TWM595323U

TWM595323U - Substrate handling facility and substrate processing system

Info

Publication number: TWM595323U
Application number: TW108215888U
Authority: TW
Inventors: 陳安順
Original assignee: 群翊工業股份有限公司
Priority date: 2019-11-29
Filing date: 2019-11-29
Publication date: 2020-05-11
Also published as: CN211687238U

Abstract

一種基板加工系統適用於對一基板構件加工，該基板構件包括一板架及一可分離地設置於該板架的基板，該板架具有一架體及二個設於該架體的兩相反側且用於夾持該基板的固定件。該基板加工系統包含一基板加工設備、一第一基板裝卸設備及一第二基板裝卸設備。該基板加工設備具有一入口端及一出口端。該第一基板裝卸設備鄰接於該入口端，並能將該基板結合於該板架，進而輸送至該基板加工設備。該第二基板裝卸設備鄰接於該出口端，並能將加工完成的該基板與該板架分離。A substrate processing system is suitable for processing a substrate component. The substrate component includes a pallet and a substrate detachably arranged on the pallet. The pallet has a frame body and two opposite sides of the frame body. Side and used to hold the fixing member of the substrate. The substrate processing system includes a substrate processing device, a first substrate loading and unloading device, and a second substrate loading and unloading device. The substrate processing equipment has an inlet end and an outlet end. The first substrate loading and unloading device is adjacent to the inlet end, and can bond the substrate to the pallet, and then be transported to the substrate processing device. The second substrate loading and unloading device is adjacent to the outlet end, and can separate the processed substrate from the pallet.

Description

Substrate loading and unloading equipment and substrate processing system

本新型是有關於一種裝卸設備，特別是指一種基板裝卸設備，以及一種基板加工系統。The present invention relates to a loading and unloading equipment, especially a substrate loading and unloading equipment, and a substrate processing system.

在基板的加工領域中，例如高溫固化步驟使基板上的塗料固化，或者是蒸鍍步驟形成導電線路。而在執行前述步驟時是在以一板架夾持一基板後送入對應的加工設備。就將該基板結合於該板架的步驟，以及將加工完成後的基板自該板架卸除的步驟而言，以往都是藉由作業員來完成，也就是作業員先將該基板結合於該板架後置放於該烘烤設備或蒸鍍設備，並在完成後，再自該等設備取出並將該基板自該板架卸除。然而，長期累積下來，作業員容易產生疲勞，進而導致生產效率不佳的問題。再者，處在高熱的設備旁須長時間保持專注力以避免發生工安問題。In the field of substrate processing, for example, a high-temperature curing step cures the paint on the substrate, or a vapor deposition step to form conductive lines. When performing the foregoing steps, a substrate is clamped by a pallet and then fed into the corresponding processing equipment. As for the steps of joining the substrate to the pallet and the step of removing the processed substrate from the pallet, in the past, it was done by the operator, that is, the operator first joined the substrate to the The pallet is placed behind the baking equipment or evaporation equipment, and after completion, it is taken out from the equipment and the substrate is removed from the pallet. However, accumulated over a long period of time, operators are prone to fatigue, which leads to the problem of poor production efficiency. Furthermore, staying close to the hot equipment must maintain concentration for a long time to avoid industrial safety problems.

因此，本新型之目的，即在提供一種省時省力且提升生產效率之基板裝卸設備。Therefore, the purpose of the present invention is to provide a substrate loading and unloading device that saves time and effort and improves production efficiency.

因此，本新型之目的，即在提供一種解決上述問題之基板加工系統。Therefore, the purpose of the present invention is to provide a substrate processing system that solves the above problems.

於是，本新型基板裝卸設備，適用於將一基板與一板架結合或分離，該板架具有一架體及二個設於該架體的兩相反側的固定件，該基板裝卸設備包含一框架及一基板裝卸裝置。該基板裝卸裝置包括一支撐組合件及一釋鎖組合件。該支撐組合件設置於該框架，並具有一支撐本體及多個卡制件，該支撐本體沿一高度方向延伸並具有位於相反兩側的一前側面及一後側面，該等卡制件自該前側面朝遠離該後側面方向凸伸，該等卡制件兩兩一組沿一寬度方向排列且每組兩卡制件在該高度方向相間隔，該等卡制件適用於供該架體的端部靠抵，使該板架呈垂直狀態，而該等固定件分別位於相鄰兩卡制件之間。該釋鎖組合件設置於該框架且位於該支撐本體的前側面，該釋鎖組合件可相對於該支撐組合件沿一長度方向移動，並具有一釋鎖本體及多個釋鎖件，該等釋鎖件自該釋鎖本體朝向該支撐本體延伸，且該等釋鎖件的位置分別對應該等固定件，該等釋鎖件能在一壓抵狀態及一未壓抵狀態間轉換，在該壓抵狀態，該等釋鎖件分別壓抵於該等固定件以使該等固定件展開，進而使該基板能以垂直狀態沿該長度方向移動至該板架內或自該板架移除，在該未壓抵狀態，該等釋鎖件分別間隔該等固定件以使該等固定件關閉。Therefore, the new type substrate loading and unloading equipment is suitable for combining or separating a substrate and a plate rack. The plate rack has a frame body and two fixing members provided on opposite sides of the frame body. The substrate loading and unloading equipment includes a Frame and a substrate loading and unloading device. The substrate loading and unloading device includes a supporting assembly and a locking assembly. The supporting assembly is arranged on the frame, and has a supporting body and a plurality of clamping parts. The supporting body extends along a height direction and has a front side and a rear side on opposite sides. The front side surface protrudes away from the rear side direction, the clamping members are arranged in groups of two in a width direction and the two clamping members of each group are spaced in the height direction, the clamping members are suitable for the rack The ends of the body abut against each other, so that the board frame is in a vertical state, and the fixing members are respectively located between two adjacent clamping members. The lock release assembly is disposed on the frame and located on the front side of the support body. The lock release assembly can move in a length direction relative to the support assembly, and has a lock release body and a plurality of lock release members. Equal release parts extend from the release body toward the support body, and the positions of the release parts correspond to the fixing parts, and the release parts can switch between a pressed state and an unpressed state, In the pressed state, the locking members are pressed against the fixing members to expand the fixing members, so that the substrate can be moved into or away from the board rack in the vertical state along the length direction Removal, in the unpressed state, the unlocking members are spaced apart from the fixing members to close the fixing members.

在一些實施態樣中，該等釋鎖件分別以線接觸的方式壓抵該等固定件。In some embodiments, the locking members are pressed against the fixing members in line contact.

