TWI747623B - Calibration compensation system and method for wafer box storage - Google Patents
Calibration compensation system and method for wafer box storage Download PDFInfo
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一種晶圓盒倉儲,尤指一種晶圓盒倉儲的校正補償系統與方法。 A wafer cassette storage, especially a correction and compensation system and method for wafer cassette storage.
中華民國公開編號第201730067號發明專利,係揭露一種有關晶圓盒保管裝置,其包括有:一對之收納部,各具有成列供晶圓盒儲置之複數個棚架,各對棚架被相向配置;以及一移載裝置,設置於該對收納部之間,而將一對導軌沿著該對收納部鋪設,並於該對導軌上設置一台車,該台車上設置一旋轉台,該旋轉台上設置一桅桿,該桅桿上設置一升降台,該升降台上設置一移載機構,該移載機構具有一叉架;因此,該移載裝置藉由台車之移行控制、升降台之升降控制及旋轉台之旋轉控制,將移載機構移動至指定之棚架前,再使移載機構伸長讓叉架進入棚架內,進而取出或放入晶圓盒,致使晶圓盒得於各棚架之間被移載而進行倉儲管理。 The invention patent of the Republic of China Publication No. 201730067 discloses a related wafer cassette storage device, which includes: a pair of storage parts, each has a plurality of racks for wafer cassette storage in a row, each pair of racks Are arranged opposite to each other; and a transfer device is arranged between the pair of storage parts, and a pair of guide rails are laid along the pair of storage parts, and a trolley is set on the pair of guide rails, and a rotating table is set on the trolley, A mast is provided on the rotating platform, a lifting platform is provided on the mast, a transfer mechanism is provided on the lifting platform, and the transfer mechanism has a fork; therefore, the transfer device is controlled by the transfer of the trolley and the lifting platform The lift control and the rotation control of the rotating table move the transfer mechanism to the front of the designated shelf, and then extend the transfer mechanism to allow the fork to enter the shelf, and then take out or put the wafer box into it, resulting in the wafer box being It is transferred between the scaffolds for storage management.
目前既有的校棚技術,採用人機協作的方式校棚。由人工操控機械手臂到達定位之後,再調整棚位上的承盤,使手臂與承盤的相對位置呈現一致,以完成校棚動作。過程中必須消耗大量的人力與時間成本。是以,如何解決上述現有技術之問題與缺失,即為相關業者所亟欲研發之課題所在。 At present, the existing school shed technology adopts the way of man-machine collaboration. After the mechanical arm is manually controlled to reach the positioning, adjust the support plate on the shed to make the relative position of the arm and the support plate consistent to complete the school shed action. A lot of manpower and time must be consumed in the process. Therefore, how to solve the above-mentioned problems and deficiencies of the prior art is a subject that the related industry urgently wants to develop.
本發明提出一種晶圓盒倉儲的校正補償系統,能夠具備自動檢測及回授位置給予機械手臂補正功能,減少人員教導時間。 The present invention provides a correction and compensation system for wafer cassette storage, which can automatically detect and feedback the position to give the robot arm the correction function, and reduce the teaching time of personnel.
本發明提供一種晶圓盒倉儲的校正補償系統,用以將晶圓盒倉儲內的多個普通棚進行校正補償以相同於基準棚,每一該普通棚具有第一棚位標靶中心與一第二棚位標靶中心,基準棚具有第一基準標靶中心與第二基準標靶中心並且第一基準標靶中心之第一基準標靶座標具有第一基準長度分量值、第一基準寬度分量值與第一基準深度分量值,並且第二基準標靶中心之第二基準標靶座標具有第二基準長度分量值、第二基準寬度分量值與第二基準深度分量值,晶圓盒倉儲的校正補償系統包括運算處理器、運動控制器、第一CCD鏡頭、第二CCD鏡頭、第一雷射光源收發器、第二雷射光源收發器與機械手臂。運動控制器連接至運算處理器,第一CCD鏡頭電性連接至運算處理器,第二CCD鏡頭電性連接至運算處理器,第一雷射光源收發器電性連接至運算處理器,第二雷射光源收發器電性連接至運算處理器,機械手臂電性連接至該運動控制器。運算處理器用以接收普通棚之相關數據資料來計算出普通棚之位置與角度補償數據。運動控制器接收運算處理器傳送之位置與角度補償數據,其中運動控制器包含有資料庫。第一CCD鏡頭用以擷取普通棚之第一棚位標靶中心之第一棚位標靶座標之第一長度分量值與第一寬度分量值並且傳送至運算處理器。第二CCD鏡頭用以擷取普通棚之第二棚位標靶中心之第二棚位標靶座標之第二長度分量值與第二寬度分量值並且傳送至運算處理器。第一雷射光源收發器用以擷取第一棚位標靶中心之第一棚位標靶座標之第一深度分量值並且傳送至運算處理器。第二雷射光源收發器用以擷取第二棚位標靶中心之第二棚位標靶座標之第二深度分量值並且傳送至運算處理器。機械手臂根據運動控制器之控制信號 與位置與角度補償數據來向對應的普通棚進行修正,以完成晶圓盒與普通棚之對位。 The present invention provides a calibration and compensation system for wafer cassette storage, which is used to calibrate and compensate a plurality of ordinary sheds in the wafer cassette storage to be the same as the reference shed, each of which has a first shed target center and a The second shed is a target center, the reference shed has a first reference target center and a second reference target center, and the first reference target coordinate of the first reference target center has a first reference length component value and a first reference width The component value and the first reference depth component value, and the second reference target coordinate of the second reference target center has a second reference length component value, a second reference width component value and a second reference depth component value, and the wafer cassette is stored The correction and compensation system includes an arithmetic processor, a motion controller, a first CCD lens, a second CCD lens, a first laser light source transceiver, a second laser light source transceiver, and a robotic arm. The motion controller is connected to the computing processor, the first CCD lens is electrically connected to the computing processor, the second CCD lens is electrically connected to the computing processor, the first laser light source transceiver is electrically connected to the computing processor, and the second CCD lens is electrically connected to the computing