shed target coordinate of the first shed target center of the ordinary shed And sent to the arithmetic processor. The second length component value and the second width component value of the second shed target coordinate of the second shed target center of the ordinary shed are captured through the second CCD lens and sent to the arithmetic processor. Through the arithmetic processor, the first length compensation component value is calculated according to the first reference length component value, the second reference length component value, the first length component value and the second length component value. Through the arithmetic processor, the first width compensation component value is calculated according to the first reference width component value, the second reference width component value, the first width component value and the second width component value. Through the arithmetic processor, the first angle compensation value is calculated according to the first reference width component value, the second reference width component value, the first width component value, the second width component value and the first fixed length. After that, the arithmetic processor will determine whether the compensation correction amount exceeds the preset value, and finally, if not, it will make corrections to the corresponding ordinary booth through the robot arm and according to the control signal of the motion controller and the position and angle compensation data.

Next, in the second correction stage, the first depth component value of the first shed target coordinate at the center of the first shed target is captured through the first laser light source transceiver and sent to the arithmetic processor. Capture the coordinates of the second shed target at the center of the second shed target through the second laser light source transceiver The second depth component value is sent to the arithmetic processor. Through the arithmetic processor, the first depth compensation component value is calculated according to the first reference depth component value, the first depth component value, the second reference depth component value, and the second depth component value. Through the arithmetic processor, the second angle compensation value is calculated according to the first reference depth component value, the first depth component value, the second reference depth component value, the second depth component value and the second fixed length. After that, the arithmetic processor will determine whether the compensation correction amount exceeds the preset value, and finally, if not, it will make corrections to the corresponding ordinary booth through the robot arm and according to the control signal of the motion controller and the position and angle compensation data.

Finally, in the third revision stage, it is a step of simultaneously performing the first revision and the second revision. The distance between the first CCD lens and the second CCD lens is a first fixed length, where the distance between the first laser light source transceiver and the second laser light source transceiver is a second fixed length, where the position and angle compensation The data includes a first length compensation component value, a first width compensation component value, a first angle compensation value, a first depth compensation component and a second angle compensation value.

In addition, it should be noted that if one of the position and angle compensation data exceeds the preset value, the staff will be notified for processing, and then the staff will determine whether to take a photo or measure the depth again, if so, take a photo or Measure the depth; if not, record the abnormal value of the ordinary shed and store it in the database.

In summary, the correction and compensation system and method for wafer cassette storage proposed in the present invention can achieve the following effects:

1. With one-key calibration function (connect the visual coordinate with the mechanical coordinate, so that the visual system has the measurement function).

2. Equipped with automatic detection and feedback position for the robot arm to correct the function, reducing the time for personnel to teach.

3. Provide manageable and controllable data to detect or correct storage position deviations.

Only the above are only preferred embodiments of the present invention, and are not used to limit the scope of the present invention. Therefore, all equivalent changes or modifications made in accordance with the characteristics and spirit of the application scope of the present invention shall be included in the patent application scope of the present invention.

100: Correction and compensation system for wafer cassette storage

110: arithmetic processor

120: Motion controller

122: database

130: The first CCD lens

140: The second CCD lens

150: The first laser light source transceiver

160: The second laser light source transceiver

170: Robotic Arm

CS: Control signal

PDS: position and angle compensation data

Claims (10)