於是，本新型基板加工系統，適用於對一基板構件加工，該基板構件包括一板架及一可分離地設置於該板架的基板，該板架具有一架體及二個設於該架體的兩相反側且用於夾持該基板的固定件，該基板加工系統包含一基板加工設備、一第一基板裝卸設備及一第二基板裝卸設備。該基板加工設備具有位於相反兩側的一入口端及一出口端。該第一基板裝卸設備鄰接於該入口端，該第一基板裝卸設備包括一第一框架及一第一基板裝卸裝置。該第一基板裝卸裝置具有一第一支撐組合件及一第一釋鎖組合件。第一支撐組合件設置於該第一框架，並具有一第一支撐本體及多個第一卡制件，該第一支撐本體沿一高度方向延伸並具有一朝向該基板加工設備的第一前側面，及一相反於該第一前側面的第一後側面，該等第一卡制件自該第一前側面朝遠離該第一後側面方向凸伸，該等第一卡制件兩兩一組沿一寬度方向排列且每組兩第一卡制件在該高度方向相間隔，該等第一卡制件適用於供該架體的端部靠抵，使該板架呈垂直狀態，而該等固定件分別位於相鄰兩卡制件之間。該第一釋鎖組合件設置於該第一框架且位於該第一支撐本體與該基板加工設備之間，該第一釋鎖組合件可相對於該第一支撐組合件沿一長度方向移動，並具有一第一釋鎖本體及多個第一釋鎖件，該等第一釋鎖件自該第一釋鎖本體朝向該第一支撐本體延伸，且該等第一釋鎖件的位置分別對應該等固定件，該等第一釋鎖件能在一第一壓抵狀態及一第一未壓抵狀態間轉換，在該第一壓抵狀態，該等第一釋鎖件分別壓抵於該等固定件以使該等固定件展開，進而使該基板能以垂直狀態沿該長度方向移動至該板架內或自該板架移除，在該第一未壓抵狀態，該等第一釋鎖件分別間隔該等固定件以使該等固定件關閉。Therefore, the new substrate processing system is suitable for processing a substrate component, the substrate component includes a plate frame and a substrate detachably disposed on the plate frame, the plate frame has a frame body and two on the frame Two opposite sides of the body and fixing members for clamping the substrate. The substrate processing system includes a substrate processing device, a first substrate loading and unloading device, and a second substrate loading and unloading device. The substrate processing equipment has an inlet end and an outlet end on opposite sides. The first substrate loading and unloading equipment is adjacent to the inlet end. The first substrate loading and unloading equipment includes a first frame and a first substrate loading and unloading device. The first substrate loading and unloading device has a first supporting assembly and a first unlocking assembly. The first supporting assembly is disposed on the first frame, and has a first supporting body and a plurality of first clamping members, the first supporting body extends along a height direction and has a first front facing the substrate processing equipment Side surface, and a first rear side surface opposite to the first front side surface, the first clamping members protrude from the first front side away from the first rear side, and the first clamping members are two by two A group is arranged along a width direction and each group of two first clamping members are spaced apart in the height direction. The first clamping members are suitable for abutting the ends of the rack body to make the board rack in a vertical state. The fixing pieces are respectively located between two adjacent clamping pieces. The first unlocking assembly is disposed between the first frame and the first support body and the substrate processing equipment, and the first unlocking assembly can move in a length direction relative to the first support assembly, And has a first unlocking body and a plurality of first unlocking pieces, the first unlocking pieces extend from the first unlocking body toward the first supporting body, and the positions of the first unlocking pieces are respectively Corresponding to the fixing members, the first release members can be switched between a first pressed state and a first unpressed state, and in the first pressed state, the first release members are pressed respectively In the fixing members to expand the fixing members, so that the substrate can be moved into or removed from the pallet in the vertical state along the length direction, in the first unpressed state, the The first unlocking member separates the fixing members to close the fixing members.

該第二基板裝卸設備鄰接於該出口端，該第二基板裝卸設備包括一第二框架及一第二基板裝卸裝置。該第二基板裝卸裝置具有一第二支撐組合件及一第二釋鎖組合件。該第二支撐組合件設置於該第二框架，並具有一第二支撐本體及多個第二卡制件，該第二支撐本體沿該高度方向延伸並具有一背向於該基板加工設備的第二前側面，及一朝向該基板加工設備的第二後側面，該等第二卡制件自該第二前側面朝遠離該第二後側面方向凸伸，該等第二卡制件兩兩一組沿該寬度方向排列且每組兩第二卡制件在該高度方向相間隔，該等第二卡制件適用於供該架體的端部靠抵，使該板架呈垂直狀態，而該等固定件分別位於相鄰兩卡制件之間。該第二釋鎖組合件設置於該第二框架且位於該第二前側面的一側，該第二釋鎖組合件可相對於該第二支撐組合件沿該長度方向移動，並具有一第二釋鎖本體及多個第二釋鎖件，該等第二釋鎖件自該第二釋鎖本體朝向該第二支撐本體延伸，且該等第二釋鎖件的位置分別對應該等固定件，該等第二釋鎖件能在一第二壓抵狀態及一第二未壓抵狀態間轉換，在該第二壓抵狀態，該等第二釋鎖件分別壓抵於該等固定件以使該等固定件展開，進而使該基板能以垂直狀態沿該長度方向移動至該板架內或自該板架移除，在該第二未壓抵狀態，該等第二釋鎖件分別間隔該等固定件以使該等固定件關閉。The second substrate loading and unloading equipment is adjacent to the outlet end. The second substrate loading and unloading equipment includes a second frame and a second substrate loading and unloading device. The second substrate loading and unloading device has a second supporting assembly and a second unlocking assembly. The second supporting assembly is disposed on the second frame, and has a second supporting body and a plurality of second clamping members, the second supporting body extends along the height direction and has a surface facing away from the substrate processing equipment A second front side, and a second rear side facing the substrate processing equipment, the second clamping parts project from the second front side away from the second rear side, and the second clamping parts Two groups are arranged along the width direction and two second clamping members of each group are spaced apart in the height direction, and the second clamping members are suitable for abutting the ends of the frame body, so that the board frame is in a vertical state , And the fixing pieces are respectively located between two adjacent clamping pieces. The second unlocking assembly is disposed on the second frame and is located on one side of the second front side. The second unlocking assembly can move along the length direction relative to the second support assembly and has a first A second release body and a plurality of second release parts, the second release parts extend from the second release body toward the second support body, and the positions of the second release parts correspond to the fixings respectively Parts, the second unlocking parts can be switched between a second pressed state and a second unpressed state, and in the second pressed state, the second unlocking parts are pressed against the fixing respectively To expand the fixing members, so that the substrate can be moved into or removed from the pallet in the vertical state along the length direction, and in the second unpressed state, the second release locks The pieces are separated by the fixing pieces to close the fixing pieces.

在一些實施態樣中，該等第一釋鎖件和該等第二釋鎖件以線接觸的方式壓抵該等固定件。In some embodiments, the first unlocking members and the second unlocking members are pressed against the fixing members in line contact.

在一些實施態樣中，該第一基板裝卸設備還包括一連接該基板加工設備與該第一基板裝卸裝置的第一運輸裝置，該第一運輸裝置用以將該基板構件自該第一基板裝卸裝置運送至該基板加工設備；該第二基板裝卸設備還包括一連接該基板加工設備與該第二基板裝卸裝置的第二運輸裝置，該第二運輸裝置用以將該基板構件自該基板加工設備運送至該第二基板裝卸裝置。In some embodiments, the first substrate loading and unloading device further includes a first transport device connecting the substrate processing device and the first substrate loading and unloading device, the first transport device is used to remove the substrate member from the first substrate The loading and unloading device is transported to the substrate processing equipment; the second substrate loading and unloading equipment further includes a second transportation device connecting the substrate processing equipment and the second substrate loading and unloading device, the second transportation device is used to remove the substrate member from the substrate The processing equipment is transported to the second substrate loading and unloading device.

在一些實施態樣中，該第一支撐本體具有二個沿該寬度方向相間隔的第一支撐部，且該等第一支撐部界定出可供該板架穿伸的第一後穿伸空間，該等第一卡制件兩兩一組分別設置於該等第一支撐部；該第一基板裝卸設備還包括一設置於該第一框架的第一板架取放裝置，該第一板架取放裝置用於夾持該板架並經由該第一後穿伸空間移動至使該板架固定於該等第一卡制件的位置。In some embodiments, the first support body has two first support portions spaced apart in the width direction, and the first support portions define a first rear extension space through which the pallet can extend , The first clamping pieces are arranged in groups of two in the first support portion; the first substrate loading and unloading equipment further includes a first plate rack pick and place device provided in the first frame, the first plate The rack pick-and-place device is used to clamp the board rack and move to the position for fixing the board rack to the first clamping pieces through the first rear penetration space.