processor. The laser light source transceiver is electrically connected to the computing processor, and the robotic arm is electrically connected to the motion controller. The arithmetic processor is used to receive the relevant data of the ordinary shed to calculate the position and angle compensation data of the ordinary shed. The motion controller receives the position and angle compensation data sent by the arithmetic processor, and the motion controller contains a database. The first CCD lens is used to capture the first length component value and the first width component value of the first shed target coordinate of the first shed target center of the ordinary shed and transmit to the arithmetic processor. The second CCD lens is used to capture the second length component value and the second width component value of the second shed target coordinate of the second shed target center of the ordinary shed and transmit the second length component value and the second width component value to the arithmetic processor. The first laser light source transceiver is used to capture the first depth component value of the first shed target coordinate at the center of the first shed target and send it to the arithmetic processor. The second laser light source transceiver is used to capture the second depth component value of the second shed target coordinate at the center of the second shed target and send it to the arithmetic processor. The robotic arm is based on the control signal of the motion controller The position and angle compensation data will be corrected to the corresponding ordinary shelf to complete the alignment of the wafer cassette and the ordinary shelf.
在本發明之一實施例中,其中運算處理器根據第一基準長度分量值、第二基準長度分量值、第一長度分量值與第二長度分量值來計算出第一長度補償分量值,其為位置與角度補償數據之一。 In an embodiment of the present invention, the arithmetic processor calculates the first length compensation component value according to the first reference length component value, the second reference length component value, the first length component value and the second length component value, and It is one of the position and angle compensation data.
在本發明之一實施例中,其中運算處理器根據第一基準寬度分量值、第二基準寬度分量值、第一寬度分量值與第二寬度分量值來計算出第一寬度補償分量值,其為位置與角度補償數據之一。 In an embodiment of the present invention, the arithmetic processor calculates the first width compensation component value according to the first reference width component value, the second reference width component value, the first width component value and the second width component value, and It is one of the position and angle compensation data.
在本發明之一實施例中,其中第一CCD鏡頭與第二CCD鏡頭之間的距離為第一固定長度,運算處理器根據第一基準寬度分量值、第二基準寬度分量值、第一寬度分量值、第二寬度分量值與第一固定長度來計算出第一角度補償值,其為位置與角度補償數據之一。 In an embodiment of the present invention, the distance between the first CCD lens and the second CCD lens is a first fixed length, and the arithmetic processor is based on the first reference width component value, the second reference width component value, and the first width The component value, the second width component value and the first fixed length are used to calculate the first angle compensation value, which is one of the position and angle compensation data.
在本發明之一實施例中,其中運算處理器根據第一基準深度分量值、第一深度分量值、第二基準深度分量值與第二深度分量值來計算出第一深度補償分量值,其為位置與角度補償數據之一。 In an embodiment of the present invention, the arithmetic processor calculates the first depth compensation component value according to the first reference depth component value, the first depth component value, the second reference depth component value, and the second depth component value. It is one of the position and angle compensation data.
在本發明之一實施例中,其中第一雷射光源收發器與第二雷射光源收發器之間的距離為第二固定長度,運算處理器根據第一基準深度分量值、第一深度分量值、第二基準深度分量值、第二深度分量值與第二固定長度來計算出第二角度補償值,其為位置與角度補償數據之一。 In an embodiment of the present invention, the distance between the first laser light source transceiver and the second laser light source transceiver is a second fixed length, and the arithmetic processor is based on the first reference depth component value and the first depth component value. Value, the second reference depth component value, the second depth component value and the second fixed length to calculate the second angle compensation value, which is one of the position and angle compensation data.
在本發明之一實施例中,其中補償順序為先依序補償全部之多個普通棚之第一長度補償分量值與第一寬度補償分量值,再依序補償全部之多個普通棚之第一深度補償分量值,最後再依序補償全部之多個普通棚之第一長度補償分量值、第一寬度補償分量值與第一深度補償分量值。 In an embodiment of the present invention, the compensation sequence is to first compensate the first length compensation component value and the first width compensation component value of all the plurality of ordinary sheds in sequence, and then sequentially compensate the first length compensation component value of all the plurality of ordinary sheds A depth compensation component value, and finally the first length compensation component value, the first width compensation component value and the first depth compensation component value of all the multiple ordinary sheds are sequentially compensated.