A calibration and compensation system for wafer cassette storage is used to calibrate and compensate multiple ordinary sheds in the wafer cassette storage to be the same as a reference shed, each of which has a first shed target center and a first shed. Two shed target centers, the reference shed has a first reference target center and a second reference target center, and a first reference target coordinate of the first reference target center has a first reference length component value , A first reference width component value and a first reference depth component value, and a second reference target coordinate of the second reference target center has a second reference length component value, a second reference width component value and A second reference depth component value. The correction and compensation system of the wafer cassette storage includes: an arithmetic processor for receiving relevant data of the ordinary shed to calculate a position and angle compensation data of the ordinary shed; a movement The controller is connected to the arithmetic processor and receives the position and angle compensation data sent by the arithmetic processor, wherein the motion controller includes a database; a first CCD lens is electrically connected to the arithmetic processor, the The first CCD lens is used to capture a first length component value and a first width component value of a first shed target center of the first shed target of the ordinary shed and send them to the arithmetic processor ; A second CCD lens, electrically connected to the arithmetic processor, the second CCD lens used to capture the common shed of the second shed target center one of the second shed target coordinates one second The length component value and a second width component value are sent to the arithmetic processor; a first laser light source transceiver is electrically connected to the arithmetic processor, and the first laser light source transceiver is used to capture the first One of the first depth component values of the first shed target coordinates at the center of the shed target is transmitted to the arithmetic processor; A second laser light source transceiver, electrically connected to the arithmetic processor, the second laser light source transceiver for capturing one of the second shed target coordinates of the second shed target center The depth component value is transmitted to the arithmetic processor; and a robotic arm is electrically connected to the motion controller, and the robotic arm sends a signal to the corresponding ordinary shed according to a control signal of the motion controller and the position and angle compensation data. Make corrections to complete the alignment between the wafer cassette and the ordinary shed. The correction and compensation system for wafer cassette storage according to claim 1, wherein the arithmetic processor is based on the first reference length component value, the second reference length component value, the first length component value and the second length component Value to calculate a first length compensation component value, which is one of the position and angle compensation data. The correction and compensation system for wafer cassette storage according to claim 2, wherein the arithmetic processor is based on the first reference width component value, the second reference width component value, the first width component value and the second width component Value to calculate a first width compensation component value, which is one of the position and angle compensation data. The correction and compensation system for wafer cassette storage according to claim 1, wherein the distance between the first CCD lens and the second CCD lens is a first fixed length, and the arithmetic processor is based on the first reference width component Value, the second reference width component value, the first width component value, the second width component value and the first fixed length to calculate a first angle compensation value, which is one of the position and angle compensation data. The correction and compensation system for wafer cassette storage according to claim 3, wherein the arithmetic processor is based on the first reference depth component value, the first depth component value, the second reference depth component value, and the second depth component Value to calculate a first depth compensation component value, which is one of the position and angle compensation data. The calibration and compensation system for wafer cassette storage according to claim 1, wherein the distance between the first laser light source transceiver and the second laser light source transceiver is a second fixed length, and the arithmetic processor is based on The first reference depth component value, the first depth component value, the second reference depth component value, the second depth component value and the second fixed length are used to calculate a second angle compensation value, which is the position and One of the angle compensation data. The correction and compensation system for wafer cassette storage according to claim 5, wherein the compensation sequence is to first compensate the first length compensation component value and the first width compensation component value of all the ordinary sheds in sequence, and then sequentially Compensate the first depth compensation component value of all the ordinary sheds, and finally compensate the first length compensation component value, the first width compensation component value and the first depth compensation component of all the ordinary sheds in sequence value. The correction compensation system for wafer cassette storage as described in claim 1, wherein if one of the position and angle compensation data exceeds the preset value, the personnel will be notified for processing, and then the personnel will determine whether to take a picture or measure again Depth measurement, if yes, take a photo again or measure the depth; if no, record the abnormal value of the ordinary shed and store it in the database. A correction and compensation method for wafer cassette storage is used in a correction compensation system for wafer cassette storage. It corrects and compensates multiple common sheds in the wafer cassette storage to be the same as a reference shed, and each common shed has one A first shed target center and a second shed target center, the reference shed has a first reference target center and a second reference target center, and the first reference target center is a first reference target The target coordinates have a first reference length component value, a first reference width component value, and a first reference depth component value, and a second reference target coordinate of the second reference target center has a second reference length component Value, a second reference width component value and a second reference depth component value, the correction and compensation system of the wafer cassette storage includes an arithmetic processor, a motion controller, a first CCD lens, a second CCD lens, A first laser light source transceiver, a second laser light source transceiver and a robotic arm, the motion controller includes a database, the motion controller is connected to the computing processor, the first CCD lens Is electrically connected to the computing processor, the second CCD lens is electrically connected to the computing processor, the first laser light source transceiver is electrically connected to the computing processor, and the second laser light source transceiver is electrically connected Connected to the arithmetic processor, the robotic arm is electrically connected to the motion controller. The calibration and compensation method of the wafer cassette storage includes: calibration start; measuring the reference shed; performing the first correction, including: A CCD lens to capture a first length component value and a first width component value of a first shed target coordinate of the first shed target center of the common shed and send to the arithmetic processor; Through the second CCD lens, a second length component value and a second width component value of a second shed target coordinate of the second shed target center of the ordinary shed are captured and sent to the calculation Processor; through the arithmetic processor, according to the first reference length component value, the second reference length component value, the first length component value and the second length component value to calculate a first length compensation component value; Through the arithmetic processor, a first width compensation component value is calculated according to the first reference width component value, the second reference width component value, the first width component value and the second width component value; through the calculation The processor calculates a first angle compensation value according to the first reference width component value, the second reference width component value, the first width component value, the second width component value, and a first fixed length; determining Whether the compensation correction amount exceeds the preset value; and If not, use the robot arm to correct the corresponding ordinary booth according to a control signal of the motion controller and the position and angle compensation data; perform the second correction, including: through the first laser light source transceiver, To capture a first depth component value of the first shed target at the center of the first shed target and send it to the arithmetic processor; capture the first depth component value through the second laser light source transceiver One of the second depth component values of the second shed target coordinates at the center of the two shed targets is transmitted to the arithmetic processor; through the arithmetic processor, according to the first reference depth component value and the first depth component Value, the second reference depth component value, and the second depth component value to calculate a first depth compensation component value; through the arithmetic processor, according to the first reference depth component value, the first depth component value, the The second reference depth component value, the second depth component value and a second fixed length are used to calculate a second angle compensation value; determine whether the compensation correction amount exceeds a preset value; and if not, use the robot arm according to the movement The control signal of the controller and the position and angle compensation data are corrected to the corresponding ordinary shed, and the third correction is performed, which is a step of simultaneously performing the first correction and the second correction; and the correction ends, wherein, The distance between the first CCD lens and the second CCD lens is the first fixed length, and the distance between the first laser light source transceiver and the second laser light source transceiver is the second fixed length , Wherein the position and angle compensation data includes the first length compensation component value, the first width compensation component value, the first angle compensation value, the first depth compensation component, and the second angle compensation value. The correction compensation method for wafer cassette storage as described in claim 9, wherein if one of the position and angle compensation data exceeds the preset value, the personnel will be notified for processing, and then the personnel will determine whether to re-photograph or measure Depth measurement, if yes, take a photo again or measure the depth; if no, record the abnormal value of the ordinary shed and store it in the database.

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