在一些實施態樣中，該第一釋鎖本體具有二個沿該寬度方向相間隔且分別對應於該等第一支撐部的第一釋鎖部，且該等第一釋鎖部界定出可供該基板穿伸的第一前穿伸空間，該等第一釋鎖件分別設置於該等第一釋鎖部且位置分別對應於該等固定件；該第一基板裝卸設備還包括一設置於該第一框架的第一基板取放裝置，該第一基板取放裝置用於夾持該基板並將該基板經由該第一前穿伸空間移動至使該基板位於該板架內。In some embodiments, the first unlocking body has two first unlocking parts spaced along the width direction and corresponding to the first supporting parts, respectively, and the first unlocking parts define A first front penetrating space for the substrate to penetrate, the first unlocking members are respectively disposed on the first locking parts and the positions correspond to the fixing members; the first substrate loading and unloading device further includes a setting A first substrate pick-and-place device in the first frame, the first substrate pick-and-place device is used to clamp the substrate and move the substrate through the first front penetration space until the substrate is located in the pallet.

在一些實施態樣中，該第二釋鎖本體具有二個沿該寬度方向相間隔且分別對應於該等第二支撐部的第二釋鎖部，且該等第二釋鎖部界定出可供該基板穿伸的第二後穿伸空間，該等第二釋鎖件分別設置於該等第二釋鎖部且位置分別對應於該等固定件；該第二基板裝卸設備還包括一設置於該第二框架的第二板架取放裝置，該第二板架取放裝置位於該第二基板裝卸裝置的底側，該第二板架取放裝置用於夾持該板架並經由該第二後穿伸空間移動至遠離該等第二卡制件的位置。In some embodiments, the second unlocking body has two second unlocking portions spaced apart along the width direction and corresponding to the second supporting portions, respectively, and the second unlocking portions define A second rear extension space for the substrate to penetrate, the second unlocking members are respectively disposed on the second unlocking parts and the positions correspond to the fixing members; the second substrate loading and unloading device further includes a setting A second plate rack pick and place device on the second frame, the second plate rack pick and place device is located on the bottom side of the second substrate loading and unloading device, and the second plate rack pick and place device is used to clamp the plate rack and pass through The second rear penetration space moves to a position away from the second clamping members.

在一些實施態樣中，該第二支撐本體具有二個沿該寬度方向相間隔的第二支撐部，且該等第二支撐部界定出可供該板架穿伸的第二前穿伸空間，該等第二卡制件兩兩一組分別設置於該等第二支撐部；該第二基板裝卸設備還包括一設置於該第二框架的第二基板取放裝置，該第二基板取放裝置用於夾持該基板並將該基板自該板架內移出，再經由該第二前穿伸空間移動至遠離該第二基板裝卸裝置。In some embodiments, the second support body has two second support portions spaced apart in the width direction, and the second support portions define a second front penetration space through which the pallet can extend , The second clamping members are arranged in groups of two on the second support portion; the second substrate loading and unloading equipment further includes a second substrate pick-and-place device disposed on the second frame, the second substrate The putting device is used to clamp the substrate and remove the substrate from the plate frame, and then move away from the second substrate loading and unloading device through the second front penetration space.

在一些實施態樣中，該基板加工系統還包含一設置於該基板加工設備的底側且兩相反端分別鄰接該第一基板裝卸設備與該第二基板裝卸設的板架回收設備，該板架回收設備用於將置放於該第二基板裝卸設備的該板架運送至該第一基板裝卸設備。In some embodiments, the substrate processing system further includes a plate rack recovery device disposed on the bottom side of the substrate processing device and having two opposite ends adjacent to the first substrate loading and unloading device and the second substrate loading and unloading device respectively. The rack recovery equipment is used to transport the board rack placed in the second substrate loading and unloading equipment to the first substrate loading and unloading equipment.

本新型之功效在於：基板加工系統藉由該第一基板裝卸設備與該第二基板裝卸設備分別達到能自動地將該基板結合於該板架，以及將該基板自該板架卸除之功效，藉以提升生產效率。再者，由於該基板加工設備是以限制該基板構件必須以垂直狀態移動，因此，藉由該第一板架取放裝置與該第一基板取放裝置分別先將該板架與該基板轉換成垂直狀態，再藉由該第一基板裝卸裝置實現結合，藉以使該基板構件能直接被移動至該基板加工設備，免去再次翻轉成垂直狀態的步驟，增加生產效率。相對地，再藉由該第二基板取放裝置直接在該基板呈垂直狀態下與該板架分離，並且透過該第二板架取放裝置直接翻轉該板架至水平狀態，藉此，提升整體的分解及回收速度。The effect of the present invention lies in that the substrate processing system can achieve the functions of automatically bonding the substrate to the plate rack and removing the substrate from the plate rack through the first substrate loading and unloading equipment and the second substrate loading and unloading equipment, respectively. To increase production efficiency. Furthermore, since the substrate processing equipment restricts that the substrate member must be moved in a vertical state, the first pallet pick-and-place device and the first substrate pick-and-place device first convert the pallet and the substrate respectively In the vertical state, the first substrate loading and unloading device realizes the combination, so that the substrate member can be directly moved to the substrate processing equipment, eliminating the step of reverting to the vertical state again, increasing production efficiency. In contrast, the second substrate pick-and-place device directly separates the board shelf when the substrate is in a vertical state, and directly flips the board shelf to a horizontal state through the second board-holder pick-and-place device, thereby lifting Overall decomposition and recovery speed.

參閱圖1與圖2，本新型基板加工系統之一實施例，適用於對多個基板構件9加工，每一基板構件9包括一板架91及一可分離地設置於該板架91的基板92，該板架91具有一架體911及多個設於該架體911的兩相反側且用於夾持該基板92的固定件912。該基板加工系統包含一基板加工設備1、一第一基板裝卸設備2、一第二基板裝卸設備3及一板架回收設備4。在本實施例中，該基板加工設備1舉例沿一長度方向D1延伸，而該第一基板裝卸設備2與該第二基板裝卸設備3分別鄰接於該基板加工設備1地兩相反端，該板架回收設備4則鄰接於該基板加工設備1的底部且兩相反端分別鄰接該第一基板裝卸設備2與該第二基板裝卸設備3。其中，該第一基板裝卸設備2舉例為進料設備，適用於將該板架91與該基板92結合以形成基板構件9，而該第二基板裝卸設備3舉例為出料設備，是將加工完成的該基板92與該板架91分開。Referring to FIGS. 1 and 2, an embodiment of the novel substrate processing system is suitable for processing a plurality of substrate members 9. Each substrate member 9 includes a pallet 91 and a substrate detachably disposed on the pallet 91 92. The board frame 91 has a frame body 911 and a plurality of fixing members 912 disposed on opposite sides of the frame body 911 and used for clamping the substrate 92. The substrate processing system includes a substrate processing device 1, a first substrate loading and unloading device 2, a second substrate loading and unloading device 3, and a pallet recovery device 4. In this embodiment, the substrate processing apparatus 1 extends along a longitudinal direction D1 for example, and the first substrate loading and unloading apparatus 2 and the second substrate loading and unloading apparatus 3 are adjacent to opposite ends of the substrate processing apparatus 1 respectively. The rack recycling device 4 is adjacent to the bottom of the substrate processing device 1 and the two opposite ends are respectively adjacent to the first substrate loading and unloading device 2 and the second substrate loading and unloading device 3. Wherein, the first substrate loading and unloading equipment 2 is exemplified as a feeding device, which is suitable for combining the pallet 91 and the substrate 92 to form a substrate member 9, and the second substrate loading and unloading equipment 3 is an example of a discharging device, which is to process The completed base plate 92 is separated from the pallet 91.

參閱圖1，該基板加工設備1舉例為一烘烤爐，並具有位於相反兩側的一入口端111及一出口端112、一自該入口端111延伸至該出口端112的加工通道11，及一設置於該加工通道11內且自該入口端111延伸至該出口端112的移動裝置12。其中，該移動裝置12用於將來自該入口端111的該等基板構件9以保持在垂直狀態的方式移動至該出口端112。Referring to FIG. 1, the substrate processing apparatus 1 is an example of a baking furnace, and has an inlet end 111 and an outlet end 112 on opposite sides, and a processing channel 11 extending from the inlet end 111 to the outlet end 112, And a moving device 12 disposed in the processing channel 11 and extending from the inlet end 111 to the outlet end 112. Wherein, the moving device 12 is used to move the substrate members 9 from the inlet end 111 to the outlet end 112 in a manner of maintaining the vertical state.