在本發明之一實施例中,其中如果位置與角度補償數據其中之一個補償修正量超出預設值,則通知人員進行處理,再由人員判斷是否重新拍照或量測深度,如果是,則進行重新拍照或量測深度;如果否,則記錄普通棚之異常數值並儲存於資料庫中。 In an embodiment of the present invention, if one of the position and angle compensation data exceeds a preset value, the staff will be notified for processing, and then the staff will determine whether to take a photo again or measure the depth, and if so, proceed Re-photograph or measure the depth; if not, record the abnormal value of the ordinary booth and store it in the database.
本發明提供一種晶圓盒倉儲的校正補償方法,用於晶圓盒倉儲的校正補償系統,其將晶圓盒倉儲內的多個普通棚進行校正補償以相同於基準棚,每一個普通棚具有第一棚位標靶中心與第二棚位標靶中心,基準棚具有第一基準標靶中心與第二基準標靶中心並且第一基準標靶中心之第一基準標靶座標具有第一基準長度分量值、第一基準寬度分量值與第一基準深度分量值,並且第二基準標靶中心之第二基準標靶座標具有第二基準長度分量值、第二基準寬度分量值與第二基準深度分量值,晶圓盒倉儲的校正補償系統包括運算處理器、運動控制器、第一CCD鏡頭、第二CCD鏡頭、第一雷射光源收發器、第二雷射光源收發器與機械手臂,運動控制器包含有資料庫,運動控制器連接至運算處理器,第一CCD鏡頭電性連接至運算處理器,第二CCD鏡頭電性連接至運算處理器,第一雷射光源收發器電性連接至運算處理器,第二雷射光源收發器電性連接至運算處理器,機械手臂電性連接至運動控制器,晶圓盒倉儲的校正補償方法包括以下步驟:校正開始;量測基準棚;進行第一次修正;進行第二次修正;進行第三次修正以及校正結束。進行第一次修正之步驟包括;透過第一CCD鏡頭,來擷取普通棚之第一棚位標靶中心之第一棚位標靶座標之第一長度分量值與第一寬度分量值並且傳送至運算處理器;透過第二CCD鏡頭,來擷取普通棚之第二棚位標靶中心之第二棚位標靶座標之第二長度分量值與第二寬度分量值並且傳送至運算處理器;透過運算處理器,根據第一基準長度分量值、第二基準長度分量值、第一長度分量值與第二長度分量值來計算出第一長度補償分量值;透過運算處理器,根據第一基準寬度分量值、第二基準寬度分量值、 第一寬度分量值與第二寬度分量值來計算出第一寬度補償分量值;透過運算處理器,根據第一基準寬度分量值、第二基準寬度分量值、第一寬度分量值、第二寬度分量值與第一固定長度來計算出第一角度補償值;判斷補償修正量是否超出預設值;以及如果否,透過機械手臂根據運動控制器之控制信號與位置與角度補償數據來向對應的普通棚進行修正。進行第二次修正之步驟包括:透過第一雷射光源收發器,來擷取第一棚位標靶中心之第一棚位標靶座標之第一深度分量值並且傳送至運算處理器;透過第二雷射光源收發器,來擷取第二棚位標靶中心之第二棚位標靶座標之第二深度分量值並且傳送至運算處理器;透過運算處理器,根據第一基準深度分量值、第一深度分量值、第二基準深度分量值與第二深度分量值來計算出第一深度補償分量值;透過運算處理器,根據第一基準深度分量值、第一深度分量值、第二基準深度分量值、第二深度分量值與第二固定長度來計算出第二角度補償值;判斷補償修正量是否超出預設值;以及如果否,透過機械手臂根據運動控制器之控制信號與位置與角度補償數據來向對應的普通棚進行修正。進行第三次修正,其為同時進行第一次修正與第二次修正之步驟。其中,第一CCD鏡頭與第二CCD鏡頭之間的距離為第一固定長度,其中雷射光源收發器與第二雷射光源收發器之間的距離為第二固定長度,其中位置與角度補償數據包括第一長度補償分量值、第一寬度補償分量值、第一角度補償值、第一深度補償分量與第二角度補償值。 The present invention provides a correction and compensation method for wafer box storage, which is used in a correction and compensation system for wafer box storage, which corrects and compensates multiple ordinary sheds in the wafer box storage to be the same as the reference shed, and each ordinary shed has The first shed target center and the second shed target center, the reference shed has a first reference target center and a second reference target center, and the first reference target coordinate of the first reference target center has the first reference The length component value, the first reference width component value and the first reference depth component value, and the second reference target coordinate of the second reference target center has a second reference length component value, a second reference width component value and a second reference Depth component value, the correction and compensation system of wafer cassette storage includes arithmetic processor, motion controller, first CCD lens, second CCD lens, first laser light source transceiver, second laser light source transceiver and robotic arm, The motion controller includes a database, the motion controller is connected to the computing processor, the first CCD lens is electrically connected to the computing processor, the second CCD lens is electrically connected to the computing processor, and the first laser light source transceiver is electrically connected Connected to the computing processor, the second laser light source transceiver is electrically connected to the computing processor, and the robotic arm is electrically connected to the motion controller. The calibration compensation method of the wafer cassette storage includes the following steps: calibration start; measurement reference shelf ; Make the first correction; make the second correction; make the third correction and the end of the correction. The steps of performing the first correction include: capturing the first length component value and the first width component value of the first shed target coordinate of the first shed target center of the ordinary shed through the first CCD lens and transmit it To the arithmetic processor; through the second CCD lens, to capture the second length component value and the second width component value of the second shed target coordinate of the second shed target center of the ordinary shed and send it to the arithmetic processor ; Through the arithmetic processor, according to the first reference length component value, the second reference length component value, the first length component value and the second length component value to calculate the first length compensation component value; through the arithmetic processor, according to the first Reference width component value, second reference width component value, The first width component value and the second width component value are used to calculate the first width compensation component value; through the arithmetic processor, according to the first reference width component value, the second reference width component value, the first width component value, and the second width The component value and the first fixed length are used to calculate the first angle compensation