參閱圖2，該架體911呈矩形，該架體911具有一上桿913、一下桿914、一左桿915及一右桿916。該固定件912舉例為夾子且數量舉例為八個，其中，該等固定件912兩兩一組分別固定於該上桿913、該下桿914、該左桿915及該右桿916。且固定於該左桿915與該右桿916的兩組固定件912，其各組兩固定件912沿一高度方向D2相間隔。另外，固定於該上桿913與該下桿914的兩組固定件912，其各組兩固定件912沿一寬度方向D3相間隔。Referring to FIG. 2, the frame body 911 has a rectangular shape. The frame body 911 has an upper rod 913, a lower rod 914, a left rod 915 and a right rod 916. The fixing member 912 is exemplified by clips and the number is eight. The fixing members 912 are fixed to the upper rod 913, the lower rod 914, the left rod 915, and the right rod 916 in groups of two. And two sets of fixing members 912 fixed to the left rod 915 and the right rod 916 are separated from each other along a height direction D2. In addition, the two sets of fixing members 912 fixed to the upper rod 913 and the lower rod 914 are spaced apart in a width direction D3.

參閱圖1、圖3與圖4，該第一基板裝卸設備2鄰接於該入口端111，該第一基板裝卸設備2包括一第一框架21、一第一基板裝卸裝置22、一第一運輸裝置24、一第一板架取放裝置25、一第一基板取放裝置26及一第一基板供應裝置27。在本實施例中，該第一基板裝卸裝置22連接於該第一框架21，並具有一第一支撐組合件221及一第一釋鎖組合件222。具體而言，該第一支撐組合件221具有一第一支撐本體223及四個第一卡制件224，其中，該第一支撐本體223具有一朝向該基板加工設備1的第一前側面225、一相反於該第一前側面225的第一後側面226，及二個沿該寬度方向D3左右相間隔且沿一垂直於該寬度方向D3的高度方向D2延伸的第一支撐部227，且該等第一支撐部227界定出可供該板架91穿伸的第一後穿伸空間228。Referring to FIG. 1, FIG. 3 and FIG. 4, the first substrate loading and unloading equipment 2 is adjacent to the entrance end 111, the first substrate loading and unloading equipment 2 includes a first frame 21, a first substrate loading and unloading device 22, a first transport The device 24, a first pallet pick and place device 25, a first substrate pick and place device 26, and a first substrate supply device 27. In this embodiment, the first substrate loading and unloading device 22 is connected to the first frame 21 and has a first supporting assembly 221 and a first unlocking assembly 222. Specifically, the first supporting assembly 221 has a first supporting body 223 and four first clamping members 224, wherein the first supporting body 223 has a first front side 225 facing the substrate processing apparatus 1 , A first rear side 226 opposite to the first front side 225, and two first support portions 227 spaced left and right along the width direction D3 and extending along a height direction D2 perpendicular to the width direction D3, and The first support portions 227 define a first rear extension space 228 through which the pallet 91 can extend.

參閱圖1至圖4，每一第一支撐部227具有一朝向該基板加工設備1的第一前側面部229，及一背向於該第一前側面部229的第一後側面部231。該等第一卡制件224自該第一前側面225朝向遠離該第一後側面226方向凸伸(即朝向該基板加工設備1方向)，更清楚地說，該等第一卡制件224舉例為掛勾且兩兩一組分別固定於該等第一支撐部227的該等第一前側面部229，每一組兩第一卡制件224在該高度方向D2相間隔，進一步來說，其中一第一卡制件224位於該第一前側面部229的頂側，另一第一卡制件224位於該第一前側面部229的底側。經由上述結構，位於該等第一前側面部229的頂側的該等第一卡制件224能分別供該上桿913的兩相反端部靠抵，位於該等第一前側面部229的底側的該等第一卡制件224能分別供該下桿914的兩相反端部靠抵，進而使該架體911保持在垂直狀態。Referring to FIGS. 1 to 4, each first supporting portion 227 has a first front side portion 229 facing the substrate processing apparatus 1 and a first rear side portion 231 facing away from the first front side portion 229. The first clamping members 224 protrude from the first front side 225 away from the first rear side 226 (that is, toward the substrate processing apparatus 1). More specifically, the first clamping members 224 An example is a hook and two groups of two are respectively fixed to the first front side portions 229 of the first supporting portions 227, and each group of two first clamping members 224 are spaced apart in the height direction D2, further One of the first clamping members 224 is located on the top side of the first front side portion 229, and the other first clamping member 224 is located on the bottom side of the first front side portion 229. With the above structure, the first clamping pieces 224 located on the top side of the first front side portions 229 can respectively abut two opposite ends of the upper rod 913, and are located on the first front side portions 229 The first clamping members 224 on the bottom side can respectively provide for the two opposite ends of the lower rod 914 to abut against, so as to keep the frame body 911 in a vertical state.

參閱圖1、圖3至圖5，該第一釋鎖組合件222設置於該第一框架21且位於該第一支撐本體223的第一前側面225，該第一釋鎖組合件222可相對於該第一支撐組合件221沿該長度方向D1移動，並具有一第一釋鎖本體232及八個第一釋鎖件233。該第一釋鎖本體232位於該第一支撐組合件221與該基板加工設備1之間，並具有二個沿該寬度方向D3相間隔且位置分別對應於該等第一支撐部227的第一釋鎖部234，且該等第一釋鎖部234界定出可供該基板92穿伸的第一前穿伸空間235。該等第一釋鎖件233分別設置於該等第一釋鎖部234朝向該第一支撐組合件221的一側面，且位置分別對應於該等固定件912。每一第一釋鎖件233具有一個一端連接於對應的該第一釋鎖部234且朝向該第一支撐組合件221方向延伸的第一桿體236，及一樞接於該第一桿體236末端的第一滾輪237。該第一釋鎖組合件222能受驅動而朝該第一支撐組合件221方向靠近或朝遠離該第一支撐組合件221方向移動，進而使該等第一釋鎖件233分別壓抵於該等固定件912。此外，透過第一滾輪237以線接觸的方式在壓抵對應的該固定件912時能減少與對應的該固定件912的摩擦，藉此延長該固定件912的使用壽命。Referring to FIGS. 1, 3 to 5, the first release assembly 222 is disposed on the first frame 21 and is located on the first front side 225 of the first support body 223, and the first release assembly 222 can be opposite The first support assembly 221 moves along the length direction D1, and has a first release body 232 and eight first release parts 233. The first unlocking body 232 is located between the first supporting assembly 221 and the substrate processing apparatus 1 and has two first spaces that are spaced along the width direction D3 and have positions corresponding to the first supporting portions 227, respectively The unlocking portion 234, and the first unlocking portions 234 define a first front extending space 235 through which the base plate 92 can extend. The first unlocking members 233 are respectively disposed on the side surfaces of the first unlocking portions 234 facing the first supporting assembly 221, and the positions correspond to the fixing members 912, respectively. Each first unlocking member 233 has a first rod body 236 connected at one end to the corresponding first unlocking portion 234 and extending toward the first supporting assembly 221, and a first rod body 236 pivotally connected to the first rod body The first roller 237 at the end of 236. The first unlocking assembly 222 can be driven to move toward or away from the first supporting assembly 221, so that the first unlocking members 233 are pressed against the first Wait for the fixture 912. In addition, the first roller 237 can reduce the friction with the corresponding fixing member 912 when it is pressed against the corresponding fixing member 912 by line contact, thereby prolonging the service life of the fixing member 912.