value; to determine whether the compensation correction amount exceeds the preset value; Shed to make corrections. The step of performing the second correction includes: capturing the first depth component value of the first shed target coordinate at the center of the first shed target through the first laser light source transceiver and send it to the arithmetic processor; The second laser light source transceiver to capture the second depth component value of the second shed target coordinate at the center of the second shed target and send it to the arithmetic processor; through the arithmetic processor, according to the first reference depth component Value, the first depth component value, the second reference depth component value and the second depth component value to calculate the first depth compensation component value; through the arithmetic processor, according to the first reference depth component value, the first depth component value, the first depth component value Two reference depth component values, a second depth component value, and a second fixed length are used to calculate the second angle compensation value; determine whether the compensation correction amount exceeds the preset value; and if not, use the robot arm according to the control signal of the motion controller and The position and angle compensation data are corrected to the corresponding normal shed. Perform the third correction, which is a step of performing the first correction and the second correction at the same time. Wherein, the distance between the first CCD lens and the second CCD lens is a first fixed length, and the distance between the laser light source transceiver and the second laser light source transceiver is a second fixed length, where the position and angle compensation The data includes a first length compensation component value, a first width compensation component value, a first angle compensation value, a first depth compensation component and a second angle compensation value.
綜上所述,本發明所提出的晶圓盒倉儲的校正補償系統與方法,能夠達到以下功效: In summary, the correction and compensation system and method for wafer cassette storage proposed in the present invention can achieve the following effects:
1.具備一鍵校正功能(將視覺座標與機械座標做連結,使視覺系統具備量測功能)。 1. With one-key calibration function (connect the visual coordinate with the mechanical coordinate, so that the visual system has the measurement function).
2.具備自動檢測及回授位置給予機械手臂補正功能,減少人員教導時間。 2. Equipped with automatic detection and feedback position for the robot arm to correct the function, reducing the time for personnel to teach.
3.提供可管可控的數據,檢測或修正儲位位置偏差。 3. Provide manageable and controllable data to detect or correct storage position deviations.
底下藉由具體實施例詳加說明,當更容易瞭解本發明之目的、技術內容、特點及其所達成之功效。 The following detailed descriptions are given through specific embodiments, so that it will be easier to understand the purpose, technical content, features, and effects of the present invention.
100:晶圓盒倉儲的校正補償系統 100: Correction and compensation system for wafer cassette storage
500:晶圓盒倉儲的校正補償方法流程 500: Process of correction and compensation method for wafer cassette storage
S510、S520、S530、S540:步驟 S510, S520, S530, S540: steps
600:基準棚位量測流程方法 600: Benchmark shed measurement process method
S610、S620、S630、S640:步驟 S610, S620, S630, S640: steps
700:晶圓盒倉儲的校正補償方法之第一次修正流程 700: The first correction process of the correction compensation method for wafer cassette storage
S701、S702、S703、S704、S705、S706、S707、S708、S709、S710:步驟 S701, S702, S703, S704, S705, S706, S707, S708, S709, S710: steps
800:晶圓盒倉儲的校正補償方法之第二次修正流程 800: The second correction process of the correction compensation method for wafer cassette storage
S801、S802、S803、S804、S805、S806、S807、S808、S809、S810:步驟 S801, S802, S803, S804, S805, S806, S807, S808, S809, S810: steps
900:晶圓盒倉儲的校正補償方法之第三次修正流程 900: The third correction process of the correction compensation method for wafer cassette storage
S901、S902、S903、S904、S905、S906、S907、S908、S909、S910、S911:步驟 S901, S902, S903, S904, S905, S906, S907, S908, S909, S910, S911: steps
110:運算處理器 110: arithmetic processor
120:運動控制器 120: Motion controller
122:資料庫 122: database
130:第一CCD鏡頭 130: The first CCD lens
140:第二CCD鏡頭 140: The second CCD lens
150:第一雷射光源收發器 150: The first laser light source transceiver
160:第二雷射光源收發器 160: The second laser light source transceiver
170:機械手臂 170: Robotic Arm
AC:第一棚位標靶中心 AC: First shed target center
BC:第二棚位標靶中心 BC: Target Center of the Second Shed
CS:控制訊號 CS: Control signal
GA:普通棚 GA: Ordinary Shed
L1:第一固定長度 L1: The first fixed length
L2:第二固定長度 L2: second fixed length
PDS:位置與角度補償數據 PDS: position and angle compensation data
X1:第一長度分量值 X1: the first length component value
Y1:第一深度分量值 Y1: the first depth component value
Z1:第一寬度分量值 Z1: the first width component value
X2:第二長度分量值 X2: second length component value
Y2:第二深度分量值 Y2: second depth component value
Z2:第二寬度分量值 Z2: second width component value
第一圖係為本發明的晶圓盒倉儲的校正補償系統之示意圖。 The first figure is a schematic diagram of the correction and compensation system of the wafer cassette storage of the present invention.
第二圖係為本發明的晶圓盒倉儲的校正補償系統之棚位校準之一示意圖。 The second figure is a schematic diagram of the shed position calibration of the calibration compensation system of the wafer cassette storage of the present invention.
第三圖係為本發明的晶圓盒倉儲的校正補償系統之棚位校準之另一示意圖。 The third figure is another schematic diagram of the shed calibration of the calibration compensation system of the wafer cassette storage of the present invention.
第四圖係為本發明的晶圓盒倉儲的校正補償系統之棚位校準之再一示意圖。 The fourth figure is another schematic diagram of the shed calibration of the calibration compensation system of the wafer cassette storage of the present invention.
第五圖係為本發明的晶圓盒倉儲的校正補償方法之流程圖。 The fifth figure is a flowchart of the calibration and compensation method of the wafer cassette storage of the present invention.
第六圖係為本發明的晶圓盒倉儲的校正補償方法之基準棚位量測流程圖。 The sixth figure is a flow chart of the reference shed measurement flow chart of the calibration and compensation method for the wafer cassette storage of the present invention.
第七圖係為本發明的晶圓盒倉儲的校正補償方法之第一次修正流程圖。 The seventh figure is the first correction flow chart of the correction and compensation method for wafer cassette storage of the present invention.
第八圖係為本發明的晶圓盒倉儲的校正補償方法之第二次修正流程圖。 The eighth figure is the second correction flow chart of the correction and compensation method of the wafer cassette storage of the present invention.
第九圖係為本發明的晶圓盒倉儲的校正補償方法之第三次修正流程圖。 The ninth figure is the third correction flow chart of the correction and compensation method for the wafer cassette storage of the present invention.
為能解決現有人工校準棚位而消耗大量的人力與時間成本的問題,發明人經過多年的研究及開發,據以改善現有產品的詬病,後續將詳細介紹本發明如何以一種晶圓盒倉儲的校正補償系統來達到最有效率的功能訴求。 In order to solve the problem of consuming a lot of manpower and time cost for the existing manual calibration sheds, the inventor has improved the criticism of existing products after years of research and development. The following will describe in detail how the present invention uses a wafer box storage Correct the compensation system to achieve the most efficient functional requirements.
請同時參閱第一圖至第四圖,第一圖係為本發明的晶圓盒倉儲的校正補償系統之示意圖。第二圖係為本發明的晶圓盒倉儲的校正補償系統之棚位校準之一示意圖。第三圖係為本發明的晶圓盒倉儲的校正補償系統之棚位校
準之另一示意圖。第四圖係為本發明的晶圓盒倉儲的校正補償系統之棚位校準之再一示意圖。本發明實施例所提出之晶圓盒倉儲的校正補償系統100,用以將晶圓盒倉儲內的多個普通棚進行校正補償以相同於一基準棚,每一該普通棚具有一第一棚位標靶中心與一第二棚位標靶中心,該基準棚具有一第一基準標靶中心與一第二基準標靶中心並且該第一基準標靶中心之一第一基準標靶座標具有一第一基準長度分量值、一第一基準寬度分量值與一第一基準深度分量值,並且該第二基準標靶中心之一第二基準標靶座標具有一第二基準長度分量值、一第二基準寬度分量值與一第二基準深度分量值。
Please refer to Figures 1 to 4 at the same time. Figure 1 is a schematic diagram of the calibration and compensation system for wafer cassette storage of the present invention. The second figure is a schematic diagram of the shed position calibration of the calibration compensation system of the wafer cassette storage of the present invention. The third figure is the shed calibration of the correction and compensation system for wafer cassette storage of the present invention.