參閱圖1與圖3，該第一運輸裝置24舉例為滑軌總成，該第一運輸裝置24位於該第一基板裝卸裝置22的頂側，且一端鄰接於該第一基板裝卸裝置22，另一端鄰接於該移動裝置12靠近該入口端111的一端，藉此，該第一運輸裝置24能將該第一基板裝卸裝置22完成的該基板構件9運送至該移動裝置12。1 and 3, the first transport device 24 is an example of a slide rail assembly, the first transport device 24 is located on the top side of the first substrate loading and unloading device 22, and one end is adjacent to the first substrate loading and unloading device 22, The other end is adjacent to the end of the moving device 12 close to the entrance end 111, whereby the first transport device 24 can transport the substrate member 9 completed by the first substrate loading and unloading device 22 to the moving device 12.

參閱圖3與圖4，該第一板架取放裝置25舉例為機械手臂，藉由該第一板架取放裝置25將板架91移動至該第一基板裝卸裝置22，進一步來說，該第一板架取放裝置25安裝於該第一框架21的頂側且相鄰於該第一後側面226，且當該板架91置放於該第一板架取放裝置25的下方處時，透過該第一板架取放裝置25抓取該板架91，先將該板架91轉換成垂直狀態後再沿著該第一後穿伸空間228移動至鄰近該等第一卡制件224的位置，進而使該板架91固定於該等第一卡制件224上，以保持在垂直狀態，且再該板架91置放完成後依照原路徑回至原位置。Referring to FIGS. 3 and 4, the first pallet pick-and-place device 25 is an example of a robotic arm, and the first pallet pick-and-place device 25 moves the pallet 91 to the first substrate loading and unloading device 22. Further, The first pallet pick-and-place device 25 is installed on the top side of the first frame 21 and is adjacent to the first rear side 226, and when the pallet 91 is placed under the first pallet pick-and-place device 25 At this time, the first pallet pick-and-place device 25 grabs the pallet 91, converts the pallet 91 into a vertical state, and then moves along the first rear penetrating space 228 to be adjacent to the first cards The position of the workpiece 224 further fixes the board frame 91 on the first clamping members 224 to maintain the vertical state, and returns to the original position according to the original path after the board frame 91 is placed.

參閱圖3與圖4，該第一基板取放裝置26舉例為機械手臂，藉由該第一基板取放裝置26將該基板92移動至該第一基板裝卸裝置22，進一步來說，該第一基板取放裝置26固定於該第一框架21，該第一基板取放裝置26抓取該基板92，先將該基板92轉成垂直狀態後再沿著該第一前穿伸空間235移動至該板架91內，進而透過如上述該等第一釋鎖組合件222的操作方式使該基板92固定於該板架91上。Referring to FIGS. 3 and 4, the first substrate pick-and-place device 26 is an example of a robotic arm, and the first substrate pick-and-place device 26 moves the substrate 92 to the first substrate handling device 22. Further, the first A substrate pick-and-place device 26 is fixed to the first frame 21, and the first substrate pick-and-place device 26 grabs the substrate 92, turns the substrate 92 into a vertical state, and then moves along the first front penetration space 235 Into the pallet 91, and then the base plate 92 is fixed on the pallet 91 through the operation modes of the first unlocking assembly 222 as described above.

參閱圖3與圖4，該第一基板供應裝置27設置於該第一框架21且鄰近該第一支撐組合件221的該第一後側面226且未阻礙該第一板架取放裝置25直接下移至該板架91置放處的路徑。該第一基板供應裝置27能預先置放多個基板92，且置放於該第一基板供應裝置27上的每一基板92呈水平狀態疊置，以供該第一基板取放裝置26夾取。Referring to FIGS. 3 and 4, the first substrate supply device 27 is disposed on the first frame 21 and is adjacent to the first rear side 226 of the first support assembly 221 and does not obstruct the first plate rack pick-and-place device 25 directly Move down to the path where the shelf 91 is placed. The first substrate supply device 27 can place a plurality of substrates 92 in advance, and each substrate 92 placed on the first substrate supply device 27 is stacked horizontally for the first substrate pick-and-place device 26 to sandwich take.

參閱圖1與圖6，該第二基板裝卸設備3鄰接於該基板加工設備1的該出口端112，且該第二基板裝卸設備3的結構和功能與該第一基板裝卸設備2相似，更清楚地說，該第二基板裝卸設備3以該第一基板裝卸設備2安裝於該基板加工設備1的方向鄰接於該出口端112。該第二基板裝卸設備3包括一第二框架31、一第二基板裝卸裝置32、一第二運輸裝置34、一第二板架取放裝置35、一第二基板取放裝置36、一第二板架回收裝置37，及一第二基板回收裝置38。具體而言，該第二基板裝卸裝置32設置於該第二框架31且沿該長度方向D1間隔於該出口端112；該第二運輸裝置34位於該第二框架31的頂側且兩相反端分別連接該移動裝置12與該第二基板裝卸裝置32；該第二板架取放裝置35位於該第二基板裝卸裝置32在該寬度方向D3上的兩相反側；該第二板架回收裝置37位於該第二基板裝卸裝置32背向於該出口端112的一側。Referring to FIGS. 1 and 6, the second substrate loading and unloading device 3 is adjacent to the outlet end 112 of the substrate processing device 1, and the structure and function of the second substrate loading and unloading device 3 are similar to those of the first substrate loading and unloading device 2. To be clear, the second substrate handling equipment 3 is adjacent to the outlet end 112 in the direction that the first substrate handling equipment 2 is installed in the substrate processing equipment 1. The second substrate loading and unloading device 3 includes a second frame 31, a second substrate loading and unloading device 32, a second transport device 34, a second pallet pick and place device 35, a second substrate pick and place device 36, a first A second rack recovery device 37, and a second substrate recovery device 38. Specifically, the second substrate loading and unloading device 32 is disposed on the second frame 31 and is spaced from the outlet end 112 along the length direction D1; the second transport device 34 is located on the top side of the second frame 31 and opposite ends The mobile device 12 and the second substrate loading and unloading device 32 are respectively connected; the second plate rack pick and place device 35 is located on two opposite sides of the second substrate loading and unloading device 32 in the width direction D3; the second plate rack recovery device 37 is located on the side of the second substrate loading and unloading device 32 facing away from the outlet end 112.

參閱圖1、圖6與圖7，其中，該第二基板裝卸裝置32具有一第二支撐組合件321及一第二釋鎖組合件322。該第二支撐組合件321具有一第二支撐本體323及四個第二卡制件324，其中，該第二支撐本體323具有一第二前側面325、一第二後側面326及二第二支撐部327，該等第二支撐部327界定出一第二前穿伸空間328，且每一第二支撐部327具有一第二前側面部329及一第二後側面部331。而該第二釋鎖組合件322具有一第二釋鎖本體332及八個第二釋鎖件333，其中，該第二釋鎖本體332具有二第二釋鎖部334。且每一第二釋鎖件333具有一第二桿體336及一第二滾輪337。此外，該等第二釋鎖部334界定出一第二後穿伸空間335。Referring to FIGS. 1, 6 and 7, the second substrate loading and unloading device 32 has a second supporting assembly 321 and a second unlocking assembly 322. The second supporting assembly 321 has a second supporting body 323 and four second clamping members 324, wherein the second supporting body 323 has a second front side 325, a second rear side 326 and two second The support portions 327. The second support portions 327 define a second front penetration space 328, and each second support portion 327 has a second front side portion 329 and a second rear side portion 331. The second unlocking assembly 322 has a second unlocking body 332 and eight second unlocking members 333, wherein the second unlocking body 332 has two second unlocking parts 334. And each second unlocking member 333 has a second rod body 336 and a second roller 337. In addition, the second unlocking portions 334 define a second rear penetration space 335.