Another schematic diagram of the standard. The fourth figure is another schematic diagram of the shed calibration of the calibration compensation system of the wafer cassette storage of the present invention. The calibration and
在本發明實施例中,晶圓盒倉儲的校正補償系統100包括運算處理器110、運動控制器120、第一CCD鏡頭130、第二CCD鏡頭140、第一雷射光源收發器150、第二雷射光源收發器160與機械手臂170。運動控制器120連接至運算處理器110,第一CCD鏡頭130電性連接至運算處理器110,第二CCD鏡頭140電性連接至運算處理器110,第一雷射光源收發器150電性連接至運算處理器110,第二雷射光源收發器160電性連接至運算處理器110,機械手臂170電性連接至運動控制器120。
In the embodiment of the present invention, the correction and
首先,第一CCD鏡頭130會擷取普通棚GA之第一棚位標靶中心AC之第一棚位標靶座標之第一長度分量值X1與第一寬度分量值Z1並且傳送至運算處理器110,第二CCD鏡頭140會擷取普通棚GA之第二棚位標靶中心BC之第二棚位標靶座標之第二長度分量值X2與第二寬度分量值Z2並且傳送至運算處理器110。之後,第一雷射光源收發器150會擷取第一棚位標靶中心AC之第一棚位標靶座標之第一深度分量值Y1並且傳送至運算處理器110,第二雷射光源收發器160會擷取第二棚位標靶中心BC之第二棚位標靶座標之第二深度分量值Y2並且傳送至運算處理器110。接下來,運算處理器110會接收普通棚GA之相關數據資料來計算出普通棚GA之位置與角度補償數據,運動控制器120會接收運算處理
器110所傳送之位置與角度補償數據,其中運動控制器120包含有資料庫122。最後,機械手臂170會根據運動控制器120之控制信號CS與位置與角度補償數據PDS來向對應的普通棚GA進行修正,以完成晶圓盒與普通棚GA之對位。
First, the
進一步來說,運算處理器110會根據第一基準長度分量值、第二基準長度分量值、第一長度分量值X1與第二長度分量值X2來計算出第一長度補償分量值,其為位置與角度補償數據PDS之一。另外,運算處理器110會根據第一基準寬度分量值、第二基準寬度分量值、第一寬度分量值Z1與第二寬度分量值Z2來計算出第一寬度補償分量值,其為位置與角度補償數據之一。
Furthermore, the
此外,第一CCD鏡頭130與第二CCD鏡頭140之間的距離為第一固定長度L1,運算處理器110會根據第一基準寬度分量值、第二基準寬度分量值、第一寬度分量值Z1、第二寬度分量值Z2與第一固定長度L1來計算出第一角度補償值,其為位置與角度補償數據PDS之一。運算處理器110會根據第一基準深度分量值、第一深度分量值Y1、第二基準深度分量值與第二深度分量值Y2來計算出第一深度補償分量值,其為位置與角度補償數據PDS之一。此外,第一雷射光源收發器150與第二雷射光源收發器160之間的距離為第二固定長度L2,之後,運算處理器110會根據第一基準深度分量值、第一深度分量值Y1、第二基準深度分量值、該第二深度分量值Y2與第二固定長度L2來計算出第二角度補償值,其為位置與角度補償數據PDS之一。
In addition, the distance between the
值得一提的是,補償順序為先依序補償全部之普通棚之第一長度補償分量值與第一寬度補償分量值,再依序補償全部之普通棚之第一深度補償分量值,最後再依序補償全部之普通棚之第一長度補償分量值、第一寬度補償分量值與第一深度補償分量值。如果位置與角度補償數據其中之一個補償修正量超出預設值,則會警報通知人員進行處理,再由人員判斷是否重新拍照或量 測深度,如果是,則進行重新拍照或量測深度;如果否,則記錄普通棚之異常數值並儲存於資料庫中。 It is worth mentioning that the compensation sequence is to first compensate the first length compensation component value and the first width compensation component value of all the ordinary sheds in sequence, then compensate the first depth compensation component value of all the ordinary sheds in sequence, and finally Compensate the first length compensation component value, the first width compensation component value and the first depth compensation component value of all the ordinary sheds in sequence. If one of the position and angle compensation data exceeds the preset value, an alarm will be notified to the personnel for processing, and then the personnel will determine whether to take a photo or measure again Depth measurement, if yes, take a photo again or measure the depth; if not, record the abnormal value of the ordinary booth and store it in the database.
請參閱第五圖,第五圖係為本發明的晶圓盒倉儲的校正補償方法之流程圖。晶圓盒倉儲的校正補償方法流程500包括以下步驟:校正開始、基準棚位量測(步驟S510)、第一次修正(步驟S520)、第二次修正(步驟S530)、第三次修正(步驟S540)與校正結束。請參閱第六圖,第六圖係為本發明的晶圓盒倉儲的校正補償方法之基準棚位量測流程圖。基準棚位量測流程方法600包括以下步驟:手臂移動到基準棚位(步驟S610)、CCD拍照計算(步驟S620)、雷射量測距離(步驟S630)、紀錄基準值(X、Y、Z)並儲存於資料庫中,由上述步驟取得基準棚位的數據。基準棚具有第一基準標靶中心與第二基準標靶中心並且第一基準標靶中心之第一基準標靶座標具有第一基準長度分量值、第一基準寬度分量值與第一基準深度分量值,並且第二基準標靶中心之第二基準標靶座標具有第二基準長度分量值、第二基準寬度分量值與第二基準深度分量值。
Please refer to the fifth figure. The fifth figure is a flowchart of the calibration and compensation method of the wafer cassette storage of the present invention. The
請參閱圖七、圖八與圖九,第七圖係為本發明的晶圓盒倉儲的校正補償方法之第一次修正流程圖。第八圖係為本發明的晶圓盒倉儲的校正補償方法之第二次修正流程圖。第九圖係為本發明的晶圓盒倉儲的校正補償方法之第三次修正流程圖。晶圓盒倉儲的校正補償方法之第一次修正流程700包括以下步驟:手臂移動至第一棚位(步驟S701);CCD拍照計算(步驟S702);計算修正量並儲存於資料庫中(步驟S703);判斷修正量是否超出設定(步驟S704);補償修正量(X、Z)(步驟S705);判斷是否修正所有棚位(步驟S706);警報通知人員處理(步驟S707);人員判斷是否重新拍照(步驟S708);紀錄棚位數值異常並儲存於資料庫中(步驟S709);手臂移動至下一棚位(步驟S710)。晶圓盒倉儲的校正補償方法之第二次修正流程800包括以下步驟:手臂移動至第一棚位(步驟S801);雷射量測距離(步驟S802);計算修正量並儲存於資料庫中(步驟S803);判斷修正量是否
超出設定(步驟S804);補償修正量(Y)(步驟S805);判斷是否修正所有棚位(步驟S806);警報通知人員處理(步驟S807);人員判斷是否重新量測(步驟S808);紀錄棚位數值異常並儲存於資料庫中(步驟S809);手臂移動到下一棚位(步驟S810)。晶圓盒倉儲的校正補償方法之第三次修正流程900包括以下步驟:手臂移動至下一棚位(步驟S901);CCD拍照計算(步驟S902);雷測量測距離(步驟S903);計算修正量並儲存於資料庫中(步驟S904);判斷修正量是否超出設定(步驟S905);補償修正量(X、Z)(步驟S906);判斷是否修正所有棚位(步驟S907);警報通知人員處理(步驟S908);人員判斷是否重新量測(步驟S909);紀錄棚位數值異常並儲存於資料庫中(步驟S910);手臂移動至下一棚位(步驟S911)。
Please refer to FIG. 7, FIG. 8, and FIG. 9. FIG. The eighth figure is the second correction flow chart of the correction and compensation method of the wafer cassette storage of the present invention. The ninth figure is the third correction flow chart of the correction and compensation method for the wafer cassette storage of the present invention. The
詳細來說,在第一次修正的階段,透過第一CCD鏡頭來擷取普通棚之第一棚位標靶中心之第一棚位標靶座標之第一長度分量值與第一寬度分量值並且傳送至運算處理器。透過第二CCD鏡頭來擷取普通棚之第二棚位標靶中心之第二棚位標靶座標之第二長度分量值與第二寬度分量值並且傳送至運算處理器。透過運算處理器,根據第一基準長度分量值、第二基準長度分量值、第一長度分量值與第二長度分量值來計算出第一長度補償分量值。透過運算處理器,根據第一基準寬度分量值、第二基準寬度分量值、第一寬度分量值與第二寬度分量值來計算出第一寬度補償分量值。透過運算處理器,根據第一基準寬度分量值、第二基準寬度分量值、第一寬度分量值、第二寬度分量值與第一固定長度來計算出第一角度補償值。之後,運算處理器會判斷補償修正量是否超出預設值,最後如果否,透過機械手臂且根據運動控制器之控制信號與位置與角度補償數據來向對應的普通棚進行修正。 In detail, in the first correction stage, the first CCD lens is used to capture the first length component value and the first width component value of the first shed target coordinate of the first shed target center of the ordinary shed And sent to the arithmetic processor. The second length component value and the second width component value of the second shed target coordinate of the second shed target center of the ordinary shed are captured through the second CCD lens and sent to the arithmetic processor. Through the arithmetic processor, the first length compensation component value is calculated according to the first reference length component value, the second reference length component value, the first length component value and the second length component value. Through the arithmetic processor, the first width compensation component value is calculated according to the first reference width component value, the second reference width component value, the first width component value and the second width component value. Through the arithmetic processor, the first angle compensation value is calculated according to the first reference width component value, the second reference width component value, the first width component value, the second width component value and the first fixed length. After that, the arithmetic processor will determine whether the compensation correction amount exceeds the preset value, and finally, if not, it will make corrections to the corresponding ordinary booth through the robot arm and according to the control signal of the motion controller and the position and angle compensation data.
接下來,在第二次修正的階段,透過第一雷射光源收發器來擷取第一棚位標靶中心之第一棚位標靶座標之第一深度分量值並且傳送至運算處理器。透過第二雷射光源收發器來擷取第二棚位標靶中心之第二棚位標靶座標之 第二深度分量值並且傳送至運算處理器。透過運算處理器,根據第一基準深度分量值、第一深度分量值、第二基準深度分量值與第二深度分量值來計算出第一深度補償分量值。透過運算處理器,根據第一基準深度分量值、第一深度分量值、第二基準深度分量值、第二深度分量值與第二固定長度來計算出第二角度補償值。之後,運算處理器會判斷補償修正量是否超出預設值,最後如果否,透過機械手臂且根據運動控制器之控制信號與位置與角度補償數據來向對應的普通棚進行修正。 Next, in the second correction stage, the first depth component value of the first shed target coordinate at the center of the first shed target is captured through the first laser light source transceiver and sent to the arithmetic processor. Capture the coordinates of the second shed target at the center of the second shed target through the second laser light source transceiver The second depth component value is sent to the arithmetic processor. Through the arithmetic processor, the first depth compensation component value is calculated according to the first reference depth component value, the first depth component value, the second reference depth component value, and the second depth component value. Through the arithmetic processor, the second angle compensation value is calculated according to the first reference depth component value, the first depth component value, the second reference depth component value, the second depth component value and the second fixed length. After that, the arithmetic processor will determine whether the compensation correction amount exceeds the preset value, and finally, if not, it will make corrections to the corresponding ordinary booth through the robot arm and according to the control signal of the motion controller and the position and angle compensation data.