該第二基板裝卸設備3與該第一基板裝卸設備2的差異在於，該第二板架取放裝置35不同於該第一板架取放裝置25是一種翻轉裝置，而不是機械手臂，進一步來說，該第二板架取放裝置35固定於該第二框架31且位於該第二基板裝卸裝置32的兩相反側。據此，該第二板架取放裝置35能夾持固定於該等第二卡制件324的板架91的該下桿914(參閱圖2)的兩相反端與該上桿913(參閱圖2)的兩相反端，並先將該板架91自該等第二卡制件324分離後再朝向該第二板架回收裝置37方向轉動離開該等第二卡制件324，以讓下一個基板構件9能被置放。The difference between the second substrate loading and unloading device 3 and the first substrate loading and unloading device 2 is that the second board rack pick-and-place device 35 is different from the first board rack pick-and-place device 25 as a turning device, rather than a mechanical arm, further In other words, the second pallet pick-and-place device 35 is fixed to the second frame 31 and is located on two opposite sides of the second substrate handling device 32. Accordingly, the second plate rack pick-and-place device 35 can clamp and fix the two opposite ends of the lower rod 914 (see FIG. 2) of the plate rack 91 of the second clamping members 324 and the upper rod 913 (see 2) opposite ends, and first separating the pallet 91 from the second clamping members 324, and then rotating away from the second clamping members 324 in the direction of the second pallet recovery device 37 to allow The next substrate member 9 can be placed.

參閱圖1、圖3與圖6，該板架回收設備4舉例為輸送帶，兩相反端分別連接至該第一基板裝卸設備2與該第二板架回收裝置37，藉此讓位於該第二板架回收裝置37的板架91能移動到該第一基板裝卸設備2再重複利用，進而節省生產成本。Referring to FIG. 1, FIG. 3 and FIG. 6, the rack recovery equipment 4 is an example of a conveyor belt, and two opposite ends are respectively connected to the first substrate loading and unloading equipment 2 and the second rack recovery device 37, thereby giving way to the The pallet 91 of the second pallet recovery device 37 can be moved to the first substrate loading and unloading device 2 and reused, thereby saving production costs.

參閱圖3與圖8，在執行加工過程中，有多數個基板92會置放於該第一基板供應裝置27，有多個板架91會被置放於該板架回收設備4鄰接該第一基板裝卸設備2的一端且以水平狀態層疊。參閱圖9至圖11，該第一板架取放裝置25會夾取最上層的該板架91並先將該板架91翻轉成垂直狀態後，再沿該第一後穿伸空間228移動至固定在該等第一卡制件224的位置，隨後，該第一釋鎖組合件222受驅動而朝向該第一支撐組合件221移動並使該等第一釋鎖件233處在一第一壓抵狀態，在該第一壓抵狀態，該等第一釋鎖件233分別壓抵於該等固定件912以使該等固定件912展開。參閱圖12，在同一時間，該第一基板取放裝置26移動至該第一基板供應裝置27並夾持該基板92，隨後，參閱圖13，先將該基板92轉成垂直狀態，再沿該第一前穿伸空間235移動至該板架91內側。接著，參閱圖14，該第一釋鎖組合件222受驅動而朝遠離該第一支撐組合件221方向移動並使該等第一釋鎖件233處在一第一未壓抵狀態，在該第一未壓抵狀態，該等第一釋鎖件233分別未壓抵該等固定件912以使該等固定件912受彈力自動復位關閉，藉此夾持住該基板92的側邊。該第一基板取放裝置26轉換成未夾持該基板92的狀態並退出該第一基板裝卸裝置22，進而回到原位置準備夾持下一塊基板92。Referring to FIGS. 3 and 8, during the processing, a plurality of substrates 92 will be placed on the first substrate supply device 27, and a plurality of pallets 91 will be placed on the pallet recovery device 4 adjacent to the first One end of a substrate loading and unloading device 2 is stacked in a horizontal state. Referring to FIGS. 9 to 11, the first pallet pick-and-place device 25 will grip the uppermost pallet 91 and turn the pallet 91 into a vertical state first, and then move along the first rear penetration space 228 Fixed to the positions of the first clamping members 224, and then, the first unlocking assembly 222 is driven to move toward the first supporting assembly 221 and the first unlocking members 233 are in a first position In a pressed state, in the first pressed state, the first release members 233 are pressed against the fixing members 912 respectively to expand the fixing members 912. Referring to FIG. 12, at the same time, the first substrate pick-and-place device 26 moves to the first substrate supply device 27 and clamps the substrate 92. Subsequently, referring to FIG. 13, the substrate 92 is turned into a vertical state first, and then along The first front penetration space 235 moves to the inside of the pallet 91. Next, referring to FIG. 14, the first unlocking assembly 222 is driven to move away from the first supporting assembly 221 and the first unlocking members 233 are in a first unpressed state. In the first unpressed state, the first unlocking members 233 are not pressed against the fixing members 912 respectively, so that the fixing members 912 are automatically reset and closed by elastic force, thereby clamping the side of the substrate 92. The first substrate pick-and-place device 26 switches to a state where the substrate 92 is not clamped and exits the first substrate loading and unloading device 22, and then returns to the original position to prepare to clamp the next substrate 92.

參閱圖14與圖15，而位於該第一基板裝卸裝置22上的基板構件9，該第一運輸裝置24受驅動而將該基板構件9自該第一基板裝卸裝置22上取下，並帶動該基板構件9移動至該移動裝置12鄰近該入口端111的一端。隨後，參閱圖1，該移動裝置12會帶著該基板構件9經過該加工通道11到達該出口端112，在該基板92加工完成後，該移動裝置12將該基板構件9移動至該第二運輸裝置34如圖16所示。參閱圖17，該第二運輸裝置34將帶動該基板構件9經由該第二前穿伸空間328移動至該第二基板裝卸裝置32，並使該基板構件9固定於該等第二卡制件324。參閱圖18與圖19，該第二基板取放裝置36會經由該第二後穿伸空間335伸入並夾住該基板92的側邊。隨後，該第二釋鎖組合件322受驅動而朝向該第二支撐組合件321移動，並使該等第二釋鎖件333處在如上述第一釋鎖件233的該第一壓抵狀態的一第二壓抵狀態，在該第二壓抵狀態，該等第二釋鎖件333分別壓抵該等固定件912，使該等固定件912呈展開狀態，讓該第二基板取放裝置36能將該基板92自該板架91以垂直狀態移除，進而置放到該第二基板回收裝置38上如圖20所示。透過先以該第二基板取放裝置36夾持住該基板92，再釋放該等固定件912能確保該基板不會因意外掉落而毀損。Referring to FIGS. 14 and 15, the substrate member 9 on the first substrate loading and unloading device 22, the first transport device 24 is driven to remove the substrate member 9 from the first substrate loading and unloading device 22, and drive The substrate member 9 moves to an end of the moving device 12 adjacent to the inlet end 111. Subsequently, referring to FIG. 1, the moving device 12 will bring the substrate member 9 through the processing channel 11 to the outlet end 112. After the processing of the substrate 92 is completed, the moving device 12 moves the substrate member 9 to the second The transportation device 34 is shown in FIG. 16. Referring to FIG. 17, the second transport device 34 will drive the substrate member 9 to move to the second substrate loading and unloading device 32 through the second front penetration space 328, and fix the substrate member 9 to the second clamping members 324. Referring to FIGS. 18 and 19, the second substrate pick-and-place device 36 will extend through the second rear penetration space 335 and clamp the side of the substrate 92. Subsequently, the second unlocking assembly 322 is driven to move toward the second supporting assembly 321, and the second unlocking members 333 are in the first pressed state of the first unlocking member 233 as described above A second pressed state, in the second pressed state, the second unlocking members 333 are pressed against the fixing members 912 respectively, so that the fixing members 912 are in an expanded state to allow the second substrate to be placed The device 36 can remove the substrate 92 from the pallet 91 in a vertical state, and then place it on the second substrate recovery device 38 as shown in FIG. 20. By first holding the substrate 92 with the second substrate pick-and-place device 36 and then releasing the fixing members 912, it can be ensured that the substrate will not be damaged due to accidental dropping.