最後,在第三次修正的階段,其為同時進行第一次修正與第二次修正之步驟。第一CCD鏡頭與第二CCD鏡頭之間的距離為第一固定長度,其中第一雷射光源收發器與第二雷射光源收發器之間的距離為第二固定長度,其中位置與角度補償數據包括第一長度補償分量值、第一寬度補償分量值、第一角度補償值、第一深度補償分量與第二角度補償值。 Finally, in the third revision stage, it is a step of simultaneously performing the first revision and the second revision. The distance between the first CCD lens and the second CCD lens is a first fixed length, where the distance between the first laser light source transceiver and the second laser light source transceiver is a second fixed length, where the position and angle compensation The data includes a first length compensation component value, a first width compensation component value, a first angle compensation value, a first depth compensation component and a second angle compensation value.
此外,須注意的是,如果位置與角度補償數據其中之一個補償修正量超出預設值,則通知人員進行處理,再由人員判斷是否重新拍照或量測深度,如果是,則進行重新拍照或量測深度;如果否,則記錄普通棚之異常數值並儲存於資料庫中。 In addition, it should be noted that if one of the position and angle compensation data exceeds the preset value, the staff will be notified for processing, and then the staff will determine whether to take a photo or measure the depth again, if so, take a photo or Measure the depth; if not, record the abnormal value of the ordinary shed and store it in the database.
綜上所述,本發明所提出的晶圓盒倉儲的校正補償系統與方法,能夠達到以下功效: In summary, the correction and compensation system and method for wafer cassette storage proposed in the present invention can achieve the following effects:
1.具備一鍵校正功能(將視覺座標與機械座標做連結,使視覺系統具備量測功能)。 1. With one-key calibration function (connect the visual coordinate with the mechanical coordinate, so that the visual system has the measurement function).
2.具備自動檢測及回授位置給予機械手臂補正功能,減少人員教導時間。 2. Equipped with automatic detection and feedback position for the robot arm to correct the function, reducing the time for personnel to teach.
3.提供可管可控的數據,檢測或修正儲位位置偏差。 3. Provide manageable and controllable data to detect or correct storage position deviations.
唯以上所述者,僅為本發明之較佳實施例而已,並非用來限定本發明實施之範圍。故即凡依本發明申請範圍所述之特徵及精神所為之均等變化或修飾,均應包括於本發明之申請專利範圍內。 Only the above are only preferred embodiments of the present invention, and are not used to limit the scope of the present invention. Therefore, all equivalent changes or modifications made in accordance with the characteristics and spirit of the application scope of the present invention shall be included in the patent application scope of the present invention.
100:晶圓盒倉儲的校正補償系統 100: Correction and compensation system for wafer cassette storage
110:運算處理器 110: arithmetic processor
120:運動控制器 120: Motion controller
122:資料庫 122: database
130:第一CCD鏡頭 130: The first CCD lens
140:第二CCD鏡頭 140: The second CCD lens
150:第一雷射光源收發器 150: The first laser light source transceiver
160:第二雷射光源收發器 160: The second laser light source transceiver
170:機械手臂 170: Robotic Arm
CS:控制訊號 CS: Control signal
PDS:位置與角度補償數據 PDS: position and angle compensation data
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20160055010A (en) * | 2014-11-07 | 2016-05-17 | 삼성전자주식회사 | wafer transfer robot and control method thereof |
TW201940396A (en) * | 2018-03-22 | 2019-10-16 | 日商村田機械股份有限公司 | Stocker system |
TW202000549A (en) * | 2018-06-11 | 2020-01-01 | 日商村田機械股份有限公司 | Article placement apparatus, stocker provided therewith, and transport vehicle system |
TWM595325U (en) * | 2020-02-06 | 2020-05-11 | 三和技研股份有限公司 | Mechanical arm capable of carrying board or box and storage mechanism of board or box |
TWM609920U (en) * | 2020-11-20 | 2021-04-01 | 迅得機械股份有限公司 | Correction compensation system for wafer box warehouse |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20160055010A (en) * | 2014-11-07 | 2016-05-17 | 삼성전자주식회사 | wafer transfer robot and control method thereof |
TW201940396A (en) * | 2018-03-22 | 2019-10-16 | 日商村田機械股份有限公司 | Stocker system |
TW202000549A (en) * | 2018-06-11 | 2020-01-01 | 日商村田機械股份有限公司 | Article placement apparatus, stocker provided therewith, and transport vehicle system |
TWM595325U (en) * | 2020-02-06 | 2020-05-11 | 三和技研股份有限公司 | Mechanical arm capable of carrying board or box and storage mechanism of board or box |
TWM609920U (en) * | 2020-11-20 | 2021-04-01 | 迅得機械股份有限公司 | Correction compensation system for wafer box warehouse |
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