參閱圖21，另一方面，當該基板92(參閱圖20)被移除後，該第二釋鎖組合件322受驅動而朝遠離該第二支撐組合件321的方向移動，並使該等第二釋鎖件333處在如上述第一釋鎖件233(參閱圖14)的該第一未壓抵狀態的一第二未壓抵狀態。接著，該第二板架取放裝置35受驅動而夾制住該板架91的左右兩側，並先將該板架91自該等第二卡制件324移除，再朝向該第二板架回收裝置37方向轉動，以使該板架91由垂直狀態轉換成水平狀態。參閱圖22，當該第二板架回收裝置37存放一定數量(例如4個)的板架91後再向下移動至該板架回收設備4，並使該等板架91置放於該板架回收設備4，藉此節省電力。最後，再經由該板架回收設備4將該等板架91運送至該第一基板裝卸設備2(參閱圖2)，以使該等板架91被重複利用。Referring to FIG. 21, on the other hand, when the base plate 92 (see FIG. 20) is removed, the second release assembly 322 is driven to move away from the second support assembly 321, and the The second unlocking member 333 is in a second unpressed state of the first unpressed state as described above for the first unlocking member 233 (see FIG. 14). Then, the second pallet pick-and-place device 35 is driven to clamp the left and right sides of the pallet 91, and first remove the pallet 91 from the second clamping members 324, and then toward the second The pallet recovery device 37 rotates in the direction to change the pallet 91 from the vertical state to the horizontal state. Referring to FIG. 22, when the second pallet recovery device 37 stores a certain number (for example, 4) of pallets 91 and then moves down to the pallet recovery device 4, the pallets 91 are placed on the board Recycling equipment 4, thereby saving power. Finally, the pallets 91 are transported to the first substrate loading and unloading device 2 (see FIG. 2) via the pallet recovery equipment 4, so that the pallets 91 are reused.

綜上所述，本新型基板加工系統藉由該第一基板裝卸設備2與該第二基板裝卸設備3分別達到能自動地將該基板92結合於該板架91，以及將該基板92自該板架91卸除之功效，藉以提升生產效率。再者，由於該基板加工設備1是以限制該基板構件9必須以垂直狀態移動，因此，藉由該第一板架取放裝置25與該第一基板取放裝置26分別先將該板架91與該基板92轉換成垂直狀態，再藉由該第一基板裝卸裝置22實現結合，藉以使該基板構件9能直接被移動至該基板加工設備1，免去再次翻轉成垂直狀態的步驟，增加生產效率。相對地，再藉由該第二基板取放裝置36直接在該基板92呈垂直狀態下與該板架91分離，並且透過該第二板架取放裝置35直接翻轉該板架91至水平狀態，藉此，提升整體的分解及回收速度。故確實能達成本新型之目的。In summary, the first substrate processing equipment 2 and the second substrate processing equipment 3 of the novel substrate processing system can automatically couple the substrate 92 to the pallet 91 and remove the substrate 92 from the substrate The removal effect of the plate frame 91 can improve the production efficiency. Furthermore, since the substrate processing apparatus 1 restricts that the substrate member 9 must move in a vertical state, the first pallet pick-and-place device 25 and the first substrate pick-and-place device 26 respectively separate the pallet first 91 and the substrate 92 are converted into a vertical state, and then combined by the first substrate loading and unloading device 22, so that the substrate member 9 can be directly moved to the substrate processing equipment 1, avoiding the step of reverting to the vertical state again, Increase production efficiency. In contrast, the second substrate pick-and-place device 36 directly separates the board rack 91 when the substrate 92 is in a vertical state, and directly flips the board rack 91 to a horizontal state through the second board rack pick-and-place device 35 In order to improve the overall decomposition and recovery speed. Therefore, it can indeed achieve the purpose of new cost.

惟以上所述者，僅為本新型之實施例而已，當不能以此限定本新型實施之範圍，凡是依本新型申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾，皆仍屬本新型專利涵蓋之範圍內。However, the above are only examples of the new model. When the scope of the new model cannot be limited by this, any simple equivalent changes and modifications made according to the patent application scope and patent specification content of the new model are still regarded as Within the scope of this new patent.

1:基板加工設備 11:加工通道 111:入口端 112:出口端 12:移動裝置 2:第一基板裝卸設備 21:第一框架 22:第一基板裝卸裝置 221:第一支撐組合件 222:第一釋鎖組合件 223:第一支撐本體 224:第一卡制件 225:第一前側面 226:第一後側面 227:第一支撐部 228:第一後穿伸空間 229:第一前側面部 231:第一後側面部 232:第一釋鎖本體 233:第一釋鎖件 234:第一釋鎖部 235:第一前穿伸空間 236:第一桿體 237:第一滾輪 24:第一運輸裝置 25:第一板架取放裝置 26:第一基板取放裝置 27:第一基板供應裝置 3:第二基板裝卸設備 31:第二框架 32:第二基板裝卸裝置 321:第二支撐組合件 322:第二釋鎖組合件 323:第二支撐本體 324:第二卡制件 325:第二前側面 326:第二後側面 327:第二支撐部 328:第二前穿伸空間 329:第二前側面部 331:第二後側面部 332:第二釋鎖本體 333:第二釋鎖件 334:第二釋鎖部 335:第二後穿伸空間 336:第二桿體 337:第二滾輪 34:第二運輸裝置 35:第二板架取放裝置 36:第二基板取放裝置 37:第二板架回收裝置 38:第二基板回收裝置 4:板架回收設備 9:基板構件 91:板架 911:架體 912:固定件 913:上桿 914:下桿 915:左桿 916:右桿 92:基板 D1:長度方向 D2:高度方向 D3:寬度方向1: substrate processing equipment 11: Processing channel 111: entrance side 112: export end 12: Mobile device 2: The first substrate loading and unloading equipment 21: The first frame 22: The first substrate loading and unloading device 221: First support assembly 222: The first lock release assembly 223: First support body 224: The first card piece 225: first front side 226: first rear side 227: First support 228: First rear penetration space 229: First front side 231: First rear side 232: The first release body 233: The first release piece 234: The first release department 235: First forward penetration space 236: the first rod 237: The first roller 24: The first transportation device 25: The first plate rack pick and place device 26: The first substrate pick and place device 27: First substrate supply device 3: second substrate handling equipment 31: Second frame 32: second substrate loading and unloading device 321: Second support assembly 322: Second lock release assembly 323: second support body 324: second card parts 325: Second front side 326: Second rear side 327: Second support 328: Second front penetration space 329: Second front side 331: Second rear side 332: The second release body 333: Second release piece 334: The second release department 335: Second rear penetration space 336: second rod 337: Second scroll wheel 34: Second transport device 35: Second plate rack pick and place device 36: Second substrate pick and place device 37: Second plate rack recovery device 38: Second substrate recycling device 4: Plate rack recycling equipment 9: Substrate components 91: Plate rack 911: Frame 912: Fixture 913: On the pole 914: Lower shot 915: Left shot 916: right shot 92: substrate D1: length direction D2: height direction D3: width direction

本新型之其他的特徵及功效，將於參照圖式的實施方式中清楚地呈現，其中：圖1是本新型基板加工系統的一實施例的一側視示意圖；圖2是該實施例之一基板構件的一立體示意圖；圖3是該實施例之一第一基板裝卸設備的一立體示意圖；圖4是該實施例之一第一基板裝卸裝置的一分解示意圖；圖5是圖4的一局部放大示意圖；圖6是該實施例之一第二基板裝卸設備的一立體示意圖；圖7是該實施例之一第二基板裝卸裝置的一分解示意圖；及圖8至圖22是該實施例之該基板構件的加工流程示意圖。 Other features and functions of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: 1 is a schematic side view of an embodiment of the new substrate processing system of the present invention; 2 is a schematic perspective view of a substrate member of the embodiment; FIG. 3 is a schematic perspective view of the first substrate loading and unloading device in this embodiment; 4 is an exploded schematic view of the first substrate loading and unloading device of the embodiment; FIG. 5 is a partially enlarged schematic diagram of FIG. 4; FIG. 6 is a schematic perspective view of a second substrate loading and unloading device in this embodiment; 7 is an exploded schematic view of a second substrate loading and unloading device of this embodiment; and 8 to 22 are schematic views of the processing flow of the substrate member of the embodiment.

1:基板加工設備 1: substrate processing equipment

11:加工通道 11: Processing channel

111:入口端 111: entrance side

112:出口端 112: export end

12:移動裝置 12: Mobile device

2:第一基板裝卸設備 2: The first substrate loading and unloading equipment

22:第一基板裝卸裝置 22: The first substrate loading and unloading device

3:第二基板裝卸設備 3: second substrate handling equipment

32:第二基板裝卸裝置 32: second substrate loading and unloading device

4:板架回收設備 4: Plate rack recycling equipment

9:基板構件 9: Substrate components

D1:長度方向 D1: length direction

D2:高度方向 D2: height direction

Claims

A substrate loading and unloading device is suitable for combining or separating a substrate and a plate rack. The plate rack has a frame body and two fixing members provided on opposite sides of the frame body. The substrate loading and unloading device includes: A framework; and A substrate loading and unloading device, including A supporting assembly is arranged on the frame, and has a supporting body and a plurality of clamping parts. The supporting body extends along a height direction and has a front side and a rear side on opposite sides. The clamping parts Protruding from the front side away from the rear side, the clamping members are arranged in groups of two in a width direction and the two clamping members of each group are spaced apart in the height direction. The clamping members are suitable for The end of the frame body abuts, so that the plate frame is in a vertical state, and the fixing members are located between two adjacent clamping members, A lock release assembly is provided on the frame and located on the front side of the support body. The lock release assembly can move in a length direction relative to the support assembly, and has a lock release body and a plurality of lock release parts. The unlocking members extend from the unlocking body toward the supporting body, and the positions of the unlocking members correspond to the fixing members, and the unlocking members can switch between a pressed state and an unpressed state , In the pressed state, the unlocking pieces are pressed against the fixing pieces to expand the fixing pieces, so that the base plate can be moved into or from the plate rack in the vertical state along the length direction After the frame is removed, in the unpressed state, the locking members are spaced apart from the fixing members to close the fixing members.

The substrate loading and unloading apparatus according to claim 1, wherein the unlocking members are pressed against the fixing members in a line contact manner, respectively.

A substrate processing system is suitable for processing a substrate component. The substrate component includes a pallet and a substrate detachably arranged on the pallet. The pallet has a frame body and two The fixing member on the opposite side for holding the substrate, the substrate processing system includes: A substrate processing equipment with an inlet end and an outlet end on opposite sides; A first substrate loading and unloading device adjacent to the entrance end, the first substrate loading and unloading device includes A first frame, A first substrate loading and unloading device, having A first support assembly is disposed on the first frame, and has a first support body and a plurality of first clamping members, the first support body extends along a height direction and has a first facing the substrate processing equipment A front side, and a first rear side opposite to the first front side, the first clamping members protrude from the first front side away from the first rear side, the first clamping members Two groups of two are arranged along a width direction and two sets of first clamping members of each group are spaced in the height direction. The first clamping members are suitable for abutting the ends of the frame body so that the plate frame is vertical State, and the fixing parts are located between two adjacent clamping parts, A first unlocking assembly is disposed on the first frame and between the first supporting body and the substrate processing equipment, and the first unlocking assembly can move along a length direction relative to the first supporting assembly And has a first unlocking body and a plurality of first unlocking members, the first unlocking members extend from the first unlocking body toward the first supporting body, and the positions of the first unlocking members Corresponding to the fixing members respectively, the first release members can be switched between a first pressed state and a first unpressed state, and in the first pressed state, the first release members are pressed separately Against the fixing members to expand the fixing members, so that the substrate can be moved into or removed from the pallet in the vertical state along the length direction, and in the first unpressed state, the Wait for the first release member to separate the fixing members to close the fixing members; and A second substrate loading and unloading device adjacent to the outlet end, the second substrate loading and unloading device includes A second frame, A second substrate loading and unloading device, having A second supporting assembly is disposed on the second frame, and has a second supporting body and a plurality of second clamping members, the second supporting body extends along the height direction and has a device facing away from the substrate processing equipment The second front side, and a second rear side facing the substrate processing equipment, the second clamping parts project from the second front side away from the second rear side, the second clamping parts Two groups of two are arranged along the width direction and two second clamping members of each group are spaced apart in the height direction, and the second clamping members are suitable for abutting the ends of the frame body so that the plate frame is vertical State, and the fixing pieces are located between two adjacent clamping pieces, A second unlocking assembly is disposed on the second frame and is located on one side of the second front side. The second unlocking assembly can move relative to the second support assembly in the length direction and has a A second unlocking body and a plurality of second unlocking members, the second unlocking members extend from the second unlocking body toward the second supporting body, and the positions of the second unlocking members correspond to the A fixing member, the second release members can be switched between a second pressed state and a second unpressed state, and in the second pressed state, the second release members are pressed against the The fixing member is used to expand the fixing members, so that the substrate can be moved into or removed from the pallet in the vertical direction along the length direction. In the second unpressed state, the second release The lock members are spaced apart from the fixing members to close the fixing members.

The substrate processing system according to claim 3, wherein the first locking pieces and the second locking pieces are pressed against the fixing pieces in line contact.

The substrate processing system according to claim 3, wherein the first substrate loading and unloading device further includes a first transport device connecting the substrate processing device and the first substrate loading and unloading device, the first transport device is used to transfer the substrate The components are transported from the first substrate loading and unloading device to the substrate processing equipment; the second substrate loading and unloading equipment further includes a second transport device connecting the substrate processing equipment and the second substrate loading and unloading device. The substrate member is transported from the substrate processing equipment to the second substrate loading and unloading device.

The substrate processing system according to claim 3, wherein the first support body has two first support portions spaced apart in the width direction, and the first support portions define a space through which the plate frame can extend A first rear penetrating space, the first clamping pieces are arranged in groups of the first support parts in groups of two; the first substrate loading and unloading equipment also includes a first plate rack mounted on the first frame Device, the first pallet pick-and-place device is used to clamp the pallet and move through the first rear penetration space to a position where the pallet is fixed to the first clamping members.

The substrate processing system according to claim 6, wherein the first release body has two first release parts spaced along the width direction and respectively corresponding to the first support parts, and the first The unlocking part defines a first front penetrating space through which the substrate can extend, the first unlocking parts are respectively disposed on the first unlocking parts and the positions correspond to the fixing parts, respectively; the first substrate The loading and unloading device further includes a first substrate pick-and-place device disposed on the first frame, and the first substrate pick-and-place device is used to clamp the substrate and move the substrate through the first front penetration space to position the substrate Inside the shelf.

The substrate processing system according to claim 3, wherein the second release body has two second release parts spaced along the width direction and corresponding to the second support parts, respectively, and the second The unlocking portion defines a second rear extending space through which the substrate can extend, the second unlocking members are respectively disposed on the second unlocking portions and the positions correspond to the fixing members, respectively; the second substrate The loading and unloading equipment also includes a second pallet pick-and-place device disposed on the second frame, the second pallet pick-and-place device is located on the bottom side of the second substrate loading and unloading device, and the second pallet pick-and-place device is used for clamping Hold the board frame and move to a position away from the second clamping members through the second rear penetration space.

The substrate processing system according to claim 8, wherein the second support body has two second support portions spaced apart in the width direction, and the second support portions define a space through which the pallet can extend A second front penetrating space, the second clamping members are respectively arranged in groups on the second supporting parts; the second substrate loading and unloading device further includes a second substrate pick-and-place device arranged on the second frame The second substrate pick-and-place device is used to clamp the substrate and remove the substrate from the pallet, and then move away from the second substrate loading and unloading device through the second front penetration space.

The substrate processing system according to claim 3, further comprising a plate rack recovery device disposed on the bottom side of the substrate processing device and having two opposite ends respectively adjacent to the first substrate loading and unloading device and the second substrate loading and unloading device, the board The rack recovery equipment is used to transport the board rack placed in the second substrate loading and unloading equipment to the first substrate loading and unloading equipment.